EXHIBIT 10.25
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SUBCONTRACT University of California
Lawrence Livermore National Laboratory
NO. B519044 Procurement & Material
P.O. Box 5012
Livermore, CA 94551
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SUBCONTRACTOR: UNIVERSITY PROCUREMENT REPRESENTATIVE:
ZYGO CORPORATION William V. Karleskind
Attention: Karen DuPerry Subcontract Administrator Specialist
P.O. Box 448
Middlefield, CT 06455-0448 Phone #: (925) 422-7503
Fax #: (925) 422-9294
E-Mail: karleskind1@llnl.gov
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INTRODUCTION
This is a subcontract for the finishing of 588 NIF optics, as further described
herein.
The parties to this Subcontract are The Regents of the University of California
(hereinafter called "University") and the party identified above as the
"Subcontractor."
This is a subcontract under Prime Contract No. W-7405-ENG-48 between the
University and the United States Government (hereinafter called "Government"),
represented by the Department of Energy (hereinafter called "DOE"), for the
management and operation of the Lawrence Livermore National Laboratory
(hereinafter called "LLNL"), and the performance of certain research and
development work.
AGREEMENT
The parties agree to perform their respective obligations in accordance with the
terms, conditions, and provisions of the attached SCHEDULE OF ARTICLES and any
documents referenced or incorporated therein, which together with this
Subcontract Signature Page shall collectively constitute the entire Subcontract
and shall supersede all prior negotiations, representations, or agreements,
whether verbal or written.
ZYGO CORPORATION THE REGENTS OF
THE UNIVERSITY OF CALIFORNIA
BY: /s/ Peter B. Mumola BY: /s/ E.M. Moffet
------------------------- -------------------------------------
E.M. Moffet
TITLE Vice President, Optics TITLE Deputy for Subcontracts
------------------------- -------------------------------------
LLNL Procurement & Material
DATE: 1/14/02 DATE: 1-11-02
------------------------- -------------------------------------
Signature Page
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SCHEDULE OF ARTICLES
FOR
SUBCONTRACT NO. B519044
ARTICLE 1 - INCORPORATED DOCUMENTS
The following documents and forms are hereby incorporated as a part of this
Schedule of Articles of the Subcontract and are attached hereto:
DOCUMENTS
GENERAL PROVISIONS FOR FIXED PRICE SUPPLIES AND SERVICES (GPS#600C; REV
05/23/01) STATEMENT OF WORK (DATE 12/13/01)
ARTICLE 2 - SCOPE OF WORK
A. The Subcontractor shall conduct certain work generally described as
finishing of 588 NIF Optics. This work is more specifically described in
the attached Statement of Work (SOW) and the applicable referenced LLNL
drawings.
B. The Subcontractor shall furnish all personnel, supervision, materials,
supplies, equipment, tools, facilities, transportation, testing, and other
incidental items and services necessary for performance of the work, except
for Government Property specified herein to be furnished by the University.
The Subcontractor shall deliver the materials, products, supplies, reports,
and residuals, as specified.
C. The work shall be performed by the Subcontractor at the Subcontractor's
facility located at Middlefield, Connecticut, and at other locations
approved by the University.
D. This Subcontract is designated as a DX-E1 Rated Order. The Subcontractor
shall comply with the provisions of the Defense Priorities and Allocations
System Regulation (15 CFR Part 700) in obtaining controlled materials and
other products and services needed to perform this Subcontract.
E. The University may, at its option, by written unilateral modification to
this Subcontract, require the continued performance of the Scope of Work
described herein for the option period specified in Article 3 - PERIOD OF
PERFORMANCE. Exercise of the option will be at least 60 days prior to the
completion of the initial Subcontract period of performance.
ARTICLE 3 - PERIOD OF PERFORMANCE
The work described in ARTICLE 2 - SCOPE OF WORK shall be completed on or before
February 3, 2002, in accordance with the subcontract production schedule
indicated in the SOW.
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ARTICLE 4 - PRICE, PAYMENT, AND TRANSPORTATION
A. Price
1. The Subcontractor shall be paid the following fixed prices for the
finishing of 588 NIF optics in accordance with the schedule and
technical specifications of the ARTICLE 2 - SCOPE OF WORK.
YEAR 1
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Optic Type Drawing Number Quantity Fixed Extended
Unit Price Price
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Amplifier Slab (full spec) AAA96-105113-OC 432* $6,311 $2,726,352
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Amplifier Slab (lower spec) AAA96-105115-QA TBD* $6,065* $TBD*
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Polarizer (lower spec) AAA96-105515-QA 19 $3,739 $71,041
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LM1 Mirror AAA96-105312-OD 24 $8,304 $199,296
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All other mirrors See Attached SOW 113 $3,883 $438,779
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Total Maximum Fixed Price 588 $3,435,468
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* The possibility of the Subcontractor having to finish an amplifier
slab to the lower specification is dependent on the homogeneity of the
unfinished optics provided by the University, however, it is
considered unlikely. Unit pricing is included above in the event that
this should occur.
