SECURITIES AND EXCHANGE COMMISSION
                             Washington, D. C. 20549

                                    FORM 10-Q



     X    Quarterly  report  pursuant  to Section 13 or 15(d) of the  Securities
          Exchange Act of 1934

For the quarterly period ended March 31, 2002 or

          Transition  report  pursuant to Section 13 or 15(d) of the  Securities
          Exchange Act of 1934

For the transition period from _______________ to _______________

Commission file number       0-13470
                        ------------------------

                            NANOMETRICS INCORPORATED
             (Exact name of registrant as specified in its charter)


             California                              94-2276314
             ----------                              ----------
   (State or other jurisdiction of             (I. R. S. Employer
    incorporation or organization)             Identification No.)


  1550 Buckeye Drive, Milpitas,  CA                         95035
  ---------------------------------                         -----
(Address of principal executive offices)                 (Zip Code)


Registrant's telephone number, including area code      (408) 435-9600


Indicate by check mark whether the registrant (1) has filed all reports required
to be filed  by  Section  13 or 15 (d) of the  Securities  Exchange  Act of 1934
during the preceding 12 months (or for such shorter  period that the  registrant
was  required  to file such  reports),  and (2) has been  subject to such filing
requirements for the past 90 days.

                           YES __X__     NO ____


At April 22, 2002 there were  11,828,196  shares of common stock,  no par value,
issued and outstanding.





                            NANOMETRICS INCORPORATED


                                                        INDEX



Part I.  Financial Information                                             Page
                                                                           ----

    Item 1.  Financial Statements

             Consolidated Balance Sheets -
             March 31, 2002 and  December 31, 2001 . . . . . . . . . . . . .  3

             Consolidated Statements of Operations -
             Three  months ended March 31, 2002 and 2001 . . . . . . . . . .  4

             Consolidated Statements of Cash Flows -
             Three  months  ended  March  31,  2002 and 2001 . . . . . . . .  5

             Notes to  Consolidated  Financial  Statements . . . . . . . . .  6


    Item 2.  Management's Discussion and Analysis of
             Financial  Condition  and Results of Operations . . . . . . . .  8

    Item 3.  Quantitative and Qualitative Disclosures
             about  Market  Risk . . . . . . . . . . . . . . . . . . . . . .  9


Part II.     Other Information

    Item 6.  Exhibits  and  Reports  on Form 8-K . . . . . . . . . . . . . .  10


Signatures  .  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  11



                                       2


PART I:  FINANCIAL INFORMATION
ITEM 1:  FINANCIAL STATEMENTS


                            NANOMETRICS INCORPORATED
                           CONSOLIDATED BALANCE SHEETS
                   (Amounts in thousands except share amounts)



                                                                     March 31,               December 31,
                                                                       2002                      2001
ASSETS                                                              (Unaudited)
                                                                    ----------                ----------
CURRENT ASSETS:
                                                                                        
   Cash and cash equivalents                                        $   41,428                $   47,227
   Short-term investments                                                1,989                         -
   Accounts receivable, net of allowances of $561 and $562              10,009                     9,131
   Inventories                                                          25,785                    26,311
   Deferred income taxes                                                 5,378                     3,974
   Prepaid expenses and other                                              727                     2,474
                                                                    ----------                ----------
         Total current assets                                           85,316                    89,117
PROPERTY, PLANT AND EQUIPMENT, Net                                      49,423                    48,412
DEFERRED INCOME TAXES                                                       81                       225
GOODWILL                                                                 1,077                     1,077
OTHER ASSETS                                                             3,414                     3,524
                                                                    ----------                ----------
TOTAL                                                               $  139,311                $  142,355
                                                                    ==========                ==========

LIABILITIES AND SHAREHOLDERS' EQUITY
CURRENT LIABILITIES:
   Accounts payable                                                 $      858                $    2,906
   Accrued payroll and related expenses                                  1,398                     1,148
   Deferred revenue                                                      2,574                     2,261
   Other current liabilities                                             2,301                     1,981
   Income taxes payable                                                    102                       272
   Current portion of debt obligations                                     374                       378
                                                                    ----------                ----------
         Total current liabilities                                       7,607                     8,946


OTHER LONG-TERM OBLIGATIONS                                                  -                       250
DEBT OBLIGATIONS                                                         3,178                     3,314
                                                                    ----------                ----------
         Total liabilities                                              10,785                    12,510
                                                                    ----------                ----------

