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                                                                     EXHIBIT 2.3


                          TRADEMARK LICENSE AGREEMENT


                  THIS AGREEMENT is made this 30th day of June, 2000, between
EATON CORPORATION, a corporation organized and existing under the laws of the
State of Ohio, United States of America, and having its principal place of
business at 1111 Superior Avenue, Eaton Center, Cleveland, Ohio 44114, United
States of America (hereinafter called "EATON"), and AXCELIS TECHNOLOGIES, INC.
(formerly known as Eaton Semiconductor Equipment, Inc.), a corporation organized
and existing under the laws of the State of Delaware, and having executive
offices at 55 Cherry Hill Drive, Beverly, Massachusetts 01915 (hereinafter
called "LICENSEE"). Capitalized terms used herein and not otherwise defined
shall have the meanings ascribed to such terms in Article I hereof.

                                  WITNESSETH:

         WHEREAS, EATON manufactures and sells PRODUCTS (as hereinafter defined)
in the United States of America (U.S.A.) and in other countries of the world;

         WHEREAS, EATON has adopted and for many years has used the LICENSED
TRADEMARKS (as hereinafter defined) throughout the world in connection with the
PRODUCTS, and EATON is the owner in many countries in the world of registrations
and applications for registration of the LICENSED TRADEMARKS;

         WHEREAS, the business of LICENSEE consists of the business and
operations conducted by EATON and its subsidiaries as EATON's Semiconductor
Equipment Operations and LICENSEE desires to use the LICENSED TRADEMARKS in
connection with the PRODUCTS in accordance with the terms and provisions set
forth in this TRADEMARK LICENSE AGREEMENT (hereinafter called this "AGREEMENT");

         WHEREAS, EATON is agreeable to such use of LICENSED TRADEMARKS by
LICENSEE on the terms set forth below provided that the LICENSED TRADEMARKS
remain the exclusive property of EATON; and

         WHEREAS, EATON has also licensed one or more of the LICENSED TRADEMARKS
in connection with products similar to the PRODUCTS to Sumitomo Eaton Nova
Kabushiki Kaisha (hereinafter called "SEN") subject to and upon the terms of a
Trademark Agreement dated January 16, 1996, as amended (hereinafter called the
"SEN Trademark Agreement"), and EATON has authorized SEN to use "EATON" in its
corporate name, subject to and upon the terms of a Corporate Name Agreement
dated April 1, 1983 (hereinafter called the


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SEN Corporate Name Agreement), and these agreements with SEN have been assigned
by EATON to LICENSEE.

         NOW, THEREFORE, in consideration of the promises, terms, covenants and
provisions hereinafter contained, and intending to be legally bound, the parties
hereby agree as follows:

I.       DEFINITIONS:

                  1.01 "PRODUCTS" as used herein shall mean semiconductor
                  manufacturing equipment including dry strip,
                  photostabilization, rapid thermal processing, and ion
                  implantation equipment.

                  1.02 "LICENSED TRADEMARKS" as used herein shall mean the
                  following trademarks, all of which are owned exclusively by
                  EATON:

                  (i)      "EATON" in block, Helvetica or other type letters;
                           and

                  (ii)     "EATON" in stylized form, also referred to as LOGO or
                           logomark.

                  1.03 "SEPARATION DATE" and "SEPARATION AGREEMENT" are
                  described in Section 3.06 herein.

                  1.04 "PERSON" means any individual, partnership, corporation,
                  limited liability company, association, joint stock company,
                  trust, joint venture, unincorporated organization or
                  governmental entity or any department, agency or political
                  subdivision thereof.

                  1.05 "AFFILIATED COMPANY" of any PERSON means any entity that
                  controls, is controlled by or is under common control with
                  such PERSON. As used herein, "control" means the possession,
                  directly or indirectly, of the power to direct or cause the
                  direction of the management and policies of such entity,
                  whether through ownership of voting securities or other
                  interests, by contract or otherwise.



