EXHIBIT 2.1

                      SHARE PURCHASE AND TRANSFER AGREEMENT

between

1.    Johanna 34 Vermogensverwaltungs GmbH (to be renamed NHL Acquisition Sub
      GmbH), a German limited liability company (Gesellschaft mit beschrankter
      Haftung) with its registered seat at Johanna-Kinkel-Stra(beta)e 2-4, 53175
      Bonn, Federal Republic of Germany (to be relocated to Busumer Stra(beta)e
      96, 24768 Rendsburg, Federal Republic of Germany),

                                 - hereinafter also referred to as "PURCHASER" -

and

2.    Novellus Systems, Inc., a California corporation with its principal place
      of business at 4000 North First Street, San Jose, California 95134, USA,

                                  - hereinafter also referred to as "NOVELLUS" -

on the one side

and

3.    Peter Wolters Stiftung, a German trust (Stiftung) with its registered seat
      at Mettmann and its business address at Busumer Stra(beta)e 96, 24768
      Rendsburg, Federal Republic of Germany,

                                  - hereinafter also referred to as "SELLER 1" -

4.    Eider Vermogensverwaltungsgesellschaft mbH, a German limited liability
      company (Gesellschaft mit beschrankter Haftung) with its registered seat
      at Winterhuder Weg 148, 22085 Hamburg, Federal Republic of Germany,

                                  - hereinafter also referred to as "SELLER 2" -



5.    Bovensiepen Vermogensverwaltungsgesellschaft mbH, a German limited
      liability company (Gesellschaft mit beschrankter Haftung) with its
      registered seat at Am See 39, 24790 Schacht-Audorf, Federal Republic of
      Germany,

                                  - hereinafter also referred to as "SELLER 3" -

6.    ROMERHOF Vermogensverwaltungsgesellschaft mbH, a German limited liability
      company (Gesellschaft mit beschrankter Haftung) with its registered seat
      at Am Romerhof 10, 50858, Koln, Federal Republic of Germany,

                                  - hereinafter also referred to as "SELLER 4" -

and

7.    Hieber Vermogensverwaltungsgesellschaft mbH, a German limited liability
      company (Gesellschaft mit beschrankter Haftung) with its registered seat
      at Eiderstra(beta)e 93, 24768 Rendsburg, Federal RepubliC of Germany,

                                  - hereinafter also referred to as "SELLER 5" -

      - Seller 1, Seller 2, Seller 3, Seller 4, and Seller 5 hereinafter
      collectively also referred to as

                                                                     "SELLERS" -

on the other side.

                                    RECITALS

(1)   The Sellers are the sole shareholders of Peter Wolters AG, the holding
      company of a group of companies which is engaged in the business of
      developing, manufacturing and selling precision machining equipment for
      metal, glass and ceramics as well as for the electronic industry, in
      particular for the semi-conductor industry.

                                                                               2


(2)   Novellus develops, manufactures, sells, and supports equipment for the
      fabrication of integrated circuits.

(3)   Novellus is interested in causing the Purchaser, a wholly-owned subsidiary
      of Novellus, to acquire 100 % of the outstanding shares in Peter Wolters
      AG, and the Sellers are interested in selling their shares in Peter
      Wolters AG, which in the aggregate are 100 % of the outstanding shares in
      Peter Wolters AG, to the Purchaser.