SHAREHOLDERS' EQUITY:
   Common stock, no par value; 25,000,000 shares
     authorized; 11,801,199 and 11,787,033 outstanding                  98,703                    98,531
   Retained earnings                                                    31,196                    32,743
   Accumulated other comprehensive loss                                 (1,373)                   (1,429)
                                                                    ----------                ----------
         Total shareholders' equity                                    128,526                   129,845
                                                                    ----------                ----------
TOTAL                                                               $  139,311                $  142,355
                                                                    ==========                ==========


See Notes to Consolidated Financial Statements



                                       3



                            NANOMETRICS INCORPORATED
                      CONSOLIDATED STATEMENTS OF OPERATIONS
                 (Amounts in thousands except per share amounts)
                                   (Unaudited)


                                                     Three Months Ended
                                                         March 31,
                                                   2002             2001
                                                   ----             ----

NET REVENUES:
   Product sales                                $   6,861        $   12,939
   Service                                          1,164             1,486
                                                ----------       ----------
   Total net revenues                               8,025            14,425
                                                ----------       ----------

COSTS AND EXPENSES:
   Cost of product sales                            2,792             5,291
   Cost of service                                  1,257             1,466
   Research and development                         3,386             2,595
   Selling                                          2,222             2,033
   General and administrative                         915               939
                                                ----------       ----------
   Total costs and expenses                        10,572            12,324
                                                ----------       ----------

INCOME (LOSS) FROM OPERATIONS                     (2,547)             2,101
                                                ----------       ----------

OTHER INCOME (EXPENSE):
   Interest income                                    165               993
   Interest expense                                   (22)              (22)
   Other, net                                         (92)             (409)
                                                ----------       ----------
   Total other income, net                             51               562
                                                ----------       ----------

INCOME (LOSS) BEFORE INCOME TAXES                  (2,496)            2,663

PROVISION (BENEFIT) FOR INCOME TAXES                 (949)            1,040
                                                ----------       ----------
NET INCOME (LOSS)                               $  (1,547)        $   1,623
                                                ==========       ==========


NET INCOME  (LOSS) PER SHARE:
  Basic                                         $   (0.13)        $    0.14
                                                ==========       ==========
  Diluted                                       $   (0.13)        $    0.14
                                                ==========       ==========

SHARES USED IN PER SHARE COMPUTATION:
  Basic                                            11,790            11,616
                                                ==========       ==========
  Diluted                                          11,790            11,992
                                                ==========       ==========


See Notes to Consolidated Financial Statements



                                       4




                            NANOMETRICS INCORPORATED
                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                             (Amounts in thousands)
                                   (Unaudited)



                                                                                Three Months Ended
                                                                                     March 31,
                                                                              2002               2001
                                                                              ----               ----
CASH FLOWS FROM OPERATING ACTIVITIES:
                                                                                         
   Net income (loss)                                                       $  (1,547)          $  1,623
   Reconciliation of net income (loss) to net
   cash provided by operating activities:
   Depreciation and amortization                                                 493                240
   Deferred income taxes                                                      (1,235)               326
   Changes in assets and liabilities:
       Accounts receivable                                                      (935)             1,487
       Inventories                                                               484             (1,277)
       Prepaid expenses and other                                              1,704                777
       Accounts payable accrued and other current liabilities                 (1,085)              (444)
       Income taxes payable                                                     (102)               400
                                                                          ----------         ----------
Net cash provided by (used in) operating activities                           (2,223)             3,132
                                                                          ----------         ----------

CASH FLOWS FROM INVESTING ACTIVITIES:
   Purchase of short-term investments                                         (1,989)           (76,866)
   Sales/maturities of short-term investments                                      -             68,589
   Purchases of property, plant and equipment                                 (1,463)            (2,849)
   Other assets                                                                    -               (627)
                                                                          ----------         ----------
Net cash used in investing activities                                         (3,452)           (11,753)
                                                                          ----------         ----------

CASH FLOWS FROM FINANCING ACTIVITIES:
   Repayments of debt obligations                                               (393)              (574)
   Issuance of common stock                                                      102                 96
                                                                          ----------         ----------
Net cash used in financing activities                                           (291)              (478)
                                                                          ----------         ----------
EFFECT OF EXCHANGE RATE CHANGES ON CASH                                          167                122
                                                                          ----------         ----------
NET CHANGE IN CASH AND EQUIVALENTS                                            (5,799)            (8,977)
CASH AND CASH EQUIVALENTS, beginning of period                                47,227             16,934
                                                                          ----------         ----------
CASH AND CASH EQUIVALENTS, end of period                                   $  41,428           $  7,957
                                                                          ==========         ==========

