SCHEDULE 14A
                                 (Rule 14a-101)
                     INFORMATION REQUIRED IN PROXY STATEMENT
                            SCHEDULE 14A INFORMATION

      PROXY STATEMENT PURSUANT TO SECTION 14(A) OF THE SECURITIES EXCHANGE
                         ACT OF 1934 (AMENDMENT NO. __)

     Filed by the Registrant                           [X]
     Filed by a party other than the Registrant        [ ]

     Check the appropriate box:

     [ ] Preliminary Proxy Statement                   [X] Definitive Proxy
                                                            Statement

     [ ] Confidential, for Use of the Commission Only  [ ] Definitive Additional
         (as permitted by Rule 14a-6(e)(2))                    Materials

     [ ] Soliciting Material Pursuant to Rule 14a-11(c) or Rule 14a-12


                                   NANOMETRICS
           ----------------------------------------------------------
                (Name of Registrant as Specified in Its Charter)

           ----------------------------------------------------------
     (Name of Person(s) Filing Proxy Statement, if other than the Registrant)

     Payment of filing fee (Check the appropriate box):

     [X] No fee required.

     [ ] Fee computed on table below per Exchange Act Rules 14a-6(i)(4)and 0-11.

(1) Title of each class of securities to which transactions  applies:
(2) Aggregate number of securities to which transactions applies:
(3) Per unit price or other underlying value of transaction computed pursuant to
Exchange  Act Rule  0-11  (set  forth the  amount  on which  the  filing  fee is
calculated  and state how it was  determined):
(4) Proposed  maximum  aggregate value of transaction:
(5) Total fee paid:
     [ ] Fee paid previously with preliminary materials.
     [ ] Check box if any part of the fee is offset as  provided by Exchange
Act Rule  0-11(a)(2)  and identify the filing for which the  offsetting  fee was
paid previously.  Identify the previous filing by registration statement number,
or the Form or Schedule and the date of its filing.
(1) Amount previously paid:
(2) Form, Schedule or Registration Statement No.:
(3) Filing party:
(4) Date filed:





                            NANOMETRICS INCORPORATED

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS

TO THE SHAREHOLDERS:

         NOTICE IS HEREBY  GIVEN that the  Annual  Meeting  of  Shareholders  of
Nanometrics Incorporated, a California corporation (the "Company"), will be held
on Wednesday, May 16, 2001 at 1:30 p.m., local time, at the principal offices of
the Company located at 1550 Buckeye Drive,  Milpitas,  California 95035, for the
following purposes:

    1. To  elect  six  directors  to serve  until  the next  annual  meeting  of
    shareholders or until their successors are elected.

    2. To  ratify  the  appointment  of  Deloitte  & Touche  LLP as  independent
    auditors of the Company for the fiscal year ending December 31, 2001.

    3. To transact  such other  business as may properly come before the meeting
    or any adjournment thereof.

    The  foregoing  items of  business  are more  fully  described  in the Proxy
Statement accompanying this Notice.

    Only  shareholders  of record at the close of  business on April 2, 2001 are
entitled to notice of and to vote at the meeting and any adjournment thereof.

    All  shareholders  are  cordially  invited to attend the  meeting in person.
However,  to ensure your  representation at the meeting,  you are urged to mark,
sign,  date and return the  enclosed  proxy card as  promptly as possible in the
postage-prepaid  envelope enclosed for that purpose.  Any shareholder  attending
the meeting may vote in person even if such shareholder returned a proxy.

                                   Sincerely,


                                   Vincent J. Coates
                                   Secretary


Milpitas, California
April 18, 2001


                                      -2-



                            NANOMETRICS INCORPORATED

                                 PROXY STATEMENT

                 INFORMATION CONCERNING SOLICITATION AND VOTING

General

    The  enclosed  proxy is  solicited  on behalf of the Board of  Directors  of
Nanometrics  Incorporated  (the  "Company")  for use at the Annual  Meeting (the
"Annual  Meeting") of Shareholders  of the Company to be held on Wednesday,  May
16,  2001 at 1:30 p.m.,  local  time,  or at any  adjournment  thereof,  for the
purposes set forth herein and in the  accompanying  Notice of Annual  Meeting of
Shareholders.  The Annual  Meeting will be held at the principal  offices of the
Company located at 1550 Buckeye Drive, Milpitas, California 95035. The Company's
telephone number at that address is (408) 435-9600.


    These proxy solicitation materials were mailed on or about April 18, 2001 to
all shareholders  entitled to vote at the meeting.  A copy of the Company's 2000
Annual Report on Form 10-K accompanies this Proxy Statement.

Record Date and Shares Outstanding

    Shareholders  of  record  at the  close of  business  on April 2,  2001 (the
"Record  Date") are  entitled  to notice of and to vote at the  meeting.  At the
Record Date, 11,629,653 shares of the Company's Common Stock, no par value, were
issued  and  outstanding.  For  information  concerning  security  ownership  of
management and beneficial  owners of more than 5% of the Company's Common Stock,
see "Security Ownership of Management and Certain Beneficial Owners" below.

Revocability of Proxies

    Any proxy given pursuant to this  solicitation  may be revoked by the person
giving it at any time  before  its use by  delivering  to the  Secretary  of the
Company a written  notice of revocation or a duly executed proxy bearing a later
date or by attending the meeting and voting in person.

