SECURITIES AND EXCHANGE COMMISSION
                              Washington, DC 20549

                                    FORM 10-Q

 X       Quarterly  report  pursuant  to Section  13 or 15(d) of the  Securities
- ---      Exchange Act of 1934

For the quarterly period ended June 30, 2001
                               -------------

         Transition  report  pursuant  to Section 13 or 15(d) of the  Securities
         Exchange Act of 1934

For the transition period from _______________ to _______________

Commission file number            0-13470
                       ---------------------------


                            NANOMETRICS INCORPORATED
             ------------------------------------------------------
             (Exact name of registrant as specified in its charter)


         California                                       94-2276314
  ----------------------------                       -------------------
(State or other jurisdiction of                        (I. R. S. Employer
 incorporation or organization)                        Identification No.)


  1550 Buckeye Drive, Milpitas, CA                           95035
- ------------------------------------                 -------------------
(Address of principal executive offices)                  (Zip Code)


Registrant's telephone number, including area code      (408) 435-9600
                                                     --------------------


Indicate by check mark whether the registrant (1) has filed all reports required
to be filed  by  Section  13 or 15 (d) of the  Securities  Exchange  Act of 1934
during the preceding 12 months (or for such shorter  period that the  registrant
was  required  to file such  reports),  and (2) has been  subject to such filing
requirements for the past 90 days.

                           YES    X       NO
                               -------        --------


At July 16, 2001 there were  11,683,480  shares of common  stock,  no par value,
issued and outstanding.


                                       1



                            NANOMETRICS INCORPORATED

                                      INDEX


Part I.  Financial Information                                              Page
                                                                            ----

   Item 1.   Financial Statements

             Consolidated Balance Sheets -
             June 30, 2001 and December 31, 2000 .............................3

             Consolidated Statements of Income -
             Three months and six months ended
             June 30, 2001 and 2000 ..........................................4

             Consolidated Statements of Cash Flows -
             Six months ended June 30, 2001 and 2000 .........................6

             Notes to Consolidated Financial
             Statements ......................................................7


   Item 2.   Management's Discussion and Analysis of
             Financial Condition and Results of Operations ...................9


   Item 3.   Quantitative and Qualitative Disclosures
             about Market Risk ..............................................10


Part II.  Other Information

   Item 4.   Submission of Matters to a Vote of Security Holders ............11

   Item 6.   Exhibits and Reports on Form 8-K ...............................11

Signatures ..................................................................12


                                       2




PART I:      FINANCIAL INFORMATION
ITEM 1:      FINANCIAL STATEMENTS


                                    NANOMETRICS INCORPORATED
                                  CONSOLIDATED BALANCE SHEETS
                          (Amounts in thousands except share amounts)



                                                                 June 30,           December 31,
ASSETS                                                             2001                 2000
                                                               (Unaudited)
                                                                ---------            ---------
                                                                               
CURRENT ASSETS:
   Cash and cash equivalents                                    $  10,697            $  16,934
   Short-term investments                                          49,375               52,854
   Accounts receivable, net of
     allowances of $415 and $418                                   13,396               14,319
   Inventories                                                     18,710               15,753
   Deferred income taxes                                            3,894                2,760
   Prepaid expenses and other                                       1,800                3,351
                                                                ---------            ---------

          Total current assets                                     97,872              105,971

PROPERTY, PLANT AND EQUIPMENT, Net                                 43,400               37,223

DEFERRED INCOME TAXES                                                 222                  227

OTHER ASSETS                                                        4,586                1,375
                                                                ---------            ---------

TOTAL                                                           $ 146,080            $ 144,796
                                                                =========            =========

LIABILITIES AND SHAREHOLDERS' EQUITY
CURRENT LIABILITIES:
   Accounts payable                                             $   3,409            $   4,625
   Accrued payroll and related expenses                             1,268                1,610
   Deferred revenue                                                 3,436                3,015
   Other current liabilities                                        2,467                3,049
   Income taxes payable                                               830                  331
   Current portion of debt obligations                                398                  921
                                                                ---------            ---------
          Total current liabilities                                11,808               13,551