SUPPLEMENTAL DISCLOSURE OF CASH FLOW INFORMATION:
   Cash paid for interest                                                  $      26           $     32
                                                                          ==========         ==========
   Cash paid for income taxes                                              $       6           $    333
                                                                          ==========         ==========

SUPPLEMENTAL DISCLOSURE OF NONCASH INVESTING
AND FINANCING ACTIVITIES:
   Common stock issued as partial proceeds in a business combination       $       -           $    214
                                                                          ==========         ==========



See Notes to Consolidated Financial Statements


                                       5




                            NANOMETRICS INCORPORATED
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS
                                   (Unaudited)



Note 1.        Consolidated Financial Statements

    The consolidated  financial  statements  include the accounts of Nanometrics
Incorporated and its  wholly-owned  subsidiaries.  All significant  intercompany
accounts and transactions have been eliminated.

    While the quarterly  consolidated  financial  statements are unaudited,  the
financial statements included in this report reflect all adjustments (consisting
only of normal recurring  adjustments) which Nanometrics considers necessary for
a fair presentation of the results of operations for the interim periods covered
and of our financial  condition at the date of the interim  balance  sheet.  The
operating  results for interim  periods are not  necessarily  indicative  of the
operating  results  that may be expected for the entire  year.  The  information
included  in this  report  should be read in  conjunction  with the  information
included  in  Nanometrics'  2001  Annual  Report  on Form  10-K  filed  with the
Securities and Exchange Commission.


Note 2.        Inventories

   Inventories are stated at the lower of cost  (first-in,  first-out) or market
and consist of the following (in thousands):

                                               March 31,     December 31,
                                                 2002           2001
                                                 ----           ----

    Raw materials and subassemblies            $ 17,577       $ 18,279
    Work in process                               2,129          2,387
    Finished goods                                6,079          5,645
                                               --------       --------
    Total inventories                          $ 25,785       $ 26,311
                                               ========       ========



Note 3.        Other Current Liabilities

   Other current liabilities consist of the following (in thousands):

                                               March 31,     December 31,
                                                 2002           2001
                                                 ----           ----

    Commission payable                         $    105       $    288
    Accrued warranty                                361            435
    Accrued professional services                   151            210
    Customer deposits                               716              -
    Other                                           968          1,048
                                               --------       --------
    Total other current liabilities            $  2,301       $  1,981
                                               ========       ========



                                       6




Note 4.        Shareholders' Equity

   Net Income Per Share - The  reconciliation  of the share  denominator used in
the basic and  diluted  net income  per share  computations  are as follows  (in
thousands):

                                                           Three Months Ended
                                                                March 31,
                                                             2002        2001
                                                            ------      ------
 Weighted average common shares outstanding-shares
  used in basic net income per share computations           11,790      11,616
 Dilutive effect of common stock equivalents,
  using the treasury stock method                                -         376
                                                            ------      ------
 Shares used in diluted net income per share computation    11,790      11,992
                                                            ======      ======

   At March 31, 2002,  common stock  equivalents  were excluded from the diluted
net income per share  computation as their effect is  anti-dilutive.  During the
three  months  ended  March 31,  2001,  Nanometrics  had  common  stock  options
outstanding  which could  potentially  dilute  basic net income per share in the
future,  but were excluded from the  computation of diluted net income per share
as the common  stock  options'  exercise  prices were  greater  than the average
market price of the common shares for the period.


Note 5.        Comprehensive Income (Loss)

   Comprehensive income (loss), which consisted of net income (loss) and changes
in  accumulated  other  comprehensive  income,  was a loss of $1,491,000 for the
three  months  ended March 31, 2002  compared to income of $995,000 for the same
period in 2001.


Note 6.        New Accounting Pronouncement

   In June 2001,  the  Financial  Accounting  Standards  Board  ("FASB")  issued
Statement  of  Financial   Accounting   Standard   ("SFAS")  No.  141,  Business
Combinations and SFAS No. 142,  Goodwill and Other Intangible  Assets.  SFAS No.
141 requires  that all business  combinations  initiated  after June 30, 2001 be
accounted for under the purchase  method and  addresses the initial  recognition
and measurement of goodwill and other  intangible  assets acquired in a business
combination.  SFAS No. 142 addresses the initial  recognition and measurement of
intangible assets acquired outside of a business  combination and the accounting
for goodwill and other intangible assets subsequent to their  acquisition.  SFAS
No. 142 provides  that  intangible  assets with finite useful lives be amortized
and that  goodwill  and  intangible  assets  with  indefinite  lives will not be
amortized, but will rather be tested at least annually for impairment. Effective
January 1, 2002, Nanometrics adopted SFAS No. 142. Nanometrics ceased amortizing
goodwill with a net carrying  value of  $1,077,000  and annual  amortization  of
$204,000  that  resulted  from  business  combinations  completed  prior  to the
adoption of SFAS No. 141. The  adoption of the  non-amortization  provisions  of
SFAS No.  142 was not  material  for the three  months  ended  March  31,  2002.
Nanometrics  completed its  transitional  impairment test and determined that no
impairment was indicated.



