CONFIDENTIAL TREATMENT PREVIOUSLY GRANTED TECHNOLOGY PURCHASE AGREEMENT THIS AGREEMENT, made and entered into this 31st day of July, 1995, by and between ALBEMARLE CORPORATION, a Virginia corporation having an office at 451 Florida Street, Baton Rouge, Louisiana 70801 (hereinafter "ALBEMARLE"), and MEMC ELECTRONIC MATERIALS, INC., a Delaware corporation having offices at 501 Pearl Drive (City of O'Fallon), P. O. Box 8, St. Peters, Missouri, 63376 (hereinafter "MEMC"): WITNESSETH WHEREAS, ALBEMARLE has entered into an Asset Purchase Agreement to transfer certain assets relating to the manufacture, use and sale of polysilicon and other electronic materials; WHEREAS, the Asset Purchase Agreement provides in Section 3.1 that ALBEMARLE will assign technology and patent rights relating to the manufacture of silane and silicon tetrafluoride; NOW, THEREFORE, for and in consideration of the mutual covenants and agreements hereinafter set forth, the parties agree as follows: ARTICLE 1 - DEFINITIONS 1.01 "Affiliate" shall have the same meaning as set forth in the Asset Purchase Agreement. 1.02 "Closing Date" shall have the same meaning as set forth in the Asset Purchase Agreement. 1.03 "Deemed Quantity" shall have the meaning set forth in Section 2.03(a) of the Seller Technology License Agreement. 1.04 "Licensed Silane" means silane which is made by or with the use of, or is used in accordance with an invention defined by one or more claims of the Silane Patent Rights or is made using the Silane Manufacturing Technology. 1.05 "MEMC Pasadena" shall mean MEMC Pasadena Inc., a Delaware corporation having offices at 3000 N. South Street, Pasadena, Texas, 77503. 1.06 "Polysilicon Manufacturing Technology" shall have the same meaning as set forth in the Seller Technology License Agreement. 1.07 "Polysilicon Patent Rights" shall have the same meaning as set forth in the Seller Technology License Agreement. 1.08 "Polysilicon Plant" shall have the same meaning as set forth in the Seller Technology License Agreement. 1.09 "Silane Benchmark" shall mean [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons of silane unless the combined capacity of the Polysilicon Plant and any other polysilicon plant in connection with which ALBEMARLE has been notified pursuant to Section 2.03 of the Seller Technology License Agreement exceeds [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons of polysilicon per year, in which event the "Silane Benchmark" shall mean the multiplication product of the combined capacity of such plants and 1.5. For purposes of illustration, if the combined capacity of such plants is [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons, the Silane Benchmark shall be [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons of silane [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC]. 1.10 "Silane Manufacturing Technology" means all processes, trade secrets, inventions, discoveries, improvements, know-how, and manufacturing, engineering, research, development, and testing information and other technical information, whether or not patentable, developed, used, currently in use, or currently planned for use by ALBEMARLE in manufacturing silane by reacting sodium aluminum hydride (NaA1H4) with silicon tetrafluoride (SiF4). The Silane Manufacturing Technology shall not include information received by ALBEMARLE from third parties under the secrecy agreements identified in Schedule I-A (attached to Exhibit I - Seller Technology License Agreement) unless authorized by such agreements or such agreements are assigned to MEMC. 1.11 "Silicon Tetrafluoride Manufacturing Technology" means all processes, trade secrets, inventions, discoveries, improvements, know-how, and manufacturing, engineering, research, development, and testing information and other technical information, whether or not patentable, developed, used, currently in use, or currently planned for use in manufacturing silicon tetrafluoride (SiF4) at the facility in Uncle Sam, Louisiana, to the extent owned by ALBEMARLE, which is prepared by reacting fluorosilicic acid (H2SiF6) with sulfuric acid. The Silicon Tetrafluoride Manufacturing Technology shall not include information received by ALBEMARLE from third parties under the secrecy agreements identified in Schedule I-A (attached to Exhibit I - Seller Technology License Agreement) unless disclosure to MEMC is authorized by such agreements or such agreements are assigned to MEMC. 1.12 "Silane Patent Rights" means the patents listed in Schedule PAT-1 attached hereto and made a part hereof, including all continuations and continuation-in-part patents, divisionals, reissues and reexamined patents derived from those listed. 