NANOMETRICS INCORPORATED

                        2003 EMPLOYEE STOCK PURCHASE PLAN

         The following  constitute  the  provisions  of the 2003 Employee  Stock
Purchase Plan of Nanometrics Incorporated.

         1.  Purpose.  The  purpose of the Plan is to provide  employees  of the
Company and its Designated  Subsidiaries  with an opportunity to purchase Common
Stock of the Company through accumulated payroll deductions. It is the intention
of the Company to have the Plan qualify as an  "Employee  Stock  Purchase  Plan"
under  Section  423 of the  Internal  Revenue  Code of  1986,  as  amended.  The
provisions  of the Plan,  accordingly,  shall be  construed  so as to extend and
limit  participation in a uniform and  nondiscriminatory  manner consistent with
the requirements of that section of the Code.

         2. Definitions.

                  (a)  "Administrator"  shall  mean the  Board or any  Committee
designated by the Board to administer the plan pursuant to Section 14.

                  (b) "Board" shall mean the Board of Directors of the Company.

                  (c) "Change of Control"  shall mean the  occurrence  of any of
the following events:

                           (i) Any  "person"  (as such term is used in  Sections
13(d) and 14(d) of the Exchange Act) becomes the "beneficial  owner" (as defined
in Rule 13d-3 of the Exchange Act), directly or indirectly, of securities of the
Company  representing  fifty  percent  (50%) or more of the total  voting  power
represented by the Company's then outstanding voting securities; or

                           (ii) The  consummation  of the sale or disposition by
the Company of all or substantially all of the Company's assets; or

                           (iii) The  consummation of a merger or  consolidation
of the Company, with any other corporation, other than a merger or consolidation
which  would  result  in  the  voting  securities  of  the  Company  outstanding
immediately   prior  thereto   continuing  to  represent  (either  by  remaining
outstanding or by being converted into voting securities of the surviving entity
or its  parent)  at  least  fifty  percent  (50%)  of  the  total  voting  power
represented by the voting securities of the Company, or such surviving entity or
its parent outstanding immediately after such merger or consolidation.

                           (iv) A change in the  composition of the Board,  as a
result of which fewer than a majority of the Directors are Incumbent  Directors.
"Incumbent  Directors"  shall mean Directors who either (A) are Directors of the
Company, as applicable,  as of the date hereof, or (B) are elected, or nominated
for election,  to the Board with the affirmative votes of at least a majority of
those  Directors  whose  election or nomination  was not in connection  with any
transaction described




in subsections  (i), (ii) or (iii) or in connection with an actual or threatened
proxy contest relating to the election of Directors of the Company.

                  (d) "Code"  shall mean the Internal  Revenue Code of 1986,  as
amended.

                  (e) "Common Stock" shall mean the Common Stock of the Company.

                  (f)  "Committee"  means a committee of the Board  appointed by
the Board in accordance with Section 14 hereof.

                  (g)  "Company"   shall  mean   Nanometrics   Incorporated,   a
California corporation.

                  (h)  "Compensation"  shall mean all base  straight  time gross
earnings,   exclusive  of  payments  for  overtime,  shift  premium,   incentive
compensation, incentive payments, bonuses, commissions and other compensation.

                  (i) "Designated Subsidiary" shall mean any Subsidiary that has
been designated by the Administrator from time to time in its sole discretion as
eligible to participate in the Plan.

                  (j) "Director" shall mean a member of the Board.

                  (k) "Eligible  Employee"  shall mean any  individual  who is a
common law employee of the Company or any Designated  Subsidiary whose customary
employment with the Company or any Designated Subsidiary is at least twenty (20)
hours per week and more than five (5) months in any calendar  year. For purposes
of the Plan, the employment  relationship  shall be treated as continuing intact
while the individual is on sick leave or other leave of absence  approved by the
Company. Where the period of leave exceeds ninety (90) days and the individual's
right to  reemployment is not guaranteed  either by statute or by contract,  the
employment  relationship  shall be deemed to have  terminated on the 91st day of
such leave.

                  (l)  "Enrollment  Date"  shall  mean  the  first  day of  each
Offering Period.

                  (m)  "Exercise  Date" shall mean the last day of each Offering
Period. The first Exercise Date under the Plan shall be the first Trading Day on
or after the last day of the Company's  fiscal  quarter ending in March or April
of 2004.