                                    SECTION 1
                  LEGAL STATUS, SUBJECT MATTER AND DEFINITIONS

(1)   Peter Wolters AG (hereinafter also referred to as "PETER WOLTERS AG" or
      the "COMPANY") is a stock corporation (Aktiengesellschaft) under German
      law with its registered seat in Rendsburg, Federal Republic of Germany.
      Peter Wolters AG is registered with the commercial register of the local
      court of Rendsburg, Federal Republic of Germany, under no. HRB 796. Its
      stated capital (Grundkapital) amounts to Euro 8,000,000.00 and is divided
      into 320,000 bearer shares (Inhaberaktien; each such share is herein
      referred to as a "PETER WOLTERS SHARE"). Such shares are non par value
      shares (Stuckaktien) with a fractional share in the stated capital
      (anteiliger Betrag des Grundkapitals) of Euro 25.00 each. The Peter
      Wolters Shares are evidenced by global share certificates attached as
      EXHIBIT 1.1 to this Agreement. The entire stated capital of Peter Wolters
      AG has been fully paid-in in cash or by means of contributions in kind, in
      each case in full compliance with German law. There have been no (direct
      or concealed) repayments of contributions, in particular no repayments of
      contributions within the meaning of Section 57 of the German Stock
      Corporation Act (Aktiengesetz - AktG; hereinafter also referred to as
      "AKTG"). There have been no hidden contributions in kind (verdeckte
      Sacheinlagen). The Company is validly existing under German law.

(2)   The number of Peter Wolters Shares held by each of the Sellers is set
      forth in more detail in the sellers list attached as EXHIBIT 1.2 to this
      Agreement (hereinafter referred to as "SELLERS LIST").

(3)   Peter Wolters AG is the holding company of the following subsidiaries
      (each of them hereinafter also referred to as a "SUBSIDIARY", and
      collectively the "SUBSIDIARIES", and

                                                                               3


      the companies set out in lit. a), b), c) and i) below collectively the
      "GERMAN SUBSIDIARIES"):

      a)    PETER WOLTERS SURFACE TECHNOLOGIES GMBH & CO. KG

            Peter Wolters Surface Technologies GmbH & Co. KG (hereinafter also
            referred to as "SURFACE TECHNOLOGIES" or "PETER WOLTERS KG") is a
            limited partnership (Kommanditgesellschaft) under German law with
            its registered seat in Rendsburg, Federal Republic of Germany. Peter
            Wolters KG is registered with the commercial register of the local
            court of Rendsburg, Federal Republic of Germany, under no. HRA 1427.
            Its registered capital of the limited partner (Kommanditkapital)
            amounts to Euro 2,500,000.00. All contributions due to Peter Wolters
            KG by its general and limited partners have been fully made and have
            not been repaid. In particular, there have been no (direct or
            concealed) repayments within the meaning of Section 172 para. 4 of
            the German Commercial Code (Handelsgesetzbuch - HGB; hereinafter
            also referred to as "HGB"). The sole limited partner (Kommanditist)
            of Peter Wolters KG is Peter Wolters AG. The sole general partner
            (personlich haftender Gesellschafter/Komplementar) of Peter Wolters
            KG is Peter Wolters Verwaltungs GmbH (see lit. b) below). Until
            December 31, 2002 Peter Wolters KG traded under the company name
            Peter Wolters CMP-Systeme GmbH & Co. KG. With effect as from January
            1, 2003 another subsidiary of Peter Wolters AG, Peter Wolters
            Werkzeugmaschinen GmbH, has been merged (Verschmelzung) within the
            meaning of Sections 2 et seq. of the German Reorganization Act
            (Umwandlungsgesetz - UmwG; hereinafter also referred to as "UMWG")
            with and into Peter Wolters KG, and Peter Wolters KG has been
            renamed Peter Wolters Surface Technologies GmbH & Co. KG (the change
            of the name and the merger are hereinafter collectively referred to
            as the "CORPORATE REORGANIZATIONS"). Peter Wolters KG is validly
            existing under German law.

      b)    PETER WOLTERS VERWALTUNGS GMBH

            Peter Wolters Verwaltungs GmbH (hereinafter also referred to as
            "PETER WOLTERS GMBH") is a limited liability company (Gesellschaft
            mit beschrankter Haftung - GmbH) under German law with its
            registered seat in Rendsburg, Federal Republic

                                                                               4


            of Germany. Peter Wolters GmbH is registered with the commercial
            register of the local court of Rendsburg, Federal Republic of
            Germany, under no. HRB 1919. Its stated capital (Stammkapital)
            amounts to Euro 52,000.00. The stated capital has been fully
            paid-in. There have been no (direct or concealed) repayments of
            contributions, in particular no repayments violating Section 30 of
            the German Limited Liability Company Act (Gesetz betreffend die
            Gesellschaft mit beschrankter Haftung - GmbHG; hereinafter also
            referred to as "GMBHG"). The sole shareholder of Peter Wolters GmbH
            is Peter Wolters AG, holding one share in the nominal amount of Euro
            52,000.00. Peter Wolters GmbH is validly existing under German law.

