SECURITIES AND EXCHANGE COMMISSION
                             Washington, D. C. 20549
                                   ----------
                                   FORM 10-Q

(Mark One)

[X] Quarterly report pursuant to Section 13 or 15(d) of the Securities Exchange
 Act of 1934


For the quarterly period ended March 31, 2003

                                       OR

[_] Transition report pursuant to Section 13 or 15(d) of the Securities Exchange
 Act of 1934

For the transition period from _______________ to _______________

Commission file number 0-13470


                            NANOMETRICS INCORPORATED
             ------------------------------------------------------
             (Exact name of registrant as specified in its charter)


             California                              94-2276314
   -------------------------------              --------------------
   (State or other jurisdiction of              (I. R. S. Employer
    incorporation or organization)              Identification No.)


  1550 Buckeye Drive, Milpitas,  CA                          95035
  ---------------------------------             --------------------------------
  (Address of principal executive offices)                 (Zip Code)


Registrant's telephone number, including area code      (408) 435-9600
                                                     --------------------


Indicate by check mark whether the registrant (1) has filed all reports required
to be filed  by  Section  13 or 15 (d) of the  Securities  Exchange  Act of 1934
during the preceding 12 months (or for such shorter  period that the  registrant
was  required  to file such  reports),  and (2) has been  subject to such filing
requirements for the past 90 days.

                             YES    X                NO
                                 -------                 --------


Indicate  by check mark  whether  the  registrant  is an  accelerated  filer (as
defined in Rule 12b-2 of the Act).

                             YES           NO      X
                                 -----          ------


At April 30, 2003 there were  12,006,641  shares of common stock,  no par value,
issued and outstanding.

                                       1


                            NANOMETRICS INCORPORATED

                                      INDEX



Part I.  Financial Information                                              Page
                                                                            ----

    Item 1.  Financial Statements

             Condensed Consolidated Balance Sheets -
             March 31, 2003 and  December  31, 2002 . . . . . . . . . . . . . .3

             Condensed Consolidated Statements of Operations -
             Three  months  ended  March 31,  2003 and 2002 . . . . . . . . . .4

             Condensed Consolidated Statements of Cash Flows -
             Three  months  ended  March 31,  2003 and 2002 . . . . . . . . . .5

             Notes to  Condensed  Consolidated  Financial  Statements . . . . .6


    Item 2.  Management's Discussion and Analysis of
             Financial  Condition  and Results of  Operations . . . . . . . . .9

    Item 3.  Quantitative and Qualitative Disclosures
             about  Market  Risk  . . . . . . . . . . . . . . . . . . . . . . 11

    Item 4.  Controls  and  Procedures  . . . . . . . . . . . . . . . . . . . 11


Part II.     Other Information

    Item 1.  Legal  Procedings  . . . . . . . . . . . . . . . . . . . . . . . 12

    Item 2.  Changes in  Securities  and Use of  Proceeds . . . . . . . . . . 12


    Item 3.  Defaults  Upon  Senior  Securities.  . . . . . . . . . . . . . . 12


    Item 4.  Submission  of Matters to a Vote of  Security  Holders.  . . . . 12

    Item 5.  Other  Information  .  . . . . . . . . . . . . . . . . . . . . . 12

    Item 6.  Exhibits  and  Reports on Form 8-K . . . . . . . . . . . . . . . 12


Signatures  .  .  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Certifications  .  .  . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

                                       2



PART I:  FINANCIAL INFORMATION
ITEM 1:  FINANCIAL STATEMENTS


                            NANOMETRICS INCORPORATED
                      CONDENSED CONSOLIDATED BALANCE SHEETS
                   (Amounts in thousands except share amounts)
                                   (Unaudited)




                                                                       March 31,                 December 31,
                                                                         2003                       2002
                                                                     -----------                 -----------
                                                                                           
ASSETS
CURRENT ASSETS:
   Cash and cash equivalents                                         $     6,822                 $     7,967
   Short-term investments                                                 25,903                      28,899
   Accounts receivable, net of allowances of $566 in 2003 and 2002        11,654                       9,021
   Inventories                                                            24,358                      25,847
   Deferred income taxes                                                     862                       6,840
   Prepaid expenses and other                                              2,993                       2,803
                                                                     -----------                 -----------
         Total current assets                                             72,592                      81,377
PROPERTY, PLANT AND EQUIPMENT, Net                                        49,461                      50,050
INTANGIBLE ASSETS                                                          1,626                       1,748
OTHER ASSETS                                                               1,328                       1,513
                                                                     -----------                 -----------
TOTAL                                                                $   125,007                 $   134,688
                                                                     ===========                 ===========