                                       7


ITEM 2.      MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION
             AND RESULTS OF OPERATIONS

   This report including the following  Management's  Discussion and Analysis of
Financial   Condition  and  Results  of  Operations   contains   forward-looking
statements  within the meaning of Section 27A of the Securities Act of 1933, and
Section  21E of  the  Securities  Exchange  Act of  1934.  Such  forward-looking
statements  are based upon current  expectations  and beliefs that involve risks
and  uncertainties,  such as our plans,  objectives and  intentions,  regarding,
among other things: (i) customer demand for Nanometrics' products,  which may be
affected by several  factors  including the  cyclicality  of the  semiconductor,
magnetic recording head and flat panel display industries served by Nanometrics,
patterns of capital  spending  by its  customers,  technological  changes in the
markets  served by  Nanometrics  and its  customers,  and market  acceptance  of
products of both Nanometrics and its customers; (ii) the timing, cancellation or
delay  of  Nanometrics'  customer  orders  and  shipments;   (iii)  competition,
including  competitive  pressures  on product  prices and  changes in pricing by
Nanometrics'  customers or  suppliers;  (iv)  fluctuations  in foreign  currency
exchange  rates,  particularly  the Japanese  yen; (v) the  proportion  of sales
Nanometrics  makes directly to its customers  versus sales through  distributors
and  representatives;  (vi) market  acceptance  of new and enhanced  versions of
Nanometrics'  products;  (vii)  the  timing  of new  product  announcements  and
releases of products by Nanometrics or its competitors, including our ability to
design,  introduce and  manufacture  new products on a timely and cost effective
basis;  (viii) the size and timing of  acquisitions  of businesses,  products or
technologies  and  fluctuations in the  availability  and cost of components and
subassemblies of Nanometrics' products.

    In some cases, forward-looking statements can be identified by words such as
"believe," "expect,"  "anticipate,"  "plan," "potential,"  "continue" or similar
expressions.  Forward-looking statements also include the assumptions underlying
or relating to any of the foregoing statements.  Our actual results could differ
materially  from those  anticipated  in these  forward-looking  statements  as a
result of  certain  risk  factors,  including  those set forth in  "Management's
Discussion  and  Analysis of  Financial  Condition  and Results of  Operations -
Factors That May Affect Future  Operating  Results" in Nanometrics'  2001 Annual
Report  on Form  10-K.  We  believe  that it is  important  to  communicate  our
expectations to our investors.  However,  there may be events in the future that
we are not able to  predict  accurately  or over which we have no  control.  You
should be aware that the occurrence of the events described in such risk factors
and elsewhere in this report could materially and adversely affect our business,
operating results and financial condition.

   All  forward-looking   statements  included  in  this  report  are  based  on
information  available to us on the date hereof.  We undertake no  obligation to
update  forward-looking  statements  made in this  report to  reflect  events or
circumstances  after the date of this  report or to update  reasons  why  actual
results could differ from those anticipated in such forward-looking statements.


Results of Operations

    Total net revenues for the first quarter of 2002 were $8,025,000, a decrease
of $6,400,000 or 44% from the same quarter in 2001.  Product sales of $6,861,000
decreased  $6,078,000  or 47% for the first quarter of 2002 compared to the same
period in 2001.  Unit sales of automated,  integrated and tabletop  systems were
each down from their 2001 levels.  The decrease in product  sales  resulted from
weaker  demand  for   semiconductor   process   control   metrology   equipment,
particularly  in the U.S. and the Far East. We believe that this reduced  demand
was attributable primarily to overcapacity in the semiconductor industry as well
as the economic  slowdown in the U.S. and Japan.  Service  revenue of $1,164,000
decreased  $322,000  or 22% in the first  quarter of 2002  compared  to the same
period in 2001  primarily  due to lower spare parts sales in the U.S and the Far
East due in part to the decline in the semiconductor market discussed above.