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                  1.06 "SUBSIDIARY" of any PERSON means a corporation or other
                  organization, whether incorporated or unincorporated, of which
                  at least a majority of the securities or interests having by
                  the terms thereof ordinary voting power to elect at least a
                  majority of the board of directors or others performing
                  similar functions with respect to such corporation or other
                  organization is directly or indirectly owned or controlled by
                  such PERSON and/or by any one or more of its SUBSIDIARIES;
                  provided that no PERSON that is not directly or indirectly
                  wholly-owned by any other PERSON shall be a SUBSIDIARY of such
                  other PERSON unless such other PERSON controls, or has the
                  right power or ability to control, that PERSON.

                  1.07 "AXCELIS TECHNOLOGIES GROUP" means the LICENSEE,
                  SUBSIDIARY and AFFILIATED COMPANY of the LICENSEE immediately
                  after the SEPARATION DATE or that is contemplated to be a
                  SUBSIDIARY or AFFILIATED COMPANY of LICENSEE pursuant to the
                  NON-US PLAN and each PERSON that becomes a SUBSIDIARY or
                  AFFILIATED COMPANY of LICENSEE after the SEPARATION DATE.
                  NON-US PLAN is defined in the SEPARATION AGREEMENT.

                  1.08 "EATON GROUP" means EATON, each SUBSIDIARY and AFFILIATED
                  COMPANY of EATON (other than any member of the AXCELIS
                  TECHNOLOGIES GROUP) immediately after the SEPARATION DATE,
                  after giving effect to the NON-US PLAN, and each PERSON that
                  becomes a SUBSIDIARY or AFFILIATED COMPANY of EATON after the
                  SEPARATION DATE.

II.      GRANT :

                  2.01 EATON hereby grants to LICENSEE for the term of this
                  AGREEMENT a worldwide, royalty free, non-exclusive right and
                  license to use the LICENSED TRADEMARKS in connection with the
                  PRODUCTS manufactured by or for LICENSEE.



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III.     MARKING AND USE:

                  3.01 LICENSEE may use one or more of the LICENSED TRADEMARKS
                  (a) on the PRODUCTS and/or packaging for the PRODUCTS, and (b)
                  in or on literature, signs, stationery, nameplates, labels,
                  and advertising and promotional materials associated with the
                  PRODUCTS in such a manner which will at all times preserve the
                  validity of the LICENSED TRADEMARKS. EATON shall have the
                  right to review (a) whether and which of the LICENSED
                  TRADEMARKS will be used by the LICENSEE on the PRODUCTS and/or
                  on the packaging and (b) the manner in which the LICENSED
                  TRADEMARKS are affixed or applied to the PRODUCTS and/or the
                  packaging. Such determination will take into consideration the
                  type and size of the PRODUCTS. Unless otherwise approved in
                  writing, all the PRODUCTS, literature, signs, packaging,
                  stationery, nameplates, labels, advertising and promotional
                  materials shall include the following notice:

                                    "EATON" is a trademark of and used under
                           license from Eaton Corporation, U.S.A."

                  3.02 LICENSEE shall follow the rules and guidelines regarding
                  form, layout, letter size and colors of the LICENSED
                  TRADEMARKS as set forth in EATON's Corporate Identity Manual,
                  including any amendments to said Manual by EATON from time to
                  time.

                  3.03 LICENSEE shall not do any act that will in any way impair
                  or affect the validity of the LICENSED TRADEMARKS.

                  3.04 LICENSEE shall take all action necessary to satisfy
                  trademark marking requirements in all countries in which the
                  LICENSED TRADEMARKS are used.

                  3.05 LICENSEE further agrees that all use of the LICENSED
                  TRADEMARKS shall inure to the benefit of EATON.



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                  3.06 Unless otherwise approved in writing by EATON, LICENSEE
                  shall not use any trademark, designation or insignia in
                  combination with the LICENSED TRADEMARKS on the PRODUCTS,
                  packaging and literature, signs, stationery, nameplates,
                  labels, and/or advertising and promotional material associated
                  with the PRODUCTS, except that, for the term of this
                  AGREEMENT, (i) LICENSEE will be allowed to phase in any
                  reasonable use of the mark "AXCELIS" with the LICENSED
                  TRADEMARKS subject to prior review and written approval by
                  EATON; and (ii) LICENSEE will be allowed to use the LICENSED
                  TRADEMARKS with other trademarks in the same manner and
                  appearance as was used before the "SEPARATION DATE" as defined
                  in the Master Separation and Distribution Agreement dated June
                  30, 2000 by and between EATON and LICENSEE (the "SEPARATION
                  AGREEMENT"), to which this AGREEMENT is an exhibit.