      c)    PETER WOLTERS LAPP- UND POLIERTECHNIK GMBH

            Peter Wolters Lapp- und Poliertechnik GmbH (hereinafter also
            referred to as "PETER WOLTERS POLIERTECHNIK") is a limited liability
            company (Gesellschaft mit beschrankter Haftung - GmbH) under German
            law with its registered seat in Leinfelden-Echterdingen, Federal
            Republic of Germany. Peter Wolters Poliertechnik is registered with
            the commercial register of the local court of Nurtingen, Federal
            Republic of Germany, under no. HRB 3907. Its stated capital
            (Stammkapital) amounts to Euro 307,000.00. The stated capital has
            been partially paid-in in cash and partially contributed by way of a
            capital increase from the capital reserve (Kapitalerhohung aus
            Gesellschaftsmitteln). There have been no (direct or concealed)
            repayments of contributions, in particular no repayments violating
            Section 30 GmbHG. The sole shareholder of Peter Wolters
            Poliertechnik is Peter Wolters AG holding a share in the nominal
            amount of Euro 307,000.00. Peter Wolters Poliertechnik is validly
            existing under German law.

                                                                               5


      d)    PETER WOLTERS OF AMERICA, INC.

            Peter Wolters of America, Inc. (hereinafter also referred to as
            "PETER WOLTERS AMERICA") is a corporation under the laws of the
            state of Massachusetts, USA, with its seat in Plainville,
            Massachusetts, USA. Peter Wolters America is registered under the
            Federal Identification No. 04-2547659. Its issued and outstanding
            share capital amounts to US $ 400,000.00 and is divided into 4,000
            shares of common stock with no par value. The sole shareholder of
            Peter Wolters America is Peter Wolters AG. Peter Wolters America is
            validly existing and in good standing under applicable US federal
            and state laws.

      e)    RIWO-WIRE, INC.

            RIWO-WIRE, INC. (hereinafter also referred to as "RIWO-WIRE") is a
            corporation under the laws of the state of Massachusetts, USA, with
            its seat in Plainville, Massachusetts, USA. RIWO-WIRE is registered
            under the Federal Identification No. 04-2623037. Its share capital
            amounts to US $ 0.00 and is divided into 2,000 shares of common
            stock with no par value, all of which are issued and outstanding.
            The shareholders of RIWO-WIRE are Peter Wolters America holding
            1,600 non par value shares equalling 80 % of the issued shares and
            Peter Wolters AG holding 400 shares equalling 20 % of the issued
            shares. RIWO-WIRE is validly existing and in good standing under
            applicable US federal and state laws but has currently no business
            activities.

      f)    PETER WOLTERS U.K. LIMITED

            Peter Wolters U. K. Limited (hereinafter also referred to as "PETER
            WOLTERS UK") is a private limited company under the laws of England
            with its seat in London, England. Peter Wolters UK was registered
            with the companies house in Cardiff under Company No. 2919793 on
            April 18, 1994. Its share capital amounts to GBP 50,000.00, which is
            divided into 50,000 shares in the nominal amount of GBP 1.00 each.
            The sole shareholder of Peter Wolters UK is Peter Wolters AG. Peter
            Wolters UK is validly existing under English law.

                                                                               6


      g)    PETER WOLTERS JAPAN KABUSHIKI KAISHA (IN ENGLISH: PETER WOLTERS
            JAPAN CO., LTD.)

            Peter Wolters Japan Kabushiki Kaisha (in English: Peter Wolters
            Japan Co., Ltd.) (hereinafter also referred to as "PETER WOLTERS
            JAPAN") is a limited liability company under the laws of Japan with
            its seat in Osaka, Japan. Peter Wolters Japan was registered with
            the Tokyo Legal Affairs Bureau on April 8, 1998 under the
            Registration No. 0023/98. Its share capital amounts to JPY
            100,000,000.00 and is divided into 2,000 ordinary shares with a par
            value of JPY 50,000.00 each. The sole shareholder of Peter Wolters
            Japan is Peter Wolters AG. Peter Wolters Japan is validly existing
            under Japanese law.

      h)    PETER WOLTERS ASIA PTE LTD.