1.13 "Sodium Aluminum Hydride Manufacturing Technology" shall have the same meaning as set forth in the Seller Technology License Agreement. 1.14 "Sodium Aluminum Hydride Patent Rights" shall have the same meaning as set forth in the Seller Technology License Agreement. 1.15 "Security Agreement" shall have the same meaning as in the Asset Purchase Agreement. 1.16 "Event of Default" shall have the same meaning as in the Security Agreement. ARTICLE 2 - ASSIGNMENT 2.01 ALBEMARLE, for valuable consideration, the receipt of which is hereby acknowledged, does hereby sell, assign, transfer, convey and set over unto MEMC its entire right, title and interest in and to the Silane Manufacturing Technology and Silicon Tetrafluoride Manufacturing Technology, together with any rights of action for unauthorized use of the Silane Manufacturing Technology and Silicon Tetrafluoride Technology occurring on or after the Closing Date, the same to be held and enjoyed by MEMC for its own use and behalf, and for the use and behalf of its successors, assigns or other legal representatives. If an Event of Default occurs and is continuing, ALBEMARLE shall have the right to terminate and revoke all rights granted pursuant to this Section 2.01 upon written notice to MEMC and MEMC Pasadena and, in such event, MEMC and MEMC Pasadena shall cease any further use of the technology and patent rights assigned under this Section 2.01 and shall, at the request of ALBEMARLE, convey their rights in such technology and patent rights back to ALBEMARLE and shall execute such documents as may be necessary to record the reconveyed rights, any expenses connected with such reconveyance and recording to be borne by ALBEMARLE. 2.02 ALBEMARLE, for valuable consideration, the receipt of which is hereby acknowledged, does hereby sell, assign, transfer and set over unto MEMC the entire right, title and interest in and to the Silane Patent Rights, the same to be held and enjoyed by MEMC for its own use and behalf, and for the use and behalf of its successors, assigns, or other legal representatives, to the end of the terms thereof, together with all claims for profits and damages by reason of infringement of said Patents occurring on or after the Closing Date, including the right to sue for and collect the same for its own use and behalf, and for the use and behalf of its successors, assigns, or other legal representatives. To enable MEMC to record its interest therein, ALBEMARLE shall additionally execute the recordable assignment which is attached hereto as Schedule R-A and other recordable forms of the Assignment as MEMC may reasonably request. If an Event of Default occurs and is continuing, ALBEMARLE shall have the right to terminate and revoke all rights granted pursuant to this Section 2.02 upon written notice to MEMC and MEMC Pasadena and, in such event, MEMC and MEMC Pasadena shall cease any further use of the technology and patent rights assigned under this Section 2.02 and shall, at the request of ALBEMARLE, convey their rights in such technology and patent rights back to ALBEMARLE and shall execute such documents as may be necessary to record the reconveyance rights, any expenses connected with such reconveyance and recording to be borne by ALBEMARLE. 2.03 This Assignment does not include rights of action for unauthorized use of the Silane Manufacturing Technology, Silicon Tetrafluoride Manufacturing Technology and Silane Patent Rights occurring prior to the Closing Date which rights are retained by the assignor hereunder. 2.04 ALBEMARLE makes no representations or warranties with respect to technology and patent rights assigned hereunder other than the representations and warranties set forth in Section 4.28 of the Asset Purchase Agreement. 