EXHIBIT 23


INDEPENDENT AUDITORS' CONSENT AND REPORT ON SCHEDULE


We consent to the  incorporation  by reference in  Registration  Statement  Nos.
33-8518, 33-8519, 33-43913 and 333-33583 of Nanometrics Incorporated on Form S-8
of our report dated  February 16, 1999  appearing in this Annual  Report on Form
10-K of Nanometrics Incorporated for the year ended December 31, 1998.

Our  audits  of  the  consolidated  financial  statements  referred  to  in  our
aforementioned  report  also  included  the  consolidated   financial  statement
schedule of Nanometrics Incorporated, listed in Item 14(a)(2). This consolidated
financial statement schedule is the responsibility of the Company's  management.
Our responsibility is to express an opinion based on our audits. In our opinion,
such consolidated  financial statement schedule,  when considered in relation to
the basic consolidated financial statements taken as a whole, presents fairly in
all material respects the information set forth therein.




DELOITTE & TOUCHE LLP

San Jose, California
March 26, 1999



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