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                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                    FORM 10-K
(Mark One)

[X]      ANNUAL  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
         EXCHANGE ACT OF 1934

         For the fiscal year ended January 3, 2004

                                       OR

[_]      TRANSITION  REPORT  PURSUANT  TO SECTION 13 OR 15(d) OF THE  SECURITIES
         EXCHANGE ACT OF 1934

         For the transition period from _________________ to _________________

                         Commission file number: 0-13470

                            NANOMETRICS INCORPORATED
             (Exact name of registrant as specified in its charter)

           California                                          94-2276314
(State or other jurisdiction of                            (I.R.S. Employer
 incorporation or organization)                         Identification Number)

          1550 Buckeye Drive
          Milpitas, California                                  95035
(Address of principal executive offices)                      (Zip Code)

       Registrant's telephone number, including area code: (408) 435-9600

           Securities registered pursuant to Section 12(b) of the Act:
                                      None

           Securities registered pursuant to Section 12(g) of the Act:
                           Common Stock, no par value

Indicate by check mark whether the registrant (1) has filed all reports required
to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during
the  preceding 12 months (or for such  shorter  period that the  registrant  was
required  to file  such  reports),  and  (2) has  been  subject  to such  filing
requirements for the past 90 days.

Yes [X]   No [_]

Indicate by check mark if disclosure of delinquent  filers  pursuant to Item 405
of Regulation  S-K is not contained  herein,  and will not be contained,  to the
best  of  the  registrant's   knowledge,  in  definitive  proxy  or  information
statements  incorporated  by  reference  in Part  III of this  Form  10-K or any
amendment to this Form 10-K. [X]

Indicate  by check mark  whether  the  registrant  is an  accelerated  filer (as
defined in Rule 12b-2 of the Act).

Yes [_]   No [X]

As of June 30, 2003, the last business day of our most recently completed second
fiscal quarter, the aggregate market value of the Common Stock of the registrant
held by  non-affiliates  was approximately  $32,624,826.  Shares of voting stock
held by each  officer and director and by each person who owns 5% or more of the
outstanding  voting stock have been excluded  because such persons may be deemed
to be  "affiliates"  as that term is defined under the rules and  regulations of
the Securities Exchange Act of 1934, as amended. This determination of affiliate
status is not necessarily a conclusive determination for other purposes.

As of March 24, 2004,  12,199,611  shares of the registrant's  Common Stock were
outstanding.

                               -----------------

                       DOCUMENTS INCORPORATED BY REFERENCE

Certain  portions of the registrant's  definitive  proxy statement,  to be filed
with the  Securities and Exchange  Commission  pursuant to Regulation 14A of the
Securities  Exchange  Act of 1934 in  connection  with the  registrant's  annual
meeting  of  shareholders  to be held  on May  26,  2004,  are  incorporated  by
reference in Part III of this Form 10-K.

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                            NANOMETRICS INCORPORATED

                                    FORM 10-K

                           YEAR ENDED JANUARY 3, 2004

                                TABLE OF CONTENTS



                                                                                                         
                                                       PART I

ITEM 1.        BUSINESS.........................................................................................I-1

ITEM 2.        PROPERTIES......................................................................................I-16

ITEM 3.        LEGAL PROCEEDINGS...............................................................................I-17

ITEM 4.        SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.............................................I-17


                                                      PART II

ITEM 5.        MARKET FOR REGISTRANT'S COMMON EQUITY AND RELATED SHAREHOLDER MATTERS...........................II-1

ITEM 6.        SELECTED CONSOLIDATED FINANCIAL DATA............................................................II-2

ITEM 7.        MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS...........II-4

ITEM 7A.       QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK.....................................II-17

ITEM 8.        CONSOLIDATED FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA.......................................II-18

ITEM 9.        CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND FINANCIAL DISCLOSURE...........II-39

ITEM 9A.       CONTROLS AND PROCEDURES........................................................................II-39


                                                      PART III

ITEM 10.       DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT.............................................III-1

ITEM 11.       EXECUTIVE COMPENSATION.........................................................................III-1

ITEM 12.       SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT AND RELATED
                SHAREHOLDER MATTERS...........................................................................III-1

ITEM 13.       CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS.................................................III-1

ITEM 14.       PRINCIPAL ACCOUNTANT FEES AND SERVICES.........................................................III-1


                                                      PART IV

ITEM 15.       EXHIBITS, CONSOLIDATED FINANCIAL STATEMENT SCHEDULES, AND REPORTS ON FORM 8-K...................IV-1


                                      -ii-


Forward-Looking Statements

This Annual Report on Form 10-K contains forward-looking statements that involve
risks and uncertainties.  These forward-looking  statements include, but are not
limited to, statements regarding trends in demand in our industry, the increased
use of metrology in manufacturing, the drive toward integrated metrology and the
broadening  of our  technology  portfolio.  Words such as  "believe,"  "expect,"
"anticipate"  or  similar   expressions,   are  indicative  of   forward-looking
statements.

Our actual  results  may differ  materially  from the results  discussed  in the
forward-looking statements.  Factors that might cause such a difference include,
but are not limited to, those outlined in Item 7,  "Management's  Discussion and
Analysis of Financial Condition and Results of Operations--Risks  Related to Our
Business," below. The forward-looking statements contained herein are made as of
the date  hereof,  and we assume no  obligation  to update such  forward-looking
statements or to update  reasons  actual  results could differ  materially  from
those anticipated in such forward-looking statements.

Trademarks

We have  registered the following  trademarks with the U.S. Patent and Trademark
Office:  Nanometrics(R),   NanoSpec(R),  Integrated  Metrology(R),   NanoOCD(R),
Metra(R), NanoNet(R), OCD(R) and others. Additionally, we use a variety of other
trademarks and trade names such as Atlas,  NanoCLP and the Nanometrics logo. All
other brand names, trade names and trademarks  mentioned herein are the property
of their respective holders.



                                     PART I

ITEM 1. BUSINESS

Overview

We are a leader in the design,  manufacture,  and marketing of  high-performance
process    control    metrology    systems   used   in   the    manufacture   of
semiconductors/integrated  circuits  and  flat  panel  displays.  Our  metrology
systems (i) measure various thin film properties,  critical  circuit  dimensions
and  layer-to-layer  circuit  alignment  (overlay)  and (ii) inspect for surface
defects   during   various  steps  of  the   manufacturing   process,   enabling
semiconductor and integrated circuit  manufacturers to improve yields,  increase
productivity  and lower their  manufacturing  costs.  The relative  alignment of
sequentially patterned thin film layers is critical to device production.

We believe  that  process  control  metrology  is growing at a greater rate than
other segments of the process equipment  market.  As films become thinner,  film
materials  more exotic,  and circuit  dimensions and overlay  requirements  more
demanding,  metrology  continues  to grow in  importance,  especially  as wafers
become larger and more  expensive to  manufacture.  We expect these factors will
drive the demand for our high-end, standalone metrology products.

Additional  demands on process tool  manufacturers  for better film  uniformity,
tighter  dimensional  control,  tool-to-tool  matching and  within-tool  chamber
uniformity is driving the need for integrated process control  metrology.  These
new tool  requirements will drive the need to place metrology inside the process
tool for  real-time,  integrated,  process  control  metrology,  using both feed
forward and  feedback  of the  collected  metrology  data to control the process
equipment.

We have made several  strategic  changes in our  business  model to enable us to
further address these metrology trends. These changes include:

o        The  formation  of  three  separate  departmentalized  groups  to focus
         specifically on our standalone, integrated and flat panel display (FPD)
         metrology markets.

o        An emphasis on becoming the leading supplier of metrology  systems that
         are  integrated   into  various  types  of   semiconductor   processing
         equipment;

o        The  development  of new 300  millimeter  wafer  platforms for advanced
         standalone and integrated metrology;

o        The  outsourcing  of  certain  system  components,  such  as  robotics,
         enabling us to leverage our technical resources;

o        The  implementation  of an  in-house  manufacturing  strategy  for  our
         products; and

o        The   development  of  new   measurement   technologies   for  advanced
         lithography and film deposition.

Demand for our products is driven by the  increasing  use of multiple  thin film
technology by  manufacturers of electronic  products and, more recently,  by the
increased  adoption of both  integrated  metrology and advanced  process control
(APC) by  semiconductor  manufacturers.  With feature sizes  shrinking below 100
nanometers,  well below the wavelength of light, the need for very tight process
tolerances as well as productivity improvements in semiconductor fabrication, or
fabs,  are driving the need for  integrated  metrology  and APC. Our  innovative
Optical Critical Dimension  ("OCD(R)")  measurement system is being increasingly
viewed not only as an enabling  technology  for APC,  but also as a solution for
critical dimension measurement.

We recently combined our deep ultraviolet ("DUV") reflectometry  technology with
the OCD technology in a single,  integrated  metrology  module,  the NanoOCD/DUV
9010.  The  compact  size and speed of this new OCD/DUV  technology  enables the
measurement system to be fully integrated into the customer's process tool, thus
providing a complete,  feed forward and feedback APC solution for wafer-to-wafer
closed  loop  control.   By  measuring  the  critical  dimensions  of  developed
photoresist  and  then  adjusting  the  final  etched  dimensions  of a  silicon
gate-etch process by

                                      I-1


feeding this  information  back into the process and  trimming  the resist,  the
device  manufacturer  is able to achieve  the  maximum  possible  microprocessor
speed.  In addition,  new  semiconductor  process  technologies,  such as copper
interconnects,  require that new measurement  technologies be developed in order
to keep pace with the latest metrology  demands.  Our new,  combined  integrated
metrology  module  represents a unique  solution to the problem of measuring the
remaining  oxide film  thickness as well as the loss of material  over arrays of
copper lines during the chemical mechanical planarization ("CMP") process.

Our OCD technology has also proven to be applicable to the emerging requirements
for advanced  lithography  measurements such as the characterization of critical
dimensions  and film  thicknesses  on masks and reticles  which are comprised of
square glass  substrates.  We introduced the NanoOCD 9010M, the first integrated
metrology system for these square glass substrates.

Our integrated  Copper Laser Profiler (CLP) also represents a unique approach to
the problem of determining the amount of copper material  removed during the CMP
process.  The very small  footprint and high  throughput of our CLP systems were
achieved  with  several new  enabling  technologies  for  integrated  metrology,
including an edge-gripping  wafer handling stage with integral  pre-aligner.  We
developed  the  enabling  technologies  to meet the  needs of our  customers.  A
version  of our  edge-gripping  wafer  handling  stage  was also  developed  for
operation within a process tool's vacuum chamber, eliminating the need to expose
the  wafer's  sensitive  films to ambient  air.  This  innovation  improves  the
throughput  of the tool during  measurement  and  eliminates  the  potential for
damage due to  excessive  wafer  handling  and  exposure  to outside  sources of
contamination.

We successfully  beta tested the new Universal Defect Inspection (UDI) system at
an  integrated  device   manufacturer  (IDM).  The  NanoUDI  technology  can  be
configured as either a standalone,  fully automated  300-millimeter system or an
integrated  module for defect and  contamination  detection on a wide variety of
films and  surfaces.  The  system  combines  high  efficiency  illumination  and
high-resolution  optics  with  sophisticated  image  processing  to  detect  and
classify particles and defects in the sub-micron range.

Many  types of thin  films  are used in the  manufacture  of  products,  such as
semiconductor  integrated  circuits  and flat  panel  displays.  These  products
require the precise  electronic,  optical and surface properties enabled by thin
film  metrology.  The growth in the sale and use of these  products and the need
for tighter  process  control and improved  productivity  has created  increased
demand for our advanced standalone and integrated metrology systems.

We offer a complete line of systems to address the metrology requirements of our
customers.  Each of our systems is equipped with computerized mapping capability
for measurement,  visualization  and control of film uniformity,  layer-to-layer
circuit  alignment  and  critical  dimensions.  Our  metrology  systems  can  be
categorized as follows:

o        Stand-alone,  fully  automated  systems for  high-volume  manufacturing
         operations;

o        Integrated  systems  for  integration  into  semiconductor   processing
         equipment that provide  real-time  measurements and feedback to improve
         process control and increase throughput; and

o        Tabletop systems used to provide manual or semi-automatic  measurements
         for engineering and low-volume production environments.

We also  provide  systems  that are used to  measure  the  overlay  accuracy  of
successive  layers of semiconductor  patterns on wafers in the  photolithography
process. The accurate alignment, or overlay, of successive film layers, relative
to each other, across the wafer is critical for device performance and favorable
production yields.

We have been a pioneer  and  innovator  in the field of  metrology  for over two
decades. We have been selling metrology systems since 1977 and have an extensive
installed base with industry  leading  customers  worldwide,  including  Applied
Materials Inc.,  Samsung,  Hynix  Semiconductor  Inc.,  IBM, Intel  Corporation,
Micron Technology, Inc., TSMC Ltd., Renesas, Chi Mei, AU Optronics and Hannstar.

                                      I-2


Industry Characteristics

Growth

Moore's Law which,  simply  stated,  predicts a doubling of  integrated  circuit
performance with a 50% reduction in manufacturing  costs every 18 months,  is an
important  factor  in  determining   factory  investment  in  the  semiconductor
industry.  Two important industry drivers are: (i) the increasing  complexity of
chip  designs  as  users  of  semiconductor  chips  demand  increasingly  higher
performance and require more  complicated  manufacturing  processes and (ii) the
market pressure for lower cost chips. The semiconductor  equipment  industry has
experienced   cyclical   growth  with  a  compounded   annual   growth  rate  of
approximately  15-17%  over  the  past 20  years.  Recently,  the  semiconductor
industry  experienced an exceptionally long,  cyclical downturn,  which began in
2000 and  continued  through  the  better  part of  2003.  We  believe  that the
convergence of 300-millimeter wafer size, copper interconnects and fast, sub-100
nanometer  architecture will drive the demand for new metrology solutions,  such
as those that we offer.

In the past, demand for Internet access, personal computers, telecommunications,
and new consumer  electronic  products  and  services  has fueled  growth of the
semiconductor,  data  storage  and flat panel  display  industries.  New display
technologies,   consumer  electronics,   automotive   electronics  and  personal
computers will likely  continue as the primary  drivers in the near-term for the
semiconductor  industry.  We believe that consumer  desire for high  performance
electronics   drives   technology   advancement  in  semiconductor   design  and
manufacturing  and,  in turn,  promotes  the  purchasing  of  capital  equipment
featuring the latest advances in technology.

The two significant  factors  affecting demand for our measurement  systems are:
(i) new construction or refurbishment  of  manufacturing  facilities,  which, in
turn, depends on the current and anticipated  market demand for  semiconductors,
disk drives,  flat panel displays,  and products that use such  components,  and
(ii) the increasing  complexity of the manufacturing  process as a result of the
demand for higher performance semiconductors and flat panel displays.

Semiconductor Manufacturing Process

Semiconductors  are fabricated by a series of process steps on a wafer substrate
made of silicon or other material.  Our thin film, critical  dimension,  overlay
metrology  and defect  inspection  systems can be used at many points during the
fabrication  process to monitor and measure circuit  dimensions,  layer-to-layer
registration  and film  uniformity  as well as material  properties  in order to
maximize  the yield of  acceptable  semiconductors.  Each wafer  typically  goes
through  a  series  of 100 to 500  process  and  metrology  steps  in  generally
repetitive cycles.

The four primary wafer film processing steps are:

o        Deposition;

o        Chemical Mechanical Planarization, known in our industry as CMP;

o        Photolithography imaging and overlay; and

o        Etching of circuit elements.

Deposition.  Deposition  refers to placing  layers of  insulating  or conducting
materials on a wafer surface in thin films that make up the circuit  elements of
semiconductor  devices.  Common  methods of deposition  include  chemical  vapor
deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD) and physical
vapor  deposition  (PVD).  Diffusion  and  oxidation  are also used to create or
define thin films.  The control of uniformity and thickness during the formation
of these films is critical to the performance of the semiconductor circuit.

Chemical Mechanical Planarization.  CMP flattens, or planarizes,  the topography
of the film  surface to permit the  multiple  patterns of small  features on the
resulting smoothed surface by the photolithography process. The CMP process is a
combination of chemical  etching and  mechanical  polishing and commonly uses an
abrasive liquid and polishing pad.  Semiconductor  manufacturers  need metrology
systems to control the CMP process by measuring the thin film layer to determine
precisely  when the  appropriate  thickness  has  been  correctly  polished  and
achieved.

                                      I-3


Photolithography.  Photolithography  is  the  process  step  that  projects  the
patterns of the circuits on the chip. A wafer is pre-coated with photoresist,  a
light sensitive  film,  that must have an accurate  thickness and uniformity for
exposure. Photolithography involves the optical projection of integrated circuit
patterns onto the photoresist after which, the photoresist is developed, leaving
unexposed  areas  available  for  etching.  In order to  precisely  control  the
photolithography   process,  it  is  necessary  to  verify  reflectivity,   film
thickness, critical dimensions and overlay registration.

Etch. Etch is a dry or wet process for selectively  removing unwanted areas that
have been deposited on the surface of a wafer.  A film of developed  photoresist
protects  material  that needs to be left  untouched  by the etch to make up the
circuits.  Thin film  metrology  systems  are  required to verify  precision  of
material removal and critical dimension achievement.

Before and after deposition,  CMP,  photolithography and etch, the wafer surface
is measured to determine the quality of the film or pattern and to find defects.
Measurements  taken to  ensure  process  uniformity  include  thickness,  width,
height, roughness and other characteristics.  Process control helps avoid costly
rework  or  misprocessing   and  results  in  higher  yields  for  semiconductor
manufacturers.

These  processing  steps  are  typically  repeated  multiple  times  during  the
fabrication process, with alternating layers of insulating and conducting films.
Depending on the specific  design of a given  integrated  circuit,  a variety of
film types and thicknesses and a number of layers can be used to achieve desired
electronic  performance  characteristics.  The  semiconductors  are then tested,
separated into  individual  circuits,  assembled and packaged into an integrated
circuit.

Flat Panel Display Manufacturing Processes

Flat panel  displays are  manufactured  in clean rooms using thin film processes
that are similar to those used in semiconductor  manufacturing.  Most flat panel
displays are constructed on large glass  substrates that currently range in size
up to  1,200 x 1,300  millimeters  and  should  increase  to up to 1,870 x 2,200
millimeters by the end of 2004.

Increased Use of Metrology in Manufacturing

We  believe  that  continually  rising  wafer  costs are  forcing  semiconductor
manufacturers to re-evaluate their manufacturing  strategies at all levels, from
individual   process  steps  to  fabwide   process   optimization.   Many  major
semiconductor  manufacturers  are  adopting  feed-forward  and  feedback of film
thickness  and  critical  dimensions,  or CDs,  based  on  real-time  data  from
metrology systems.  Major benefits of these new metrology  strategies are higher
manufacturing  efficiencies from reduced rework, reduced headcount to perform at
the same quality level and increased  device  performance.  Additional  benefits
include  device  speed  matching  and  more  precise   control  of  the  overall
manufacturing process.

Drive Toward Integrated Metrology

For  many  years,  semiconductor   manufacturers  have  sought  to  improve  fab
efficiency by choosing  systems that integrate more than one process step into a
single tool.  Integrated  metrology solutions increase  productivity with higher
throughput,  smaller  overall  product  footprints,  reduced wafer  handling and
faster  process  development.  This  trend  began in the  mid-1980s,  as leading
manufacturers  introduced a "cluster  process tool"  architecture  that combined
multiple  processes  in  separate  chambers  around  a  central   wafer-handling
platform.

Today,  the same focus on  increased  productivity  is driving  the  adoption of
integrated  metrology for many  processes,  such as  planarization,  deposition,
lithography and etch. Until recently,  semiconductor manufacturers were required
to  physically  transport  wafers  from a process  tool to a separate  metrology
system  in  order  to make  critical  measurements  such as film  thickness  and
uniformity. Manufacturers of process equipment are increasingly seeking to offer
their customers  integrated  metrology in their tools to lower costs and improve
overall fab efficiency.  These tools can have one or two metrology chambers that
are  integrated  onto a process  system,  which  utilize  the common  automation
platform, so that measurements can be taken without removing the wafers from the
tool.  Integrated  metrology provides  semiconductor  manufacturers with several
benefits,  including a reduction in the number of test wafers, increased overall

                                      I-4


process throughput,  faster detection of process excursions and faults,  reduced
wafer  handling,  faster  process  development  and ultimately an improvement in
overall equipment effectiveness.

Nanometrics Offerings

We offer a complete  line of  metrology  systems to address  the broad  range of
metrology requirements of our customers.

Our metrology systems can be categorized as:

o        Stand-alone,  fully automated systems used for the characterization and
         measurement of thin films in high-volume  manufacturing  operations. We
         offer a broad line of fully  automated  thin film  thickness,  critical
         dimension,  defect inspection and overlay  measurement  systems.  These
         systems  remove the  dependence  on human  operators  by  incorporating
         reliable  wafer  handling  robots and are  designed  to meet the speed,
         measurement,   performance  and  reliability   requirements   that  are
         essential   for   today's   semiconductor   and  flat   panel   display
         manufacturing   facilities.   Each  of  these  measurement  systems  is
         non-contact and uses non-destructive  techniques to analyze and measure
         films. Our fully automated metrology product line also includes systems
         that  are  used  to  measure  the  critical   dimensions   and  overlay
         registration accuracy of successive layers of semiconductor patterns on
         wafers in the photolithography process.

o        Integrated systems used to measure in-process wafers  automatically and
         quickly without having to leave the enclosed wafer  processing  system.
         In 1998, we introduced our high-speed  integrated metrology system. Our
         integrated  metrology  systems are  compact and monitor a multitude  of
         small test points on the wafer using sophisticated pattern recognition.
         Our   integrated   systems  can  be   attached   to  film   deposition,
         planarization,  lithography,  etch and other  process  tools to provide
         rapid  monitoring  of films on each wafer  immediately  before or after
         processing.   Integrated  systems  can  offer  customers  significantly
         increased  operating  efficiency  and  equipment   utilization,   lower
         manufacturing costs and higher throughput.  We anticipate continuing to
         ship integrated  systems to many original  equipment  manufacturers for
         installation on their planarization, deposition, litho and etch tools.

o        Tabletop  systems used to manually or  semi-automatically  measure thin
         films in engineering and low-volume  production  environments.  We have
         been a pioneer  in and  believe  that we are the  leading  supplier  of
         tabletop thin film thickness measurement systems, which are mainly used
         in  low-volume   production   environments  and  failure  analysis  and
         engineering  labs.  Our tabletop  models have unique  capabilities  and
         several available configurations, depending on wafer handling, range of
         films to be measured, uniformity mapping and other customer needs.

Each of our measurement systems is equipped with computerized readout capability
for  measurement,  visualization  and control of film  uniformity and thickness,
critical  dimensions and overlay.  In addition,  we have developed new automated
systems and tabletop products for emerging  technologies using larger substrates
such as 300-millimeter wafers and larger flat panel displays. We were one of the
first companies to ship fully automated thin film thickness  measurement systems
for  300-millimeter  wafers.  We have also  introduced  new  technology  for the
precise thin film  measurements  that are dictated by sub-100nm design rules and
have developed  products with  mini-environments  that meet the latest standards
for clean, particle-free manufacturing.

Strategy

Our  strategy is to offer and  support,  on a worldwide  basis,  technologically
advanced metrology solutions that meet the changing  manufacturing  requirements
of the  semiconductor  and  flat  panel  display  industries,  as well as  other
industries that use metrology systems. Key elements of our strategy include:

         Continuing to Offer Advanced Integrated  Metrology Systems. We were one
         of the  first  suppliers  to  offer  products  that  integrate  process
         metrology systems into wafer processing equipment. We supply integrated
         metrology  systems  for Applied  Materials'  Mirra  Mesa(TM)  and 300mm
         Reflexion(TM)  CMP systems and the Producer QA and SE (TM) CVD systems.
         Our optical  critical  dimension (OCD) metrology system is incorporated
         in  the  Applied  Materials'   Transforma(TM)  300mm  etch  system  for
         controlling critical dimensions. The introduction of the

                                      I-5


         first combined OCD/DUV  integrated  metrology product has allowed us to
         penetrate   additional  OEM  suppliers  of  etch   processing  and  CMP
         equipment,  including  Hitachi High Tech (HHT),  Dainippon Screen (DNS)
         and Ebara.  Our integrated  metrology sales group continues to focus on
         sales of integrated metrology products to both OEMs and end-users.

         Maintaining  Technology  Leadership.  We are  committed  to  developing
         advanced  metrology  systems  that meet the  requirements  of  advanced
         semiconductor,  magnetic  head and  flat  panel  display  manufacturing
         technology.  We have an extensive  array of proprietary  technology and
         expertise in optics,  software and systems integration.  We have chosen
         to reduce our dependence on outside  suppliers by taking control of the
         manufacturing of the critical components of our metrology systems.  Key
         enabling  technologies,  such as our recently  developed  edge-gripping
         wafer  handling  stages,  allow  us to  provide  unique  products  with
         exceptionally  high  quality  and low  manufacturing  costs  to our OEM
         customers.