LIABILITIES AND SHAREHOLDERS' EQUITY
CURRENT LIABILITIES:
   Accounts payable                                                  $     1,657                 $     1,708
   Accrued payroll and related expenses                                    1,460                       1,004
   Deferred revenue                                                        1,719                       1,396
   Other current liabilities                                               1,080                       1,574
   Income taxes payable                                                      141                         139
   Current portion of debt obligations                                       934                         780
                                                                     -----------                 -----------
         Total current liabilities                                         6,991                       6,601
DEFERRED INCOME TAXES                                                        862                         858
DEBT OBLIGATIONS                                                           2,936                       3,123
                                                                     -----------                 -----------
         Total liabilities                                                10,789                      10,582
                                                                     -----------                 -----------

SHAREHOLDERS' EQUITY:
   Common stock, no par value; 50,000,000 shares
     authorized; 12,006,641 outstanding in 2003 and 2002                  99,911                      99,911
   Retained earnings                                                      14,891                      24,475
   Accumulated other comprehensive loss                                    (584)                       (280)
                                                                     -----------                 -----------
         Total shareholders' equity                                      114,218                     124,106
                                                                     -----------                 -----------
TOTAL                                                                $   125,007                 $   134,688
                                                                     ===========                 ===========



See Notes to Condensed Consolidated Financial Statements.

                                       3



                            NANOMETRICS INCORPORATED
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
                 (Amounts in thousands except per share amounts)
                                   (Unaudited)


                                                                            Three Months Ended
                                                                                   March 31,
                                                                     --------------------------------------
                                                                        2003                        2002
                                                                     -----------                 ----------
                                                                                           
NET REVENUES:
   Product sales                                                     $     7,435                 $    6,861
   Service                                                                 1,915                      1,164
                                                                     -----------                 ----------

   Total net revenues                                                      9,350                      8,025
                                                                     -----------                 ----------

COSTS AND EXPENSES:
   Cost of product sales                                                   3,659                      2,792
   Cost of service                                                         1,886                      1,257
   Research and development                                                3,373                      3,386
   Selling                                                                 2,886                      2,222
   General and administrative                                              1,183                        915
                                                                     -----------                 ----------

   Total costs and expenses                                               12,987                     10,572
                                                                     -----------                 ----------

LOSS FROM OPERATIONS                                                     (3,637)                    (2,547)
                                                                     -----------                 ----------

OTHER INCOME (EXPENSE):
   Interest income                                                            94                        165
   Interest expense                                                         (24)                       (22)
   Other, net                                                                  3                       (92)
                                                                     -----------                 ----------
   Total other income (expense), net                                          73                         51
                                                                     -----------                 ----------

LOSS BEFORE INCOME TAXES                                                 (3,564)                    (2,496)

PROVISION (BENEFIT) FOR INCOME TAXES                                       6,020                      (949)
                                                                     -----------                 ----------

NET LOSS                                                             $   (9,584)                 $  (1,547)
                                                                     ===========                 ==========


NET LOSS PER SHARE:
  Basic and diluted                                                  $    (0.80)                 $   (0.13)
                                                                     ===========                 ==========


SHARES USED IN PER SHARE COMPUTATION:
  Basic and diluted                                                       12,007                     11,790
                                                                     ===========                 ==========




See Notes to Condensed Consolidated Financial Statements.
                                       4




                            NANOMETRICS INCORPORATED
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                             (Amounts in thousands)
                                   (Unaudited)



                                                                 Three Months Ended
                                                                      March 31,
                                                                --------------------
                                                                  2003        2002
                                                                --------    --------
                                                                      
CASH FLOWS FROM OPERATING ACTIVITIES:
   Net loss                                                     $ (9,584)   $ (1,547)
    Reconciliation of net loss to net
    cash used in operating activities:
   Depreciation and amortization                                     815         493
   Deferred income taxes                                           5,978      (1,235)
   Changes in assets and liabilities:
       Accounts receivable                                        (2,643)       (935)
       Inventories                                                 1,344         484
       Prepaid expenses and other                                   (208)      1,704
       Accounts payable accrued and other current liabilities        271      (1,085)
       Income taxes payable                                            4        (102)
                                                                --------    --------

Net cash used in operating activities                             (4,023)     (2,223)
                                                                --------    --------

