SECURITIES AND EXCHANGE COMMISSION
                             Washington, D. C. 20549

                                    FORM 10-Q



X    Quarterly report pursuant to Section 13 or 15(d) of the Securities Exchange
- -    Act of 1934

For the quarterly period ended March 31, 2001 or
                               --------------

         Transition report pursuant to Section 13 or 15(d) of the
                        Securities Exchange Act of 1934

For the transition period from _______________ to _______________

Commission file number                       0-13470
                        ---------------------------------------------------


                            NANOMETRICS INCORPORATED
       -------------------------------------------------------------------
             (Exact name of registrant as specified in its charter)


             California                                        94-2276314
- ----------------------------------------                  -------------------
   (State or other jurisdiction of                        (I. R. S. Employer
    incorporation or organization)                        Identification No.)


  1550 Buckeye Drive, Milpitas,  CA                               95035
- ----------------------------------------                  -------------------
(Address of principal executive offices)                       (Zip Code)


Registrant's telephone number, including area code      (408) 435-9600
                                                     --------------------


Indicate by check mark whether the registrant (1) has filed all reports required
to be filed  by  Section  13 or 15 (d) of the  Securities  Exchange  Act of 1934
during the preceding 12 months (or for such shorter  period that the  registrant
was  required  to file such  reports),  and (2) has been  subject to such filing
requirements for the past 90 days.

                           YES    X        NO
                               -------         --------


At April 10, 2001 there were  11,630,986  shares of common stock,  no par value,
issued and outstanding.






                            NANOMETRICS INCORPORATED


                                      INDEX



Part I.  Financial Information                                              Page
                                                                            ----

    Item 1.  Financial Statements

             Condensed Consolidated Balance Sheets -
             March 31, 2001 and  December  31, 2000 .......................    3

             Condensed Consolidated Statements of Income -
             Three  months  ended  March 31,  2001 and 2000 ...............    4

             Condensed Consolidated Statements of Cash Flows -
             Three  months  ended  March 31,  2001 and 2000 ...............    5

             Notes to  Condensed  Consolidated  Financial  Statements .....    6


    Item 2.  Management's Discussion and Analysis of
             Financial  Condition  and Results of  Operations .............    8

    Item 3.  Quantitative and Qualitative Disclosures
             about  Market  Risk ..........................................    9


Part II  Other Information

    Item 6.  Exhibits  and  Reports on Form 8-K ...........................   10


Signatures ................................................................   11

                                       2




PART I:  FINANCIAL INFORMATION
ITEM 1:  FINANCIAL STATEMENTS


                                              NANOMETRICS INCORPORATED
                                        CONDENSED CONSOLIDATED BALANCE SHEETS
                                    (Amounts in thousands except share amounts)


                                                                       March 31,               December 31,
                                                                         2001                      2000
                                                                      (Unaudited)
                                                                    ------------               -------------
                                                                                         
ASSETS
CURRENT ASSETS:
   Cash and cash equivalents                                        $      7,957               $      16,934
   Short-term investments                                                 61,131                      52,854
   Accounts receivable, net of
      allowances of $415 and $425                                         12,462                      14,319
   Inventories                                                            16,315                      15,753
   Deferred income taxes                                                   2,405                       2,760
   Prepaid expenses and other                                              2,164                       3,351
                                                                     -----------                ------------
         Total current assets                                            102,434                     105,971
PROPERTY, PLANT AND EQUIPMENT, Net                                        39,561                      37,223
DEFERRED INCOME TAXES                                                        229                         227
OTHER ASSETS                                                               2,840                       1,375
                                                                    ------------               -------------
TOTAL                                                              $     145,064               $     144,796
                                                                    ============                ============

LIABILITIES AND SHAREHOLDERS' EQUITY
CURRENT LIABILITIES:
   Accounts payable                                                $       1,973               $       4,625
   Accrued payroll and related expenses                                    1,746                       1,610
   Deferred revenue                                                        5,255                       3,015
   Other current liabilities                                               2,957                       3,049
   Income taxes payable                                                      726                         331
   Current portion of debt obligations                                       393                         921
                                                                  --------------               -------------
         Total current liabilities                                        13,050                      13,551
DEBT OBLIGATIONS                                                           3,737                       4,236
                                                                  --------------               -------------
         Total liabilities                                                16,787                      17,787
                                                                  --------------               -------------

