1
                                                                    Exhibit 23.3


May 4, 2000


Axcelis Technologies, Inc. (formerly known as Eaton Semiconductor
Equipment Inc.)
55 Cherry Hill Drive
Beverly, Massachusetts 01915


Dear Sir or Madam:

In conformity with Regulation Section 230.438 of the Securities Act of 1933, I
hereby consent to be named a director of Axcelis Technologies, Inc. (formerly
known as Eaton Semiconductor Equipment Inc.) in its registration statement on
Form S-1 and related documents. I understand and consent to the filing of these
documents with the United States Securities and Exchange Commission.

Sincerely,

/s/ Mary G. Puma
- ---------------------------------------

Name:  Mary G. Puma
      ----------------------------------
Title: Officer and Nominee for Director
      ---------------------------------
Date:  5/4/2000
      ----------------------------------