FOR IMMEDIATE RELEASE


Contact:

John Heaton                                        Stan Piekos
President & CEO                                    CFO
Nanometrics                                        August Technology
408.435.9600                                       952.820.0080
jheaton@nanometrics.com                            stan.piekos@augusttech.com




          Nanometrics and August Technology Announce Agreement to Merge

          Merger will Create Global Leader in Metrology and Inspection


Milpitas, California - January 21, 2005 - Nanometrics Incorporated (NASDAQ:NANO)
and August  Technology  Corporation  (NASDAQ:AUGT)  jointly announced today that
they have entered into a merger agreement to create a combined company providing
comprehensive  inspection,  measurement  and  analysis  systems  to  the  global
semiconductor, flat panel display and related microelectronic industries.

Under the terms of the  merger  agreement,  Nanometrics  will  reincorporate  in
Delaware, each share of Nanometrics common stock will be exchanged for one share
of Nanometrics  Delaware (a subsidiary of Nanometrics  formed in connection with
the  reincorporation)  and each share of August  Technology common stock will be
exchanged for 0.6401 of a share of  Nanometrics  Delaware.  The  transaction  is
conditioned on obtaining requisite  shareholder  approvals from the shareholders
of both companies,  necessary regulatory  clearances and other customary closing
conditions,  including the receipt of legal opinions that the  transaction  will
qualify as a  "reorganization"  under the Internal  Revenue Code.  The companies
expect to close the transaction during the second quarter of 2005.

The  combined  company  will be  named  August  Nanometrics  Inc.  The  board of
directors  of the  combined  company  will  consist of seven  directors  - three
directors selected from the Nanometrics  board,  including Vincent J. Coates and
John Heaton,  and three  directors  selected from the August  Technology  board,
including Jeff O'Dell.  Coates,  currently chairman of the board of directors of
Nanometrics, will be chairman of the board of directors of the combined company;
Heaton,  currently  the CEO of  Nanometrics,  will  be the  CEO of the  combined
company;  and Stan Piekos,  currently the CFO of August Technology,  will be the
CFO of the combined company.  O'Dell will remain as a principle executive of the
combined company, remaining active in areas of strategic marketing and planning,
reporting directly to John Heaton.


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The combined company will offer complementary  product lines of yield maximizing
metrology and defect inspection.  "This merger makes great business sense," said
Heaton.  "We join two strong  product  lines with little  overlap,  and bring to
market a better  fab-wide  solution with  advanced  macro  inspection,  critical
dimension (CD) and film thickness  metrology aimed at the most challenging wafer
processing  areas such as  lithography.  By  combining  R&D,  service  and other
resources,  we  believe  we  can  deliver  excellent  quality  products  to  our
customers."

"We believe our  customers  and the  industry  will  benefit from the merger for
several reasons," said O'Dell.  "First, we believe it allows two customer-driven
organizations,  each with creative, innovative cultures to be more responsive on
a global basis; second, by leveraging our R&D efforts, we believe we can provide
leading-edge  technology  where it is needed  most.  And third,  we believe  our
ability to employ review and characterization  software to analyze a broad array
of defect,  film thickness and critical dimension data - from both the front-end
and final manufacturing - will give our customers a more comprehensive  approach
to maximizing yield improvement."

Piekos  added,  "The  merger  will  create a company  employing  over 550 people
worldwide with combined proforma 2004 revenues of approximately $140 million and
a strong balance sheet providing increased financial resources to support global
microelectronic device manufacturers."

A conference call  discussing the agreement will be held on Friday,  January 21,
2005 at 2:00 p.m. EST (1:00 p.m. CST,  11:00 a.m.  PST). To  participate  in the
call, please dial 719-457-0349  prior to the start time and use participant code
2883344.  A webcast of the  conference  call will also be available live via the
Internet on August Technolgy's website at www.augusttech.com and the Nanometrics
website  at  www.nanometrics.com.  An  archived  replay of the  webcast  will be
available shortly following the call and continuing through January 28, 2005. To
listen to the call  live,  please  visit the  website  at least  fifteen  minute
beforehand to download and install any necessary audio software.


About Nanometrics

Nanometrics   is  a  leader  in  the  design,   manufacture   and  marketing  of
high-performance  process control  metrology  systems used in the manufacture of
semiconductors,   integrated  circuits  and  flat  panel  displays.  Nanometrics
metrology  systems  measure  various  thin  film  properties,  critical  circuit
dimensions and layer-to-layer  circuit alignment  (overlay) during various steps
of the manufacturing  process,  enabling  semiconductor  and integrated  circuit
manufacturers  to  improve  yields,   increase   productivity  and  lower  their
manufacturing costs. The Company maintains its headquarters in Milpitas, CA, and
sales   and    service    offices    worldwide.    Nanometrics'    website   is:
http://www.nanometrics.com.


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About August Technology

August Technology's automated inspection,  metrology and data analysis solutions
provide  critical  product  and process  enhancing  information,  which  enables
microelectronic  device  manufacturers  to drive  down costs and time to market.
With the first all-surface advanced macro inspection solution, August Technology
has  incorporated  frontside,  backside  and wafer edge  inspection  in a single
system.  Following  detection August  Technology's  decision tools correlate the
defect data across surfaces and provide the comprehensive  information necessary
for device manufacturers to make process-enhancing  decisions.  Headquartered in
Bloomington,   Minnesota,  August  Technology  supports  its  customers  with  a
worldwide sales and service organization. Additional information can be found on
the company's web site at www.augusttech.com.