         Broadening  Our  Technology  Portfolio.  We intend to continue to add a
         wide range of new  measurement  technologies  to our expanding  base of
         intellectual  property.  We  recently  introduced  a single  integrated
         module  combining  OCD and DUV  technologies,  which has  enabled us to
         perform critical erosion and film thickness/array  measurements for the
         oxide and copper metal CMP  processes.  In addition,  our  copper/metal
         profiler for CMP process control combines  optical profile  measurement
         or profilometry with our highly successful  reflectometry technology to
         monitor  metal  removal  during the chemical  mechanical  planarization
         process.   These  metrologies  are  key  requirements  for  the  copper
         damascene  process,  which  replaces the current  subtractive  aluminum
         process on newer semiconductor devices.

         We also participate in the particle and defect  inspection  market with
         our Universal Defect Inspection (UDI)  technology.  This technology has
         applications not only for inspection of  semiconductor  wafers but also
         for flat panel  displays  for the purpose of detecting  killer  defects
         early in the process before they cause catastrophic yield loss.

         Our OCD technology  has also been applied to advanced  photolithography
         processes with the  introduction  of the OCD 9010M for mask and reticle
         measurement  and   characterization.   This  new  product  has  already
         successfully  correlated the interrelationships  between film thickness
         and critical  dimension  parameters.  The OCD  technology has also been
         successfully extended to perform overlay/registration measurements. Our
         new   diffraction-based   overlay   (DBO)   technology   will   provide
         lithographers  with wafer overlay control well beyond the  requirements
         of the 65-nanometer  node of the International  Technology  Roadmap for
         Semiconductors (ITRS) through the year 2010.

         Leveraging Existing Customer and Industry  Relationships.  We expect to
         continue to strengthen our existing  customer  relationships and foster
         working  partnerships  with  semiconductor  equipment  manufacturers by
         providing  technologically superior systems and high levels of customer
         support. Our strong industry  relationships have allowed close customer
         collaboration  which,  in return,  facilitates our ability to introduce
         new products and applications in response to customer needs. We believe
         that our large customer base will continue to be an important source of
         new product development ideas. Our large customer base also provides us
         with  the  opportunity  for  increased  sales of  additional  metrology
         systems to our current customers.

         Providing Worldwide  Distribution and Support. We believe that a direct
         sales  and  support   capability  is  beneficial   for  developing  and
         maintaining close customer  relationships and for rapidly responding to
         changing  customer  requirements.  Because a majority of our sales come
         from sources outside of the United States,  we have expanded our direct
         sales force in Europe, South Korea, Taiwan and China, and will continue
         to expand into additional territories as customer requirements dictate.
         We  use  selected  sales  representatives  and  distributors  in  other
         countries in Southeast  Asia and the Middle East.  We intend to monitor
         our distribution network by evaluating our existing and new offices, as
         well as forming  additional  distribution  relationships as needed.  We
         believe that growing our international  distribution network as well as
         our  increased  focus on direct  sales  domestically  can  enhance  our
         competitive position.

         Addressing  Multiple  Markets.  There  are  broad  applications  of our
         technology  beyond the  semiconductor  industry.  We currently  offer a
         comprehensive  family of metrology systems that accurately measure thin
         films,   critical   dimensions   and  overlay   registration   used  in
         manufacturing process. Newer products inspect for particles and defects

                                      I-6


         and monitor critical metal loss during the copper removal  process.  We
         intend  to  continue  developing  and  marketing  products  to  address
         metrology  requirements  in the  manufacture of flat panel displays and
         any other industries that might apply our technology in the future.  We
         believe that  diversification  of our technology  through  applications
         across multiple industries increases the total available market for our
         products and reduces,  to an extent, our exposure to the cyclicality of
         any particular market.

         Broadening  of our OEM Customer  Base. We believe that our OEM customer
         base will become an increasingly  important aspect of our business.  We
         recently added Ebara,  Hitachi and Dainippon  Screen to our list of OEM
         design wins which,  together  with our strong OEM position with Applied
         Materials,  will allow us to capitalize on this rapidly  growing market
         segment.  The creation of our new, OEM integrated metrology sales group
         will  provide  additional  focus  on  this  market  opportunity  and is
         expected to result in  increasing  acceptance  of our  products in this
         sector.

Technology

We believe that our engineering  expertise,  technology  acquisitions,  supplier
alliances and short-cycle  production  strategies enable us to develop and offer
advanced  solutions that address industry  trends.  By offering common metrology
platforms that can be configured with a variety of measurement technologies, our
customers can (i) specify high  performance  systems not easily offered by other
suppliers and (ii) narrowly  configure a system for a specific  application as a
cost saving measure.

         Spectroscopic  Reflectometry.   We  pioneered  the  use  of  micro-spot
         spectroscopic  reflectometry  for  semiconductor  film metrology in the
         late  1970s.  Spectroscopic  reflectometry  uses  multiple  wavelengths
         (colors)  of light to  obtain  an  array of data for  analysis  of film
         thickness   and   other   film   parameters.    Today's   semiconductor
         manufacturers still depend on spectroscopic reflectometry for most film
         metrology  applications.  Reflectometry is the measurement of reflected
         light. For film metrology,  a wavelength spectrum in the visible region
         is commonly used. Light reflected from the surfaces of the film and the
         substrate is analyzed using computers and measurement  algorithms.  The
         analysis  yields  thickness  information and other  parameters  without
         contacting or destroying the film.

         In the  mid-1980s,  we  introduced  a DUV  reflectometer  for  material
         analysis.  In 1991, we were awarded a patent for the  determination  of
         absolute   reflectance  in  the  ultraviolet  region.  This  technology
         provides  enhanced  measurement  performance  for thinner films and for
         films stacked on top of one another.

         Spectroscopic  Ellipsometry.  Like  reflectometry,  ellipsometry  is  a
         non-contact and  non-destructive  technique used to analyze and measure
         films. An ellipsometer analyzes the change in a polarized beam of light
         after  reflection from a film's surface and interface.  Our systems are
         spectroscopic,   providing   ellipsometric   data  at  many   different
         wavelengths.   Spectroscopic   ellipsometry   provides   a  wealth   of
         information   about  a  film,   yielding  very  accurate  and  reliable
         measurements.  In  general,  ellipsometers  are used for thin films and
         complex film stacks,  whereas reflectometers are used for thicker films
         and stacks.

         Optical Critical Dimension Technology. Our OCD technology is a critical
         dimension  measurement  technology that is used to precisely  determine
         the  dimensions on the  semiconductor  wafer that directly  control the
         resulting   performance  of  the  integrated   circuit   devices.   Our
         non-destructive,  OCD  measurement  technology is  compatible  with the
         current 130nm manufacturing  technology and can be extended below 100nm
         for   future   requirements   in  both   photo-lithography   and   etch
         applications.   OCD  combines   non-contact   optical  technology  with
         extremely  powerful data analysis  software to provide highly  accurate
         measurement  results for line width,  height and sidewall angles.  This
         technology is available in both standalone and integrated platforms.

         Overlay  Registration.  Overlay  registration  refers  to the  relative
         alignment of two layers in the thin film photolithographic process. Our
         microscope-based, measurement technology utilizes a high magnification,
         low  distortion  imaging  system  combined  with  proprietary  software
         algorithms to numerically quantify the alignment.

         Diffraction-Based Overlay Registration. We introduced diffraction-based
         overlay    metrology   at   the   prestigious    SPIE   Conference   on
         Microlithography  in February  2003,  as an  alternative  solution  for
         overlay  technology  nodes

                                      I-7


         below 90 nanometers.  This novel technique  extracts overlay  alignment
         error  from our  broadband  OCD  technology  using  specially  designed
         diffraction   targets  in   real-time.   The   technique  is  based  on
         spectroscopy  rather  than  imaging,  is much more  robust  than aerial
         imaging  methods,  and the total  measurement  uncertainty is about six
         times  smaller than  traditional  techniques.  This new  technology  is
         capable  of  meeting  the  advanced  design  requirements  of the  45nm
         process.  A major  advantage of the  diffraction  technique is that the
         measurement  targets can be produced  that match the  dimensions of the
         circuits being  manufactured,  thus providing the immediate  benefit of
         looking at the overlay  performance  of features that closely  resemble
         the circuit features.

         Optical  Profilometry.  We  developed  the  optical  profiler  for  the
         measurement  of  copper  metal  loss  during  the  chemical  mechanical
         planarization  process.  This  technology  uses the  combination  of an
         optical  interferometer and our reflectometer  technology to accurately
         determine  metal loss, even over multiple layers during the final steps
         of  metallization.  Our technology is a unique method for precisely and
         accurately controlling this semiconductor manufacturing process step.

         Extreme  Dark  Field  (EDF)  Imaging  Technology.  Our new,  dark field
         inspection technology is used to detect and accurately locate particles
         and defects on the front and back sides of wafer surfaces,  which could
         potentially  lead to device failures and critical yield loss during the
         semiconductor  manufacturing  process.  The technology  combines a high
         efficiency,  broadband  light source with a  high-resolution  detection
         system  and  proprietary   digital  image  processing  for  defect  and
         contamination  detection  on a wide variety of films and  surfaces.  We
         believe  that  this  technology  can  be  readily   extended  to  other
         manufacturing processes.

Products

Our thin film thickness  measurement systems use  microscope-based,  non-contact
spectroscopic  reflectometry  (SR).  Some of our systems  provide  complementary
spectroscopic   ellipsometry   (SE)  to  measure  the   thickness   and  optical
characteristics of films on a variety of substrates.  In addition, we offer both
integrated and standalone optical critical metrology systems to measure critical
dimensions of patterns on  semiconductor  wafers.  We also manufacture a line of
optical  overlay  registration  systems that are used to determine the alignment
accuracy  of  successive  layers  of  semiconductor  patterns  on  wafers in the
photolithography  process.  Our  products  can be  divided  into  three  groups:
automated stand-alone systems, integrated systems and tabletop systems.



- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
Platform                  Market                   Substrate Size          Applications              Technology
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
                                                                                         
Automated/Stand Alone
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9100                      Semiconductor,           75-200mm                CVD, CMP, Etch, Litho,    SR, SE
                          Magnetic Head                                    Film Thickness
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9200                      Semiconductor            150mm                   CVD, CMP, Etch, Litho,    SR
                                                   200mm                   Film Thickness
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9300                      Semiconductor            200mm                   CVD, CMP, Etch, Litho,    SR, SE, OCD/SE, UDI,
                                                   300mm                   Film Thickness            CLP
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
                                                   550mm x 650mm, 1100mm
6500                      Flat Panel Display       x 1250mm 1200mm x       Film Thickness            SR, SE
                                                   1300mm
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
7210                      Semiconductor            200mm                   Overlay                   Imaging
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------


                                      I-8




- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
Platform                  Market                   Substrate Size          Applications              Technology
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
                                                                                         
Integrated
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9000                      Semiconductor            200mm                   CVD, CMP, Film Thickness  SR
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9000i                     Semiconductor            200mm                   CVD, CMP, Etch, Film      SR, OCD
                                                   300mm                   Thickness, CD
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9000b                     Semiconductor            300mm                   CVD, CMP, Etch, Film      SR
                                                                           Thickness
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9010                      Semiconductor            300mm                   CMP, CVD, Etch, Litho     OCD/SR, CLP, UDI
                                                                           Film Thickness, CD
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
9020                      Semiconductor            200mm                   Etch, Vacuum CD           OCD
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
Table Top
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
3000                      Semiconductor,           75mm                    Film Thickness            SR
                          Magnetic Head            150mm
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------
6100                      Semiconductor            75mm                    Film Thickness            SR
                                                   150mm
                                                   200mm
- ------------------------- ------------------------ ----------------------- ------------------------- ----------------------


We have recently  introduced  several new standalone and integrated  products to
the market. These products include the following:

o        Nanometrics   Atlas  Advanced   Metrology  System  combining   multiple
         metrology technologies in a standalone device

o        Nanometrics  9300  combined  standalone  OCD/SE  film  characterization
         system

o        Nanometrics FLX standalone  flexible  metrology  system for development
         and support of all integrated technologies

o        NanoOCD/DUV  9010  integrated   metrology  platform  for  both  optical
         critical dimension and film thickness metrology

o        NanoOCD  9010M  integrated  metrology  platform  for mask  and  reticle
         measurement

Additionally,  our  subsidiaries  in Japan and Korea  unveiled  a new flat panel
display product and a 300-millimeter aerial imaging overlay product.

Automated/Stand-Alone Systems

Our stand-alone,  fully automated  metrology systems are employed in high-volume
production  environments.  These systems incorporate automated material handling
interface  options for a variety of fab  automation  environments  and implement
multiple  measurement  technologies  for a broad range of substrate  sizes.  Our
automated  systems  range in price  from  approximately  $200,000  to  $900,000,
depending  on  substrate  sizes,  measurement  technologies,  material  handling
interfaces and software options.

         Nanometrics Atlas

         The new Nanometrics Atlas high-performance metrology system combines up
         to  five  metrology  technologies  on  a  single  platform,   providing
         increased  measurement  capabilities  in a small  footprint  design for
         reduced cost of ownership.  The system is capable of housing up to five
         metrology   technologies   including   polarized,    normal   incidence
         spectroscopic   ellipsometry   for   linewidth   profile  and  critical
         dimensions,  spectroscopic  reflectometry for films and film stacks, UV
         and deep UV  spectroscopic  ellipsometry  for ultra-thin films and film
         characterization,     diffraction-based    overlay    technology    for
         layer-to-layer  registration  measurement,  and film  stress/wafer  bow
         measurements.  The Atlas offers high accuracy, high precision metrology
         for wafer  characterization  and can be configured  for 200mm and 300mm
         wafer sizes.  The system is also compatible  with NanoNet,  an optional
         software

                                      I-9


         package that enables users to  synchronize  standalone  and  integrated
         metrology systems for remote process setup and monitoring.

         NanoSpec 9100

         The NanoSpec 9100 stand-alone,  automated thin film measurement  system
         is  capable  of  handling  wafers  ranging  in  size  from  75  to  200
         millimeters  in  diameter.  The  9100  can  be  configured  with a deep
         ultraviolet (DUV) to near infrared (NIR) spectroscopic ellipsometer for
         ultra-thin,   multiple  film  stack  and  DUV  lithography  measurement
         applications.   Other  9100  options  include  a  standard   mechanical
         interface  with  mini-environment  enclosures  for  use in  ultra-clean
         manufacturing  facilities.  The  system  also  features  a  Windows  NT
         software  platform  that  conforms  to the  newly  establish  SEMI user
         interface  standard.  The 9100 can also be  configured  to  handle  the
         substrates.   We  developed  the  9100  using   technologies  from  the
         integrated film thickness systems to allow easy transfer of measurement
         recipes between the integrated and stand-alone film metrology systems.

         NanoSpec 9200

         The NanoSpec 9200 stand-alone,  automated thin film measurement  system
         is capable of handling  wafers of 150 and 200  millimeters in diameter.
         We developed  this system,  using  technologies  from the NanoSpec 9000
         integrated  film  thickness  system,  to be compact and to provide high
         wafer throughput.

         9300 Standalone Automation Platforms

         The 9300  stand-alone  wafer  automation  platform  serves as a common,
         universal  building  block  and  forms  the  basis  for  several  fully
         automated metrology systems.

                  Nanometrics 9300

                  The  enhanced   Nanometrics  9300  advanced  metrology  system
                  combines  two  metrology  technologies  on a single  metrology
                  platform. This enhanced platform now includes optical critical
                  dimension   (OCD)    measurement    capability.    Using   the
                  spectroscopic   ellipsometer  (SE),  customers  can  determine
                  optical film properties and then feed them directly to the OCD
                  measurement recipes to optimize sensitivity for all line width
                  and profile measurements. Having these two technologies on the
                  same tool  also  reduces  the time and  potential  error  loss
                  associated   with  having  to   determine   the  film  optical
                  properties on a separate tool.

                  NanoSpec 9300

                  The NanoSpec 9300 stand-alone, automated thin film measurement
                  system is  capable  of  handling  both 200 and  300-millimeter
                  diameter  wafers.  The NanoSpec 9300 can be configured  with a
                  DUV to NIR spectroscopic ellipsometer for ultra-thin, multiple
                  film stack and DUV lithography measurement applications.  This
                  system can also include a mini-environment enclosure and wafer
                  load ports  compatible with industry  standards.  The NanoSpec
                  9300 conforms to the new industry standards for 300-millimeter
                  wafer  handling  automation and features a Windows NT software
                  platform that conforms to the SEMI user interface standard. We
                  developed  the  NanoSpec  9300  using  technologies  from  the
                  integrated  film  thickness  systems to allow easy transfer of
                  measurement  recipes  between the integrated  and  stand-alone
                  film metrology systems.

                  NanoUDI 9300

                  The NanoUDI  9300  stand-alone,  high  throughput,  full-wafer
                  defect  inspection  system detects and measures  particles and
                  defects as small as 0.05  microns on  300-millimeter  diameter
                  semiconductor wafers. The NanoUDI 9300 was first introduced at
                  SEMICON  West in July  2002 and is built  on the  common  9300
                  wafer  automation  platform  that conforms to the new industry
                  standards for 300 millimeter wafer handling.  The NanoUDI 9300
                  also features a Windows NT software  platform that conforms to
                  the SEMI user interface standard.

                                      I-10


                  NanoOCD 9300

                  The NanoOCD 9300 stand-alone, automated metrology system is an
                  optical  critical  dimension  measurement  system that enables
                  direct recipe  transfer  between our integrated  metrology and
                  standalone systems using our NanoNet networking software. This
                  system can also include a mini-environment enclosure and wafer
                  load ports  compatible  with industry  standards.  The NanoOCD
                  9300  also  conforms  to the new  industry  standards  for 300
                  millimeter wafer handling automation and features a Windows NT
                  software  platform that conforms to the newly established SEMI
                  user interface  standard.  We developed the NanoOCD 9300 using
                  the same measurement technology from the integrated OCD system
                  to allow direct  transfer of measurement  recipes  between the
                  integrated and stand-alone OCD metrology systems.

                  Nanometrics FLX

                  The newest standalone metrology platform,  the Nanometrics FLX
                  flexible  metrology  system, is designed to support up to four
                  integrated  metrology  modules  simultaneously  - the tool can
                  mix-and-match  any  combination  of modules to form a complete
                  metrology  solution for lithography,  planarization,  etch and
                  deposition  processes.  This  capability  accelerates  process
                  development   through   parallel   development  of  integrated
                  metrology  solutions.  The  Nanometrics  FLX  is  a  flexible,
                  cost-efficient,  high-throughput  300-mm standalone  metrology
                  system  based  on  Nanometrics'  proven  integrated  metrology
                  solutions.  The system offers  industry-leading  throughput of
                  250-500   wafers   per   hour   fueled   by  dual   multi-axis
                  wafer-handling robots.

         NanoSpec 5500 and 6500

         The NanoSpec 5500 and 6500 measure optically transparent films that are
         used in the manufacture of flat panel displays. The model 5500 is fully
         automated  and handles  substrates up to 550 by 650  millimeters.  This
         model is also  capable of measuring  at any site on the  substrate  and
         generating  film thickness maps,  which show film thickness  uniformity
         across the  panel.  The  NanoSpec  6500 is an  advanced  version of the
         NanoSpec  5500  with  additional   proprietary  software  and  hardware
         enhancements  and is capable of handling  generation 5 substrates up to
         1,200 by 1,300  millimeters.  Recent product  enhancements  include the
         integration of ultra-violet  (UV)  spectroscopic  reflectometry for the
         measurement of low temperature,  deposited poly-silicon films and UV to
         near  infra-red   (NIR)   spectroscopic   ellipsometry   (SE)  for  the
         measurement  of  multilayer   film  stacks  and  improved   measurement
         precision.  Product  development  is also well  underway  for  handling
         generation 6 (1,500 x 1,800 millimeter) and generation 7 (1,870 x 2,200
         millimeter) substrates.

         NanoOCS 7200 Series

         In 1998,  we completed an  acquisition  of the Metra  product line from
         Optical Specialties.  The Metra is a stand-alone system used to measure
         the overlay accuracy of successive layers of semiconductor  patterns on
         wafers in the photolithography  process. We shipped our first automated
         overlay registration system, the Metra 7000, in June 1998. The recently
         introduced NanoOCS 7210 provides enhanced  measurement  performance and
         higher wafer throughput and replaces the Metra line of products.

Integrated Systems

Our integrated metrology systems are installed inside wafer processing equipment
to provide  near  real-time  measurements  for  improving  process  control  and
increasing  throughput.  Our integrated systems are available for wafer sizes up
to 300  millimeters  and  offer  DUV  measurement  technology,  in  addition  to
spectroscopic   reflectometry   and  optical  critical   dimension   measurement
technologies. Our integrated metrology systems range in price from approximately
$80,000 to $300,000 depending on features and technology.

         NanoSpec 9000

         The NanoSpec 9000 is an ultra-compact  measurement  system designed for
         integration into semiconductor wafer processing  equipment.  The system
         can be used in  several  wafer  film  process  steps,  including  metal
         deposition,

                                      I-11


         planarization,  chemical vapor  photolithography and etch. In its basic
         configuration,  the NanoSpec 9000 is equipped  with visible  wavelength
         spectroscopic reflectometry.

         NanoSpec 9000i

         The  NanoSpec  9000i is a 300mm  version  of the  NanoSpec  9000.  This
         metrology  platform can be integrated  into multiple wafer film process
         steps  including  metal  deposition,   planarization,   chemical  vapor
         deposition,  photolithography  and  etch.  The  NanoSpec  9000i is also
         equipped with visible wavelength spectroscopic reflectometry and can be
         extended into deep  ultraviolet  wavelengths.  The NanoSpec  9000i will
         also  support the newly  developed  optical  critical  dimension  (OCD)
         technology for the measurement of critical  dimensions on semiconductor
         wafers. The system is designed for integration into semiconductor wafer
         processing  equipment  and used in several  critical  processing  steps
         including photolithography and etch.

         NanoSpec 9000b

         The NanoSpec 9000b is a SEMI BOLTS  compatible,  300  millimeter  based
         system that  incorporates  all the  features of the NanoSpec  9000.  By
         conforming to the industry standard BOLTS mounting system, the NanoSpec
         9000b is  interchangeable  with  industry  conforming  load  ports  for
         simplified mechanical integration.

         9010 Integrated Metrology Platform

         The 9010 integrated  metrology  platform is an advanced 300 -millimeter
         product that  supports  multiple  measurement  technologies.  The first
         product offered on this platform was the NanoCLP 9010 is a laser-based,
         optical profiling and reflectance  measurement system that incorporates
         the newly  developed  Copper Laser  Profiler  (CLP)  technology for the
         measurement of copper metal loss during  planarization on semiconductor
         wafers  and  is  designed  for  integration  into  semiconductor  wafer
         processing  equipment.  The second product offered on this platform was
         the NanoUDI, Universal Defect Inspection system. The NanoUDI 9010 is an
         integrated metrology,  full-wafer defect inspection system that detects
         and  measures  particles  and  defects  as  small  as  0.1  microns  on
         300-millimeter  diameter  semiconductor  wafers.  The  9010  integrated
         metrology   platform  also   incorporates  our  unique   300-millimeter
         edge-gripping wafer stage with an integral pre-aligner.

         NanoOCD 9010M

         The NanoOCD 9010M was  introduced in the third quarter of 2003,  and is
         the first optical critical  dimension (OCD)  integrated  metrology tool
         for   masks   and   reticles.    The   NanoOCD   9010M   utilizes   our
         production-proven OCD metrology, and enables non-destructive, real-time
         measurement  and  profiling  of  critical  features on  photomasks  and
         reticles  without the limitations and drawbacks  associated with CD-SEM
         metrology.  Current  CD-SEM  technology  appears  to  be  reaching  its
         theoretical limits for making critical dimension  measurements on these
         substrates.  Photoresist-on-chrome-on-glass  features found on reticles
         and  masks  suffer  severe  charging  during  CD-SEM  metrology  making
         critical dimension  measurements  impossible.  OCD is a non-destructive
         technology   that  provides   information  not  available  from  CD-SEM
         measurements.

         NanoOCD/DUV 9010

         The NanoOCD/DUV  9010 was also introduced in the third quarter of 2003,
         and is the first  integrated  metrology tool to combine two measurement
         technologies on a single platform.  The NanoOCD/DUV  9010  incorporates
         both  ultra  violet  optical  critical  dimension  (OCD)  spectroscopic
         ellipsometry and deep ultra violet (DUV)  spectroscopic  reflectometry.
         The  NanoOCD/DUV  9010  provides  thin  film and film  stack  thickness
         measurements  on pads as well as  oxide,  nitride  and  trench  profile
         measurements  on arrays in a single  tool.  The  combined  technologies
         provide  a  complete  measurement  solution  over the  entire  range of
         measurement requirements for each process step. This complete metrology
         capability can be utilized across a number of lithography,  deposition,
         copper  planarization,   dielectric  planarization,  poly-Si  etch  and
         dielectric etch applications.