                  (n) "Fair Market Value" shall mean, as of any date,  the value
of Common Stock determined as follows:

                           (i) If the Common Stock is listed on any  established
stock exchange or a national  market system,  including  without  limitation the
Nasdaq National Market or The Nasdaq SmallCap Market of The Nasdaq Stock Market,
its Fair Market  Value  shall be the closing  sales price for such stock (or the
closing bid, if no sales were reported) as quoted on such exchange or system for
the last market  trading day on the date of such  determination,  as reported in
The Wall Street Journal or such other source as the Board deems reliable, or;

                           (ii) If the  Common  Stock is  regularly  quoted by a
recognized  securities  dealer but  selling  prices are not  reported,  its Fair
Market Value shall be the mean of the closing bid

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and asked  prices for the  Common  Stock on the date of such  determination,  as
reported  in The Wall  Street  Journal or such other  source as the Board  deems
reliable, or;

                           (iii) In the absence of an established market for the
Common Stock, the Fair Market Value thereof shall be determined in good faith by
the Board.

                  (o) "Offering Periods" shall mean the periods of approximately
six (6)  months  during  which an  option  granted  pursuant  to the Plan may be
exercised,  (i)  commencing on the first Trading Day on or after the last day of
the Company's first fiscal quarter, which typically ends in March, of each year,
and  terminating  on the  first  Trading  Day on or  after  the  last day of the
Company's third fiscal quarter, which typically ends in September, approximately
six months later,  and (ii)  commencing on the first Trading Day on or after the
last  day of the  Company's  third  fiscal  quarter,  which  typically  ends  in
September,  of each year,  and  terminating on the first Trading Day on or after
the last day of the Company's  first fiscal  quarter,  which  typically  ends in
March, of the following year, approximately six months later; provided, however,
that the first  Offering  Period  under the Plan shall  commence  with the first
Trading Day on or after the last day of the  Company's  third fiscal  quarter of
2003,  which ends in September or October of 2003,  and end on the first Trading
Day on or after the last day of the  Company's  first  fiscal  quarter  of 2004,
which  ends in March or April of 2004.  The  duration  and  timing  of  Offering
Periods may be changed pursuant to Section 4 of this Plan.

                  (p) Plan" shall mean this Employee Stock Purchase Plan.

                  (q) "Purchase  Price" shall mean an amount equal to 85% of the
Fair Market  Value of a share of Common Stock on the  Enrollment  Date or on the
Exercise Date, whichever is lower;  provided,  however,  that the Purchase Price
may be adjusted by the Administrator pursuant to Section 20.

                  (r)  "Subsidiary"  shall  mean  a  "subsidiary   corporation,"
whether now or hereafter existing, as defined in Section 424(f) of the Code.

                  (s)  "Trading  Day" shall mean a day on which  national  stock
exchanges and the Nasdaq System are open for trading.

         3. Eligibility.

                  (a)  Offering  Periods.  Any  Eligible  Employee  on  a  given
Enrollment Date shall be eligible to participate in the Plan.

                  (b)  Limitations.  Any  provisions of the Plan to the contrary
notwithstanding,  no Eligible Employee shall be granted an option under the Plan
(i) to the extent that,  immediately after the grant, such Eligible Employee (or
any other  person  whose stock would be  attributed  to such  Eligible  Employee
pursuant to Section  424(d) of the Code) would own capital  stock of the Company
and/or hold  outstanding  options to purchase such stock possessing five percent
(5%) or more of the total  combined  voting power or value of all classes of the
capital  stock of the Company or of any  Subsidiary,  or (ii) to the extent that
his or her rights to purchase  stock under all employee  stock purchase plans of
the Company and its  subsidiaries  accrues at a rate which  exceeds  twenty-five

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thousand dollars  ($25,000) worth of stock  (determined at the fair market value
of the shares at the time such  option is  granted)  for each  calendar  year in
which such option is outstanding at any time.

