PLASMA & MATERIALS TECHNOLOGIES, INC.
 
                 EXHIBIT 23.1--CONSENT OF INDEPENDENT AUDITORS
 
  We consent to the incorporation by reference, in the Registration Statement
(Form S-8 No. 33-94450) pertaining to the 1991 Stock Option Plan of Plasma &
Materials Technologies, Inc., of our report dated January 30, 1996, with
respect to the consolidated financial statements included in the Annual Report
on Form 10-K of Plasma & Materials Technologies, Inc. for the year ended
December 31, 1995.
 
                                          ERNST & YOUNG LLP
 
Woodland Hills, California
March 27, 1996