Exhibit 23.1

                          INDEPENDENT AUDITORS' CONSENT

         We consent  to the  incorporation  by  reference  in this  Registration
Statement of Nanometrics  Incorporated  on Form S-8 of our report dated February
15,  2000,   appearing  in  the  Annual  Report  on  Form  10-K  of  Nanometrics
Incorporated for the year ended December 31, 1999.

/s/ DELOITTE & TOUCHE LLP
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DELOITTE & TOUCHE LLP

San Jose, California
July 5, 2000