EXHIBIT 23.1


                          INDEPENDENT AUDITORS' CONSENT

We consent to the  incorporation  by reference in  Registration  Statement  Nos.
33-8518,  33-43913,  333-33583 and 333-40866 of Nanometrics Incorporated on Form
S-8 of our report dated  February 15, 2001,  appearing in this Annual  Report on
Form 10-K of Nanometrics Incorporated for the year ended December 31, 2000.


Deloitte & Touche LLP
San Jose, California
March 27, 2001