================================================================================ UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D. C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 March 1, 2005 Date of Report (date of earliest event reported) Nanometrics Incorporated (Exact name of Registrant as specified in charter) California 0-13470 94-2276314 (State or other jurisdiction of (Commission File Number) (I. R. S. Employer incorporation) Identification No.) 1550 Buckeye Drive, Milpitas, California 95035 (Address of principal executive offices) Registrant's telephone number, including area code: (408) 435-9600 N/A (Former name or former address, if changed since last report) Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions: |_| Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425) |_| Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12) |_| Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b)) |_| Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c)) ================================================================================ Item 1.01 - Entry into a Material Definitive Agreement. On March 1, 2005, the Compensation/Stock Option Committee of Nanometrics Incorporated approved an increase in the base salaries of officers who are expected to be named executive officers of the Company (as that term is defined by Item 402(a)(3) of Regulation S-K) for the fiscal year ending December 31, 2005. The base annual salaries for fiscal year 2005 have been changed as set forth in the table below. John D. Heaton, Chief Executive Officer From $349,999 to $367,498 Paul B. Nolan, Vice President and Chief Financial Officer From $189,757 to $191,654 Roger Ingalls Jr., Vice President of Sales From $194,039 to $205,028 Signature Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized. Dated: March 7, 2005 NANOMETRICS INCORPORATED /s/ Paul B. Nolan ------------------------------- Paul B. Nolan Chief Financial Officer