UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                             ---------------------

                                    FORM 10-K

                                   (Mark One)

  [X] ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
                                   ACT OF 1934

                   For the fiscal year ended December 31, 2001

                                       OR

     [_] TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
                              EXCHANGE ACT OF 1934

               For the transition period from ________ to ________

                           Commission File No. 0-13470

                            NANOMETRICS INCORPORATED
             (Exact name of Registrant as specified in its charter)

                  California                           94-2276314
       (State or other jurisdiction of             (I.R.S. Employer
        incorporation or organization)            Identification Number)

   1550 Buckeye Drive, Milpitas, California               95035
   (Address of principal executive offices)            (Zip Code)

       Registrant's telephone number, including area code: (408) 435-9600
       ------------------------------------------------------------------
           Securities registered pursuant to Section 12(b) of the Act:
                                      None

           Securities registered pursuant to Section 12(g) of the Act:
                           Common Stock, no par value

Indicate by check mark whether the Registrant (1) has filed all reports required
to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during
the  preceding 12 months (or for such  shorter  period that the  registrant  was
required  to file  such  reports),  and  (2) has  been  subject  to such  filing
requirements for the past 90 days.

YES  [X]   NO  [_]

Indicate by check mark if disclosure of delinquent  filers  pursuant to Item 405
of Regulation  S-K is not contained  herein,  and will not be contained,  to the
best  of  the  registrant's   knowledge,  in  definitive  proxy  or  information
statements  incorporated  by  reference  in Part  III of this  Form  10-K or any
amendment to this Form 10-K. [ ]

The  aggregate  market value of the voting stock held by  non-affiliates  of the
registrant,  based upon the closing  price of Common Stock on February 26, 2002,
as reported by Nasdaq,  was  approximately  $75,841,950.  Shares of voting stock
held by each  officer and director and by each person who owns 5% or more of the
outstanding  voting stock have been  excluded in that such persons may be deemed
to be  "affiliates"  as that term is defined under the rules and  regulations of
the Securities Exchange Act of 1934, as amended. This determination of affiliate
status is not necessarily a conclusive determination for other purposes.

As of February 26, 2002, 11,788,866 shares of the registrant's Common Stock were
outstanding.






                                                 NANOMETRICS INCORPORATED

                                                        FORM 10-K

                                               YEAR ENDED DECEMBER 31, 2001

                                                    TABLE OF CONTENTS

                                                          PART I
                                                                                                              
Item 1.     Business............................................................................................... I-1
Item 2.     Properties............................................................................................. I-13
Item 3.     Legal Proceedings...................................................................................... I-13
Item 4.     Submission of Matters to a Vote of Security Holders.................................................... I-13

                                                         PART II

Item 5.     Market for Registrant's Common Equity and Related Shareholder Matters.................................. II-1
Item 6.     Selected Consolidated Financial Data................................................................... II-1
Item 7.     Management's Discussion and Analysis of Financial Condition and Results Of Operations.................. II-4
Item 7A.    Quantitative and Qualitative Disclosures about Market Risk............................................. II-14
Item 8.     Consolidated Financial Statements and Supplementary Data............................................... II-15
Item 9.     Changes in and Disagreements With Accountants on Accounting and Financial Disclosure................... II-34

                                                         PART III

Item 10.    Directors and Executive Officers of the Registrant..................................................... III-1
Item 11.    Executive Compensation................................................................................. III-1
Item 12.    Security Ownership of Certain Beneficial Owners and Management......................................... III-1
Item 13.    Certain Relationships and Related Transactions......................................................... III-1

                                                         PART IV

Item 14.    Exhibits, Consolidated Financial Statement Schedules, and Reports on Form 8-K.......................... IV-1





                                     PART I

ITEM 1.  BUSINESS

This Business section and other parts of this Annual Report on Form 10-K contain
forward-looking statements that involve risks and uncertainties. Forward-looking
statements include information concerning our possible or assumed future results
of  operations.  Our actual  results  may  differ  materially  from the  results
discussed  in the  forward-looking  statements.  Factors that might cause such a
difference  include,  but are not  limited  to,  those  discussed  below  and in
"Management's  Discussion  and  Analysis of Financial  Condition  and Results of
Operations." The forward-looking  statements contained herein are made as of the
date  hereof,  and we  assume no  obligation  to update  such  forward-  looking
statements or to update  reasons  actual  results could differ  materially  from
those   anticipated  in  such   forward-looking   statements.   In  some  cases,
forward-looking  statements  can be  identified  by  words  such  as  "believe,"
"expect," "anticipate," "plan," "potential," "continue," or similar expressions.

Overview

We are a leader in the design, manufacture,  marketing and support of thin film,
critical  dimension and overlay  metrology systems for the  semiconductor,  flat
panel display and magnetic  recording  head  industries.  Our systems  precisely
measure a wide range of film types deposited on substrates during  manufacturing
in order to control manufacturing  processes and increase production yields. Our
non-contact,  non-  destructive  metrology  systems  use  a  broad  spectrum  of
wavelengths,   high-sensitivity   optics,   proprietary  software  and  patented
technology to measure the thickness, critical dimensions,  optical constants and
uniformity of films and structures deposited on silicon and other substrates. In
addition,  we have  microscope and  software-based  technology for measuring the
relative alignment of adjacent thin film layers - a critical parameter in device
production.

Growth in the market for our  products is driven by the  increasing  use of thin
film technology by  manufacturers of electronic  products,  and more recently by
the increasingly  widespread adoption of both Integrated  Metrology and Advanced
Process  Control  (APC)  by  semiconductor  manufacturers.  With  feature  sizes
shrinking  below 130nm,  the need for very tight  process  tolerances as well as
productivity  improvement from the billion-plus dollar factories are driving the
need for  Integrated  Metrology and APC. We have taken a leadership  position in
innovating and designing an optical critical dimension (OCD) measurement system.
Our integrated OCD solution is increasingly being viewed not only as an enabling
technology  for APC, but also a solution for critical  dimension  measurement in
that market segment  previously  dominated by e-beam-based  SEM systems that are
now reaching their limit of performance  for these smaller  circuit  dimensions.
The compact size and speed of this new, OCD technology  enables the  measurement
system to be fully  integrated  into the process tool thus providing a complete,
feed forward and feedback APC solution for wafer-to-wafer closed loop control.

 Many  types of thin films are used in the  manufacture  of  numerous  products,
including  semiconductors,  flat panel displays and magnetic  recording heads as
well as integrated fiber optics,  conventional and advanced optics, high density
optical  and  magnetic  disks and  lasers.  These  products  require the precise
electronic, optical, magnetic and surface finish properties enabled by thin film
technology.  The rapid growth in the sale and use of these products and the need
for tighter process control and improved  productivity  has created  significant
demand for our stand-alone and integrated metrology systems.

We offer a complete line of systems to address the metrology requirements of our
customers.  Each of our systems is equipped with computerized mapping capability
for measurement,  visualization  and control of film uniformity,  layer-to-layer
circuit  alignment  and  critical  dimensions.  Our  metrology  systems  can  be
categorized as follows:

     o    stand-alone,  fully automated  systems for  high-volume  manufacturing
          operations;

     o    integrated  systems  for  integration  into  semiconductor  processing
          equipment that provide virtually  immediate  measurements and feedback
          to improve process control and increase throughput; and

     o    tabletop systems used to provide manual or semi-automatic measurements
          for engineering and low-volume production environments.

In addition, we provide systems that are used to measure the overlay accuracy of
successive  layers of semiconductor  patterns on wafers in the  photolithography
process.  The accurate  alignment of  successive  film layers,  relative to each
other,  across  the wafer is  critical  for  device  performance  and  favorable
production yields.


                                      I-1


We have been a  pioneer  in the  field of thin  film  measurement  and have been
instrumental  in the development of many  innovations  for over two decades.  We
have been selling metrology  systems since 1977 and have an extensive  installed
base with industry leading customers  worldwide,  including  Applied  Materials,
Samsung, Hyundai, IBM, Intel, TSMC and Hitachi.

Industry Background

Growth

The   increasing    demand   for   Internet    access,    personal    computers,
telecommunications,  and new consumer  electronic  products  and  services  have
fueled  growth  of the  semiconductor,  data  storage  and  flat  panel  display
industries.  In  addition,  integrated  circuits  and  related  components  have
increased in performance  and decreased in price,  contributing  to this growth.
Significant  growth  has  occurred  over  the  past ten  years,  however,  these
industries are cyclical in nature and are characterized by short periods of over
and  under  supply.  During  an over  supply  cycle,  capital  expenditures  for
manufacturing and monitoring systems decline. These expenditures increase during
an under supply cycle. Consumer desire for high performance electronics,  drives
technology  advancement in semiconductor  design and manufacturing and, in turn,
promotes the purchasing of capital  equipment  featuring the latest  advances in
technology.  The two  significant  factors  affecting  demand for the  Company's
measurement  systems are: (i) new construction or refurbishment of manufacturing
facilities, which, in turn, depends on the current and anticipated market demand
for semiconductors, disk drives, flat panel displays, and products that use such
components, and (ii) the increasing complexity of the manufacturing process as a
result of the demand for higher performance  semiconductors,  magnetic recording
heads and flat panel displays.

Semiconductor Manufacturing Process

                               [FLOWCHART OMITTED]

Semiconductors  are  fabricated by a complex  series of process steps on a wafer
substrate made of silicon or other  material.  Thin film  metrology  systems are
used at many points  during the  fabrication  process to monitor  and  precisely
measure film thickness and uniformity as well as chemical properties in order to
maximize  the yield of  acceptable  semiconductors.  Each wafer  typically  goes
through  a  series  of 100 to 500  process  and  metrology  steps  in  generally
repetitive cycles.

The four primary wafer film processing steps are:

     o    deposition;

     o    chemical mechanical planarization, known in our industry as CMP;

     o    photolithography; and

     o    etch.


                                       I-2


Deposition.  Deposition  refers to placing  layers of  insulating  or conductive
materials on a wafer surface in thin films that make up the circuit  elements of
semiconductor  devices.  The four most common methods of deposition are chemical
vapor  deposition  (CVD),   physical  vapor  deposition  (PVD),   diffusion  and
oxidation.  The control of uniformity and thickness  during  deposition of these
films is critical to the performance of the semiconductor circuit.

Chemical Mechanical Planarization.  CMP flattens, or planarizes,  the topography
of the film surface to permit the  patterning of small features on the resulting
smooth surface by the photolithography process. The CMP process is a combination
of chemical  etching and  mechanical  polishing  and  commonly  uses an abrasive
liquid and polishing pad. Semiconductor  manufacturers need metrology systems to
control the CMP process by measuring the thin film layer to determine  precisely
when the appropriate thickness has been reached.

Photolithography. Photolithography is the process step that defines the patterns
of the  circuits to be built on the chip.  Before  photolithography,  a wafer is
pre-coated with photoresist,  a light sensitive film, that must have an accurate
thickness and uniformity. Photolithography involves the projection of integrated
circuit  patterns  onto the  photoresist  after which it is  developed,  leaving
unexposed  areas  available  for  etching.  In order to  precisely  control  the
photolithography  process,  it  is  necessary  to  measure  reflectivity,   film
thickness, critical dimensions and overlay registration.

Etch.  Etch is the process of selectively  removing  precise areas of thin films
that have been  deposited on the surface of a wafer.  The developed and hardened
photoresist  protects  material  that needs to be left to make up the  circuits.
During etch, certain areas of the film not covered by photoresist are removed to
leave a desired  circuit  pattern.  Thin film metrology  systems are required to
verify material removal and critical dimension conformity.

Before and after deposition,  CMP,  photolithography and etch, the wafer surface
is measured to  determine  the quality of the film or pattern and find  defects.
Measurements  are taken to ensure  process  uniformity  and  include  thickness,
width, height, roughness and other characteristics.  Process control helps avoid
costly rework or  misprocessing  and results in higher yields for  semiconductor
manufacturers.

These  processing  steps  are  typically  repeated  multiple  times  during  the
fabrication process, with alternating layers of insulating and conductive films.
Depending on the specific  design of a given  integrated  circuit,  a variety of
film types and thicknesses and a number of layers can be used to achieve desired
electronic  performance  characteristics.  The  semiconductors  are then tested,
separated into  individual  circuits,  assembled and packaged into an integrated
circuit.

Flat Panel Display and Magnetic Recording Head Manufacturing Processes

Flat panel displays and magnetic recording heads are manufactured in clean rooms
using  thin film  processes  that are  similar  to those  used in  semiconductor
manufacturing.   Most  flat  panel  displays  are  constructed  on  large  glass
substrates  that  range  in  size up to  1,100  millimeters.  Multiple  magnetic
recording  heads are  manufactured  on substrates  that are typically made of an
aluminum  oxide-titanium  carbide  alloy,  two to three  millimeters  thick  and
approximately 150 millimeters across.

Increased Use of Thin Film Metrology Systems

Changing trends in the semiconductor,  flat panel display and magnetic recording
head  manufacturing  industries are  increasing the need for metrology  systems.
These trends include the following:

     o    Growing Use of Chemical  Mechanical  Planarization.  Manufacturers are
          adopting CMP to flatten, or planarize, thin films to obtain the ultra-
          flat surfaces required for advanced photolithography. In addition, the
          introduction of new nterconnect  techniques has increased the need for
          CMP.  Accordingly,  semiconductor  manufacturers are seeking metrology
          systems that can help  control the CMP process by  measuring  the thin
          film layer to determine  precisely when the appropriate  thickness has
          been achieved.

     o    Adoption of New Types of Thin Films.  Manufacturers  are  adopting new
          processes  and   technologies   that  increase  the   importance   and
          utilization  of  thin  film  metrology  systems.  To  achieve  greater
          semiconductor  device speed,  manufacturers  are utilizing  copper and
          new,  low  dielectric  constant  insulating   materials  that  require
          enhanced metrology solutions for the manufacturing process.


                                      I-3


     o    Increasing  Complexity of Semiconductors.  Semiconductors are becoming
          more  complex as they operate at faster  speeds with  smaller  feature
          sizes,  employ larger dies that contain more  transistors  and utilize
          increasing  numbers  of  manufacturing  process  steps.  The  value of
          process  wafers  and the cost of rework is  significantly  higher  for
          these complex semiconductors and therefore,  manufacturers are seeking
          to use metrology  systems to increase  production yields and limit the
          amount of rework.

     o    Need for Rapid Ramp of Production Efficiencies.  Competitive forces on
          semiconductor device manufacturers,  such as price cutting and shorter
          product life cycles,  place pressure on the  manufacturers  to rapidly
          achieve production efficiency.  Semiconductor device manufacturers are
          using metrology systems  throughout the fabrication  process or fab to
          ensure that  manufacturing  processes scale rapidly,  are accurate and
          can be repeated on a consistent basis.

Drive Toward Integrated Metrology

For  many  years,  semiconductor   manufacturers  have  sought  to  improve  fab
efficiency by choosing  systems that integrate more than one process step into a
single tool.  Integrated solutions increase productivity with higher throughput,
smaller   overall   footprint,   reduced  wafer   handling  and  faster  process
development.  This  trend  began  in  the  mid-1980s  as  leading  manufacturers
introduced  a  "cluster  process  tool"   architecture  that  combined  multiple
processes in separate  chambers around a central wafer handling  platform.  More
recently,  CMP systems have begun to integrate cleaning technology into a single
system in order to achieve these benefits.

Today,  the same focus on  increased  productivity  is driving  the  adoption of
integrated metrology for many processes, such as CMP, CVD, lithography and etch.
Until recently,  semiconductor  manufacturers had to physically transport wafers
from a process  tool to a separate  metrology  system in order to make  critical
measurements  such as film thickness and  uniformity.  Manufacturers  of process
equipment are increasingly seeking to offer their customers integrated metrology
in their tools to lower costs and improve overall fab efficiency. Such tools can
have one or two metrology  chambers that are integrated  onto a process  system,
which utilize the common  automation  platform so that measurements can be taken
without  removing  the  wafers  from the  tool.  Integrated  metrology  provides
semiconductor manufacturers with several benefits,  including a reduction in the
number of test wafers, increased overall process throughput, faster detection of
process   excursions  and  faults,   reduced  wafer  handling,   faster  process
development and ultimately an improvement in overall equipment effectiveness.

Nanometrics Solution

We are a leader in the design, manufacture,  marketing and support of thin film,
critical  dimension and overlay  metrology systems for the  semiconductor,  flat
panel display and magnetic  recording head industries.  We offer a complete line
of systems to address a broad range of metrology  requirements of our customers.
Our metrology systems can be categorized as follows:

     o    Stand-alone, fully automated systems used for the characterization and
          measurement of thin films in high-volume  manufacturing operations. We
          offer a broad line of fully  automated thin film  thickness,  critical
          dimension and overlay  measurement  systems.  These systems remove the
          dependence on human operators by incorporating reliable wafer handling
          robots and are  designed to meet the speed,  measurement,  performance
          and   reliability   requirements   that  are   essential  for  today's
          semiconductor,   flat  panel  display  and  magnetic   recording  head
          manufacturing  facilities.  Each  of  these  measurement  systems  are
          non-contact and use non-destructive  techniques to analyze and measure
          films.  Our fully  automated  metrology  product  line  also  includes
          systems that are used to measure the critical  dimensions  and overlay
          registration  accuracy of successive layers of semiconductor  patterns
          on wafers in the photolithography process.

     o    Integrated systems are used to measure in-process wafers automatically
          and quickly  without  having to leave the  enclosed  wafer  processing
          system.  In 1998, we introduced  our high-speed  integrated  metrology
          system.  Our  integrated  metrology  systems are compact and monitor a
          multitude  of small  test  points  on the  wafer  using  sophisticated
          pattern  recognition.  Our integrated  systems can be attached to film
          deposition,  CMP,  CVD,  lithography,  etch and other process tools to
          provide rapid monitoring of films on each wafer immediately  before or
          after processing. Integrated systems can offer customers significantly
          increased  operating  efficiency  and  equipment  utilization,   lower
          manufacturing  costs and higher throughput.  We are currently shipping
          integrated systems to Applied Materials for installation on their CMP,
          CVD and etch tools.


                                      I-4


     o    Tabletop  systems are used to manually  or  semiautomatically  measure
          thin films in engineering and low-volume production  environments.  We
          pioneered  and  believe we are the leading  supplier of tabletop  thin
          film  thickness   measurement  systems,   which  are  mainly  used  in
          low-volume   production   environments   and  failure   analysis   and
          engineering  labs. Our tabletop  models have unique  capabilities  and
          several available  configurations,  depending on wafer handling, range
          of films to be measured, uniformity mapping and other customer needs.

Each  of  our  measurement  systems  are  equipped  with  computerized   readout
capability for  measurement,  visualization  and control of film  uniformity and
thickness,  critical dimensions and overlay. In addition,  we have developed new
automated systems and tabletop products for emerging  technologies  using larger
substrates  such as 300  millimeter  wafers and larger flat panel  displays.  We
believe  that  we are the  first  company  to ship  fully  automated  thin  film
thickness measurement systems for 300 millimeter wafers. We also have introduced
new technology for the precise thin film  measurements  that are dictated by sub
0.13 micron design rules and have developed products with mini-environments that
meet the latest standards for clean, particle-free manufacturing.

Strategy

Our  strategy is to offer and  support,  on a worldwide  basis,  technologically
advanced metrology systems that meet the changing manufacturing  requirements of
the semiconductor,  flat panel display and magnetic recording head industries as
well as other  industries  that  use  metrology  systems.  Key  elements  of our
strategy include:

    Continuing to Offer Advanced  Integrated  Metrology Systems.  We were one of
    the first  suppliers to offer  products  that  integrate  process  metrology
    systems into wafer processing  equipment.  We intend to continue our efforts
    to  develop  the  integrated   metrology  market  to  achieve  and  maintain
    competitive advantages.  In September 1998, we entered into an OEM agreement
    to supply  metrology  systems  for Applied  Materials'  Mirra  Mesa(TM)  CMP
    system. In addition,  in July 1999, we introduced a metrology system that is
    incorporated  into  Applied  Materials'  Producer  QA(TM) CVD  system.  Most
    recently,  in July 2001,  we  introduced a  revolutionary  optical  critical
    dimension  (OCD)  metrology  system  that  is  incorporated  in the  Applied
    Materials'  Transforma etch system for controlling critical  dimensions.  We
    continue to sell these products and we are pursuing  other OEM  arrangements
    and will continue to investigate other integrated metrology technologies.