IV.      QUALITY STANDARDS:

                  4.01 The rights granted under this AGREEMENT by EATON to
                  LICENSEE are all expressly conditioned upon the maintenance by
                  LICENSEE of the standards of quality and reliability for the
                  PRODUCTS established in conformity with past practices by
                  EATON.

                  4.02 LICENSEE shall submit to EATON upon request regular
                  production samples or photographs of the PRODUCTS for
                  inspection and/or testing by EATON. LICENSEE shall permit
                  authorized representatives of EATON to inspect, during normal
                  business hours, the plant, equipment, manufacturing and
                  assembly techniques of LICENSEE which relate to the PRODUCTS
                  and EATON shall have the right to test the PRODUCTS at its own
                  expense on the premises of LICENSEE or at any other location
                  so as to determine whether LICENSEE is manufacturing the
                  PRODUCTS in conformity with the past practices of quality
                  standards and specifications of EATON. EATON shall advise
                  LICENSEE of any discrepancies in quality or specifications and
                  LICENSEE, upon receipt of such advice, agrees to promptly
                  correct any discrepancies to the satisfaction of EATON.

V.       SAMPLE APPROVAL:

                  5.01 LICENSEE shall submit for examination and approval by
                  EATON samples or photographs of all the PRODUCTS, packaging
                  for the PRODUCTS and literature, signs, stationery, labels,
                  nameplates, advertising and promotional material associated
                  with the PRODUCTS (hereinafter called "TRADEMARKED ARTICLES")
                  prior to use and/or distribution by



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                  LICENSEE. Such submission shall be made to EATON's Patent Law
                  Department and the Communications Department at Eaton
                  Corporation, 1111 Superior Avenue, Eaton Center, Cleveland,
                  Ohio 44114, U.S.A.

                  5.02 In the event EATON does not approve any such proposed use
                  of the LICENSED TRADEMARKS on the TRADEMARKED ARTICLES,
                  LICENSEE shall not make such use of the TRADEMARKED ARTICLES.

                  5.03 EATON shall approve any proposed use of the LICENSED
                  TRADEMARKS which is reasonable, but in no event will approve
                  any such proposed use which would diminish the value of or
                  impair the validity of any of the LICENSED TRADEMARKS or
                  violate any of the trademark laws of any country in which the
                  TRADEMARKED ARTICLES will be used and/or distributed.

VI.      SIMILAR TRADEMARKS:

                  6.01 Other than the right to use the LICENSED TRADEMARKS
                  provided for in this AGREEMENT, LICENSEE shall not use any
                  mark confusingly similar to any of the LICENSED TRADEMARKS
                  without express written permission from EATON. Should
                  LICENSEE, during the term of this AGREEMENT, assert ownership
                  in any insignia, designation or trademark which, in the
                  reasonable opinion of EATON, is the same as, or confusingly
                  similar to any insignia, designation or trademark owned by
                  EATON, its subsidiaries and/or associated companies, LICENSEE
                  will upon request of EATON, transfer and assign all right,
                  title and interest in such insignia, designation or trademark
                  to EATON or EATON's designee.

VII.     OTHER MARKS:

                  7.01 Except as authorized by the terms of this AGREEMENT,
                  LICENSEE shall not use any trademark insignia or designation
                  similar to any of the LICENSED TRADEMARKS on or in connection
                  with the PRODUCTS or file



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                  or cause to be filed any trademark or service mark application
                  in any country of the world covering any of the PRODUCTS or
                  any trademark, service mark, insignia or designation similar
                  to any of the LICENSED TRADEMARKS without first obtaining
                  written permission from EATON.

VIII.    CONTINUED RIGHTS:

                  8.01 Upon termination of this AGREEMENT all rights granted to
                  LICENSEE herein shall revert to EATON, but LICENSEE may
                  continue to enjoy the trademark privileges set forth herein
                  for a period of six (6) months after the date of termination
                  or until the depletion of LICENSEE's stock of the PRODUCTS
                  which bear the LICENSED TRADEMARKS, whichever shall occur
                  first. However, the aforementioned six (6) months' continued
                  use privilege shall not apply if EATON terminates this
                  AGREEMENT pursuant to Sections 10.02 or 10.03 hereof and in
                  such case the use shall cease immediately as of the date of
                  termination.