SHAREHOLDERS' EQUITY:
   Common stock, no par value; 25,000,000 shares
     authorized; 11,629,653 and 11,607,839 outstanding                    96,202                      95,929
   Retained earnings                                                      33,406                      31,783
   Accumulated other comprehensive loss                                  (1,331)                       (703)
                                                                  --------------               -------------
         Total shareholders' equity                                      128,277                     127,009
                                                                  --------------               -------------

TOTAL                                                             $      145,064               $     144,796
                                                                   =============                ============

<FN>

See Notes to Condensed Consolidated Financial Statements
</FN>


                                       3




                                              NANOMETRICS INCORPORATED
                                     CONDENSED CONSOLIDATED STATEMENTS OF INCOME
                                   (Amounts in thousands except per share amounts)
                                                     (Unaudited)


                                                                           Three Months Ended
                                                                                  March 31,
                                                                        2001                  2000
                                                                        ----                  ----
                                                                                  
NET REVENUES:
   Product sales                                                  $       12,939        $      15,205
   Service                                                                 1,486                1,111
                                                                  --------------        -------------
   Total net revenues                                                     14,425               16,316
                                                                  --------------        -------------
COSTS AND EXPENSES:
   Cost of product sales                                                   5,291                6,434
   Cost of service                                                         1,466                1,395
   Research and development                                                2,595                1,745
   Selling                                                                 2,033                2,360
   General and administrative                                                939                  999
                                                                  --------------        -------------
   Total costs and expenses                                               12,324               12,933
                                                                  --------------        -------------
INCOME FROM OPERATIONS                                                     2,101                3,383
                                                                  --------------        -------------
OTHER INCOME (EXPENSE):
   Interest income                                                           993                  476
   Interest expense                                                          (22)                 (21)
   Other, net                                                               (409)                 (71)
                                                                  --------------        -------------
   Total other income, net                                                   562                  384
                                                                  --------------        -------------
INCOME BEFORE INCOME TAXES                                                 2,663                3,767

PROVISION FOR INCOME TAXES                                                 1,040                1,502
                                                                  --------------        -------------
INCOME BEFORE CUMULATIVE EFFECT OF
 CHANGE IN ACCOUNTING PRICIPLE                                             1,623                2,265

CUMULATIVE EFFECT OF CHANGE IN REVENUE
 RECOGNITION PRINCIPLE (SAB 101)                                               -              (1,364)
                                                                  --------------        -------------
NET INCOME                                                        $        1,623        $         901
                                                                  ==============        =============
BASIC NET INCOME  (LOSS) PER SHARE:
  Income before cumulative effect of change in
   accounting principle                                           $         0.14        $        0.23
  Cumulative effect of change in revenue recognition
   principle (SAB 101)                                                         -                (0.14)
                                                                  --------------        -------------
  Net income                                                      $         0.14        $        0.09
                                                                  ==============        =============
DILUTED NET INCOME  (LOSS) PER SHARE:
  Income before cumulative effect of change in
   accounting principle                                           $         0.14        $       0.21
  Cumulative effect of change in revenue recognition
   principle (SAB 101)                                                         -               (0.13)
                                                                  --------------        -------------
  Net income                                                      $         0.14        $        0.08
                                                                  ==============        =============
SHARES USED IN PER SHARE COMPUTATION:
  Basic                                                                   11,616                9,693
                                                                  ==============        =============
  Diluted                                                                 11,992               10,880
                                                                  ==============        =============
<FN>
See Notes to Condensed Consolidated Financial Statements
</FN>


                                       4




                                                      NANOMETRICS INCORPORATED
                                           CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                                                       (Amounts in thousands)
                                                             (Unaudited)


                                                                                                            Three Months Ended
                                                                                                                  March 31,
                                                                                                          2001                2000
                                                                                                          ----                ----
                                                                                                                     