DEBT OBLIGATIONS                                                    3,682                4,236
                                                                ---------            ---------
          Total liabilities                                        15,490               17,787
                                                                ---------            ---------

SHAREHOLDERS' EQUITY:
   Common stock, no par value; 25,000,000 shares
     authorized; 11,669,140 and 11,607,839 outstanding             96,768               95,929
   Retained earnings                                               34,941               31,783
   Accumulated other comprehensive loss                            (1,119)                (703)
                                                                ---------            ---------
          Total shareholders' equity                              130,590              127,009
                                                                ---------            ---------
TOTAL                                                           $ 146,080            $ 144,796
                                                                =========            =========
<FN>
 See Notes to Consolidated Financial Statements
</FN>



                                               3





                                           NANOMETRICS INCORPORATED
                                       CONSOLIDATED STATEMENTS OF INCOME
                               (Amounts in thousands, except per share amounts)
                                                  (Unaudited)



                                                       Three Months Ended                 Six Months Ended
                                                           June 30,                           June 30,
                                                     2001           2000                2001           2000
                                                   --------       --------            --------       --------
                                                                                        
NET REVENUES:
   Product sales                                  $  13,531      $ 14,926            $  26,470      $  30,131
   Service                                            1,262          1,764               2,748          2,875
                                                   --------       --------            --------       --------
   Total net revenues                                14,793        16,690               29,218         33,006
                                                   --------       -------             --------       --------

COSTS AND EXPENSES:
   Cost of product sales                              5,661          5,878              10,952         12,312
   Cost of service                                    1,345          1,627               2,811          3,022
   Research and development                           2,724          2,374               5,319          4,119
   Selling                                            2,185          2,395               4,218          4,755
   General and administrative                         1,065          1,007               2,004          2,006
                                                   --------       --------            --------       --------
   Total costs and expenses                          12,980        13,281               25,304         26,214
                                                   --------       --------            --------       --------

INCOME FROM OPERATIONS                                1,813          3,409               3,914          6,792

OTHER INCOME (EXPENSE):
   Interest income                                      704          1,415               1,697          1,891
   Interest expense                                     (18)           (20)                (40)           (41)
   Other, net                                            (1)           128                (410)            57
                                                   --------       --------            --------       --------
   Total other income, net                              685          1,523               1,247          1,907
                                                   --------       --------            --------       --------

INCOME BEFORE INCOME TAXES                            2,498          4,932               5,161          8,699

PROVISION FOR INCOME TAXES                              961          1,982               2,001          3,484
                                                   --------       --------            --------       --------

INCOME BEFORE CUMULATIVE EFFECT
 OF CHANGE IN ACCOUNTING PRINCIPLE                    1,537          2,950               3,160          5,215

CUMULATIVE EFFECT OF CHANGE IN REVE-
 NUE RECOGNITION PRINCIPLE (SAB 101)                      -              -                   -         (1,364)
                                                   --------       --------            --------       --------

NET INCOME                                         $  1,537       $  2,950            $  3,160       $  3,851
                                                   ========       ========            ========       ========

BASIC NET INCOME (LOSS) PER SHARE:
   Income before cumulative effect of change
    in accounting principle                        $   0.13       $   0.26            $   0.27       $   0.50
   Cumulative effect of change in revenue
    recognition principle (SAB 101)                       -              -                   -          (0.13)
                                                   --------       --------            --------       --------
   Net income                                      $   0.13       $   0.26            $   0.27       $   0.37
                                                   ========       ========            ========       ========


                                                      4




DILUTED NET INCOME (LOSS) PER SHARE:
   Income before cumulative effect of change
    in accounting principle                        $   0.13       $   0.24            $   0.26       $   0.45
   Cumulative effect of change in revenue
    recognition principle (SAB 101)                       -            -                     -          (0.12)
                                                   --------       --------            --------       --------
   Net income                                      $   0.13       $   0.24            $   0.26       $   0.33
                                                   ========       ========            ========       ========

SHARES USED IN PER SHARE
COMPUTATION:

   Basic                                             11,658         11,295               11,637        10,494
                                                   ========       ========            =========      ========
   Diluted                                           12,195         12,415               12,094        11,647
                                                   ========       ========            =========      ========