                                      I-12


         NanoOCD 9020 Integrated Metrology Platform

         The 9020  integrated  metrology  platform is an advanced,  vacuum based
         metrology product that supports multiple measurement technologies.  The
         NanoOCD 9020 is a 200  millimeter-based  system that  incorporates  our
         newly developed edge-gripping vacuum wafer stage and OCD technology for
         the measurement of critical  dimensions on  semiconductor  wafers.  The
         system  is  designed  for  integration   into  the  vacuum  chamber  of
         semiconductor wafer etch processing equipment.

Tabletop Systems

Our tabletop  systems are used primarily in low-volume  production  environments
and in engineering labs for which automated handling and high throughput are not
required.  Our tabletop  product line encompasses both manual and semi automated
models and  includes  systems for both film  thickness  and  critical  dimension
measurements.  Our tabletop  system prices range from  approximately  $50,000 to
$200,000,  depending  primarily on the degree of automation and software options
purchased.

         NanoSpec 3000 and 6100

         The  NanoSpec  tabletop  systems  provide  a broad  range of thin  film
         measurement  solutions at a lower entry price point.  The NanoSpec 3000
         is a basic,  manual system while the 6100 models feature  semiautomatic
         wafer handling or staging.

Customers

We sell our metrology systems  worldwide to many of the major  semiconductor and
flat  panel  display  manufacturers  and  equipment  suppliers,  as  well  as to
producers of silicon wafers and photomasks. The majority of our systems are sold
to  customers  located in the United  States,  Asia and  Europe.  One  customer,
Applied  Materials  represented  17.6% of our total net  revenues  in 2001.  Two
customers,  Applied Materials, and TSMC represented 13.8% and 10.9% of our total
net revenues in 2002. Two customers,  Applied Materials and Hynix Semiconductor,
represented 15.4% and 12.0% of our total net revenues in 2003, respectively.

The  following is a list of our top ten  customers,  based on  revenues,  during
2003:

Applied Materials                Tricenti Technology Inc. (TTI)
Hynix Semiconductor              AU Optronics
Samsung                          Hannstar
Powerchip                        Semiconductor Manufacturing International
ChiMei                           Corporation (SMIC)
                                 Wacker

Sales and Marketing

We believe that the  capability  for direct sales and support is beneficial  for
developing  and  maintaining  close  customer   relationships  and  for  rapidly
responding  to  changing  customer  requirements.  We provide  direct  sales and
support from our  corporate  office in  California.  We also have a direct sales
presence in South Korea, Taiwan,  China, Europe and Japan. We use selected sales
representatives  and  distributors  in the United States and other  countries in
Asia and the Middle  East.  We intend to continue  to monitor  our  distribution
network, our existing and new offices as well as forming additional distribution
relationships   when  needed.   We  believe   that  growing  our   international
distribution network can enhance our competitive  position. We maintain a direct
sales force of highly trained, technically sophisticated sales engineers who are
knowledgeable  in the use of metrology  systems  generally and with the features
and  advantages  of our  specific  products.  We  believe  that  our  sales  and
application engineers are skilled in working with our customers to solve complex
measurement and process problems.

Sales to customers in foreign countries  constituted  approximately 64.8%, 69.0%
and 74.8% of total net revenues for 2001,  2002 and 2003,  respectively.  Direct
exports of our metrology  systems to our foreign  customers and shipments to

                                      I-13


our subsidiaries  require general export  licenses.  See Note 12 of the Notes to
Consolidated  Financial Statements for information  regarding total net revenues
and  long-lived  assets  of our  foreign  operations.  See Item 7,  Management's
Discussion and Analysis of Financial  Condition and Results of  Operations-Risks
Related to Our Business for  information  regarding risks related to our foreign
operations.

Sales to customers located in Japan,  Taiwan and Korea, as a percentage of total
net revenues, were as follows:

                                      2001             2002             2003
                                      ----             ----             ----
Japan .......................         28.8%            23.9%            24.8%
Taiwan ......................         14.1%            22.7%            21.5%
Korea .......................          9.9%            10.5%            21.8%

In order to raise  market  awareness  of our  products,  we  advertise  in trade
publications,  distribute  promotional  materials,  publish technical  articles,
conduct marketing  programs,  issue press releases regarding new products,  work
with a public  relations  firm and  participate  in  industry  trade  shows  and
conferences. We also maintain a website at www.nanometrics.com.

Customer Service and Support

We believe that customer service and technical  support are important factors to
distinguish  us  from  our   competitors  and  are  essential  to  building  and
maintaining  close,  long-term  relationships  with our  customers.  We  provide
support to our  customers  with  telephonic  technical  support  access,  direct
training programs and operating manuals and other technical support information.
We use our  demonstration  equipment for training  programs,  as well as for our
sales and marketing efforts.  Our Technical  Training  department has a complete
set of metrology  systems that are  dedicated to customer  training.  We provide
warranty  and  post-warranty  service  from our  corporate  office in  Milpitas,
California.  We also have service  operations  based in  Pennsylvania,  Vermont,
Arizona,  and Texas.  Local  service and spare parts are  provided in the United
Kingdom by our operations in Scotland. Service,  applications, and sales support
for the European  continent  are provided  through our  operations  in Italy and
Germany. In Asia, service is provided by direct offices in Japan, Korea, Taiwan,
Singapore  and by a new office that we opened in 2002 in  Shanghai,  China.  Our
distributors  and  representatives  also provide  service in other  countries in
Asia.

We provide a one-year warranty on parts and labor for products sold domestically
and in foreign markets.  Service revenue,  including sales of replacement parts,
represented  approximately 10.4%, 17.4% and 16.9% of total net revenues in 2001,
2002 and 2003, respectively.

Backlog

As of  December  31,  2003 our backlog was  approximately  $9.1  million.  As of
December 31, 2002, our backlog was approximately $8.3 million.  Backlog includes
orders for  products  that we expect to ship  within 12 months.  Orders from our
customers are subject to cancellation or delay by the customer  without penalty.
Historically,   order   cancellations  and  order  rescheduling  have  not  been
significant.   However,  orders  presently  in  backlog  could  be  canceled  or
rescheduled.  As only a portion of our revenues for any fiscal quarter represent
systems in backlog,  we do not believe that backlog is a meaningful  or accurate
indication of our future revenues and performance.

Competition

The market for our metrology systems is intensely  competitive and characterized
by rapidly  evolving  technology.  We compete on a global basis with both larger
and smaller  companies  in the United  States,  Japan,  Israel and  Europe.  Our
products compete primarily with: stand-alone thin film measurement products from
KLA-Tencor Corporation,  Therma-Wave, Inc. and Rudolph Technologies;  integrated
thin film measurement products from Nova Measuring  Instruments Ltd., KLA-Tencor
and  Therma-Wave;  and overlay  measurement  products from KLA-Tencor and Accent
Optical  Technologies.  Many  of  our  competitors  have  substantially  greater
financial,  engineering,  manufacturing  and  marketing  resources  than  we do.
Significant  competitive  factors  in  our  industry  include:   performance  of
proprietary measurement technology; system performance, including automation and
software capability; ease of use; reliability;  established

                                      I-14


customer  bases;  cost of ownership;  price;  and global  customer  service.  We
believe that we compete  favorably  with respect to these  factors,  but we must
continue  to develop and design new and  improved  products in order to maintain
our competitive position.

Manufacturing

We manufacture  our products in the United States,  Japan and Korea.  We combine
proprietary  measurement  technology  produced in our facilities with components
and subassemblies obtained from outside suppliers.  Our manufacturing operations
do not require us to make any additional major investments in capital equipment.

Certain components,  subassemblies and services necessary for the manufacture of
our systems are obtained from a sole supplier or limited group of suppliers.  We
do not maintain long-term supply agreements with any of our suppliers.

Research and Development

Our research and development is directed towards enhancing existing products and
developing and introducing new products to maintain technological leadership and
to  meet  current  and  evolving  customer  needs.  Our  process,   engineering,
marketing,   operations   and  management   personnel   have   developed   close
collaborative  relationships  with many of our  customers  and have  used  these
relationships to identify market demands and target our research and development
to meet those demands.  We are working to develop potential  applications of new
and emerging  technologies,  including improved  metrology  methods.  We conduct
research and  development at our facilities in California,  Korea and Japan.  We
have   extensive   proprietary   technology  and  expertise  in  such  areas  as
spectroscopic  reflectometry  using our patented absolute  reflectivity,  robust
pattern recognition and complex measurement software algorithms.  We continue to
add to our  intellectual  property  portfolio,  most  recently  in the  areas of
critical dimension measurement and integrated metrology.  We also have extensive
experience in systems integration engineering required to design compact, highly
automated  systems  for  advanced  clean  room  environments.  Expenditures  for
research and development  during 2001,  2002 and 2003 were $10.8 million,  $13.8
million and $13.4 million,  and represented  22.6%, 39.6% and 32.2% of total net
revenues, respectively.

Intellectual Property

Our success  depends in large part on the technical  innovation of our products.
We actively pursue a program of filing patent applications to seek protection of
technologically  sensitive features of our metrology systems. As of December 31,
2003, we held 24 United States patents with 38 patent  applications  pending, 10
of which were filed during 2003.  The United States  patents,  issued during the
period 1987 to 2003,  will  expire  between  2004 and 2022.  While we attempt to
protect our  intellectual  property  rights through  patents and  non-disclosure
agreements,  we believe  that our success  will depend to a greater  degree upon
innovation, technological expertise and our ability to adapt our products to new
technology.  We may not be able to protect our technology and competitors may be
able to develop  similar  technology  independently.  In  addition,  the laws of
certain foreign countries may not protect our intellectual  property to the same
extent as do the laws of the United States.

From time to time we receive  communications  from third parties  asserting that
our metrology  systems may contain design  features that are claimed to infringe
their proprietary rights. We typically refer such matters to our legal counsel.

Employees

At December 31, 2003, we employed approximately 310 persons worldwide, including
97 in research and development,  54 in manufacturing and manufacturing  support,
134 in marketing,  sales and field service and 25 in general  administration and
finance.  None of these  employees is  represented  by a union and we have never
experienced a work stoppage as a result of union actions.  Many of our employees
have specialized  skills that are of value to us. Our future success will depend
in large part upon our ability to attract and retain highly skilled  scientific,
technical,  managerial,  financial  and  marketing  personnel,  who are in great
demand in the industry. We consider our employee relations to be good.

                                      I-15


Executive Officers of the Registrant

The following are our current  executive  officers and their ages as of December
31, 2003:

       Name                 Age               Position
       ----                 ---               --------
Vincent J. Coates.......    78   Chairman of the Board, Secretary
John D. Heaton..........    43   President, Chief Executive Officer and Director
Paul B. Nolan...........    48   Vice President and Chief Financial Officer
Roger Ingalls Jr........    42   Vice President of Sales

Mr.  Vincent J.  Coates has been  Chairman of the Board  since  Nanometrics  was
founded in 1975.  He has been our  Secretary  since  February  1989. He has also
served as our Chief Executive  Officer through April 1998 and President from our
founding  through May 1996,  except for the period January 1986 through February
1987 when he served exclusively as Chief Executive Officer.  Mr. Coates has also
served as Chairman of the Board of  Nanometrics  Japan Ltd., a subsidiary of the
Company,  since June 1998.  Prior to his employment at  Nanometrics,  Mr. Coates
co-founded  Coates and Welter  Instrument  Corporation,  a designer  of electron
microscopes,  which company was subsequently acquired by Nanometrics. Mr. Coates
also spent over twenty years  working in  engineering,  sales and  international
operations  for the  Perkin-Elmer  Corporation,  a  manufacturer  of  analytical
instruments.  In 1995, he received an award that recognized his  contribution to
the industry from  Semiconductor and Equipment and Materials  International,  an
industry trade organization.

Mr.  John D.  Heaton has served as a director  of  Nanometrics  since July 1995.
Since May 1996,  he has served as our  President.  Since April 1998, he has also
served as our Chief Executive Officer. From May 1996 to April 1998, he served as
our  Chief  Operating  Officer.  Mr.  Heaton  has also  served as  President  of
Nanometrics  Japan Ltd.,  a  subsidiary  of the  Company,  since  January  1998.
Beginning in 1978, Mr. Heaton served in various technical  positions at National
Semiconductor,  a  semiconductor  manufacturer,  prior to joining the Company in
1990.

Mr. Paul B. Nolan has served as Vice  President and Chief  Financial  Officer of
Nanometrics  since March 1994.  Mr.  Nolan  joined us as a Financial  Analyst in
March 1989, and served as Director of Finance from March 1993 to March 1994. Mr.
Nolan  served as  Financial  Analyst  at Harris  Corporation,  a  communications
equipment company, prior to joining the Company.

Mr. Roger  Ingalls Jr. has served as our Vice  President of Sales since  January
2002. Mr. Ingalls  joined  Nanometrics in March 1995,  serving as Vice President
and Director of Sales and Marketing  from October 1997 to February  1998, and as
Vice  President  and Director of Marketing  from  February 1998 to January 2002.
Prior to joining  Nanometrics,  he served as a sales  engineer for Nikon Inc., a
precision optical company, from March 1993 to March 1995.


ITEM 2. PROPERTIES

Our principal  manufacturing and administrative facility is located in Milpitas,
California in a 133,000 square foot building owned by the Company.  We purchased
the Milpitas facility in July 2000 and moved into the facility in November 2000.
We also lease and rent locations in Texas, China,  Singapore and Taiwan as sales
and service offices. Rent expense for our facilities was approximately  $270,000
for 2003.

Through our Japanese subsidiary, we own a 50,000 square foot facility in Narita,
Japan. This facility is utilized by our Japanese subsidiary for sales,  service,
engineering and manufacturing.  Our Japanese  subsidiary also leases three sales
and service offices in Japan.

Through  our  Korean  subsidiary,  we  own a  39,000  square  foot  facility  in
Pyungtaek,  Korea. This facility is utilized by our Korean subsidiary for sales,
service, engineering and manufacturing.

We believe that our existing facilities, which are currently utilized at or near
capacity,  are  suitable  and  adequate  for our current  needs and  anticipated
growth.

                                      I-16


ITEM 3. LEGAL PROCEEDINGS

There are no material legal proceedings pending against us.


ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

No matters were submitted to a vote of security holders during the quarter ended
January 3, 2004.

                                      I-17


                                     PART II

ITEM 5. MARKET FOR REGISTRANT'S COMMON EQUITY AND RELATED SHAREHOLDER MATTERS

Our  common  stock is quoted on the  Nasdaq  National  Market  under the  symbol
"NANO." The following table sets forth, for the periods indicated,  the high and
low bid prices per share of our common stock as reported on the Nasdaq  National
Market.  These  quotations  represent  prices between dealers and do not include
retail  markups,  markdowns or  commissions  and may not  necessarily  represent
actual transactions.

                                                  High                    Low
                                                  ----                    ---
2002
   First Quarter..............................    $23.10                 $14.90
   Second Quarter.............................    $20.35                 $13.16
   Third Quarter..............................    $16.33                  $2.60
   Fourth Quarter.............................     $6.30                  $1.82

2003
   First Quarter..............................     $6.11                  $2.85
   Second Quarter.............................     $7.49                  $3.88
   Third Quarter..............................    $15.89                  $6.15
   Fourth Quarter.............................    $17.41                 $10.63

On March 24,  2004,  the last  reported  sale price of our  common  stock on the
Nasdaq National Market was $14.56 per share,  and there were  approximately  123
shareholders of record.

Dividend Policy

We have never  declared  or paid any cash  dividends  on our capital  stock.  We
currently expect to retain future earnings, if any, for use in the operation and
expansion of our business and do not anticipate paying any cash dividends in the
foreseeable future.

Equity Compensation Plan Information

The following table gives  information about the common stock that may be issued
under all of our existing equity compensation plans as of December 31, 2003.



- -------------------------------- ----------------------------- ----------------------------- ------------------------------
         Plan category            Number of securities to be    Weighted-average exercise        Number of securities
                                   issued upon exercise of         price of outstanding         remaining available for
                                     outstanding options,      options, warrants and rights  future issuance under equity
                                     warrants and rights                                          compensation plans
                                                                                                 (excluding securities
                                                                                               reflected in column (a))
                                             (a)                            (b)                           (c)
- -------------------------------- ----------------------------- ----------------------------- ------------------------------
                                                                                               
Equity compensation plans
approved by security holders              1,773,711                      $ 11.62                        608,089
- -------------------------------- ----------------------------- ----------------------------- ------------------------------
Equity compensation plans not
approved by security holders              1,141,485                       $ 7.13                        58,515
- -------------------------------- ----------------------------- ----------------------------- ------------------------------
Total                                     2,915,196                       $ 9.86                        666,604
- -------------------------------- ----------------------------- ----------------------------- ------------------------------


Under the 2002  Nonstatutory  Stock Option Plan, which was approved by our board
of directors,  we may grant options to acquire up to 1,200,000  shares of common
stock  to  employees  and   consultants   at  prices   determined  by  the  Plan
administrator at the date of grant.  These options  generally expire seven years
from the date of  grant,  or a shorter  term as  provided  by the  stock  option
agreement and become  exercisable  as they vest as set forth in the stock option
agreements.

                                      II-1


Stock Option Exchange Program

On November 12, 2002, we announced a voluntary stock option exchange program for
certain eligible  employees.  Under the exchange program, we offered to exchange
certain stock options to purchase an aggregate of 1,962,020 shares of our common
stock in exchange for a promise to grant new stock  options,  subject to certain
conditions,  at a future  date  that is at least  six  months  and one day after
December 16, 2002, the date of  cancellation.  The stock options  subject to the
offer to exchange  had been  granted  under either our 1991 stock option plan or
our 2000  employee  stock option plan with  exercise  prices equal to or greater
than $10.00 per share.  Eligible  employees  who elected to  participate  in the
exchange  program were required to exchange all other stock options,  regardless
of their exercise price, that were granted to them after May 12, 2002 and before
replacement  options were granted.  The number of shares of common stock subject
to the new options  equaled 90% of the number subject to the exchanged  options.
Under the exchange program,  options to purchase  1,569,020 shares of our common
stock were  tendered  and  cancelled.  On June 17,  2003,  we granted  1,398,621
replacement options to eligible employees. There were no compensation charges or
variable plan accounting resulting from the grant  of  the replacement  options.
Non-employee  members of our Board of Directors were not eligible to participate
in this program.


ITEM 6. SELECTED CONSOLIDATED FINANCIAL DATA

The  selected  consolidated  financial  data set forth  below  should be read in
conjunction with  "Management's  Discussion and Analysis of Financial  Condition
and Results of Operations" and the consolidated financial statements and related
notes included elsewhere in this Annual Report on Form 10-K.

                                      II-2




                                                                        Years Ended December 31,
                                                ------------------------------------------------------------------------
                                                   1999            2000           2001            2002           2003
                                                ----------      ----------     ----------      ----------     ----------
                                                                 (in thousands, except per share data)
                                                                                               
Consolidated Statement of Operations Data:
Net revenues:
   Product sales.........................       $   32,162      $   63,468     $   42,653      $   28,669     $   34,592
   Service...............................            4,246           6,023          4,931           6,054          7,010
                                                ----------      ----------     ----------      ----------     ----------

     Total net revenues..................           36,408          69,491         47,584          34,723         41,602

Costs and expenses:
   Cost of product sales.................           14,606          25,082         17,949          13,237         17,691
   Cost of service.......................            4,560           6,022          5,406           5,765          6,620
   Research and development..............            4,658           9,238         10,760          13,765         13,399
   Selling...............................            5,871          10,313          9,523          10,862         11,496
   General and administrative............            2,973           4,258          4,177           5,104          4,689
   Goodwill impairment...................               --              --             --           1,077             --
                                                ----------      ----------     ----------      ----------     ----------

     Total costs and expenses............           32,668          54,913         47,815          49,810         53,895

Income (loss) from operations............            3,740          14,578           (231)        (15,087)       (12,293)

Other income (expense):
   Interest income.......................              662           4,129          2,576             583            397
   Interest expense......................             (180)            (76)           (86)            (94)           (96)
   Other, net............................               94            (150)          (517)            100            385
                                                ----------      ----------     ----------      ----------     ----------

     Total other income, net.............              576           3,903          1,973             589            686
                                                ----------      ----------     ----------      ----------     ----------

Income (loss) before provision (benefit)
   for income taxes......................            4,316          18,481          1,742         (14,498)       (11,607)

Provision (benefit) for income taxes.....            1,682           5,942            782          (6,230)         5,860
                                                ----------      ----------     ----------      ----------     ----------

Income (loss) before cumulative effect
   of change in accounting principle.....       $    2,634      $   12,539     $      960      $   (8,268)    $  (17,467)

Cumulative effect of change in revenue
   recognition principle (SAB 101).......               --          (1,364)            --              --             --
                                                ----------      ----------     ----------      ----------     ----------

Net income (loss)........................       $    2,634      $   11,175     $      960      $   (8,268)    $  (17,467)
                                                ==========      ==========     ==========      ==========     ==========

Basic net income (loss) per share:
   Income (loss) before cumulative
     effect of change in accounting
     principle...........................       $     0.30      $     1.14     $     0.08      $    (0.70)    $    (1.45)
   Cumulative effect of change in
     revenue recognition principle (SAB
     101)................................               --           (0.12)            --              --             --
                                                ----------      ----------     ----------      ----------     ----------
Net income (loss)........................       $     0.30      $     1.02     $     0.08      $    (0.70)    $    (1.45)
                                                ==========      ==========     ==========      ==========     ==========

Diluted net income (loss) per share:
   Income (loss) before cumulative
     effect of change in accounting
     principle...........................       $     0.28      $     1.06     $     0.08      $    (0.70)    $    (1.45)
   Cumulative effect of change in
     revenue recognition principle (SAB
     101)................................               --           (0.12)            --              --             --
                                                ----------      ----------     ----------      ----------     ----------
Net income (loss)........................       $     0.28      $     0.94     $     0.08      $    (0.70)    $    (1.45)
                                                ==========      ==========     ==========      ==========     ==========
Shares used in per share computation:
   Basic.................................            8,829          10,986         11,691          11,878         12,043
                                                ==========      ==========     ==========      ==========     ==========
   Diluted...............................            9,393          11,845         12,161          11,878         12,043
                                                ==========      ==========     ==========      ==========     ==========


                                      II-3




                                                                              December 31,
                                                ------------------------------------------------------------------------
                                                   1999            2000           2001            2002           2003
                                                ----------      ----------     ----------      ----------     ----------
                                                                             (in thousands)
                                                                                               
Consolidated Balance Sheet Data:
   Cash, cash equivalents and short-term
     investments.........................       $   18,140      $   69,788     $   47,227      $   36,866     $   29,892
   Working capital.......................           36,021          92,420         80,171          74,776         59,587
   Total assets..........................           46,410         144,796        142,355         134,688        121,740
   Debt obligations, less current portion            2,288           4,236          3,314           3,123          2,648
   Total shareholders' equity............           38,155         127,009        129,845         124,106        108,441



ITEM 7. MANAGEMENT'S  DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

The following  Management's  Discussion and Analysis of Financial  Condition and
Results  of  Operations  should  be read in  conjunction  with our  consolidated
financial  statements  and the notes thereto  included  elsewhere in this Annual
Report on Form 10-K. Our discussion  contains  forward-looking  statements based
upon current  expectations  that involve  risks and  uncertainties,  such as our
plans, objectives and intentions. In some cases,  forward-looking statements can
be  identified  by words  such as  "believe,"  "expect,"  "anticipate,"  "plan,"
"potential," "continue" or similar expressions.  Our actual results could differ
materially  from those  anticipated  in these  forward-looking  statements  as a
result of certain risk factors,  including  those set forth in "Factors That May
Affect  Future  Operating  Results" and  elsewhere in this Annual Report on Form
10-K.  We  believe  it is  important  to  communicate  our  expectations  to our
investors.  However,  there may be events in the future  that we are not able to
predict  accurately  or over which we have no control.  You should be aware that
the  occurrence  of the events  described in these risk factors and elsewhere in
this  Annual  Report on Form 10-K  could  materially  and  adversely  affect our
business,  operating results and financial condition. We disclaim any obligation
to update information contained in any forward-looking statement.

We use a 52/53 week fiscal year ending on the  Saturday  nearest to December 31.
Accordingly, fiscal years 2001, 2002 consisted of 52 weeks and ended on December
29, 2001 and December 28, 2002, respectively, and 2003 consisted of 53 weeks and
ended on January 3, 2004. For  convenience,  our year end is denoted as December
31 in the following discussion.