CASH FLOWS FROM OPERATING ACTIVITIES:
   Net income                                                                                          $  1,623            $    901
    Reconciliation of net income to net
    cash provided by operating activities:
   Depreciation and amortization                                                                            240                 117
   Deferred rent                                                                                           --                    (7)
   Deferred income taxes                                                                                    326                  29
   Changes in assets and liabilities:
       Accounts receivable                                                                                1,487              (1,308)
       Inventories                                                                                       (1,277)             (2,141)
       Prepaid expenses and other                                                                           777                (900)
       Accounts payable accrued and other current liabilities                                              (444)              4,140
       Income taxes payable                                                                                 400               1,390
                                                                                                       --------            --------

Net cash provided by operating activities                                                                 3,132               2,221
                                                                                                       --------            --------

CASH FLOWS FROM INVESTING ACTIVITIES:
   Purchase of short-term investments                                                                   (76,866)            (54,395)
   Sales/maturities of short-term investments                                                            68,589               2,865
   Purchases of property, plant and equipment                                                            (2,849)               (101)
   Other assets                                                                                            (627)               --
                                                                                                       --------            --------
Net cash used in investing activities                                                                   (11,753)            (51,631)
                                                                                                       --------            --------

CASH FLOWS FROM FINANCING ACTIVITIES:
   Repayments of debt obligations                                                                          (574)               (209)
   Issuance of common stock                                                                                  96              72,752
                                                                                                       --------            --------

Net cash provided by (used in) financing activities                                                        (478)             72,543
                                                                                                       --------            --------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                                                                     122                  12
                                                                                                       --------            --------

NET CHANGE IN CASH AND EQUIVALENTS                                                                       (8,977)             23,145
CASH AND EQUIVALENTS, beginning of period                                                                16,934               3,442
                                                                                                       --------            --------

CASH AND EQUIVALENTS, end of period                                                                    $  7,957            $ 26,587
                                                                                                       ========            ========

SUPPLEMENTAL DISCLOSURE OF CASH FLOW INFORMATION:
   Cash paid for interest                                                                              $     32            $     17
                                                                                                       ========            ========
   Cash paid for income taxes                                                                          $    333            $   --
                                                                                                       ========            ========

SUPPLEMENTAL DISCLOSURE OF NONCASH INVESTING
AND FINANCING ACTIVITIES:
   Common stock issued as partial proceeds in a business combination                                   $    214            $   --
                                                                                                       ========            ========
<FN>
See Notes to Condensed Consolidated Financial Statements
</FN>


                                                               5




                            NANOMETRICS INCORPORATED
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                                   (Unaudited)



Note 1.        Condensed Consolidated Financial Statements

     The condensed  consolidated  financial  statements  include the accounts of
Nanometrics  Incorporated  and its  wholly-owned  subsidiaries.  All significant
intercompany accounts and transactions have been eliminated.

     While the quarterly  consolidated  financial statements are unaudited,  the
financial statements included in this report reflect all adjustments (consisting
only of normal recurring  adjustments) which Nanometrics considers necessary for
a fair presentation of the results of operations for the interim periods covered
and of our financial  condition at the date of the interim  balance  sheet.  The
operating  results for interim  periods are not  necessarily  indicative  of the
operating  results  that may be expected for the entire  year.  The  information
included  in this  report  should be read in  conjunction  with the  information
included  in  Nanometrics'  2000  Annual  Report  on Form  10-K  filed  with the
Securities and Exchange Commission.


Note 2.        Inventories

     Inventories are stated at the lower of cost (first-in, first-out) or market
and consist of the following (in thousands):

                                                   March 31,        December 31,
                                                      2001             2000
                                                   ----------       ------------

    Raw materials and subassemblies                $  9,784         $    8,126
    Work in process                                   2,728              1,434
    Finished goods                                    3,803              6,193
                                                   --------         ----------
    Total inventories                              $ 16,315         $   15,753
                                                   ========         ==========


Note 3.        Shareholders' Equity

     Net Income Per Share - The  reconciliation of the share denominator used in
the basic and  diluted  net income  per share  computations  are as follows  (in
thousands):

                                                              Three Months Ended
                                                                    March 31,
                                                                  2001     2000
                                                                -------   ------
    Weighted average common shares outstanding-shares
     used in basic net income per share computations             11,616    9,693
    Dilutive effect of common stock equivalents,
     using the treasury stock method                                376    1,187
                                                                -------   ------