    Maintaining Technology  Leadership.  We are committed to developing advanced
    metrology  systems  that  meet the  requirements  of  advances  in thin film
    manufacturing   technology.   We  have  an  extensive  base  of  proprietary
    technology  and expertise in optics,  software and systems  integration.  We
    have supplemented our capabilities by establishing  strategic  relationships
    to leverage our technical  resources and strengthen  our product  offerings.
    These  include  relationships  with  Newport,  a  manufacturer  of precision
    robotic  systems,   and  J.A.   Woollam  Company,   a  leading  designer  of
    spectroscopic ellipsometer systems. In December 1999, we acquired inspection
    and  metrology  technology  from Phase  Metrics,  a data  storage  equipment
    company,  to augment our technology  portfolio.  In June 2001, we acquired a
    key patent from IBM for  critical  dimension  measurement,  which covers the
    development of our integrated OCD metrology system.

    Leveraging  Existing  Customer  and  Industry  Relationships.  We  expect to
    continue  to  strengthen  our  existing  customer  relationships  and foster
    working partnerships by providing  technologically superior systems and high
    levels of customer support.  Our strong industry  relationships have allowed
    close customer  collaboration  that facilitates our ability to introduce new
    products and  applications  that meet  customer  needs.  We believe that our
    large  customer base will continue to be an important  source of new product
    development  ideas.  Our  large  customer  base  also  provides  us with the
    opportunity  for  increased  sales of  additional  metrology  systems to our
    customers without the extensive effort that might otherwise be required.

    Providing Worldwide Distribution and Support. We believe that a direct sales
    and support  capability is essential for  developing and  maintaining  close
    customer  relationships  and for rapidly  responding  to  changing  customer
    requirements.  Because a  majority  of our sales  come from  outside  of the
    United  States,  we are  expanding  our direct  sales force in South  Korea,
    Taiwan and  southeast  Asia,  and will  continue to expand  into  additional
    territories  as  customer   requirements  dictate.  We  use  selected  sales
    representatives  and distributors in other countries in Asia, Europe and the
    Middle East. We intend to continue  developing our  distribution  network by
    expanding our existing offices,  opening new offices and forming  additional
    distribution  relationships.  We  believe  that  growing  our  international
    distribution network will enhance our competitive position.


                                      I-5


    Providing a Broad Portfolio of Metrology Systems and Technology.  We offer a
    comprehensive  family of  metrology  systems  that  accurately  measure thin
    films,   critical   dimensions   and  overlay   registration   used  in  the
    manufacturing  process.  We  offer  automated  and  integrated  systems  for
    high-volume manufacturing  applications and tabletop systems for engineering
    and  small fab  applications.  Our  products  can  include  a wide  range of
    accessories as well as special hardware and software  configurations to meet
    customer needs.  We plan to continue  enhancing our products and integrating
    additional features and measurement modules that will strengthen and broaden
    our product line.

    Addressing Multiple Markets.  There are broad applications of our technology
    beyond the  semiconductor  industry.  We intend to continue  developing  and
    marketing  products to address metrology  requirements in the manufacture of
    flat panel displays,  magnetic recording heads and any other industries that
    might apply our  technology  in the future.  We believe our  diversification
    through multiple industry applications of our technology increases the total
    available market for our products and reduces, to an extent, our exposure to
    the cyclicality of any particular market.

Products

We have  been a  pioneer  in the  field of thin  film  metrology  and have  been
instrumental in the development of many  innovations over the past 25 years. Our
thin  film  thickness  measurement  systems  use  microscope-based,  non-contact
spectroscopic   reflectometry.   Some  of  our  systems  provide   complementary
spectroscopic  ellipsometry to measure the thickness and optical characteristics
of films on a variety of substrates.  In addition,  we have both  integrated and
stand-alone optical critical metrology systems to measure critical dimensions of
patterns on semiconductor  wafers. We also manufacture a line of optical overlay
registration  systems  that are used to  determine  the  alignment  accuracy  of
successive  layers of semiconductor  patterns on wafers in the  photolithography
process.  Our  products  can be divided into three  groups:  automated  systems,
integrated systems and tabletop systems.



                                                                                         Technology
                                                                --------------------------------------------------------------
                                                                                                  Optical
                                                   Maximum                                        Critical        Advanced
                                                  Substrate     Spectroscopic   Spectroscopic    Dimension        Overlay
System           Market                           Size (mm)     Reflectometry   Ellipsometry     Metrology       Metrology
- ---------------- ------------------------------ --------------- --------------- -------------- --------------- ---------------
                                                                                                      
Automated
  8000X          Semiconductor, Magnetic Head        200              X               X
  8300X          Semiconductor                       300              X               X
  9100           Semiconductor, Magnetic Head        200              X               X
  9200           Semiconductor                       200              X
  9300           Semiconductor                       300              X               X              X
  5500/6500      Flat Panel Display              960 by 1100          X
  7000/7200      Semiconductor                       200                                                             X

Integrated
  9000           Semiconductor                       200              X
  9000b          Semiconductor                       300              X
NanoOCD 9000     Semiconductor                       300                                             X

Tabletop
  3000           Semiconductor, Magnetic Head        200              X
  6100           Semiconductor                       200              X



Automated Systems

Our stand-alone,  fully automated  metrology systems are employed in high-volume
production  environments.  These systems incorporate automated material handling
interface  options for a variety of fab automation  environments,  and implement
multiple  measurement  technologies  for a broad range of substrate  sizes.  Our
automated  systems  range in  price  from  approximately  $200,000  to  $700,000
depending  on  substrate  sizes,  measurement  technologies,  material  handling
interfaces and software options.


                                      I-6


    NanoSpec 8000X

    The NanoSpec 8000X  stand-alone,  automated thin film measurement  system is
    capable of handling  wafers  ranging in size from 75 to 200  millimeters  in
    diameter.  The 8000X is the basic  system  configuration,  while the 8000XSE
    includes a spectroscopic ellipsometer for ultra-thin and multiple film stack
    measurement applications.  Other 8000X options include a standard mechanical
    interface   with   mini-environment   enclosures   for  use  in  ultra-clean
    manufacturing  facilities.  The 8000X can also be  configured  to handle the
    substrates that are used in the magnetic recording head industry.

    NanoSpec 8300X

    The NanoSpec 8300X  stand-alone,  automated thin film measurement  system is
    capable of handling both 200 and 300 millimeter  diameter wafers.  The 8300X
    is the basic system configuration and can be equipped with the spectroscopic
    ellipsometer  for expanded  measurement  applications.  This system can also
    include a  mini-environment  enclosure and wafer load ports  compatible with
    industry  standards.  The 8300X  received a Photonics  Circle of  Excellence
    Award for innovation and achievement in photonic technology.

    NanoSpec 9100

    The NanoSpec 9100  stand-alone,  automated thin film  measurement  system is
    capable of handling  wafers  ranging in size from 75 to 200  millimeters  in
    diameter.  The 9100 can be configured with a deep ultraviolet  (DUV) to near
    infrared (NIR) spectroscopic ellipsometer for ultrathin, multiple film stack
    and DUV lithography measurement  applications.  Other 9100 options include a
    standard mechanical  interface with  mini-environment  enclosures for use in
    ultra-clean manufacturing facilities.  The system also features a Windows NT
    software  platform that conforms to the newly  establish SEMI user interface
    standard.  The 9100 can also be configured to handle the substrates that are
    used in the magnetic  recording head  industry.  We developed the 9100 using
    technologies  from the  integrated  film  thickness  systems  allowing  easy
    transfer of measurement  recipes between the integrated and stand-alone film
    metrology systems.

    NanoSpec 9200

    The NanoSpec 9200  stand-alone,  automated thin film  measurement  system is
    capable  of  handling  wafers of 150 and 200  millimeters  in  diameter.  We
    developed this system using  technologies  from the NanoSpec 9000 integrated
    film thickness system to be compact and to provide high wafer throughput.

    NanoSpec 9300

    The NanoSpec 9300  stand-alone,  automated thin film  measurement  system is
    capable of handling both 200 and 300 millimeter  diameter  wafers.  The 9300
    can  be  configured  with  a  DUV  to  NIR  spectroscopic  ellipsometer  for
    ultrathin, multiple film stack and DUV lithography measurement applications.
    This system can also  include a  mini-environment  enclosure  and wafer load
    ports  compatible  with  industry  standards.  The 9300  conforms to the new
    industry standards for 300 millimeter wafer handling automation and features
    a Windows NT software  platform that conforms to the newly  established SEMI
    user interface  standard.  We developed the 9300 using technologies from the
    integrated  film  thickness  systems  allowing easy transfer of  measurement
    recipes between the integrated and stand-alone film metrology systems.

    NanoSpec 9300is

    The NanoSpec 9300is stand-alone, automated thin film measurement system is a
    DUV-visible  spectroscopic  reflectometer  based system that provides direct
    recipe transfer to Nanometrics Integrated Metrology and stand-alone systems.
    This system can also  include a  mini-environment  enclosure  and wafer load
    ports  compatible with industry  standards.  The 9300is also conforms to the
    new industry  standards for 300  millimeter  wafer  handling  automation and
    features  a  Windows  NT  software  platform  that  conforms  to  the  newly
    established SEMI user interface standard.  We developed the 9300is using the
    same  measurement  technology  from the  integrated  film  thickness  system
    allowing direct  transfer of measurement  recipes between the integrated and
    stand-alone film metrology systems.


                                      I-7


    NanoOCD 9300

    The  NanoOCD  9300  stand-alone,  automated  metrology  system is an optical
    critical  dimension  measurement system that provides direct recipe transfer
    to Nanometrics Integrated Metrology and stand-alone systems. This system can
    also include a  mini-environment  enclosure and wafer load ports  compatible
    with industry standards.  The NanoOCD 9300 also conforms to the new industry
    standards  for 300  millimeter  wafer  handling  automation  and  features a
    Windows NT software  platform  that conforms to the newly  established  SEMI
    user  interface  standard.  We  developed  the  NanoOCD  9300 using the same
    measurement  technology  from the  integrated  OCD  system  allowing  direct
    transfer of measurement  recipes  between the integrated and stand-alone OCD
    metrology systems.

    NanoSpec 5500 and 6500

    The NanoSpec 5500 and 6500 measure most optically  transparent films used in
    the  manufacture of flat panel  displays.  The Model 5500 is fully automated
    and handles large glass substrates up to 550 by 650 millimeters.  This model
    is also capable of  precisely  measuring  at any site on the  substrate  and
    generating film thickness maps, which show uniformity  across the panel. The
    6500 is an advanced version of the 5500 with many  proprietary  software and
    hardware  enhancements  and is capable of handling  substrates  up to 960 by
    1100 millimeters.

    Metra 7000 and NanoOCS 7200 Series

    In 1998, we completed an  acquisition of the Metra product line from Optical
    Specialties.  The Metra is a stand-alone  system used to measure the overlay
    accuracy of  successive  layers of  semiconductor  patterns on wafers in the
    photolithography   process.   We  shipped   our  first   automated   overlay
    registration  system,  the 7000, in June 1998. The recently  introduced 7200
    provides enhanced measurement performance and higher wafer throughput.

Integrated Systems

Our integrated metrology systems are installed inside wafer processing equipment
to provide  near  real-time  measurements  for  improving  process  control  and
increasing  throughput.  Our integrated systems are available for wafer sizes up
to 300  millimeters  and offer deep  ultraviolet,  commonly  referred  to as DUV
measurement technology,  in addition to spectroscopic  reflectometry and optical
critical  dimension   measurement   technologies.   Depending  on  features  and
technologies, our integrated metrology systems range in price from approximately
$80,000 to $295,000.

    NanoSpec 9000

    The  NanoSpec  9000 is an  ultra-compact  measurement  system  designed  for
    integration into semiconductor wafer processing equipment. The system can be
    used in several wafer film process steps  including metal  deposition,  CMP,
    CVD,  photolithography  and etch.  In its basic  configuration,  the 9000 is
    equipped with visible wavelength spectroscopic  reflectometry.  In 1999, the
    9000 received a Photonics  Circle of  Excellence  Award for  innovation  and
    achievement in photonic technology.

    NanoSpec 9000b

    The NanoSpec 9000b is a 300  millimeter-based  system that  incorporates all
    the  features of the 9000.  This  system is  interchangeable  with  industry
    conforming load ports for simplified mechanical integration.

    NanoOCD 9000

    The NanoOCD  9000 is a 300  millimeter-based  system that  incorporates  the
    newly developed OCD technology for the measurement of critical  dimension on
    semiconductor  wafers,  and is designed for integration  into  semiconductor
    wafer  processing  equipment.  The system  can be used in  several  critical
    processing steps including photolithography and etch.


                                      I-8


Tabletop Systems

Our tabletop systems are used mainly in low-volume  production  environments and
in  engineering  labs  where  automated  handling  and high  throughput  are not
required.  Our tabletop product line encompasses both manual and  semi-automated
models and  includes  systems for both film  thickness  and  critical  dimension
measurements.  Our tabletop  system prices range from  approximately  $50,000 to
$200,000 depending primarily on the degree of automation and software options.

    NanoSpec 3000 and 6100

    The NanoSpec tabletop systems provide a broad range of thin film measurement
    solutions at a lower entry price point. The NanoSpec 3000 is a basic, manual
    system while the NanoSpec 6100 models feature  semi-automatic wafer handling
    or staging.

Customers

We sell our metrology systems worldwide to many of the major semiconductor, flat
panel display and magnetic recording head manufacturers and equipment suppliers,
as well as  producers  of silicon  wafers and  photomasks.  The  majority of our
systems are sold to customers located in the United States, Asia and Europe. Two
customers,  Applied Materials and TSMC, represented 12.8% and 10.5% of our total
net revenues in 1999, respectively.  Three customers, Applied Materials, Hyundai
and TSMC,  represented  20.5%,  11.8% and 10% of our total net revenues in 2000,
respectively.  One customer,  Applied Materials,  represented 17.6% of our total
net revenues in 2001.

The following is a list of our top customers, based on revenues, during 2001:

       Applied Materials                          Veonis
       Samsung                                    UMC
       Seiko Epson                                Hitachi
       IBM                                        Chi Mei
       1st Silicon                                Read-Rite

Sales and Marketing

We  believe  that a  direct  sales  and  support  capability  is  essential  for
developing  and  maintaining  close  customer   relationships  and  for  rapidly
responding to changing  customer  requirements.  We provide direct sales support
from our  corporate  office in  California.  We have a direct sales  presence in
South  Korea,  Taiwan and  Japan.  We use  selected  sales  representatives  and
distributors  in the United States and other  countries in Asia,  Europe and the
Middle  East.  We intend to  continue  to develop  our  distribution  network by
expanding  our existing  offices and opening new offices and forming  additional
distribution   relationships.   We  believe  that   growing  our   international
distribution network will enhance our competitive position. We maintain a direct
sales force of highly trained, technically sophisticated sales engineers who are
knowledgeable  in the use of  metrology  systems in general and the features and
advantages  of our  products  in  particular.  We  believe  that our  sales  and
application  engineers  are skilled in working with  customers to solve  complex
measurement and process problems.

Sales to customers in foreign countries  constituted  approximately 60.9%, 60.6%
and 64.8% of total net revenues for 1999,  2000 and 2001,  respectively.  Direct
exports of our  metrology  systems to foreign  customers  and  shipments  to our
subsidiaries  require  general  export  licenses.  See  note 11 of the  notes to
consolidated  financial statements for information  regarding total net revenues
and long-lived assets of our foreign operations.

In order to raise  market  awareness  of our  products,  we  advertise  in trade
publications,  distribute  promotional  materials,  publish technical  articles,
conduct marketing  programs,  issue press releases regarding new products,  work
with a public  relations  firm and  participate  in  industry  trade  shows  and
conferences.


                                      I-9


Technology

We believe that our engineering  expertise,  technology  acquisitions,  supplier
alliances and short-cycle  production  strategies enable us to develop and offer
advanced  solutions that address industry  trends.  By offering common metrology
platforms that can be configured with a variety of measurement technologies, our
customers can specify high  performance  systems not offered by other  suppliers
or,  as a cost  saving  measure,  they can  narrowly  configure  a system  for a
specific application.

    Spectroscopic   Reflectometry.   We   pioneered   the   use  of   micro-spot
    spectroscopic  reflectometry  for  semiconductor  film metrology in the late
    1970s.  Spectroscopic  reflectometry uses multiple  wavelengths  (colors) of
    light to obtain an array of data for  analysis of film  thickness  and other
    film  parameters.   Today's  semiconductor  manufacturers  still  depend  on
    spectroscopic   reflectometry   for  most   film   metrology   applications.
    Reflectometry is the measurement of reflected  light. For film metrology,  a
    wavelength  spectrum in the visible region is commonly used. Light reflected
    from the surfaces of the film and the substrate is analyzed using  computers
    and measurement  algorithms.  The analysis yields thickness  information and
    other parameters without contacting or destroying the film.

    In the mid-1980s,  we introduced a DUV reflectometer for material  analysis.
    In  1991,  we were  awarded  a  patent  for the  determination  of  absolute
    reflectance in the ultraviolet  region.  This technology  provides  enhanced
    measurement  performance  for thinner  films and films stacked on top of one
    another.

    Spectroscopic  Ellipsometry.  Like  reflectometry,  ellipsometry  is a  non-
    contact and non-destructive  technique used to analyze and measure films. An
    ellipsometer  analyzes  the  change  in a  polarized  beam  of  light  after
    reflection   from  a  film's   surface  and   interface.   Our  systems  are
    spectroscopic  providing  ellipsometric data at many different  wavelengths.
    Spectroscopic  ellipsometry  provides a wealth of information  about a film,
    yielding very accurate and reliable measurements. In general,  ellipsometers
    are used for thin films and complex film stacks,  whereas reflectometers are
    used for thicker films and stacks.

    Optical  Critical  Dimension  Technology.  Our OCD  technology is a patented
    critical  dimension  measurement   technology  that  is  used  to  precisely
    determine the dimensions on the  semiconductor  wafer that directly  control
    the  resulting   performance  of  the  integrated   circuit  devices.   This
    non-destructive  CD  measurement  technology is compatible  with the current
    0.13 micrometer  manufacturing  technology and is extendible to below future
    0.1 micrometer  requirements in both the  photolithography  and etch process
    applications.  OCD combines  non-contact  optical  technology with extremely
    powerful  data analysis  software to provide  highly  accurate  measurements
    results for line width,  height and  sidewall  angles.  This  technology  is
    available in both standalone and integrated platforms.

    Surface  Analysis.  We  have  a  variety  of  proprietary,  non-contact  and
    non-destructive  technologies that are used to inspect the surfaces of films
    and substrates. These technologies locate and analyze abnormalities found on
    the surfaces and can be adapted to metrology platforms.

    Overlay Registration.  Overlay registration refers to the relative alignment
    of  two   layers   in  the  thin   film   photolithographic   process.   Our
    microscope-based,  measurement technology utilizes a high magnification, low
    distortion imaging system combined with proprietary  software  algorithms to
    numerically quantify the alignment.