Overview

We are a pioneer in the field of  metrology  systems for the  semiconductor  and
flat panel  display  manufacturing  industries.  Our  systems  are  designed  to
precisely  measure a wide range of film types  deposited  on  substrates  during
manufacturing  in  order  to  control   manufacturing   processes  and  increase
production yields.

Capital  expenditures by manufacturers of semiconductors and flat panel displays
and  their  suppliers  are  critical  to  our  success.   The  demand  by  these
manufacturers  and  suppliers for products is driven by the current and expected
market demand for (i) semiconductors and products utilizing semiconductors; disk
drives and computers that utilize disk drives;  and (ii) flat panel displays for
use  in  laptop  computers,   pagers,   cell  phones  and  a  variety  of  other
applications.  The  increasing  complexity  of the  manufacturing  processes for
semiconductors and flat panel displays is also an important factor in the demand
for our innovative  metrology  systems.  We anticipate that increased demand for
devices  incorporating  smaller components along with some of our recent product
innovations will result in increased demand for our products.

We derive our revenues from product  sales and services,  which include sales of
accessories  and service to the  installed  base of our  products.  For the year
ended December 31, 2003, we derived 83.1% of our total net revenues from product
sales and 16.9% of our total net revenues from services.

Current Trends

Changing  trends  in the  semiconductor  and flat  panel  display  manufacturing
industries  are  increasing  the  need for  metrology  as a major  component  of
manufacturing systems. These trends include:

o        Adoption of Chemical  Mechanical  Planarization.  Manufacturers now use
         chemical mechanical planarization or CMP to flatten, or planarize, thin
         films  to  obtain  the  ultra-flat   surfaces   required  for  advanced
         photolithography.   In  addition,   the   introduction  of  new  copper
         interconnect  techniques  has  increased  the need  for CMP  processes.
         Accordingly,   semiconductor   manufacturers   are  seeking   metrology
         solutions that can help

                                      II-4


         control  the CMP  process by  precisely  measuring  thin film layers to
         determine exactly when the appropriate thickness has been achieved.

o        Dynamic Etch Time Adjustment. Semiconductor manufacturers are adjusting
         etch time on-the-fly to compensate for measured,  incoming CD variation
         and using feedback to control the lithography  step for the next wafer.
         If not properly  controlled,  variations in the  transistor's  critical
         gate dimension in high-end  microprocessors can cause some chips to run
         at slower speeds, affecting their ability to command premium pricing.

o        Adoption  of New  Types  of  Thin  Film  Materials.  Manufacturers  are
         adopting new processes and  technologies  that increase the  importance
         and  utilization of thin film  metrology  systems.  To achieve  greater
         semiconductor device speed, manufacturers are utilizing copper and new,
         low  dielectric  constant  (low  k)  insulating   materials.   Enhanced
         metrology  solutions  in the  manufacturing  process  are  required  to
         characterize these materials.

o        Copper  Interconnect  Technology.  The need for ever increasing  device
         circuit  speed  coupled  with  lower  power   consumption   has  pushed
         semiconductor  device  manufacturers  to begin the  replacement  of the
         subtractive   aluminum   interconnect  process  with  copper  damascene
         technology.  This new copper processing  technology has driven the need
         for new metrology  techniques such as  non-destructive  laser profiling
         and the use of optical critical  dimension (OCD) technology for control
         of the copper process.

o        Increasing  Complexity of  Semiconductors.  Semiconductors are becoming
         more  complex.  They operate at faster  speeds;  have  smaller  feature
         sizes,  employ  larger dies that contain more  transistors  and utilize
         increasing  numbers  of  manufacturing  process  steps.  The  value  of
         processed wafers and the cost of rework is significantly higher for the
         more complex semiconductors and therefore, manufacturers are seeking to
         use  metrology  solutions to increase  production  yields and limit the
         amount of rework  required on complex  chips.

o        Need for Rapid  Ramp of  Production  Efficiencies.  Competitive  forces
         influencing  semiconductor device manufacturers,  such as price-cutting
         and shorter  product life cycles,  place pressure on  manufacturers  to
         rapidly achieve production  efficiency.  Device manufacturers are using
         metrology  systems  throughout  the fab to  ensure  that  manufacturing
         processes  scale  rapidly,  are  accurate  and  can  be  repeated  on a
         consistent basis.

Critical Accounting Policies

The preparation of our financial statements conforms with accounting  principles
generally accepted in the United States of America, which requires management to
make  estimates  and  judgments  that  affect  the  reported  amounts of assets,
liabilities,  revenue,  expenses  and  related  disclosures  at the  date of our
financial statements.  On an on-going basis,  management evaluates its estimates
including   those  related  to  bad  debts,   inventory   valuations,   warranty
obligations,  income taxes and intangible assets. Management bases its estimates
and  judgments on  historical  experience  and on various other factors that are
believed to be reasonable under the circumstances, the results of which form the
basis for making  judgments  about the carrying values of assets and liabilities
that are not readily apparent from other sources. Actual results may differ from
management's  estimates.   Our  critical  accounting  policies  include  revenue
recognition,  allowance for doubtful  accounts,  inventory  valuation,  warranty
accrual,  income tax assets and  liabilities  including  the  deferred tax asset
valuation allowance,  goodwill and stock based compensation due to the estimates
and judgments involved with each of these items.

Revenue  Recognition  - We  recognize  revenue  when  persuasive  evidence of an
arrangement  exits,  delivery has occurred or services have been  rendered,  the
sales price is fixed or determinable,  and collectibility is reasonably assured.
For  product  sales,  this occurs at the time of shipment if we have met defined
customer  acceptance  experience  levels with both the customer and the specific
type of  equipment.  All  other  product  sales  are  recognized  upon  customer
acceptance.  In  certain  geographical  regions,  where  risk of loss and  title
transfers upon customer  acceptance,  revenue is also  recognized  upon customer
acceptance. Revenue related to spare part sales is recognized on shipment and is
included as part of service  revenue.  Revenue  related  service  contracts  are
recognized  ratably over the period under  contract.  Unearned  maintenance  and
service contract revenue is not significant and is included in deferred revenue.

                                      II-5


Allowance for Doubtful  Accounts - Our allowance for doubtful  accounts is based
primarily on the magnitude and age of outstanding  customer invoices in general,
as well as on the status of collections issues with specific customers. Customer
accounts are reviewed on a continuous basis.

Inventory  Valuation -  Inventories  are stated at the lower of cost  (first-in,
first-out)  or  market.  We track the age of our unused  inventory  on a monthly
basis and if management  determines  that  inventory  has become  obsolete or is
considered  to be excess  inventory,  it will be  written-down  to its estimated
market value.  Management's  determination  to write down inventory is generally
based on such factors as economic  conditions,  expected demand and obsolescence
based on engineering redesigns.

Warranty  Accrual - We sell the majority of our products with a one-year  repair
or replacement  warranty and record a provision for estimated claims at the time
of sale.  The warranty  accrual is generally  based on our  historical  warranty
repair  cost  patterns,  including  the cost of parts and  labor.  The  warranty
accrual is reviewed and updated on a quarterly basis.

Income Tax Assets  and  Liabilities  - We  account  for  income  taxes  based on
Statement of Financial Accounting Standards (SFAS) No. 109 Accounting for Income
Taxes,  whereby  deferred tax assets and  liabilities  must be recognized  using
enacted tax rates for the effect of temporary  differences  between the book and
tax accounting  for assets and  liabilities.  Also,  deferred tax assets must be
reduced by a valuation allowance if it is more likely than not that a portion of
the  deferred  tax asset will not be  realized in the  future.  We evaluate  the
deferred tax assets on a quarterly basis to determine whether or not a valuation
allowance is  appropriate.  Factors used in this  determination  include  future
expected  income and the  underlying  asset or  liability  which  generated  the
temporary tax difference.

Our income tax provision is based on estimates of our effective  income tax rate
for the  year.  The  effective  tax  rate is  generally  estimated  based on the
geographic  distribution of profits,  the tax rates in different regions and the
availability of tax credits.

Goodwill - On January 1, 2002,  we  adopted  SFAS No.  142,  Goodwill  and Other
Intangible  Assets.  Upon  implementation  of  this  Statement,  the  transition
impairment  test was performed as of January 1, 2002, and no impairment loss was
recorded.  SFAS No. 142 requires that goodwill be reviewed at least annually for
impairment.  We elected to test our  goodwill  for  possible  impairment  in the
fourth quarter of 2002. Based upon the results of the annual impairment test, we
recognized a goodwill  impairment  loss of $1,077,000  in the fourth  quarter of
2002.  The fair value of the segment was  estimated  using the  discounted  cash
flows method. As of December 31, 2003, we had no goodwill on our balance sheet.

Stock-Based  Compensation - We account for  stock-based  compensation  issued to
employees  using the intrinsic value method in accordance with the provisions of
Accounting  Principles  Board  Opinion No. 25,  Accounting  for Stock  Issued to
Employees,  as allowed by SFAS No. 123,  Accounting for Stock Based Compensation
as amended by SFAS No. 148, Accounting for Stock Based Compensation - Transition
and  Disclosures,  an Amendment of FASB  Statement No. 123.  Under the intrinsic
value  method,  we do not recognize any  compensation  expense,  as the exercise
price of all stock  options  is equal to the fair  market  value at the time the
options  are  granted.   We  disclose  the  pro  forma  effect  of   recognizing
compensation  expense on stock options  granted to employees in the footnotes to
the consolidated financial statements.

Results of Operations

The following table presents our consolidated statements of operations data as a
percentage of total net revenues for the years ended December 31, 2001, 2002 and
2003:

                                      II-6




                                                                                       Years Ended December 31,
                                                                                --------------------------------------
                                                                                 2001            2002           2003
                                                                                -------         -------        -------
                                                                                                         
Net revenues:
   Product sales........................................................           89.6%           82.6%          83.1%
   Service..............................................................           10.4            17.4           16.9
                                                                                -------         -------        -------
     Total net revenues.................................................          100.0           100.0          100.0
                                                                                -------         -------        -------

Cost and expenses:
   Cost of product sales................................................           37.7            38.1           42.5
   Cost of service......................................................           11.4            16.6           15.9
   Research and development.............................................           22.6            39.6           32.2
   Selling..............................................................           20.0            31.3           27.6
   General and administrative...........................................            8.8            14.7           11.3
   Goodwill impairment..................................................             --             3.1             --
                                                                                -------         -------        -------
     Total cost and expenses............................................          100.5           143.4          129.5
                                                                                -------         -------        -------

Loss from operations....................................................           (0.5)          (43.4)         (29.5)
                                                                                -------         -------        -------

Other income (expense):
   Interest income......................................................            5.4             1.6            1.0
   Interest expense.....................................................           (0.2)           (0.2)          (0.2)
   Other, net...........................................................           (1.1)            0.3            0.9
                                                                                -------         -------        -------
     Total other income, net............................................            4.1             1.7            1.6
                                                                                -------         -------        -------

Income (loss) before provision (benefit) for income taxes...............            3.6           (41.7)         (27.9)
Provision (benefit) for income taxes....................................            1.6           (17.9)          14.1
                                                                                -------         -------        -------

Net income (loss).......................................................            2.0%          (23.8)%        (42.0)%
                                                                                =======         =======        =======


Years ended December 31, 2001, 2002 and 2003

Total net  revenues.  Total net revenues  increased  19.8% from $34.7 million in
2002 to $41.6 million in 2003.  Product sales increased 20.7% from $28.7 million
in 2002 to  $34.6  million  in  2003.  Unit  sales  of  existing  automated  and
integrated  systems  increased  from their 2002  levels.  Additionally,  our new
products,  such as the NanoOCD 9010 integrated  product also  contributed to our
revenues.  The  increase  in product  sales  resulted  from  greater  demand for
semiconductor  process  control  metrology  equipment  and  flat  panel  display
equipment,  particularly  in Asia.  We believe  that this  increased  demand was
attributable primarily to customers adding capacity in semiconductor  production
facilities  as demand for  semiconductors  increased as a result of the economic
recoveries in the U.S. and Japan in 2003.  Service revenue  increased 15.8% from
$6.1 million in 2002 to $7.0 million in 2003. The increase in service revenue is
primarily  attributable  to higher  sales of parts and  services in the U.S. and
Asia in 2003,  which we believe is due in part to recently  increased demand for
semiconductors  at a time when capital  expenditures by equipment  manufacturers
have been  reduced,  resulting  in  increased  utilization  of older  systems by
customers.

Total net revenues  decreased  27.0% from $47.6 million in 2001 to $34.7 million
in 2002.  Product  sales  decreased  32.8% from  $42.7  million in 2001 to $28.7
million in 2002. Unit sales of automated,  integrated and tabletop  systems were
each down from their 2001 levels.  The decrease in product  sales  resulted from
reduced demand for semiconductor  process control  metrology  equipment in 2002,
particularly  in the U.S.  and Asia.  We believe  that this  reduced  demand was
attributable   primarily  to  continued   overcapacity   and  price   pressures,
particularly  for DRAM products,  in the  semiconductor  industry as well as the
continued  economic  slowdown  in the U.S.  and Japan in 2002.  Service  revenue
increased  22.8% from $4.9 million in 2001 to $6.1 million in 2002. The increase
in  service  revenue  is  primarily  attributable  to higher  sales of parts and
services in the U.S. and Asia in 2002, which is partly due to a larger installed
base of systems that have passed their warranty periods. International revenues,
which  include  sales by our  foreign  subsidiaries,  constituted  approximately
64.8%,  69.0%  and  74.8%  of total  net  revenues  for  2001,  2002  and  2003,
respectively.

Cost of product  sales.  Cost of product  sales as a percentage of product sales
increased  from 46.2% in 2002 to 51.1% in 2003 due in part to lower sales prices
on older products and higher costs  associated with an increase in manufacturing


                                     II-7


capacity added to our U.S.  facility.  The increased  manufacturing  capacity is
part of a continuing  strategic plan to internalize  the production of key parts
and  components,  allowing us to have greater  control  over their  development,
delivery,  quality and cost.  Cost of product  sales as a percentage  of product
sales increased from 42.1% in 2001 to 46.2% in 2002 primarily due to lower sales
volumes in 2002  resulting in higher per unit  manufacturing  costs,  along with
increased manufacturing capacity added to our U.S. facility in 2002.

Cost of service.  Cost of service as a percentage of service  revenue  decreased
from  95.2% in 2002 to 94.4% in 2003  primarily  as a result of  higher  service
sales that  exceeded the  increase in the  associated  variable  cost of service
sales in 2003 while our fixed costs remained  relatively stable. Cost of service
as a percentage  of service  revenue  decreased  from 109.6% in 2001 to 95.2% in
2002 primarily as a result of higher service sales,  which exceeded our costs of
service in the United States and Asia.

Research and development.  Research and development expenses decreased 2.7% from
$13.8  million in 2002 to $13.4  million  in 2003 as a result of lower  expenses
associated with lower usage of materials used in the development of new products
in 2003. Research and development expenses increased 27.9% from $10.8 million in
2001 to $13.8  million  in 2002 as a result of  increased  headcount  and higher
expenses for materials used in the  development of new products in 2002, such as
the NanoUDI 9300, the NanoCLP 9010, the NanoOCD 9020 and other products.  We are
committed to the  development of new and enhanced  products and believe that new
product introductions are required for us to maintain our competitive position.

Selling.  Selling  expenses  increased  5.8% from $10.9 million in 2002 to $11.5
million  in 2003  primarily  due to  increased  headcount  of sales and  support
employees  and  related  expenses  particularly  in the Far East in an effort to
fully participate in the growth  opportunities in that region.  Selling expenses
increased 14.1% from $9.5 million in 2001 to $10.9 million in 2002 primarily due
to increased headcount of sales and support employees and an increase in related
expenses  for the purpose of promoting  our  products to existing and  potential
customers.

General and administrative.  General and administrative  expenses decreased 8.1%
from $5.1  million  in 2002 to $4.7  million  in 2003.  This  decrease  resulted
primarily from lower accounting software  implementation  costs in 2003. General
and  administrative  expenses  increased 22.2% from $4.2 million in 2001 to $5.1
million in 2002.  This increase  resulted  primarily from higher legal,  patent,
audit, tax and accounting software implementation costs in 2002.

Goodwill  impairment.  On January 1, 2002, we adopted SFAS No. 142, Goodwill and
Other Intangible Assets. Upon  implementation of this Statement,  the transition
impairment  test was performed as of January 1, 2002, and no impairment loss was
recorded.  SFAS No. 142 requires that goodwill be reviewed at least annually for
impairment.  We elected to test our  goodwill  for  possible  impairment  in the
fourth quarter of 2002. Based upon the results of the annual impairment test, we
recognized a goodwill  impairment  loss of $1,077,000  in the fourth  quarter of
2002. The fair value of the segment was estimated  using a discounted  cash flow
methodology.

Total other  income,  net.  Total other income,  net  decreased  70.1% from $2.0
million in 2001 to $589,000 in 2002  primarily due to lower  interest  income in
2002, resulting from lower investment balances and lower interest rates.

Provision  for income  taxes.  Our effective tax rate was an expense of 50.5% in
2003,  versus a  benefit  of 43.0% in 2002.  The tax  expense  in 2003  resulted
primarily from a provision for income taxes of approximately  $6.0 million which
primarily  represents a charge to record a valuation  allowance against deferred
income tax assets.  The charge was taken as a result of pretax  losses  incurred
over the past several quarters  coupled with  uncertainty  about future expected
income,  making it more likely than not that the deferred tax asset would not be
realized.  Our  effective  income  tax  benefit  rate was  43.0% in 2002,  which
exceeded the domestic  statutory rate due primarily to state income tax benefits
and the utilization of tax credits. Our effective income tax rate decreased from
44.9% in 2001 to 43.0% in 2002  primarily due to profits  earned by our Japanese
subsidiary  that could not be offset against losses from our other  subsidiaries
in 2001. The effective  income tax rate in 2001 exceeded the domestic  statutory
rate due  primarily to a foreign tax  provision  higher than rates in the United
States  and  changes  in  the  valuation   allowance  partially  offset  by  the
realization of foreign sales corporation benefit.

                                      II-8


Liquidity and Capital Resources

At December 31, 2003, our cash and cash  equivalents and short-term  investments
totaled  $29.9  million  compared to $36.9  million at December 31, 2002.  These
funds are invested  primarily in U.S.  Treasury  Bills.  Our working  capital of
$59.6 million at December 31, 2003  decreased from $74.8 million at December 31,
2002. We believe that our working capital,  including cash, cash equivalents and
short-term  investments,  will be  sufficient to meet our needs at least through
the next twelve months.

Operating activities used $7.1 million in cash in 2001, $8.3 million in 2002 and
$6.2 million in 2003.  The cash usage in 2002 and 2003 resulted  primarily  from
the net loss in those years offset by the effect of non-cash  expenses.  We also
experienced  higher  levels  of  accounts  receivables  in 2003  resulting  from
increased  sales  towards  the  end of  2003.  The use of  cash  from  operating
activities in 2001 resulted  primarily  from net income offset by lower accounts
receivable attributable to lower sales levels during the previous year.

Investing  activities provided $36.3 million of cash in 2001, used $31.7 million
of cash in 2002 and  provided  $6.0  million of cash in 2003.  The timing of the
purchase and initial maturities of U.S. Treasury Bills in 2002 resulted in their
classification   as  cash  and  cash   equivalents   instead  of  as  short-term
investments. Our capital expenditures, net of retirements, were $13.2 million in
2001, $2.8 million in 2002 and $990,000 in 2003.  These  expenditures  were used
primarily to continue the process of internalizing our manufacturing capacity in
the  United  States  through,  for  example,  the  purchase  of a machine  shop,
machining  equipment  and  improvements  to our building.  This  internalization
process is nearing completion.  When our  internalization  process is completed,
the amount of cash needed for capital expenditures should decrease.

Financing  activities  provided  cash of $501,000 in 2001,  $998,000 in 2002 and
$655,000 in 2003  primarily  resulting  from the sale of shares  under our stock
option plans,  offset to some extent by the net repayment of debt obligations by
our Japanese subsidiary.

We have  evaluated  and will continue to evaluate the  acquisition  of products,
technologies  or  businesses  that  are  complementary  to our  business.  These
activities may result in product and business investments,  which may affect our
cash position and working capital balances.

The following table  summarizes our contractual  cash obligations as of December
31, 2003, and the effect such  obligations are expected to have on liquidity and
cash flow in future periods.



                                            Less than                           More than
                                 Total       1 Year      1-3 Years   3-5 Years   5 Years
                                 -----       ------      ---------   ---------   -------
                                                                  
Debt obligations ..........      $3,805      $1,157      $1,107      $  778      $  763
Operating leases ..........         240         136          85          17           2
Other long-term liabilities         133          --         133          --          --


We have no off-balance sheet financing arrangements.

Recent Accounting Pronouncements

We operate in multiple  locations  domestically  and  internationally.  As such,
certain facilities are leased under operating lease agreements.

In April 2003, the Financial  Accounting Standards Board (FASB) issued SFAS 149,
Amendment of Statement 133 on  Derivative  Instruments  and Hedging  Activities,
which amends and clarifies  accounting  for  derivative  instruments,  including
certain  derivative  instruments  embedded in other  contracts,  and for hedging
activities  under SFAS 133,  Accounting for Derivative  Instruments  and Hedging
Activities.

SFAS 149 was  effective for  contracts  entered into or modified  after June 30,
2003, except as noted below, and for hedging relationships designated after June
30, 2003. The guidance was to be applied  prospectively.  The provisions of

                                      II-9


SFAS 149 that relate to SFAS 133  Implementation  Issues that were effective for
fiscal  quarters  that began  prior to June 15,  2003  continue to be applied in
accordance with their  respective  effective dates. The adoption of SFAS 149 did
not have a material effect on our consolidated  financial  position,  results of
operations or cash flows.

In December  2002,  the FASB issued SFAS No.  148,  Accounting  for  Stock-Based
Compensation  - Transition and  Disclosures,  an Amendment of FASB Statement No.
123. This Statement provides alternative methods of transition for companies who
voluntarily  change to the fair value-based method of accounting for stock-based
employee  compensation in accordance to SFAS No. 123, Accounting for Stock-Based
Compensation  and enhances  the  disclosure  requirements.  This  statement  was
effective upon its issuance.

We continue to account for  stock-based  compensation  using the intrinsic value
method in accordance with the provisions of Accounting  Principles Board Opinion
No. 25, Accounting for Stock Issued to Employees, elected under SFAS No. 123, as
amended.  As a result, the adoption of this Statement did not have any impact on
our consolidated financial statements. See additional information on stock-based
compensation in Note 1 of the Notes to Consolidated Financial Statements.

In November 2002, the FASB issued Interpretation No. 45, Guarantor's  Accounting
and Disclosure  Requirements for Guarantees,  Including  Indirect  Guarantees of
Indebtedness  of  Others  (FIN 45).  FIN 45  requires  a  guarantor  to  include
disclosures of certain obligations,  and if applicable,  at the inception of the
guarantee,  recognize  a  liability  for the fair  value  of  other  obligations
undertaken  in  issuing  a  guarantee.   The  initial  recognition  and  initial
measurement  provisions  apply on a prospective  basis to  guarantees  issued or
modified  after  December  31,  2002 and did not have a  material  impact on our
consolidated financial statements. The applicable disclosures have been made.

We  adopted  Emerging  Issues  Task Force  ("EITF")  Issue No.  00-21,  "Revenue
arrangements with Multiple Deliverables",  which requires companies to determine
whether an arrangement  involving multiple  deliverables  contains more than one
unit of accounting.  In applying EITF Issue No. 00-21, revenue arrangements with
multiple  deliverables should be divided into separate units of accounts, if the
deliverables in the arrangement meet certain criteria. Arrangement consideration
should  be  allocated  among the  separate  units of  accounting  based on their
relative fair values. This issue was effective for revenue  arrangements entered
into in fiscal periods beginning after June 15, 2003. There was no impact on our
results of operations  or financial  position as a result of adopting EITF Issue
No. 00-21.

The FASB issued  Interpretation  No. 46 ("FIN 46"),  "Consolidation  of Variable
Interest  Entities," in January  2003,  and a revised  interpretation  of FIN 46
("FIN  46-R") in  December  2003.  FIN 46  requires  certain  variable  interest
entities ("VIEs") to be consolidated by the primary beneficiary of the entity if
the  equity  investors  in the  entity  do not  have  the  characteristics  of a
controlling  financial interest or do not have sufficient equity at risk for the
entity to finance  its  activities  without  additional  subordinated  financial
support from other parties.  The provisions of FIN 46 are effective  immediately
for all  arrangements  entered into after  January 31, 2003.  Since  January 31,
2003,  we have not  invested in any  entities we believe are  variable  interest
entities for which  Nanometrics is the primary  beneficiary.  We are required to
adopt the provisions of FIN 46-R for those arrangements in the second quarter of
fiscal 2004.  For  arrangements  entered into prior to February 1, 2003,  we are
required  to adopt the  provisions  of FIN 46-R in the first  quarter  of fiscal
2004.  We do not  expect  the  adoption  of FIN  46-R to have an  impact  on our
financial position, results of operations or cash flows.