<FN>
  See Notes to Consolidated Financial Statements
</FN>


                                                      5




                                            NANOMETRICS INCORPORATED
                                     CONSOLIDATED STATEMENTS OF CASH FLOWS
                                             (Amounts in thousands)
                                                  (Unaudited)


                                                                                     Six Months Ended
                                                                                         June 30,
                                                                                 2001                  2000
                                                                                 ----                  ----
                                                                                           
CASH FLOWS FROM OPERATING ACTIVITIES:
   Net income                                                              $      3,160         $       3,851
   Reconciliation of net income to net cash
    (used in) provided by operating activities:
   Depreciation and amortization                                                    558                   256
   Deferred rent                                                                      -                   (13)
   Deferred income taxes                                                         (1,158)                  (45)
   Changes in assets and liabilities:
       Accounts receivable                                                          603                (3,337)
       Inventories                                                               (3,466)               (3,024)
       Prepaid expenses and other                                                 1,064                (2,082)
       Accounts payable, accrued expenses and other current liabilities          (1,929)                5,905
       Income taxes payable                                                         664                 2,814
                                                                           -------------         -------------
Net cash (used in) provided by operating activities                                (504)                4,325
                                                                           -------------         -------------
CASH FLOWS FROM INVESTING ACTIVITIES:
   Purchase of short-term investments                                           (79,810)              (64,518)
   Sales/maturities of short-term investments                                    83,289                10,859
   Purchases of property, plant and equipment                                    (6,999)                 (135)
   Other assets                                                                  (2,226)                    -
                                                                           -------------         -------------
Net cash used in investing activities                                            (5,746)              (53,794)
                                                                           -------------         -------------
CASH FLOWS FROM FINANCING ACTIVITIES:
   Proceeds from borrowing                                                            -                   828
   Repayments of debt obligations                                                  (665)                 (231)
   Issuance of common stock                                                         515                73,045
                                                                           -------------         -------------
Net cash (used in) provided by financing activities                                (150)               73,642
                                                                           -------------         -------------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                                             163                   (30)
                                                                           -------------         -------------

NET CHANGE IN CASH AND EQUIVALENTS                                               (6,237)               24,143
CASH AND CASH EQUIVALENTS, beginning of period                                   16,934                 3,442
                                                                           -------------         -------------

CASH AND CASH EQUIVALENTS, end of period                                   $     10,697          $     27,585
                                                                           =============         =============

SUPPLEMENTAL DISCLOSURE OF CASH FLOW
INFORMATION:
   Cash paid for interest                                                  $         31          $         39
                                                                           =============         =============
   Cash paid for income taxes                                              $      2,619          $        695
                                                                           =============         =============


<FN>
  See Notes to Consolidated Financial Statements
</FN>


                                                       6




                            NANOMETRICS INCORPORATED
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                                   (Unaudited)


Note 1.       Consolidated Financial Statements

       The consolidated financial statements include the accounts of Nanometrics
Incorporated and its wholly-owned  subsidiaries.  All significant  inter-company
accounts and transactions have been eliminated.

       While the quarterly  financial  statements are  unaudited,  the financial
statements  included in this report reflect all adjustments  (consisting only of
normal recurring  adjustments) which Nanometrics  considers necessary for a fair
presentation of the results of operations for the interim periods covered and of
our financial  condition at the date of the interim balance sheet. The operating
results for interim  periods are not  necessarily  indicative  of the  operating
results that may be expected for the entire year.  The  information  included in
this  report  should be read in  conjunction  with the  information  included in
Nanometrics'  2000  Annual  Report on Form 10-K  filed with the  Securities  and
Exchange Commission.