Customer Service and Support

We believe that customer service and technical support are important competitive
factors  and are  essential  to  building  and  maintaining  close,  long-  term
relationships  with our customers.  We provide support to our customers  through
telephonic  technical  support access,  direct  training  programs and operating
manuals  and  other  technical  support  information.  We use our  demonstration
equipment for training  programs in addition to sales and marketing.  We provide
warranty and post-warranty  service from our corporate office in California.  We
also have  service  operations  based in  Massachusetts,  Oregon,  Pennsylvania,
Idaho, Vermont and Texas. We provide local service and spare parts in the United
Kingdom through our office in Scotland and in the rest of Europe by distributors
and sales  representatives.  In Asia,  service is provided by direct  offices in
Japan,  Korea, Taiwan and by a new service office that we opened in Singapore in
2000. Our distributors and representatives provide service in other countries in
Asia.


                                      I-10


We provide a one-year warranty on parts and labor for products sold domestically
and in foreign markets.  Service revenue,  including sales of replacement parts,
represented approximately 8.7% and 10.4% of total net revenues in 2000 and 2001,
respectively.

Backlog

As of  December  31,  2001 our backlog was  approximately  $7.6  million.  As of
December 31, 2000, our backlog was approximately $27.2 million. Backlog includes
orders for  products  that we expect to ship  within 12 months.  Orders from our
customers are subject to cancellation or delay by the customer  without penalty.
Historically,   order   cancellations  and  order  rescheduling  have  not  been
significant.   However,  orders  presently  in  backlog  could  be  canceled  or
rescheduled.  As only a  portion  of our  revenues  for any  fiscal  quarter  is
represented  by  systems  in  backlog,  we do  not  believe  that  backlog  is a
meaningful or accurate indication of our future revenues and performance.

Competition

The market for our metrology systems is intensely  competitive and characterized
by rapidly  evolving  technology.  We compete on a global basis with both larger
and smaller companies in the United States, Japan, Israel and Europe. We compete
primarily  with:  stand-alone  thin film  measurement  products from  KLA-Tencor
Corporation,  Therma-Wave,  Inc.,  Rudolph  Technologies  and Dai Nippon Screen;
integrated thin film measurement  products from Nova Measuring  Instruments Ltd.
and Sensys which was recently acquired by Therma-Wave;  and overlay  measurement
products from KLA-Tencor Corporation,  Accent Technologies and Schlumberger Ltd.
Many of our  competitors  have  substantially  greater  financial,  engineering,
manufacturing  and  marketing  resources  than  we do.  Significant  competitive
factors  include:   measurement   technology,   system  performance   (including
automation  and  software  capability),  ease of use,  reliability,  established
customer bases, cost of ownership, price and global customer service. We believe
that we compete favorably with respect to these factors, but we must continue to
develop  and  design  new  and  improved  products  in  order  to  maintain  our
competitive position.

Manufacturing

We manufacture  our products in the United States,  Japan and Korea.  We combine
proprietary  measurement components and software produced in our facilities with
components and  subassemblies  obtained from outside  suppliers.  Certain of our
products  include system  engineering and software  development to meet specific
customer  requirements.  Our  manufacturing  operations  do not  require a major
investment in capital equipment.

Certain components,  subassemblies and services necessary for the manufacture of
our systems are obtained from a sole supplier or limited group of suppliers.  We
do not maintain any long-term  supply  agreements with any of our suppliers.  We
have entered into an agreement with J.A. Woollam Company for the purchase of the
spectroscopic  ellipsometer  components.  Additionally,  we use  Newport  as our
primary source of robotics components.

Research and Development

Our research and development is directed towards enhancing existing products and
developing and introducing new products to maintain technological leadership and
to  meet  current  and  evolving  customer  needs.  Our  process,   engineering,
marketing,   operations   and  management   personnel   have   developed   close
collaborative  relationships  with many of our customers'  counterparts and have
used these  relationships to identify market demands and target our research and
development  to  meet  those  demands.  We  are  working  to  develop  potential
applications  of new and emerging  technologies,  including  improved  metrology
methods.  We conduct  research and  development at our facilities in California,
Korea and Japan. We have extensive proprietary  technology and expertise in such
areas as spectroscopic  reflectometry using our patented absolute  reflectivity,
robust pattern  recognition  and complex  measurement  software  algorithms.  We
continue  to add to our  intellectual  property,  most  recently in the areas of
critical dimension measurement and integrated metrology.  We also have extensive
experience in systems integration engineering required to design compact, highly
automated  systems  for  advanced  clean  room  environments.  Expenditures  for
research and  development  during 1999,  2000 and 2001 were $4.7  million,  $9.2
million and $10.8 million,  and represented  12.8%, 13.3% and 22.6% of total net
revenues, respectively.


                                      I-11


Intellectual Property

Our success  depends in large part on the technical  innovation of our products.
We actively pursue a program of filing patent applications to seek protection of
technologically sensitive features of our metrology systems. We hold a number of
United States patents with several pending  patents.  The United States patents,
issued during the period 1985 to 2001,  will expire from 2002 to 2020.  While we
attempt  to  protect  our  intellectual  property  rights  through  patents  and
non-disclosure  agreements, we believe that our success will depend to a greater
degree upon  innovation,  technological  expertise  and our ability to adapt our
products to new technology.  We may not be able to protect our  technology,  and
competitors  may  be  able  to  develop  similar  technology  independently.  In
addition, the laws of certain foreign countries may not protect our intellectual
property to the same extent as do the laws of the United States.

From time to time we receive  communications  from third parties  asserting that
our metrology  systems may contain design features which are claimed to infringe
their proprietary rights. We typically refer such matters to our legal counsel.

Employees

At December 31, 2001, we employed approximately 280 persons worldwide, including
81 in research and development,  55 in manufacturing and manufacturing  support,
119 in marketing,  sales and field service and 25 in general  administration and
finance.  None of these  employees is  represented  by a union and we have never
experienced a work stoppage as a result of union actions.  Many of our employees
have specialized  skills of value to us. Our future success will depend in large
part  upon  our  ability  to  attract  and  retain  highly  skilled  scientific,
technical,  managerial,  financial  and  marketing  personnel,  who are in great
demand in the industry. We consider our employee relations to be good.

Executive Officers of the Registrant

The following are our current  executive  officers and their ages as of December
31, 2001:



Name                                           Age            Position
                                                        
Vincent J. Coates...........................   76             Chairman of the Board, Secretary
John D. Heaton..............................   41             President, Chief Executive Officer and Director
Paul B. Nolan...............................   46             Vice President and Chief Financial Officer
Roger Ingalls Jr............................   40             Vice President and Director of Sales


Mr.  Vincent  Coates has been our  Chairman of the Board  since our  founding in
1975. He has also served as our Chief  Executive  Officer and President from our
founding through July 1988,  except for the period January 1986 through February
1987 when he served  exclusively  as Chief  Executive  Officer.  He was  elected
Secretary in February 1989. He resigned the position of Chief Executive  Officer
in April 1998.

Mr. John Heaton  joined us in September  1990 and in April 1994 was elected Vice
President of Engineering and General Manager.  In July 1995, he was appointed to
the Board of  Directors.  He has been  President  since May 1996 and was elected
Chief  Executive  Officer in April 1998. Mr. Heaton served in various  technical
roles at National Semiconductor, a semiconductor manufacturer, from 1978 to 1990
prior to joining us.

Mr.  Paul  Nolan  joined us in March  1989 and in March  1994 was  elected  Vice
President and Chief Financial Officer.  Mr. Nolan served as Financial Analyst at
Harris Corporation, an international  communications equipment company, prior to
joining us.

Mr. Roger  Ingalls has been employed by us since March 1995 and was elected Vice
President in October 1997. During his employment with us, Mr. Ingalls has served
as U.S. Sales and Product Manager,  and most recently Director of North American
Sales.  Prior to joining us, he served as a sales  engineer  for Nikon  Inc.,  a
photo equipment manufacturer, from March 1993 to March 1995.


                                      I-12


ITEM 2.  PROPERTIES

Our principal  manufacturing and administrative facility is located in Milpitas,
California in a 133,000 square foot building owned by the Company.  We purchased
the Milpitas facility in July 2000 and moved into the facility in November 2000.
We also have sales and service  offices in Texas,  Singapore  and  Taiwan.  Rent
expense for our facilities was approximately $302,000 for 2001.

Through our Japanese subsidiary, we own a 50,000 square foot facility in Narita,
Japan. This facility is utilized by our Japanese subsidiary for sales,  service,
engineering and manufacturing.  Our Japanese  subsidiary also leases three sales
and service offices.

Through our Korean subsidiary, we built in 2001 a 39,000 square foot facility in
Pyungtaek,  Korea. This facility is utilized by our Korean subsidiary for sales,
service, engineering and manufacturing.

We are not now operating at full capacity in our current  facilities,  which are
adequate for our business and will continue to meet our  utilization  needs into
the foreseeable future.

ITEM 3.  LEGAL PROCEEDINGS

There are no material  legal  proceedings  pending  against us. We could  become
involved in litigation  from time to time relating to claims  arising out of our
ordinary course of business.

ITEM 4.  SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

No matters were submitted to a vote of security holders during the quarter ended
December 31, 2001.


                                      I-13


                                     PART II

ITEM 5.  MARKET FOR REGISTRANT'S COMMON EQUITY AND RELATED SHAREHOLDER MATTERS

Our  common  stock is quoted on the  Nasdaq  National  Market  under the  symbol
"NANO." The following table sets forth, for the periods indicated,  the high and
low sale prices per share of our common stock as reported on the Nasdaq National
Market.  These  quotations  represent  prices between dealers and do not include
retail  markups,  markdowns or  commissions  and may not  necessarily  represent
actual transactions.

                                                                High       Low
                                                                ----       ---
2000
    First Quarter...........................................   $52.13     $18.13
    Second Quarter..........................................   $49.75     $19.75
    Third Quarter...........................................   $63.88     $28.88
    Fourth Quarter..........................................   $54.50     $10.63
2001
    First Quarter...........................................   $22.31     $12.38
    Second Quarter..........................................   $32.95     $13.50
    Third Quarter...........................................   $36.66     $13.00
    Fourth Quarter..........................................   $27.65     $14.71

On February 26, 2002,  the last  reported  sale price of our common stock on the
Nasdaq National Market was $16.15 per share. As of December 31, 2001, there were
approximately 122 shareholders of record of our common stock.

Dividend Policy

We have never  declared  or paid any cash  dividends  on our capital  stock.  We
currently expect to retain future earnings, if any, for use in the operation and
expansion of our business and do not anticipate paying any cash dividends in the
foreseeable future.

ITEM 6.  SELECTED CONSOLIDATED FINANCIAL DATA

The  selected  consolidated  financial  data set forth  below  should be read in
conjunction with  "Management's  Discussion and Analysis of Financial  Condition
and Results of Operations" and the consolidated financial statements and related
notes included  elsewhere in this Annual Report on Form 10-K.  The  consolidated
statement of operations data set forth below for the fiscal years ended December
31, 1999, 2000 and 2001, and the consolidated  balance sheet data as of December
31, 2000 and 2001, have been derived from our consolidated  financial statements
included  elsewhere in this Annual Report on Form 10-K, and have been audited by
Deloitte & Touche LLP,  independent  auditors.  The  consolidated  statement  of
operations data set forth below for the fiscal years ended December 31, 1997 and
1998, and the consolidated  balance sheet data as of December 31, 1997, 1998 and
1999, have been derived from our audited  consolidated  financial statements not
included  in this Annual  Report on Form 10-K.  The  historical  results are not
necessarily indicative of results to be expected for any future period.


                                      II-1




                                                                          Years Ended December 31,
                                                          1997         1998          1999         2000          2001
                                                          ----         ----          ----         ----          ----
                                                                     (In thousands, except per share data)
                                                                                                
Consolidated Statement of Operations Data:
Net revenues:
  Product sales......................................   $32,767       $29,718       $32,162      $63,468       $42,653
  Service............................................     3,890         3,546         4,246        6,023         4,931
                                                        -------       -------       -------      -------       -------
     Total net revenues..............................    36,657        33,264        36,408       69,491        47,584
                                                        -------       -------       -------      -------       -------
Costs and expenses:
  Cost of product sales..............................    12,092        13,002        14,606       25,082        17,949
  Cost of service....................................     3,632         3,669         4,560        6,022         5,406
  Research and development...........................     2,986         4,206         4,658        9,238        10,760
  Acquired in-process research and development ......        --         1,421            --           --            --
  Selling............................................     6,050         5,728         5,871       10,313         9,523
  General and administrative.........................     2,765         2,828         2,973        4,258         4,177
                                                        -------       -------       -------      -------       -------

     Total costs and expenses........................    27,525        30,854        32,668       54,913        47,815
                                                        -------       -------       -------      -------       -------

Income (loss) from operations........................     9,132         2,410         3,740       14,578          (231)
                                                        -------       -------       -------      -------       -------

Other income (expense):
  Interest income....................................       535           572           662        4,129         2,576
  Interest expense...................................      (110)         (108)         (180)         (76)          (86)
  Other, net.........................................      (175)           64            94         (150)         (517)
                                                        -------       -------       -------      -------       -------

     Total other income, net.........................       250           528           576        3,903         1,973
                                                        -------       -------       -------      -------       -------

Income before income taxes...........................     9,382         2,938         4,316       18,481         1,742

Provision for income taxes...........................     3,625         1,108         1,682        5,942           782
                                                        -------       -------       -------      -------       -------

Income before cumulative effect of change in
   accounting principle..............................    $5,757        $1,830        $2,634      $12,539          $960

Cumulative effect of change in revenue
   recognition principle (SAB 101)...................         -             -             -       (1,364)*           -
                                                        -------       -------       -------      -------       -------

Net Income...........................................    $5,757        $1,830        $2,634      $11,175          $960
                                                        =======       =======       =======      =======       =======
Basic net income (loss) per share:
  Income before cumulative effect of
   change in accounting principle....................     $0.69         $0.21         $0.30        $1.14         $0.08
  Cumulative effect of change in revenue
  recognition principle (SAB 101)....................         -             -             -        (0.12)*           -
                                                        -------       -------       -------      -------       -------
  Net income.........................................     $0.69         $0.21         $0.30        $1.02         $0.08
                                                        =======       =======       =======      =======       =======
Diluted net income (loss) per share:
  Income before cumulative effect of
   change in accounting principle....................     $0.65         $0.20         $0.28        $1.06         $0.08
  Cumulative effect of change in revenue
  recognition principle (SAB 101)....................         -             -             -        (0.12)*           -
                                                        -------       -------       -------      -------       -------
  Net income.........................................     $0.65         $0.20         $0.28        $0.94         $0.08
                                                        =======       =======       =======      =======       =======

* Refer to discussions on SAB 101 in Item 7. "Management's  Discussion and Analysis of Financial Condition and Results
  of Operations."



                                      II-2




                                                                             Years Ended December 31,
                                                              1997        1998        1999        2000        2001
                                                              ----        ----        ----        ----        ----
                                                                                               
Shares used in per share computation:

  Basic..............................................         8,325        8,635       8,829       10,986     11,691
                                                              =====        =====       =====       ======     ======
  Diluted............................................         8,820        9,041       9,393       11,845     12,161
                                                              =====        =====       =====       ======     ======

                                                                                   December 31,
                                                                                   -------------
                                                              1997        1998        1999         2000        2001
                                                              ----        ----        ----         ----        ----
                                                                                   (In thousands)
Consolidated Balance Sheet Data:
Cash, cash equivalents and short-term investments             $13,251     $11,431     $18,140      $69,788     $47,227
Working capital............................................    28,653      30,621      36,021       92,420      80,171
Total assets...............................................    36,243      39,305      46,410      144,796     142,355
Debt obligations, less current portion.....................     2,568       2,496       2,288        4,236       3,314
Total shareholders' equity.................................    28,528      32,010      38,155      127,009     129,845




                                      II-3


ITEM 7. MANAGEMENT'S  DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

The following  Management's  Discussion and Analysis of Financial  Condition and
Results  of  Operations  should  be read in  conjunction  with our  consolidated
financial  statements  and the notes thereto  included  elsewhere in this Annual
Report on Form 10-K. Our discussion  contains  forward-looking  statements based
upon current  expectations  that involve  risks and  uncertainties,  such as our
plans, objectives and intentions. In some cases,  forward-looking statements can
be  identified  by words  such as  "believe,"  "expect,"  "anticipate,"  "plan,"
"potential," "continue" or similar expressions.  Our actual results could differ
materially  from those  anticipated  in these  forward-looking  statements  as a
result of certain risk factors,  including  those set forth in "Factors That May
Affect  Future  Operating  Results" and  elsewhere in this Annual Report on Form
10-K.  We  believe  it is  important  to  communicate  our  expectations  to our
investors.  However,  there may be events in the future  that we are not able to
predict  accurately  or over which we have no control.  You should be aware that
the  occurrence  of the events  described in these risk factors and elsewhere in
this  Annual  Report on Form 10-K  could  materially  and  adversely  affect our
business,  operating results and financial condition. We disclaim any obligation
to update information contained in any forward-looking statement.

Overview

We are a leader in the design,  manufacture,  marketing and support of thin film
metrology  systems  for the  semiconductor,  flat  panel  display  and  magnetic
recording  head  industries.  We have  made  several  strategic  changes  in our
business  over the past three years that have enabled us to further  participate
in these markets. These changes include:

     o    becoming  an original  equipment  manufacturer,  or OEM, of  metrology
          systems  that are  integrated  into  various  types  of  semiconductor
          processing equipment;

     o    the  development  of new products that can be used for 300  millimeter
          wafers and chemical mechanical planarization;

     o    an increased emphasis on product development, manufacturing and direct
          sales in Japan and Korea;

     o    a shift to direct sales from third-party  representatives  in Asia and
          the United States;

     o    a decision to outsource  certain system  components  such as robotics,
          enabling us to leverage our technical resources; and

     o    the  acquisition  of inspection  and metrology  technology  from Phase
          Metrics in December 1999.

  Our business is dependent upon the capital  expenditures of  manufacturers  of
  semiconductors,  flat panel  displays and magnetic  recording  heads and their
  suppliers.  The demand by these  manufacturers  and suppliers for our products
  is,  in  turn,   dependent  on  the  current  and  future  market  demand  for
  semiconductors  and  products  utilizing   semiconductors,   disk  drives  and
  computers  that utilize disk drives and flat panel  displays for use in laptop
  computers,  pagers,  cell  phones  and a variety  of other  applications.  The
  increasing complexity of the manufacturing processes for semiconductors,  flat
  panel displays and magnetic recording heads is also an important factor in the
  demand for our metrology systems.

  We derive our revenues from product sales and services, which include sales of
  accessories and service to the installed base of products.  For the year ended
  December 31,  2001,  we derived  89.6% of our total net revenues  from product
  sales and 10.4% of our total net revenues from services. Revenues from product
  sales and replacement and spare parts are generally  recognized at the time of
  shipment. Revenues from service work are recognized when performed. In certain
  geographical  regions  where  risk of loss  and  title  do not  transfer  upon
  shipment,  payments  received are recorded as deferred  revenue and recognized
  upon customer  acceptance.  See note 1 of the notes to consolidated  financial
  statements for more information regarding our revenue recognition policy.

Critical Accounting Policies

Revenue  Recognition - Revenues are recognized  when  persuasive  evidence of an
arrangement  exists,  delivery has occurred or services have been rendered,  the
price is fixed and determinable and  collectibility is reasonably  assured.  For
product sales,  this generally occurs at the time of shipment,  and for revenues
from service work,  this generally  occurs when the work is performed.  Revenues
from service contracts are recognized ratably over the period under contract. We
sell the majority of our products with a one-year repair or replacement warranty
and record a  provision  for  estimated  claims at the time of sale.


                                      II-4


In certain  geographical  regions  where risk of loss and title  transfers  upon
customer  acceptance,  payments  received are  recorded as deferred  revenue and
recognized as revenue upon customer acceptance.