CASH FLOWS FROM INVESTING ACTIVITIES:
   Purchase of short-term investments                            (26,007)     (1,989)
   Sales/maturities of short-term investments                     29,000        --
   Purchases of property, plant and equipment                        (55)     (1,463)
                                                                --------    --------
Net cash provided by (used in) investing activities                2,938      (3,452)
                                                                --------    --------

CASH FLOWS FROM FINANCING ACTIVITIES:
   Repayments of debt obligations                                    (37)       (393)
   Issuance of common stock                                         --           102
                                                                --------    --------

Net cash used in financing activities                                (37)       (291)
                                                                --------    --------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                              (23)        167
                                                                --------    --------

NET CHANGE IN CASH AND EQUIVALENTS                                (1,145)     (5,799)
CASH AND CASH EQUIVALENTS, beginning of period                     7,967      47,227
                                                                --------    --------

CASH AND CASH EQUIVALENTS, end of period                        $  6,822    $ 41,428
                                                                ========    ========

SUPPLEMENTAL DISCLOSURE OF CASH FLOW INFORMATION:
   Cash paid for interest                                       $     24    $     26
                                                                ========    ========
   Cash paid for income taxes                                   $     41    $      6
                                                                ========    ========


See Notes to Condensed Consolidated Financial Statements.

                                       5



                            NANOMETRICS INCORPORATED
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                                   (Unaudited)

Note 1. Condensed Consolidated Financial Statements

         The condensed consolidated financial statements include the accounts of
Nanometrics  Incorporated  and its  wholly-owned  subsidiaries.  All significant
intercompany accounts and transactions have been eliminated.

         While the quarterly  condensed  consolidated  financial  statements are
unaudited,  the  financial  statements  included  in  this  report  reflect  all
adjustments  (consisting only of normal recurring adjustments) which Nanometrics
considers necessary for a fair presentation of the results of operations for the
interim  periods  covered  and of our  financial  condition  at the  date of the
interim  balance  sheet.  The  operating  results  for  interim  periods are not
necessarily  indicative  of the  operating  results that may be expected for the
entire  year.  The  information  included  in  this  report  should  be  read in
conjunction with the information  included in Nanometrics' 2002 Annual Report on
Form 10-K filed with the Securities and Exchange Commission.

Note 2. Significant Accounting Policies

         Income  Taxes - Deferred  income  taxes  reflect the net tax effects of
temporary differences between the carrying amounts of assets and liabilities for
financial  reporting  purposes  and the amounts used for income tax purposes and
operating  loss and tax credit  carryforwards  measured  by  applying  currently
enacted tax laws.  A valuation  allowance is provided  when  necessary to reduce
deferred  tax assets to an amount that is more  likely than not to be  realized.
During the  quarter  ended  March 31,  2003,  Nanometrics  recorded a  valuation
allowance of $6,020,000.

         Short-Term  Investments  -  Short-term  investments  consist  of United
States  Treasury  bills and are  stated  at fair  value  based on quoted  market
prices.  Short-term  investments are classified as  available-for-sale  based on
Nanometrics'  intended use. The difference between amortized cost and fair value
representing  unrealized  holding gains or losses are recorded as a component of
shareholders'  equity  as  accumulated  other  comprehensive  loss  and  was not
significant  as of March  31,  2003.  Gains and  losses  on sales of  short-term
investments are determined on a specific identification basis.

Note 3. Inventories

         Inventories  are stated at the lower of cost  (first-in,  first-out) or
market and consist of the following (in thousands):

                                                 March 31,         December 31,
                                                   2003                2002
                                                  -------             -------
Raw materials and subassemblies                   $14,253            $18,353
Work in process                                     4,660              4,733
Finished goods                                      5,445              2,761
                                                  -------            -------
Total inventories                                 $24,358            $25,847
                                                  =======            =======

                                       6



Note 4. Other Current Liabilities

      Other current liabilities consist of the following (in thousands):

                                                         March 31,  December 31,
                                                           2003          2002
                                                         --------     --------

         Commission payable                             $    222     $    291
         Accrued warranty                                    361          261
         Accrued professional services                       157          169
         Other                                               340          853
                                                        --------     --------
         Total other current liabilities                $  1,080     $  1,574
                                                        ========     ========


Note 5       Shareholders' Equity

      Net Income Per Share - The reconciliation of the share denominator used in
the basic and diluted net income per share computations are as follows (in
thousands):

                                                             Three Months Ended
                                                                 March 31,
                                                             -----------------
                                                              2003       2002
                                                             ------     ------
Weighted average common shares outstanding-shares
 used in basic net loss per share computations               12,007     11,790
Dilutive effect of common stock equivalents,
 using the treasury stock method                               --         --
                                                             ------     ------
Shares used in diluted net loss per share computation        12,007     11,790
                                                             ======     ======

         At March 31, 2003 and March 31,  2002,  respectively,  diluted net loss
per share  excludes  common  equivalent  shares  outstanding  of  1,359,000  and
2,637,000, respectively, as their effect is anti-dilutive.