2.05 MEMC agrees to provide ALBEMARLE with prompt notice in writing prior to or upon taking any of the following actions: (a) in any calendar year producing more than [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons of silane in the Polysilicon Plant (notice being required in each such year when production exceeds such quantity unless the capacity of the plant was expanded and for which notice was given pursuant to subpart (c) of this section 2.05), (b) granting any right to a third party to use the Silane Manufacturing Technology, Silicon Tetrafluoride Manufacturing Technology and Silane Patent Rights to manufacture silane, or (c) expanding the capacity of the Polysilicon Plant beyond that required to produce [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC] metric tons of silane, or building a new silane plant to manufacture silane using the Silane Patent Rights or the Silane Manufacturing Technology. 2.06 In partial consideration for the rights granted herein, for each kilogram of Licensed Silane which is manufactured in a calendar year at the Polysilicon Plant or another plant owned by MEMC, MEMC PASADENA or an Affiliate, successor, licensee or assign of any of them in excess of the Silane Benchmark and which is sold or otherwise transferred by any of them during the fifteen (15) year period immediately following the Closing Date, Albemarle shall receive a royalty of [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC]. The obligation to pay royalties to Albemarle pursuant to this Section 2.06 shall terminate fifteen years from the Closing Date. All royalties due Albemarle pursuant to this Section 2.06 shall be paid to Albemarle within thirty (30) days following the close of the calendar quarter in which the sale of the royalty-bearing product occurred. 2.07 If at any one or more times MEMC or MEMC PASADENA (or either of their Affiliate(s), successor(s), licensee(s) or assign(s)) transfers any of the Silane Patent Rights, Silane Manufacturing Technology or Silicon Tetrafluoride Manufacturing Technology by way of license, sale or otherwise, to any third party within fifteen years of the Closing Date, then ALBEMARLE shall be paid by MEMC for each such transaction the cash equivalent of one-half of any value (whether such value is in terms of cash compensation, supply or barter of product or technology, cross licensing of technology or any other value of any kind) received by or to be received by MEMC or MEMC PASADENA (or either of their Affiliate(s), successor(s), licensee(s) or assign(s)) within fifteen years of the Closing Date for the transfer or the licensing of such patent rights or technology, such one-half share (in its cash equivalent) to be paid to ALBEMARLE within thirty (30) days from the receipt by MEMC or MEMC PASADENA (or either of their Affiliate(s), successor(s), licensee(s) or assign(s)) of such cash or such other value (whether such value is in terms of supply or barter of product or technology, cross licensing of technology or any other value of any kind). Notwithstanding the foregoing, in the event such a third party pays value for such a transfer of rights, some of which is paid within fifteen years and some of which is paid more than fifteen years after the Closing Date, ALBEMARLE and MEMC shall, upon the request of either party, negotiate in good faith such that ALBEMARLE and MEMC shall receive a fair and equitable portion (in cash equivalent) of the value paid, taking into account the extent to which the timing of the value paid by the third party corresponds to the timing of the value received by the third party. In conducting such negotiations, the parties shall use in their consideration the premise that ALBEMARLE is 50% owner of the Silane Patent Rights, Silane Manufacturing Technology and Silicon Tetrafluoride Manufacturing Technology and that it is contemplated by ALBEMARLE and MEMC that the Polysilicon Patent Rights, Polysilicon Manufacturing Technology, Sodium Aluminum Hydride Patent Rights, Sodium Aluminum Hydride Manufacturing Technology, Silane Patent Rights, Silane Manufacturing Technology and Silicon Tetrafluoride Manufacturing Technology were valued, as of the Closing Date, [CONFIDENTIAL MATERIAL HAS BEEN DELETED AND FILED SEPARATELY WITH SEC]. MEMC and