In May 2003,  the FASB  issued SFAS No. 150,  Accounting  for Certain  Financial
Instruments with  Characteristics of both Liabilities and Equity, which requires
that  certain  financial  instruments  be  presented  as  liabilities  that were
previously  presented as equity or as temporary equity. Such instruments include
mandatory  redeemable  preferred  and common  stock,  and  certain  options  and
warrants.  SFAS No. 150 is effective for financial  instruments  entered into or
modified  after May 31, 2003 and was  effective  at the  beginning  of the first
interim period  beginning after June 15, 2003. In November 2003, the FASB issued
FASB  Staff  Position  ("FSP")  No.  150-3,  Effective  Date,  Disclosures,  and
Transition for Mandatorily Redeemable Financial Instruments of Certain Nonpublic
Entities and Certain Mandatorily Redeemable  Noncontrolling Interests under SFAS
No. 150, which defers the effective date for various provisions of SFAS No. 150.
We believe that we have properly  classified  and measured in our balance sheets
and disclosed in our consolidated  financial  statements  financial  instruments
with characteristics of both liabilities and equity.

                                     II-10


Factors That May Affect Future Operating Results

You should carefully consider the risks described below together with all of the
other  information  included in this Annual Report on Form 10-K before making an
investment  decision.  The risks and  uncertainties  described below are not the
only ones that we face.  If any of the  following  risks  actually  occurs,  our
business,  financial  condition or operating  results  could be harmed.  In such
case,  the trading price of our common stock could  decline,  and you could lose
all or part of your investment.

Risks Related to Our Business

         Cyclicality in the semiconductor and flat panel display  industries has
         led to  substantial  decreases  in demand for our  systems and may from
         time to time continue to do so.

         Our operating  results have varied  significantly  for period to period
         due to the cyclical nature of the  semiconductor and flat panel display
         industries.  The  majority  of our  business  depends  upon the capital
         expenditures of semiconductor device and equipment manufacturers. These
         manufacturers'  capital expenditures,  in turn, depend upon the current
         and  anticipated  market demand for  semiconductors  and products using
         semiconductors.   The  semiconductor   industry  is  cyclical  and  has
         historically experienced periodic downturns. These downturns have often
         resulted  in  substantial  decreases  in the demand  for  semiconductor
         manufacturing  equipment,  including  metrology systems.  We have found
         that the resulting decrease in capital  expenditures has typically been
         more  pronounced  than the downturn in  semiconductor  device  industry
         revenues. We expect the cyclical nature of the semiconductor  industry,
         and therefore,  our business,  to continue in the  foreseeable  future.
         Currently,  the semiconductor industry may be emerging from a downturn,
         which has existed for the past few years. Should this trend reverse and
         the  downturn  resume,  our business  and results of  operations  would
         suffer.

         Because we derive a  significant  portion of our revenues from sales in
         Asia, our sales and results of operations  could be adversely  affected
         by the instability of Asian economies.

         Our sales to customers in Asian markets represented approximately 63.3%
         and  72.7% of our total net  revenues  in 2002 and 2003,  respectively.
         Countries  in the Asia  Pacific  region,  including  Japan,  Korea  and
         Taiwan,  each of  which  accounted  for a  significant  portion  of our
         business in that region,  have experienced  general economic weaknesses
         over  the  past  year,  which  has  adversely  affected  our  sales  to
         semiconductor manufacturers located in these regions and could harm our
         sales in future periods.

         We depend on Applied Materials and other OEM suppliers for sales of our
         integrated  metrology systems, and the loss of Applied Materials or any
         of our other OEM suppliers as a customer could harm our business.

         We  believe  that  sales of  integrated  metrology  systems  will be an
         important source of future revenues.  Sales of our integrated metrology
         systems   depend  upon  the  ability  of  Applied   Materials  to  sell
         semiconductor  equipment products that include our metrology systems as
         components. If Applied Materials is unable to sell such products, or if
         Applied  Materials  chooses to focus its  attention on products that do
         not integrate  our systems,  our business  could suffer.  If we were to
         lose Applied  Materials  as a customer  for any reason,  our ability to
         realize sales from integrated  metrology systems would be significantly
         diminished, which would harm our business.

         Our largest customers account for a substantial portion of our revenue,
         and our  revenue  would  materially  decline  if one or  more of  these
         customers  were to  purchase  significantly  fewer of our systems or if
         they delayed or cancelled a large order.

         Historically, a significant portion of our revenues in each quarter and
         each year has been  derived  from sales to a  relatively  few number of
         customers,  and we  expect  this  trend to  continue.  There are only a
         limited number of large companies  operating in the  semiconductor  and
         flat panel  display  industries.  Accordingly,  we expect  that we will
         continue  to  depend  on a  small  number  of  large  customers  for  a
         significant  portion  of our  revenues  for at least  the next  several
         years. If any of our key customers were to purchase significantly fewer
         systems,  or if a large order were delayed or  cancelled,  our revenues
         would  significantly  decline.  In  2003,  sales to  Applied  Materials
         accounted

                                     II-11


         for  15.4%  and  sales to Hynix  accounted  for  12.0% of our total net
         revenues,  respectively.  In 2002, sales to Applied Materials accounted
         for  13.8%  and  sales to TSMC  accounted  for  10.9% of our  total net
         revenues, respectively.

         The success of our product  development  efforts depends on our ability
         to   anticipate   market   trends  and  the  price,   performance   and
         functionality  requirements of semiconductor device  manufacturers.  In
         order to anticipate  these trends and ensure that critical  development
         projects  proceed  in  a  coordinated   manner,  we  must  continue  to
         collaborate  closely with our  customers.  Our  relationships  with our
         customers  provide us with  access to  valuable  information  regarding
         industry   trends,   which  enables  us  to  better  plan  our  product
         development  activities.  If our current  relationships  with our large
         customers  are  impaired,  or if  we  are  unable  to  develop  similar
         collaborative relationships with important customers in the future, our
         long-term ability to produce  commercially  successful systems could be
         adversely affected.

         We are highly  dependent on international  sales and operations,  which
         exposes us to foreign political and economic risks.

         Sales to customers in foreign  countries  accounted  for  approximately
         69.0%  and  74.8%  of  our  total  net   revenues  in  2002  and  2003,
         respectively.  We maintain facilities in Japan and Korea. We anticipate
         that  international  sales will  continue to account for a  significant
         portion  of our  revenues.  International  sales and  operations  carry
         inherent  risks  such as:  regulatory  limitations  imposed  by foreign
         governments,  obstacles to the protection of our intellectual property,
         fluctuations  in  currency  exchange  rates,  political,  military  and
         terrorism  risks,  disruptions or delays in shipments caused by customs
         brokers or other government agencies,  unexpected changes in regulatory
         requirements,  tariffs,  customs,  duties  and  other  trade  barriers,
         difficulties  in  staffing  and  managing   foreign   operations,   and
         potentially  adverse tax  consequences  resulting  from  changes in tax
         laws.

         If any of these risks materialize and we are unable to manage them, our
         international sales and operations would suffer.

         Our  quarterly  operating  results have varied in the past and probably
         will  continue to vary  significantly  in the future,  which will cause
         volatility in our stock price.

         Our quarterly  operating results have varied  significantly in the past
         and are likely to vary in the future,  which volatility could cause our
         stock price to  decline.  Some of the factors  that may  influence  our
         operating  results and  subject  our stock to extreme  price and volume
         fluctuations include:

         o        changes in customer demand for our systems;

         o        economic  conditions  in  the  semiconductor  and  flat  panel
                  display industries;

         o        the  timing,  cancellation  or delay of  customer  orders  and
                  shipments;

         o        market acceptance of our products and our customers' products;

         o        competitive pressures on product prices and changes in pricing
                  by our customers or suppliers;

         o        the timing of new product  announcements  and product releases
                  by us or our competitors and our ability to design,  introduce
                  and  manufacture  new products on a timely and  cost-effective
                  basis;

         o        the  timing  of  acquisitions   of  businesses,   products  or
                  technologies;

         o        the  levels  of our fixed  expenses,  including  research  and
                  development   costs   associated  with  product   development,
                  relative to our revenue levels; and

         o        fluctuations in foreign currency exchange rates,  particularly
                  the Japanese yen.

         If our operating  results in any period fall below the  expectations of
         securities analysts and investors, the market price of our common stock
         would likely decline.

                                     II-12


         We obtain  some of the  components  and  subassemblies  included in our
         systems from a single source or a limited  group of suppliers,  and the
         partial  or  complete  loss  of  one of  these  suppliers  could  cause
         production delays and significant loss of revenue.

         We  rely  on  outside  vendors  to  manufacture   many  components  and
         subassemblies. Certain components, subassemblies and services necessary
         for the manufacture of our systems are obtained from a sole supplier or
         limited  group of suppliers.  We do not maintain any  long-term  supply
         agreements with any of our suppliers. We have entered into arrangements
         with  J.A.  Woollam  Company  for  the  purchase  of the  spectroscopic
         ellipsometer   component   incorporated  in  our  advanced  measurement
         systems.  Our  reliance  on a sole  or a  limited  group  of  suppliers
         involves several risks,  including the following:

         o        we may be  unable to obtain  an  adequate  supply of  required
                  components;

         o        we have reduced  control over pricing and the timely  delivery
                  of components and subassemblies; and

         o        our  suppliers  may  be  unable  to  develop   technologically
                  advanced products to support our growth and development of new
                  systems.

         Some of our  suppliers  have  relatively  limited  financial  and other
         resources. Because the manufacturing of certain of these components and
         subassemblies  involves  extremely  complex processes and requires long
         lead  times,  we may  experience  delays  or  shortages  caused  by our
         suppliers.  If we were forced to seek alternative  sources of supply or
         to manufacture such components or subassemblies internally, we could be
         forced to redesign our systems, which could cause production delays and
         prevent us from  shipping our systems to  customers on a timely  basis.
         Any inability to obtain adequate deliveries from our suppliers,  or any
         other  circumstance  that  would  restrict  our  ability  to  ship  our
         products,  could  damage  relationships  with  current and  prospective
         customers, harm our business and result in significant loss of revenue.

         Our  current  and  potential  competitors  have  significantly  greater
         resources than we do, and increased  competition  could impair sales of
         our products.

         We  operate  in the  highly  competitive  semiconductor  and flat panel
         display  industries  and face  competition  from a number of companies,
         many of  which  have  greater  financial,  engineering,  manufacturing,
         marketing and customer support  resources than we do. As a result,  our
         competitors  may be able to respond  more  quickly  to new or  emerging
         technologies or market  developments by devoting  greater  resources to
         the  development,  promotion  and sale of products,  which could impair
         sales of our products.  Moreover, there has been merger and acquisition
         activity  among  our  competitors  and  potential  competitors.   These
         transactions by our  competitors and potential  competitors may provide
         them with a competitive  advantage  over us by enabling them to rapidly
         expand  their  product  offerings  and service  capabilities  to meet a
         broader  range of customer  needs.  Many of our customers and potential
         customers in the  semiconductor  and flat panel display  industries are
         large  companies  that  require  global  support  and service for their
         metrology systems.  Some of our larger or more  geographically  diverse
         competitors might be better equipped to provide this global support.

         Variations  in the  amount of time it takes for us to sell our  systems
         may cause fluctuations in our operating results,  which could adversely
         affect our stock price.

         Variations  in the length of our sales  cycles could cause our revenues
         to fluctuate widely from period to period. Our customers generally take
         long  periods of time to  evaluate  our  metrology  systems.  We expend
         significant  resources  educating  and  providing  information  to  our
         prospective  customers  regarding the uses and benefits of our systems.
         The length of time that it takes for us to complete a sale depends upon
         many factors, including:

         o        the  efforts  of our  sales  force and our  independent  sales
                  representatives and distributors;

         o        the complexity of the customer's metrology needs;

         o        the internal technical  capabilities and sophistication of the
                  customer;

         o        the customer's budgetary constraints; and

                                     II-13


         o        the  quality  and  sophistication  of the  customer's  current
                  processing equipment.

         Because of the number of factors  influencing  the sales  process,  the
         period  between our  initial  contact  with a customer  and the time at
         which we  recognize  revenue  from  that  customer,  if at all,  varies
         widely. Our sales cycles, including the time it takes for us to build a
         product to customer  specifications after receiving an order, typically
         range from three to six months.  Occasionally  our sales  cycles can be
         much longer, particularly with customers in Asia who may require longer
         evaluation  periods.  During the sales  cycles,  we commit  substantial
         resources to our sales efforts in advance of receiving any revenue, and
         we may never  receive  any  revenue  from a customer  despite our sales
         efforts.

         If we do  complete a sale,  customers  often  purchase  only one of our
         systems and then evaluate its  performance for a lengthy period of time
         before purchasing  additional systems. The purchases are generally made
         through purchase orders rather than through  long-term  contracts.  The
         number  of  additional  products  that a  customer  purchases,  if any,
         depends on many factors,  including a customer's capacity requirements.
         The period  between a customer's  initial  purchase and any  subsequent
         purchases is unpredictable  and can vary from three months to a year or
         longer.   Variations   in  the  length  of  this  period   could  cause
         fluctuations in our operating results, which could adversely affect our
         stock price.

         Relatively  small  fluctuations  in our  system  prices  may  cause our
         operating results to vary significantly each quarter.

         During any  quarter,  a  significant  portion of our revenue is derived
         from the sale of a relatively  small number of systems.  Our  automated
         metrology  systems  range  in  price  from  approximately  $200,000  to
         $900,000 per system,  our integrated  metrology  systems range in price
         from  approximately  $80,000 to  $300,000  per system and our  tabletop
         metrology systems range in price from approximately $50,000 to $200,000
         per  system.  Accordingly,  a small  change  in the  number or types of
         systems that we sell could cause  significant  changes in our operating
         results.

         We depend on orders that are received and shipped in the same  quarter,
         and therefore our results of operations  may be subject to  significant
         variability from quarter to quarter.

         Our net sales in any given quarter  depend upon a combination of orders
         received in that  quarter for  shipment in that  quarter and  shipments
         from  backlog.  Our backlog at the  beginning  of each quarter does not
         include all systems sales needed to achieve expected  revenues for that
         quarter. Consequently, we are dependent on obtaining orders for systems
         to be shipped in the same quarter that the order is received. Moreover,
         customers may reschedule shipments,  and production  difficulties could
         delay shipments.  Accordingly,  we have limited  visibility into future
         product  shipments,  and our  results of  operations  may be subject to
         significant variability from quarter to quarter.

         Because of the high cost of switching equipment vendors in our markets,
         it  is  sometimes  difficult  for  us to  attract  customers  from  our
         competitors even if our metrology systems are superior to theirs.

         We believe that once a semiconductor or flat panel display customer has
         selected one vendor's  metrology system,  the customer generally relies
         upon that system and, to the extent possible, subsequent generations of
         the  same  vendor's  system,  for the life of the  application.  Once a
         vendor's  metrology  system has been  installed,  a customer must often
         make substantial technical modifications and may experience downtime in
         order to switch to  another  vendor's  metrology  system.  Accordingly,
         unless our systems offer performance or cost advantages that outweigh a
         customer's  expense of switching  to our systems,  it will be difficult
         for us to  achieve  significant  sales from that  customer  once it has
         selected another vendor's system for an application.

         If we deliver systems with defects, our credibility will be harmed, the
         sales and market  acceptance  of our systems will decrease and we could
         expend significant capital and resources as a result of such defects.

         Our systems are complex and have occasionally contained errors, defects
         and bugs when introduced. If we deliver systems with errors, defects or
         bugs,  our  credibility  and the  market  acceptance  and  sales of our
         systems  would be  harmed.  Further,  if our  systems  contain  errors,
         defects or bugs, we may be required to expend  significant  capital and

                                     II-14


         resources  to  alleviate  such  problems.  Defects  could  also lead to
         product liability as a result of product liability  lawsuits against us
         or against our customers.  We have agreed to indemnify our customers in
         some  circumstances  against  liability  arising  from  defects  in our
         systems. In the event of a successful product liability claim, we could
         be  obligated  to pay  damages  significantly  in excess of our product
         liability insurance limits.

         If we are not  successful  in  developing  new and  enhanced  metrology
         systems we will likely lose market share to our competitors.

         We operate in an  industry  that is subject to  technological  changes,
         changes  in  customer  demands  and the  introduction  of  new,  higher
         performance  systems with short product life cycles. To be competitive,
         we must  continually  design,  develop and introduce in a timely manner
         new metrology  systems that meet the  performance  and price demands of
         semiconductor and flat panel display  manufacturers  and suppliers.  We
         must also  continue to refine our  current  systems so that they remain
         competitive.   We  may  experience   difficulties   or  delays  in  our
         development  efforts  with  respect  to new  systems,  and  we may  not
         ultimately be successful in developing  them. Any significant  delay in
         releasing new systems could  adversely  affect our  reputation,  give a
         competitor a first-to-market advantage or cause a competitor to achieve
         greater market share.

         Lack of market  acceptance  for our new products may affect our ability
         to generate revenue and may harm our business.

         We have recently  introduced  several new products to market  including
         the Nano OCD/DUV 9010, the Nanometrics  9300 and the Nano OCD 9010M. We
         have invested  substantial  time and resources into the  development of
         the products. However, we cannot accurately predict the future level of
         acceptance of our new products by our  customers.  As a result,  we may
         not be able  to  generate  anticipated  revenue  from  sales  of  these
         products.  While we  anticipate  that our new  products  will become an
         increasingly  larger  component of our business,  their failure to gain
         acceptance  with our  customers  could  materially  harm our  business.
         Additionally,  if our new  products  do  gain  market  acceptance,  our
         ability to sell our  existing  products  may be  impeded.  As a result,
         there can be no assurance that the  introduction of these products will
         be  commercially  successful  or that  these  products  will  result in
         significant additional revenues or improved operating margins in future
         periods.

         Successful  infringement  claims  by  third  parties  could  result  in
         substantial  damages,  lost  product  sales  and the loss of  important
         intellectual property rights by us.

         Our  commercial  success  depends  in  part  on our  ability  to  avoid
         infringing  or  misappropriating  patents or other  proprietary  rights
         owned by third parties. From time to time we may receive communications
         from third parties  asserting  that our  metrology  systems may contain
         design  features,  which are claimed to  infringe on their  proprietary
         rights.  There can be no assurance that our new or current  products do
         not infringe any valid intellectual property rights.

         Our  intellectual  property  may be  infringed  upon by  third  parties
         despite  our efforts to protect it,  which  could  threaten  our future
         success and  competitive  position and  adversely  affect our operating
         results.

         Our future  success and  competitive  position  depend in part upon our
         ability to obtain and maintain proprietary technology for our principal
         product  families,  and we rely, in part,  on patent,  trade secret and
         trademark  law to protect  that  technology.  If we fail to  adequately
         protect  our  intellectual   property,   it  will  be  easier  for  our
         competitors  to sell  competing  products.  We own or have  licensed  a
         number of patents  relating to our  metrology  systems,  and have filed
         applications  for  additional  patents.   Any  of  our  pending  patent
         applications  may be rejected,  and we may not in the future be able to
         develop  additional  proprietary  technology  that  is  patentable.  In
         addition, the patents we do own or that have been issued or licensed to
         us may not provide us with competitive advantages and may be challenged
         by third parties. Third parties may also design around these patents.

         In addition to patent protection,  we rely upon trade secret protection
         for our  confidential  and proprietary  information and technology.  We
         routinely  enter into  confidentiality  agreements  with our employees.
         However, in the event that these agreements may be breached, we may not
         have adequate  remedies.  Our confidential and proprietary

                                     II-15


         information and technology might also be independently  developed by or
         become otherwise known to third parties. We may be required to initiate
         litigation in order to enforce any patents issued to or licensed by us,
         or to  determine  the scope or  validity of a third  party's  patent or
         other proprietary  rights. Any such litigation,  regardless of outcome,
         could  be  expensive  and  time  consuming,  and  could  subject  us to
         significant  liabilities  or require us to  re-engineer  our product or
         obtain  expensive  licenses  from  third  parties,  any of which  would
         adversely affect our business and operating results.

         We must  attract  and  retain  key  personnel  with  relevant  industry
         knowledge to help support our future growth.

         Our  success  depends  to  a  significant  degree  upon  the  continued
         contributions of our key management,  engineering, sales and marketing,
         customer support,  finance and manufacturing personnel. We do not enter
         into  employment  contracts with any of our key personnel.  The loss of
         any of these key  personnel,  who would be difficult to replace,  could
         harm our business and operating results.  To support our future growth,
         we will need to attract  and  retain  additional  qualified  employees.
         Competition  for such personnel in our industry is ongoing,  and we may
         not be successful in attracting and retaining qualified employees.

         We  manufacture  all of our systems at a limited  number of facilities,
         and any  prolonged  disruption in the  operations  of those  facilities
         could reduce our revenues.

         We produce all of our systems in our manufacturing  facilities  located
         in  Milpitas,  California  and  through our  subsidiaries  in Japan and
         Korea.  Our  manufacturing  processes  are highly  complex  and require
         sophisticated, costly equipment and specially designed facilities. As a
         result, any prolonged disruption in the operations of our manufacturing
         facilities  could  seriously  harm our ability to satisfy our  customer
         order deadlines.  A significant portion of our operations is located in
         Japan and  Korea,  which  may be  subject  to  regional  political  and
         economic instability.

         If we choose to acquire new and complementary  businesses,  products or
         technologies instead of developing them ourselves,  we may be unable to
         complete  these  acquisitions  or  may  not  be  able  to  successfully
         integrate an acquired business in a cost-effective  and  non-disruptive
         manner.

         Our success  depends on our ability to continually  enhance and broaden
         our product  offerings in response to changing  technologies,  customer
         demands and competitive  pressures.  To achieve this, from time to time
         we have acquired  complementary  businesses,  products, or technologies
         instead of  developing  them  ourselves  and may choose to do so in the
         future. We do not know if we will be able to complete any acquisitions,
         or  whether  we will be able to  successfully  integrate  any  acquired
         business,   operate  it  profitably   or  retain  its  key   employees.
         Integrating  any business,  product or technology that we acquire could
         be  expensive  and time  consuming,  disrupt our ongoing  business  and
         distract  our  management.   In  addition,  in  order  to  finance  any
         acquisitions,  we may be required  to raise  additional  funds  through
         public or private equity or debt financings. In that event, we could be
         forced to obtain  financing on terms that are not  favorable to us and,
         in the case of an equity  financing,  that  result in  dilution  to our
         shareholders.  If we are unable to  integrate  any  acquired  entities,
         products or technologies effectively, our business will suffer.

         Our efforts to protect our intellectual  property may be less effective
         in some foreign countries where intellectual property rights are not as
         well protected as in the United States.

         In 2002 and  2003,  69.0%  and  74.8%,  respectively,  of our total net
         revenues  were derived  from sales to  customers in foreign  countries,
         including certain  countries in Asia, such as Taiwan,  Korea and Japan.
         The laws of some  foreign  countries  do not  protect  our  proprietary
         rights to as great an extent as do the laws of the United  States,  and
         many U.S. companies have encountered substantial problems in protecting
         their proprietary rights against infringement in such countries.  If we
         fail  to  adequately   protect  our  intellectual   property  in  these
         countries,  it would be easier for our  competitors  to sell  competing
         products in those countries.

                                     II-16


         Continuing economic and political instability could affect our business
         and results of operations.

         The ongoing threat of terrorism  targeted at the United States or other
         regions  where we conduct  business  increases the  uncertainty  in our
         markets  and the  economy in  general.  This  uncertainty  is likely to
         result in continued economic stagnation, which would harm our business.
         In addition,  increased  international political instability may hinder
         our ability to do business by increasing our costs of  operations.  For
         example,  our transportation  costs,  insurance costs and sales efforts
         may become more expensive as a result of  geopolitical  tension.  These
         tensions may also  negatively  affect our suppliers and  customers.  If
         this  international  economic and  political  instability  continues or
         increases, our business and results of operations could be harmed.

ITEM 7A. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

We are exposed to  financial  market  risks,  which  include  changes in foreign
currency  exchange rates and interest rates. We do not use derivative  financial
instruments.  Instead,  we actively  manage the  balances of current  assets and
liabilities  denominated in foreign currencies to minimize currency  fluctuation
risk. As a result, a hypothetical  10% change in the foreign  currency  exchange
rates at  December  31,  2002 and 2003 would not have a  material  impact on our
results of operations.  Our investments in marketable  securities are subject to
interest rate risk. However,  due to the short-term nature of these investments,
interest  rate  changes  would  not have a  material  impact  on their  value at
December  31,  2002 and  2003.  We also have  fixed  rate yen  denominated  debt
obligations  in Japan that have no interest  rate risk. At December 31, 2002 and
2003, our total debt obligation was $3.9 million and $3.8 million, respectively,
with a long-term  portion of $3.1  million  and $2.6  million,  respectively.  A
hypothetical  10% change in interest rates at December 31, 2003 would not have a
material impact on our results of operations.