         4.  Offering  Periods.  The Plan shall be  implemented  by  consecutive
Offering Periods with a new Offering Period  commencing on the first Trading Day
on or after the last day of the Company's first fiscal quarter,  which typically
ends in March,  of each year, and the first Trading Day on or after the last day
of the Company's  third fiscal quarter,  which  typically ends in September,  of
each year, or on such other date as the Board shall  determine,  and  continuing
thereafter  until  terminated  in accordance  with Section 20 hereof;  provided,
however,  that the first Offering  Period under the Plan shall commence with the
first Trading Day on or after the last day of the Company's third fiscal quarter
of 2003,  which  ends in  September  or  October  of 2003,  and end on the first
Trading Day on or after the last day of the  Company's  first fiscal  quarter of
2004,  which ends in March or April of 2004.  The Board  shall have the power to
change the  duration of  Offering  Periods  (including  the  commencement  dates
thereof) with respect to future offerings without  shareholder  approval if such
change is  announced  prior to the  scheduled  beginning  of the first  Offering
Period to be affected thereafter.

         5. Participation.  An Eligible Employee may become a participant in the
Plan by completing a subscription agreement in the form of Exhibit A authorizing
payroll  deductions to this Plan and filing it with the Company's payroll office
prior to the applicable Enrollment Date.

         6. Payroll Deductions.

                  (a) At the time a  participant  files his or her  subscription
agreement, he or she shall elect to have payroll deductions made on each pay day
during the Offering Period in an amount not less than one percent (1.0%) and not
exceeding ten percent  (10.0%) of the  Compensation  which he or she receives on
each pay day during the Offering Period;  provided,  however,  that should a pay
day occur on an Exercise Date, a participant  shall have the payroll  deductions
made on such day applied to his or her account under the new Offering  Period. A
participant's  subscription  agreement  shall  remain in effect  for  successive
Offering Periods unless terminated as provided in Section 10 hereof.

                  (b) Payroll deductions for a participant shall commence on the
first payday  following the Enrollment  Date and shall end on the last payday in
the Offering  Period to which such  authorization  is applicable,  unless sooner
terminated by the participant as provided in Section 10 hereof.

                  (c) All payroll  deductions  made for a  participant  shall be
credited  to his or her  account  under the Plan and shall be  withheld in whole
percentages  only. A participant may not make any additional  payments into such
account.

                  (d) A participant may discontinue his or her  participation in
the Plan as provided in Section 10 hereof,  or may increase or decrease the rate
of his or her payroll  deductions  during the Offering  Period by  completing or
filing with the Company a new  subscription  agreement  authorizing  a change in
payroll  deduction rate. The  Administrator  may, in its  discretion,  limit the
nature and/or number of  participation  rate changes during any Offering Period.
The  change in rate  shall be  effective  with the  first  full  payroll  period
following  five  (5)  business  days  after  the  Company's

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receipt of the new subscription agreement unless the Company elects to process a
given change in participation more quickly.

                  (e) Notwithstanding the foregoing,  to the extent necessary to
comply  with  Section   423(b)(8)  of  the  Code  and  Section  3(b)  hereof,  a
participant's  payroll  deductions  may be decreased to zero percent (0%) at any
time during an Offering Period.  Payroll deductions shall recommence at the rate
provided in such  participant's  subscription  agreement at the beginning of the
first Offering Period which is scheduled to end in the following  calendar year,
unless terminated by the participant as provided in Section 10 hereof.

                  (f) At the time the option is exercised,  in whole or in part,
or at the time some or all of the  Company's  Common Stock issued under the Plan
is disposed of, the participant  must make adequate  provision for the Company's
federal, state, or other tax withholding  obligations,  if any, which arise upon
the exercise of the option or the  disposition of the Common Stock. At any time,
the Company may, but shall not be obligated to, withhold from the  participant's
compensation the amount necessary for the Company to meet applicable withholding
obligations, including any withholding required to make available to the Company
any tax  deductions or benefits  attributable  to sale or early  disposition  of
Common Stock by the Eligible Employee.