Note 6     Comprehensive Loss

         Comprehensive  loss,  which consisted of net income loss and changes in
accumulated  other  comprehensive  loss,  was a loss of $9,888,000 for the three
months ended March 31, 2003 compared to a  comprehensive  loss of $1,491,000 for
the  same  period  in  2002.   Substantially   all  of  the  accumulated   other
comprehensive  loss  consists of  accumulated  translation  adjustments  for all
periods presented.

Note 7     Warranties

         Nanometrics  sells the majority of its products with a one-year  repair
or replacement warranty and records a provision for estimated claims at the time
of  sale.  Components  of  the  warranty  accrual,  which  was  included  in the
accompanying  consolidated balance sheets as other current  liabilities,  was as
follows (in thousands):

Balance as of December 31, 2002                                  $    261
Actual warranty costs                                                (150)
Revision to existing warranty                                         (85)
Provision for warranty (three months ended March 31, 2003)            335
                                                                 --------
Balance as of March 31, 2003                                     $    361
                                                                 ========

                                       7


Note 8.        Stock-Based Compensation

         Nanometrics  accounts for stock-based  compensation using the intrinsic
value method in accordance  with the provision of  Accounting  Principles  Board
Opinion  No.  25,  Accounting  for Stock  Issued to  Employees,  as  allowed  by
Statement of Financial Accounting Standards (SFAS) No. 123, Accounting for Stock
Based  Compensation  as  amended by SFAS No.  148,  Accounting  for Stock  Based
Compensation-Transition and Disclosures, an Amendment of FASB Statement No. 123.

         Under the intrinsic  value method,  Nanometrics  does not recognize any
compensation expense, as the exercise price of all stock options is equal to the
fair market value at the time the options are granted.  Had compensation expense
been  recognized  using  the  fair  value-based   method  under  SFAS  No.  123,
Nanometrics' pro forma  consolidated  loss and loss per share would have been as
follows (in thousands, except per share amounts):



                                                                             Three Months Ended
                                                                                March 31,
                                                                      ---------------------------
                                                                          2003              2002
                                                                      ---------         ---------
                                                                                 
Net loss:
  As reported                                                           $ (9,584)      $  (1,547)
  Deduct:  Total stock-based employee compensation expense
     determined under fair value based method for all awards,
     net of related income tax effects                                    (4,199)         (1,049)
                                                                       ----------        --------
Pro forma                                                              $ (13,783)      $  (2,596)
                                                                        =========       =========

Basic and diluted net loss per share:
  As reported                                                          $  (0.80)       $   (0.13)
  Pro forma                                                            $  (1.15)       $   (0.22)



Note 9. Intangible Assets

         Intangible assets are recorded at cost, less accumulated  amortization.
Intangible assets as of March 31, 2003 consist of (in thousands):

                                       Gross                            Net
                                      Carrying        Accumulated    Intangible
                                       Amount        Amortization      Assets
                                       ------        ------------      ------
Technology                             $2,709          $1,200          $1,509
Other                                     250             133             117
                                       ------          ------          ------
Total                                  $2,959          $1,333          $1,626
                                       ======          ======          ======

Amortization expense for the three-months ended March 31, 2003 was $122,000. The
estimated  future  amortization  expense as of March 31,  2003 is as follows (in
thousands):

              Fiscal Years
              2003 (remaining nine months)                         $   304
              2004                                                     397
              2005                                                     285
              2006                                                     256
              2007                                                     256
              Thereafter                                               128
                                                                   -------
              Total amortization                                   $ 1,626
                                                                   =======