ALBEMARLE agree to use such contemplated value as a basis for their negotiations, provided, however, that if ALBEMARLE or MEMC can demonstrate in good faith that such contemplated value is not the actual value at the time of such negotiations, then that party may address that issue as part of the negotiations. Failing agreement upon a mutually acceptable portion to be paid to ALBEMARLE, then MEMC and ALBEMARLE shall submit the matter to arbitration in accordance with the provisions of Section 4.04. ARTICLE 3 - NOTICES Any notice provided for herein to be given in writing shall be by registered or certified mail addressed or by facsimile to the respective parties at their addresses set forth below or at such other address or addresses as such parties may from time to time designate in written notice to the other: ALBEMARLE: Albemarle Corporation 451 Florida Street Baton Rouge, Louisiana 70801 Attention: Law Department MEMC: MEMC Electronic Materials, Inc. 501 Pearl Drive (City of O'Fallon) Post Office Box 8 St. Peters, Missouri 63376 Phone: (314) 279-5000 Facsimile: (314) 279-5158 Attention: Vice President, Technology ARTICLE 4 - GENERAL 4.01 This Agreement, the Seller Technology License Agreement, the Asset Purchase Agreement and the MEMC Technology License Agreement set forth the entire agreement and understanding of the parties with respect to the subject matter hereof. No representation, promise, inducement or statement of intention relating to the subject matter contemplated by this Agreement has been made by any party which is not set forth in this Agreement or in the documents referred to herein. 4.02 This Agreement may be amended, superseded or canceled only by a writing specifically referring to this Agreement and signed by the duly authorized representative of both parties. 4.03 This Agreement shall be governed by the law of the State of Texas, excluding the conflicts of laws provisions thereof to the extent such laws would dictate application of the laws of another jurisdiction. 4.04 For any matter which is designated in this Agreement as being subject to arbitration, the parties shall, unless agreed otherwise, submit any disputes for settlement and determination by arbitration under the then-current Commercial Arbitration rules of the American Arbitration Association. The panel for such arbitration shall consist of three (3) arbitrators, each of whom shall be attorneys with at least ten (10) years of experience before the Bar of any state in commercial matters. The arbitration shall be held in Houston, Texas. The costs and expenses of the arbitration shall be shared as determined by the arbitration panel. Discovery will be allowed both parties before the arbitration hearing in accord with the Federal Rules of Civil Procedure and the hearing shall be conducted consistent with the Federal Rules of Evidence. The decision and award of the panel shall be in writing with reasons provided and shall be final and binding. The award so rendered may be entered in any court having jurisdiction thereof for confirmation and enforcement. 4.05 Each party agrees to execute or cause to be executed any documents reasonably required to grant or otherwise perfect the rights purported to be granted herein, provided, however, that neither party shall be required by this section to enter into any transaction with a third party. Any out-of-pocket expenses incurred under this Section shall be reimbursed by the party requesting such services. IN TESTIMONY WHEREOF, MEMC and ALBEMARLE have caused this instrument to be signed by their duly authorized representatives, and ALBEMARLE has caused its corporate seal to be hereto affixed on the date first written above. ALBEMARLE CORPORATION By: /s/ Thomas Avant ---------------------------------------- Title: Senior Vice President, Finance MEMC ELECTRONIC MATERIALS, INC. By: /s/ John DeLuca ---------------------------------------- Title: Corporate Vice President Schedule 1-A Name Type Ahmet Baysar Secrecy - Production high purity silicon in fluidized bed using microwaves M. P. Dudukovic Consulting/Secrecy - Field of chemical engineering; discussions re fluid bed model for silane decomposition M. P. Dudukovic Consulting - Multiphase reactors M. P. Dudukovic