2. The Subcontractor shall be paid an incentive for reduced breakage as
follows:
Amplifier Slabs:
For the 432 amplifier slabs requiring finishing under this
Subcontract, the Subcontractor shall be paid the incentive shown below
for reduced breakage amounts achieved. The incentive for amplifier
slabs shall be evaluated four times during this Subcontract, after
each 108 slabs are completed. These periods shall be mutually
exclusive with regard to determining breakage and incentive amounts.
Number of Slabs: 108 108 108 108
*Number of Broken Slabs Incentive Amount
----------------------- ---------------------------------------------
0 $40,000 $40,000 $40,000 $40,000
1 $30,000 $30,000 $30,000 $30,000
2 $10,000 $10,000 $10,000 $10,000
3 $ 0 $ 0 $ 0 $ 0
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Polarizers:
For the 19 polarizers requiring finishing under this Subcontract, the
Subcontractor shall be paid the incentive shown below for reduced
breakage amounts achieved. The incentive for polarizers shall be
evaluated once during this Subcontract, after completion of all units.
Total
Number of Polarizers 19
Number Broken Incentive Amount
-------------------------------
0 $5,000
1 $ 0
For this Subcontract, the incentive amount paid for both amplifier
slabs and polarizers shall be subject to a total ceiling amount of
$165,000.00, which shall be the limit of the University's obligation.
3. The total maximum price is $3,600,468.00.
4. If exercised by a unilateral modification to this Subcontract, the
Subcontractor shall finish an additional 690 optics at the fixed unit
prices indicated below, consistent with the specifications and
schedule of the ARTICLE 2 - SCOPE OF WORK. Delivery of these option
quantities, if exercised, will be after successful completion of the
initial 588 optics.
OPTION (YEAR 2)
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Fixed Extended
Optic Type Drawing Number Quantity Unit Price Price
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Amplifier Slab (full spec) AAA96-105113-OC 462 $6,311 $2,915,682
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Amplifier Slab (lower spec) AAA96-105115-QA TBD* $6,065* $TBD
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LM1 Mirror AAA96-105312-OD 48 $8,304 $398,592
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All other mirrors See Attached SOW 180 $3,883 $698,940
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Total Maximum Fixed Price 690 $4,013,214
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* The possibility of the Subcontractor having to finish an amplifier
slab to the lower specification is dependent on the homogeneity of the
unfinished optics provided by the University, however, it is
considered unlikely. Unit pricing is included above in the event that
this should occur.
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Consistent with the incentive for the first year, the Subcontractor
shall be paid the following incentive for reduced breakage on the 462
amplifier slabs under this option:
Number of Slabs: 15 115 116 116
*Number of Broken Slabs Incentive Amount
----------------------- ---------------------------------------------
0 $40,000 $40,000 $40,000 $40,000
1 $30,000 $30,000 $30,000 $30,000
2 $10,000 $10,000 $10,000 $10,000
3 $ 0 $ 0 $ 0 $ 0
For this option, the incentive amount paid for amplifier slabs shall
be subject to a total ceiling amount of $160,000.00, which shall be
the limit of the University's obligation.
If this option is exercised by the University per a unilateral
modification, the total maximum price of this Subcontract will be
$7,773,682.00.
The prices stated above do not include, and the University shall not
be charged for, any State Sales & Use Tax. The University holds
California State Resale Permit No. SR-CHA 21-135323.
B. Pricing of Adjustments
When costs are a factor in any determination of a Subcontract price
adjustment, pursuant to the "Changes" clause of the GENERAL PROVISIONS
or any other provision of this Subcontract, such costs shall be in
accordance with the contract cost principles and procedures in Part 31
of the Federal Acquisition Regulation (48 CFR Part 31), as
supplemented or modified by DEAR Part 931 (48 CFR Part 931) in effect
as of the date of award of this Subcontract.
C. Invoices
The Subcontractor shall submit its invoice upon completion of the work
to the following address:
University of California
Lawrence Livermore National Laboratory
Attn: Bill Karleskind, L-443
P.O. Box 5001
Livermore, CA 94551
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D. Payment and Shipment
Payment shall be made within 30 days after receipt of the
Subcontractor's invoice, upon the University's acceptance of any
portion of the work delivered or rendered for which a piece is
separately stated or an invoice is allowed. Shipment of optics may
occur as soon as all specifications are achieved, prior acceptance of
the metrology data is not required. Payment, however, will continue to
be upon acceptance of the metrology data.