            Peter Wolters Asia Pte Ltd (hereinafter also referred to as "PETER
            WOLTERS ASIA") is a private company limited by shares under the laws
            of the Republic of Singapore with its seat in Singapore, Republic of
            Singapore. Peter Wolters Asia was registered with the Registrar of
            Companies and Businesses Singapore under Company no. 199201918W on
            April 14, 1992. Its share capital amounts to SG $ 100,000.00 and is
            divided into 100,000 shares in the nominal amount of SG $ 1.00 each.
            The sole shareholder of Peter Wolters Asia is Peter Wolters AG.
            Peter Wolters Asia is validly existing under Singapore law but has
            currently no business activities.

      i)    RIWO-DRAHTWERK GMBH

            RIWO-Drahtwerk GmbH (hereinafter also referred to as
            "RIWO-DRAHTWERK") is a limited liability company (Gesellschaft mit
            beschrankter Haftung - GmbH) under German law with its seat in
            Rendsburg, Federal Republic of Germany. RIWO-Drahtwerk is registered
            with the commercial register of the local court of Rendsburg,
            Federal Republic of Germany, under no. HRB 158. Its stated capital
            (Stammkapital) amounts to DEM 1,500,000.00. The stated capital has
            been fully paid-in. There have been no (direct or concealed)
            repayments of contributions, in particular no repayments violating
            Section 30 GmbHG. The sole shareholder of RIWO-Drahtwerk is Peter
            Wolters AG. RIWO-Drahtwerk is validly existing under

                                                                               7


            German law. RIWO-Drahtwerk has ceased to do business as of September
            30, 2001 and, since then, has had and has currently no business
            activities. On December 9, 2003 the shareholder has passed a
            shareholders' resolution converting the denomination of the stated
            capital into Euro and reducing the stated capital to Euro 25,000.00.
            According to Section 58 para. 1 GmbHG the registration of a capital
            reduction with the commercial register requires a one year notice
            period after three different public announcements of the capital
            decrease have been published by the respective company in the German
            Federal Gazette (Bundesanzeiger). RIWO-Drahtwerk has published the
            third of such public announcements on January 9, 2004.

(4)   The subject matter of this Agreement is the sale and the transfer of all
      of the outstanding Peter Wolters Shares by the Sellers to the Purchaser
      subject to the terms and conditions of this Agreement.

(5)   If used in this Agreement the following terms shall have the meanings
      ascribed to them in this para. 5:

      "ADJUSTED AGGREGATE PURCHASE PRICE" shall have the meaning ascribed to it
      in Section 4 para. 3 lit. b) below.

      "AGGREGATE PURCHASE PRICE" shall have the meaning ascribed to it in
      Section 4 para. 1 below.

      "AKTG" shall have the meaning ascribed to it in Section 1 para. 1 above.

      "BANKING DAYS" means such days on which banks in Rendsburg, Germany, and
      San Jose, California, USA, are open to the general public.

      "BGB" shall have the meaning ascribed to it in Section 5 below.

      "CLOSING" shall have the meaning ascribed to it in Section 10 para. 1
      below.

      "CLOSING DATE" shall have the meaning ascribed to it in Section 10 para. 1
      below.

      "COMPANY" shall have the meaning ascribed to it in Section 1 para. 1
      above.

                                                                               8


      "COMPANIES" shall have the meaning ascribed to it in Section 5 para. 1
      below.

      "CORPORATE REORGANIZATIONS" shall have the meaning ascribed to it in
      Section 1 para. 3 lit. a) above.

      "ESCROW AGREEMENT" shall have the meaning ascribed to it in Section 4
      para. 4 below.

      "ESCROW AMOUNT" shall have the meaning ascribed to it in Section 4 para. 4
      below.