                                     II-17


ITEM 8. CONSOLIDATED FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

The  information  required  by Item 8 of  Form  10-K  is  presented  here in the
following order:


                   INDEX TO CONSOLIDATED FINANCIAL STATEMENTS



                                                                                                               Page
                                                                                                               ----
                                                                                                              
Independent Auditors' Report.......................................................................           II-19

Consolidated Balance Sheets........................................................................           II-20

Consolidated Statements of Operations..............................................................           II-21

Consolidated Statements of Shareholders' Equity and Comprehensive Income (Loss)....................           II-22

Consolidated Statements of Cash Flows..............................................................           II-23

Notes to Consolidated Financial Statements.........................................................           II-24


                                     II-18


INDEPENDENT AUDITORS' REPORT

To the Board of Directors and Shareholders
of Nanometrics Incorporated:

We have audited the  accompanying  consolidated  balance  sheets of  Nanometrics
Incorporated and subsidiaries  (the "Company") as of December 31, 2002 and 2003,
and the related consolidated statements of operations,  shareholders' equity and
comprehensive  income (loss),  and cash flows for each of the three years in the
period ended December 31, 2003. Our audits also included the financial statement
schedule  listed in Item  15(a)(2).  These  financial  statements  and financial
statement  schedule are the  responsibility  of the  Company's  management.  Our
responsibility  is to  express  an opinion  on these  financial  statements  and
financial statement schedule based on our audits.

We conducted our audits in accordance with auditing standards generally accepted
in the  United  States of  America.  Those  standards  require  that we plan and
perform the audit to obtain  reasonable  assurance  about  whether the financial
statements are free of material misstatement.  An audit includes examining, on a
test basis,  evidence  supporting  the amounts and  disclosures in the financial
statements.  An audit also includes assessing the accounting principles used and
significant  estimates  made by  management,  as well as evaluating  the overall
financial  statement  presentation.   We  believe  that  our  audits  provide  a
reasonable basis for our opinion.

In our opinion,  such consolidated  financial  statements present fairly, in all
material  respects,  the  financial  position of  Nanometrics  Incorporated  and
subsidiaries  as of  December  31,  2002  and  2003,  and the  results  of their
operations  and their cash flows for each of the three years in the period ended
December 31, 2003 in conformity with accounting principles generally accepted in
the United States of America.  Also, in our opinion,  such  financial  statement
schedule,  when  considered  in  relation  to the basic  consolidated  financial
statements  taken as a whole,  presents  fairly  in all  material  respects  the
information set forth therein.

As discussed in Note 1 to the financial statements,  in 2002 the Company changed
its method of accounting for goodwill and other intangible  assets to conform to
Statement  of  Financial  Accounting  Standards  No.  142,  "Goodwill  and Other
Intangible Assets."

Deloitte & Touche LLP

San Jose, California
March 29, 2004


                                     II-19


                            NANOMETRICS INCORPORATED
                           CONSOLIDATED BALANCE SHEETS
                      (In thousands, except share amounts)




                                                                                               December 31,
                                                                                    ---------------------------------
                                                                                       2002                  2003
                                                                                    -----------           -----------
                                                                                                    
                                                          ASSETS
Current assets:
   Cash and cash equivalents..............................................          $     7,967           $     7,949
   Short-term investments.................................................               28,899                21,943
   Accounts receivable, net of allowances of $566 and $576 in 2002 and
      2003, respectively..................................................                9,021                14,522
   Inventories............................................................               25,847                24,264
   Deferred income taxes..................................................                6,840                    --
   Prepaid expenses and other.............................................                2,803                 1,015
                                                                                    -----------           -----------

      Total current assets................................................               81,377                69,693

Property, plant and equipment, net........................................               50,050                49,738
Intangible assets.........................................................                1,748                 1,322
Other assets..............................................................                1,513                   987
                                                                                    -----------           -----------

      Total assets........................................................          $   134,688           $   121,740
                                                                                    ===========           ===========

                                           LIABILITIES AND SHAREHOLDERS' EQUITY
Current liabilities:
   Accounts payable.......................................................          $     1,708           $     2,047
   Accrued payroll and related expenses...................................                1,004                 1,593
   Deferred revenue.......................................................                1,396                 2,345
   Other current liabilities..............................................                1,574                 1,436
   Income taxes payable...................................................                  139                 1,528
   Current portion of debt obligations....................................                  780                 1,157
                                                                                    -----------           -----------

      Total current liabilities...........................................                6,601                10,106

Deferred income taxes and other long-term liabilities.....................                  858                   545
Debt obligations..........................................................                3,123                 2,648
                                                                                    -----------           -----------
     Total liabilities....................................................               10,582                13,299
                                                                                    -----------           -----------

Commitments and contingencies (Note 6)

Shareholders' equity:
   Common stock, no par value; 50,000,000 shares authorized; 12,006,641
      and 12,166,016 outstanding in 2002 and 2003, respectively...........               99,911               101,099
   Retained earnings......................................................               24,475                 7,008
   Accumulated other comprehensive loss...................................                 (280)                  334
                                                                                    -----------           -----------

      Total shareholders' equity..........................................              124,106               108,441
                                                                                    -----------           -----------

Total liabilities and shareholders' equity................................          $   134,688           $   121,740
                                                                                    ===========           ===========


                 See notes to consolidated financial statements.

                                     II-20


                            NANOMETRICS INCORPORATED
                      CONSOLIDATED STATEMENT OF OPERATIONS
                    (In thousands, except per share amounts)




                                                                                       Years Ended December 31,
                                                                                ---------------------------------------
                                                                                  2001            2002           2003
                                                                                --------        --------       --------
                                                                                                      
Net revenues:
     Product sales......................................................        $ 42,653        $ 28,669       $ 34,592
     Service............................................................           4,931           6,054          7,010
                                                                                --------        --------       --------
       Total net revenues...............................................          47,584          34,723         41,602
                                                                                --------        --------       --------
Costs and expenses:
     Cost of product sales..............................................          17,949          13,237         17,691
     Cost of service....................................................           5,406           5,765          6,620
     Research and development...........................................          10,760          13,765         13,399
     Selling............................................................           9,523          10,862         11,496
     General and administrative.........................................           4,177           5,104          4,689
     Goodwill impairment................................................              --           1,077             --
                                                                                --------        --------       --------
     Total costs and expenses ..........................................          47,815          49,810         53,895
       Loss from operations.............................................            (231)        (15,087)       (12,293)
                                                                                --------        --------       --------
Other income (expense):
     Interest income....................................................           2,576             583            397
     Interest expense...................................................             (86)            (94)           (96)
     Other, net.........................................................            (517)            100            385
                                                                                --------        --------       --------
       Total other income, net..........................................           1,973             589            686
                                                                                --------        --------       --------
Income (loss) before provisions (benefit) for income taxes..............           1,742         (14,498)       (11,607)
Provision (benefit) for income taxes....................................             782          (6,230)         5,860
                                                                                --------        --------       --------
Net income (loss).......................................................        $    960        $ (8,268)      $(17,467)
                                                                                ========        ========       ========
Basic net income (loss) per share:
     Net income (loss)..................................................        $   0.08        $  (0.70)      $  (1.45)
                                                                                ========        ========       ========
Diluted net income (loss) per share:
     Net income (loss)..................................................        $   0.08        $  (0.70)      $  (1.45)
                                                                                ========        ========       ========
Shares used in per share computation:
     Basic..............................................................          11,691          11,878         12,043
                                                                                ========        ========       ========
     Diluted............................................................          12,161          11,878         12,043
                                                                                ========        ========       ========


                 See notes to consolidated financial statements.

                                     II-21


                            NANOMETRICS INCORPORATED
               CONSOLIDATED STATEMENTS OF SHAREHOLDERS' EQUITY AND
                           COMPREHENSIVE INCOME (LOSS)
                      (In thousands, except share amounts)



                                                                                       Accumulated
                                                     Common Stock                      Comprehensive       Total
                                               ------------------------     Retained       Other        Shareholders' Comprehensive
                                                 Shares        Amount       Earnings    Income (Loss)      Equity      Income (Loss)
                                               ----------    ----------    ----------     ----------     ----------     ----------
                                                                                                      
Balances, December 31, 2000 ................   11,607,839    $   95,929    $   31,783     $     (703)    $  127,009

Comprehensive income:
   Net income ..............................           --            --           960             --            960     $      960
   Other comprehensive loss, net of
      tax:
     Foreign currency translation
        adjustments ........................           --            --            --           (698)          (698)          (698)
     Unrealized loss on investments ........           --            --            --            (28)           (28)           (28)
                                                                                                                        ----------

        Comprehensive income ...............           --            --            --             --             --     $      234
                                                                                                                        ==========

Other stock issued .........................       12,813           214            --             --            214
Issuance of common stock under
   employee stock purchase plan ............       33,845           453            --             --            453
Issuance of common stock under
   stock option plan .......................      132,536           914            --             --            914
Tax benefit of employee stock
   transactions ............................           --         1,021            --             --          1,021
                                               ----------    ----------    ----------     ----------     ----------

Balances, December 31, 2001 ................   11,787,033        98,531        32,743         (1,429)       129,845

Comprehensive loss:

   Net loss ................................           --            --        (8,268)                       (8,268)    $   (8,268)
   Other comprehensive income, net
      of tax:
     Foreign currency translation
        adjustments ........................           --            --            --          1,148          1,148          1,148
     Unrealized gain on investments ........           --            --            --              1              1              1
                                                                                                                        ----------

        Comprehensive loss .................           --            --            --             --             --     $   (7,119)
                                                                                                                        ==========

Issuance of common stock under
   employee stock purchase plan ............      125,403           568            --             --            568
Issuance of common stock under
   stock option plan .......................       94,205           578            --             --            578
Tax benefit of employee stock
   transactions ............................           --           234            --             --            234
                                               ----------    ----------    ----------     ----------     ----------

Balances, December 31, 2002 ................   12,006,641        99,911        24,475           (280)       124,106

Comprehensive loss:

   Net loss ................................           --            --       (17,467)            --        (17,467)    $  (17,467)
   Other comprehensive income, net
      of tax:
     Foreign currency translation
        adjustments ........................           --            --            --            614            614            614
                                                                                                                        ----------

        Comprehensive loss .................           --            --            --             --             --     $  (16,853)
                                                                                                                        ==========

Issuance of common stock under
   stock option plan .......................      159,375         1,188            --             --          1,188
                                               ----------    ----------    ----------     ----------     ----------

Balances, December 31, 2003 ................   12,166,016    $  101,099    $    7,008     $      334     $  108,441
                                               ==========    ==========    ==========     ==========     ==========


                 See notes to consolidated financial statements.

                                     II-22


                            NANOMETRICS INCORPORATED
                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                                 (In thousands)



                                                                                             December 31,
                                                                               -----------------------------------------
                                                                                  2001            2002           2003
                                                                               ----------     -----------    -----------
                                                                                                    
Cash flows from operating activities:
   Net income (loss)....................................................       $      960     $    (8,268)   $   (17,467)
   Reconciliation of net income (loss) to net cash used in operating
      activities:
      Depreciation and amortization.....................................            1,681           2,405          2,506
      Goodwill impairment...............................................               --           1,077             --
      Loss on sale/disposal of property.................................                7              --             --
      Deferred income taxes.............................................           (1,212)         (1,945)         6,007
      Changes in assets and liabilities:
        Accounts receivable.............................................            4,630             558         (4,630)
        Inventories.....................................................          (11,259)          1,006          2,042
        Prepaid income taxes............................................            1,939             (37)         2,195
        Prepaid expenses and other......................................             (797)           (378)           155
        Accounts payable, accrued and other current liabilities.........           (3,335)         (1,813)           794
        Deferred revenue................................................             (717)           (961)           778
        Income taxes payable............................................              986              86          1,374
                                                                               ----------     -----------    -----------
          Net cash used in operating activities.........................           (7,117)         (8,270)        (6,246)
                                                                               ----------     -----------    -----------

Cash flows from investing activities:
   Purchases of short-term investments..................................         (112,146)        (65,899)       (71,044)
   Sales/maturities of short-term investments...........................          165,000          37,000         78,000
   Purchases of property, plant and equipment...........................          (13,178)         (2,767)          (990)
   Other assets.........................................................           (3,373)             --             28
                                                                               ----------     -----------    -----------
          Net cash provided by (used in) investing activities...........           36,303         (31,666)         5,994
                                                                               ----------     -----------    -----------

Cash flows from financing activities:
   Proceeds from issuance of debt obligations...........................               --             268            285
   Repayments of debt obligations.......................................             (866)           (416)          (818)
   Sale of shares under employee stock purchase and stock option plans..            1,367           1,146          1,188
                                                                               ----------     -----------    -----------
          Net cash provided by financing activities.....................              501             998            655
                                                                               ----------     -----------    -----------

Effect of exchange rate changes on cash.................................              606            (322)          (421)
                                                                               ----------     -----------    -----------

Net change in cash and cash equivalents.................................           30,293         (39,260)           (18)

Cash and cash equivalents, beginning of year............................           16,934          47,227          7,967
                                                                               ----------     -----------    -----------

Cash and cash equivalents, end of year..................................       $   47,227     $     7,967    $     7,949
                                                                               ==========     ===========    ===========

Supplemental disclosure of cash flow information:
   Cash paid for interest...............................................       $      103     $        96    $        96
                                                                               ==========     ===========    ===========
   Cash paid (received) for income taxes, net...........................       $    2,402     $    (4,634)   $    (3,955)
                                                                               ==========     ===========    ===========


                 See notes to consolidated financial statements.

                                     II-23


                            NANOMETRICS INCORPORATED
                   NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

                  Years Ended December 31, 2001, 2002, and 2003

1.       Significant Accounting Policies

         Description of Business - Nanometrics Incorporated and its wholly-owned
         subsidiaries design,  manufacture,  market, sell and support thin film,
         optical critical dimension and overlay dimension  metrology systems for
         customers in the semiconductor and flat panel display industries. These
         metrology  systems  precisely  measure  a  wide  range  of  film  types
         deposited  on  substrates  during  manufacturing  in order  to  control
         manufacturing   processes  and  increase   production   yields  in  the
         fabrication of integrated  circuits and flat panel  displays.  The thin
         film   metrology   systems  use  a  broad   spectrum  of   wavelengths,
         high-sensitivity optics,  proprietary software, and patented technology
         to measure the thickness and  uniformity of films  deposited on silicon
         and other substrates as well as their chemical composition. Our optical
         critical   dimension   technology  is  a  patented  critical  dimension
         measurement   technology  that  is  used  to  precisely  determine  the
         dimensions  on  the  semiconductor  wafer  that  directly  control  the
         resulting  performance of the integrated  circuit devices.  The overlay
         metrology   systems  are  used  to  measure  the  overlay  accuracy  of
         successive   layers  of   semiconductor   patterns  on  wafers  in  the
         photolithography process.

         Basis of Presentation - The consolidated  financial  statements include
         Nanometrics  Incorporated  and  its  wholly-owned   subsidiaries.   All
         significant intercompany accounts and transactions have been eliminated
         in consolidation.

         Use  of  Estimates  -  The  preparation  of  financial   statements  in
         conformity with accounting  principles generally accepted in the United
         States of America requires management to make estimates and assumptions
         that  affect  the  reported  amounts  of  assets  and  liabilities  and
         disclosure  of  contingent  assets and  liabilities  at the date of the
         financial  statements and the reported amounts of revenues and expenses
         during the  reporting  period.  Actual  results could differ from those
         estimates.

         Fiscal Year -  Nanometrics  uses a 52/53 week fiscal year ending on the
         Saturday nearest to December 31.  Accordingly,  fiscal years 2001, 2002
         consisted  of 52 weeks and ended on December  29, 2001 and December 28,
         2002,  respectively and 2003 consisted of 53 weeks and ended on January
         3, 2004. For  convenience in the  accompanying  consolidated  financial
         statements, the year end is denoted as December 31.

         Cash and Cash Equivalents - Cash and cash equivalents  include cash and
         highly liquid debt instruments with original maturities of three months
         or less when purchased.

         Short-Term  Investments  -  Short-term  investments  consist  of United
         States  Treasury  bills,  mature in April 2004,  and are stated at fair
         value  based  on  quoted  market  prices.  Short-term  investments  are
         classified as  available-for-sale  based on Nanometrics'  intended use.
         The  difference  between  amortized  cost and fair  value  representing
         unrealized  holding  gains or losses are  recorded  as a  component  of
         shareholders' equity as accumulated other comprehensive loss. Gains and
         losses  on  sales  of   investments   are   determined  on  a  specific
         identification basis.

         Fair Value of Financial  Instruments  - Financial  instruments  include
         cash equivalents,  short-term  investments and debt  obligations.  Cash
         equivalents and short-term  investments are stated at fair market value
         based  on  quoted  market  prices.  The  recorded  carrying  amount  of
         Nanometrics' debt obligations approximates fair market value.

         Inventories  - Inventories  are stated at the lower of cost  (first-in,
         first-out) or market.

                                     II-24


         Property,  Plant and  Equipment -  Property,  plant and  equipment  are
         stated  at cost.  Depreciation  is  computed  using  straight  line and
         accelerated  methods over the following  estimated  useful lives of the
         assets:

   Building and improvements...............................     6 - 40 years
   Machinery and equipment.................................     4 - 17 years
   Furniture and fixtures..................................     5 - 20 years

         Intangible Assets - Nanometrics  amortizes  acquired  intangible assets
         (included  in other  assets)  using the  straight-line  method  over an
         estimated useful life of five to seven years.

         Goodwill  - On  January  1,  2002,  Nanometrics  adopted  Statement  of
         Financial  Accounting  Standards  ("SFAS") No. 142,  Goodwill and Other
         Intangible  Assets.  This  Statement  eliminates  the  amortization  of
         goodwill and requires that  goodwill be reviewed at least  annually for
         impairment.  Upon  implementation  of this  Statement,  the  transition
         impairment  test for goodwill was performed as of January 1, 2002,  and
         no impairment loss was recorded. SFAS No. 142 requires that goodwill be
         reviewed at least annually for impairment.  Nanometrics elected to test
         its  goodwill for possible  impairment  in the fourth  quarter of 2002.
         Based  upon the  results  of the annual  impairment  test,  Nanometrics
         recognized  a  goodwill  impairment  loss of  $1,077,000  in the fourth
         quarter of 2002.  The fair value of the segment was  estimated  using a
         discounted  cash flow  methodology.  Nanometrics had no goodwill on its
         balance  sheet at  December  31,  2002 or  2003.  A  reconciliation  of
         previously  reported net income and net income  (loss) per share to the
         amounts  adjusted for the  exclusion of goodwill  amortization,  net of
         related  income tax  effect,  is as follows (in  thousands,  except per
         share amounts):



                                                                                      Year Ended December 31,
                                                                              ----------------------------------------
                                                                                2001            2002           2003
                                                                              ---------      ---------       ---------
                                                                                                    
   Reported net income (loss).........................................        $     960      $  (8,268)      $ (17,467)
   Add goodwill amortization, net of tax..............................               68             --              --
                                                                              ---------      ---------       ---------

   Adjusted net income (loss).........................................        $   1,028      $  (8,268)      $ (17,467)
                                                                              =========      =========       =========

   Basic net income (loss) per share on reported net income (loss)....        $    0.08      $   (0.70)      $   (1.45)
   Goodwill amortization, net of tax..................................             0.01             --              --
                                                                              ---------      ---------       ---------

   Adjusted net income (loss).........................................        $    0.09      $   (0.70)      $   (1.45)
                                                                              =========      =========       =========

   Diluted net income (loss) per share on reported net income (loss)..        $    0.08      $   (0.70)      $   (1.45)
   Goodwill amortization, net of tax..................................             0.01             --              --
                                                                              ---------      ---------       ---------

   Adjusted net income (loss).........................................        $    0.09      $   (0.70)      $   (1.45)
                                                                              =========      =========       =========


         This  Statement  also  requires  that the  useful  lives of  previously
         recognized   intangible   assets  be   reassessed   and  the  remaining
         amortization  periods  be  adjusted   accordingly.   Adoption  of  this
         Statement  did not  require  any  adjustments  to be made to the useful
         lives  of  existing  intangible  assets  and  no  reclassifications  of
         intangible assets to goodwill were necessary.

         Long-Lived  Assets - On January 1, 2002,  Nanometrics  adopted SFAS No.
         144,  Accounting for the  Impairment of Disposal of Long-Lived  Assets.
         SFAS No. 144 supersedes SFAS No. 121,  Accounting for the Impairment of
         Long-Lived  Assets and Long-Lived Assets to be Disposed of, but retains
         its fundamental  provision for recognizing and measuring  impairment of
         long-lived assets to be held and used. This Statement requires that all
         long-lived  assets to be disposed of by sale be carried at the lower of
         carrying amount of fair value less cost to sell, and that  depreciation
         cease to be  recorded on such  assets.  SFAS No. 144  standardizes  the
         accounting and presentation  requirements for all long-lived  assets to
         be  disposed  of  by  sale,  and  supersedes   previous   guidance  for
         discontinued  operations of business segments.  The initial adoption of
         this  Statement did not have any impact of the  consolidated  financial
         statements of  Nanometrics.  No impairment  charge has been recorded in
         any of the periods presented.

         Income  Taxes - Deferred  income  taxes  reflect the net tax effects of
         temporary  differences  between  the  carrying  amounts  of assets  and
         liabilities for financial  reporting  purposes and the amounts used for
         income tax purposes and

                                     II-25


         operating  loss  and tax  credit  carryforwards  measured  by  applying
         currently  enacted tax laws.  A valuation  allowance  is provided  when
         necessary  to reduce  deferred  tax  assets  to an amount  that is more
         likely than not to be realized.

         Accumulated Other  Comprehensive Loss - Accumulated other comprehensive
         loss consists of the following (in thousands):



                                                                                              December 31,
                                                                                      ------------------------------
                                                                                        2002                  2003
                                                                                      ---------            ---------
                                                                                                     
   Accumulated unrealized gains on available-for-sale securities, net......           $       1            $       1
   Accumulated translation adjustments, net................................                (281)                 333
                                                                                      ---------            ---------
   Accumulated other comprehensive loss....................................           $    (280)           $     334
                                                                                      =========            =========


         Revenue  Recognition - Nanometrics  recognizes  revenue when persuasive
         evidence of an  arrangement  exits,  delivery  has occurred or services
         have been rendered,  the seller's price is fixed or  determinable,  and
         collectibility is reasonably assured. For product sales, this generally
         occurs at the time of shipment if Nanometrics has met defined  customer
         acceptance  experience  levels with both the  customer and the specific
         type of equipment. All other product sales are recognized upon customer
         acceptance.  In  certain  geographical  regions  where risk of loss and
         title  transfers upon customer  acceptance,  revenue is recognized upon
         customer acceptance.  Revenue related to spare part sales is recognized
         on shipment and is included as part of service revenue. Revenue related
         service contracts is recognized ratably over the period under contract.
         Unearned  maintenance and service  contract  revenue is not significant
         and is included in deferred revenue.

         Warranties - In November 2002, the Financial Accounting Standards Board
         ("FASB")  issued  Interpretation  No. 45,  Guarantor's  Accounting  and
         Disclosure  Requirements for Guarantees,  Including Indirect Guarantees
         of  Indebtedness  of Other ("FIN 45").  FIN 45 requires a guarantor  to
         include disclosures of certain obligations,  and if applicable,  at the
         inception of the guarantee, recognize a liability for the fair value of
         other obligations undertaken in issuing a guarantee.

         The initial recognition and initial  measurement  provisions apply on a
         prospective  basis to guarantees  issued or modified after December 31,
         2002 and did not have a material  impact on  Nanometrics'  consolidated
         financial statements.

         Nanometrics  sells the majority of its products with a one-year  repair
         or replacement warranty and records a provision for estimated claims at
         the  time of  sale.  Components  of the  warranty  accrual,  which  are
         included  in the  accompanying  consolidated  balance  sheets  as other
         current liabilities, are as follows:

   Balance as of January 1, 2003..................................   $  261,000
   Actual warranty costs..........................................     (160,000)
   Revision to existing warranty..................................     (303,000)
   Provision for warranty.........................................      715,000
                                                                     ----------

   Balance as of December 31, 2003................................   $  513,000
                                                                     ==========

         Guarantees - In addition to product warranties,  Nanometrics, from time
         to  time,  in  the  normal  course  of  business,  indemnifies  certain
         customers   with  whom  it  enters  into   contractual   relationships.
         Nanometrics  has agreed to hold the other party harmless  against third
         party claims that Nanometrics'  products,  when used for their intended
         purpose(s),  infringe the  intellectual  property  rights of such third
         party or other claims made against certain parties.  It is not possible
         to determine  the maximum  potential  amount of  liability  under these
         indemnification  obligations  due  to  the  limited  history  of  prior
         indemnification  claims and the unique facts and circumstances that are
         likely  to  be  involved  in  each  particular   claim.   Historically,
         Nanometrics  has not  made  payments  under  these  obligations  and no
         liabilities  have been  recorded for these  obligations  on the balance
         sheets as of December 31, 2002 and 2003.