E. Transportation Terms
F.O.B. point: Origin
Shipping Point: Zygo Corporation, Middlefield, Connecticut
Shipping Instructions: Burlington Express
Mark airway bill: "Bill Recipient
Account 411-288-721"
ARTICLE 5 - COORDINATION AND ADMINISTRATION
A. The University Procurement Representative is Bill Karleskind. All
matters relating to the administration, performance, and non-technical
interpretation of this Subcontract shall be referred to the University
Procurement Representative. The Subcontractor shall direct all notices
and requests for approval to the University Procurement
Representative. The University Procurement Representative will issue
any notices or non-technical approvals to the Subcontractor.
B. The University Technical Representative for this Subcontract is Joe
Menapace. The University Technical Representative will provide
technical direction in connection with the work to be performed under
this Subcontract. The term "technical direction" is defined to include
91) direction to the Subcontractor which assist in the interpretation
of drawings, specifications, or technical portions of the work
description; and (2) the review and approval of technical reports,
drawings, specifications, and information to be delivered by the
Subcontractor under the Subcontract, where required. The University
Technical Representative will issue all technical direction in
writing.
C. The University Technical Representative is not authorized to issue any
technical direction which would (1) constitute an assignment of work
outside the general scope of the work covered by this Subcontract; (2)
change the description of the work to be performed or any applicable
drawings, designs, and specifications; (3) change the time or place of
performance; the method of shipment or packaging, or the place of
inspection, delivery, or acceptance; (4) increase the estimated cost
for performance of the work or the time required for performance of
the work; (5) change any expressed term or condition of the
Subcontract; or (6) unreasonably interfere with the Subcontractor's
ability to perform and complete the work. Any such change must first
be authorized by a written modification to this Subcontract issued by
the University Procurement Representative.
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ARTICLE 6 - REPORTS
As indicated in the attached SOW, the Subcontractor shall submit weekly
Inventory Tracking Sheet (ITS) reports to the University Technical
Representative, consistent with the previous production subcontract
B514527. Also required by the attached SOW is a requirement to maintain
certain technical documentation and procedures consistent with the same
previous subcontract. These reports, documentation, and procedures shall be
coordinated on an informal basis with the University Technical
Representative, no formal distribution shall be required.
ARTICLE 7 - PROPERTY
A. The Subcontractor shall acquire, and/or the University will furnish to
the Subcontractor, the materials, equipment, supplies, and/or tangible
personal property items identified below, for use under this
Subcontract:
Subcontractor Acquired Property:
None
University Furnished Government Property
In addition to the material to be supplied by the University as
indicated in the SOW, the property currently identifiable and
accountable under Subcontract B514527 will be transferred to this
Subcontract. At such time, the appropriate property will be identified
and listed in this Subcontract. Until that time the Subcontractor is
hereby authorized to use the University Furnished Government Property
provided under B514527 in performance of this Subcontract.
B. All property acquired by the Subcontractor and/or furnished by the
University shall be identified, utilized, accounted for, and
dispositioned in accordance with the clause of the General Provisions
entitled GOVERNMENT PROPERTY (FIXED PRICE SUBCONTRACT). Disposition
directions and authorization will be provided by the University's
Property Management Department.
C. Non-Subcontract Use of Government Owned Equipment:
1. Notwithstanding the limitation on Subcontractor use of Government
property in the GENERAL PROVISION entitled GOVERNMENT PROPERTY, the
Subcontractor may use the government owned equipment listed above
without charge in the performance of, in order of preference:
a. Subcontracts under Department of Energy Contract No.
W-7405-ENG-48;
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b. Prime contracts with the Government that specifically authorize
such use without charge;
c. Subcontracts of any tier under Government prime contracts other
than W-7405-ENG-48 if the Contracting Officer having cognizance
of the Prime contract (i) approves a Subcontract specifically
authorizing such Use or (ii) otherwise authorizes such use in
writing; and
d. Other work to the extent that such use does not interfere with
work under a, b, and c above.
2. The Subcontractor agrees not to include in the price or prices of any
such contracts or Subcontracts the cost of said listed property, or
any allowance or charge to cover depreciation or amortization. The
Subcontractor further agrees to allocate the cost of maintenance,
upkeep, repairs, and consumables to the appropriate customers as
defined in paragraph C1 above, or to the appropriate indirect cost
pool. In the case of the three ring polishers (RPs), the Subcontractor
agrees to absorb the cost of normally scheduled maintenance, repairs,
and upkeep. If the RPs are used on non-Subcontract work, these costs
may be allocated to the appropriate customer, provided the allocation
does not include the University. In the case of RP consumables,, the
Subcontractor agrees to provide those utilized in the continuous
operation of the RPs, while those used in the actual processing of
optics are to be properly allocated to the price of the optics
themselves.
3. Nothing in this Subcontract shall abrogate any right of the University
to withdraw Government Owned Equipment from the Subcontractor upon
reasonable notice, subject to provision for equitable adjustment that
may exist in an active University Subcontract affected by such
withdrawal. The University is not responsible for the effect of such
withdrawal on any work being performed by the Subcontractor under any
other contract or subcontract.
