INDEPENDENT AUDITORS' CONSENT

We consent to incorporation by reference in Registration Statements No.
33-62087, No. 33-57060, No. 33-28728, No. 33-20880, No. 33-34619, and 33-05265
on Forms S-8 of our report dated June 13, 1996, relating to the consolidated
balance sheets of NexStar Automation, Inc. as of December 31, 1995 and 1994, and
the related consolidated statements of operations, stockholders' equity, and
cash flows for the years ended December 31, 1995, 1994, and 1993 which report
appears in the September 12, 1996 Current Report on Form 8-K/A of Zygo
Corporation.


                                             Ehrhardt Keefe Steiner & Hottman PC


November 13, 1996
Denver, Colorado