EXHIBIT 23.1

INDEPENDENT AUDITORS' CONSENT

We consent to the  incorporation  by reference in  Registration  Statement  Nos.
333-33583,  333-40866,  333-91714,  333-101137,  and  333-108474 of  Nanometrics
Incorporated  on Form S-8 of our  report  dated  March 29,  2004  (which  report
expresses an unqualified opinion and includes an explanatory  paragraph relating
to a change in method of accounting for goodwill and other  intangible  assets),
appearing in this Annual Report on Form 10-K of Nanometrics Incorporated for the
fiscal year ended January 3, 2004.


Deloitte & Touche LLP

San Jose, California
March 29, 2004