IX.      ALLEGED INFRINGEMENT:

                  9.01 LICENSEE shall promptly notify EATON of any alleged
                  and/or suspected infringement of the LICENSED TRADEMARKS and
                  agrees to cooperate with EATON and do all acts, deeds and
                  things necessary for protecting the LICENSED TRADEMARKS
                  against alleged infringers. EATON shall have the sole right to
                  initiate and control legal proceedings with respect to alleged
                  infringers or take whatever action it deems necessary with
                  respect thereto. EATON shall have the right to institute such
                  legal proceedings in its name, or in the name of LICENSEE, or
                  in the joint names of EATON and LICENSEE. All costs incurred
                  regarding the LICENSED TRADEMARKS under this Section 9.01
                  shall be borne by EATON.

                  9.02 LICENSEE hereby agrees to indemnify, defend, save and
                  hold EATON and its subsidiaries and affiliates harmless from
                  any and all costs or expenses relating to any claims of injury
                  or damage to person or property



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                  arising out of the manufacture, marketing, and/or use of
                  PRODUCTS sold, leased, or promoted in connection with the
                  LICENSED TRADEMARKS, unless such are shown to have been caused
                  by EATON's gross negligence or willful misconduct.

X.       TERM AND TERMINATION:

                  10.01 This AGREEMENT shall be effective on the "SEPARATION
                  DATE" as defined in the SEPARATION AGREEMENT. As to the use of
                  the LICENSED TRADEMARKS by LICENSEE, excluding the use thereof
                  by SEN in accordance with the terms of the SEN Trademark
                  Agreement and the use of "EATON" in its corporate name by SEN
                  in accordance with the terms of the SEN Corporate Name
                  Agreement (defined in Section 11.01(a) hereinbelow), this
                  Agreement shall remain in effect, unless terminated earlier
                  pursuant to Sections 10.02 or 10.03 hereof, for a period of
                  three (3) years ending June 30, 2003. As to the use of the
                  Licensed Trademarks by SEN in accordance with the terms of the
                  SEN Trademark Agreement and the use of "EATON" in its
                  corporate name by SEN in accordance with the terms of the SEN
                  Corporate Name Agreement, this Agreement shall remain in
                  effect until December 31, 2004 unless the SEN Trademark
                  Agreement and/or the SEN Corporate Name Agreement are
                  terminated earlier in accordance with their respective terms.

                  10.02 LICENSEE shall have the right to terminate this
                  AGREEMENT at any time upon written notice to EATON.

                  10.03 EATON shall have the right to terminate this AGREEMENT
                  immediately upon written notice to LICENSEE in the event of:



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                                    (a) liquidation, insolvency, bankruptcy, or
                           receivership of LICENSEE or any assignment for the
                           benefit of creditors by LICENSEE; or

                                    (b) any litigation arising from or in
                           connection with LICENSEE's use of the LICENSED
                           TRADEMARKS which in EATON's reasonable opinion may
                           adversely diminish the value of the LICENSED
                           TRADEMARKS in the jurisdiction of the litigation; or

                                    (c) if LICENSEE is in default of any Section
                           of this Agreement, which default is not remedied by
                           LICENSEE within thirty (30) days notice from EATON.

                           10.04 This AGREEMENT may be terminated and the IPO
                           abandoned, or the IPO may be delayed, at any time
                           prior to the IPO Closing by and in the sole
                           discretion of EATON without the consent of LICENSEE.
                           This AGREEMENT may be terminated at any time after
                           the IPO Closing and before the Distribution Date by
                           mutual consent of EATON and LICENSEE. In the event of
                           termination pursuant to this Section 10.04, no party
                           shall have any liability of any kind to the other
                           party. "IPO", "IPO Closing" and "Distribution Date"
                           are each defined in the SEPARATION AGREEMENT and
                           incorporated herein by reference.