Voting and Solicitation

    The  candidates  receiving  the six  highest  vote totals will be elected to
serve as directors.  Every shareholder  voting for the election of directors may
(i) cumulate such  shareholder's  votes and give one candidate a number of votes
equal to the  number of  directors  to be  elected  multiplied  by the number of
shares  that he holds or (ii)  distribute  the  shareholder's  votes on the same
principle among as many candidates as the shareholder may select,  provided that
votes cannot be cast for more than six candidates. However, no shareholder shall
be entitled to cumulate votes for a candidate  unless the  candidate's  name has
been placed in nomination prior to the voting and the shareholder,  or any other
shareholder,  has  given  notice  at the  meeting  prior  to the  voting  of the
intention to cumulate the shareholder's votes. On all other matters,  each share
of Common Stock outstanding has one vote.

    The cost of this solicitation will be borne by the Company. In addition, the
Company may reimburse brokerage firms and other persons representing  beneficial
owners of shares for their expenses in forwarding  solicitation material to such
beneficial  owners.  Proxies may also be solicited  by certain of the  Company's
directors,  officers and regular  employees,  without  additional  compensation,
personally or by telephone.


                                      -3-



Quorum; Abstentions: Broker Non-votes

         The  required  quorum for the  transaction  of  business  at the Annual
Meeting is a majority of the shares of Common  Stock issued and  outstanding  on
the Record  Date.  Shares that are voted "FOR,"  "AGAINST" or "WITHHELD  FROM" a
matter are treated as being present at the meeting for purposes of  establishing
a quorum and are also treated as shares  "represented  and voting" at the Annual
Meeting ("Votes Cast") with respect to such matter.

         While  there  is no  definitive  statutory  or case  law  authority  in
California as to the proper treatment of abstentions,  the Company believes that
abstentions  should be counted for purposes of determining both (i) the presence
or absence of a quorum for the transaction of business and (ii) the total number
of Votes  Cast  with  respect  to a  proposal.  In the  absence  of  controlling
precedent to the  contrary,  the Company  intends to treat  abstentions  in this
manner.  Accordingly,  abstentions will have the same effect as a vote against a
proposal.

         Broker  non-votes  will be counted  for  purposes  of  determining  the
presence or absence of a quorum for the transaction of business, but will not be
counted for purposes of  determining  the number of Votes Cast with respect to a
proposal.

Deadline for Receipt of Shareholder Proposals

         The  attached  proxy  card  grants  the  proxy  holders   discretionary
authority to vote on any matter raised at the 2001 Annual Meeting.  Proposals of
shareholders  of  the  Company  which  are  intended  to be  presented  by  such
shareholders  at the  Company's  2002  Annual  Meeting  must be  received by the
Company no later than  December  16,  2001 in order that they may be included in
the proxy statement and form of proxy relating to that meeting.

         If a  shareholder  intends  to  submit a  proposal  at the 2002  Annual
Meeting that is not eligible for inclusion in the proxy statement and proxy, the
shareholder must do so no later than March 13, 2002. If such a shareholder fails
to comply with the foregoing notice provision, the proxy holders will be allowed
to use their  discretionary  authority  when the  proposal is raised at the 2002
Annual Meeting.


                                      -4-



                                 PROPOSAL NO. 1

                              ELECTION OF DIRECTORS

Nominees

         A board of six directors is to be elected at the Annual Meeting,  which
will leave one  vacancy on the board.  Unless  otherwise  instructed,  the proxy
holders will vote the proxies  received by them for the  Company's  six nominees
named below,  all of whom are presently  directors of the Company.  In the event
that any  nominee of the Company is unable or declines to serve as a director at
the time of the Annual  Meeting,  the proxies  will be voted for any nominee who
shall be designated  by the present Board of Directors to fill the vacancy.  The
proxy holders  intend to vote all proxies  received by them in such a manner and
in accordance with  cumulative  voting as will ensure the election of as many of
the nominees listed below as possible and, in such event, the specific  nominees
to be voted for will be  determined  by the proxy  holders.  The  Company is not
aware of any nominee who will be unable or will  decline to serve as a director.
The term of office of each person  elected as a director will continue until the
next Annual Meeting of Shareholders or until such director's  successor has been
elected and qualified.

         The names of the  nominees and certain  information  about them are set
forth below:
                                                           Director
                     Name of Nominee                 Age    Since
      --------------------------------------------- ------ --------
      Vincent J. Coates............................   76    1975
      Nathaniel Brenner............................   75    1986
      Norman V. Coates.............................   51    1988
      John D. Heaton...............................   41    1995
      William G. Oldham............................   62    2000
      Edmond R. Ward...............................   61    1999

         Vincent J. Coates has been  Chairman of the Board since the Company was
founded in 1975.  He has also served as Chief  Executive  Officer  through April
1998 and  President  from the founding  through May 1996,  except for the period
January 1986 through February 1987 when he served exclusively as Chief Executive
Officer.  He was elected  Secretary in February 1989. Prior to his employment at
Nanometrics,  Mr. Coates co-founded Coates and Welter Instrument Corporation,  a
designer of electron  microscopes,  which company was  subsequently  acquired by
Nanometrics.  Mr.  Coates also spent over twenty years  working in  engineering,
sales and international operations for the Perkin-Elmer Corporation. In 1995, he
received  an award  which  recognized  his  contribution  to the  industry  from
Semiconductor  and  Equipment  and Materials  International,  an industry  trade
organization.

         Nathaniel  Brenner has served as a director  of the Company  since June
1986. He joined Beckman Instruments, Inc. in 1976 where he held the positions of
Program   Manager,   Marketing   Manager   (Instruments)   and  General  Manager
(Spectroscopy). In 1992, Mr. Brenner retired from Beckman Instruments, Inc.

         Norman V.  Coates  has served as a director  of the  Company  since May
1988. He has operated Gem of the River  Produce,  a farming and produce  packing
operation in Orleans,  California,  as a sole proprietor since 1978. He has also
been  manager  of the Boise  Creek  Farm  operation  since 1985 and a manager of
Coates Vineyard since 1997.