ARTICLE 8 - APPROVAL OF TECHNICAL DATA
If this Subcontract requires the Subcontractor to furnish any drawings,
specifications, diagrams, layouts, schematics, descriptive literature,
illustrations, schedules, performance or test data, or other technical data for
approval by the University prior to Subcontractor performance, the approval of
the data by the University shall not relieve the Subcontractor from
responsibility for any errors or omissions in such data or from responsibility
for complying with the requirements of this Subcontract, except as specified
below. Any work done prior to such approval shall be at the Subcontractor's
risk.
If the data includes any variations from the Subcontract requirements, the
Subcontractor shall describe such variations in writing at the time of
submission of the data. If the University approves any such variation(s), a
change order to the Subcontract shall be issued by the University and, if
appropriate, a bilateral modification to the Subcontract shall be negotiated.
-82-
ARTICLE 9 - ASSIGNMENT OF PERSONNEL
It is understood and agreed that the Subcontractor's key technical personnel
assigned to this work shall not be reassigned or replaced without prior
University approval, except where such circumstances are beyond the reasonable
control of the Subcontractor.
The Subcontractor shall not employ unfit or unqualified personnel in the
performance of this Subcontract. Should the University deem anyone employed on
the work incompetent or unfit for his or her duties and so inform the
Subcontractor, the Subcontractor shall remove such person from work under this
Subcontract and he or she shall not again, without written permission of the
University, be assigned to work under this Subcontract.
ARTICLE 9 - GENERAL PROVISIONS
A. The clauses incorporated by reference in the attached GENERAL
PROVISIONS shall be applicable to this Subcontract based on the value
of the Subcontract, the status of the Subcontractor, and the nature
and location of the work as indicated in the GENERAL PROVISIONS. As
used therein, the term "Seller" shall mean "Subcontractor," and the
terms "Purchase Order" and "PO" shall mean "Subcontract."
B. This Subcontract shall not involve access to or the generation of
classified information or access to "limited" or "exclusion" security
areas. Accordingly, the clauses listed in the GENERAL PROVISIONS
related to such work shall not apply.
C. This Subcontract is not for the conduct of research, development, or
demonstration (RD&D) work, or design work involving non-standard types
of construction. Accordingly, the clauses listed in the GENERAL
PROVISIONS related to such work shall not apply.
END OF SCHEDULE OF ARTICLES
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STATEMENT OF WORK
Production (P3/P4)
NID0075521
1. OBJECTIVE
The objective of this Subcontract is to perform optical finishing on 588
production optics (amplifiers, polarizers, and mirrors) to support the National
Ignition Facility (NIF), a 192 beam laser capable of fusion ignition. An option
for an additional 690 optics is also included in this Subcontract. The
Subcontractor shall utilize the technologies and facilities established by them
under NIF/ICF development, facilitization, and pilot production for the
manufacturing of these optics.
2. WORK REQUIREMENTS
The Subcontractor shall provide all labor, facilities, equipment (other than
that provided as GFE) and processes needed to finish the quantities of optics
listed in section 3 of this SOW. Much of the equipment required to finish these
optics has been provided as GFE. Consistent with ARTICLE 7 - PROPERTY of the
Subcontract Schedule of Articles, the Subcontractor shall be responsible for the
cost of maintenance and repairs of all GFE. However, no equipment modifications
or upgrades shall be performed on GFE without the written approval of the
University's Procurement Representative. In addition, the Subcontractor shall
maintain a qualified workforce capable of manufacturing NIF optics with
stringent specifications.
The University shall provide all optical blanks for finishing under this
Subcontract as well as the epoxy kits, shaped cladding strips for the laser slab
assemblies, PET-G containers and shipping crates. The Subcontractor shall notify
the University in writing sixty days in advance of their needs for this
University supplied material. The University will ensure that all requests are
met in a timely manner to avoid shortages that may impact the Subcontractor's
production schedule.
3. QUANTITIES
Table 1 shows the number and types of optics to be fabricated under this
Subcontract that covers twelve months of what is referred to by the University
as P3 Production. The numbers and types correspond to a baseline production
scenario that represent the required production rate for this Subcontract.
SOW -1-
This document contains information proprietary to the Zygo Corporation
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Table 2 shows those optics that the University requires as an additional
one-year option (P4) with the quantities and optic mix shown. The University
anticipates exercising this option at least sixty days prior to the completion
of the baseline quantities.