                                       8


ITEM 2. MANAGEMENT'S  DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

         This  report  including  the  following  Management's   Discussion  and
Analysis   of   Financial   Condition   and  Results  of   Operations   contains
forward-looking  statements  within the meaning of Section 27A of the Securities
Act of 1933,  and  Section  21E of the  Securities  Exchange  Act of 1934.  Such
forward-looking  statements are based upon current expectations and beliefs that
involve risks and uncertainties,  such as our plans,  objectives and intentions,
regarding,  among other things:  (i) customer demand for Nanometrics'  products,
which may be  affected  by several  factors  including  the  cyclicality  of the
semiconductor,  magnetic recording head and flat panel display industries served
by  Nanometrics,  patterns of capital  spending by its customers,  technological
changes in the  markets  served by  Nanometrics  and its  customers,  and market
acceptance of products of both  Nanometrics and its customers;  (ii) the timing,
cancellation  or delay of  Nanometrics'  customer  orders and  shipments;  (iii)
competition,  including  competitive  pressures on product prices and changes in
pricing by  Nanometrics'  customers or suppliers;  (iv)  fluctuations in foreign
currency  exchange rates,  particularly  the Japanese yen; (v) the proportion of
sales   Nanometrics  makes  directly  to  its  customers  versus  sales  through
distributors  and  representatives;  (vi) market  acceptance of new and enhanced
versions of Nanometrics' products; (vii) the timing of new product announcements
and  releases of products  by  Nanometrics  or its  competitors,  including  our
ability to design,  introduce and  manufacture new products on a timely and cost
effective  basis;  (viii) the size and  timing of  acquisitions  of  businesses,
products  or  technologies  and  fluctuations  in the  availability  and cost of
components and subassemblies of Nanometrics' products.

         In some cases,  forward-looking  statements  can be identified by words
such as "believe," "expect,"  "anticipate,"  "plan," "potential,"  "continue" or
similar  expressions.  Forward-looking  statements  also include the assumptions
underlying or relating to any of the foregoing  statements.  Our actual  results
could  differ  materially  from  those  anticipated  in  these   forward-looking
statements  as a result of certain risk  factors,  including  those set forth in
"Management's  Discussion  and  Analysis of Financial  Condition  and Results of
Operations - Factors That May Affect Future  Operating  Results" in Nanometrics'
2002 Annual Report on Form 10-K. We believe that it is important to  communicate
our  expectations to our investors.  However,  there may be events in the future
that we are not able to predict accurately or over which we have no control. You
should be aware that the occurrence of the events described in such risk factors
and elsewhere in this report could materially and adversely affect our business,
operating results and financial condition.

         All  forward-looking  statements  included  in this report are based on
information  available to us on the date hereof.  We undertake no  obligation to
update  forward-looking  statements  made in this  report to  reflect  events or
circumstances  after the date of this  report or to update  reasons  why  actual
results could differ from those anticipated in such forward-looking statements.

         Nanometrics  is a leader  in the  design,  manufacture,  marketing  and
support of thin film metrology systems for the semiconductor, flat panel display
and magnetic  recording head industries.  Our systems  precisely  measure a wide
range of film types  deposited on substrates  during  manufacturing  in order to
control manufacturing processes and increase production yields.

Critical Accounting Policies

         Income Tax Assets and  Liabilities  - We account for income taxes based
on Statement of Financial  Accounting  Standards  (SFAS) No. 109  Accounting for
Income Taxes,  whereby  deferred tax assets and  liabilities  must be recognized
using enacted tax rates for the effect of temporary differences between the book
and tax accounting for assets and liabilities. Also, deferred tax assets must be
reduced by a valuation allowance if it is more likely than not that a portion of
the  deferred  tax asset will not be  realized in the  future.  We evaluate  the
deferred tax assets on a

                                       9


quarterly  basis  to  determine   whether  or  not  a  valuation   allowance  is
appropriate.  Factors used in this determination  include future expected income
and the  underlying  asset  or  liability  which  generated  the  temporary  tax
difference.

         Our income tax provision is based on estimates of our effective  income
tax rate for the year.  The effective tax rate is generally  estimated  based on
the geographic  distribution of profits,  the tax rates in different regions and
the availability of tax credits. If actual results differ from our estimates, it
may be  necessary  to record a valuation  allowance on deferred tax assets or to
adjust  our  effective  tax rate,  which  could  have a  material  effect on our
financial results.

Results of Operations

         Total net revenues for the first  quarter of 2003 were  $9,350,000,  an
increase of  $1,325,000  or 17% from the same quarter in 2002.  Product sales of
$7,435,000 for the first quarter of 2003,  increased  $574,000 or 8% compared to
the same period in 2002. Sales of automated and integrated  systems increased in
the first quarter of 2003 from their first quarter 2002 levels.  The increase in
product sales resulted from stronger  demand for  semiconductor  process control
metrology  equipment,  particularly in the U.S. and the Far East. This increased
demand is driven in part by the  semiconductor  industry's  continued shift from
the  manufacture  of 200  millimeter  wafers  to 300  millimeter  wafers,  which
requires  new products  that can handle the larger  wafers.  Service  revenue of
$1,915,000  increased  $751,000 or 65% in the first  quarter of 2003 compared to
the same period in 2002  primarily  due to higher sales of parts and services in
the U.S and the Far  East  resulting  in part  from a larger  installed  base of
systems that have passed their warranty periods.