                                      -5-



         John D. Heaton  joined the Company in September  1990 and in April 1994
he was elected Vice President of Engineering and General Manager.  In July 1995,
he was  appointed  to the  Board  of  Directors.  In May  1996,  he was  elected
President  and Chief  Operating  Officer.  In April 1998,  he was elected  Chief
Executive Officer.  Mr. Heaton served in various technical positions at National
Semiconductor from 1978 to 1990 prior to joining the Company.

         William G. Oldham has served as a director  of the  Company  since June
2000.  Since 1964,  Mr.  Oldham has been a faculty  member at the  University of
California, Berkeley, where he researches EUV and Maskless Lithography and since
1996,  has been the  Director of the  DARPA/SRC  Research  Network for  Advanced
Lithography.  He has served as a  consultant  in various  intellectual  property
matters and serves on the board of directors of Cymer, Inc.

         Edmond R. Ward has served as a director of the Company since June 1999.
Since August 1999, Mr. Ward has been a General Partner of Virtual Founders. From
April  1992 to June 1997,  Mr.  Ward was the Vice  President  of  Technology  at
Silicon Valley Group, Inc.

         Vincent J. Coates is the father of Norman V. Coates.  There is no other
family  relationship  between any of the foregoing  nominees or between any such
nominees and any of the executive officers of the Company.

         THE BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS  THAT THE  SHAREHOLDERS
VOTE "FOR" THE NOMINEES SET FORTH HEREIN.


                                      -6-



Security Ownership of Management and Certain Beneficial Owners

         The following table sets forth beneficial  ownership of Common Stock of
the Company as of December 31, 2000, by each director or nominee, by each of the
Named  Officers (as defined  below),  by all directors  and Named  Officers as a
group,  and by all persons known to the Company to be the  beneficial  owners of
more than 5% of the  Company's  Common  Stock.  Unless  otherwise  indicated the
address of each  beneficial  owner of 5% of the  Company's  Common Stock is 1550
Buckeye Drive, Milpitas, California 95035.

                                                                       Number of Shares of
                                                                          Common Stock
                 Name of Beneficial Owner                              Beneficially Owned (1)     Percent of Total
- -----------------------------------------------------------------     -----------------------     ----------------
                                                                                                  
Vincent J. Coates (2)............................................           3,376,274                   29.1%
Capital Group International, Inc. (3)............................           1,585,900                   13.7%
11100 Santa Monica Blvd.
Los Angeles, CA  90025
Franklin Resource, Inc (4).......................................             675,000                    5.8%
777 Mariners Island Blvd.
San Mateo, CA  94404
Nathaniel Brenner (5)............................................              56,700                     *
Norman V. Coates (6).............................................              18,050                     *
John D. Heaton (7)...............................................             201,667                    1.7%
Paul B. Nolan (8)................................................              45,000                     *
Roger Ingalls, Jr. (9)...........................................              42,667                     *
Edmond R. Ward (10)..............................................               3,333                     *
William Oldham ..................................................                   0                     *
William McGahan (11).............................................              40,333                     *
All Named Officers and directors as a group (9 persons) (12).....           3,784,024                   31.6%
<FN>
- --------------------
*        Represents less than 1% of outstanding shares of Common Stock.
(1)      Beneficial  ownership is determined in accordance with the rules of the
         Securities and Exchange  Commission  (the "SEC").  The number of shares
         beneficially  owned by a person includes shares of common stock subject
         to  options  held by that  person  that are  currently  exercisable  or
         exercisable  within 60 days of December 31, 2000.  Such shares issuable
         pursuant  to such  options are deemed  outstanding  for  computing  the
         percentage  ownership  of the person  holding  such options but are not
         deemed  outstanding  for  the  purposes  of  computing  the  percentage
         ownership of each other person.
(2)      Includes 3,376,154 shares of common stock held of record by the Vincent
         J. Coates  Separate  Property  Trust,  U/D/T dated August 7, 1981,  for
         which Mr. Coates acts as trustee.
(3)      According  to a  Schedule  13G/A  filed  with the  Securities  Exchange
         Commission  on February 12, 2001,  Capital  Group  International,  Inc.
         ("CGI") may be deemed to be the beneficial owner of 1,585,900 shares of
         common  stock.  CGI is identified  as a Parent  Holding  Company on its
         Schedule 13G/A.
(4)      According  to  a  Schedule  13G  filed  with  the  Securities  Exchange
         Commission on January 31, 2001, Franklin Resources, Inc. ("FRI") may be
         deemed to be the beneficial owner of 675,000 shares of Common Stock.
(5)      Includes  26,700  shares  of  Common  Stock  held of  record by the N&J
         Brenner  Living  Trust,  for which Mr.  Brenner  and his  spouse act as
         trustees, for the benefit of members of Mr. Brenner's immediate


                                      -7-



         family,  and 30,000  shares of common stock  issuable  upon exercise of
         outstanding options exercisable within 60 days of December 31, 2000.
(6)      Includes an  aggregate  of 8050 shares held as trustee on the behalf of
         other family  members and 10,000  shares of common stock  issuable upon
         exercise of outstanding  options exercisable within 60 days of December
         31, 2000.
(7)      Includes  185,000  shares of common  stock  issuable  upon  exercise of
         outstanding options exercisable within 60 days of December 31, 2000.
(8)      Includes  45,000  shares of common  stock  issuable  upon  exercise  of
         outstanding options exercisable within 60 days of December 31, 2000.
(9)      Includes  42,667  shares of common  stock  issuable  upon  exercise  of
         outstanding options exercisable within 60 days of December 31, 2000.
(10)     Includes  3,333  shares of  common  stock  issuable  upon  exercise  of
         outstanding options exercisable within 60 days of December 31, 2000.
(11)     Includes  40,333  shares of common  stock  issuable  upon  exercise  of
         outstanding options exercisable within 60 days of December 31, 2000.
(12)     Includes  356,333  shares of common  stock  issuable  upon  exercise of
         outstanding options exercisable within 60 days of December 31, 2000.
</FN>

Board Meetings and Committees

         The Board of  Directors  held a total of five  meetings  during  fiscal
2000. During fiscal 2000, no incumbent  directors  attended less than 75% of the
aggregate of (i) the total number of meetings of the Board of Directors and (ii)
the total number of meetings of  committees,  if any, upon which such  directors
served.   The  Company  maintains   standing   committees   overseeing   audits,
compensation and stock options.  The Company does not have a standing nominating
committee.