XI.      EATON-SEN INTELLECTUAL PROPERTY AGREEMENTS:

                  11.01    LICENSEE and EATON acknowledge the following:

                                    (a) EATON and SEN are parties to a Master
                           License Agreement dated January 16, 1996, as amended
                           (hereinafter called the "Master License Agreement"),
                           the SEN Corporate Name Agreement and the SEN
                           Trademark Agreement. These agreements between EATON
                           and SEN are hereinafter collectively referred to as
                           the "EATON-SEN IP Agreements";

                                    (b) The Master License Agreement by its
                           terms shall continue until December 31, 2004 and be
                           automatically renewed



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                           unless either of the parties thereto provides written
                           notice by December 31, 2003 to the other of its
                           intention to terminate the agreement or renew with
                           modifications, subject to renegotiation. The SEN
                           Trademark Agreement by its terms shall continue in
                           effect for a period which is concurrent with the
                           Master License Agreement and any renewal thereof. The
                           SEN Corporate Name Agreement provides that EATON may
                           withdraw its consent to use by SEN of the name
                           "EATON" in SEN's corporate name upon sixty (60) days
                           written notice to SEN.

                                    (c) Pursuant to the Consent Letter dated
                           April 25, 2000, Sumitomo Heavy Industries, Ltd.
                           ("SHI"), SHI agreed to the assignment of the
                           EATON-SEN IP Agreements by EATON to LICENSEE.

                                    (d) Pursuant to the terms of an agreement
                           between EATON and LICENSEE titled "Assignment And
                           Assumption Agreement" to be executed on or about the
                           same date as this Agreement, EATON has assigned its
                           rights and obligations under the terms of the
                           EATON-SEN IP Agreements to LICENSEE.

                  11.02 In accordance with Sections 21.02 and 21.03 of the
                  Master License Agreement, LICENSEE shall notify SEN by
                  December 31, 2003 of its intent to renegotiate the EATON-SEN
                  IP Agreements in order to effect the termination of the SEN
                  Trademark Agreement and the SEN Corporate Name Agreement by
                  December 31, 2004, including therein that the notice also
                  constitutes notice of termination of the SEN Trademark
                  Agreement and the SEN Corporate Name Agreement effective
                  December 31, 2004. LICENSEE shall promptly provide copies to
                  EATON of the notice to and any reply from SEN and keep EATON
                  timely informed of the renegotiation as it relates to this
                  matter.





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                  11.03 LICENSEE shall not amend, renew, extend or allow the
                  extension of the SEN Corporate Name Agreement or the SEN
                  Trademark Agreement beyond December 31, 2004 without the prior
                  written consent of EATON, which consent may be withheld in
                  EATON's sole discretion.

                  11.04 If SEN ceases to use "EATON" in its corporate name
                  and/or as a trademark prior to December 31, 2004, LICENSEE
                  shall conduct discussions with SEN regarding the termination
                  of the SEN Corporate Name Agreement and/or the SEN Trademark
                  Agreement prior to December 31, 2004. LICENSEE shall keep
                  EATON informed regarding such discussions and/or any decision
                  by SEN to phase out its use of "EATON", and provide a copy to
                  EATON of any written agreement resulting from such
                  discussions.

                  11.05 None of the terms of the EATON-SEN IP Agreements that
                  provides a right of early termination is intended to be waived
                  or modified by any term of this Agreement and shall continue
                  in effect.

                  11.06 LICENSEE shall be responsible for monitoring and
                  enforcement of the quality control and other rights to protect
                  the use of the name "EATON" in SEN's corporate name under the
                  terms of the SEN Corporate Name Agreement and the LICENSED
                  TRADEMARKS under the terms of the SEN Trademark Agreement,
                  including enforcement of Section 6 entitled "Marking and Use",
                  Section 7 entitled "Quality Standards" and Section 8 entitled
                  "Sample Approval". LICENSEE shall promptly provide notice to
                  EATON of any breach or perceived breach of any of the terms of
                  the SEN Trademark Agreement or the SEN Corporate Name
                  Agreement.

                  11.07 The above Sections 11.01-11.06 shall survive the
                  termination or expiration of the LICENSEE's right to use the
                  LICENSED TRADEMARKS pursuant to Section 10.01 above and shall
                  continue in effect until the SEN Trademark Agreement is
                  terminated or has expired and the SEN Corporate Name Agreement
                  is terminated.