Consulting - Silicon Crystal Pulling M. P. Dudukovic Consulting/Secrecy - Field of chemical engineering; discussions re fluid bed model for silane decomposition Donald C. Freshwater Consulting/Secrecy - manufacturing poly- silicon L. J. Giling Consulting - semiconductor materials L. J. Giling Consulting - semiconductor materials L. J. Giling Consulting - one year extension re MOCVD agreement L. J. Giling Consulting - semiconductor materials and MOCVD L. J. Giling Consulting - metal organic chemical vapor deposition (MOCVD) of III-V compounds James L. Kuester Secrecy - Production high purity silicon in fluidized bed using microwaves F. F. Lange Consulting - polysilicon and silicon carbide ceramics David C. Look Consulting - semiconductor materials Robert C. Wright Secrecy - covering consultations re Ethyl's polysilicon project Frederick A. Zenz Consulting - Polysilicon manufacturing Schedule PAT -1 Silane Patent Rights Case Appn. Filing Patent Issue Number Country Status Number Date Number Date - --------------------------------------------------------------------------------------------------------- EM-4978 USA Issued 353,491 03/01/82 4,395,389 07/26/83 EM-4978+ Italy Granted 19839A/83 03/01/83 1,161,630 03/18/87 EM-4978+ Taiwan Granted 7,210,785 03/16/83 NI-20745 10/13/84 EM-4978+ Japan Granted 501471/83 02/28/83 1585827 10/31/90 EM-4978+ Gerwe Granted P3334297.0 02/28/83 3334297 11/30/89 EM-5155 USA Issued 566,279 12/28/83 4,532,120 07/30/85 EM-5155 Canad Granted 479,345 04/17/85 1,224,013 07/14/87 EM-5155 Japan Granted 141426/85 06/28/85 1,531,608 11/24/89 EM-5155 EPO Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Austr Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Belgm Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Franc Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Gerwe Granted 85-302974.2 04/26/85 P3668323.6 02/22/89 EM-5155 Italy Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Lxmb Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Holln Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Swedn Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Switz Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5155 Unikn Granted 85-302974.2 04/26/85 0198971 02/22/89 EM-5340 USA Issued 609,812 05/14/84 4,554,141 11/19/85 EM-5128-A USA Issued 701,947 02/15/85 4,632,816 12/30/86 EM-5128 Canad Granted 443,087 12/12/83 1,225,230 08/11/87 EM-5128 Taiwn Granted 72-14531 12/29/83 NI-24699 07/31/86 EM-5128 EPO Granted 83-307568.2 12/13/83 0112151 01/20/88 EM-5128 Japan Granted 500492/84 12/12/83 1,518,057 09/07/89 EM-5128 Franc Granted 83-307568.2 12/13/83 0112151 01/20/88 EM-5128 Gerwe Granted 83-307568.2 12/13/83 P3375386.5 01/20/88 EM-5128 Italy Granted 83-307568.2 12/13/83 0112151 01/20/88 EM-5128 Holln Granted 83-307568.2 12/13/83 0112151 01/20/88 EM-5128 Unikn Granted 83-307568.2 12/13/83 0112151 01/20/88 EM-5563 USA Issued 075,367 07/20/87 4,847,061 07/11/89 EM-5563 Canad Granted 572,426 07/19/88 1,303,817 06/23/92 EM-5563 Japan Published 178294/88 07/19/88 EM-5563 Korso Published 9081/1988 07/20/88 EM-5563 Taiwn Granted 77105191 07/28/88 NI49794 11/25/92 EM-5563 EPO Granted 88-111068.8 07/11/88 0300320 10/06/93 EM-5563 Belgm Granted 88-111068.8 07/11/88 0300320 10/06/93 EM-5563 Franc Granted 88-111068.8 07/11/88 0300320 10/06/93 EM-5563 Gerwe Granted 88-111068.8 07/11/88 P3884702.7 10/06/93 EM-5563 Italy Granted 88-111068.8 07/11/88 0300320 10/06/93 EM-5563 Unikn Granted 88-111068.8 07/11/88 0300320 10/06/93 EM-5563-A USA Issued 296,484 01/12/89 5,075,092 12/24/91 EM-5563-A Canad Pending 2,007,271 01/05/90 EM-5563-A Japan Published 2660/90 01/11/90 EM-5563-A Korso Published 90-283 01/11/90 EM-5563-A Taiwn Granted 79100909 02/07/90 NI48341 06/01/91 EM-5563-A EPO Granted 89-124115.0 12/28/89 0377900 06/30/93 EM-5563-A Franc Granted 89-124115.0 12/28/89 0377900 06/30/93 EM-5563-A Gerwe Granted 89-124115.0 12/28/89 P68907401 06/30/92 EM-5563-A Italy Granted 89-124115.0 12/28/89 0377900 06/30/93 EM-5563-A Unikn Granted 89-124115.0 12/28/89 0377900 06/30/93 EM-6158-A USA Issued 723,785 07/01/91 5,206,004 04/27/93 EM-6517 USA Issued 859,146 03/27/92 5,211,931 05/18/93 EM-6517 Japan Pending 517442/93 11/22/93 EM-6157-A USA Issued 873,461 04/24/92 5,290,342 03/01/94