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                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                   FORM 8-K/A

                               Amendment No. 1 to

                                 CURRENT REPORT
                       Pursuant to Section 13 or 15(d) of
                       the Securities Exchange Act of 1934



                                  June 18, 2004
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                Date of Report (date of earliest event reported)


                            NANOMETRICS INCORPORATED
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             (Exact name of Registrant as specified in its charter)



          California                     0-13470                94-2276314
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(State or other jurisdiction of  (Commission File Number)    (I.R.S. Employer
incorporation or organization)                            Identification Number)


                               1550 Buckeye Drive
                           Milpitas, California 95035
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                    (Address of principal executive offices)


                                 (408) 435-9600
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              (Registrant's telephone number, including area code)

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                                EXPLANATORY NOTE

This Amendment No. 1 to Current Report on Form 8-K/A is filed for the purpose of
amending and restating  Item 4 of the Current  Report on Form 8-K of Nanometrics
Incorporated  (the "Company") dated June 18, 2004, filed with the Securities and
Exchange  Commission  on June 25,  2004,  to reflect the  effective  date of the
resignation of Deloitte & Touche LLP  ("Deloitte") as the Company's  independent
registered  public  accounting  firm and to file as Exhibit  16.1 a letter  from
Deloitte to the  Securities  and  Exchange  Commission  regarding  the change in
certifying accountant as of the date of such resignation.


ITEM 4.    Changes in Registrant's Certifying Accountant


         On June 18, 2004, Deloitte notified the Company of its intent to resign
as  the  Company's  independent  registered  public  accounting  firm  effective
immediately upon the completion of Deloitte's review of the Company's  unaudited
condensed  consolidated  interim  financial  statements  to be  included  in the
Company's Form 10-Q for the quarter ended July 3, 2004.  Deloitte  completed its
review on August 23, 2004 and Deloitte's resignation became effective as of that
date. The decision to change  accountants was not recommended or approved by the
audit committee of the Company's board of directors.

         Deloitte's  reports on the Company's  financial  statements  for fiscal
2002 and 2003 do not contain an adverse opinion or a disclaimer of opinion,  and
are not  qualified  or modified  as to  uncertainty,  audit scope or  accounting
principles,  except that such reports include an explanatory  paragraph relating
to a change in method of accounting for goodwill and other intangible assets.

         During fiscal 2002 and 2003 and the  subsequent  period  through August
23, 2004,  there were no  disagreements  between the Company and Deloitte on any
matter of accounting principles or practices, financial statement disclosure, or
auditing scope or procedure which  disagreements,  if not resolved to Deloitte's
satisfaction, would have caused Deloitte to make reference thereto in Deloitte's
reports on the Company's financial statements for such periods. In addition,  no
reportable  events,  as defined in Item 304(a)(1)(v) of Regulation S-K, occurred
during the Company's two most recent  fiscal years,  2002 and 2003,  and through
August 23, 2004.


         The  Company  has  requested  that  Deloitte  furnish  it with a letter
addressed to the Securities and Exchange  Commission stating that it agrees with
the above statements. A copy of such letter is attached hereto as Exhibit 16.1.

ITEM 7.    Financial Statements and Exhibits

      (c) Exhibits.

         16.1     Letter  from  Deloitte  &  Touche  LLP to the  Securities  and
                  Exchange Commission regarding change in certifying accountant.


                                    SIGNATURE

         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  Registrant  has duly  caused  this report to be signed on its behalf by the
undersigned hereunto duly authorized.


Dated: August 23, 2004


                                           NANOMETRICS INCORPORATED

                                           By: /s/ Paul B. Nolan
                                              ----------------------------------
                                               Paul B. Nolan
                                               Chief Financial Officer





                                  Exhibit Index

Exhibit
Number            Description
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16.1              Letter  from  Deloitte  &  Touche  LLP to the  Securities  and
                  Exchange Commission regarding change in certifying accountant.