SOW -2-
This document contains information proprietary to the Zygo Corporation
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Table 1. Optics to be finished under this Subcontract:
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OPTIC Drawing number Mar-02 Apr-02 May-02 Jun-02 Jul-02 Aug-02
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LASER GLASS
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Amplifier slab AAA96-105113-OC 35 35 35 35 35 35
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POLARIZER
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Polarizer AAA96-105112-OD
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MIRRORS
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LM1 AAA96-105312-OD 2 2
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LM2 AAA96-105322-OE 1 11 11 5
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LM3 AAA96-105332-OE
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LM4a AAA96-105412-OC
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LM4b AAA96-105422-OC
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LM5 AAA96-105432-OC 10
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LM6 AAA96-105442-OC 6 9 9
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LM7a AAA96-105452-OD
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LM7b AAA96-105462-OD
- --------------------------------------------------------------------------------
LM7c AAA96-105472-OD
- --------------------------------------------------------------------------------
LM7d AAA96-105342-OD
- --------------------------------------------------------------------------------
LM7e AAA96-105352-OE
- --------------------------------------------------------------------------------
LM8a AAA96-105482-OD
- --------------------------------------------------------------------------------
LM8at AAA96-105362-OC
- --------------------------------------------------------------------------------
LM8b AAA96-105492-OD
- --------------------------------------------------------------------------------
LM8bt AAA96-105372-OC
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Total 46 46 46 46 46 46
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LM1, LM2, LM3, and Polarizer are being revised per ECR 2031 (relaxation of
roughness from 0.4 nm to 1.0 nm)
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OPTIC Drawing number Sep-02 Oct-02 Nov-02 Dec-02 Jan-03 Feb-03 Total
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LASER GLASS
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Amplifier slab AAA96-105113-OC 37 37 37 37 37 37 432
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POLARIZER
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Polarizer AAA96-105112-OD 12 7 19
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MIRRORS
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LM1 AAA96-105312-OD 2 2 4 4 4 4 24
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LM2 AAA96-105322-OE 28
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LM3 AAA96-105332-OE 0
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LM4a AAA96-105412-OC 1 11 11 11 34
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LM4b AAA96-105422-OC 0
- --------------------------------------------------------------------------------
LM5 AAA96-105432-OC 10
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LM6 AAA96-105442-OC 1 25
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LM7a AAA96-105452-OD 0
- --------------------------------------------------------------------------------
LM7b AAA96-105462-OD 6 10 16
- --------------------------------------------------------------------------------
LM7c AAA96-105472-OD 0
- --------------------------------------------------------------------------------
LM7d AAA96-105342-OD 0
- --------------------------------------------------------------------------------
LM7e AAA96-105352-OE 0
- --------------------------------------------------------------------------------
LM8a AAA96-105482-OD 0
- --------------------------------------------------------------------------------
LM8at AAA96-105362-OC 0
- --------------------------------------------------------------------------------
LM8b AAA96-105492-OD 0
- --------------------------------------------------------------------------------
LM8bt AAA96-105372-OC 0
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Total 52 52 52 52 52 52 588
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- --------------------------------------------------------------------------------
LM1, LM2, LM3, and Polarizer are being revised per ECR 2031 (relaxation of
roughness from 0.4 nm to 1.0 nm)
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Table 2. Optics to be finished as a follow-on option:
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OPTIC Drawing number Mar-03 Apr-03 May-03 Jun-03 Jul-03 Aug-03
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LASER GLASS
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Amplifier slab AAA96-105113-OC 38 38 38 38 38 38
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POLARIZER
- --------------------------------------------------------------------------------
Polarizer AAA96-105112-OD
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MIRRORS
- --------------------------------------------------------------------------------
LM1 AAA96-105312-OD 4 4 4 4 4 4
- --------------------------------------------------------------------------------
LM2 AAA96-105322-OE
- --------------------------------------------------------------------------------
LM3 AAA96-105332-OE
- --------------------------------------------------------------------------------
LM4a AAA96-105412-OC 6
- --------------------------------------------------------------------------------
LM4b AAA96-105422-OC 8 14 14 11
- --------------------------------------------------------------------------------
LM5 AAA96-105432-OC 3 14 14
- --------------------------------------------------------------------------------
LM6 AAA96-105442-OC
- --------------------------------------------------------------------------------
LM7a AAA96-105452-OD
- --------------------------------------------------------------------------------
LM7b AAA96-105462-OD
- --------------------------------------------------------------------------------
LM7c AAA96-105472-OD
- --------------------------------------------------------------------------------
LM7d AAA96-105342-OD
- --------------------------------------------------------------------------------
LM7e AAA96-105352-OE
- --------------------------------------------------------------------------------
LM8a AAA96-105482-OD
- --------------------------------------------------------------------------------
LM8at AAA96-105362-OC