         7. Grant of Option.  On the  Enrollment  Date of each Offering  Period,
each Eligible Employee participating in such Offering Period shall be granted an
option  to  purchase  on the  Exercise  Date of  such  Offering  Period  (at the
applicable  Purchase  Price) up to a number of  shares of the  Company's  Common
Stock  determined  by  dividing  such  Eligible  Employee's  payroll  deductions
accumulated  prior to such  Exercise  Date  and  retained  in the  Participant's
account as of the Exercise Date by the applicable Purchase Price;  provided that
in no event shall an  Eligible  Employee be  permitted  to purchase  during each
Offering Period more than 5,000 shares of the Company's Common Stock (subject to
any adjustment  pursuant to Section 19), and provided further that such purchase
shall be subject to the  limitations  set forth in Sections  3(b) and 13 hereof.
The  Eligible  Employee  may  accept  the grant of such  option by  turning in a
completed and signed  subscription  agreement  (in the form  attached  hereto as
Exhibit A) to the Company on or prior to an Enrollment  Date. The  Administrator
may,  for  future  Offering  Periods,  increase  or  decrease,  in its  absolute
discretion,  the  maximum  number  of shares of the  Company's  Common  Stock an
Eligible Employee may purchase during an Offering Period. Exercise of the option
shall  occur as  provided  in  Section  8 hereof,  unless  the  participant  has
withdrawn pursuant to Section 10 hereof. The option shall expire on the last day
of the Offering Period.

         8. Exercise of Option.

                  (a) Unless a participant  withdraws  from the Plan as provided
in Section 10 hereof,  his or her  option for the  purchase  of shares  shall be
exercised  automatically  on the Exercise  Date,  and the maximum number of full
shares  subject  to  option  shall  be  purchased  for such  participant  at the
applicable  Purchase Price with the accumulated payroll deductions in his or her
account.  No  fractional  shares  shall be  purchased;  any  payroll  deductions
accumulated  in a  participant's  account which are not sufficient to purchase a
full share  shall be retained in the  participant's  account for the  subsequent
Offering Period, subject to earlier withdrawal by the participant as provided in
Section 10 hereof. Any other monies left over in a participant's account

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after  the  Exercise  Date  shall  be  returned  to the  participant.  During  a
participant's  lifetime,  a participant's option to purchase shares hereunder is
exercisable only by him or her.

                  (b) If the Administrator  determines that, on a given Exercise
Date, the number of shares with respect to which options are to be exercised may
exceed (i) the number of shares of Common  Stock  that were  available  for sale
under the Plan on the Enrollment Date of the applicable Offering Period, or (ii)
the number of shares  available for sale under the Plan on such  Exercise  Date,
the  Administrator may in its sole discretion (x) provide that the Company shall
make a pro rata  allocation of the shares of Common Stock available for purchase
on such Enrollment Date or Exercise Date, as applicable,  in as uniform a manner
as shall be practicable  and as it shall  determine in its sole discretion to be
equitable among all participants  exercising options to purchase Common Stock on
such  Exercise  Date,  or (y)  provide  that the  Company  shall make a pro rata
allocation  of the shares  available  for  purchase on such  Enrollment  Date or
Exercise Date, as applicable, in as uniform a manner as shall be practicable and
as it  shall  determine  in  its  sole  discretion  to be  equitable  among  all
participants  exercising options to purchase Common Stock on such Exercise Date.
The  Company  may  make pro  rata  allocation  of the  shares  available  on the
Enrollment  Date of any  applicable  Offering  Period  pursuant to the preceding
sentence,  notwithstanding  any  authorization of additional shares for issuance
under the Plan by the Company's shareholders subsequent to such Enrollment Date.

         9. Delivery. As promptly as reasonably  practicable after each Exercise
Date on which a  purchase  of shares  occurs,  the  Company  shall  arrange  the
delivery to each participant, as appropriate, the shares purchased upon exercise
of his or her option in determined by the Administrator.

         10. Withdrawal.

                  (a) A  participant  may withdraw all but not less than all the
payroll  deductions  credited to his or her account and not yet used to exercise
his or her  option  under the Plan at any time by giving  written  notice to the
Company in the form of Exhibit B to this Plan. All of the participant's  payroll
deductions  credited  to his or her  account  shall be paid to such  participant
promptly after receipt of notice of withdrawal and such participant's option for
the Offering Period shall be  automatically  terminated,  and no further payroll
deductions for the purchase of shares shall be made for such Offering Period. If
a participant  withdraws from an Offering Period,  payroll  deductions shall not
resume at the beginning of the succeeding Offering Period unless the participant
delivers to the Company a new subscription agreement.

                  (b) A  participant's  withdrawal from an Offering Period shall
not have any effect upon his or her  eligibility  to  participate in any similar
plan which may  hereafter  be adopted by the Company or in  succeeding  Offering
Periods which commence after the  termination of the Offering  Period from which
the participant withdraws.