      "ESCROW PERIOD" shall have the meaning ascribed to it in Section 4 para. 4
      below.

      "FOREIGN SUBSIDIARIES" shall mean the Subsidiaries which have their
      registered company seat outside the Federal Republic of Germany.

      "GERMAN SUBSIDIARIES" shall have the meaning ascribed to it in Section 1
      para. 3 above.

      "GMBHG" shall have the meaning ascribed to it in Section 1 para. 3 lit. b)
      above.

      "GOB" shall have the meaning ascribed to it in Section 4 para. 3 lit. a)
      below.

      "GWB" shall have the meaning ascribed to it in Section 10 para. 4 below.

      "HGB" shall have the meaning ascribed to it in Section 1 para. 3 lit. a)
      above.

      "INTELLECTUAL PROPERTY RIGHTS" shall have the meaning ascribed to it in
      Section 5 para. 15 below.

      "KPMG" shall have the meaning ascribed to it in Section 4 para. 3 lit. a)
      below.

      "MATERIAL AGREEMENTS" shall have the meaning ascribed to it in Section 5
      para. 16 below.

      "NOVELLUS" shall mean Novellus Systems, Inc., a California corporation.

      "OBJECTIONS" shall have the meaning ascribed to it in Section 4 para. 3
      lit. a) below.

                                                                               9


      "PETER WOLTERS AG" shall have the meaning ascribed to it in Section 1
      para. 1 above.

      "PETER WOLTERS AMERICA" shall have the meaning ascribed to it in Section 1
      para. 3 lit. d) above.

      "PETER WOLTERS ASIA" shall have the meaning ascribed to it in Section 1
      para. 3 lit. h) above.

      "PETER WOLTERS GMBH" shall have the meaning ascribed to it in Section 1
      para. 3 lit. b) above.

      "PETER WOLTERS JAPAN" shall have the meaning ascribed to it in Section 1
      para. 3 lit. g) above.

      "PETER WOLTERS KG" shall have the meaning ascribed to it in Section 1
      para. 3 lit. a) above.

      "PETER WOLTERS POLIERTECHNIK" shall have the meaning ascribed to it in
      Section 1 para. 3 lit. c) above.

      "PETER WOLTERS SHARE" shall have the meaning ascribed to it in Section 1
      para. 1 above.

      "PETER WOLTERS UK" shall have the meaning ascribed to it in Section 1
      para. 3 lit. f) above.

      "PURCHASE PRICE ADJUSTMENT" shall have the meaning ascribed to it in
      Section 4 para. 3 lit. b) below.

      "PURCHASER" shall mean Johanna 34 Vermogensverwaltungs GmbH (to be renamed
      NHL Acquisition Sub GmbH), a German limited liability company.

      "PURCHASERS' AUDITOR" shall mean the company of auditors appointed by the
      Purchaser pursuant to Section 4 para. 3 lit. a) below.

      "RIWO-DRAHTWERK" shall have the meaning ascribed to it in Section 1 para.
      3 lit. i) above.

      "RIWO-WIRE" shall have the meaning ascribed to it in Section 1 para. 3
      lit. e) above.

                                                                              10


      "SELLER 1", "SELLER 2", "SELLER 3", "SELLER 4", "SELLER 5", and "SELLERS"
      shall mean those persons specified in more detail above and in the Sellers
      List attached as EXHIBIT 1.2 to this Agreement.

      "SELLERS LIST" shall have the meaning ascribed to it in Section 1 para. 2
      above.

      "SELLERS REPRESENTATIVE" shall have the meaning ascribed to it in Section
      12 para. 1 below.

      "SELLERS SHARES" shall have the meaning ascribed to it in Section 2 para.
      1 below.

      "SUBSIDIARY" and "SUBSIDIARIES" shall have the meaning ascribed to it in
      Section 1 para. 3 above.

      "TAX DISPUTE" shall have the meaning ascribed to it in Section 7 para. 7
      lit. b) below.

      "TRANSFER AUDIT REQUEST" shall have the meaning ascribed to it in Section
      4 para. 3 lit. a) below.