                                       8


    Cost of product  sales as a percentage of product sales was 41% in the first
quarter of 2002,  unchanged from the first quarter of 2001. Cost of service as a
percentage  of service  revenue  increased to 108% in the first  quarter of 2001
from 99% in the first  quarter of 2001  primarily  as a result of lower  service
sales in the U.S and in the Far East.

    Research and  development  expenses for the first quarter of 2002  increased
$791,000 or 30%  compared to the same period in 2001  resulting  primarily  from
increased headcount and related expenses for the development of new and enhanced
products.

    Selling  expenses for the first quarter of 2002  increased by $189,000 or 9%
compared  to the same  period in 2001  primarily  because of a higher  headcount
level and related expenses.

    General and administrative  expenses for the first quarter of 2002 decreased
by $24,000 or 3% compared to the same  period in 2001  primarily  as a result of
lower spending associated with the decreased level of operations.

    Total other income,  net decreased  $511,000 or 91% during the first quarter
of 2002  compared to the same  period in 2001 due  primarily  to lower  interest
income.

    Nanometrics'  loss  from  operations  was  $2,547,000  and the net  loss was
$1,547,000  or $0.13 per diluted  share in the first quarter of 2002 compared to
income from  operations of $2,101,000  and net income of $1,623,000 or $0.14 per
diluted share in the first quarter of 2001.

Liquidity and Capital Resources

    At March 31, 2002, our cash,  cash  equivalents  and short-term  investments
totaled $43,417,000.  These funds are invested primarily in U.S. Treasury Bills.
At March 31, 2002,  Nanometrics had working  capital of $77,709,000  compared to
$80,171,000  at December 31, 2001.  The current ratio at March 31, 2002 was 11.2
to 1. We believe that our working capital,  including cash, cash equivalents and
short-term investments will be sufficient to meet our needs at least through the
next twelve months. Operating activities for the first three months of 2002 used
cash of  $2,223,000  primarily  from the net loss,  lower  accounts  payable and
higher accounts receivable resulting from increases in days outstanding,  offset
to some extent by lower inventory levels and lower prepaid  expenses.  Investing
activities used $3,452,000 primarily due to purchases of short-term  investments
of  $1,989,000  and capital  expenditures  of  $1,463,000  used to continue  our
efforts in improving our  facilities and expanding our  manufacturing  capacity.
Financing   activities  used  $291,000   primarily  due  to  repayment  of  debt
obligations  of  $393,000  related to  mortgages  in Japan,  offset by  $102,000
generated from stock issuances.

    We have evaluated and will continue to evaluate the acquisition of products,
technologies  or  businesses  that  are  complementary  to our  business.  These
activities may result in product and business investments,  which may affect our
cash position and working capital balances.


ITEM 3.  QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

    We are exposed to financial  market risks,  which include changes in foreign
currency  exchange rates and interest rates. We do not use derivative  financial
instruments.  Instead,  we actively  manage the  balances of current  assets and
liabilities  denominated in foreign currencies to minimize currency  fluctuation
risk. As a result, a hypothetical  10% change in the foreign  currency  exchange
rates at March 31,  2002 would not have had a material  impact on our results of
operations.  Our  investments  in marketable  securities are subject to interest
rate risk but due to the short-term nature of these  investments,  interest rate
changes  would not have had a material  impact on their value at March 31, 2002.
We also have fixed rate yen denominated  debt  obligations in Japan that have no
interest rate risk. At March 31, 2002, our total debt  obligation was $3,552,000
with a long-term  portion of $3,178,000.  A hypothetical  10% change in interest
rates at March 31,  2002 would not have had a material  impact on our results of
operations.


                                       9



                            NANOMETRICS INCORPORATED
                                     PART II

                                OTHER INFORMATION



ITEM 6.           EXHIBITS AND REPORTS ON FORM 8-K

A.       Exhibits.

         None

B.       Reports on Form 8-K.

         None




                                       10



                            NANOMETRICS INCORPORATED

                                   SIGNATURES



         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  Registrant  has duly  caused  this report to be signed on its behalf by the
undersigned thereunto duly authorized.


NANOMETRICS INCORPORATED
(Registrant)




/s/ Vincent J. Coates
- ------------------------
Vincent J. Coates
Chairman of the Board


/s/ John Heaton
- ------------------------
John Heaton
Chief Executive Officer


/s/ Paul B. Nolan
- ------------------------
Paul B. Nolan
Chief Financial Officer



Dated:  May 7, 2002




                                       11