         11.  Termination of Employment.  Upon a participant's  ceasing to be an
Eligible  Employee for any reason,  he or she shall be deemed to have elected to
withdraw from the Plan and the payroll deductions credited to such participant's
account during the Offering Period but not yet used to exercise the option shall
be  returned  to such  participant  or, in the case of his or her death,  to the
person  or  persons  entitled   thereto  under  Section  15  hereof,   and  such
participant's option shall be

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automatically terminated. The preceding sentence notwithstanding,  a participant
who receives  payment in lieu of notice of  termination  of employment  shall be
treated as continuing to be an Employee for the  participant's  customary number
of hours per week of employment  during the period in which the  participant  is
subject to such payment in lieu of notice.

         12. Interest.  No interest shall accrue on the payroll  deductions of a
participant in the Plan.

         13. Stock.

                  (a) Subject to adjustment  upon changes in  capitalization  of
the Company as provided  in Section 19 hereof,  the maximum  number of shares of
the Company's Common Stock which shall be made available for sale under the Plan
shall be 750,000 shares.

                  (b)  Until  the  shares  are  issued  (as   evidenced  by  the
appropriate  entry on the books of the Company or of a duly authorized  transfer
agent of the Company),  a participant shall only have the rights of an unsecured
creditor with respect to such shares,  and no right to vote or receive dividends
or any other rights as a shareholder shall exist with respect to such shares.

                  (c) Shares to be  delivered  to a  participant  under the Plan
shall  be  registered  in the  name  of the  participant  or in the  name of the
participant and his or her spouse.

         14.  Administration.  The  Administrator  shall administer the Plan and
shall have full and exclusive discretionary authority to construe, interpret and
apply the terms of the Plan,  to determine  eligibility  and to  adjudicate  all
disputed claims filed under the Plan. Every finding,  decision and determination
made by the  Administrator  shall, to the full extent permitted by law, be final
and binding upon all parties.

         15. Designation of Beneficiary.

                  (a)  A  participant  may  file  a  written  designation  of  a
beneficiary   who  is  to  receive  any  shares  and  cash,  if  any,  from  the
participant's  account under the Plan in the event of such  participant's  death
subsequent  to an Exercise  Date on which the option is  exercised  but prior to
delivery to such participant of such shares and cash. In addition, a participant
may file a written  designation of a beneficiary who is to receive any cash from
the  participant's  account  under the Plan in the  event of such  participant's
death  prior to  exercise of the  option.  If a  participant  is married and the
designated  beneficiary is not the spouse, spousal consent shall be required for
such designation to be effective.

                  (b) Such  designation  of  beneficiary  may be  changed by the
participant  at any time by  written  notice.  In the  event  of the  death of a
participant  and in the absence of a beneficiary  validly  designated  under the
Plan who is living at the time of such  participant's  death,  the Company shall
deliver such shares and/or cash to the executor or  administrator  of the estate
of the participant,  or if no such executor or administrator  has been appointed
(to the knowledge of the Company),  the Company, in its discretion,  may deliver
such  shares  and/or  cash to the  spouse  or to any one or more  dependents  or
relatives of the participant, or if no spouse, dependent or relative is known to
the Company, then to such other person as the Company may designate.

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                  (c) All  beneficiary  designations  shall be in such  form and
manner as the Administrator may designate from time to time.

         16.   Transferability.   Neither  payroll  deductions   credited  to  a
participant's account nor any rights with regard to the exercise of an option or
to  receive  shares  under the Plan may be  assigned,  transferred,  pledged  or
otherwise  disposed of in any way (other  than by will,  the laws of descent and
distribution or as provided in Section 15 hereof) by the  participant.  Any such
attempt at assignment,  transfer,  pledge or other  disposition shall be without
effect,  except  that the  Company may treat such act as an election to withdraw
funds from an Offering Period in accordance with Section 10 hereof.

         17.  Use of  Funds.  All  payroll  deductions  received  or held by the
Company under the Plan may be used by the Company for any corporate purpose, and
the Company shall not be obligated to segregate such payroll  deductions.  Until
shares are  issued,  participants  shall  only have the  rights of an  unsecured
creditor.

         18.  Reports.   Individual   accounts  shall  be  maintained  for  each
participant in the Plan.  Statements of account shall be given to  participating
Employees at least  annually,  which  statements  shall set forth the amounts of
payroll  deductions,  the Purchase Price, the number of shares purchased and the
remaining cash balance, if any.