Note 2.       Inventories

       Inventories  are  stated at the lower of cost  (first-in,  first-out)  or
market and consist of the following (in thousands):


                                                 June 30,          December 31,
                                                   2001                2000
                                               -------------      --------------
         Raw materials and subassemblies       $  10,088          $    8,126
         Work in process                           4,666               1,434
         Finished goods                            3,956               6,193
                                               -------------      --------------
                                               $  18,710          $   15,753
                                               =============      ==============


Note 3.       Other Current Liabilities

       Other current liabilities consist of the following (in thousands):


                                                 June 30,          December 31,
                                                   2001                2000
                                               -------------      --------------
         Commissions payable                   $     262          $    1,249
         Accrued warranty                            769                 809
         Other                                     1,436                 991
                                               -------------      --------------
                                               $   2,467          $    3,049
                                               ==============     ==============


                                       7





Note 4.       Shareholders' Equity

Net Income Per Share - The  reconciliation  of the share denominator used in the
basic  and  diluted  net  income  per  share  computations  is  as  follows  (in
thousands):


                                                               Three Months Ended            Six Months Ended
                                                                     June 30,                    June 30,
                                                                2001         2000            2001         2000
                                                             ----------   ----------     ----------   ----------
                                                                                             
         Weighted average common shares
           outstanding-shares used in basic
           net income per share computation                     11,658       11,295         11,637       10,494
         Dilutive effect of common stock equivalents,
           using the treasury stock method                         537        1,120            457        1,153
                                                             ----------   ----------     ----------   ----------
         Shares used in dilutive net income
           per share computation                                12,195       12,415         12,094       11,647
                                                             ==========   ==========     ==========   ==========


       During  the three and six month  periods  ended  June 30,  2001 and 2000,
Nanometrics had common stock options  outstanding which could potentially dilute
basic net income per share in the future, but were excluded from the computation
of diluted net income per share as the common  stock  options'  exercise  prices
were greater than the average  market price of the common shares for the period.
At June 30, 2001,  630,034 common stock options with a weighted average exercise
price of $35.49 per share were  excluded  from the  diluted net income per share
computations as their exercise prices were greater than the average market price
of the common shares for the period.

Note 5.       Comprehensive Income

       For the three months ended June 30, 2001 and 2000,  comprehensive income,
which  consisted of net income for the periods and changes in accumulated  other
comprehensive income, was $1,749,000 and $2,756,000,  respectively.  For the six
months  ended June 30, 2001 and 2000  comprehensive  income was  $2,711,000  and
$3,690,000, respectively.

Note 6.       Recently Issued Accounting Standards

       In June 2001, the Financial  Accounting  Standards Board issued Statement
of Financial Accounting Standard (SFAS) No. 141, Business  Combinations and SFAS
No. 142,  Goodwill and Other Intangible  Assets.  SFAS No. 141 requires that all
business  combinations  initiated after June 30, 2001 be accounted for under the
purchase  method and  addresses  the  initial  recognition  and  measurement  of
goodwill and other intangible  assets acquired in a business  combination.  SFAS
No. 142 addresses the initial  recognition and measurement of intangible  assets
acquired  outside of a business  combination and the accounting for goodwill and
other intangible assets subsequent to their  acquisition.  SFAS No. 142 provides
that  intangible  assets with finite useful lives be amortized and that goodwill
and  intangible  assets with  indefinite  lives will not be amortized,  but will
rather be tested at least annually for impairment.  Nanometrics  will adopt SFAS
No. 142 for its fiscal year beginning January 1, 2002. Upon adoption of SFAS No.
142,  Nanometrics  will stop the  amortization  of goodwill with an expected net
carrying value of $1,077,000 at the date of adoption and annual  amortization of
$204,000  that  resulted  from  business  combinations  completed  prior  to the
adoption of SFAS No. 141. Goodwill acquired subsequent to June 30, 2001 will not
be amortized.

                                        8



ITEM 2.  MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
         OF OPERATIONS


Results of Operations

         Total  net  revenues  for the three  months  ended  June 30,  2001 were
$14,793,000, a decrease of $1,897,000 or 11% from the comparable period in 2000.
For the six months ended June 30, 2001, total revenues of $29,218,000  decreased
by  $3,788,000  or 11% from the  comparable  period  in 2000.  Product  sales of
$13,531,000  and  $26,470,000 for the three months and six months ended June 30,
2001,   respectively,   decreased  $1,395,000  or  9%  and  $3,661,000  or  12%,
respectively, as compared with the same periods during 2000. The lower levels of
product  sales  resulted from weaker demand for  semiconductor  process  control
equipment,  particularly in the U.S. and Far East. Service revenue of $1,262,000
and  $2,748,000  for the  three  months  and six  months  ended  June 30,  2001,
respectively,  decreased  $502,000 or 28% and $127,000 or 4%,  respectively,  as
compared  to the same  periods  in 2000 as a  result  of  lower  service  sales,
particularly in the U.S. and the Far East.