    Shares used in diluted net income per share computation      11,992   10,880
                                                                =======   ======

     During the three  months  ended  March 31, 2001 and 2000,  Nanometrics  had
common stock options outstanding which could potentially dilute basic net income
per share in the future,  but were excluded from the  computation of diluted net
income per share as the common stock options'  exercise prices were greater than
the average market price of the common shares for the period. At March 31, 2001,
771,366 of such common stock options with a weighted  average  exercise price of
$33.09 per share were excluded from the diluted net income per share computation
as their  exercise  prices were  greater  than the average  market  price of the
common shares for the period.

                                       6



Note 4.        Comprehensive Income

     Comprehensive  income,  which  consisted  of  net  income  and  changes  in
accumulated other comprehensive  income, was $995,000 for the three months ended
March 31, 2001 compared to $934,000 for the same period in 2000.


Note 5.        New Accounting Pronouncement

     The  Company  adopted  the  provisions  of SFAS  No.  133,  Accounting  for
Derivative Instruments and Hedging Activities, as amended,  effective January 1,
2001.  To the extent the Company  were to enter into  derivative  activity,  the
purpose  would be to hedge its  exposure to foreign  currency  risks or interest
rate  risks.  The  Company  intends  to  record  changes  in the  fair  value of
derivative  instruments  as a charge  through  the income  statement  because it
expects derivative  activity to be infrequent.  As noted, the Company is exposed
to foreign  currency  and  interest  rate risks,  however,  the Company does not
generally use  derivative  instruments  to hedge its risk in those areas and, at
this time, the Company is not party to any contracts and therefore, there was no
impact from adopting SFAS No. 133.


                                       7




ITEM 2.      MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION
             AND RESULTS OF OPERATIONS


Results of Operations

     Total net  revenues  for the first  quarter  of 2001  were  $14,425,000,  a
decrease of  $1,891,000  or 12% from the same quarter in 2000.  Product sales of
$12,939,000  decreased  $2,266,000 or 15% for the first quarter of 2001 compared
to the same  period in 2000 as a result of  weakening  demand for  semiconductor
process control  equipment,  particularly in the U.S. and the Far East.  Service
revenue of  $1,486,000  increased  $375,000 or 34% in the first  quarter of 2001
compared to the same period in 2000 primarily due to higher spare parts sales in
the U.S.

     Cost of product sales as a percentage of product sales  decreased  slightly
to 41% in the first quarter of 2001 from 42% in the first quarter of 2000.  Cost
of service as a  percentage  of service  revenue  decreased  to 99% in the first
quarter of 2001 from 126% in the first quarter of 2000  primarily as a result of
higher service sales in the U.S.

     Research and  development  expenses for the first quarter of 2001 increased
$850,000 or 49%  compared to the same period in 2000  resulting  primarily  from
increased headcount and related expenses for the development of new and enhanced
products.

     Selling expenses for the first quarter of 2001 decreased by $327,000 or 14%
compared to the same period in 2000  primarily  because of decreased  commission
expenses and other expenses associated with lower sales levels.

     General and administrative expenses for the first quarter of 2001 decreased
by $60,000 or 6% compared to the same  period in 2000  primarily  as a result of
lower spending associated with the decreased level of operations.

     Total other income,  net increased $178,000 or 46% during the first quarter
of 2001  compared to the same period in 2000 due  primarily  to higher  interest
income.

     The cumulative effect of change in revenue recognition  principle (SAB 101)
of $1.4 million in the first quarter of 2000 is the net result of recording $2.5
million in net revenues,  which were previously recorded in 1999, offset by $1.1
million in related costs and expenses.

     Nanometrics'  income  from  operations  was  $2,101,000  and net income was
$1,623,000  or $0.14 per diluted  share in the first quarter of 2001 compared to
income from  operations  of  $3,383,000  and net income of $901,000 or $0.08 per
diluted share in the first quarter of 2000.