In December  1999, the  Securities  and Exchange  Commission  (SEC) issued Staff
Accounting  Bulletin (SAB 101),  Revenue  Recognition  in Financial  Statements,
which summarizes  certain views of the SEC staff in applying  generally accepted
accounting  principles to revenue recognition in the financial  statements.  SAB
101 clarified delivery criteria,  which affected our revenue recognition policy.
We applied the  provisions  of SAB 101 in the quarter  ended  December 31, 2000,
retroactive  as  of  the  beginning  of  the  fiscal  year.   Accordingly,   the
accompanying  consolidated  statements of income for the year ended December 31,
2000 and 2001, is reflected in  accordance  with SAB 101. The impact of adoption
of SAB 101 in fiscal 2000 resulted in $7.8 million of revenue being  deferred to
future  periods.  In  addition,  the impact of adoption of SAB 101 resulted in a
cumulative  effect of $1.4 million  resulting  from the  recognition  of certain
historic 1999 revenues in 2000.

Results of Operations

The following table presents our consolidated statements of operations data as a
percentage of total net revenues for the years ended December 31, 1999, 2000 and
2001:



                                                                                           Years Ended December 31,
                                                                                           ------------------------
                                                                                     1999            2000            2001
                                                                                     ----            ----            ----
                                                                                                            
Net revenues:
    Product sales............................................................        88.3%           91.3%           89.6%
    Service..................................................................        11.7             8.7            10.4
                                                                                    -----           -----           -----
       Total net revenues....................................................       100.0           100.0           100.0
                                                                                    -----           -----           -----
Cost and expenses:
    Cost of product sales....................................................        40.1            36.1            37.7
    Cost of service..........................................................        12.5             8.7            11.4
    Research and development.................................................        12.8            13.3            22.6
    Selling..................................................................        16.1            14.8            20.0
    General and administrative...............................................         8.2             6.1             8.8
                                                                                    -----           -----           -----

       Total cost and expenses...............................................        89.7            79.0           100.5
                                                                                    -----           -----           -----

Income (loss) from operations................................................        10.3            21.0            (0.5)
                                                                                    -----           -----           -----
Other income (expense):
    Interest income..........................................................         1.8             5.9             5.4
    Interest expense.........................................................        (0.5)           (0.1)           (0.2)
    Other, net...............................................................         0.3            (0.2)           (1.1)
                                                                                    -----           -----           -----

       Total other income, net...............................................         1.6             5.6             4.1
                                                                                    -----           -----           -----

Income before income taxes...................................................        11.9            26.6             3.6
Provision for income taxes...................................................         4.7             8.6             1.6
                                                                                    -----           -----           -----

Income before cumulative effect of change in accounting principle............         7.2            18.0             2.0

Cumulative effect of change in revenue recognition principle (SAB 101).......           -            (2.0)              -
                                                                                    -----           -----           -----

Net income...................................................................         7.2%           16.0%            2.0%
                                                                                    =====           =====           =====



                                      II-5


Years ended December 31, 1999, 2000 and 2001

Total net  revenues.  Total net revenues  decreased  31.5% from $69.5 million in
2000 to $47.6 million in 2001.  Product sales decreased 32.8% from $63.5 million
in 2000 to $42.7  million  in 2001.  Unit  sales of  automated,  integrated  and
tabletop systems were each down from their 2000 levels.  The decrease in product
sales resulted from reduced demand for  semiconductor  process control metrology
equipment in 2001, especially in the U.S. and Asia. We believe that this reduced
demand was attributable  primarily to overcapacity in the semiconductor industry
as well as the economic slowdown in the U.S. and Japan in 2001.  Service revenue
decreased  18.1% from $6.0 million in 2000 to $4.9 million in 2001. The decrease
in  service  revenue  is  primarily  attributable  to lower  sales of parts  and
services  in the  U.S.  and  Asia in 2001  due in  part  to the  decline  in the
semiconductor  market discussed above.  Total net revenues  increased 90.9% from
$36.4 million in 1999 to $69.5 million in 2000.  Product sales  increased  97.3%
from $32.2  million in 1999 to $63.5  million in 2000.  The  increase in product
sales resulted from stronger demand for our products, especially in the U.S. and
Asia. However,  this was offset by the change in accounting  principle (SAB 101)
which  had the  impact  of  lowering  both the  product  sales and the total net
revenues by approximately  $5.0 million in 2000. Service revenue increased 41.8%
from $4.2  million in 1999 to $6.0  million  in 2000.  The  increase  in service
revenue is primarily  attributable  to higher sales of parts and services in the
U.S. and Asia in 2000 due in part to the continued  growth in the  semiconductor
market.   International   revenues,   which   includes   sales  by  our  foreign
subsidiaries,  constituted  approximately  60.9%,  60.6%  and 64.8% of total net
revenues for 1999, 2000 and 2001, respectively.

Cost of product  sales.  Cost of product  sales as a percentage of product sales
increased from 39.5% in 2000 to 42.1% in 2001  primarily  because of lower sales
volumes in 2001  resulting  in higher per unit  manufacturing  costs  along with
increased  manufacturing  capacity added to our U.S.  facility in 2001.  Cost of
product sales as a percentage of product sales  decreased  from 45.4% in 1999 to
39.5% in 2000  primarily  because of higher sales  volumes in 2000  resulting in
lower per unit manufacturing costs. The change in accounting principle (SAB 101)
had the impact of lowering the cost of product  sales as a percentage of product
sales from approximately 40.4% to 39.5% in 2000.

Cost of service.  Cost of service as a percentage of service  revenue  increased
from  100.0% in 2000 to 109.6% in 2001  primarily  as a result of lower  service
sales in the U.S and Asia and the addition of service  personnel  in  Singapore.
Cost of service as a percentage of service revenue decreased from 107.4% in 1999
to 100.0% in 2000  primarily as a result of higher  service sales in the U.S and
Asia.

Research and development. Research and development expenses increased 16.5% from
$9.2  million  in 2000 to  $10.8  million  in 2001  as a  result  of  additional
headcount and higher materials  expenses used in the development of new products
in 2001. Research and development  expenses increased 98.3% from $4.7 million in
1999 to $9.2  million  in 2000 as a result of  additional  headcount  and higher
materials  expenses in 2000.  We are  committed  to the  development  of new and
enhanced products and believe that new product introductions are required for us
to maintain our  competitive  position.  During 2001,  research and  development
expenses represented 22.6% of total net revenues,  compared to 13.3% in 2000 and
12.8% in 1999.

Selling.  Selling  expenses  decreased  7.7% from $10.3  million in 2000 to $9.5
million in 2001 primarily because of lower sales and related expenses  including
commissions in 2001.  Selling expenses increased 75.7% from $5.9 million in 1999
to $10.3 million in 2000 primarily  because of higher sales and related expenses
including   headcount  and  commissions  in  2000.  In  2001,  selling  expenses
represented 20.0% of total net revenues,  compared to 14.8% in 2000 and 16.1% in
1999.

General and administrative.  General and administrative  expenses decreased 1.9%
from $4.3  million in 2000 to $4.2 million in 2001.  General and  administrative
expenses  increased 43.2% from $3.0 million in 1999 to $4.3 million in 2000 as a
result of higher  spending  associated  with the increase in total net revenues.
During 2001, general and administrative  expenses  represented 8.8% of total net
revenues, compared to 6.1% in 2000 and 8.2% in 1999.

Total other  income,  net.  Total other income,  net  decreased  49.4% from $3.9
million in 2000 to $2.0 million in 2001 primarily due to lower  interest  income
in 2001. Total other income,  net increased 577.6% from $576,000 in 1999 to $3.9
million in 2000 primarily due to higher interest income in 2000.


                                      II-6


Provision for income taxes.  Our effective  income tax rate increased from 32.2%
in 2000 to  44.9%  in 2001  primarily  due to  profits  earned  by our  Japanese
subsidiary that could not be offset against losses from our other  subsidiaries.
Our  effective  income  tax rate  decreased  from 39.0% in 1999 to 32.2% in 2000
primarily  due to an R&D tax credit taken in 2000 and reversal of the  valuation
allowance related to our Japanese subsidiary.  The effective income tax rates in
2001 and 1999  exceeded  the U.S.  statutory  rate due  primarily to foreign tax
provision  higher  than  U.S.  rates  and  changes  in the  valuation  allowance
partially offset by the realization of foreign sales  corporation  benefit while
in 2000 the effective rate was lower than the U.S.  statutory rate due primarily
to utilization  of tax credits,  higher  foreign sales  corporation  benefit and
change in valuation allowance offset by higher state income tax.

Cumulative  effect of change in revenue  recognition  principle  (SAB 101).  The
cumulative  effect of $1.4 million in 2000 is the net result of  recording  $2.5
million in net revenues,  which were previously recorded in 1999, offset by $1.1
million in related costs and expenses.

Liquidity and Capital Resources

On December 31, 2001, our cash,  cash  equivalents  and  short-term  investments
totaled $47.2  million as compared to $69.8 million at December 31, 2000.  These
funds are invested  primarily in U.S.  Treasury  Bills.  Our working  capital of
$80.2 million at December 31, 2001  decreased from $92.4 million at December 31,
2000. We believe that our working capital,  including cash, cash equivalents and
short-term  investments,  will be  sufficient to meet our needs at least through
the next twelve months.

Operating  activities  during  2001 used  cash of $7.1  million  primarily  from
increased  inventory and lower other  current  liabilities  offset  partially by
lower accounts receivable resulting from reduced sales levels in 2001. Investing
activities  provided  $36.3  million due  primarily  to net sales of  short-term
investments  of $52.9 million  offset to some extent by $13.2 million in capital
expenditures  used to improve  our  facilities  and to expand our  manufacturing
capacity. Financing activities provided cash of $501,000 primarily from the sale
of shares  under the  employee  stock  purchase  and option plans offset to some
extent by the net repayment of debt obligations related to mortgages in Japan.

Operating  activities  during 2000 provided cash of $9.5 million  primarily from
net income and increased  accounts payable and other current  liabilities offset
partially  by  higher  accounts  receivable  and  inventory  levels.   Investing
activities used $73.4 million due to net purchases of short-term  investments of
$38.1  million and $35.3 million in capital  expenditures  used for the purchase
and improvement of our building in Milpitas,  California.  Financing  activities
provided cash of $77.5 million  primarily from a public offering of common stock
in March 2000, the issuance of debt obligations and the sale of shares under the
employee  stock  purchase and option  plans offset by the net  repayment of debt
obligations related to mortgages in Japan.

Operating  activities  during 1999 provided cash of $7.1 million  primarily from
net income and changes in income  taxes of $2.8  million.  Investing  activities
used $5.9 million due to net purchases of short-term investments of $4.8 million
and $1.0 million in capital  expenditures and prepaid  licenses fees.  Financing
activities  provided cash of $816,000  primarily due to the sale of shares under
the employee stock purchase and option plans offset by the net repayment of debt
obligations related to mortgages in Japan of $1.3 million.

We have  evaluated  and will continue to evaluate the  acquisition  of products,
technologies  or  businesses  that  are  complementary  to our  business.  These
activities may result in product and business  investments  which may affect our
cash position and working capital balances.

Recent Accounting Pronouncements

In June 1998, the Financial  Accounting  Standards Board (FASB) issued Statement
of Financial  Accounting  Standards  (SFAS) No. 133,  "Accounting for Derivative
Instruments and Hedging Activities." This statement requires companies to record
derivatives  on the  balance  sheet as assets or  liabilities,  measured at fair
value. Gains or losses resulting from changes in the values of those derivatives
would be accounted  for  depending on the use of the  derivative  and whether it
qualifies for hedge  accounting.  SFAS No. 133 was effective for us beginning in
the first  quarter of fiscal year 2001.  The adoption of this  statement did not
have a significant  impact on our consolidated  financial  position,  results of
operations or cash flows.

In December 1999, the  Securities and Exchange  Commission  (SEC) released Staff
Accounting   Bulletin   (SAB)  No.  101,   "Revenue   Recognition  in  Financial
Statements."  This bulletin  summarizes  certain  interpretations  and practices
followed  by the  Division  of  Corporation  Finance and the Office of the Chief
Accountant  of the  SEC in  administering  the  disclosure


                                      II-7


requirements  of the  federal  securities  laws in applying  generally  accepted
accounting   principles  to  revenue   recognition   in  financial   statements.
Application  of the  accounting  and  disclosures  desired in the  bulletin  was
required by the fourth fiscal quarter of 2000 and the effects are required to be
recorded through a retroactive, cumulative-effect adjustment as of the beginning
of the fiscal year,  with a  restatement  of all prior  interim  quarters in the
year. We implemented SAB No. 101 during the fourth quarter of fiscal 2000, which
resulted in a cumulative  effect of change in revenue  recognition  principle in
the amount of $1.4 million.  The impact of SAB No. 101 on our revenues and costs
are described in  "Management's  Discussion and Analysis of Financial  Condition
and Results of Operations."

In June 2001, the FASB issued SFAS No. 141,  Business  Combinations and SFAS No.
142,  Goodwill  and Other  Intangible  Assets.  SFAS No. 141  requires  that all
business  combinations  initiated after June 30, 2001 be accounted for under the
purchase  method and  addresses  the  initial  recognition  and  measurement  of
goodwill and other intangible  assets acquired in a business  combination.  SFAS
No. 142 addresses the initial  recognition and measurement of intangible  assets
acquired  outside of a business  combination and the accounting for goodwill and
other intangible assets subsequent to their  acquisition.  SFAS No. 142 provides
that  intangible  assets with finite useful lives be amortized and that goodwill
and  intangible  assets with  indefinite  lives will not be amortized,  but will
rather be tested at least annually for impairment.  Nanometrics  will adopt SFAS
No. 142 for its fiscal year beginning January 1, 2002. Upon adoption of SFAS No.
142,  Nanometrics  will stop the  amortization  of goodwill with an expected net
carrying value of $1,181,000 at the date of adoption and annual  amortization of
$288,000  that  resulted  from  business  combinations  completed  prior  to the
adoption of SFAS No. 141. Goodwill acquired subsequent to June 30, 2001 will not
be amortized.

In August 2001, the Financial  Accounting  Standards  Board issued SFAS No. 144,
Accounting for the impairment or Disposal of Long-Lived  Assets.  This statement
retains a majority  of the  requirements  of SFAS No.  121,  Accounting  for the
Impairment of Long-Lived Assets and for Long-Lived Assets to be Disposed Of, and
addresses  certain   implementation  issues.  SFAS  No.  144  is  effective  for
Nanometrics' fiscal year beginning January 1, 2002. Although Nanometrics has not
fully assessed the  implications of SFAS NO. 144,  Nanometrics  does not believe
the  adoption  of  this  statement  will  have  a  significant   impact  on  the
consolidated financial position, results of operations or cash flows.

Factors That May Affect Future Operating Results

You should carefully consider the risks described below together with all of the
other  information  included in this Annual Report on Form 10-K before making an
investment  decision.  The risks and  uncertainties  described below are not the
only ones that we face.  If any of the  following  risks  actually  occurs,  our
business,  financial  condition or operating  results  could be harmed.  In such
case,  the trading price of our common stock could  decline,  and you could lose
all or part of your investment.

Risks Related to Our Business

    Cyclicality in the semiconductor,  flat panel display and magnetic recording
    head  industries has led to substantial  decreases in demand for our systems
    and may from time to time continue to do so.

    Our operating  results have varied  significantly due to the cyclical nature
    of the  semiconductor,  flat  panel  display  and  magnetic  recording  head
    industries.   The  majority  of  our  business   depends  upon  the  capital
    expenditures of semiconductor  device and capital  equipment  manufacturers.
    These manufacturers' capital expenditures,  in turn, depend upon the current
    and  anticipated   market  demand  for  semiconductors  and  products  using
    semiconductors.  The semiconductor industry is cyclical and has historically
    experienced  periodic  downturns.  These  downturns  have often  resulted in
    substantial  decreases  in  the  demand  for  capital  equipment,  including
    metrology  systems.  We have found that the  resulting  decrease  in capital
    expenditures  has  typically  been  more  pronounced  than the  downturn  in
    semiconductor device industry revenues. We expect the cyclical nature of the
    semiconductor industry, and therefore, our business, to continue. Currently,
    the semiconductor  industry is experiencing a downturn.  Should the downturn
    continue, our business and results of operations could suffer.

    We are highly dependent on international sales and operations, which exposes
    us to foreign political and economic risks.

    Sales to customers in foreign countries  accounted for  approximately  60.6%
    and 64.8% of our  total net  revenues  in 2000 and  2001,  respectively.  We
    maintain  facilities in Japan and Korea.  We anticipate  that  international
    sales will continue to account for a significant portion of our revenues.


                                      II-8


    Our reliance on  international  sales and  operations  exposes us to foreign
    political and economic risks, including:

     o    political, social and economic instability;

     o    trade restrictions and changes in tariffs;

     o    import and export license requirements and restrictions;

     o    difficulties in staffing and managing international operations;

     o    disruptions in international transport or delivery;

     o    fluctuations in currency exchange rates;

     o    difficulties in collecting receivables; and

     o    potentially adverse tax consequences.

    If any of these risks  materialize,  our international  sales could decrease
    and our foreign operations could suffer.

    Because we derive a significant  portion of our revenues from sales in Asia,
    our sales and  results of  operations  could be  adversely  affected  by the
    instability of Asian economies.

    Our sales to customers in Asian markets represented  approximately 55.0% and
    52.8% of our total net revenues in 2000 and 2001, respectively. Countries in
    the Asia Pacific region,  including Japan,  Korea and Taiwan,  each of which
    accounted  for a  significant  portion of our business in that region,  have
    experienced  general  economic  weaknesses  over the  past  year  which  has
    adversely affected our sales to semiconductor manufacturers located in these
    regions and could harm our sales in future periods.

    Our largest customers account for a significant portion of our revenues, and
    our revenues would  significantly  decline if one or more of these customers
    were to purchase  significantly  fewer of our systems or if they  delayed or
    cancelled a large order.

    Historically, a significant portion of our revenues in each quarter and year
    has been derived from sales to relatively few customers,  and we expect this
    trend  to  continue.   If  any  of  our  key  customers   were  to  purchase
    significantly  fewer systems, or if a large order were delayed or cancelled,
    our  revenues  would  significantly  decline.  In  2001,  sales  to  Applied
    Materials  accounted for 17.6% of our total net revenues.  In 2000, sales to
    Applied Materials,  Hyundai and TSMC accounted for 20.5%, 11.8% and 10.0% of
    our total net revenues.  There are only a limited number of large  companies
    operating in the  semiconductor,  flat panel display and magnetic  recording
    head industries. Accordingly, we expect that we will continue to depend on a
    small number of large  customers for a  significant  portion of our revenues
    for at least the next several years.  In addition,  as large  semiconductor,
    flat panel display and magnetic  recording head  manufacturers and suppliers
    seek to establish closer relationships with their suppliers,  we expect that
    our customer base will become even more concentrated.

    The success of our  product  development  efforts  depends on our ability to
    anticipate  market  trends  and the  price,  performance  and  functionality
    requirements of semiconductor device  manufacturers.  In order to anticipate
    these  trends and ensure that  critical  development  projects  proceed in a
    coordinated  manner,  we must  continue  to  collaborate  closely  with  our
    customers.  Our  relationships  with our customers provide us with access to
    valuable  information  regarding industry trends, which enables us to better
    plan our product development  activities.  If our current relationships with
    our large  customers  are impaired,  or if we are unable to develop  similar
    collaborative  relationships  with  important  customers in the future,  our
    long-term  ability  to  produce  commercially  successful  systems  will  be
    impaired.

    We  depend  on  Applied  Materials  for  sales of our  integrated  metrology
    systems,  and the loss of Applied  Materials  as a  customer  could harm our
    business.

    We believe that sales of integrated  metrology  systems will be an important
    source of future revenues.  Sales of our integrated metrology systems depend
    upon Applied Materials selling semiconductor equipment products that include
    our metrology systems as components.  If Applied Materials is unable to sell
    such  products,  or if Applied  Materials  chooses to focus its attention on
    products that do not integrate our systems,  our business  could suffer.  We
    may be unable to retain Applied Materials as a customer.  If we lose Applied
    Materials  as a customer for any reason,  our ability to realize  sales from
    integrated metrology systems would be significantly diminished,  which would
    harm our business.