         Cost of product sales as a percentage of product sales increased to 49%
in the first  quarter  of 2003 from 41% in the first  quarter  of 2002 due to an
increase in  manufacturing  capacity  added to our U.S.  facility  in 2002.  The
increased  manufacturing capacity is part of a strategic move to internalize the
production of key parts and components, allowing us to have greater control over
their development,  delivery,  quality and cost. Cost of service as a percentage
of service  revenue  decreased to 98% in the first  quarter of 2003 from 108% in
the first  quarter of 2002  primarily  as a result of higher  service  revenues,
which exceeded our costs of service.

         Research  and  development  expenses  for  the  first  quarter  of 2003
decreased  $13,000 or 0.4%  compared  to the same  period in 2002 as the company
continued  to  invest  in the  development  of new and  enhanced  products  in a
selective manner.

         Selling expenses for the first quarter of 2003 increased by $664,000 or
30%  compared  to the same  period in 2002  primarily  due to  higher  headcount
levels,  higher  commissions and other expenses incurred promoting our products,
in particular various new products, to existing and potential customers.

         General  and  administrative  expenses  for the first  quarter  of 2003
increased by $268,000 or 29% compared to the same period in 2002  primarily as a
result of higher regulatory compliance and patent related costs.

         Total  other  income,  net  increased  $22,000  or 43% during the first
quarter of 2003  compared  to the same period in 2002 due  primarily  to smaller
currency  fluctuations  offset  by lower  interest  income  as a result of lower
interest rates and lower cash and short-term investments balances.

         A provision  for income taxes of  $6,020,000  was recorded in the first
quarter  of 2003,  which  primarily  represents  a charge to record a  valuation
allowance against deferred income tax assets. This charge was taken primarily as
a result of pretax losses incurred over the past several  quarters  coupled with
uncertainty  about future  expected  income in the current  market  environment,
making it not more likely than not that the deferred tax asset will be realized.

         As a result of the factors  discussed  above,  our loss from operations
was $3,637,000 and our net loss was $9,584,000 or $0.80 per diluted share in the
first quarter of 2003 compared to a loss from operations of $2,547,000 and a net
loss of $1,547,000 or $0.13 per diluted share in the first quarter of 2002.

                                       10


Liquidity and Capital Resources

         At  March  31,  2003,  our  cash,   cash   equivalents  and  short-term
investments  totaled  $32,725,000.   Our  short-term  investments  are  invested
primarily in U.S.  Treasury  Bills. At March 31, 2003, we had working capital of
$65,601,000  compared to  $74,776,000 at December 31, 2002. The current ratio at
March 31,  2003 was 10.4 to 1. We believe  that our working  capital,  including
cash, cash equivalents and short-term investments will be sufficient to meet our
needs at least through the next twelve months.

         Operating  activities  for the first three  months of 2003 used cash of
$4,023,000  primarily from the net loss and higher  accounts  receivable,  which
resulted from increases in days  outstanding.  These uses of cash were offset to
some extent by lower inventory  levels as we continued to limit our purchases of
inventory  during the quarter in an effort to reduce our use of cash.  Investing
activities provided $2,938,000 primarily due to sales of short-term  investments
of $29,000,000  offset to some extent by purchases of short-term  investments of
$26,007,000 and capital  expenditures of $55,000 used to continue to internalize
our  manufacturing  capacity  in the  U.S.  Financing  activities  used  $37,000
primarily due to repayment of debt obligations in Japan.

         We have  evaluated  and will  continue to evaluate the  acquisition  of
products,  technologies  or businesses that are  complementary  to our business.
These  activities  may result in product  and  business  investments,  which may
affect our cash position and working capital balances.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

         We are exposed to financial  market  risks,  which  include  changes in
foreign  currency  exchange rates and interest  rates.  We do not use derivative
financial  instruments.  Instead,  we  actively  manage the  balances of current
assets and liabilities  denominated in foreign  currencies to minimize  currency
fluctuation risk. As a result, a hypothetical 10% change in the foreign currency
exchange  rates at March 31,  2003 would not have had a  material  impact on our
results of operations.  Our investments in marketable  securities are subject to
interest  rate  risk but due to the  short-term  nature  of  these  investments,
interest  rate  changes  would not have had a material  impact on their value at
March 31, 2003.  We also have fixed rate yen  denominated  debt  obligations  in
Japan  that have no  interest  rate  risk.  At March 31,  2003,  our total  debt
obligation was $3,870,000 with a long-term portion of $2,936,000. A hypothetical
10%  change in  interest  rates at March 31,  2003 would not have had a material
impact on our results of operations.