      "TRANSFER DATE" shall have the meaning ascribed to it in Section 4 para. 3
      lit. a) below.

      "TRANSFER FINANCIAL STATEMENTS" shall have the meaning ascribed to it in
      Section 4 para. 3 lit. a) below.

      "TAXES AND OTHER CHARGES" shall have the meaning ascribed to it in Section
      7 para. 1 below.

      "UMWG" shall have the meaning ascribed to it in Section 1 para. 3 lit. a)
      above.

      "ZPO" shall have the meaning ascribed to it in Section 12 para. 2 below.

                                    SECTION 2
                           SALE AND PURCHASE OF SHARES

(1)   The Sellers hereby sell and the Purchaser hereby purchases 320,000 Peter
      Wolters Shares held by the Sellers (hereinafter also referred to as the
      "SELLERS SHARES") as specified in more detail in the Sellers List.

                                                                              11


(2)   The sale and purchase of the Sellers Shares shall encompass any and all
      rights and ancillary rights attached to the Sellers Shares, in particular
      any and all dividend rights attached to the Sellers Shares, also with
      respect to the past, except for such dividends which have already been
      distributed to the shareholders of Peter Wolters AG.

                                    SECTION 3
                               TRANSFER OF SHARES

The actual transfer of the Sellers Shares shall be carried out at the Closing.
At the Closing the Sellers shall transfer to the Purchaser all Sellers Shares by
delivery of the global share certificates and by a separate transfer agreement
in accordance with EXHIBIT 3.1 to this Agreement. The actual transfer of the
Sellers Shares shall be subject to the payment of the Aggregate Purchase Price
pursuant to Section 4 below.

                                    SECTION 4
              PURCHASE PRICE, PURCHASE PRICE ADJUSTMENT AND ESCROW

(1)   The aggregate purchase price (hereinafter also referred to as the
      "AGGREGATE PURCHASE PRICE") to be paid by the Purchaser for all 320,000
      Peter Wolters Shares, i.e. all Sellers Shares, shall be Euro
      124,500,000.00 (in words: Euro one hundred twenty-four million five
      hundred thousand). Unless otherwise agreed among the Sellers, the
      Aggregate Purchase Price shall be equally allocated to the Sellers Shares
      resulting in a purchase price of Euro 389.0625 for each Peter Wolters
      Share.

(2)   Subject to the provisions in para. 3 and 4 below, the Aggregate Purchase
      Price shall be payable to the Sellers at the Closing, in cash via wire
      transfer free of bank charges to the separate bank account
      (Rechtsanwaltsanderkonto) of Taylor Wessing, Hamburg, acting as Sellers'
      trustee (Treuhander), as shown in EXHIBIT 4.2 to this Agreement.

(3)   The Aggregate Purchase Price (and consequently the purchase price for each
      Peter Wolters Share) shall be subject to a possible downward purchase
      price adjustment in favor of the Purchaser as set forth in this para. 3:

      a)    Within six weeks following the signing of this Agreement the
            Purchaser may request by written notification to the Sellers that
            Peter Wolters AG shall prepare

                                                                              12


            consolidated financial statements of Peter Wolters AG including all
            of its Subsidiaries as of the Transfer Date (hereinafter referred to
            as "TRANSFER AUDIT REQUEST"). Such consolidated financial statements
            of Peter Wolters AG shall be prepared by Peter Wolters AG within one
            month following the Transfer Audit Request in accordance with
            generally accepted German accounting principles (Grundsatze
            ordnungsma(beta)iger Buchfuhrung - GOB; hereinafter also referred to
            as "GOB") as consistently applied, and in accordance with Sections
            264 et seq., Sections 290 et seq. HGB and taking into account the
            agreements set forth in Section 9 below. Thereafter, the
            consolidated financial statements prepared by Peter Wolters AG shall
            be submitted to the Sellers Representative and the Purchaser and
            shall be audited and certified by the Company's current auditor KPMG
            Deutsche Treuhand-Gesellschaft AG Wirtschaftsprufungsgesellschaft
            ("KPMG"). An independent auditing firm
            (Wirtschaftsprufungsgesellschaft) appointed by the Purchaser (the
            "PURCHASER'S AUDITOR") may review and challenge the consolidated
            financial statements audited and certified by KPMG and consult with
            the Purchaser. KPMG and the Purchaser's Auditor, upon request and to
            the extent legally permissible, shall make available to each other,
            to the Sellers Representative and to the Purchaser copies of their
            working papers as well as of the audited and certified consolidated
            financial statements. For clarification purposes it is expressly
            agreed and understood that the audit to be performed by KMPG shall
            be a voluntary audit and not an audit required by law. In addition,
            it is expressly agreed and understood that KPMG and the Purchaser's
            Auditor are independent and not subject to any instructions of any
            of the parties or Peter Wolters AG. They are neither obligated nor
            entitled to make any management decisions of any of the parties or
            Peter Wolters AG or any of the other Companies, in particular no
            decisions regarding the preparation of the consolidated financial
            statements.