- --------------------------------------------------------------------------------
LM8b AAA96-105492-OD
- --------------------------------------------------------------------------------
LM8bt AAA96-105372-OC
- --------------------------------------------------------------------------------
Total 56 56 56 56 56 56
- --------------------------------------------------------------------------------
LM1, LM2, LM3, and Polarizer are being revised per ECR 2031 (relaxation of
roughness from .4 nm to 1.0 nm)
- --------------------------------------------------------------------------------
- --------------------------------------------------------------------------------
OPTIC Drawing number Sep-03 Oct-03 Nov-03 Dec-03 Jan-04 Feb-04 Total
- --------------------------------------------------------------------------------
LASER GLASS
- --------------------------------------------------------------------------------
Amplifier slab AAA96-105113-OC 39 39 39 39 39 39 462
- --------------------------------------------------------------------------------
POLARIZER
- --------------------------------------------------------------------------------
Polarizer AAA96-105112-OD 12 7 0
- --------------------------------------------------------------------------------
MIRRORS
- --------------------------------------------------------------------------------
LM1 AAA96-105312-OD 4 4 4 4 4 4 48
- --------------------------------------------------------------------------------
LM2 AAA96-105322-OE 0
- --------------------------------------------------------------------------------
LM3 AAA96-105332-OE 10 16 26
- --------------------------------------------------------------------------------
LM4a AAA96-105412-OC 6
- --------------------------------------------------------------------------------
LM4b AAA96-105422-OC 47
- --------------------------------------------------------------------------------
LM5 AAA96-105432-OC 10 41
- --------------------------------------------------------------------------------
LM6 AAA96-105442-OC 0
- --------------------------------------------------------------------------------
LM7a AAA96-105452-OD 14 6 20
- --------------------------------------------------------------------------------
LM7b AAA96-105462-OD 6 16 2 24
- --------------------------------------------------------------------------------
LM7c AAA96-105472-OD 0
- --------------------------------------------------------------------------------
LM7d AAA96-105342-OD 0
- --------------------------------------------------------------------------------
LM7e AAA96-105352-OE 6 10 16
- --------------------------------------------------------------------------------
LM8a AAA96-105482-OD 0
- --------------------------------------------------------------------------------
LM8at AAA96-105362-OC 0
- --------------------------------------------------------------------------------
LM8b AAA96-105492-OD 0
- --------------------------------------------------------------------------------
LM8bt AAA96-105372-OC 0
- --------------------------------------------------------------------------------
Total 59 59 59 59 59 59 690
- --------------------------------------------------------------------------------
LM1, LM2, LM3, and Polarizer are being revised per ECR 2031 (relaxation of
roughness from 0.4 nm to 1.0 nm)
- --------------------------------------------------------------------------------
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4. SPECIFICATIONS
The specifications for each optical component are contained within the drawings
that are listed in Appendix A. Prior to commencement of work the Subcontractor
shall confirm with the University Technical Representative that they have the
most current drawings. All drawings and appendices should already be in the
Subcontractor's possession, however, any that are not will be sent upon request.
Note that these drawings have been written in accordance with the ISO 10110
standard. The optics shall be finished to meet the specifications on the
finished optics drawings listed in Appendix A. The corresponding material
drawings and specifications are listed in Appendix B. The attachment "Detailed
Cladding Guidance," Appendix D, provides details on cladding that augments the
drawings and supersedes them in places.
The ability of the Subcontractor to meet the transmitted wavefront requirements
of polarizers is dependent on the material inhomogeneity. The best commercially
available material may be insufficient to meet the transmitted wavefront
specification. Any material that is unable to be finished, meaning a reasonable
effort has been made by the Subcontractor to meet the transmitted wavefront
specification, shall be finished to the prefigured specifications in drawing
AAA96-105515. If after award of this Subcontract, the Subcontractor should
develop the capability to preferentially figure optics to compensate for
material inhomogeneity, then the additional cost for that effort will be
negotiated as a separate subcontract action.
Laser glass inhomogeneity will also impact finished transmitted wavefront
performance. To address this issue amplifier slabs shall be divided into two
classes of material as illustrated in the table below.
Table 2: Finished amplifier slab RMS gradient specification
For different grades of blank homogeneity
-------------------------------------------------------------
Blank RMS gradient <=0.0083 >0.0083
specification
(waves/cm @ 633nm)
-------------------------------------------------------------
Finished RMS <=0.0111 >0.0111
Gradient specification (<1(lambda) p-v)
(waves/cm @ 633nm) (<1.8 nm PSD1)
-------------------------------------------------------------
For amplifier slabs with blank RMS gradient <=0.0065 waves/cm the vendor shall
finish the parts to full specification as per drawing AAA96-105113-OC. For
optics with blank RMS gradient 0.0065 <= X <= 0.0083, the vendor shall finish
the optics under best effort to wavefront specifications as per drawing
AAA96-105113-OC. For amplifiers with RMS gradient > 0.0083, the vendor shall
finish the optics to the specifications as per drawing AAA96-105115-0A.
SOW -5-
This document contains information proprietary to the Zygo Corporation
-88-
5. MANUFACTURING YIELD/BREAKAGE
The optical blanks that are shaped by the Subcontractor have significant value,
particularly amplifier slabs ($15K - $30K each) and polarizers ($11K - $15K
each). Breakage of these optics results in a loss to the NIF program. Also,
excessive breakage of amplifier slabs may force the University to initiate an
additional melting campaign at an approximate cost of $10M - $15M. Given the
value of these blanks, it is imperative that reasonable efforts be taken by the
Subcontractor to protect these optics from damage during processing.