         Cost of product sales as a percentage of product sales increased to 42%
in the second  quarter of 2001 from 39% in the second quarter of 2000 and stayed
consistent  at 41% for the six  months  ended  June 30,  2001 and 2000.  Cost of
service as a  percentage  of  service  revenue  increased  to 107% in the second
quarter of 2001 from 92% in the second quarter of 2000, primarily as a result of
lower  service  sales in the  second  quarter  of  2001.  Cost of  service  as a
percentage of service revenue decreased to 102% in the six months ended June 30,
2001 from 105% for the same period in 2000.

         Research  and  development  expenses  for the three month and six month
periods ended June 30, 2001  increased by $350,000 or 15% and $1,200,000 or 29%,
respectively,  compared to the same  periods in 2000  resulting  primarily  from
increased headcount and related expenses for the development of new and enhanced
products.

         Selling  expenses for the three month and six month  periods ended June
30, 2001 decreased by $210,000 or 9% and $537,000 or 11%, respectively, compared
to the same periods in 2000 primarily because of decreased  commission  expenses
and other expenses associated with lower sales levels.

         General and administrative expenses for the three months ended June 30,
2001  increased  $58,000 or 6% compared to the same period in 2000.  General and
administrative  expenses for the six months ended June 30, 2001 decreased $2,000
compared to the same period in 2000.

         Total other income, net for the three month and six month periods ended
June 30, 2001 decreased $838,000 or 55% and $660,000 or 35%, respectively,  from
the comparable periods in 2000 due primarily to lower interest income.

         The cumulative effect of change in revenue  recognition  principle (SAB
101) of $1.4 million in the first quarter of 2000 is the net result of recording
$2.5 million in net revenues,  which were previously recorded in 1999, offset by
$1.1 million in related costs and expenses.

         Nanometrics'  income from  operations was $1,813,000 and net income was
$1,537,000 for the second quarter of 2001 compared to income from  operations of
$3,409,000  and net income of  $2,950,000  for the same period in 2000.  For the
first six months of 2001, Nanometrics' income from operations was $3,914,000 and
net income was $3,160,000 which compared to income from operations of $6,792,000
and net income of $3,851,000 for the same period in 2000.


                                        9




Liquidity and Capital Resources

         At June 30,  2001,  Nanometrics  had  working  capital  of  $86,064,000
compared to $92,420,000 at December 31, 2000. The current ratio at June 30, 2001
was 8.3 to 1. We believe that working capital  including cash, cash  equivalents
and short-term investments of $60,072,000 at June 30, 2001 will be sufficient to
meet our needs through at least the next twelve months. Operating activities for
the first six months of 2001 used cash of $504,000  primarily  from increases in
inventory balances and decreases in accounts payable, accrued expenses and other
current  liabilities,  while  sales/maturities of short-term  investments net of
purchases  provided  $3,479,000,  capital  expenditures used $6,999,000 and debt
repayment used $665,000.