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XII.     RECORDAL:

                  12.01 LICENSEE shall execute all papers which are necessary to
                  record LICENSEE or SEN as a user of the LICENSED TRADEMARKS in
                  the countries where such recordal is necessary or advisable in
                  order to protect EATON's rights in the LICENSED TRADEMARKS.
                  The fees for such recordal shall be paid for by LICENSEE.

XIII.    SUBLICENSING RIGHTS:

                  13.01 LICENSEE shall not have the right to sublicense any of
                  its rights granted under this AGREEMENT except to carry out
                  the terms of the SEN Trademark Agreement and the SEN Corporate
                  Name Agreement.

XIV.     BINDING EFFECT; ASSIGNMENT:

                  14.01 This AGREEMENT shall inure to the benefit of and be
                  binding upon the parties hereto and their respective
                  successors and permitted assigns. This AGREEMENT may be
                  enforced separately by each member of the Eaton Group and each
                  member of the Axcelis Technologies Group. LICENSEE may not
                  assign this AGREEMENT or any right or obligation hereunder in
                  whole or in part without the prior written consent of EATON,
                  which consent may be withheld by EATON in its sole discretion,
                  and without such consent any assignment shall be void. EATON
                  shall have the right to assign this AGREEMENT or any right or
                  obligation under this Agreement in whole or in part to any
                  party without consent of LICENSEE. No permitted assignment of
                  any right or obligation hereunder, in whole or in part, by
                  operation of law or otherwise, will release the assigning
                  party as the obligor, jointly and severally with the assignee,
                  from any of its obligations hereunder.





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XV.      FORCE MAJEURE:

                  15.01 Neither party shall be liable or responsible for damages
                  or in any manner to the other for failure or delay to perform
                  or fulfill any provisions of this AGREEMENT when such failure
                  is due to fires, strikes, acts of God, legal acts of public
                  authorities, or delays and default caused by public carriers,
                  or for any other acts or causes whatsoever whether similar or
                  dissimilar, which cannot responsibly be predicted or provided
                  against, provided, however, that the party so affected shall
                  promptly give notice in writing to the other party setting
                  forth the reason or causes for such delay or non-performance
                  and shall use its best efforts to avoid or remove such reason
                  or cause and shall continue performance hereunder with the
                  utmost dispatch. Whenever such reason or cause for delay and
                  non-performance is not eliminated within a period of sixty
                  (60) days, the other party may, at its option, without any
                  liability whatsoever, suspend or terminate this AGREEMENT by
                  giving sixty (60) days written notice to the affected party.

XVI.     ENTIRE AGREEMENT; AMENDMENT:

                  16.01 This AGREEMENT, along with the Separation Agreement and
                  the other Ancillary Agreements (as defined in the Separation
                  Agreement), constitute the sole and entire understandings of
                  the parties hereto with respect to the matters contemplated
                  hereby and supersedes and renders null and void all prior
                  negotiations, representations, agreements and understandings
                  (oral and written) between the parties with respect to such
                  matters. No change or amendment may be made to this AGREEMENT
                  except by an instrument in writing signed on behalf of each of
                  the parties.

XVII.    FAILURE OR INDULGENCE NOT WAIVER; REMEDIES CUMULATIVE:

                  17.01 Any provisions of this AGREEMENT or any breach thereof
                  may only be waived if done specifically and in writing by the
                  party hereto that is entitled to the benefits thereof. No
                  failure or delay on the part of either



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                  party hereto or thereto in the exercise of any right hereunder
                  or thereunder shall impair such right or be construed to be a
                  waiver of, or acquiescence in, any breach of any
                  representation, warranty or agreement herein or therein, nor
                  shall any single or partial exercise of any such right
                  preclude other or further exercise thereof or of any other
                  right. All rights and remedies existing under this AGREEMENT
                  are cumulative to, and not exclusive of, any rights or
                  remedies otherwise available.

                  17.02 EATON MAKES NO WARRANTIES OF ANY KIND, EITHER EXPRESS OR
                  IMPLIED, WITH RESPECT TO THE LICENSED TRADEMARKS. IN NO EVENT
                  SHALL EATON BE LIABLE FOR ANY CONSEQUENTIAL, INCIDENTAL, OR
                  SPECIAL DAMAGES (INCLUDING LOSS OF BUSINESS PROFITS) ARISING
                  FROM OR RELATED TO LICENSEE'S USE OF THE LICENSED TRADEMARKS.