Based on breakage rates from past ICF projects, the University expects the
breakage rate not to exceed 2% over a quantity of at least 25 of each optic type
(amplifier slab, polarizer, or mirror). A breakage rate from 2%-5% shall result
in a report to the University Technical Representative to present the current
issues and mitigation strategy. Breakage rates exceeding 5% may result in a
STOP-WORK ORDER being issued by the University, consistent with the General
Provisions of this Subcontract. If a STOP-WORK ORDER is issued the Subcontractor
shall cease all work until a mitigation strategy aimed at solving the problem,
is implemented. Mitigation measures could include such actions as improved
training, fixture modifications, machine interlock systems, removal of an
employee from this subcontract. Etc.
Breakage shall be defined as damage caused by the Subcontractor that renders the
optic useless. Non-Conformance Reports (NCRs) shall not apply against breakage
determinations.
6. REPORTING REQUIREMENTS
A) WEEKLY PROGRESS REPORTS - INVENTORY TRACKING SHEET (ITS)
The Subcontractor shall send a status list of all optics within
their Facility utilizing the established Excel compatible ITS
spreadsheet Utilized in previous subcontracts B335188 and
B514527.
The following documents, while not specific deliverables under this Subcontract,
shall be maintained by the Subcontractor and updated as necessary to reflect any
changes or improvements. These documents were originally developed and approved
as part of the scope of work under Subcontract B335188 and maintained under
Subcontract B514527. The Subcontractor shall notify the University's Technical
Representative if any changes are made to the QA/QC Plan or to any of the
Process Materials and Procedures, providing appropriate details for the
University to determine the impact to finished optics. A brief description of
each document follows, though the complete requirement is contained in the
statements of work for B335188 and B514527 and is incorporated by reference
herein:
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B) QUALITY ASSURANCE PLAN
The Subcontractor shall maintain and adhere to a documented
Quality Assurance/Quality Control (QA/QC) plan and program. This
plan and program shall provide for the control of the design,
procurement, manufacturing, delivery, and test activities of the
production of items, systems, and services required by this SOW
and applicable Drawings. Procedures implementing the requirements
of the Subcontractor's QA/QC program plan shall be maintained as
well.
The Subcontractor shall retain interferometric production data,
surface quality maps and final inspection records on all finished
optics delivered under this Subcontract for a minimum of seven
years after expiration of this Subcontract. These records shall
be made available to the University Technical Representative upon
request. Within a reasonable time prior to the end of the
retention period, the Subcontractor shall request disposition
instructions of the records from the University Technical
Representative.
C) PROCESS MATERIALS AND PROCEDURES (PMP)
The Subcontractor shall maintain PMP documentation, which shall
contain:
1. A description of the process used to fabricate the optical
components from material arrival at the Subcontractor
through finishing, final cleaning, testing, and packaging (a
flow chart);
2. A list of all materials including brand names and/or
compositions of grinding and polishing compounds, blocking
waxes, polishing pitch, in-process surface protectors, strip
coatings, in-process surface identification markers, etc.;
3. A detailed description of the surface figure generation
(grinding) and polishing procedures used to ensure no
subsurface damage or surface microcracks remain in the
finished optical surfaces, including grit sizes, dept of
material removed during each step, acid etches, etc.
(process sheets);
4. A detailed description of in-process procedures and solvents
used for removing surface treatments, residues, etc.;
5. A description of steps taken to protect the optics from
damage due to dirt and/or chemical contamination;
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6. A description of any forms generated for internal use
documenting immediate processing steps, etc.
The detailed PMP shall be retained at the Subcontractor's facility for
the duration of this Subcontract. The University does not need or
desire copies of the detailed procedures. In the event that there are
specific PMIs that could materially impact the performance of the
laser system, the University will request access to the specific
PMP(s) of interest. The Subcontractor shall either grant access to the
University Technical Representative and/or his designee at the
Subcontractor's facility or prepare a non-proprietary version with as
much detail as possible.
D) FINAL TEST PROCEDURES (FTP)
The Subcontractor shall maintain an FTP document that shall include:
1. A list and detailed description of all test equipment;
2. A description of all test equipment calibration;
3. A list and description of all test equipment calibration
references and a copy of their accuracy certification and/or
traceability to another standard;
4. A sequence of steps required to check the compliance of each
finished substrate to the physical and performance
requirements as specified on the drawing.
E) FINAL CLEANING PROCEDURES (FCP)
The Finisher shall maintain an FCP document that shall contain:
1. A detailed description of each step in the final cleaning
process, including the equipment used and the approximate
duration of each step.
2. A list of brand names of all cleaning and drying agents used
in the FCP, and
3. A detailed description of the final cleanliness inspection
and packaging facilities.