         19.   Adjustments   Upon   Changes  in   Capitalization,   Dissolution,
Liquidation, Merger or Change of Control.

                  (a) Changes in Capitalization.  Subject to any required action
by the  shareholders  of the  Company,  the  maximum  number  of  shares  of the
Company's  Common Stock which shall be made  available  for sale under the Plan,
the maximum number of shares each  participant  may purchase per Offering Period
(pursuant to Section 7), as well as the price per share and the number of shares
of Common  Stock  covered by each  option  under the Plan which has not yet been
exercised shall be proportionately  adjusted for any increase or decrease in the
number of issued shares of Common Stock  resulting  from a stock split,  reverse
stock split,  stock  dividend,  combination  or  reclassification  of the Common
Stock,  or any other  change in the  number of shares of Common  Stock  effected
without  receipt  of  consideration  by the  Company;  provided,  however,  that
conversion of any  convertible  securities of the Company shall not be deemed to
have been "effected without receipt of consideration."  Such adjustment shall be
made by the Administrator,  whose  determination in that respect shall be final,
binding and conclusive.  Except as expressly provided herein, no issuance by the
Company of shares of stock of any class, or securities  convertible  into shares
of stock of any class,  shall affect,  and no adjustment by reason thereof shall
be made with respect to, the number or price of shares of Common  Stock  subject
to an option.

                  (b) Dissolution or  Liquidation.  In the event of the proposed
dissolution or liquidation of the Company,  the Offering Period then in progress
shall be shortened by setting a new Exercise Date (the "New Exercise Date"), and
shall  terminate   immediately  prior  to  the  consummation  of  such  proposed
dissolution or liquidation, unless provided otherwise by the Administrator.  The
New Exercise Date shall be before the date of the Company's proposed dissolution
or liquidation.  The Administrator  shall notify each participant in writing, at
least ten (10) business days prior to the New Exercise  Date,  that the Exercise
Date for the participant's  option has been changed to the New Exercise Date and
that the  participant's  option  shall  be  exercised

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automatically  on  the  New  Exercise  Date,  unless  prior  to  such  date  the
participant  has  withdrawn  from the Offering  Period as provided in Section 10
hereof.

                  (c) Merger or Change of  Control.  In the event of a merger or
Change of Control,  each  outstanding  option shall be assumed or an  equivalent
option substituted by the successor corporation or a Parent or Subsidiary of the
successor  corporation.  In the event that the successor  corporation refuses to
assume or substitute for the option,  the Offering Period then in progress shall
be shortened by setting a new Exercise Date (the "New Exercise  Date").  The New
Exercise  Date  shall be before  the date of the  Company's  proposed  merger or
Change of Control.  The Administrator  shall notify each participant in writing,
at least  ten  (10)  business  days  prior to the New  Exercise  Date,  that the
Exercise Date for the participant's  option has been changed to the New Exercise
Date and that the participant's  option shall be exercised  automatically on the
New Exercise Date,  unless prior to such date the participant has withdrawn from
the Offering Period as provided in Section 10 hereof.

         20. Amendment or Termination.

                  (a) The  Administrator  may at any  time  and  for any  reason
terminate or amend the Plan.  Except as otherwise  provided in the Plan, no such
termination  can affect options  previously  granted,  provided that an Offering
Period  may be  terminated  by the  Administrator  on any  Exercise  Date if the
Administrator determines that the termination of the Offering Period or the Plan
is in the best interests of the Company and its shareholders. Except as provided
in Section 19 and this Section 20 hereof,  no  amendment  may make any change in
any  option  theretofore  granted  which  adversely  affects  the  rights of any
participant.  To the extent necessary to comply with Section 423 of the Code (or
any successor rule or provision or any other applicable law, regulation or stock
exchange rule), the Company shall obtain  shareholder  approval in such a manner
and to such a degree as required.