                  17.03 EXCEPT TO THE EXTENT, IF ANY, SPECIFICALLY PROVIDED TO
                  THE CONTRARY HEREIN, IN THE SEPARATION AGREEMENT OR ANY OTHER
                  AGREEMENT, IN NO EVENT SHALL ANY MEMBER OF THE EATON GROUP OR
                  THE AXCELIS TECHNOLOGIES GROUP BE LIABLE TO ANY OTHER MEMBER
                  OF THE EATON GROUP OR THE AXCELIS TECHNOLOGIES GROUP FOR ANY
                  SPECIAL, CONSEQUENTIAL, INDIRECT, INCIDENTAL OR PUNITIVE
                  DAMAGES OR LOST PROFITS, HOWEVER CAUSED AND ON ANY THEORY OF
                  LIABILITY (INCLUDING NEGLIGENCE) ARISING IN ANY WAY OUT OF
                  THIS AGREEMENT, WHETHER OR NOT SUCH PARTY HAS BEEN ADVISED OF
                  THE POSSIBILITY OF SUCH DAMAGES; PROVIDED, THAT THE FOREGOING
                  LIMITATIONS SHALL NOT LIMIT EITHER PARTY'S INDEMNIFICATION
                  OBLIGATIONS FOR LIABILITIES AS SET FORTH IN THE SEPARATE
                  INDEMNIFICATION AND INSURANCE MATTERS AGREEMENT BETWEEN THE
                  PARTIES HERETO.





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XVIII.   COUNTERPARTS:

                  18.01 This AGREEMENT will be executed in counterparts, each of
                  which shall be deemed to be an original but all of which shall
                  constitute one and the same agreement.

XIX.     GOVERNING LAW:

                  19.01 This AGREEMENT shall be construed in accordance with and
                  all disputes hereunder should be governed by the local laws of
                  the State of Ohio, U.S.A., excluding its conflict of law
                  rules. The United States District Court for the Northern
                  District of Ohio shall have jurisdiction and venue over, and
                  shall be the sole court used by either of the parties hereto
                  to initiate resolution of any dispute between the parties
                  under this AGREEMENT.

XX.      NOTICES:

                  20.01 Notices, offers, instructions, consents, requests or
                  other communications required or permitted to be given by
                  either party hereto pursuant to the terms of this AGREEMENT
                  shall be given in writing to the following addresses:

                           If to Eaton:
                                                  Office of the Secretary
                                                  Eaton Corporation
                                                  Eaton Center
                                                  1111 Superior Avenue
                                                  Cleveland, Ohio  44114, U.S.A.
                                                  Fax: (216) 479-7103

                           If to Axcelis Technologies:

                                                  Chief Executive Officer
                                                  Axcelis Technologies, Inc.
                                                  55 Cherry Hill Drive
                                                  Beverly, Massachusetts 01915
                                                  Fax: (978) 232-4221



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                  or to such other address as the party to whom notice is given
                  may have previously furnished to the other in writing as
                  provided herein. Any notice involving non-performance,
                  termination, or renewal shall be sent by hand delivery,
                  recognized overnight courier or, within the United States, may
                  also be sent via certified mail, return receipt requested. All
                  other notices may also be sent by fax, confirmed by first
                  class mail. All notices shall be deemed to have been given and
                  received on the earlier of actual delivery or three (3) days
                  from the date of postmark.

XXI.     SEVERABILITY:

                  21.01 If any term or other provision of this AGREEMENT is
                  determined by a court, administrative agency or arbitrator to
                  be invalid, illegal or incapable of being enforced by any rule
                  of law or public policy, all other conditions and provisions
                  of this AGREEMENT shall nevertheless remain in full force and
                  effect. Upon such determination that any term or other
                  provision is invalid, illegal or incapable of being enforced,
                  the parties hereto shall negotiate in good faith to modify
                  this AGREEMENT so as to effect the original intent of the
                  parties as closely as possible in an acceptable manner to the
                  end that the transactions contemplated hereby are fulfilled to
                  the fullest extent possible.