ITEM 4. CONTROLS AND PROCEDURES

         We maintain  disclosure  controls and  procedures  that are designed to
ensure that  information  required to be disclosed in the periodic reports filed
by us  with  the  Securities  and  Exchange  Commission  (the  "Commission")  is
recorded,  processed,  summarized and reported within the time periods specified
in  the  rules  and  forms  of the  Commission  and  that  such  information  is
accumulated and communicated to our management.  In designing and evaluating the
disclosure controls and procedures,  our management recognized that any controls
and  procedures,  no matter how well  designed  and  operated,  can provide only
reasonable  assurance of achieving the desired control objectives and management
necessarily  was required to apply its judgment in evaluating  the  cost-benefit
relationship of possible controls and procedures.

         Based on their most recent  evaluation,  which was completed  within 90
days of the filing of this Quarterly  Report on Form 10-Q,  our Chief  Executive
Officer and Chief  Financial  Officer  believe that our disclosure  controls and
procedures (as defined in Rules 13a-14 and 15d-14 of the Securities Exchange Act
of 1934, as amended) are effective.  There were not any  significant  changes in
internal  controls or in other  factors  that could  significantly  affect these
internal controls subsequent to the date of their most recent evaluation.

                                       11


                            NANOMETRICS INCORPORATED
                                     PART II

                                OTHER INFORMATION


ITEM 1.       Legal Proceedings

    Not applicable.


ITEM 2.       Changes in Securities and Use of Proceeds

    Not applicable.


ITEM 3.       Defaults Upon Senior Securities

    Not applicable.


ITEM 4.       Submission of Matters to a Vote of Security Holders

    Not applicable.


ITEM 5.       Other Information

In  compliance  with Section 202 of the  Sarbanes-Oxley  Act of 2002,  the Audit
Committee  of the  Board  of  Directors  of  Nanometrics,  has  preapproved  the
continuing provision of certain non-audit services of Deloitte & Touche LLP, our
independent auditor. Such services include tax and tax-related services.


ITEM 6.       Exhibits and Reports on Form 8-K

A. Exhibits.

         Exhibit  99.1  Certification  of  Chief  Executive  Officer  and  Chief
         Financial Officer

B. Reports on Form 8-K.

         None.


                                       12



                            NANOMETRICS INCORPORATED

                                   SIGNATURES


         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  Registrant  has duly  caused  this report to be signed on its behalf by the
undersigned thereunto duly authorized.

NANOMETRICS INCORPORATED
(Registrant)



/s/ Vincent J. Coates
- -----------------------------
Vincent J. Coates
Chairman of the Board


/s/ John Heaton
- -----------------------------
John Heaton
Chief Executive Officer


/s/ Paul B. Nolan
- -----------------------------
Paul B. Nolan
Chief Financial Officer


Dated:  May 13, 2003


                                       13



I, John D. Heaton, certify that:

         1.       I  have  reviewed  this  quarterly  report  on  Form  10-Q  of
                  Nanometrics Incorporated;

         2.       Based on my knowledge,  this quarterly report does not contain
                  any untrue  statement  of a  material  fact or omit to state a
                  material fact necessary to make the statements  made, in light
                  of the  circumstances  under which such  statements were made,
                  not  misleading  with  respect to the  period  covered by this
                  quarterly report;

         3.       Based on my  knowledge,  the financial  statements,  and other
                  financial  information  included  in  this  quarterly  report,
                  fairly   present  in  all  material   respects  the  financial
                  condition,  results  of  operations  and  cash  flows  of  the
                  registrant  as of,  and for,  the  periods  presented  in this
                  quarterly report;

         4.       The  registrant's   other   certifying   officers  and  I  are
                  responsible  for  establishing   and  maintaining   disclosure
                  controls  and  procedures  (as defined in  Exchange  Act Rules
                  13a-14 and 15d-14) for the registrant and have:

                  (a)      designed such  disclosure  controls and procedures to
                           ensure  that  material  information  relating  to the
                           registrant,  including its consolidated subsidiaries,
                           is made known to us by others within those  entities,
                           particularly   during   the   period  in  which  this
                           quarterly report is being prepared;