         Audit Committee.  The Audit Committee of the Board of Directors reviews
and  monitors  the  corporate  financial  reporting  as well as the internal and
external  audits of the Company,  including  among other  things,  the Company's
internal audit and control functions,  the results and scope of the annual audit
and other  services  provided by the  Company's  independent  auditors,  and the
Company's  compliance  with  legal  matters  with a  significant  impact  on the
Company's  financial  reports.   In  addition,   the  Audit  Committee  has  the
responsibility  to consider and recommend the  employment  of, and to review fee
arrangements with, the Company's independent auditors.  The Audit Committee also
monitors  transactions  between  the  Company and its  officers,  directors  and
employees  for any  potential  conflicts  of  interest.  The Board of  Directors
adopted a written  charter for the Audit  Committee on March 27, 2001. A copy of
this  charter is attached  hereto as Appendix 1. The Audit  Committee  met three
times during fiscal 2000.

         The current  members of the Audit  Committee are Nathaniel  Brenner and
Edmond R. Ward.  Messrs.  Brenner and Ward are  "independent  directors" as that
term is defined the  applicable  National  Association  of  Securities  Dealers'
("NASD") listing standards.

         Compensation  Committee.  The Compensation  Committee reviews and makes
recommendations to the Board of Directors  regarding the Company's  compensation
policy and all forms of  compensation to be provided to certain of the executive
officers of the Company.  The current members of the Compensation  Committee are
Nathaniel  Brenner  and  Norman  V.  Coates.  The  Compensation   Committee  met
separately once during fiscal 2000.

         Stock  Option  Committee.  The Stock  Option  Committee of the Board of
Directors  is  responsible  for  approving  the  grant of stock  options  to the
Company's  employees  under the Company's  1991 Stock Option Plan and 2000 Stock
Option Plan.  The current  members of the Stock Option  Committee  are


                                      -8-



Norman V. Coates and Nathaniel Brenner.  The Stock Option Committee did not meet
separately  during fiscal 2000,  but acted by written  consent nine times during
fiscal 2000.

Compensation Committee Interlocks and Insider Participation

         No member of the  Compensation  Committee of the Company's Board serves
as a member of the board of  directors or  compensation  committee of any entity
that has one or more  executive  officers  serving as a member of the  Company's
Board of Directors or Compensation Committee.

Board Compensation

         Directors who are not also  employees of the Company  receive an annual
retainer  fee of $5,000 plus $1,000 for each Board of  Directors  and  committee
meeting attended (unless the Board and committee  meeting take place on the same
day,  in which case such  directors  receive a $1,000  fee) and are  eligible to
participate in the Company's 2000 Director Option Plan.

Compensation of Executive Officers

         The  following  table sets forth the  compensation  paid by the Company
during the past three  fiscal  years to (i) the Chief  Executive  Officer of the
Company  during  the  last  fiscal  year,  (ii)  each of the  four  most  highly
compensated  executive  officers of the  Company not serving as Chief  Executive
Officer  and (iii) up to an  additional  two  individuals  that  would have been
included under item (ii) but for the fact that the individuals  were not serving
as  executive   officers  at  the  end  of  the  last   completed   fiscal  year
(collectively, the "Named Officers"):

                                                Summary Compensation Table
                                                                                                             Long Term
                                                                                                           Compensation
                                                                          Annual Compensation                  Awards
                                                               -----------------------------------------   ---------------
                                                                                                             Securities
                                                                                                             Underlying
                                                               Fiscal Year       Salary          Bonus       Options (#)
                                                               ------------- --------------- ------------- ---------------
                                                                                                  
John D. Heaton..............................................       2000         $  380,370     $  70,385      250,000
   President and Chief Executive Officer                           1999         $  241,445     $   5,338       50,000
                                                                   1998         $  206,668     $  21,098      100,000

Vincent J. Coates...........................................       2000         $  204,800     $       -            -
   Chairman of the Board and Secretary                             1999         $  204,800     $       -            -
                                                                   1998         $  215,231     $  10,431            -

Roger Ingalls Jr............................................       2000         $  266,475     $  38,982       10,000
   Vice President and Director of Marketing                        1999         $  178,529     $   3,203            -
                                                                   1998         $  209,178     $  14,723       19,000

Paul B. Nolan...............................................       2000         $  174,809     $  35,023       10,000
   Vice President and Chief Financial Officer                      1999         $  120,870     $   2,643            -
                                                                   1998         $  123,232     $  13,809            -

William McGahan...........................................         2000         $  227,084     $  44,965       10,000
   Chief Scientist and Former Vice-President                       1999         $  174,896     $   3,681           --
                                                                   1998         $  151,315     $  15,934       38,000


                                                              -9-



Stock Options Granted in the Fiscal Year Ended December 31, 2000

         The  following  table  sets  forth  information  with  respect to stock
options  granted  during the fiscal year ended  December 31, 2000 to each of the
Named  Officers.  All options were granted under the Company's 1991 Stock Option
Plan or 2000 Stock Option Plan.