Cautionary  Statement  for the Purpose of the "Safe  Harbor"  Provisions  of the
Private Securities Litigation Reform Act of 1995

This press release contains forward-looking statements within the meaning of the
"safe harbor"  provisions  of the Private  Securities  Litigation  Reform Act of
1995. In some cases,  forward-looking statements can be identified by words such
as "believe," "expect," "anticipate," "plan," "potential," "continue" or similar
expressions.  Forward-looking statements also include the assumptions underlying
or relating to any of the foregoing statements.  Such forward-looking statements
are based upon current  expectations  and beliefs and are subject to a number of
factors and  uncertainties  that could cause actual results to differ materially
from those  described in the  forward-looking  statements.  The  forward-looking
statements  contained  in this press  release  include  statements  about future
financial and operating results and the proposed  Nanometrics/August  Technology
merger.  These  statements  are not  guarantees of future  performance,  involve
certain risks,  uncertainties and assumptions that are difficult to predict, and
are based upon  assumptions  as to future  events  that may not prove  accurate.
Therefore,  actual  outcomes  and  results  may differ  materially  from what is
expressed  herein.  For  example,  if either of the  companies  does not receive
required  shareholder  or  governmental  approvals  or  fails to  satisfy  other
conditions  to  closing,  the  transaction  will  not  be  consummated.  In  any
forward-looking statement in which Nanometrics or August Technology expresses an
expectation  or belief  as to  future  results,  such  expectation  or belief is
expressed in good faith and believed to have a reasonable  basis,  but there can
be no assurance  that the statement or  expectation  or belief will result or be
achieved or  accomplished.  The following  factors,  among  others,  could cause
actual results to differ materially from those described in the  forward-looking
statements:  the risk that the Nanometrics and August Technology businesses will
not be integrated successfully; costs related to the proposed merger; failure of
the  Nanometrics  or August  Technology  shareholders  to approve  the  proposed
merger;  and other economic,  business,  competitive  and/or regulatory  factors
affecting Nanometrics' and August Technology's  businesses generally,  including
those set forth in Nanometrics'  and August  Technology's  filings with the SEC,
including  their Annual  Reports on Form 10-K for their  respective  most recent
fiscal years,  especially in the Management's  Discussion and Analysis  section,


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their most recent  Quarterly  Reports on Form 10-Q and their Current  Reports on
Form 8-K.  All  forward-looking  statements  included in this press  release are
based on information  available to Nanometrics and August Technology on the date
hereof. Nanometrics and August Technology undertake no obligation (and expressly
disclaim any such obligation) to update forward-looking  statements made in this
press release to reflect  events or  circumstances  after the date of this press
release  or to update  reasons  why  actual  results  could  differ  from  those
anticipated in such forward-looking statements.

Additional Information and Where to Find It

Nanometrics Incorporated,  August Technology Corporation and Minor League Merger
Corporation  (which  will be  renamed  by  Nanometrics  Incorporated  and August
Technology  Corporation in connection with the proposed merger) intend to file a
joint  proxy  statement/prospectus  in  connection  with the merger  transaction
involving   Nanometrics   Incorporated,   Major  League  Merger  Corporation  (a
subsidiary of Nanometrics formed in connection with the proposed merger),  Minor
League  Merger  Corporation  and August  Technology  Corporation.  Investors and
security  holders  are  urged  to  read  the  joint  proxy  statement/prospectus
regarding the proposed merger when it becomes  available because it will contain
important    information    about   the    transaction.    The    joint    proxy
statement/prospectus  will be filed with the Securities and Exchange  Commission
by  Nanometrics  Incorporated  and August  Technology  Corporation  and security
holders may obtain a free copy of the joint proxy  statement/prospectus (when it
is available) and other documents filed by Nanometrics  Incorporated  and August
Technology  Corporation  with the  Securities  and  Exchange  Commission  at the
Securities and Exchange Commission's web site at  http://www.sec/gov.  The joint
proxy  statement/prospectus  and these other  documents may also be obtained for
free from Nanometrics  Incorporated or August  Technology  Corporation  investor
relations at investors@nanometrics.com and invest@augusttech.com, respectively.

August  Technology  Corporation and its executive  officers and directors may be
deemed to be participants in the  solicitation of proxies from the  stockholders
of August  Technology  Corporation and Nanometrics  Incorporated with respect to
the transactions  contemplated by the merger  agreement.  Information  regarding
such officers and directors is included in August Technology Corporation's Proxy
Statement for its 2003 Annual Meeting of Stockholders  filed with the Securities
and Exchange  Commission on March 11, 2004.  This document is available  free of
charge   at   the   Securities   and   Exchange   Commission's   web   site   at
http://www.sec.gov  and from August Technology Corporation investor relations at
invest@augusttech.com.

Nanometrics  Incorporated and its executive officers and directors may be deemed
to be  participants  in the  solicitation  of proxies from the  stockholders  of
August Technology  Corporation and Nanometrics  Incorporated with respect to the
transactions  contemplated by the merger agreement.  Information  regarding such
officers and directors is included in Nanometrics Incorporated's Proxy Statement
for its 2003  Annual  Meeting  of  Stockholders  filed with the  Securities  and
Exchange Commission on April 23, 2004. This document is available free of charge
at the Securities and Exchange Commission's web site at  http://www.sec.gov  and
from Nanometrics Incorporated investor relations at investors@nanometrics.com.

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