Liquidity and Capital Resources

     At March 31, 2001,  Nanometrics had working capital of $89,384,000 compared
to $92,420,000 at December 31, 2000. The current ratio at March 31, 2001 was 7.8
to  1.  We  believe  working  capital,  including  cash,  cash  equivalents  and
short-term  investments of  $69,088,000  will be sufficient to meet our needs at
least through the next twelve months.  Operating  activities for the first three
months of 2001 provided cash of $3,132,000  primarily  from net income and lower
accounts receivable offset to some extent by higher inventory levels,  while the
sales/maturities  of short-term  investments  net of purchases used  $8,277,000,
capital expenditures used $2,849,000 and debt repayment used $574,000.




                                       8





Forward Looking Statements

     The foregoing  Management's  Discussion and Analysis of Financial Condition
and Results of Operations contains forward-looking statements within the meaning
of Section 27A of the  Securities Act of 1933, and Section 21E of the Securities
Exchange Act of 1934.  These  statements  involve  risks and  uncertainties  and
actual  results  could differ  materially  as a result of a number of variables,
such as (i) customer demand for Nanometrics' products,  which may be affected by
several  factors  including  the  cyclicality  of  the  semiconductor,  magnetic
recording head and flat panel display industries served by Nanometrics, patterns
of capital spending by customers, technological changes in the markets served by
Nanometrics  and its  customers,  and  market  acceptance  of  products  of both
Nanometrics  and its  customers,  (ii)  the  timing,  cancellation  or  delay of
customer  orders  and  shipments,   (iii)  competition,   including  competitive
pressures on product prices and changes in pricing by Nanometrics'  customers or
suppliers,  (iv) fluctuations in foreign currency  exchange rates,  particularly
the Japanese yen, (v) the proportion of sales  Nanometrics makes directly to its
customers  versus sales through  distributors and  representatives,  (vi) market
acceptance  of new and enhanced  versions of  Nanometrics'  products,  (vii) the
timing of new product  announcements  and releases of products by Nanometrics or
its competitors,  including our ability to design, introduce and manufacture new
products  on a timely and cost  effective  basis,  (viii) the size and timing of
acquisitions  of businesses,  products or technologies  and  fluctuations in the
availability and cost of components and subassemblies of Nanometrics'  products,
and (ix) the factors set forth under  "Management's  Discussion  and Analysis of
Financial Condition and Results of Operations - Risk Factors" in the 2000 Annual
Report on Form 10-K.  Nanometrics  undertakes no  obligation  to update  forward
looking statements made in this report to reflect events or circumstances  after
the date of this report or to update  reasons why actual  results  could  differ
from those anticipated in such forward-looking statements.


ITEM 3.  QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     We are exposed to financial market risks,  which include changes in foreign
currency  exchange rates and interest rates. We do not use derivative  financial
instruments.  Instead,  we actively  manage the  balances of current  assets and
liabilities  denominated in foreign currencies to minimize currency  fluctuation
risk. As a result, a hypothetical  10% change in the foreign  currency  exchange
rates at March 31,  2001 would not have had a material  impact on our results of
operations.  Our  investments  in marketable  securities are subject to interest
rate risk but due to the short-term nature of these  investments,  interest rate
changes  would not have had a material  impact on their value at March 31, 2001.
We also have fixed rate yen denominated  debt  obligations in Japan that have no
interest rate risk. At March 31, 2001, our total debt  obligation was $4,130,000
with a long-term  portion of $3,737,000.  A hypothetical  10% change in interest
rates at March 31,  2001 would not have had a material  impact on our results of
operations.



                                       9




                            NANOMETRICS INCORPORATED
                                     PART II

                                OTHER INFORMATION




ITEM 6.           EXHIBITS AND REPORTS ON FORM 8-K

A.       Exhibits

         None

B.       Reports on Form 8-K.

         None



                                       10


                            NANOMETRICS INCORPORATED

                                   SIGNATURES


     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
Registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

NANOMETRICS INCORPORATED
(Registrant)



/s/ Vincent J. Coates
- ------------------------------------
Vincent J. Coates
Chairman of the Board


/s/ John Heaton
- ------------------------------------
John Heaton
Chief Executive Officer


/s/ Paul B. Nolan
- ------------------------------------
Paul B. Nolan
Chief Financial Officer


Dated:  May 8, 2001




                                       11