                                      II-9


    Our  quarterly  operating  results have varied in the past and probably will
    continue to vary significantly in the future, which will cause volatility in
    our stock price.

    Our quarterly  operating  results have varied  significantly in the past and
    are  likely to vary in the  future,  which  could  cause our stock  price to
    decline.  Some of the factors that may influence  our operating  results and
    subject our stock to extreme price and volume fluctuations include:

     o    changes in customer demand for our systems;

     o    economic  conditions  in the  semiconductor,  flat panel  display  and
          magnetic recording head industries;

     o    the timing, cancellation or delay of customer orders and shipments;

     o    market acceptance of our products and our customers' products;

     o    competitive  pressures on product prices and changes in pricing by our
          customers or suppliers;

     o    the timing of new product  announcements and product releases by us or
          our competitors  and our ability to design,  introduce and manufacture
          new products on a timely and cost-effective basis;

     o    the timing of acquisitions of businesses, products or technologies;

     o    the levels of our fixed expenses,  including  research and development
          costs  associated  with product  development,  relative to our revenue
          levels; and

     o    fluctuations  in foreign  currency  exchange rates,  particularly  the
          Japanese yen.

    Due to the foregoing  factors and other  factors  described in this "Factors
    That  May  Affect  Future  Operating  Results"  section,   we  believe  that
    period-to-period  comparisons of our operating  results are not  necessarily
    meaningful, and you should not view these operating results as indicators of
    our future  performance.  If our operating  results in any period fall below
    the expectations of securities  analysts and investors,  the market price of
    our common stock would likely decline.

    We obtain some of the components and  subassemblies  included in our systems
    from a single  source or a limited  group of  suppliers,  and the partial or
    complete loss of one of these suppliers could cause production  delays and a
    substantial loss of revenue.

    We rely on outside vendors to manufacture many components and subassemblies.
    Certain components, subassemblies and services necessary for the manufacture
    of our  systems  are  obtained  from a sole  supplier  or  limited  group of
    suppliers.  We do not maintain any long-term  supply  agreements with any of
    our suppliers.  We have entered into  arrangements with J.A. Woollam Company
    for the purchase of the spectroscopic ellipsometer component and Newport for
    the robotics  incorporated in our advanced measurement systems. Our reliance
    on a sole or a limited group of suppliers involves several risks,  including
    the following:

     o    we may be unable to obtain an adequate supply of required components;

     o    we have  reduced  control  over  pricing  and the timely  delivery  of
          components and subassemblies; and

     o    our  suppliers  may be  unable  to  develop  technologically  advanced
          products to support our growth and development of new systems.

    Because the  manufacturing of certain of these components and  subassemblies
    involves  extremely  complex  processes and requires long lead times, we may
    experience  delays  or  shortages  caused  by  suppliers.  We  believe  that
    alternative sources could be obtained and qualified, if necessary,  for most
    sole  and  limited  source  parts.  However,  if  we  were  forced  to  seek
    alternative   sources  of  supply  or  to  manufacture  such  components  or
    subassemblies  internally,  we may be forced to redesign our systems,  which
    could  prevent us from  shipping our systems to customers on a timely basis.
    Some of our suppliers have relatively limited financial and other resources.
    Any inability to obtain adequate deliveries,  or any other circumstance that
    would restrict our ability to ship our products,  could damage relationships
    with current and prospective customers and could harm our business.


                                     II-10


    Our current and potential  competitors have significantly  greater resources
    than we do, and increased competition could impair sales of our products.

    We operate in the highly competitive  semiconductor,  flat panel display and
    magnetic  recording head  industries and face  competition  from a number of
    companies, many of which have greater financial, engineering, manufacturing,
    marketing  and  customer  support  resources  than we do. As a  result,  our
    competitors  may be  able  to  respond  more  quickly  to  new  or  emerging
    technologies  or market  developments by devoting  greater  resources to the
    development, promotion and sale of products, which could impair sales of our
    products.  Moreover,  there  has been  significant  merger  and  acquisition
    activity among our competitors and potential competitors. These transactions
    by our  competitors  and  potential  competitors  may  provide  them  with a
    competitive  advantage  over us by  enabling  them to rapidly  expand  their
    product  offerings  and  service  capabilities  to meet a  broader  range of
    customer  needs.  Many  of our  customers  and  potential  customers  in the
    semiconductor, flat panel display and magnetic recording head industries are
    large  companies that require global support and service for their metrology
    systems.

    Variations  in the  amount of time it takes for us to sell our  systems  may
    cause  fluctuations  in our operating  results,  which could cause our stock
    price to decline.

    Variations  in the length of our sales  cycles  could cause our  revenues to
    fluctuate  widely from period to period.  Our customers  generally take long
    periods of time to evaluate our  metrology  systems.  We expend  significant
    resources educating and providing  information to our prospective  customers
    regarding  the uses and benefits of our systems.  The length of time that it
    takes for us to complete a sale depends upon many factors, including:

     o    the   efforts   of  our  sales   force  and  our   independent   sales
          representatives and distributors;

     o    the complexity of the customer's metrology needs;

     o    the  internal   technical   capabilities  and  sophistication  of  the
          customer;

     o    the customer's budgetary constraints; and

     o    the quality and  sophistication of the customer's  current  processing
          equipment.

    Because of the number of factors  influencing the sales process,  the period
    between our initial  contact  with a customer and the time when we recognize
    revenue  from that  customer,  if ever,  varies  widely.  Our sales  cycles,
    including  the  time  it  takes  for  us to  build  a  product  to  customer
    specifications  after receiving an order,  typically range from three to six
    months.  Sometimes  our sales cycles can be much longer,  particularly  with
    customers in Asia. During these cycles, we commit  substantial  resources to
    our sales  efforts in advance of  receiving  any  revenue,  and we may never
    receive any revenue from a customer despite our sales efforts.

    If we do make a sale, our customers  often purchase only one of our systems,
    and then  evaluate  its  performance  for a lengthy  period  of time  before
    purchasing  additional systems. The purchases are generally made by purchase
    orders and not long-term contracts. The number of additional products that a
    customer purchases, if any, depends on many factors,  including a customer's
    capacity requirements.  The period between a customer's initial purchase and
    any subsequent purchases can vary from three months to a year or longer, and
    variations  in the length of this  period  could cause  fluctuations  in our
    operating results and stock price.

    Relatively  small  fluctuations  in our system costs may cause our operating
    results to vary significantly each quarter.

    During any quarter, a significant portion of our revenue is derived from the
    sale of a  relatively  small  number of  systems.  Our  automated  metrology
    systems range in price from  approximately  $200,000 to $700,000 per system,
    our integrated  metrology systems range in price from approximately  $80,000
    to $300,000 per system and our  tabletop  metrology  systems  range in price
    from  approximately  $50,000 to $200,000  per system.  Accordingly,  a small
    change in the number of systems  we sell will cause  significant  changes in
    our operating results.


                                     II-11


    We depend on orders that are  received  and shipped in the same  quarter and
    therefore  our  results  of  operations   may  be  subject  to   significant
    variability from quarter to quarter.

    Our net sales in any  given  quarter  depend  upon a  combination  of orders
    received in that  quarter for shipment in that  quarter and  shipments  from
    backlog.  Our backlog at the  beginning of each quarter does not include all
    systems  sales  needed  to  achieve  expected  revenues  for  that  quarter.
    Consequently, we are dependent on obtaining orders for systems to be shipped
    in the same  quarter  that the order is received.  Moreover,  customers  may
    reschedule  shipments,  and production  difficulties  could delay shipments.
    Accordingly, we have limited visibility of future product shipments, and our
    results of operations may be subject to significant variability from quarter
    to quarter.

    Because of the high cost of switching  equipment vendors in our markets,  it
    is sometimes difficult for us to attract customers from our competitors even
    if our metrology systems are superior to theirs.

    We  believe  that once a  semiconductor,  flat  panel  display  or  magnetic
    recording  head  customer has selected one vendor's  metrology  system,  the
    customer  generally  relies upon that  system  and, to the extent  possible,
    subsequent  generations  of the same  vendor's  system,  for the life of the
    application. Once a vendor's metrology system has been installed, a customer
    must often  make  substantial  technical  modifications  and may  experience
    downtime  in  order  to  switch  to  another  vendor's   metrology   system.
    Accordingly,  unless our systems offer  performance or cost  advantages that
    outweigh  a  customer's  expense of  switching  to our  systems,  it will be
    difficult for us to achieve  significant  sales to that customer once it has
    selected another vendor's system for an application.

    If we deliver systems with defects,  our credibility  will be harmed and the
    sales and market acceptance of our systems will decrease.

    Our systems are complex and sometimes  have  contained  errors,  defects and
    bugs when  introduced.  If we deliver systems with errors,  defects or bugs,
    our credibility and the market  acceptance and sales of our systems would be
    harmed.  Further, if our systems contain errors,  defects or bugs, we may be
    required to expend  significant  capital and  resources  to  alleviate  such
    problems.  Defects  could  also  lead to  product  liability  as a result of
    product  liability  lawsuits  against us or against our  customers.  We have
    agreed to indemnify our customers in some  circumstances  against  liability
    arising from defects in our  systems.  In the event of a successful  product
    liability  claim,  we could be  obligated  to pay damages  significantly  in
    excess of our product liability insurance limits.

    If we are not successful in developing new and enhanced metrology systems we
    will likely lose market share to our competitors.

    We operate in an industry that is subject to technological changes,  changes
    in customer demands and the introduction of new, higher performance  systems
    with short  product  life cycles.  To be  competitive,  we must  continually
    design,  develop and introduce in a timely manner new metrology systems that
    meet the performance and price demands of semiconductor,  flat panel display
    and  magnetic  recording  head  manufacturers  and  suppliers.  We must also
    continue to refine our current systems so that they remain  competitive.  We
    may  experience  difficulties  or delays  in our  development  efforts  with
    respect  to  new  systems,  and we  may  not  ultimately  be  successful  in
    developing  them.  Any  significant  delay in  releasing  new systems  could
    adversely  affect  our  reputation,  give  a  competitor  a  first-to-market
    advantage or cause a competitor to achieve greater market share.

    Successful  infringement claims by third parties could result in substantial
    damages, lost product sales and the loss of important  intellectual property
    rights by us.

    Our commercial success depends in part on our ability to avoid infringing or
    misappropriating patents or other proprietary rights owned by third parties.
    There can be no  assurance  that our new  products do not infringe any valid
    intellectual property rights.


                                     II-12


    Our intellectual property may infringe or be infringed upon by third parties
    despite our efforts to protect it, which could  threaten our future  success
    and competitive position.

    Our future success and competitive  position depend in part upon our ability
    to obtain and maintain  proprietary  technology  for our  principal  product
    families, and we rely, in part, on patent, trade secret and trademark law to
    protect that technology.  If we fail to adequately  protect our intellectual
    property,  it will be easier for our competitors to sell competing products.
    We own or have  licensed  a number  of  patents  relating  to our  metrology
    systems,  and have filed  applications  for additional  patents.  Any of our
    pending patent applications may be rejected, and we may not in the future be
    able to develop  additional  proprietary  technology that is patentable.  In
    addition,  the  patents we do own or that have been issued or licensed to us
    may not provide us with  competitive  advantages  and may be  challenged  by
    third parties. Third parties may also design around these patents.

    In addition to patent  protection,  we rely upon trade secret protection for
    our  confidential and proprietary  information and technology.  We routinely
    enter into  confidentiality  agreements with our employees.  However, in the
    event  that  these  agreements  may be  breached,  we may not have  adequate
    remedies. Our confidential and proprietary  information and technology might
    also be  independently  developed  by or  become  otherwise  known  to third
    parties.  We may be required to initiate  litigation in order to enforce any
    patents  issued to or licensed by us, or to determine  the scope or validity
    of a third party's patent or other proprietary  rights. Any such litigation,
    regardless  of outcome,  could be expensive  and time  consuming,  and could
    subject us to  significant  liabilities  or require  us to  re-engineer  our
    product or obtain expensive licenses from third parties.

    We must expend a  significant  amount of time and  resources  to develop new
    products,  and if these products do not achieve commercial  acceptance,  our
    operating results may suffer.

    We expect to spend a significant amount of time and resources to develop new
    systems  and  refine  existing  systems.   In  light  of  the  long  product
    development cycles inherent in our industry, these expenditures will be made
    well in advance of the  prospect  of deriving  revenue  from the sale of new
    systems.  Our ability to commercially  introduce and successfully market new
    systems is subject to a wide variety of challenges  during this  development
    cycle that could delay introduction of these systems. In addition, since our
    customers are not obligated by long-term  contracts to purchase our systems,
    our  anticipated  product  orders  may not  materialize,  or orders  that do
    materialize  may be  cancelled.  As a result,  if we do not  achieve  market
    acceptance of new products, our operating results may suffer.

    We must attract and retain key personnel with relevant industry knowledge to
    help support our future growth,  and  competition  for such personnel in our
    industry is intense.

    Our success depends to a significant degree upon the continued contributions
    of our key management,  engineering,  sales and marketing, customer support,
    finance  and  manufacturing  personnel.  We do  not  enter  into  employment
    contracts  with  any of our key  personnel.  The  loss of any of  these  key
    personnel,  who would be  extremely  difficult  to  replace,  could harm our
    business and operating  results.  To support our future growth, we will need
    to attract and retain additional qualified  employees.  Competition for such
    personnel  in our  industry  is  intense,  and we may not be  successful  in
    attracting and retaining qualified employees.

    We manufacture all of our systems at a limited number of facilities, and any
    prolonged  disruption in the operations of those facilities could reduce our
    revenues.

    We produce all of our  systems in our  manufacturing  facilities  located in
    Milpitas,  California and through our  subsidiaries in Japan and Korea.  Our
    manufacturing processes are highly complex and require sophisticated, costly
    equipment  and specially  designed  facilities.  As a result,  any prolonged
    disruption in the operations of our manufacturing facilities could seriously
    harm our ability to satisfy our customer order deadlines.


                                     II-13


    If we  choose to  acquire  new and  complementary  businesses,  products  or
    technologies  instead  of  developing  them  ourselves,  we may be unable to
    complete these acquisitions or may not be able to successfully  integrate an
    acquired business in a cost-effective and non-disruptive manner.

    Our success  depends on our ability to  continually  enhance and broaden our
    product offerings in response to changing technologies, customer demands and
    competitive  pressures.  To this  end,  from  time to time we have  acquired
    complementary  businesses,  products,  or technologies instead of developing
    them  ourselves and may choose to do so in the future.  We do not know if we
    will be able to  complete  any  acquisitions,  or whether we will be able to
    successfully  integrate  any acquired  business,  operate it  profitably  or
    retain its key employees. Integrating any business, product or technology we
    acquire could be expensive and time consuming,  disrupt our ongoing business
    and  distract  our  management.   In  addition,  in  order  to  finance  any
    acquisitions,  we might need to raise  additional  funds  through  public or
    private  equity or debt  financings.  In that  event,  we could be forced to
    obtain  financing on terms that are not  favorable to us and, in the case of
    equity  financing,  that result in dilution to our  shareholders.  If we are
    unable  to  integrate  any  acquired  entities,   products  or  technologies
    effectively,  our business will suffer.  In addition,  any  amortization  of
    goodwill or other assets or charges resulting from the costs of acquisitions
    could harm our business and operating results.

    Our efforts to protect our  intellectual  property may be less  effective in
    some foreign  countries where  intellectual  property rights are not as well
    protected as in the United States.

    In 2000 and 2001, 60.6% and 64.8%,  respectively,  of our total net revenues
    were derived from sales to customers in foreign countries, including certain
    countries in Asia, such as Taiwan, Korea and Japan. The laws of some foreign
    countries do not protect our proprietary  rights to as great an extent as do
    the laws of the United  States,  and many U.S.  companies  have  encountered
    substantial   problems  in  protecting  their  proprietary   rights  against
    infringement  in  such  countries.  If we  fail to  adequately  protect  our
    intellectual  property  in  these  countries,  it would  be  easier  for our
    competitors to sell competing products in those countries.

    ITEM 7A. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

    We are exposed to financial  market risks,  which include changes in foreign
    currency  exchange  rates  and  interest  rates.  We do not  use  derivative
    financial  instruments.  Instead, we actively manage the balances of current
    assets  and  liabilities  denominated  in  foreign  currencies  to  minimize
    currency  fluctuation  risk. As a result,  a hypothetical  10% change in the
    foreign currency exchange rates at December 31, 2000 and 2001 would not have
    a  material  impact  on  our  results  of  operations.  Our  investments  in
    marketable  securities  are  subject  to  interest  rate risk but due to the
    short-term nature of these investments, interest rate changes would not have
    a material impact on their value at December 31, 2000 and 2001. We also have
    fixed rate yen denominated  debt  obligations in Japan that have no interest
    rate risk. At December 31, 2000 and 2001, our total debt obligation was $5.2
    million and $3.7 million  with a long-term  portion of $4.2 million and $3.3
    million,  respectively.  A  hypothetical  10%  change in  interest  rates at
    December  31,  2001  would  not have a  material  impact on our  results  of
    operations.


                                     II-14


ITEM 8.  CONSOLIDATED FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

The  information  required  by Item 8 of  Form  10-K  is  presented  here in the
following order:

                   INDEX TO CONSOLIDATED FINANCIAL STATEMENTS

                                                                           Page

Independent Auditors' Report.............................................. II-16
Consolidated Balance Sheets............................................... II-17
Consolidated Statements of Income......................................... II-18
Consolidated Statements of Shareholders' Equity and Comprehensive Income.. II-19
Consolidated Statements of Cash Flows..................................... II-20
Notes to Consolidated Financial Statements................................ II-21


                                     II-15


                          INDEPENDENT AUDITOR'S REPORT

To the Board of Directors and Shareholders
  of Nanometrics Incorporated:

We have audited the  accompanying  consolidated  balance  sheets of  Nanometrics
Incorporated and subsidiaries  (the "Company") as of December 31, 2000 and 2001,
and the related  consolidated  statements  of income,  shareholders'  equity and
comprehensive  income,  and cash flows for each of the three years in the period
ended December 31, 2001. These financial  statements are the  responsibility  of
the Company's  management.  Our responsibility is to express an opinion on these
financial statements based on our audits.

We conducted our audits in accordance with auditing standards generally accepted
in the  United  States of  America.  Those  standards  require  that we plan and
perform the audit to obtain  reasonable  assurance  about  whether the financial
statements are free of material misstatement.  An audit includes examining, on a
test basis,  evidence  supporting  the amounts and  disclosures in the financial
statements.  An audit also includes assessing the accounting principles used and
significant  estimates  made by  management,  as well as evaluating  the overall
financial  statement  presentation.   We  believe  that  our  audits  provide  a
reasonable basis for our opinion.

In our opinion,  such consolidated  financial  statements present fairly, in all
material  respects,  the  financial  position of  Nanometrics  Incorporated  and
subsidiaries  as of  December  31,  2000  and  2001,  and the  results  of their
operations  and their cash flows for each of the three years in the period ended
December 31, 2001 in conformity with accounting principles generally accepted in
the United States of America.