         The potential  realizable  value amounts in the last two columns of the
following  chart  represent  hypothetical  gains that could be achieved  for the
respective  options if exercised  at the end of the option term.  The assumed 5%
and 10% annual rates of stock price  appreciation  from the date of grant to the
end of the option term are provided in  accordance  with rules of the SEC and do
not represent  the  Company's  estimate or projection of the future common stock
price.  Actual  gains,  if any, on stock option  exercises  are dependent on the
future performance of the common stock, overall market conditions and the option
holder's continued employment through the vesting period.

                                                       Option Grants in Last Fiscal Year


                                                                                                   Potential Realized Value
                                                           Individual Grants                      at Assumed Annual Rates of
                                            ---------------------------------------------------     Stock Price Appreciation
                                             Number of    % of Total                                           for
                                            Securities      Options                                       Option Term
                                            Underlying    Granted to                                 -----------------------
                                              Options      Employees    Exercise
                                              Granted      in Fiscal      Price      Expiration
                  Name                        (#) (1)      Year (2)      ($/Sh)         Date           5% ($)        10% ($)
                                            ----------    ----------    --------     ----------      ---------     ---------
                                                                                                 
John D. Heaton...........................     250,000        28.2%        41.375       3/17/05       2,857,787     6,314,963
Vincent J. Coates........................        --            --            --           --              --            --
Roger Ingalls Jr.........................      10,000         1.1%        28.078        6/5/05          77,574       171,419
Paul B. Nolan............................      10,000         1.1%        28.078        6/5/05          77,574       171,419
William McGahan..........................      10,000         1.1%        28.078        6/5/05          77,574       171,419

- -------------------------
<FN>
(1)  All options  granted to the Named Officers in 2000 were granted at exercise
     prices equal to the fair market value of the Company's  common stock on the
     dates of grant.  Historically,  options  granted become  exercisable at the
     rate of 33% on the first  anniversary  date of the option  grant and 33% of
     the option shares become  exercisable each full year thereafter,  such that
     full  vesting  occurs  three years after the date of grant.  Options  lapse
     after 5 years or 90 days after termination of employment.
(2)  Based on 886,700  options granted during the fiscal year ended December 31,
     2000.
</FN>

Aggregated  Option  Exercises  in Last  Fiscal Year and Fiscal  Year-End  Option
Values

         The following  table sets forth the number of shares  acquired upon the
exercise of stock options  during 2000 and the number of shares  covered by both
exercisable and  unexercisable  stock options held by each of the Named Officers
at December 31, 2000.


                                      -10-



                                                                        Number of Securities
                                                                      Underlying Unexercisable       Value of Unexercised
                                                                         Options At Fiscal          In-the-Money Options At
                                                                            Year-End (#)            Fiscal Year-End ($)(2)
                                          Shares          Value       -------------------------   --------------------------
                                        Acquired on   Realized ($)
                                       Exercise (#)        (1)        Exercisable   Unexercised   Exercisable    Unexercised
                                       ------------   ------------    -----------   -----------   -----------    -----------
                                                                                                
John D. Heaton.......................      16,668        164,597        184,999       316,668     1,583,176       518,594
Vincent J. Coates....................        -              -             -             -             -              -
Roger Ingalls Jr.....................       5,000        220,625         42,666        16,334       342,346        40,281
Paul B. Nolan........................      30,000        990,650         45,000        10,000       392,075             0
William McGahan......................      10,000        421,590         40,332        22,668       303,410        86,582
<FN>
- ------------------------------
(1)  The  value  realized  upon  exercise  is (i) the fair  market  value of the
     Company's  common stock on the date of exercise,  less the option  exercise
     price per share,  multiplied  by (ii) the number of shares  underlying  the
     options exercised.
(2)  The  value  of  unexercised  options  is (i) the fair  market  value of the
     Company's  common stock on December  31, 2000 ($13.81 per share),  less the
     option  exercise  price of  in-the-money  options,  multiplied  by (ii) the
     number of shares underlying such options.
</FN>

Certain Transactions

         The Company is the  beneficiary  of an insurance  policy on the life of
Vincent J. Coates in a face amount of  $8,000,000.  Annual  premiums,  which are
paid by the Company,  totaled $200,000 for fiscal 2000 are fixed at $200,000 per
year upon continuation of the policy. In the event of termination of the policy,
any cash surrender value would belong to Mr. Coates.  Mr. Coates and the Company
have entered into an agreement providing that in the event of Mr. Coates' death,
his estate has the option to cause the Company to use the proceeds of the policy
to purchase  shares of the  Company's  Common Stock owned by the estate at their
then fair  market  value.  The  estate is not  obligated  under the terms of the
agreement to exercise the option.  If the option is not  exercised,  the Company
would retain the proceeds of the insurance policy. The purpose of this agreement
is to provide Mr. Coates' estate, at its option,  the opportunity to obtain cash
to pay estate taxes without having to liquidate its holdings in the open market.

         Pursuant  to the terms of an  agreement  dated May 1, 1985  between the
Company and Vincent J. Coates, the terms of which were then amended and restated
in August 1996 and again effective April 1998, the Company is obligated,  in the
event Mr.  Coates is required  to resign as Chairman of the Board under  certain
circumstances,  including a change of control, to continue to pay Mr. Coates his
salary and benefits for five years from the date of such resignation.

         In April 1998,  the Company  entered into an agreement  with Mr. Heaton
under  which the  Company  agreed to pay Mr.  Heaton  his  usual  annual  salary
(excluding  bonuses)  for a period of one year from the date that he is required
or  requested  for any reason not  involving  good cause,  including a change of
control,  to  involuntarily  relinquish  his positions with the Company as Chief
Executive  Officer,  President  and  Director.  If Mr. Heaton leaves the Company
voluntarily  or if he is asked to leave  under  certain  circumstances,  no such
severance payment is required.