Forward Looking Statements

         The  foregoing  Management's   Discussion  and  Analysis  of  Financial
Condition and Results of Operations contains  forward-looking  statements within
the meaning of Section 27A of the Securities Act of 1933, and Section 21E of the
Securities   Exchange  Act  of  1934.   These   statements   involve  risks  and
uncertainties and actual results could differ materially as a result of a number
of variables,  such as (i) customer demand for Nanometrics' products,  which may
be affected by several factors  including the cyclicality of the  semiconductor,
magnetic recording head and flat panel display industries served by Nanometrics,
patterns of capital  spending  by its  customers,  technological  changes in the
markets  served by  Nanometrics  and its  customers,  and market  acceptance  of
products of both Nanometrics and its customers, (ii) the timing, cancellation or
delay  of  Nanometrics'  customer  orders  and  shipments,   (iii)  competition,
including  competitive  pressures  on product  prices and  changes in pricing by
Nanometrics'  customers  or  suppliers,  (iv)  fluctuation  in foreign  currency
exchange  rates,  particularly  the Japanese  yen, (v) the  proportion  of sales
Nanometrics  makes directly to its customers  versus sales through  distributors
and  representatives,  (vi) market  acceptance  of new and enhanced  versions of
Nanometrics'  products,  (vii)  the  timing  of new  product  announcements  and
releases of products by Nanometrics or its competitors, including our ability to
design,  introduce and  manufacture  new products on a timely and cost effective
basis,  (viii) the size and timing of  acquisitions  of  business,  products  or
technologies  and  fluctuations in the  availability  and cost of components and
subassemblies  of  Nanometrics'  products,  and (ix) the factors set forth under
"Management's  Discussion  and  Analysis of Financial  Condition  and Results of
Operations  - Risk  Factors" in  Nanometrics'  2000 Annual  Report on Form 10-K.
Nanometrics  undertakes no obligation to update forward looking  statements made
in this report to reflect events or circumstances  after the date of this report
or to update reasons why actual  results could differ from those  anticipated in
such forward-looking statements.

ITEM 3.  QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

    We are exposed to financial  market risks,  which include changes in foreign
currency  exchange rates and interest rates. We do not use derivative  financial
instruments.  Instead,  we actively  manage the  balances of current  assets and
liabilities  denominated in foreign currencies to minimize currency  fluctuation
risk. As a result, a hypothetical  10% change in the foreign  currency  exchange
rates at June 30,  2001  would  not have a  material  impact on our  results  of
operations.  Our  investments  in marketable  securities are subject to interest
rate risk but due to the short-term nature of these  investments,  interest rate
changes  would not have a material  impact on their value at June 30,  2001.  We
also have  fixed rate yen  denominated  debt  obligations  in Japan that have no
interest rate risk. At June 30, 2001,  our total debt  obligation was $4,080,000
with a long-term  portion of $3,682,000.  A hypothetical  10% change in interest
rates at June 30,  2001  would  not have a  material  impact on our  results  of
operations.

                                       10



                            NANOMETRICS INCORPORATED
                                     PART II

                                OTHER INFORMATION

ITEM 4.      SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

A.  The annual meeting of shareholders was held on May 16, 2001.

B.  The following directors were elected to the board of directors:
             Vincent J. Coates
             Nathaniel Brenner
             Norman V. Coates
             John D. Heaton
             William G. Oldham
             Edmond R. Ward


C.  The following matters were voted upon at the annual meeting:


                                                        For            Against           Abstain
                                                      -------          -------           -------
                                                                                 
1.       To elect the following directors
         to serve until the next annual meeting
         of shareholders or until their successors
         are elected:
            Vincent J. Coates, Chairman              9,896,379             0              31,908
            Nathaniel Brenner, Director              9,896,379             0              31,908
            Norman V. Coates, Director               9,896,379             0              31,908
            John D. Heaton, Director                 9,896,379             0              31,908
            William G. Oldham, Director              9,896,379             0              31,908
            Edmond R. Ward, Director                 9,896,379             0              31,908

2.       To ratify the appointment of
         Deloitte & Touche LLP as independent
         auditors for the fiscal year ending
         December 31, 2001.                          9,908,835          18,784               668



ITEM 6.  EXHIBITS AND REPORTS ON FORM 8-K

A.       Exhibits.
         None

B.       Reports on Form 8-K.
         None

                                       11




                            NANOMETRICS INCORPORATED

                                   SIGNATURES

         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  Registrant  has duly  caused  this report to be signed on its behalf by the
undersigned thereunto duly authorized.


NANOMETRICS INCORPORATED
(Registrant)



/s/ Vincent J. Coates
- ---------------------
Vincent J. Coates
Chairman of the Board


/s/ John Heaton
- -----------------------------
John Heaton
Chief Executive Officer


/s/ Paul B. Nolan
- -----------------------------
Paul B. Nolan
Chief Financial Officer




Dated:    August 6, 2001

                                       12