                  (b)      evaluated  the   effectiveness  of  the  registrant's
                           disclosure  controls  and  procedures  as  of a  date
                           within  90  days  prior  to the  filing  date of this
                           quarterly report (the "Evaluation Date"); and

                  (c)      presented in this  quarterly  report our  conclusions
                           about the  effectiveness  of the disclosure  controls
                           and  procedures  based  on our  evaluation  as of the
                           Evaluation Date;

         5.       The  registrant's   other  certifying   officers  and  I  have
                  disclosed,  based  on  our  most  recent  evaluation,  to  the
                  registrant's  auditors and the audit committee of registrant's
                  board of  directors  (or  persons  performing  the  equivalent
                  function):

                  (a)      all   significant   deficiencies  in  the  design  or
                           operation of internal  controls which could adversely
                           affect the registrant's  ability to record,  process,
                           summarize   and  report   financial   data  and  have
                           identified for the registrant's auditors any material
                           weaknesses in internal controls; and

                  (b)      any fraud,  whether or not  material,  that  involves
                           management or other  employees who have a significant
                           role in the registrant 's internal controls; and

         6.       The  registrant's   other  certifying   officers  and  I  have
                  indicated in this  quarterly  report whether or not there were
                  significant  changes in internal  controls or in other factors
                  that could  significantly  affect internal controls subsequent
                  to the  date of our  most  recent  evaluation,  including  any
                  corrective actions with regard to significant deficiencies and
                  material weaknesses.


Date:  May 13, 2003               By:      /s/ John D. Heaton
                                     --------------------------------------
                                  Name:    John D. Heaton
                                  Title:   Chief Executive Officer



                                       14


I, Paul B. Nolan, certify that:

         1.       I  have  reviewed  this  quarterly  report  on  Form  10-Q  of
                  Nanometrics Incorporated;

         2.       Based on my knowledge,  this quarterly report does not contain
                  any untrue  statement  of a  material  fact or omit to state a
                  material fact necessary to make the statements  made, in light
                  of the  circumstances  under which such  statements were made,
                  not  misleading  with  respect to the  period  covered by this
                  quarterly report;

         3.       Based on my  knowledge,  the financial  statements,  and other
                  financial  information  included  in  this  quarterly  report,
                  fairly   present  in  all  material   respects  the  financial
                  condition,  results  of  operations  and  cash  flows  of  the
                  registrant  as of,  and for,  the  periods  presented  in this
                  quarterly report;

         4.       The  registrant's   other   certifying   officers  and  I  are
                  responsible  for  establishing   and  maintaining   disclosure
                  controls  and  procedures  (as defined in  Exchange  Act Rules
                  13a-14 and 15d-14) for the registrant and have:

                  (a)      designed such  disclosure  controls and procedures to
                           ensure  that  material  information  relating  to the
                           registrant,  including its consolidated subsidiaries,
                           is made known to us by others within those  entities,
                           particularly   during   the   period  in  which  this
                           quarterly report is being prepared;

                  (b)      evaluated  the   effectiveness  of  the  registrant's
                           disclosure  controls  and  procedures  as  of a  date
                           within  90  days  prior  to the  filing  date of this
                           quarterly report (the "Evaluation Date"); and

                  (c)      presented in this  quarterly  report our  conclusions
                           about the  effectiveness  of the disclosure  controls
                           and  procedures  based  on our  evaluation  as of the
                           Evaluation Date;

         5.       The  registrant's   other  certifying   officers  and  I  have
                  disclosed,  based  on  our  most  recent  evaluation,  to  the
                  registrant's  auditors and the audit committee of registrant's
                  board of  directors  (or  persons  performing  the  equivalent
                  function):

                  (a)      all   significant   deficiencies  in  the  design  or
                           operation of internal  controls which could adversely
                           affect the registrant's  ability to record,  process,
                           summarize   and  report   financial   data  and  have
                           identified for the registrant's auditors any material
                           weaknesses in internal controls; and

                  (b)      any fraud,  whether or not  material,  that  involves
                           management or other  employees who have a significant
                           role in the registrant 's internal controls; and

         6.       The  registrant's   other  certifying   officers  and  I  have
                  indicated in this  quarterly  report whether or not there were
                  significant  changes in internal  controls or in other factors
                  that could  significantly  affect internal controls subsequent
                  to the  date of our  most  recent  evaluation,  including  any
                  corrective actions with regard to significant deficiencies and
                  material weaknesses.


Date:  May 13, 2003                  By: /s/ Paul B. Nolan
                                        ------------------------------
                                     Name:    Paul B. Nolan
                                     Title:   Chief Financial Officer


                                       15