                  (b) Without  shareholder consent and without regard to whether
any participant rights may be considered to have been "adversely  affected," the
Administrator  shall be  entitled  to change  the  Offering  Periods,  limit the
frequency  and/or  number of changes in the amount  withheld  during an Offering
Period,  establish  the  exchange  ratio  applicable  to amounts  withheld  in a
currency other than U.S.  dollars,  permit payroll  withholding in excess of the
amount  designated by a participant in order to adjust for delays or mistakes in
the Company's processing of properly completed withholding elections,  establish
reasonable  waiting and  adjustment  periods  and/or  accounting  and  crediting
procedures  to ensure that amounts  applied  toward the purchase of Common Stock
for  each  participant  properly  correspond  with  amounts  withheld  from  the
participant's  Compensation,  and establish such other limitations or procedures
as the  Administrator  determines  in its sole  discretion  advisable  which are
consistent with the Plan.

                  (c) In the event the Administrator determines that the ongoing
operation  of  the  Plan  may  result  in   unfavorable   financial   accounting
consequences,  the  Administrator  may,  in its  discretion  and,  to the extent
necessary or  desirable,  modify or amend the Plan to reduce or  eliminate  such
accounting consequence including, but not limited to:

                           (i)  increasing  the Purchase  Price for any Offering
Period  including  an  Offering  Period  underway  at the time of the  change in
Purchase Price;

                                      -9-


                           (ii)  shortening any Offering Period so that Offering
Period ends on a new Exercise Date, including an Offering Period underway at the
time of the Board action; and

                           (iii) allocating shares.

         Such modifications or amendments shall not require shareholder approval
or the consent of any Plan participants.

         21. Notices.  All notices or other  communications  by a participant to
the Company  under or in  connection  with the Plan shall be deemed to have been
duly given when received in the form and manner  specified by the Company at the
location, or by the person, designated by the Company for the receipt thereof.

         22. Conditions Upon Issuance of Shares. Shares shall not be issued with
respect to an option  unless the  exercise of such option and the  issuance  and
delivery of such  shares  pursuant  thereto  shall  comply  with all  applicable
provisions  of law,  domestic or foreign,  including,  without  limitation,  the
Securities  Act of 1933,  as amended,  the  Securities  Exchange Act of 1934, as
amended, the rules and regulations promulgated thereunder,  and the requirements
of any stock  exchange  upon which the  shares may then be listed,  and shall be
further  subject to the approval of counsel for the Company with respect to such
compliance.

         As a condition  to the  exercise of an option,  the Company may require
the person  exercising  such option to represent  and warrant at the time of any
such  exercise  that the  shares are being  purchased  only for  investment  and
without  any  present  intention  to sell or  distribute  such shares if, in the
opinion of counsel for the Company,  such a representation is required by any of
the aforementioned applicable provisions of law.

         23. Term of Plan.  The Plan shall become  effective upon the earlier to
occur  of its  adoption  by the  Board  of  Directors  or  its  approval  by the
shareholders of the Company.  It shall continue in effect until terminated under
Section 20 hereof.

                                      -10-


                                    EXHIBIT A

                            NANOMETRICS INCORPORATED

                        2003 EMPLOYEE STOCK PURCHASE PLAN

                             SUBSCRIPTION AGREEMENT


          Original Application                    Enrollment Date:
- ---------                                                          -------------

          Change in Payroll Deduction Rate
- ---------

          Change of Beneficiary(ies)
- ---------

1.   _____________________________________  hereby elects to  participate in the
     Nanometrics  Incorporated  2003 Employee Stock Purchase Plan (the "Employee
     Stock Purchase  Plan") and  subscribes to purchase  shares of the Company's
     Common  Stock  in  accordance  with  this  Subscription  Agreement  and the
     Employee Stock Purchase Plan.

2.   I hereby authorize  payroll  deductions from each paycheck in the amount of
     ____% of my Compensation on each payday (from 1 to 10%) during the Offering
     Period in accordance  with the Employee Stock  Purchase Plan.  (Please note
     that no fractional percentages are permitted.)

3.   I understand  that said payroll  deductions  shall be  accumulated  for the
     purchase  of  shares  of  Common  Stock at the  applicable  Purchase  Price
     determined  in  accordance   with  the  Employee  Stock  Purchase  Plan.  I
     understand  that  if I  do  not  withdraw  from  an  Offering  Period,  any
     accumulated  payroll  deductions will be used to automatically  exercise my
     option.

4.   I have  received a copy of the complete  Employee  Stock  Purchase  Plan. I
     understand that my  participation in the Employee Stock Purchase Plan is in
     all respects subject to the terms of the Plan. I understand that my ability
     to exercise  the option  under this  Subscription  Agreement  is subject to
     shareholder approval of the Employee Stock Purchase Plan.