                                     II-26


         Stock-Based  Compensation  - In December 2002, the FASB issued SFAS No.
         148,   Accounting  for   Stock-Based   Compensation  -  Transition  and
         Disclosures,  an Amendment of FASB  Statement No. 123.  This  Statement
         provides   alternative   methods  of   transition   for  companies  who
         voluntarily  change to the fair  value-based  method of accounting  for
         stock-based  employee  compensation  in  accordance  with SFAS No. 123,
         Accounting  for  Stock-Based  Compensation  and enhances the disclosure
         requirements.  This  statement  was effective  upon its  issuance.  The
         adoption of this Statement did not have any impact on the  consolidated
         financial statements of Nanometrics.

         Nanometrics continues to account for stock-based compensation using the
         intrinsic  value method in accordance  with the provision of Accounting
         Principles  Board  Opinion  No.  25,  Accounting  for  Stock  Issued to
         Employees,  as  allowed by SFAS No.  123,  Accounting  for Stock  Based
         Compensation  as amended by SFAS No.  148,  Accounting  for Stock Based
         Compensation  -  Transition  and  Disclosures,  an  Amendment  of  FASB
         Statement No. 123. Under the intrinsic value method,  Nanometrics  does
         not recognize any  compensation  expense,  as the exercise price of all
         stock options is equal to the fair market value at the time the options
         are granted.  Had  compensation  expense been recognized using the fair
         value-based   method  under  SFAS  No.  123,   Nanometrics'  pro  forma
         consolidated  income (loss) and income (loss) per share would have been
         as follows (in thousands, except per share amounts):



                                                                                       Year Ended December 31,
                                                                               ---------------------------------------
                                                                                 2001            2002           2003
                                                                               ---------      ---------      ---------
                                                                                                    
   Net income (loss):
      As reported.......................................................       $     960      $  (8,268)     $ (17,467)
      Deduct: Total stock-based employee compensation expense
         determined under fair value based method for all awards, net
         of related tax effects.........................................          (3,659)        (4,692)        (8,521)
                                                                               ---------      ---------      ---------
   Pro forma............................................................       $  (2,699)     $ (12,960)     $ (25,988)
                                                                               =========      =========      =========
   Basic net income (loss) per share:
      As reported.......................................................       $    0.08      $   (0.70)     $   (1.45)
      Pro forma.........................................................           (0.23)         (1.09)         (2.16)
   Diluted net income (loss) per share:
      As reported.......................................................            0.08          (0.70)         (1.45)
      Pro forma.........................................................           (0.23)         (1.09)         (2.16)


         Foreign  Currency - The functional  currencies of Nanometrics'  foreign
         subsidiaries  are  the  local  currencies.   Accordingly,   translation
         adjustments for the  subsidiaries  have been included in  shareholders'
         equity.  Gains and losses from  transactions  denominated in currencies
         other than the functional currencies of Nanometrics or its subsidiaries
         are  included  in  other  income  (expense)  and  consist  of a loss of
         $614,000 in 2001 and gains of $154,000  and  $424,000 in 2002 and 2003,
         respectively.

         Net  Income  Per Share - Basic net  income  (loss)  per share  excludes
         dilution and is computed by dividing net income (loss) by the number of
         weighted average common shares outstanding for the period.  Diluted net
         income  (loss)  per  share   reflects  the   potential   dilution  from
         outstanding  dilutive  stock options  (using the treasury stock method)
         and shares issuable under the employee stock purchase plan.  During the
         years  ended  December  31,  2002 and 2003,  diluted net loss per share
         excludes  common  equivalent  shares  outstanding,  as their  effect is
         antidilutive.  The  reconciliation of the share denominator used in the
         basic and diluted net income per share  computations  is as follows (in
         thousands):



                                                                                       Year Ended December 31,
                                                                                -------------------------------------
                                                                                 2001           2002           2003
                                                                                -------        -------        -------
                                                                                                      
   Weighted average shares outstanding - shares used in basic net
      income per share computation......................................         11,691         11,878         12,043
   Dilutive effect of common stock equivalents, using the treasury
      stock method......................................................            470             --             --
                                                                                -------        -------        -------
   Shares used in diluted net income per share computation..............         12,161         11,878         12,043
                                                                                =======        =======        =======


                                     II-27


         For the years ended December 31, 2001, 2002 and 2003,  diluted net loss
         per share excluded  common  equivalent  shares  outstanding of 901,917,
         1,410,594   and   2,915,196,   respectively,   as  their   effect   was
         antidilutive.

         Reclassifications  -  Certain  reclassifications  have been made to the
         prior  years'  financial  statement  presentations  to  conform  to the
         current year presentation.  Such reclassifications had no impact on the
         consolidated statements of operations or retained earnings.

         Recently Issued Accounting Pronouncements

         In April 2003, the Financial  Accounting  Standards Board (FASB) issued
         SFAS 149,  Amendment of Statement  133 on  Derivative  Instruments  and
         Hedging   Activities,   which  amends  and  clarifies   accounting  for
         derivative   instruments,   including  certain  derivative  instruments
         embedded in other contracts, and for hedging activities under SFAS 133,
         Accounting for Derivative Instruments and Hedging Activities.

         SFAS 149 was  effective for  contracts  entered into or modified  after
         June 30,  2003,  except as noted below,  and for hedging  relationships
         designated  after  June  30,  2003.  The  guidance  was  to be  applied
         prospectively.  The  provisions  of SFAS  149 that  relate  to SFAS 133
         Implementation  Issues that were  effective  for fiscal  quarters  that
         began prior to June 15, 2003 continue to be applied in accordance  with
         their respective effective dates. The adoption of SFAS 149 did not have
         a material effect on our consolidated  financial  position,  results of
         operations or cash flows.

         The  Company  adopted  Emerging  Issues Task Force  ("EITF")  Issue No.
         00-21,  "Revenue  arrangements  with  Multiple   Deliverables",   which
         requires  companies  to  determine  whether  an  arrangement  involving
         multiple  deliverables  contains more than one unit of  accounting.  In
         applying  EITF Issue No.  00-21,  revenue  arrangements  with  multiple
         deliverables should be divided into separate units of accounts,  if the
         deliverables  in the  arrangement  meet certain  criteria.  Arrangement
         consideration   should  be  allocated   among  the  separate  units  of
         accounting  based  on  their  relative  fair  values.  This  issue  was
         effective  for  revenue  arrangements  entered  into in fiscal  periods
         beginning  after June 15,  2003.  There was no impact on our results of
         operations or financial position as a result of adopting EITF Issue No.
         00-21.

         The FASB issued  Interpretation  No. 46 ("FIN 46"),  "Consolidation  of
         Variable   Interest   Entities,"  in  January   2003,   and  a  revised
         interpretation of FIN 46 ("FIN 46-R") in December 2003. FIN 46 requires
         certain variable  interest  entities ("VIEs") to be consolidated by the
         primary beneficiary of the entity if the equity investors in the entity
         do not have the characteristics of a controlling  financial interest or
         do not have  sufficient  equity at risk for the entity to  finance  its
         activities without additional subordinated financial support from other
         parties.  The  provisions of FIN 46 are effective  immediately  for all
         arrangements  entered into after  January 31, 2003.  Since  January 31,
         2003,  Nanometrics  has not  invested in any  entities it believes  are
         variable  interest  entities  for  which  Nanometrics  is  the  primary
         beneficiary.  For arrangements  entered into prior to February 1, 2003,
         Nanometrics  is  required  to adopt the  provisions  of FIN 46-R in the
         first quarter of fiscal 2004.  Nanometrics does not expect the adoption
         of FIN 46-R to have an impact on the  financial  position,  results  of
         operations or cash flows of Nanometrics.

         In May 2003,  the FASB  issued  SFAS No.  150,  Accounting  for Certain
         Financial  Instruments  with  Characteristics  of both  Liabilities and
         Equity, which requires that certain financial  instruments be presented
         as liabilities that were previously presented as equity or as temporary
         equity.  Such instruments  include mandatory  redeemable  preferred and
         common  stock,  and  certain  options  and  warrants.  SFAS No.  150 is
         effective for financial  instruments entered into or modified after May
         31, 2003 and was effective at the beginning of the first interim period
         beginning  after June 15, 2003. In November  2003, the FASB issued FASB
         Staff Position  ("FSP") No. 150-3,  Effective  Date,  Disclosures,  and
         Transition for Mandatorily  Redeemable Financial Instruments of Certain
         Nonpublic Entities and Certain  Mandatorily  Redeemable  Noncontrolling
         Interests  under SFAS No.  150,  which  defers the  effective  date for
         various  provisions of SFAS No. 150.  Nanometrics  believes that it has
         properly classified and measured in its balance sheets and disclosed in
         its  consolidated   financial  statements  financial  instruments  with
         characteristics of both liabilities and equity.

         Certain  Significant  Risks and  Uncertainties - Financial  instruments
         which potentially  subject  Nanometrics to concentration of credit risk
         consist  of cash  and  cash  equivalents,  short-term  investments  and
         accounts  receivable

                                     II-28


         (see Note 10). Cash and cash equivalents and short-term investments are
         held primarily with two financial institutions and consist primarily of
         cash in bank accounts and United  States  Treasury  bills.  Nanometrics
         sells its  products  primarily  to end users in the  United  States and
         Asia,   and  generally  does  not  require  its  customers  to  provide
         collateral or other security to support accounts receivable. Management
         performs  ongoing  credit  evaluations  of  its  customers'   financial
         condition. Nanometrics maintains allowances for estimated potential bad
         debt losses.

         Nanometrics  participates  in a dynamic  high  technology  industry and
         believes  that  changes  in any of the  following  areas  could  have a
         material  adverse effect on  Nanometrics'  future  financial  position,
         results  of  operations  or cash  flows:  advances  and  trends  in new
         technologies and industry standards;  competitive pressures in the form
         of new products or price  reductions  on current  products;  changes in
         product  mix;  changes in the overall  demand for  products  offered by
         Nanometrics;  changes  in  third-party  manufacturers;  changes  in key
         suppliers;  changes  in certain  strategic  relationships  or  customer
         relationships;  litigation  or  claims  against  Nanometrics  based  on
         intellectual property,  patent,  product,  regulatory or other factors;
         fluctuations in foreign currency  exchange rates;  risk associated with
         changes  in  domestic  and  international   economic  and/or  political
         regulations;  availability  of necessary  components or  subassemblies;
         disruption of manufacturing  facilities;  and  Nanometrics'  ability to
         attract and retain employees necessary to support its growth.

         Nanometrics'  customer base is highly concentrated.  A relatively small
         number  of  customers  have  accounted  for a  significant  portion  of
         Nanometrics' revenues. In 2003, aggregate revenue from Nanometrics' top
         ten largest  customers  consisted  of 51.8% of  Nanometrics'  total net
         revenues.

         Certain components and subassemblies used in Nanometrics'  products are
         purchased  from a sole  supplier or a limited  group of  suppliers.  In
         particular,   Nanometrics   currently   purchases   its   spectroscopic
         ellipsometer and robotics used in its advanced measurement systems from
         a sole  supplier  or a limited  group of  suppliers.  Any  shortage  or
         interruption  in the supply of any of the  components or  subassemblies
         used in  Nanometrics'  products  or the  inability  of  Nanometrics  to
         procure these  components or  subassemblies  from alternate  sources on
         acceptable terms,  could have a material adverse effect on Nanometrics'
         business, financial condition and results of operations.

         Related Party  Transactions - As of December 31, 2003,  Nanometrics had
         outstanding  long-term  notes to one officer and three employees in the
         amount of $447,000.  The note to the officer  bears  interest at 6% per
         annum and is due in October 2004.  The notes to two  employees  bear no
         interest and are due July 2004 and February 2006. The remaining note to
         an employee bears 5% interest and is due in 2006. Two notes for $76,000
         are  classified  as other assets on the balance sheet and the remaining
         $371,000 is classified as prepaid expenses and other.

         During  2003,  Nanometrics  purchased  a vehicle  from an  officer  for
         $17,000.

2.       Inventories

         Inventories consist of the following (in thousands):

                                                               December 31,
                                                        ------------------------
                                                          2002             2003
                                                        -------          -------
Raw materials and subassemblies ..............          $18,353          $15,450
Work in process ..............................            4,733            4,506
Finished goods ...............................            2,761            4,308
                                                        -------          -------
Total inventories ............................          $25,847          $24,264
                                                        =======          =======

                                     II-29


3.       Property, Plant and Equipment

         Property, plant and equipment consists of the following (in thousands):

                                                              December 31,
                                                        -----------------------
                                                          2002           2003
                                                        --------       --------
Land .............................................      $ 16,716       $ 16,856
Building and improvements ........................        31,261         32,217
Machinery and equipment ..........................         6,326          6,625
Furniture and fixtures ...........................         1,429          1,681
Construction in progress .........................            --            200
                                                        --------       --------
                                                          55,732         57,579
Accumulated depreciation and amortization ........        (5,682)        (7,841)
                                                        --------       --------
Total property, plant and equipment, net .........      $ 50,050       $ 49,738
                                                        ========       ========

4.       Other Current Liabilities

         Other current liabilities consist of the following (in thousands):

                                                               December 31,
                                                          ----------------------
                                                           2002            2003
                                                          ------          ------
Commissions payable ............................          $  291          $   32
Accrued warranty ...............................             261             513
Accrued professional services ..................             169             254
Other ..........................................             853             637
                                                          ------          ------
Total other current liabilities ................          $1,574          $1,436
                                                          ======          ======

5.       Debt Obligations

         Debt obligations consist of the following (in thousands):

                                                               December 31,
                                                        -----------------------
                                                          2002           2003
                                                        -------         -------
1995 working capital bank loan .................        $   834         $   561
1996 working capital bank loan .................            287             232
2000 working capital bank loan .................          2,502           2,708
Other debt obligations .........................            280             304
                                                        -------         -------
Total ..........................................          3,903           3,805
Current portion of debt obligations ............           (780)         (1,157)
                                                        -------         -------
Debt obligations ...............................        $ 3,123         $ 2,648
                                                        =======         =======

         The 1995  working  capital  bank  loan  was  obtained  by  Nanometrics'
         Japanese  subsidiary.  The loan is collateralized by receivables of the
         Japanese  subsidiary  and  is  guaranteed  by the  parent,  Nanometrics
         Incorporated. The loan is denominated in Japanese yen ((Y)60,000,000 at
         December  31, 2003) and bears  interest at 2.9% per annum.  The loan is
         payable in quarterly  installments  with unpaid  principal and interest
         due in May 2005.

         The 1996  working  capital  bank  loan  was  obtained  by  Nanometrics'
         Japanese  subsidiary and is  collateralized  by land and building.  The
         loan is  denominated  in Japanese  yen  ((Y)24,800,000  at December 31,
         2003) and bears  interest  at 3.4% per  annum.  The loan is  payable in
         quarterly  installments  with unpaid  principal and interest due in May
         2006.

         The 2000  working  capital  bank  loan  was  obtained  by  Nanometrics'
         Japanese  subsidiary and is  collateralized  by land and building.  The
         loan is  denominated  in Japanese yen  ((Y)289,600,000  at December 31,
         2003) and bears  interest  at 2.1% per  annum.  The loan is  payable in
         quarterly  installments  with  unpaid  principal  and  interest  due in
         November 2010.

         Other debt obligations  represent short-term borrowings by Nanometrics'
         Japanese  subsidiary  which  are  collateralized  by  the  subsidiary's
         accounts receivable. The borrowings are denominated in Japanese yen and
         bear interest at 2.74% per annum.

                                     II-30


         At December 31, 2003,  future annual maturities of debt obligations are
         as follows (in thousands):

   2004...................................................   $  1,157
   2005...................................................        666
   2006...................................................        441
   2007...................................................        389
   2008...................................................        389
   Thereafter.............................................        763
                                                             --------
   Total..................................................   $  3,805
                                                             ========

6.       Commitments and Contingencies

         Nanometrics'  leases  manufacturing and  administrative  facilities and
         certain equipment under  noncancellable  operating leases. Rent expense
         for 2001,  2002, and 2003 was  approximately  $302,000,  $233,000,  and
         $414,000,   respectively.   Future   minimum   lease   payments   under
         Nanometrics'  operating leases for each of the years ending December 31
         are as follows (in thousands):

   2004...................................................  $    136
   2005...................................................        67
   2006...................................................        18
   2007...................................................        10
   2008...................................................         7
   Thereafter.............................................         2
                                                            --------

   Total..................................................  $    240
                                                            ========

         In September 1998,  Nanometrics' Korean subsidiary entered into a lease
         agreement for manufacturing facilities. The lease payments are based on
         a percentage of net product sales, as defined. The lease was terminated
         in February 2001.

         Pursuant to a 1985 agreement,  as amended, if Nanometrics'  Chairman of
         the Board is  involuntarily  removed from his position,  Nanometrics is
         required to continue  his salary and related  benefits  for a period of
         five years from such date.

7.       Shareholders' Equity

         Common Stock

         The  authorized  capital  stock of  Nanometrics  consists of 50,000,000
         common shares, of which 50,000,000 shares have been designated  "Common
         Stock."

         Stock Option Plans

         Under the 1991 Stock  Option Plan (the 1991 Option  Plan),  as amended,
         Nanometrics  may grant  options to acquire  up to  3,000,000  shares of
         common stock to employees and  consultants  at prices not less than the
         fair market value at date of grant for incentive  stock options and not
         less than 50% of fair  market  value for  nonstatutory  stock  options.
         These  options  generally  expire five years from the date of grant and
         become exercisable as they vest,  generally 33.3% upon each anniversary
         of the grant,  as set forth in the stock  option  agreements.  The 1991
         Option Plan expired in July 2001.

         Under the 1991 Directors' Stock Option Plan (the 1991 Directors' Plan),
         nonemployee  directors of Nanometrics are automatically granted options
         to acquire  10,000 shares of common stock,  at the fair market value at
         the date of grant,  each year that such  person  remains a director  of
         Nanometrics.   Options   granted  under  the  Directors'   Plan  become
         exercisable  as they vest 33.3% upon each  anniversary of the grant and
         expire five years from the date of

                                     II-31


         grant.  The total shares  authorized under the 1991 Directors' Plan are
         300,000. The 1991 Directors' Plan expired in July 2001.

         Under the 2000 Stock  Option Plan (the 2000 Option  Plan),  as amended,
         Nanometrics  may grant  options to acquire  up to  2,450,000  shares of
         common stock to employees and  consultants  at prices not less than the
         fair market value at date of grant for incentive and nonstatutory stock
         options.  These options  generally  expire seven years from the date of
         grant, or a shorter term as provided by the stock option  agreement and
         become exercisable as they vest,  generally 33.3% upon each anniversary
         of the grant,  as set forth in the stock  option  agreements.  The 2000
         Option Plan is the  successor to the 1991 Option Plan,  and all options
         existing  under the 1991  Option  Plan will  continue to be governed by
         existing terms until exercise, cancellation or expiration.

         Under the 2000 Directors' Stock Option Plan (the 2000 Directors' Plan),
         nonemployee  directors of Nanometrics are automatically granted options
         to acquire  10,000 shares of common stock,  at the fair market value at
         the date of grant,  each year that such  person  remains a director  of
         Nanometrics.   Options   granted  under  the  Directors'   Plan  become
         exercisable  as they vest 33.3% upon each  anniversary of the grant and
         expire seven years from the date of grant. The total shares  authorized
         under the 2000 Directors' Plan are 250,000. The 2000 Directors' Plan is
         the  successor  plan to the  1991  Directors'  Plan,  and  all  options
         existing under the 1991 Directors' Plan will continue to be governed by
         existing terms until exercise, cancellation or expiration.

         Under the 2002  Nonstatutory  Stock Option Plan (the 2002 Option Plan),
         Nanometrics  may grant  options to acquire  up to  1,200,000  shares of
         common stock to employees and  consultants at prices  determined by the
         2002  Option Plan  administrator  at the date of grant.  These  options
         generally  expire seven years from the date of grant, or a shorter term
         as provided by the stock option  agreement  and become  exercisable  as
         they vest as set forth in the stock option agreements.

         During  the  fourth  quarter  of 2002,  Nanometrics  offered  to cancel
         qualifying  options to purchase up to 1,962,020  shares of  Nanometrics
         common  stock  granted  under the 2000  Option Plan and the 1991 Option
         Plan.  Qualifying  options included only those options with an exercise
         price of greater than or equal to $10.00 per share. Nanometrics granted
         all  participating  employees  options  equal  to 90%  of  the  options
         cancelled on June 17, 2003 at the then fair value of the common  stock.
         Nanometrics  cancelled options to purchase  1,569,020 shares and issued
         options to purchase 1,398,621 shares on June 17, 2003.



                                                                                        Outstanding Options
                                                                            --------------------------------------------
                                                                                                             Weighted
                                                                              Shares        Number of        Average
                                                                            Available         Shares      Exercise Price
                                                                            ----------     -----------    --------------
                                                                                                   
   Option activity under the plans is summarized as follows:
      Balances, December 31, 2000 (634,696 exercisable at a weighted
         average price of $6.62).....................................        1,191,978       1,867,024      $     18.73
      Exercised......................................................               --        (132,536)            6.90
      Expired........................................................          (40,744)             --               --
      Granted (weighted average fair value of $9.45).................         (780,250)        780,250            18.14
      Canceled.......................................................           91,516         (91,516)           21.01
                                                                            ----------     -----------
      Balances, December 31, 2001 (1,017,033 exercisable at a
         weighted average price of $13.91)...........................          462,500       2,423,222            19.11
      Additional shares added through 2002 Option Plan...............        1,200,000              --               --
      Exercised......................................................               --         (94,205)            6.13
      Granted (weighted average fair value of $8.57).................         (937,100)        937,100            14.58
      Canceled.......................................................        1,855,523      (1,855,523)           21.15
                                                                            ----------     -----------
      Balances, December 31, 2002 (839,095 exercisable at a weighted
         average price of $13.39)....................................        2,580,923       1,410,594            14.27
      Exercised......................................................               --        (159,375)            7.46
      Granted (weighted average fair value of $2.70).................       (2,030,495)      2,030,495             6.67
      Canceled (including 250,342 shares under the terminated 1991
         Option Plan)................................................          116,176        (366,518)           10.16
                                                                            ----------     -----------
      Balances, December 31, 2003....................................          666,604       2,915,196      $      9.86
                                                                            ==========     ===========


                                     II-32


         Additional information regarding options outstanding as of December 31,
         2003 is as follows:



                                         Options Outstanding                    Options Exercisable
                            ----------------------------------------------  -----------------------------
                                             Weighted
                                              Average
                                             Remaining        Weighted                        Weighted
      Range of                Number        Contractual        Average         Number          Average
      Exercise Prices       Outstanding     Life (Years)    Exercise Price  Exercisable    Exercise Price
      ---------------       -----------     ------------    --------------  -----------    --------------
                                                                              
      $   3.14 - $   5.70    1,498,778         6.27           $  5.58          129,031       $      5.50
          6.33 -     9.00      584,052         4.67              7.50          154,171              7.36
         12.86 -    23.50      714,366         4.27             16.82          267,717             17.99
         25.24 -    47.63      118,000         1.78             33.85           77,285             34.48
                            ----------                                      ----------

      $   3.14 - $  47.63    2,915,196         4.90           $  9.86          628,204       $     14.84
                            ==========                                      ==========


         Employee Stock Purchase Plan

         Under  the 1986  Employee  Stock  Purchase  Plan (the  Purchase  Plan),
         eligible employees are allowed to have salary withholdings of up to 10%
         of their base  compensation  to  purchase  shares of common  stock at a
         price equal to 85% of the lower of the market value of the stock at the
         beginning  or end of each  six-month  offering  period,  subject  to an
         annual limitation. Shares issued under the plan were 33,845 and 125,403
         in 2001 and 2002,  respectively,  at weighted  average prices of $13.39
         and $4.53, respectively.  The weighted average per share fair values of
         the 2001 and 2002 awards were $5.94 and $1.26, respectively. During the
         fourth quarter of fiscal year 2002,  the Board of Directors  terminated
         the Purchase Plan effective September 28, 2002.

         Under the 2003  Employee  Stock  Purchase  Plan (the 2003 Stock  Plan),
         eligible employees are allowed to have salary withholdings of up to 10%
         of their base  compensation  to  purchase  shares of common  stock at a
         price equal to 85% of the lower of the market value of the stock at the
         beginning  or end of each  six-month  offering  period,  subject  to an
         annual limitation. Nanometrics may grant up to 750,000 shares under the
         2003 Stock Plan. No shares were issued under the plan in 2003.