Section 16(a) Beneficial Ownership Reporting Compliance

         Section  16(a) of the  Securities  Exchange  Act of 1934,  as  amended,
requires the Company's  executive  officers and  directors,  and persons who own
more than ten percent of a registered class of the Company's


                                      -11-



equity  securities,  to file reports of ownership and changes in ownership  with
the SEC and the  NASDAQ  National  Market.  Executive  officers,  directors  and
greater than ten percent shareholders are required by SEC regulations to furnish
the Company  with copies of all Section  16(a) forms they file.  Based solely on
its review of the copies of such forms received by it or written representations
from certain reporting persons, the Company believes that during fiscal 2000 its
executive officers, directors and greater than ten percent shareholders complied
with all applicable filing requirements.


                                      -12-



Report of the Audit Committee of the Board of Directors

         The  following  is the  report of the Audit  Committee  of the Board of
Directors  describing its review of materials and determinations with respect to
the  Company's  auditors  and  financial  statements  for the fiscal  year ended
December 30, 2000. The information  contained in this report shall not be deemed
to be  "soliciting  material" or to be "filed" with the  Securities and Exchange
Commission,  nor shall such  information be  incorporated  by reference into any
future filing under the  Securities  Act or Exchange  Act,  except to the extent
that the Company specifically incorporates it by reference into such filing.

         In  accordance  with  its  written  charter  adopted  by the  Board  of
Directors,  the Audit Committee assists the Board of Directors in fulfilling its
responsibility  for  oversight of the quality and  integrity of the  accounting,
auditing and  financial  reporting  practices of the Company.  During 2000,  the
Committee met three times, and the Audit Committee chair, as  representative  of
the  Committee,   discussed  the  interim  financial  information  contained  in
quarterly  earnings  announcements  with the  CFO,  controller  and  independent
auditors prior to public release.

         The Audit Committee received from the Company's  independent auditors a
formal written statement,  consistent with Independence Standards Board Standard
No. 1,  "Independence  Discussions with Audit  Committees,"  which describes all
relationships  between the  auditors  and the  Company  that,  in the  auditors'
professional  opinion,  might  reasonably  be thought  to bear on the  auditors'
independence.   The  Audit   Committee   discussed   with  the  auditors   these
relationships and satisfied itself as to the auditors' independence.

         The Audit  Committee also  discussed and reviewed with the  independent
auditors all communications  required by generally accepted auditing  standards,
including those described in Statement on Auditing Standards No. 61, as amended,
"Communication  with Audit Committees" and, with and without management present,
discussed and reviewed the results of the independent  auditors'  examination of
the Company's financial statements.

         Additionally,  the  Audit  Committee  reviewed  the  audited  financial
statements of the Company as of and for the fiscal year ended December 30, 2000,
with management and the independent auditors.  Management has the responsibility
for the  preparation of the Company's  financial  statements and the independent
auditors have the responsibility for the examination of those statements.

         Based on the foregoing  review and discussions  with management and the
independent  auditors,  the Audit  Committee  recommended  to the Board that the
Company's audited financial  statements be included in its Annual Report on Form
10-K for the fiscal year ended December 30, 2000, for filing with the Securities
and Exchange Commission. The Audit Committee also recommended the reappointment,
subject to  shareholder  approval,  of the  independent  auditors  and the Board
concurred in such recommendation.

Nathaniel Brenner, Chairman

Edmond Ward


                                      -13-



Report of the Compensation  Committee and Stock Option Committee of the Board of
Directors

         The following is the report of the Compensation Committee and the Stock
Option Committee of the Board of Directors describing  compensation policies and
rationales  applicable  to  certain of the  Company's  executive  officers  with
respect to the compensation paid to such executive  officers for the fiscal year
ended December 30, 2000. The  information  contained in such report shall not be
deemed to be  "soliciting  material"  or to be "filed" with the  Securities  and
Exchange  Commission,  nor shall such  information be  incorporated by reference
into any future filing under the Securities  Act or Exchange Act,  except to the
extent that the Company  specifically  incorporates  it by  reference  into such
filing.

         General.   The   Compensation   Committee  is  responsible  for  making
recommendations  to the Board of  Directors  with  respect to cash  compensation
levels for certain of the Company's executive  officers.  During 2000, the Stock
Option  Committee  was  responsible  for  determining   levels  of  equity-based
compensation for the Company's employees.

         Compensation    Philosophy.    The    Compensation    Committee   makes
recommendations  as to the  salaries  of certain of the  executive  officers  by
considering  (i) the  salaries of  executive  officers in similar  positions  at
comparably-sized  peer companies,  (ii) the Company's financial performance over
the  past  year  based  upon  revenues  and  operating  results  and  (iii)  the
achievement of individual  performance goals related to each executive officer's
duties  and  areas  of   responsibility.   The   Compensation   Committee  makes
recommendations  as to the  levels of cash  bonuses  awarded  to  certain of the
Company's executive officers and views such bonuses as being an integral part of
its performance based  compensation  program.  Such bonuses are based on Company
profits and are determined as a percentage of the officer's salaries.

         Equity-Based  Compensation.  The Stock  Option  Committee  views  stock
options as an important  part of its long-term,  performance-based  compensation
program.  The  Stock  Option  Committee  bases  grants of stock  options  to all
employees of the Company under the Company's  2000 Stock Option Plan and,  until
July 12, 2001,  under the Company's 1991 Stock Option Plan, upon the Committee's
estimation  of  each  employee's   contribution  to  the  long-term  growth  and
profitability  of the Company.  The 1991 Stock Option Plan and 2000 Stock Option
Plan are intended to provide additional  incentives to the executive officers to
maximize  shareholder  value.  Options were granted  under the 1991 Stock Option
Plan and the 2000 Stock  Option Plan at the  then-current  market  price and are
generally  subject to three-year  vesting  periods to encourage key employees to
remain with the Company.