5.   Shares  purchased for me under the Employee  Stock  Purchase Plan should be
     issued in the name(s) of (Eligible Employee or Eligible Employee and Spouse
     only): ______________________________.

6.   I understand that if I dispose of any shares received by me pursuant to the
     Plan  within 2 years  after  the  Enrollment  Date  (the  first  day of the
     Offering Period during which I purchased such shares) or one year after the
     Exercise  Date, I will be treated for federal income tax purposes as having
     received ordinary income at the time of such disposition in an amount equal
     to the  excess  of the fair  market  value of the  shares  at the time such
     shares were  purchased by me over the price which I paid for the shares.  I
     hereby agree to notify the Company in writing within 30 days after the date
     of any  disposition  of  shares  and I will  make  adequate  provision  for
     Federal,  state or other tax withholding  obligations,  if any, which arise
     upon the disposition of the Common Stock.  The Company may, but will not be
     obligated to,  withhold from my compensation  the amount  necessary to meet
     any applicable  withholding  obligation including any withholding necessary
     to  make   available  to  the  Company  any  tax   deductions  or  benefits
     attributable  to sale or early



     disposition  of Common Stock by me. If I dispose of such shares at any time
     after the expiration of the 2-year and 1-year holding periods, I understand
     that I will be treated for federal  income tax purposes as having  received
     income only at the time of such  disposition,  and that such income will be
     taxed as  ordinary  income  only to the  extent of an  amount  equal to the
     lesser of (1) the excess of the fair market value of the shares at the time
     of such disposition over the purchase price which I paid for the shares, or
     (2) 15% of the fair  market  value of the  shares  on the  first day of the
     Offering  Period.  The  remainder of the gain,  if any,  recognized on such
     disposition will be taxed as capital gain.

7.   I hereby  agree to be bound by the  terms of the  Employee  Stock  Purchase
     Plan. The effectiveness of this Subscription Agreement is dependent upon my
     eligibility to participate in the Employee Stock Purchase Plan.

8.   In  the  event  of  my  death,  I  hereby  designate  the  following  as my
     beneficiary(ies)  to  receive  all  payments  and  shares  due me under the
     Employee Stock Purchase Plan:



         NAME: (Please print)
                                 -----------------------------------------------
                                 (First)            (Middle)      (Last)

         ----------------------  -----------------------------------------------
         Relationship
                                 -----------------------------------------------
                                    (Address)

         Employee's Social
         Security Number:
                                 -----------------------------------------------


         Employee's Address:
                                 -----------------------------------------------

                                 -----------------------------------------------

                                      -2-


I UNDERSTAND THAT THIS SUBSCRIPTION  AGREEMENT SHALL REMAIN IN EFFECT THROUGHOUT
SUCCESSIVE OFFERING PERIODS UNLESS TERMINATED BY ME.


Dated:
      ------------------


                           -----------------------------------------------------
                           Signature of Employee


                           -----------------------------------------------------
                           Spouse's Signature (If beneficiary other than spouse)

                                      -3-


                                    EXHIBIT B

                            NANOMETRICS INCORPORATED

                        2003 EMPLOYEE STOCK PURCHASE PLAN

                              NOTICE OF WITHDRAWAL


         The  undersigned  participant in the Offering Period of the Nanometrics
Incorporated  2003  Employee  Stock  Purchase  Plan which began on  ___________,
______ (the "Enrollment Date") hereby notifies the Company that he or she hereby
withdraws from the Offering Period.  He or she hereby directs the Company to pay
to the  undersigned  as  promptly  as  practicable  all the  payroll  deductions
credited  to his or her  account  with  respect  to such  Offering  Period.  The
undersigned  understands  and agrees  that his or her  option for such  Offering
Period will be automatically  terminated.  The undersigned  understands  further
that no further  payroll  deductions  will be made for the purchase of shares in
the current Offering Period and the undersigned shall be eligible to participate
in  succeeding  Offering  Periods  only  by  delivering  to  the  Company  a new
Subscription Agreement.


                                 Name and Address of Participant:


                                 -----------------------------------------------

                                 -----------------------------------------------

                                 -----------------------------------------------



                                 Signature:


                                 -----------------------------------------------

                                 Date:
                                       -----------------------------------------