         Additional Stock Plan Information

         As discussed in Note 1, Nanometrics accounts for its stock-based awards
         using  the  intrinsic  value  method  in  accordance  with APB No.  25,
         Accounting   for  Stock   Issued   to   Employees,   and  its   related
         interpretations.   Accordingly,   no  compensation   expense  has  been
         recognized in the accompanying  consolidated  financial  statements for
         employee stock arrangements.

         Also as discussed in Note 1, Nanometrics adopted the provisions of SFAS
         No. 148,  which  amends SFAS No. 123 as stated.  Under SFAS No. 123, as
         amended,   the  fair  value  of  stock-based  awards  to  employees  is
         calculated  through the use of option pricing models,  even though such
         models were  developed to estimate  the fair value of freely  tradable,
         fully transferable options without vesting  restrictions,  which differ
         significantly from Nanometrics' stock option awards.  These models also
         require subjective assumptions, including future stock price volatility
         and expected  time to exercise,  which  greatly  affect the  calculated
         values.  Nanometrics'  fair value  calculations  on stock-based  awards
         under the 1991 and 2001 Option  Plans and the 1991 and 2001  Directors'
         Plans were made using the  Black-Scholes  option pricing model with the
         following weighted average assumptions: expected life, three years from
         the date of grant in 2001,  2002, and 2003;  stock  volatility,  80% in
         2001 and 2002, and 90% in 2003;  risk free interest rate, 4.2% in 2001,
         3.4% in 2002 and 2.4% in 2003;  and no  dividends  during the  expected
         term. Nanometrics'  calculations are based on a single option valuation
         approach and forfeitures are recognized at a historical rate of 24% for
         2001,  30%  for  2002,  and  25%  for  2003.  Nanometrics'  fair  value
         calculations  on  stock-based  awards under the Purchase Plan were also
         made using the  Black-Scholes  option  pricing model with the following
         weighted average assumptions:  expected life, six months in 2001; stock
         volatility,  80% in 2001, risk free

                                     II-33


         interest rate, 3.1% in 2001; and no dividends during the expected term.
         There were no options  outstanding  under the Purchase Plan in 2002 and
         2003. See Note 1, Stock-Based  Compensation,  for the disclosure of the
         pro forma effects of SFAS No. 123. Nanometrics' fair value calculations
         on stock-based  awards under the Purchase Plan were also made using the
         Black-Scholes  option pricing model with the following weighted average
         assumptions;  expected life, six months in 2003; stock volatility,  90%
         in 2003, risk free interest rate 1.2%  in 2003 and no dividends  during
         the expected term.

8.       Income Taxes

         Income (loss) before  provision  (benefit) for income taxes consists of
         the following (in thousands):

                                                 Years Ended December 31,
                                           ------------------------------------
                                             2001          2002          2003
                                           --------      --------      --------
Domestic .............................     $ (1,516)     $(11,751)     $(11,637)
Foreign ..............................        3,258        (2,747)           30
                                           --------      --------      --------
Income (loss) before income taxes ....     $  1,742      $(14,498)     $(11,607)
                                           ========      ========      ========

         The provision  (benefit) for income taxes consists of the following (in
         thousands):

                                                   Years Ended December 31,
                                              ---------------------------------
                                                2001        2002         2003
                                              -------      -------      -------
Current:
   Federal ..............................       1,136      $(4,847)     $  (553)
   State ................................         439          266            4
   Foreign ..............................         419          296          402
                                              -------      -------      -------
                                                1,994       (4,285)        (147)
                                              -------      -------      -------
Deferred:
   Federal ..............................      (1,073)        (506)       3,700
   State ................................        (437)      (1,480)       2,306
   Foreign ..............................         298           41            1
                                              -------      -------      -------
                                               (1,212)      (1,945)       6,007
                                              -------      -------      -------
Provision (benefit) for income taxes ....     $   782      $(6,230)     $ 5,860
                                              =======      =======      =======

         Significant   components  of  Nanometrics'   deferred  tax  assets  and
         liabilities are as follows (in thousands):

                                                               December 31,
                                                            -------------------
                                                              2002        2003
                                                            -------     -------
Deferred tax assets - current:
   Reserves and accruals not currently deductible ......    $ 2,369     $ 3,551
   Capitalized inventory costs .........................        696         774
   Tax credit carryforwards ............................      3,835       4,717
                                                            -------     -------
Total gross deferred tax assets - current ..............      6,900       9,042
Valuation allowance ....................................        (60)     (9,042)
                                                            -------     -------
Total net deferred tax assets - current ................    $ 6,840     $    --
                                                            =======     =======
Deferred tax assets (liabilities) noncurrent:
   Reserves and accruals ...............................    $    58     $    --
   Net operating loss carryforwards ....................        892       4,596
   Depreciation ........................................     (2,357)     (2,537)
   Goodwill and capitalized technology .................        934       2,724
   Translation adjustments .............................        (25)       (412)
                                                            -------     -------
Total net deferred tax assets (liabilities) - noncurrent       (498)      4,371
Valuation allowance ....................................       (360)     (4,783)
                                                            -------     -------
Total net deferred tax assets (liabilities) - noncurrent    $  (858)    $  (412)
                                                            =======     =======

                                     II-34


         As  of  December  31,  2003,   Nanometrics   had  net  operating   loss
         carryforwards   for  federal  income  tax  purposes  of   approximately
         $11,958,000, which expire after 2023.

         As of December 31, 2003,  Nanometrics  had available  for  carryforward
         research and experimental tax credits,  minimum tax credits and foreign
         tax credits for federal  income tax purposes of  $2,493,000,  $329,000,
         $565,000,  respectively.  Federal credit  carryforwards begin to expire
         after 2006.

         As of December 31, 2003,  Nanometrics  had available  for  carryforward
         state  credits  of   $1,969,000,   as  well  as  net   operating   loss
         carryforwards  for state  income  tax  purposes  of  $2,503,000.  State
         credits  and state net  operating  loss  carryforwards  begin to expire
         after 2009 and 2013, respectively.

         Nanometrics  had available for  carryforward  a net operating  loss for
         Korean  income tax purposes of $690,000 as of December  31,  2003.  Net
         operating loss carry forwards expire after 2005.

         Differences  between  income taxes  computed by applying the  statutory
         federal income tax rate to income before income taxes and the provision
         (benefit) for income taxes consist of the following (in thousands):



                                                      Years Ended December 31,
                                                ----------------------------------
                                                  2001         2002         2003
                                                --------     --------     --------
                                                                 
Income taxes computed at U.S. statutory rate    $    610     $ (5,074)    $ (4,062)
State income taxes .........................           1         (790)      (1,394)
Foreign tax provision higher than U.S. rates         134          178          426
Foreign sales corporation benefit ..........          --          (80)         (11)
Change in valuation allowance ..............         342           77       13,405
Tax credits ................................        (450)        (746)      (1,323)
Other, net .................................         145          205       (1,181)
                                                --------     --------     --------
Provision (benefit) for income taxes .......    $    782     $ (6,230)    $  5,860
                                                ========     ========     ========


         Nanometrics'  Korean subsidiary was granted a seven-year tax holiday in
         1999 by the  Korean  government  for  having  established  a  high-tech
         manufacturing operation in Korea, which expires in 2006. There has been
         no  aggregate  net  tax  effect  of the  tax  holiday  for  the  Korean
         subsidiary  because  their net losses have offset net income during the
         period of the tax holiday.

9.       Bonus Plans

         Nanometrics  paid  $416,000,  $0,  and  $0 in  2001,  2002,  and  2003,
         respectively,  under formal  discretionary cash bonus plans which cover
         all eligible employees.

10.      Major Customers

         In 2001,  sales to Applied  Materials  accounted for 17.6% of total net
         revenues.  In 2002, sales to Applied Materials  accounted for 13.8% and
         sales to TSMC accounted for 10.9% of total net revenues. In 2003, sales
         to  Applied   Materials   accounted   for  15.4%  and  sales  to  Hynix
         Semiconductor accounted for 12.0% of total net revenues.

         At December 31, 2001 and 2002, no single customer  accounted for 10% or
         more of  accounts  receivable.  At December  31,  2003,  two  customers
         accounted for 15.2% and 10.4% of accounts receivable, respectively.

11.      Intangible Assets

         Intangible assets are recorded at cost, less accumulated  amortization.
         Intangible  assets as of  December  31,  2002 and 2003  consist  of (in
         thousands):

                                     II-35


                                     Gross                              Net
                                    Carrying        Accumulated      Intangible
2003                                 Amount        Amortization        Assets
                                     ------        ------------        ------

Technology ..................        $2,709           $1,466           $1,243
Other .......................           250              171               79
                                     ------           ------           ------
Total .......................        $2,959           $1,637           $1,322
                                     ======           ======           ======

                                     Gross                              Net
                                    Carrying        Accumulated      Intangible
2002                                 Amount        Amortization        Assets
                                     ------        ------------        ------
Technology...................        $2,709           $1,090           $1,619
Other........................           250              121              129
                                     ------           ------           ------
Total........................        $2,959           $1,211           $1,748
                                     ======           ======           ======

         The estimated future amortization expense is as follows (in thousands):

   Fiscal Years
   ------------
      2004..........................................................   $   397
      2005..........................................................       285
      2006..........................................................       256
      2007..........................................................       256
      2008..........................................................       128
                                                                       -------
   Total amortization...............................................   $ 1,322
                                                                       =======

         Amortization is computed using the straight-line method over a weighted
         average  period of seven years for purchased  technology and five years
         for other intangible  items.  Amortization for the years ended December
         31, 2003 and 2002 were $426,000 and $490,0000, respectively.

12.      Product, Segment and Geographic Information

         Nanometrics'  operating  divisions consist of its geographically  based
         entities in the United States,  Japan, South Korea and Taiwan. All such
         operating divisions have similar economic  characteristics,  as defined
         in SFAS No.  131,  Disclosures  About  Segments  of an  Enterprise  and
         Related  Information,  and  accordingly,  Nanometrics  operates  in one
         reportable  segment:  the  sale,  design,  manufacture,  marketing  and
         support of thin film,  optical critical dimension and overlay dimension
         metrology  systems.  For the years ended  December 31, 2001,  2002, and
         2003,  Nanometrics  recorded  revenue from customers  throughout  North
         America,  Europe and Asia.  The following  table  summarizes  total net
         revenues and long-lived assets attributed to significant  countries (in
         thousands):

                                                   Years Ended December 31,
                                         ---------------------------------------
                                          2001             2002            2003
                                         -------         -------         -------
Total net revenues:
   United States ...............         $16,752         $10,770         $10,504
   Japan .......................          13,712           8,284          10,319
   Korea .......................           4,693           3,647           9,063
   Taiwan ......................           6,727           7,898           8,935
   Germany .....................           2,018             378             299
   All other ...................           3,682           3,746           2,482
                                         -------         -------         -------
Total net revenues* ............         $47,584         $34,723         $41,602
                                         =======         =======         =======

                                     II-36


                                                             December 31,
                                                       -------------------------
                                                         2002              2003
                                                       -------           -------
Long-lived assets:
   United States ...........................           $42,989           $41,914
   Japan ...................................             6,787             7,225
   Korea ...................................             3,367             3,240
   Taiwan ..................................               168                39
                                                       -------           -------
Total long-lived assets ....................           $53,311           $52,418
                                                       =======           =======

         * Net revenues are attributed to countries  based on the deployment and
         service locations of systems.

         Nanometrics'  product lines differ  primarily  based on the environment
         the systems will be used in.  Automated  systems are used  primarily in
         high-volume production  environments.  Integrated systems are installed
         inside  wafer   processing   equipment   to  provide   near   real-time
         measurements for improving  process control and increasing  throughput.
         Tabletop   systems  are  used   primarily  in   low-volume   production
         environments and in engineering labs where automated  handling and high
         throughput are not required.  Sales by product type were as follows (in
         thousands):

                                                Years Ended December 31,
                                         ---------------------------------------
                                           2001            2002           2003
                                         -------         -------         -------
Automated systems ..............         $27,416         $19,969         $25,620
Integrated systems .............           7,527           4,155           6,106
Tabletop systems ...............           7,710           4,545           2,866
                                         -------         -------         -------
Total product sales ............         $42,653         $28,669         $34,592
                                         =======         =======         =======

13.      Selected Quarterly Financial Results (Unaudited)

         The following tables set forth selected quarterly results of operations
         for the years ended  December 31, 2002 and 2003 (in  thousands,  except
         per share amounts):



                                                                    Quarters Ended
                                                   -----------------------------------------------
                                                   Mar. 31,      Jun. 30,     Sep. 30,    Dec. 31,
                                                     2002         2002         2002         2002
                                                   --------     --------     --------     --------
                                                                              
Total net revenues ............................    $  8,025     $  8,392     $  8,569     $  9,737
Gross profit ..................................       3,976        3,909        3,840        3,996
Loss from operations ..........................      (2,547)      (3,088)      (3,915)      (5,537)
Net loss ......................................      (1,547)      (1,702)      (1,816)      (3,203)
Net loss per share, basic and diluted .........    $  (0.13)    $  (0.14)    $  (0.15)    $  (0.27)
Shares used in per share computation, basic and
   diluted ....................................      11,790       11,837       11,886       11,998




                                                                       Quarters Ended
                                                    ------------------------------------------------
                                                    Mar. 31,       Jun. 30,     Sep. 30,    Dec. 31,
                                                      2003          2003         2003         2003
                                                    --------      --------     --------     --------
                                                                                
Total net revenues .............................    $  9,350      $  9,734     $ 10,131     $ 12,387
Gross profit ...................................       3,805         3,299        4,167        6,020
Loss from operations ...........................      (3,637)       (4,033)      (3,187)      (1,436)
Net loss .......................................      (9,584)*      (4,083)      (2,996)        (804)
Net loss per shares, basic and diluted .........    $  (0.80)     $  (0.34)    $  (0.25)    $  (0.07)
Shares used in per share computations, basic and
   diluted .....................................      12,007        12,008       12,033       12,122


         *  Includes a $6,020  charge to record a  valuation  allowance  against
         deferred income tax assets.

                                     II-37


                                    * * * * *

                                     II-38


ITEM  9.  CHANGES  IN AND  DISAGREEMENTS  WITH  ACCOUNTANTS  ON  ACCOUNTING  AND
          FINANCIAL DISCLOSURE

None.


ITEM 9A. CONTROLS AND PROCEDURES

Nanometrics  maintains  disclosure  controls and procedures that are designed to
ensure that  information  required to be disclosed in the periodic reports filed
by Nanometrics with the Securities and Exchange Commission (the "Commission") is
recorded,  processed,  summarized and reported within the time periods specified
in  the  rules  and  forms  of the  Commission  and  that  such  information  is
accumulated  and  communicated  to  Nanometrics'  management.  In designing  and
evaluating  the  disclosure  controls and  procedures,  Nanometrics'  management
recognized  that any controls and  procedures,  no matter how well  designed and
operated, can provide only reasonable assurance of achieving the desired control
objectives  and  management  necessarily  was  required to apply its judgment in
evaluating the cost-benefit relationship of possible controls and procedures.

Based on their most recent evaluation,  Nanometrics' Chief Executive Officer and
Chief Financial  Officer have concluded that the Company's  disclosure  controls
and  procedures  (as  defined in Rules  13a-15e  and  15d-15e of the  Securities
Exchange  Act of 1934,  as amended)  are  effective  as of the end of the period
covered by this Annual Report Form 10-K. There were not any significant  changes
in internal controls or in other factors that could  significantly  affect these
internal controls during the fourth quarter.

                                     II-39


                                    PART III

ITEM 10. DIRECTORS AND EXECUTIVE OFFICERS OF THE REGISTRANT

The sections  titled  "Election of  Directors"  and  "Section  16(a)  Beneficial
Ownership  Reporting  Compliance"  appearing in the Registrant's proxy statement
for the annual meeting of  shareholders  for the year ended January 3, 2004 sets
forth  certain   information   which  is  incorporated  by  reference.   Certain
information with respect to persons who are executive officers of the Registrant
is set forth under the caption "Business - Executive Officers of the Registrant"
in Part I of this report.

We have  adopted a code of ethics,  entitled  the Code of  Business  Conduct and
Ethics, that applies to our employees, including our chief executive officer and
chief financial  officer.  The Code of Business  Conduct and Ethics is posted on
our website, www.nanometrics.com.


ITEM 11. EXECUTIVE COMPENSATION

The section titled "Executive  Compensation" appearing in the Registrant's proxy
statement for the annual meeting of  shareholders  for the year ended January 3,
2004  sets  forth  certain  information  with  respect  to the  compensation  of
management of the Registrant and is incorporated herein by reference.


ITEM 12.  SECURITY  OWNERSHIP OF CERTAIN  BENEFICIAL  OWNERS AND  MANAGEMENT AND
          RELATED SHAREHOLDER MATTERS

The section titled "Election of Directors"  appearing in the Registrant's  proxy
statement for the annual meeting of  shareholders  for the year ended January 3,
2004 sets  forth  certain  information  with  respect  to the  ownership  of the
Registrant's Common Stock and is incorporated herein by reference.


ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

The section titled "Transactions with Management"  appearing in the Registrant's
proxy  statement  for the  annual  meeting  of  shareholders  for the year ended
January 3, 2004 sets forth certain  information with respect to certain business
relationships  and  transactions  between the  Registrant  and its directors and
officers and is incorporated herein by reference.


ITEM 14. PRINCIPAL ACCOUNTANT FEES AND SERVICES

The  information  required by this Item is incorporated by reference and will be
set forth under the heading  "Relationship with Independent Public  Accountants"
to be included in the Company's  Proxy  Statement for the 2004 Annual Meeting of
Stockholders to be filed with the Securities and Exchange Commission pursuant to
Regulation 14A within 120 days after the end of our most recent fiscal year.

                                     III-1


                                    PART IV

ITEM 15. EXHIBITS,  CONSOLIDATED  FINANCIAL STATEMENT SCHEDULES,  AND REPORTS ON
         FORM 8-K

(a)      1. Consolidated Financial Statements.

         See Index to Consolidated  Financial Statements at Item 8 on page II-16
         of this Annual Report on Form 10-K.

         2.       Consolidated Financial Statement Schedules.

         The following consolidated financial statement schedules of Nanometrics
         Incorporated  are filed as part of this Annual  Report on Form 10-K and
         should  be  read  in  conjunction  with  the   Consolidated   Financial
         Statements of Nanometrics Incorporated:

Schedule                                                                    Page
- --------                                                                    ----

II   -   Valuation and Qualifying Accounts...............................   IV-4

         Schedules  not listed  above  have been  omitted  because  they are not
         applicable  or are not required or the  information  required to be set
         forth therein is included in the Consolidated  Financial  Statements or
         notes thereto.

(b)      Reports on Form 8-K. We furnished a Report on Form 8-K  disclosing  our
         earnings release on October 23, 2003.

(c)      Exhibits.

         The following exhibits are filed with this Annual Report on Form 10-K:

Exhibit No.    Description
- -----------    -----------
 3.1(8)        Amended and Restated Articles of Incorporation of Nanometrics
               Incorporated.

 3.2(2)        Bylaws of Nanometrics Incorporated.

 3.3(5)        Certificate of Amendment of Amended and Restated Bylaws of
               Nanometrics Incorporated.

 4.1(1)        Form of Common Stock Certificate.

10.1(2)        Form of Indemnification of Agreement for Directors & Officers.
               (Management contract required to be filed pursuant to Item 15(c)
               of this report.)

10.2(3)        1991 Stock Option Plan, as amended through May 15, 1997.

10.3(6)        1991 Director Option Plan.

10.4(2)        Loan Agreement between Japan Development Bank and Nanometrics
               Japan k.k.

10.5(2)        Loan Agreement and Guarantee dated June 5, 1995 between
               Mitsubishi Bank, Limited and Nanometrics Japan Ltd.

10.6(4)        Nanometrics Incorporated 2000 Employee Stock Option Plan and form
               of Stock Option Agreement.

10.7(4)        Nanometrics Incorporated 2000 Director Stock Option Plan and form
               of Stock Option Agreement.

10.8(7)        Nanometrics Incorporated 2002 Nonstatutory Stock Option Plan and
               form of Stock Option Agreement.

14             Code of Business Conduct and Ethics

                                      IV-1


Exhibit No.    Description
- -----------    -----------
21(2)          Subsidiaries of Registrant.

23.1           Independent Auditors' Consent.

24             Power of Attorney (see page IV-3).

31.1           Certificate of Chief Executive Officer

31.2           Certificate of Chief Financial Officer.

32.1           Certificate of Chief Executive Officer and Chief Financial
               Officer.

         (1)      Incorporated by reference to exhibits filed with  Registrant's
                  Registration  Statement on Form S-1 (File No. 2-93949),  which
                  became effective November 28, 1984.

         (2)      Incorporated by reference to the Registrant's Annual Report on
                  Form 10-K (File No. 000-13470) filed on April 1, 1998.

         (3)      Incorporated   by   reference   to  Exhibit   4.1  filed  with
                  Registrant's  Registration  Statement  on Form S-8  (File  No.
                  333-33583) filed on August 14, 1997.

         (4)      Incorporated by reference to exhibits filed with  Registrant's
                  Registration  Statement on Form S-8 (File No. 333-40866) filed
                  on July 7, 2000.

         (5)      Incorporated   by   reference   to  Exhibit  3.10  filed  with
                  Registrant's Annual Report on Form 10-K dated March 30, 2001.

         (6)      Incorporated   by   reference   to  Exhibit   4.2  filed  with
                  Registrant's  Registration  Statement  on Form S-8  (File  No.
                  33-43913) filed on November 14, 1991.

         (7)      Incorporated  by  reference  to  Exhibit  4.1  filed  with the
                  registrant's  Registration  Statement  on Form S-8  (File  No.
                  333-101137) filed on November 11, 2002.

         (8)      Incorporated  by reference to  registrant's  Annual  Report on
                  Form  10-K for the year  ended  December  31,  2002  (File No.
                  000-13470) filed on March 28, 2003.

(d)      Consolidated Financial Statements and Schedules.

         See Item 15(a) of this Annual Report on Form 10-K above.

                                      IV-2


                                   SIGNATURES

Pursuant to the  requirements of Section 13 or 15(d) of the Securities  Exchange
Act of 1934,  the  registrant  has duly  caused  this report to be signed on its
behalf by the undersigned, thereunto duly authorized.

Dated: March 31, 2004


                                              NANOMETRICS INCORPORATED

                                              By: /s/ Paul B. Nolan
                                                  --------------------
                                              Paul B. Nolan
                                              Chief Financial Officer and Vice
                                              President


                                POWER OF ATTORNEY

KNOW ALL PERSONS BY THESE  PRESENTS,  that each person whose  signature  appears
below  constitutes  and  appoints  John D. Heaton and Paul B. Nolan  jointly and
severally, his attorneys-in-fact,  each with the power of substitution,  for him
in any and all capacities, to sign any and all amendments to this Report on Form
10-K,  and to file the  same,  with  exhibits  thereto  and other  documents  in
connection  therewith,  with the  Securities  and  Exchange  Commission,  hereby
ratifying and confirming all that said  attorneys-in-fact,  or his substitute or
substitutes, may do or cause to be done by virtue hereof.

Pursuant to the requirements of the Securities Exchange Act of 1934, this Report
on Form 10-K has been  signed  below by the  following  persons on behalf of the
registrant on the 31st day of March, 2004 in the capacities indicated.

      Signature                                    Title
      ---------                                    -----

/s/ John D. Heaton               President, Chief Executive Officer and Director
- ---------------------------      (Principal Executive Officer)
John D. Heaton

/s/ Paul B. Nolan                Chief Financial Officer and Vice President
- ---------------------------      (Principal Financial and Accounting Officer)
Paul B. Nolan

/s/ Vincent J. Coates            Chairman of the Board
- ---------------------------
Vincent J. Coates

/s/ Nathaniel Brenner            Director
- ---------------------------
Nathaniel Brenner

/s/ William Oldham               Director
- ---------------------------

William Oldham

/s/ Edmond R. Ward               Director
- ---------------------------
Edmond R. Ward

                                      IV-3


SCHEDULE II

                            NANOMETRICS INCORPORATED
                        VALUATION AND QUALIFYING ACCOUNTS
                   Allowance for Doubtful Accounts Receivable

                             Balance at     Charged to  Deductions-     Balance
                             beginning      costs and    write-offs      at end
Year Ended                   of period      expenses    of accounts    of period
- ----------                   ---------      --------    -----------    ---------

December 31, 2001 ......      $418,000      $150,000      $  6,000      $562,000
                              --------      --------      --------      --------

December 31, 2002 ......      $562,000      $  4,000      $      0      $566,000
                              --------      --------      --------      --------

December 31, 2003 ......      $566,000      $ 10,000      $      0      $576,000
                              --------      --------      --------      --------

                                      IV-4