         Compensation  of  the  President  and  Chief  Executive  Officer.   The
compensation of the Company's  President and Chief  Executive  Officer was based
upon the same criteria described above. Specifically, the Compensation Committee
considered  several factors in determining such compensation  including progress
toward  meeting the corporate  plan and the objectives set for the President and
Chief Executive  Officer during his tenure in the current fiscal year as well as
progress toward attaining  longer range goals as a result of his leadership.  In
recognition  of his  progress  toward  meeting  corporate  goals  and to  remain
competitive,  based on a survey of other CEO salaries,  the  compensation of the
Company's  President  and Chief  Executive  Officer was  increased  to an annual
salary of $350,000.

STOCK OPTION COMMITTEE                                    COMPENSATION COMMITTEE
Norman V. Coates                                          Nathaniel Brenner
Nathaniel Brenner                                         Norman V. Coates


                                      -14-



Performance Graph

      Set forth below is a line graph comparing the annual  percentage change in
the cumulative return to the shareholders of the Company's Common Stock with the
cumulative  return of the  NASDAQ  Stock  Market  Index  and the JP  Morgan  H&Q
Technology  Index for the  period  commencing  on  January 1, 1996 and ending on
December 31, 2000. The information  contained in the performance graph shall not
be deemed to be  "soliciting  material" or to be "filed" with the Securities and
Exchange  Commission,  nor shall such  information be  incorporated by reference
into any future filing under the Securities  Act or Exchange Act,  except to the
extent that the Company  specifically  incorporates  it by  reference  into such
filing.

[The following  descriptive  data is supplied in accordance  with Rule 304(d) of
Regulation S-T]

                                    NANOMETRICS INC

                                                   Cumulative Total Return
                                  --------------------------------------------------------
                                   12/95     12/96     12/97     12/98     12/99     12/00
                                                                  
NANOMETRICS INCORPORATED          100.00     64.41    111.02    105.93    272.88    187.29
NASDAQ STOCK MARKET (U.S.)        100.00    123.04    150.69    212.51    394.94    237.68
JP MORGAN H & Q TECHNOLOGY        100.00    124.29    145.71    226.64    506.17    327.22



                                      -15-



                                 PROPOSAL NO. 2

                         RATIFICATION OF APPOINTMENT OF
                              INDEPENDENT AUDITORS

         The Board has appointed Deloitte & Touche LLP, independent auditors, to
audit the consolidated  financial  statements of the Company for the fiscal year
ending  December  29,  2001.  Deloitte & Touche LLP has  audited  the  Company's
financial statements since fiscal 1991.

         Representatives  of Deloitte & Touche LLP are expected to be present at
the meeting  with the  opportunity  to make a statement if they desire to do so,
and are expected to be available to respond to appropriate questions.

Audit Fees

         Total  audit fees paid to  Deloitte  & Touche LLP and their  respective
affiliates (collectively, "D & T"), including fees for professional services and
expense  relating  to  the  audit  of  the  Company's   consolidated   financial
statements,  for the fiscal year ended December 30, 2000, including fees related
to the timely review of the Company's quarterly financial information, totaled $
214,004.

Financial Information Systems Design and Implementation Fees

         The Company did not engage D & T for professional  services relating to
financial  information  systems  design and  implementation  for the fiscal year
ended December 30, 2000.

All Other Fees

         All  other  fees  paid  to D &  T,  including  fees  and  expenses  for
management advisory services in connection with potential  acquisition  activity
and other fees and services  related to the  Company's  registration  statements
filed with the SEC, totaled $257,820.

         The Audit  Committee has  considered the fees received by D & T for the
provision of non-audit  related services before  recommending  Deloitte & Touche
LLP as the independent auditor for the next fiscal year.

         THE BOARD OF DIRECTORS  UNANIMOUSLY  RECOMMENDS THAT  SHAREHOLDERS VOTE
"FOR" THE  RATIFICATION  OF THE  APPOINTMENT  OF  DELOITTE  & TOUCHE  LLP AS THE
COMPANY'S INDEPENDENT AUDITORS FOR THE FISCAL YEAR ENDING DECEMBER 29, 2001.

                                  OTHER MATTERS

         The Company  knows of no other  matters to be submitted to the meeting.
If any other matters  properly  come before the meeting,  it is the intention of
the persons named in the enclosed  proxy card to vote the shares they  represent
as the Board of Directors may recommend.


                                                          THE BOARD OF DIRECTORS

  Dated:  April 18, 2001


                                      -16-





                                   APPENDIX 1



                                      -17-



                       Appendix 1: Audit Committee Charter

                                NANOMETRICS INC.

                  The Audit  Committee of Nanometrics  Inc. is a subcommittee of
the  Board  of  Directors.  Its  primary  function  is to  assist  the  board in
fulfilling its oversight  responsibilities  by reviewing  financial  information
which will be  provided  to  shareholders  and  others,  the systems of internal
controls which management and the board have established, and the audit process.

         The Audit Committee shall:

     1.  Provide   communication  among  the  independent   auditor,  the  Chief
         Financial Officer, and the Board of Directors.

     2.  Recommend to the Board the nomination,  compensation,  and discharge of
         the independent auditor.  Review annually with the independent auditors
         any  significant  relationships  they have with the Company which could
         impair the auditor's independence.