Deloitte & Touche LLP
San Jose, California
February 13, 2002


                                     II-16



                                NANOMETRICS INCORPORATED

                               CONSOLIDATED BALANCE SHEETS
                          (In thousands, except share amounts)

                                                                                          December 31,
                                                                                          ------------
                                         ASSETS                                      2000             2001
                                                                                   --------         --------
                                                                                              
Current assets:
Cash and cash equivalents ......................................................   $ 16,934         $ 47,227
Short-term investments..........................................................     52,854                -
Accounts receivable, net of allowances of $418 and $562 in 2000 and 2001,
respectively....................................................................     14,319            9,131
Inventories ....................................................................     15,753           26,311
Deferred income taxes ..........................................................      2,760            3,974
Prepaid expenses and other .....................................................      3,351            2,474
                                                                                   --------         --------
Total current assets............................................................    105,971           89,117

Property, plant and equipment, net..............................................     37,223           48,412

Deferred income taxes...........................................................        227              225

Other assets....................................................................      1,375            4,601
                                                                                   --------         --------
Total assets....................................................................   $144,796         $142,355
                                                                                   ========         ========

LIABILITIES AND SHAREHOLDERS' EQUITY

Current liabilities:
Accounts payable................................................................   $  4,625         $  2,906
Accrued payroll and related expenses............................................      1,610            1,148
Deferred revenue...............................................................       3,015            2,261
Other current liabilities.......................................................      3,049            1,981
Income taxes payable............................................................        331              272
Current portion of debt obligations.............................................        921              378
                                                                                   --------         --------
Total current liabilities.......................................................     13,551            8,946

Other long=term liabilities.....................................................          -              250

Debt obligations................................................................      4,236            3,314
                                                                                   --------         --------
Total liabilities...............................................................     17,787           12,510
                                                                                   --------         --------
Commitments and contingencies (Note 6)

Shareholders' equity:
Common stock, no par value; 25,000,000 shares authorized;
11,607,839 and 11,787,033 outstanding in 2000 and 2001, respectively............     95,929           98,531
Retained earnings...............................................................     31,783           32,743
Accumulated other comprehensive loss............................................       (703)          (1,429)
                                                                                   --------         --------
Total shareholders' equity......................................................    127,009          129,845
                                                                                   --------         --------
Total liabilities and shareholders' equity......................................   $144,796         $142,355
                                                                                   ========         ========


                        See notes to consolidated financial statements.


                                     II-17



                              NANOMETRICS INCORPORATED

                         CONSOLIDATED STATEMENTS OF INCOME
                      (In thousands, except per share amounts)

                                                                                          Years Ended December 31,
                                                                                        ----------------------------
                                                                                        1999        2000        2001
                                                                                       ------      ------      ------
                                                                                                    
Net revenues:
  Product sales.................................................................     $ 32,162    $ 63,468    $ 42,653
  Service.......................................................................        4,246       6,023       4,931
                                                                                       ------      ------      ------

          Total net revenues....................................................       36,408      69,491      47,584
                                                                                       ------      ------      ------

Costs and expenses:
  Cost of product sales.........................................................       14,606      25,082      17,949
  Cost of service...............................................................        4,560       6,022       5,406
  Research and development......................................................        4,658       9,238      10,760
  Selling.......................................................................        5,871      10,313       9,523
  General and administrative....................................................        2,973       4,258       4,177
                                                                                       ------      ------      ------
         Total costs and expenses...............................................       32,668      54,913      47,815
                                                                                       ------      ------      ------
Income (loss) from operations...................................................        3,740      14,578        (231)
                                                                                       ------      ------      ------
Other income (expense):
  Interest income...............................................................          662       4,129       2,576
  Interest expense..............................................................         (180)        (76)        (86)
  Other, net....................................................................           94        (150)       (517)
                                                                                       ------      ------      ------
          Total other income, net...............................................          576       3,903       1,973
                                                                                       ------      ------      ------
Income before income taxes......................................................        4,316      18,481       1,742

Provision for income taxes......................................................        1,682       5,942         782
                                                                                       ------      ------      ------
Income before cumulative effect of change in accounting principle...............        2,634      12,539         960

Cumulative effect of change in revenue recognition principle (SAB 101)..........            -      (1,364)          -
                                                                                       ------      ------      ------
Net income......................................................................      $ 2,634    $ 11,175      $  960
                                                                                       ======      ======      ======
Basic net income (loss) per share:
  Income before cumulative effect of change in accounting principle                    $ 0.30      $ 1.14      $ 0.08
  Cumulative effect of change in revenue recognition principle (SAB 101)........            -       (0.12)          -
                                                                                       ------      ------      ------
  Net income....................................................................       $ 0.30      $ 1.02      $ 0.08
                                                                                       ======      ======      ======
Diluted net income (loss) per share:
  Income before cumulative effect of change in accounting principle.............       $ 0.28      $ 1.06.     $ 0.08
  Cumulative effect of change in revenue recognition principle (SAB 101)........            -       (0.12)          -
                                                                                       ------      ------      ------
  Net income....................................................................       $ 0.28      $ 0.94      $ 0.08
                                                                                       ======      ======      ======
Shares used in per share computation:
  Basic.........................................................................        8,829      10,986      11,691
                                                                                       ======      ======      ======
  Diluted.......................................................................        9,393      11,845      12,161
                                                                                       ======      ======      ======


                        See notes to consolidated financial statements.


                                      II-18



                                                  NANOMETRICS INCORPORATED

                       CONSOLIDATED STATEMENTS OF SHAREHOLDERS' EQUITY AND COMPREHENSIVE INCOME
                                            (In thousands, except share amounts)


                                                                                       Accumulated
                                                      Common Stock                       Other         Total      Compre-
                                                   -------------------  Retained      Comprehensive Shareholders' hensive
                                                    Shares     Amount   Earnings      Income (Loss)   Equity      Income
                                                   ----------  -------- --------     -------------- ------------  -------
                                                                                                
Balances, January 1, 1999........................   8,690,643  $ 14,170 $ 17,974    $   (134)        $ 32,010

Comprehensive income:
  Net income.....................................       -         -        2,634         -              2,634     $ 2,634
  Other comprehensive income (loss), net of tax:
    Foreign currency translation adjustments.....       -         -         -            422              422         422
    Unrealized loss on investments...............       -         -         -            (18)             (18)        (18)
                                                                                                                  -------
           Comprehensive income..................       -         -         -            -               -        $ 3,038
                                                                                                                  =======
Issuance of common stock under employee stock
  purchase plan..................................      28,937       148     -            -                148
Issuance of common stock under stock option plan.     444,418     1,936     -            -              1,936
Tax benefit of employee stock transactions.......       -         1,023     -            -              1,023
                                                   ----------  -------- --------    --------         --------

Balances, December 31, 1999......................   9,163,998    17,277   20,608         270           38,155

Comprehensive income:
  Net income.....................................       -         -       11,175         -             11,175     $11,175
  Other comprehensive income (loss), net of tax:
    Foreign currency translation adjustments.....       -         -         -           (981)            (981)       (981)
    Unrealized gain on investments...............       -         -         -              8                8          8
                                                                                                                  -------
           Comprehensive income..................       -         -         -            -               -        $10,202
                                                                                                                  =======
Proceeds from common stock issuances, net of $700
  of issuance costs..............................   2,012,500    72,367     -            -             72,367
Issuance of common stock under employee stock
  purchase plan..................................      16,507       261     -            -                261
Issuance of common stock under stock option plan.     414,834     2,158     -            -              2,158
Tax benefit of employee stock transactions.......       -         3,866     -            -              3,866
                                                   ----------  -------- --------    --------         --------

Balances, December 31, 2000......................  11,607,839    95,929   31,783        (703)        127,009

Comprehensive income:
  Net income.....................................       -         -          960         -                960     $   960
  Other comprehensive loss, net of tax:
    Foreign currency translation adjustments.....       -         -         -           (698)            (698)       (698)
    Unrealized gain on investments...............       -         -         -            (28)             (28)        (28)
                                                                                                                  -------
           Comprehensive income..................       -         -         -            -               -        $   234
                                                                                                                  =======
Other stock issued...............................      12,813       214     -            -                214
Issuance of common stock under employee stock
  purchase plan..................................      33,845       453     -            -                453
Issuance of common stock under stock option plan.     132,536       914     -            -                914
Tax benefit of employee stock transactions.......       -         1,021     -            -              1,021
                                                   ----------  -------- --------    --------         --------

Balances, December 31, 2001......................  11,787,033  $ 98,531 $ 32,743    $ (1,429)       $ 129,845
                                                   ==========  ======== ========    ========         ========

                                 See notes to consolidated financial statements.


                                      II-19



                                                 NANOMETRICS INCORPORATED

                                           CONSOLIDATED STATEMENTS OF CASH FLOWS
                                                      (In thousands)


                                                                                            December 31,
                                                                                 --------------------------------
                                                                                 1999          2000          2001
                                                                                 ----          ----          ----
                                                                                                 
Cash flows from operating activities:
  Net income ..........................................................        $ 2,634      $ 11,175      $    960
  Reconciliation of net income to net cash provided by (used in)
    operating activities:
    Depreciation and amortization......................................            359           727         1,681
    Allowance for doubtful accounts....................................              5           -             150
    Deferred rent......................................................             (8)          (35)          -
    Loss on sale/disposal of property..................................           -               54             7
    Deferred income taxes..............................................            174        (1,130)       (1,212)
    Changes in assets and liabilities, net of effects of product
      line acquisition:
      Accounts receivable..............................................         (2,501)       (3,372)        4,480
      Inventories......................................................          2,449        (6,913)      (11,259)
      Prepaid income taxes.............................................          1,325          (221)        1,939
      Prepaid expenses and other.......................................           (178)       (2,078)         (797)
      Accounts payable, accrueds and other current liabilities.........          1,022         4,675        (3,335)
      Deferred revenue.................................................            319         3,544          (717)
      Income taxes payable.............................................          1,462         3,115           986
                                                                               -------      --------      --------
           Net cash provided by (used in) operating activities.........          7,062         9,541        (7,117)
                                                                               -------      --------      --------
Cash flows from investing activities:
  Purchases of short-term investments..................................        (22,575)     (114,046)     (112,146)
  Sales/maturities of short-term investments...........................         17,760        75,898       165,000
  Purchases of property, plant and equipment...........................           (511)      (35,284)      (13,178)
  Other assets.........................................................           (536)           (2)       (3,373)
                                                                               -------      --------      --------
           Net cash provided by (used in) investing activities.........         (5,862)      (73,434)       36,303
                                                                               -------      --------      --------
Cash flows from financing activities:
  Net proceeds from common stock issuance..............................           -           72,367           -
  Proceeds from issuance of debt obligations...........................             90         3,187           -
  Repayments of debt obligations.......................................         (1,358)         (457)         (866)
  Sale of shares under employee stock purchase and
    stock option plans.................................................          2,084         2,419         1,367
                                                                               -------      --------      --------
           Net cash provided by financing activities...................            816        77,516           501
                                                                               -------      --------      --------
Effect of exchange rate changes on cash................................            (92)         (131)          606
                                                                               -------      --------      --------
Net change in cash and cash equivalents................................          1,924        13,492        30,293

Cash and cash equivalents, beginning of year...........................          1,518         3,442        16,934
                                                                               -------      --------      --------
Cash and cash equivalents, end of year.................................        $ 3,442      $ 16,934      $ 47,227
                                                                               =======      ========      ========
Supplemental disclosure of cash flow information:
  Cash paid for interest...............................................        $    72      $     78      $    103
                                                                               =======      ========      ========
  Cash paid for income taxes...........................................        $    82      $  3,497      $  2,402
                                                                               =======      ========      ========

                                 See notes to consolidated financial statements.


                                      II-20


                            NANOMETRICS INCORPORATED

                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                  Years Ended December 31, 1999, 2000 and 2001

1.    Significant Accounting Policies

   Description  of  Business -  Nanometrics  Incorporated  and its  wholly-owned
   subsidiaries  sell,  design,  manufacture,  market and support  thin film and
   overlay dimension metrology systems for customers in the semiconductor,  flat
   panel display and magnetic recording head industries. These metrology systems
   precisely  measure a wide range of film types deposited on substrates  during
   manufacturing  in order  to  control  manufacturing  processes  and  increase
   production  yields in the  fabrication  of  integrated  circuits,  flat panel
   displays and magnetic  recording heads. The thin film metrology systems use a
   broad spectrum of wavelengths,  high-sensitivity optics, proprietary software
   and patented  technology  to measure the  thickness  and  uniformity of films
   deposited  on  silicon  and  other  substrates  as  well  as  their  chemical
   composition.  The overlay  metrology  systems are used to measure the overlay
   accuracy  of  successive  layers of  semiconductor  patterns on wafers in the
   photolithography process.

   Basis  of  Presentation  -  The  consolidated  financial  statements  include
   Nanometrics Incorporated and its wholly-owned  subsidiaries.  All significant
   intercompany accounts and transactions have been eliminated in consolidation.

   Use of Estimates - The preparation of financial statements in conformity with
   accounting  principles  generally  accepted  in the United  States of America
   requires  management  to make  estimates  and  assumptions  that  affect  the
   reported  amounts of assets and  liabilities  and  disclosure  of  contingent
   assets  and  liabilities  at the  date of the  financial  statements  and the
   reported amounts of revenues and expenses during the reporting period. Actual
   results could differ from those estimates.

   Fiscal  Year -  Nanometrics  uses a 52/53  week  fiscal  year  ending  on the
   Saturday  nearest to December 31.  Accordingly,  fiscal years 1999,  2000 and
   2001 all  consisted  of 52 weeks and ended on January 1, 2000,  December  30,
   2000 and December 29, 2001, respectively. For convenience in the accompanying
   consolidated financial statements, the year end is denoted as December 31.

   Cash and Cash Equivalents - Cash and cash equivalents include cash and highly
   liquid debt instruments with original maturities of three months or less when
   purchased.

   Short-Term  Investments  - Short-term  investments  consist of United  States
   Treasury  bills and are stated at fair value based on quoted  market  prices.
   Short-term   investments  are  classified  as  available-for-sale   based  on
   Nanometrics'  intended use. The  difference  between  amortized cost and fair
   value  representing  unrealized  holding  gains or losses are  recorded  as a
   component of shareholders'  equity as accumulated other comprehensive  income
   (loss). Gains and losses on sales of investments are determined on a specific
   identification basis.

   Fair Value of  Financial  Instruments  - Financial  instruments  include cash
   equivalents,  short-term  investments and debt obligations.  Cash equivalents
   and  short-term  investments  are stated at fair market value based on quoted
   market prices.  The recorded carrying amount of Nanometrics' debt obligations
   approximates fair market value.

   Inventories  -  Inventories  are  stated  at the  lower  of  cost  (first-in,
   first-out) or market.

   Property,  Plant and Equipment - Property,  plant and equipment are stated at
   cost.  Depreciation is computed using straight line and  accelerated  methods
   over the following estimated useful lives of the assets:

         Building and improvements                                15 - 40 years
         Machinery and equipment                                   3 - 10 years
         Furniture and fixtures                                    5 - 10 years


                                      II-21


   Leasehold improvements are amortized over the shorter of the estimated useful
   lives of the improvements or the lease term.

   Goodwill and Intangible Assets - Nanometrics  amortizes goodwill and acquired
   intangible assets (included in other assets) using the  straight-line  method
   over an estimated useful life of five years.

   Long-Lived  Assets - Nanometrics  evaluates  long-lived assets for impairment
   whenever events or changes in circumstances indicate that the carrying amount
   of an asset may not be recoverable.  When the sum of the undiscounted  future
   net cash flows  expected to result from the use of the asset and its eventual
   disposition  is less than its carrying  amount,  an impairment  loss would be
   measured based on the discounted cash flows compared to the carrying  amount.
   No impairment charge has been recorded in any of the periods presented.

   Income Taxes - Deferred income taxes reflect the net tax effects of temporary
   differences  between  the  carrying  amounts  of assets and  liabilities  for
   financial reporting purposes and the amounts used for income tax purposes and
   operating loss and tax credit  carryforwards  measured by applying  currently
   enacted tax laws. A valuation  allowance is provided when necessary to reduce
   deferred tax assets to an amount that is more likely than not to be realized.

   Comprehensive  Income (Loss) - Accumulated other comprehensive  income (loss)
   consists of the following (in thousands):

                                                                 December 31,
                                                             -------------------
                                                               2000        2001
                                                               ----        ----
            Accumulated unrealized gains on
              available-for-sale securities, net..........   $   28     $    -
            Accumulated translation adjustments, net......     (731)     (1,429)

            Accumulated other comprehensive loss..........   $ (703)    $(1,429)

   Revenue  Recognition - Revenues are recognized when persuasive evidence of an
   arrangement exists, delivery has occurred or services have been rendered, the
   price is fixed and determinable and collectibility is reasonably assured. For
   product  sales,  this  generally  occurs  at the  time of  shipment,  and for
   revenues from service work, this generally occurs when the work is performed.
   Revenues from service contracts are recognized  ratably over the period under
   contract.  Nanometrics  sells the  majority  of its  product  with a one-year
   repair or replacement  warranty and records a provision for estimated  claims
   at the time of sale. In certain  geographical  regions where risk of loss and
   title transfers upon customer  acceptance,  payments received are recorded as
   deferred revenue and recognized as revenue upon customer acceptance.

   In December 1999, the Securities and Exchange  Commission  (SEC) issued Staff
   Accounting Bulletin (SAB 101), Revenue  Recognition in Financial  Statements,
   which  summarizes  certain  views  of the SEC  staff  in  applying  generally
   accepted  accounting  principles  to  revenue  recognition  in the  financial
   statements.  SAB 101 clarified delivery criteria, which affected Nanometrics'
   revenue recognition policy.  Nanometrics applied the provisions of SAB 101 in
   the quarter ended  December 31, 2000,  retroactive as of the beginning of the
   fiscal year. Accordingly,  the accompanying consolidated statements of income
   for the year ended  December 31, 2000 and 2001,  is  reflected in  accordance
   with  SAB 101.  Had  Nanometrics  applied  the  provisions  of SAB 101 at the
   beginning of 1999,  unaudited pro forma results of operations  for 1999 would
   have been as follows (in thousands, except per share amounts):

             Net income as reported.................................. $ 2,634
             Pro forma adjustment for the change in
             accounting principle applied retroactively..............    (509)
                                                                      -------
             Pro forma net income.................................... $ 2,125
                                                                      =======
             Basic net income per share as reported.................. $  0.30
             Pro forma effect of change per share....................   (0.06)
                                                                      -------
             Pro forma basic net income per share.................... $  0.24
                                                                      =======
             Diluted net income per share as reported................ $  0.28
             Pro forma effect of change per share....................  (0.05)
                                                                      -------
             Pro forma diluted net income per share.................. $  0.23
                                                                      =======


                                      II-22


   The impact of adoption of SAB 101 in fiscal 2000  resulted in $7.8 million of
   revenue being deferred to future periods. In addition, the impact of adoption
   of SAB 101 resulted in a cumulative effect of $1.4 million resulting from the
   recognition of certain historical 1999 revenues in 2000.

   Stock-Based  Compensation - Nanometrics  accounts for  stock-based  awards to
   employees  using the  intrinsic  value method in accordance  with  Accounting
   Principles  Board  Opinion  (APB) No.  25,  Accounting  for  Stock  Issued to
   Employees.

   Foreign  Currency  -  The  functional   currencies  of  Nanometrics'  foreign
   subsidiaries are the local currencies.  Accordingly,  translation adjustments
   for the subsidiaries  have been included in shareholders'  equity.  Gains and
   losses from transactions  denominated in currencies other than the functional
   currencies of  Nanometrics or its  subsidiaries  are included in other income
   (expense)  and consist of a gain of $91,000  for 1999,  a loss of $30,000 for
   2000 and a loss of $614,000 for 2001.

   Net Income Per Share - Basic net income per share  excludes  dilution  and is
   computed by  dividing  net income by the number of  weighted  average  common
   shares outstanding for the period.  Diluted net income per share reflects the
   potential  dilution  from  outstanding  dilutive  stock  options  (using  the
   treasury stock method) and shares  issuable under the employee stock purchase
   plan.

   Reclassifications  -  Certain  reclassifications  have been made to the prior
   years'  financial  statement  presentations  to conform to the  current  year
   presentation. Such reclassifications had no impact on consolidated net income
   or retained earnings.