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7. ROUTINE/SCHEDULED MAINTENANCE AND UNFORESEEN/CATASTROPHIC FAILURE ON GFE
Consistent with the previous production subcontract for P2 (B514527), the
Subcontractor shall continue to be responsible for routine/schedule maintenance
on all GFE, however, the cost of replacement parts, only, for
unforeseen/catastrophic failures on GFE, will be the responsibility of the
University. The cost of replacement parts for unforeseen/catastrophic failures
will be managed under a separate blanket subcontract. The Subcontractor shall
continue to provide its labor for replacement of these parts.
8. APPENDICES
As stated above, all of the following appendices are already in the possession
of the Subcontractor and are, therefore, incorporated by reference. Any
additional copies will be supplied upon request.
Appendix A Finished Optics Drawing Package
Appendix B Material Drawings and Specifications Package
Appendix C NIF Optics Production Plan - Rev 7/26/99
Appendix D Detailed Cladding Guidance - NIF OPT 97-0003373;
Revision 2; May 1, 1999
Appendix E Guidance for Cleaning Pet-G Containers and Packaging and Handling
Of Large NIF Optical Components - NIF 0026182
Appendix F Identification Requirements for NIF Large Optics - NIF 0017092A
Appendix G Optical Inventory Tracking Procedure - Finishing Vendors
Appendix H Scratch Dig Memo
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APPENDIX A: FINISHED OPTICS DRAWINGS
The following drawings comprise this set:
- --------------------------------------------------------------------------------
OPTIC TYPE DRAWING NUMBER REVISION NUMBER
- --------------------------------------------------------------------------------
Slab, Amplifier AAA96-105113 OC
- --------------------------------------------------------------------------------
Slab, Amplifier, Prefigured AAA96-105115 OA
- --------------------------------------------------------------------------------
Polarizer AAA96-105512 OD
- --------------------------------------------------------------------------------
Polarizer, Prefigured AAA96-105515 OA
- --------------------------------------------------------------------------------
LM1 AAA96-105312 OE
- --------------------------------------------------------------------------------
LM2 AAA96-105322 OF
- --------------------------------------------------------------------------------
LM3 AAA96-105332 OF
- --------------------------------------------------------------------------------
LM4A AAA96-105412 OC
- --------------------------------------------------------------------------------
LM4B AAA96-105422 OC
- --------------------------------------------------------------------------------
LM5 AAA96-105432 OC
- --------------------------------------------------------------------------------
LM6 AAA96-105442 OC
- --------------------------------------------------------------------------------
LM7A AAA96-105452 OD
- --------------------------------------------------------------------------------
LM7B AAA96-105462 OE
- --------------------------------------------------------------------------------
LM7C AAA96-105472 OD
- --------------------------------------------------------------------------------
LM7D AAA96-105342 OD
- --------------------------------------------------------------------------------
LM7E AAA96-105352 OE
- --------------------------------------------------------------------------------
LM8A AAA96-105482 OD
- --------------------------------------------------------------------------------
LM8AT AAA96-105362 OC
- --------------------------------------------------------------------------------
LM8B AAA96-105492 OD
- --------------------------------------------------------------------------------
LM8BT AAA96-105372 OC
- --------------------------------------------------------------------------------
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APPENDIX B: BLANK OPTICS DRAWINGS
The following drawings comprise this set:
- --------------------------------------------------------------------------------
OPTIC TYPE DRAWING NUMBER REVISION NUMBER
- --------------------------------------------------------------------------------
Slab, Amplifier AAA96-10511 OD
- --------------------------------------------------------------------------------
Polarizer AAA96-105511 OC
- --------------------------------------------------------------------------------
LM1 AAA96-105311 OA
- --------------------------------------------------------------------------------
LM2 AAA96-105321 OA
- --------------------------------------------------------------------------------
LM3 AAA96-05331 OB
- --------------------------------------------------------------------------------
LM4A AAA96-105411 OB
- --------------------------------------------------------------------------------
LM4B AAA96-105421 OB
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LM5 AAA96-105431 OB
- --------------------------------------------------------------------------------
LM6 AAA96-105441 OB
- --------------------------------------------------------------------------------
LM7A AAA96-105451 OB
- --------------------------------------------------------------------------------
LM7B AAA96-105461 OB
- --------------------------------------------------------------------------------
LM7C AAA96-105471 OB
- --------------------------------------------------------------------------------
LM7D AAA96-105341 OB
- --------------------------------------------------------------------------------
LM7E AAA96-105351 OB
- --------------------------------------------------------------------------------
LM8A AAA96-105481 OB
- --------------------------------------------------------------------------------
LM8AT AAA96-105361 OA
- --------------------------------------------------------------------------------
LM8B AAA96-105491 OB
- --------------------------------------------------------------------------------
LM8BT AAA96-105371 OA
- --------------------------------------------------------------------------------
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