     3.  Check with  management,  the CFO,  and the  independent  auditor  about
         significant  financial  risks  and  assess  the  steps  being  taken to
         minimize such risks to the Company.

     4.  Consider  and  review  with  the  independent  auditor  and the CFO the
         adequacy of the Company's internal controls.

     5.  Review  with  management  and the  independent  auditor  at the  annual
         examination:

         a. The Company's annual financial statements and related footnotes.

         b. The  independent   auditor's  audit  and  report  of  the  financial
            statements.

         c. Any  serious   difficulties   or   disagreements   with   management
            encountered during the audit.

         d. Recommendations by the independent auditor for changes and additions
            to Company financial procedures.

     6.  Consider and review with management and the CFO:

         a. Compliance  with the  recommendations  made as a result of the audit
            report and review.

         b. Any changes required in the scope of the audit plan.

     7.  Review  filings  with the SEC and other  published  documents to assure
         consistency with information contained in the financial statements.

     8.  Meet privately with the CFO, the independent  auditor, or management to
         discuss matters deemed to require such privacy.



                                      -18-



     9.  Meet at least four times per year, and may ask members of management to
         attend to provide  pertinent  information  as required,  including  one
         meeting prior to, and for review of the 10Q submission.

                  The committee  shall include in its  membership  three or more
         directors as determined by the Board, each of whom shall be independent
         non-employee  directors.  A chairman  of the Audit  Committee  shall be
         designated by majority vote of the committee. The chairman will prepare
         or approve the agenda for meetings and shall prepare and  distribute to
         the Board the summary of each meeting.

     10. Review and approve  quarterly  financial  releases  and review with the
         independent  auditor the Company's annual audited financial  statements
         prior to filing and  distribution.  The review  should  include  issues
         regarding accounting principles and practices.

     11. Perform other duties as required by law, the Company's charter,  or the
         Board of Directors.

     12. Review and assess the adequacy of this Charter each year to assure that
         it  reflects  new  responsibilities  consistent  with the growth of the
         Company or major  changes in  operations  or  organization.  Submit the
         revised  Charter to the Board of  Directors  for  approval and have the
         Charter  published  at least every three years in  accordance  with SEC
         regulations.



                                                              Nathaniel Brenner

                                                     Member, Audit Committee

          March 27, 2001



                                      -19-



NANOMETRICS INCORPORATED

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
                       2001 ANNUAL MEETING OF SHAREHOLDERS
                                  May 16, 2001

         The  undersigned   shareholder(s)   of  Nanometrics   Incorporated,   a
California  corporation,  hereby  acknowledges  receipt  of the Notice of Annual
Meeting of  Shareholders  and Proxy  Statement,  each dated April 18, 2001,  and
hereby appoints Vincent J. Coates and Paul B. Nolan,  and each of them,  Proxies
and Attorneys-in-Fact, with full power to each of substitution, on behalf and in
the name of the  undersigned,  to represent the  undersigned  at the 2001 Annual
Meeting of Shareholders of Nanometrics Incorporated to be held on Wednesday, May
16,  2001 at 1:30 p.m.,  local  time,  at the  principal  offices of the Company
located  at  1550  Buckeye  Drive,  Milpitas,   California,  95035  and  at  any
adjournments  thereof,  and to  vote  all  shares  of  Common  Stock  which  the
undersigned is entitled to vote on the matters set forth below:

ITEM 1.        ELECTION OF DIRECTORS:

         ( )    FOR all nominees listed below (except as indicated)

         ( )    WITHHOLD AUTHORITY to vote for all nominees listed below

IF YOU WISH TO WITHHOLD AUTHORITY TO VOTE FOR ANY INDIVIDUAL  NOMINEE,  STRIKE A
LINE THROUGH THAT NOMINEE'S NAME IN THE LIST BELOW:

   Vincent J. Coates   Nathaniel Brenner   Norman V. Coates   John D. Heaton

                       William G. Oldham   Edmond R. Ward

ITEM 2.  PROPOSAL  TO  RATIFY  THE  APPOINTMENT  OF  DELOITTE  &  TOUCHE  LLP AS
         INDEPENDENT AUDITORS OF THE COMPANY FOR THE 2001 FISCAL YEAR.

         ( ) FOR                 ( ) AGAINST                       ( ) ABSTAIN

(Continued and to be signed, on reverse side)


                                      -20-



(Continued from other side)

         In their  discretion the Proxies are authorized to vote upon such other
business as may properly come before the meeting.

         THIS BALLOT WILL BE VOTED AS DIRECTED  OR, IF NO CONTRARY  DIRECTION IS
INDICATED,  WILL BE VOTED "FOR" THE ELECTION OF DIRECTORS  NAMED  HEREIN,  "FOR"
EACH PROPOSAL  LISTED,  AND AS SAID PROXIES DEEM ADVISABLE ON SUCH OTHER MATTERS
AS MAY COME BEFORE THE MEETING.

                   -------------------------------------------------------------
                   Typed or Printed Name(s)

                   -------------------------------------------------------------
                   Signature

                   -------------------------------------------------------------
                   Signature

                   -------------------------------------------------------------
                   Title, if applicable

                   -------------------------------
                   Type and Number of Shares owned

                   Dated:                         , 2001
                          ------------------------

THIS PROXY SHOULD BE MARKED, DATED, SIGNED BY THE SHAREHOLDER(S)  EXACTLY AS HIS
OR HER NAME  APPEARS  HEREON AND  RETURNED  PROMPTLY IN THE  ENCLOSED  ENVELOPE.
PERSONS SIGNING IN A FIDUCIARY  CAPACITY SHOULD SO INDICATE.  IF SHARES ARE HELD
BY JOINT TENANTS OR AS COMMUNITY PROPERTY, BOTH SHOULD SIGN.


                                       21