   Recently Issued Accounting Standards - In June 1998, the Financial Accounting
   Standards  Board (FASB) issued  Statement of Financial  Accounting  Standards
   (SFAS) No. 133, Accounting for Derivative Instruments and Hedging Activities.
   This statement establishes  accounting and reporting standards requiring that
   every derivative  instrument,  including  derivative  instruments embedded in
   other  contracts,  be  recorded  in the  balance  sheet as either an asset or
   liability  measured  at its fair  value.  Nanometrics  adopted  SFAS No.  133
   effective  January  1,  2001.  Adoption  of  SFAS  No.  133  did  not  have a
   significant  impact  on  the  consolidated  financial  position,  results  of
   operations or cash flows of Nanometrics.

   On June 29, 2001, SFAS No. 141,  "Business  Combinations" was approved by the
   FASB.  SFAS No. 141 requires  that the purchase  method of accounting be used
   for all business  combinations  initiated  after June 30, 2001.  Goodwill and
   certain  intangible  assets  will  remain  on the  balance  sheet  and not be
   amortized. On an annual basis, and when there is reason to believe that their
   values may have been diminished or impaired,  these assets must be tested for
   impairment, and write-downs may be necessary. Nanometrics will adopt SFAS No.
   141 for business combinations initiated after June 30, 2001.

   On June 29, 2001, SFAS No. 142,  "Goodwill and Other  Intangible  Assets" was
   approved by the FASB.  SFAS No. 142 changes the  accounting for goodwill from
   an  amortization  method  to an  impairment-only  approach.  Amortization  of
   goodwill,  including  goodwill recorded in past business  combinations,  will
   cease upon adoption of this  statement.  Nanometrics is required to implement
   SFAS No.  142 on  January  1,  2002  and  expects  to  complete  its  initial
   assessment of the impairment  using the  requirements  of SFAS No. 142 by the
   end of the first quarter of fiscal year 2002.  However,  management  does not
   believe that a material  adjustment will be necessary upon completion of this
   initial  assessment.  Nanometrics will stop the amortization of goodwill with
   an expected  net  carrying  value of  $1,181,000  at the date of adoption and
   annual  amortization  of $288,000 that  resulted  from business  combinations
   completed prior to the adoption of SFAS No. 141. Goodwill acquired subsequent
   to June 30, 2001 will not be amortized.

   In August 2001,  the FASB issued SFAS No. 144,  Accounting for the Impairment
   or Disposal of Long-Lived  Assets.  This statement  retains a majority of the
   requirements  of SFAS No. 121,  Accounting  for the  Impairment of Long-Lived
   Assets and for  Long-Lived  Assets to be Disposed Of, and  addresses  certain
   implementation  issues.  Although  Nanometrics  has not  fully  assessed  the
   implications  of SFAS No. 144,  Nanometrics  does not believe the adoption of
   this statement will have a significant  impact on the consolidated  financial
   position, results of operations or cash flows.

   Certain  Significant  Risks and  Uncertainties - Financial  instruments which
   potentially  subject  Nanometrics to  concentration of credit risk consist of
   cash and cash equivalents,  short-term  investments and accounts  receivable.
   Cash and cash equivalents and short-term  investments are held primarily with
   two financial institutions and consist primarily of cash in bank accounts and
   United States Treasury bills. Nanometrics sells its products primarily to end
   users in the United  States and Asia,  and  generally  does not  require  its
   customers  to  provide  collateral  or other  security  to  support  accounts
   receivable.  Management performs ongoing credit evaluations of its customers'
   financial condition. Nanometrics maintains allowances for estimated potential
   bad debt losses.


                                      II-23


   Nanometrics  participates in a dynamic high technology  industry and believes
   that  changes in any of the  following  areas  could have a material  adverse
   effect on Nanometrics'  future financial  position,  results of operations or
   cash flows:  advances and trends in new technologies and industry  standards;
   competitive  pressures  in the form of new  products or price  reductions  on
   current  products;  changes in product mix; changes in the overall demand for
   products  offered  by  Nanometrics;  changes  in  third-party  manufacturers;
   changes  in key  suppliers;  changes in certain  strategic  relationships  or
   customer  relationships;  litigation or claims against  Nanometrics  based on
   intellectual  property,   patent,  product,   regulatory  or  other  factors;
   fluctuations in foreign currency exchange rates; risk associated with changes
   in  domestic  and  international   economic  and/or  political   regulations;
   availability  of  necessary   components  or  subassemblies;   disruption  of
   manufacturing  facilities;  and  Nanometrics'  ability to attract  and retain
   employees necessary to support its growth.

   Nanometrics' customer base is highly concentrated.  A relatively small number
   of  customers  have  accounted  for a  significant  portion  of  Nanometrics'
   revenues.  In 2001,  aggregate  revenue  from  Nanometrics'  top ten  largest
   customers consisted of 45% of Nanometrics' total net revenues.

   Certain  components  and  subassemblies  used in  Nanometrics'  products  are
   purchased  from  a  sole  supplier  or  a  limited  group  of  suppliers.  In
   particular,  Nanometrics currently purchases its spectroscopic  ellipsometer,
   Fourier transform  infrared  reflectometry  spectrometer and robotics used in
   its advanced  measurement  systems from a sole supplier or a limited group of
   suppliers.  Any  shortage  or  interruption  in  the  supply  of  any  of the
   components or subassemblies used in Nanometrics' products or the inability of
   Nanometrics  to procure these  components  or  subassemblies  from  alternate
   sources  on  acceptable  terms,  could  have a  material  adverse  effect  on
   Nanometrics' business, financial condition and results of operations.

   Related Party  Transactions - During 2001,  Nanometrics  extended a long-term
   note to an officer in the amount of $301,000.  The note, which bears interest
   at 6% per annum, is due October 2004 and is classified as other assets on the
   balance sheet.

2.    Inventories

      Inventories consist of the following (in thousands):

                                                              December 31,
                                                         ---------------------
                                                           2000          2001
                                                           ----          ----
               Raw materials and subassemblies.......    $ 8,126       $18,279
               Work in process.......................      1,434         2,387
               Finished goods........................      6,193         5,645
                                                         -------       -------
               Total inventories.....................    $15,753       $26,311
                                                         =======       =======

3.    Property, Plant and Equipment

      Property, plant and equipment consists of the following (in thousands):

                                                               December 31,
                                                         ---------------------
                                                           2000          2001
                                                           ----          ----
            Land ....................................    $16,462       $16,597
            Building and improvements ...............     17,700        29,299
            Machinery and equipment .................      1,712         4,418
            Furniture and fixtures ..................        849         1,631
            Construction in progress ................      3,397           126
            Leasehold improvements ..................         12            13
                                                         -------       -------
                                                          40,132        52,084
            Accumulated depreciation and amortization     (2,909)      (3,672)
                                                         -------       -------
            Total property, plant and equipment, net.    $37,223       $48,412
                                                         =======       =======


                                      II-24


4.    Other Current Liabilities

      Other current liabilities consist of the following (in thousands):

                                                           December 31,
                                                      ---------------------
                                                        2000           2001
                                                        ----           ----
            Commissions payable...................    $1,249          $  288
            Accrued warranty......................       809             435
            Accrued professional services.........       203             210
            Other ................................       788           1,048
                                                      -------        -------
            Total other current liabilities.......    $3,049          $1,981
                                                      =======        =======

5.    Debt Obligations

      Debt obligations consist of the following (in thousands):

                                                           December 31,
                                                      ---------------------
                                                        2000           2001
                                                        ----           ----

            1995 working capital bank loan ........   $1,575          $1,068
            1996 working capital bank loan ........      470             336
            2000 working capital bank loan ........    2,625           2,288
            Other debt obligations ................      487            --
                                                      ------          ------
            Total .................................    5,157           3,692
            Current portion of debt obligations ...     (921)           (378)
                                                      ------          ------
            Debt obligations ......................   $4,236          $3,314
                                                      ======          ======

   The 1995  working  capital bank loan was  obtained by  Nanometrics'  Japanese
   subsidiary.  The  loan  is  collateralized  by  receivables  of the  Japanese
   subsidiary  and is guaranteed by the parent,  Nanometrics  Incorporated.  The
   loan is denominated in Japanese yen ((Y)140,000,000 at December 31, 2001) and
   bears  interest  at  3.3%  per  annum.  The  loan  is  payable  in  quarterly
   installments with unpaid principal and interest due in May 2005.

   The 1996  working  capital bank loan was  obtained by  Nanometrics'  Japanese
   subsidiary  and  is  collateralized  by  land  and  building.   The  loan  is
   denominated  in Japanese yen  ((Y)44,000,000  at December 31, 2001) and bears
   interest  at 3.4% per annum.  The loan is payable in  quarterly  installments
   with unpaid principal and interest due in May 2006.

   The 2000  working  capital bank loan was  obtained by  Nanometrics'  Japanese
   subsidiary  and  is  collateralized  by  land  and  building.   The  loan  is
   denominated in Japanese yen  ((Y)300,000,000  at December 31, 2001) and bears
   interest  at 2.1% per annum.  The loan is payable in  quarterly  installments
   with unpaid principal and interest due in November 2010.

   Other  debt  obligations  represent  short-term  borrowings  by  Nanometrics'
   Japanese  subsidiary which are  collateralized  by the subsidiary's  accounts
   receivable.  The borrowings are denominated in Japanese yen and bear interest
   at 1.5% per annum.

   At December 31, 2001,  future annual  maturities of debt  obligations  are as
   follows (in thousands):

               2002.................................................   $  378
               2003.................................................      458
               2004.................................................      696
               2005.................................................      544
               2006.................................................      360
               Thereafter...........................................    1,256
                                                                       ------

               Total................................................   $3,692
                                                                       ======


                                      II-25


6.    Commitments and Contingencies

   Nanometrics leases  manufacturing and  administrative  facilities and certain
   equipment  under  noncancellable  operating  leases.  Nanometrics'  corporate
   headquarters  facility  lease was  terminated in November 2000 when corporate
   headquarters  moved into a newly purchased  facility.  Rent expense for 1999,
   2000  and  2001  was   approximately   $867,000,   $1,221,000  and  $302,000,
   respectively.  Future  minimum lease payments  under  Nanometrics'  operating
   leases  for  each  of  the  years  ending  December  31 are  as  follows  (in
   thousands):

               2002...................................................     $133
               2003...................................................       96
               2004...................................................       45
               2005...................................................       29
               2006...................................................        2
               Thereafter.............................................        -
                                                                           ----
               Total..................................................     $305
                                                                           ====

   In  September  1998,  Nanometrics'  Korean  subsidiary  entered  into a lease
   agreement for  manufacturing  facilities.  The lease  payments are based on a
   percentage  of net product  sales,  as defined.  The lease was  terminated in
   February 2001, in conjunction with the completion of the new facility.

   Pursuant to a 1985 agreement,  as amended,  if  Nanometrics'  Chairman of the
   Board is involuntarily removed from his position,  Nanometrics is required to
   continue his salary and related benefits for a period of five years from such
   date.

7.    Shareholders' Equity

      Common Stock

   The  authorized  capital stock of Nanometrics  consists of 25,000,000  common
   shares,  of which 22,500,000  shares have been designated  "Common Stock" and
   2,500,000  shares have been  allocated to all other series of common  shares,
   collectively designated "Junior Common."

      Net Income per Share

   The reconciliation of the share denominator used in the basic and diluted net
   income per share computations is as follows (in thousands):



                                                              Years Ended December 31,
                                                             -------------------------
                                                              1999      2000     2001
                                                              ----      ----     ----
                                                                       
   Weighted average shares outstanding - shares used in
     basic net income per share computation..............     8,829    10,986   11,691
   Dilutive effect of common stock equivalents,
     using the treasury stock method.....................       564       859      470
                                                              -----    ------   ------
   Shares used in diluted net income per share computation    9,393    11,845   12,161
                                                              =====    ======   ======


   During 1999, 2000 and 2001,  Nanometrics had common stock options outstanding
   which could potentially  dilute basic net income per share in the future, but
   were  excluded  from the  computation  of diluted net income per share as the
   common stock  options'  exercise  prices were greater than the average market
   price of the common  shares for the period.  At December 31,  1999,  2000 and
   2001, 51,000, 738,700 and 936,917,  respectively, of Nanometrics' outstanding
   common stock options with weighted average exercise prices of $19.59,  $35.58
   and $19.39, respectively, per share were excluded from the diluted net income
   per share computation.


                                      II-26


      Stock Option Plans

   Under the 1991  Stock  Option  Plan  (the  1991  Option  Plan),  as  amended,
   Nanometrics  may grant  options to acquire up to  3,000,000  shares of common
   stock to employees  and  consultants  at prices not less than the fair market
   value at date of grant for  incentive  stock options and not less than 50% of
   fair market value for  nonstatutory  stock options.  These options  generally
   expire five years from the date of grant and become exercisable as they vest,
   generally 33.3% upon each anniversary of the grant, as set forth in the stock
   option agreements. The 1991 Option Plan expired in July 2001.

   Under the 1991  Directors'  Stock  Option  Plan (the 1991  Directors'  Plan),
   nonemployee  directors of Nanometrics  are  automatically  granted options to
   acquire  10,000 shares of common stock,  at the fair market value at the date
   of grant,  each year that such  person  remains a  director  of  Nanometrics.
   Options  granted under the  Directors'  Plan become  exercisable as they vest
   33.3% upon each  anniversary of the grant and expire five years from the date
   of grant.  The total shares  authorized  under the 1991  Directors'  Plan are
   300,000. The 1991 Directors' Plan expired in July 2001.

   Under the 2000 Stock  Option Plan (the 2000  Option  Plan),  Nanometrics  may
   grant options to acquire up to 1,250,000  shares of common stock to employees
   and  consultants  at prices  not less than the fair  market  value at date of
   grant for incentive and nonstatutory  stock options.  These options generally
   expire ten years from the date of grant, or a shorter term as provided by the
   stock option agreement and become  exercisable as they vest,  generally 33.3%
   upon  each  anniversary  of the  grant,  as set  forth  in the  stock  option
   agreements.  The 2000 Option Plan is the  successor  to the 1991 Option Plan,
   and all  options  existing  under the 1991  Option  Plan will  continue to be
   governed by existing terms until exercise, cancellation or expiration.

   Under the 2000  Directors'  Stock  Option  Plan (the 2000  Directors'  Plan),
   nonemployee  directors of Nanometrics  are  automatically  granted options to
   acquire  10,000 shares of common stock,  at the fair market value at the date
   of grant,  each year that such  person  remains a  director  of  Nanometrics.
   Options  granted under the  Directors'  Plan become  exercisable as they vest
   33.3% upon each  anniversary of the grant and expire five years from the date
   of grant.  The total shares  authorized  under the 2000  Directors'  Plan are
   250,000.  The  2000  Directors'  Plan  is the  successor  plan  to  the  1991
   Directors' Plan, and all options existing under the 1991 Directors' Plan will
   continue to be governed by existing  terms until  exercise,  cancellation  or
   expiration.

                                     II-27


   Option activity under the plans is summarized as follows:



                                                                           Outstanding Options
                                                                  --------------------------------------
                                                                                            Weighted
                                                                    Shares     Number of     Average
                                                                   Available    Shares    Exercise Price
                                                                   ---------    ------    --------------
                                                                                    
        Balances, January 1, 1999 (745,171 exercisable
           at a weighted average price of $4.57)..............      827,821    1,590,433     $ 5.25

        Exercised.............................................            -     (444,418)      4.36
        Granted (weighted average fair value of $6.67)........     (455,000)     455,000      12.06
        Canceled..............................................      106,351     (106,351)      6.65
                                                                  ---------    ---------
        Balances, December 31, 1999 (665,688 exercisable
          at a weighted average price of $5.21)...............      479,172    1,494,664       7.49

        Additional shares added through 2000 Option Plan
          and 2000 Directors' Plan............................    1,500,000            -          -
        Exercised.............................................            -     (414,834)      5.20
        Granted (weighted average fair value of $17.34).......     (886,700)     886,700      31.23
        Canceled..............................................       99,506      (99,506)     17.74
                                                                  ---------    ---------
        Balances, December 31, 2000 (634,696 exercisable
          at a weighted average price of $6.62)...............    1,191,978    1,867,024      18.73

        Exercised.............................................            -     (132,536)      6.90
        Expired...............................................      (40,744)           -          -
        Granted (weighted average fair value of $9.45)........     (780,250)     780,250      18.14
        Canceled..............................................       91,516      (91,516)     21.01
                                                                  ---------    ---------
        Balances, December 31, 2001...........................      462,500    2,423,222    $ 19.11
                                                                  =========    =========


   Additional  information regarding options outstanding as of December 31, 2001
is as follows:



                                       Options Outstanding                     Options Exercisable
                           -------------------------------------------  --------------------------------
                                             Weighted
                                              Average         Weighted                         Weighted
                                             Remaining        Average                          Average
          Range of           Number         Contractual       Exercise         Number          Exercise
       Exercise Prices     Outstanding      Life (Years)       Price         Exercisable        Price
       ---------------     -----------      ------------       -----         -----------        -----
                                                                            
     $ 5.13 - $ 7.25         518,065            3.01        $  5.59            480,428        $ 5.47
       7.81 -   9.00         182,571            7.21           8.12            162,437          8.08
      12.86 -  17.63         785,669            6.08          15.91            126,279         15.35
      20.13 -  30.88         574,751            5.63          25.51            127,167         26.32
      34.69 -  47.63         362,166            4.19          40.77            120,722         40.77
                           ---------                                         ---------
     $ 5.13 - $47.63       2,423,222            5.12        $ 19.11          1,017,033        $13.91
                           =========                                         =========


      Employee Stock Purchase Plan

   Under the 1986 Employee  Stock  Purchase Plan (the Purchase  Plan),  eligible
   employees are allowed to have salary  withholdings of up to 10% of their base
   compensation  to purchase  shares of common  stock at a price equal to 85% of
   the lower of the market  value of the stock at the  beginning  or end of each
   six-month  offering period,  subject to an annual  limitation.  Shares issued
   under the plan  were  28,937,  16,507  and  33,845 in 1999,  2000 and 2001 at
   weighted  average  prices of $5.10,  $15.83  and  $13.39,  respectively.  The
   weighted average per share fair values of the 1999, 2000 and 2001 awards were
   $2.89, $14.67 and $5.94,  respectively.  At December 31, 2001, 108,204 shares
   were reserved for future issuances under the Purchase Plan.


                                      II-28


      Additional Stock Plan Information

   As discussed in Note 1, Nanometrics accounts for its stock-based awards using
   the intrinsic  value method in  accordance  with APB No. 25,  Accounting  for
   Stock Issued to Employees, and its related interpretations.  Accordingly,  no
   compensation  expense has been  recognized in the  accompanying  consolidated
   financial statements for employee stock arrangements.

   SFAS  No.  123,  Accounting  for  Stock-Based   Compensation,   requires  the
   disclosure of pro forma net income (loss) and net income (loss) per share had
   Nanometrics adopted the fair value method. Under SFAS No. 123, the fair value
   of  stock-based  awards to employees is calculated  through the use of option
   pricing  models,  even though such models were developed to estimate the fair
   value  of  freely  tradable,   fully  transferable  options  without  vesting
   restrictions,  which  differ  significantly  from  Nanometrics'  stock option
   awards.  These models also require subjective  assumptions,  including future
   stock price  volatility  and expected time to exercise,  which greatly affect
   the calculated  values.  Nanometrics' fair value  calculations on stock-based
   awards under the 1991 and 2001 Option Plans and the 1991 and 2001  Directors'
   Plans  were made  using  the  Black-Scholes  option  pricing  model  with the
   following weighted average  assumptions:  expected life, three years from the
   date of grant in 1999, 2000 and 2001; stock volatility, 80% in 1999, 2000 and
   2001;  risk free interest rate,  5.9% in 1999, 6.4% in 2000 and 4.2% in 2001;
   and no dividends  during the expected  term.  Nanometrics'  calculations  are
   based on a single option valuation approach and forfeitures are recognized at
   a  historical  rate  of 24%  for  1999,  26%  for  2000  and  24%  for  2001.
   Nanometrics' fair value calculations on stock-based awards under the Purchase
   Plan were also made using the  Black-Scholes  option  pricing  model with the
   following  weighted average  assumptions:  expected life, six months in 1999,
   2000 and  2001;  stock  volatility,  80% in 1999,  2000 and  2001;  risk free
   interest rate,  5.3% in 1999, 6.1% in 2000 and 3.1% in 2001; and no dividends
   during the expected term.