XXII.    AUTHORITY:

                  22.01 Each of the parties hereto represents to the other that
                  (a) it has the corporate or other requisite power and
                  authority to execute, deliver and perform this AGREEMENT, (b)
                  the executive, delivery and performance of this AGREEMENT by
                  it have been duly authorized by all necessary corporate or
                  other actions, (c) it has duly and validly executed and
                  delivered this AGREEMENT, and (d) this AGREEMENT constitutes a
                  legal, valid and binding obligation, enforceable against it in
                  accordance with its terms subject to applicable bankruptcy,
                  insolvency, reorganization, moratorium or



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                  other similar laws affecting creditors' rights generally and
                  subject to general equity principles.

XXIII.   INTERPRETATION:

                  23.01 The headings contained in this AGREEMENT are for
                  reference purposes only and shall not affect in any way the
                  meaning or interpretation hereof. Any capitalized term used in
                  any Exhibit or Schedule to this AGREEMENT but not otherwise
                  defined therein shall have the meaning assigned to such term
                  in this AGREEMENT. When a reference is made in this AGREEMENT
                  to an Article or a Section, Exhibit or Schedule, such
                  reference shall be to an Article or Section of, or an Exhibit
                  or Schedule to, this AGREEMENT unless otherwise indicated. The
                  language used in this AGREEMENT will be deemed to be the
                  language chosen by the parties hereto to express their mutual
                  intent and agreement, and no rule of strict construction or
                  canons or aids in interpretation will be applied against
                  either party.

XXIV.    CONFLICTING AGREEMENTS:

                  24.01 In the event of conflict between this AGREEMENT and the
                  Separation Agreement or any other Ancillary Agreement executed
                  in connection herewith, the provisions of this AGREEMENT shall
                  prevail.

XXV.     PUBLIC ANNOUNCEMENTS:

                  25.01 Through the Distribution Date, in regard to any matter
                  covered by this AGREEMENT, EATON shall determine the contents
                  of all press releases to be issued by either of the parties
                  hereto after consultation with LICENSEE, including without
                  limitation any termination of this AGREEMENT for any reason,
                  and such press releases shall be consistent with the
                  respective disclosure obligations of the parties.



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XXVI.    SUBSEQUENT LEGAL FEES:

                  26.01 In the event that any arbitration or litigation is
                  initiated to interpret or enforce the terms and provisions of
                  this AGREEMENT, the party hereto prevailing in said action
                  shall be entitled to its reasonable attorneys' fees and costs
                  from the other party and shall be paid same in full by the
                  losing party promptly upon demand by the prevailing party. A
                  party may also include its claim for such fees and costs in
                  such arbitration or litigation.

XXVII.   NO THIRD-PARTY BENEFICIARIES OR RIGHT TO RELY:

                  27.01 Notwithstanding anything to the contrary in this
                  AGREEMENT, (a) nothing in this AGREEMENT is intended to or
                  shall create for or grant to any third PERSON any rights or
                  remedies whatever, as a third party beneficiary or otherwise;
                  (b) no third PERSON is entitled to rely on any of the
                  representations, warranties, covenants or agreements contained
                  herein; and (c) no party hereto shall incur any liability or
                  obligation to any third PERSON because of any reliance by such
                  third PERSON on any representation, warranty, covenant or
                  agreement.

         IN WITNESS WHEREOF, each of the parties hereto has executed this
AGREEMENT by its duly authorized officers or representatives on the date first
above written.

EATON CORPORATION                         AXCELIS TECHNOLOGIES, INC.
(EATON)                                   (LICENSEE)

By: /s/ ADRIAN T. DILLON                  By: /s/ BRIAN R. BACHMAN
   -----------------------------------       -----------------------------------

Title: Executive Vice President --        Title: Chief Executive Officer and
      --------------------------------          --------------------------------
       Chief Financial and Planning              Vice Chairman of the Board
      --------------------------------          --------------------------------
       Officer
      --------------------------------          --------------------------------

Date: June 30, 2000                       Date: June 30, 2000
     ---------------------------------         ---------------------------------

By: /s/ KEN SEMELSBERGER                  By: /s/ MARY G. PUMA
   -----------------------------------       -----------------------------------

Title: Vice President -- Strategic        Title: President, Chief Operating
      --------------------------------          --------------------------------
       Planning                                  Officer and Secretary
      --------------------------------          --------------------------------

Date: June 30, 2000                       Date: June 30, 2000
     ---------------------------------         ---------------------------------


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