   If the computed fair values of the  stock-based  awards had been amortized to
   expense over the vesting  period of the awards,  pro forma net income  (loss)
   and net  income  (loss)  per  share,  basic and  diluted,  would have been as
   follows (in thousands, except per share amounts):

                                                       Years Ended December 31,
                                                      --------------------------
                                                       1999     2000      2001
                                                       ----     ----      ----

          Pro forma net income (loss)..............   $1,729   $8,200   $(2,699)

          Pro forma net income (loss) per share:
            Basic..................................   $ 0.20   $ 0.75     (0.23)
            Diluted................................   $ 0.18   $ 0.69   $ (0.23)

8.    Income Taxes

   Income (loss) before income taxes consists of the following (in thousands):

                                                      Years Ended December 31,
                                                     --------------------------
                                                      1999     2000      2001
                                                      ----     ----      ----
          Domestic...............................    $3,928  $16,476   $(1,516)
          Foreign................................       388    2,005     3,258
                                                     ------  -------   -------
          Income before income taxes.............    $4,316  $18,481   $ 1,742
                                                     ======  =======   =======


                                      II-29


   The  provision  (benefit)  for income  taxes  consists of the  following  (in
thousands):

                                                      Years Ended December 31,
                                                     -------------------------
                                                      1999      2000      2001
                                                      ----      ----      ----
        Current:
          Federal................................    $1,127   $5,875    $1,136
          State..................................       186      807       439
          Foreign................................       195      390       419
                                                     ------   ------    ------
                                                      1,508    7,072     1,994
                                                     ------   ------    ------
        Deferred:
          Federal................................        71     (536)   (1,073)
          State..................................      (128)     (29)     (437)
          Foreign................................       231     (565)      298
                                                     ------   ------    ------
                                                        174   (1,130)   (1,212)
                                                     ------   ------    ------
        Provision for income taxes...............    $1,682   $5,942    $  782
                                                     ======   ======    ======

   Significant components of Nanometrics' deferred tax assets are as follows (in
thousands):

                                                                December 31,
                                                             ------------------
                                                              2000        2001
                                                              ----        ----
        Deferred tax assets - current:
          Reserves and accruals not currently deductible.    $2,282     $2,736
          Capitalized inventory costs....................       350        906
          Tax credit carryforwards.......................       128        390
                                                             ------     ------

        Total gross deferred tax assets - current........     2,760      4,032
        Valuation allowance..............................         -        (58)
                                                             ------     ------
        Total net deferred tax assets - current..........    $2,760     $3,974
                                                             ======     ======

        Deferred tax assets - noncurrent:
          Reserves and accruals..........................    $    -     $   53
          Net operating loss carryforwards...............         -        232
          Depreciation...................................       (54)      (252)
          Goodwill and capitalized acquired technology...       320        341
          Translation adjustments........................       (39)       136
                                                             ------     ------

        Total net deferred tax assets - noncurrent.......       227        510
        Valuation allowance                                       -       (285)
                                                             ------     ------
        Total net deferred tax assets - noncurrent           $  227     $  225
                                                             ======     ======

    As of December 31, 2001, Nanometrics had available for carryforward research
    and  experimental  tax credits for federal  income tax purposes of $271,000.
    Federal research and experimentation carryforwards expire in 2020.

    As of December 31, 2001,  Nanometrics  had available for  carryforward a net
    operating  loss for Korean  income tax purposes of $232,000.  Net  operating
    losses expire in 2006.


                                      II-30


    Differences  between income taxes computed by applying the statutory federal
    income tax rate to income  before  income taxes and the provision for income
    taxes consist of the following (in thousands):

                                                        Years Ended December 31,
                                                       -------------------------
                                                         1999      2000    2001
                                                         ----      ----    ----
        Income taxes computed at U.S. statutory rate.. $ 1,511   $ 6,468  $ 610
        State income taxes............................      58       820      1
        Foreign tax provision (benefit) higher
        than U.S. rates ..............................      59      (312)   134
        Foreign sales corporation benefit.............    (228)     (471)     -
        Change in valuation allowance.................     231      (231)   342
        Utilization of tax credits....................       -      (385)  (450)
        Other, net....................................      51        53    145
                                                       -------   -------  -----
        Provision for income taxes.................... $ 1,682   $ 5,942  $ 782
                                                       =======   =======  =====

9. Profit-Sharing, Retirement and Bonus Plans

   No  contributions  were  made  by  Nanometrics  in  1999,  2000  and  2001 to
   Nanometrics'  discretionary  profit-sharing and retirement plan.  Nanometrics
   paid $92,000,  $1,217,000 and $416,000 in 1999, 2000 and 2001,  respectively,
   under  formal  discretionary  cash  bonus  plans  which  cover  all  eligible
   employees.

10.   Major Customers

   In 1999,  sales to two  customers  accounted for 12.8% and 10.5% of total net
   revenues,  respectively.  In 2000,  sales to the same two  customers  and one
   other  customer  accounted  for  20.5%,  11.8% and  10.0% of total  revenues,
   respectively.  In 2001,  sales to one customer  accounted  for 17.6% of total
   revenues.

   The  customer  accounting  for  12.8%  of total  net  revenues  in 1999  also
   accounted for 11.8% of accounts  receivable at December 31, 1999. At December
   31,  2000,  the  customer  accounting  for 10.0% of total net  revenues  also
   accounted for 12.4% of accounts  receivable.  At December 31, 2001, no single
   customer accounted for 10% or more of accounts receivable.


                                      II-31


11.   Product, Segment and Geographic Information

   Nanometrics' operating divisions consist of its geographically based entities
   in the United  States,  Japan,  South  Korea and Taiwan.  All such  operating
   divisions have similar economic characteristics,  as defined in SFAS No. 131,
   Disclosures  About  Segments of an Enterprise  and Related  Information,  and
   accordingly,  Nanometrics  operates  in one  reportable  segment:  the  sale,
   design, manufacture, marketing and support of thin film and overlay dimension
   metrology  systems.  For the years ended  December 31,  1999,  2000 and 2001,
   Nanometrics  recorded  revenue from  customers  throughout the United States,
   Canada, Germany, the United Kingdom,  Ireland, France, Italy, Sweden, Israel,
   Japan,  South Korea,  China,  Singapore,  Hong Kong,  Taiwan,  Indonesia  and
   Malaysia.  The following table  summarizes  total net revenues and long-lived
   assets attributed to significant countries (in thousands):

                                                     Years Ended December 31,
                                                  -----------------------------
                                                    1999       2000       2001
                                                    ----       ----       ----
         Total net revenues:
           United States......................    $14,225    $27,391    $16,752
           Japan..............................     11,594     13,028     13,712
           Taiwan.............................      4,967     11,652      6,727
           Korea..............................      2,991     13,532      4,693
           Germany............................      2,340      1,491      2,018
           All other..........................        291      2,397      3,682
                                                  -------    -------    -------
         Total net revenues*..................    $36,408    $69,491    $47,584
                                                  =======    =======    =======

                                                      December 31,
                                                  -------------------
                                                    2000       2001
                                                    ----       ----
         Long-lived assets:
           United States......................    $32,599    $43,375
           Japan..............................      4,485      6,660
           Korea..............................      1,696      3,139
           Taiwan.............................         45         64
                                                  -------    -------
         Total long-lived assets..............    $38,825    $53,238
                                                  =======    =======

*  Net revenues are attributed to countries  based on the deployment and service
   locations of systems.

   Nanometrics'  product lines differ  primarily  based on the  environment  the
   systems will be used in. Automated  systems are used primarily in high-volume
   production  environments.  Integrated  systems  are  installed  inside  wafer
   processing  equipment to provide near  real-time  measurements  for improving
   process  control  and  increasing  throughput.   Tabletop  systems  are  used
   primarily in low-volume production environments and in engineering labs where
   automated  handling and high  throughput  are not required.  Sales by product
   type were as follows (in thousands):
                                                     Years Ended December 31,
                                                  -----------------------------
                                                    1999       2000       2001
                                                    ----       ----       ----
          Automated systems...................    $20,885    $38,441    $27,416
          Integrated systems..................      3,953     13,680      7,527
          Tabletop systems....................      7,324     11,347      7,710
                                                  -------    -------    -------
          Total product sales.................    $32,162    $63,468    $42,653
                                                  =======    =======    =======


                                      II-32


12.   Selected Quarterly Financial Results (Unaudited)

   As discussed in Note 1 to the consolidated financial statements,  Nanometrics
   adopted a change in  accounting  principle  related to SAB No.  101,  Revenue
   Recognition in Financial Statements,  in the quarter ended December 31, 2000,
   retroactive to the beginning of fiscal year 2000. The retroactive application
   of this change  resulted in a cumulative  effect of  $1,364,000  in the first
   quarter of 2000 as well as a change to the  presentation  of historical  2000
   quarterly results of operations.

   The following tables set forth selected  quarterly  results of operations for
   the years ended  December 31, 2000 and 2001 (in  thousands,  except per share
   amounts):



                                                                         Quarters Ended
                                                           -------------------------------------------
                                                             Mar. 31,   Jun. 30,   Sep. 30,   Dec. 31,
                                                               2000       2000       2000      2000
                                                               ----       ----       ----      ----
                                                                                 
   Total net revenues....................................    $16,316    $16,690    $19,300   $17,185
   Gross profit..........................................      8,487      9,185     11,377     9,338
   Income from operations..............................        3,383      3,409      5,412     2,374
   Net income............................................        901      2,950      4,024     3,300
   Net income per share:
     Basic...............................................    $  0.09    $  0.26    $  0.35   $  0.29
     Diluted.............................................    $  0.08    $  0.24    $  0.33   $  0.28

   Shares used in per share computation:
     Basic...............................................      9,693     11,295     11,393    11,563
     Diluted.............................................     10,880     12,415     12,100    11,986

                                                                       Quarters Ended
                                                           -------------------------------------------
                                                             Mar. 31,   Jun. 30,   Sep. 30,   Dec. 31,
                                                               2001       2001       2001      2001
                                                               ----       ----       ----      ----

   Total net revenues....................................    $14,425    $14,793    $10,099   $ 8,267
   Gross profit..........................................      7,668      7,787      5,290     3,484
   Income (loss) from operations.........................      2,101      1,813     (1,166)   (2,979)
   Net income (loss).....................................      1,623      1,537       (450)   (1,750)
   Net income (loss) per share:
     Basic...............................................    $  0.14    $  0.13    $ (0.04)  $ (0.15)
     Diluted.............................................    $  0.14    $  0.13    $ (0.04)  $ (0.15)

   Shares used in per share computation:
     Basic...............................................     11,616     11,658     11,707    11,783
     Diluted.............................................     11,992     12,195     11,707    11,783


                                    * * * * *


                                      II-33


ITEM  9.  CHANGES  IN AND  DISAGREEMENTS  WITH  ACCOUNTANTS  ON  ACCOUNTING  AND
          FINANCIAL DISCLOSURE

           Not applicable.


                                      II-34


                                    PART III

ITEM 10.  DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

The sections  entitled  "Election of Directors"  and "Section  16(a)  Beneficial
Ownership  Reporting  Compliance"  appearing in the Registrant's proxy statement
for the annual meeting of shareholders for the year ended December 31, 2001 sets
forth  certain   information   which  is  incorporated  by  reference.   Certain
information with respect to persons who are executive officers of the Registrant
is set forth under the caption  "Business-Executive  Officers of the Registrant"
in Part I of this report.

ITEM 11.  EXECUTIVE COMPENSATION

The section  entitled  "Executive  Compensation"  appearing in the  Registrant's
proxy  statement  for the  annual  meeting  of  shareholders  for the year ended
December  31,  2001  sets  forth  certain   information   with  respect  to  the
compensation  of  management of the  Registrant  and is  incorporated  herein by
reference.

ITEM 12.  SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

The section entitled "Election of Directors" appearing in the Registrant's proxy
statement for the annual meeting of shareholders for the year ended December 31,
2001 sets  forth  certain  information  with  respect  to the  ownership  of the
Registrant's Common Stock and is incorporated herein by reference.

ITEM 13.  CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

The  section  entitled   "Transactions   with   Management"   appearing  in  the
Registrant's proxy statement for the annual meeting of shareholders for the year
ended December 31, 2001 sets forth certain  information  with respect to certain
business relationships and transactions between the Registrant and its directors
and officers and is incorporated herein by reference.


                                      III-1


                                     PART IV

ITEM 14. EXHIBITS,  CONSOLIDATED  FINANCIAL STATEMENT SCHEDULES,  AND REPORTS ON
         FORM 8-K

       (a)  1.  Consolidated Financial Statements.

       See Index to Consolidated Financial Statements at Item 8 on page II-15 of
       this Annual Report on Form 10-K.

       (a)  2.  Consolidated Financial Statement Schedules.

       The following  consolidated  financial statement schedules of Nanometrics
       Incorporated  are  filed as part of this  Annual  Report on Form 10-K and
       should be read in conjunction with the Consolidated  Financial Statements
       of Nanometrics Incorporated:

     Schedule                                                               Page

     II - Valuation and Qualifying Accounts...............................  IV-4

Schedules not listed above have been omitted  because they are not applicable or
are not required or the information required to be set forth therein is included
in the Consolidated Financial Statements or notes thereto.

        (b)  Reports on Form 8-K. We did not file any reports on Form 8-K during
        the quarter ended December 31, 2001.

        (c)   Exhibits.

        The following exhibits are filed with this Annual Report on Form 10-K:



         Exhibit No.       Description
         -----------       -----------
                        
         3.1(1)            Restated and Amended Articles of Incorporation of Registrant filed July 7, 1982.
         3.2(1)            Certificate of Amendment of Articles of Incorporation filed January 31, 1983.
         3.3(1)            Certificate of Amendment of Articles of Incorporation filed July 28, 1983.
         3.4(1)            Certificate of Amendment of Certificate of Determination of Preferences of Series B Common Stock
                           filed September 13, 1983.
         3.5(1)            Certificate of Amendment of Articles of Incorporation filed September 13, 1983.
         3.6(2)            Certificate of Amendment of Articles of Incorporation filed December 3, 1984.
         3.7(2)            Certificate of Correction of Certificate of Amendment of Certificate of Determination of
                           Preferences of Series B Common Stock filed March 19, 1985.
         3.8(2)            Certificate of Amendment of Articles of Incorporation filed June 27, 1988.
         3.9(2)            Bylaws of Nanometrics Incorporated.
         3.10(5)           Certificate of Amendment of Amended and Restated Bylaws of Nanometrics Incorporated.
         4.1(1)            Form of Common Stock Certificate.
         10.1(2)           Form of Indemnification of Agreement for Directors & Officers.
         10.2(4)           Employee Stock Purchase Plan, as amended through March 1998.
         10.3(3)           1991 Stock Option Plan, as amended through May 15, 1997.
         10.4(6)           1991 Director Option Plan.
         10.5(2)           Loan Agreement between Japan Development Bank and Nanometrics Japan k.k.
         10.6(2)           Loan Agreement and Guarantee dated June 5, 1995 between Mitsubishi Bank, Limited and Nanometrics
                           Japan Ltd.


                                      IV-1




         Exhibit No.       Description
         -----------       -----------
                        
         10.7(4)           Nanometrics Incorporated 2000 Employee Stock Option Plan and form of Stock Option Agreement.
         10.8(4)           Nanometrics Incorporated 2000 Director Stock Option Plan and form of Stock Option Agreement.
         21(2)             Subsidiaries of Registrant.
         23.1              Independent Auditors' Consent.
         23.2              Independent Auditors' Report on Schedule.
         24                Power of Attorney (see page IV-3).


(1)   Incorporated by reference to exhibits filed with Registrant's Registration
      Statement on Form S-1 (File No. 2-93949),  which became effective November
      28, 1984.

(2)   Incorporated by reference to the  Registrant's  Annual Report on Form 10-K
      (File No. 000-13470) filed on April 1, 1998.

(3)   Incorporated   by  reference  to  Exhibit  4.1  filed  with   Registrant's
      Registration  Statement on Form S-8 (File No.  333-33583)  filed on August
      14, 1997.

(4)   Incorporated by reference to exhibits filed with Registrant's Registration
      Statement on Form S-8 (File No. 333-40866) filed on July 7, 2000.

(5)   Incorporated by reference to Exhibit 3.10 filed with  Registrant's  Annual
      Report on Form 10-K dated March 30, 2001.

(6)   Incorporated   by  reference  to  Exhibit  4.2  filed  with   Registrant's
      Registration  Statement on Form S-8 (File No.  33-43913) filed on November
      14, 1991.

(d) Consolidated Financial Statements and Schedules.

See Item 14(a) of this Annual Report on Form 10-K above.


                                      IV-2


                                   SIGNATURES

Pursuant to the  requirements of Section 13 or 15(d) of the Securities  Exchange
Act of 1934,  the  registrant  has duly  caused  this report to be signed on its
behalf by the undersigned, thereunto duly authorized.

Dated: March 21, 2002

                              NANOMETRICS INCORPORATED


                              By: /s/ Paul B. Nolan
                              ---------------------
                              Paul B. Nolan
                              Chief Financial Officer and Vice President

                                POWER OF ATTORNEY

KNOW ALL PERSONS BY THESE  PRESENTS,  that each person whose  signature  appears
below  constitutes  and  appoints  John D. Heaton and Paul B. Nolan  jointly and
severally, his attorneys-in-fact,  each with the power of substitution,  for him
in any and all capacities, to sign any and all amendments to this Report on Form
10-K,  and to file the  same,  with  exhibits  thereto  and other  documents  in
connection  therewith,  with the  Securities  and  Exchange  Commission,  hereby
ratifying and confirming all that said  attorneys-in-fact,  or his substitute or
substitutes, may do or cause to be done by virtue hereof.

Pursuant to the requirements of the Securities Exchange Act of 1934, this Report
on Form 10-K has been  signed  below by the  following  persons on behalf of the
registrant on the 21st day of March, 2002 in the capacities indicated.



                              
Signature                        Title

/s/ John D. Heaton               President, Chief Executive Officer and Director
- ------------------------         (Principal Executive Officer)
John D. Heaton

/s/ Paul B. Nolan                Chief Financial Officer and Vice President
- ------------------------         (Principal Financial and Accounting Officer)
Paul B. Nolan

/s/ Vincent J. Coates            Chairman of the Board
- ------------------------
Vincent J. Coates

/s/ Nathaniel Brenner            Director
- ------------------------
Nathaniel Brenner

/s/ Papken Der Torossian         Director
- ------------------------
Papken Der Torossian

/s/ William Oldham               Director
- ------------------------
William Oldham

/s/ Edmond R. Ward               Director
- ------------------------
Edmond R. Ward



                                      IV-3


                                   Schedule II

                            NANOMETRICS INCORPORATED
                        VALUATION AND QUALIFYING ACCOUNTS

                         Allowance for Doubtful Accounts

                             Balance at    Charged to    Deductions-     Balance
                              beginning     costs and     write-offs      at end
Year Ended                    of period      expenses    of accounts   of period

December 31, 1999........      $420,000      $  5,000         $    0    $425,000
                               --------      --------         ------    --------

December 31, 2000........      $425,000      $      0         $7,000    $418,000
                               --------      --------         ------    --------

December 31, 2001........      $418,000      $150,000         $6,000    $562,000
                               --------      --------         ------    --------


                                      IV-4