            The costs of the aforementioned audit by KPMG shall be borne by the
            Sellers and the costs of the audit of Purchaser's Auditor shall be
            borne by the Purchaser. With respect to these costs neither a
            reserve shall be made nor a liability shown in the consolidated
            transfer statements of the Company as of the Transfer Date.

            If the Purchaser or the Sellers have objections to the contents of
            the consolidated financial statements (hereinafter referred to as
            "OBJECTIONS"), they shall notify the

                                                                              13


            Sellers Representative or the Purchaser, respectively, in writing of
            such Objections during the audit, in no event, however, later than
            one month after the delivery of the consolidated financial
            statements to the Purchaser or to the Sellers Representative, as the
            case may be, by the Company. In this case the Sellers Representative
            and the Purchaser shall endeavor to amicably settle any dispute in
            good faith to reach agreement on the Objections within one month
            after the Sellers Representative or the Purchaser, respectively, has
            received the notification of such Objections. Objections, however,
            shall be taken into account only if, on assumption of their
            correctness, they would, in the aggregate, lead to a change in the
            Company's consolidated equity within the meaning of Sections 298
            para. 1, 266 para. 3 lit. A. HGB at the Transfer Date (as defined
            below) of at least Euro 25,000.00. If no Objections have been
            notified within the one-month-period following the delivery of the
            consolidated financial statements by the Company, or if agreement on
            any such Objections has been reached between the Sellers
            Representative and the Purchaser, or if the Objections do not exceed
            the aforementioned threshold, the consolidated financial statements
            shall be final and binding on the parties hereto.

            If the Purchaser and the Sellers Representative cannot agree in
            whole or in part on the consolidated financial statements within the
            one-month-period after the Sellers Representative or the Purchaser
            has received the notification of any Objections, the Purchaser and
            the Sellers Representative shall jointly appoint a third independent
            auditing firm to finally settle any dispute and to determine the
            consolidated financial statements as of the Transfer Date as expert
            arbitrator (Schiedsgutachter) with binding effect for all parties.
            If the Purchaser and the Sellers Representative fail to agree on the
            expert arbitrator within two weeks after the expiration of the
            one-month-period, during which the Purchaser and the Sellers
            Representative shall attempt to settle the dispute, then, upon
            request by the Sellers Representative or the Purchaser, the
            Institute of Chartered Accountants in Germany (Institut der
            Wirtschaftsprufer in Deutschland e.V.), Dusseldorf, Federal Republic
            of Germany, shall appoint such independent expert arbitrator. The
            expert arbitrator shall state the reasons for his decision in
            writing. In his decision, the expert arbitrator may not make any
            findings other than with respect to those Objections that remain in
            dispute between the parties as within the framework of the relevant
            consolidated financial statements of Peter Wolters AG. The fees and

                                                                              14


            costs of the expert arbitrator shall be shared by the Sellers on the
            one side and the Purchaser on the other side equally unless
            otherwise directed by the expert arbitrator (which shall have the
            authority to make such direction if it deems it equitable and taking
            into account the extent to which either party was justified in its
            complaint or assessment).

            The consolidated financial statements prepared, audited and
            certified in accordance with this lit. a) shall be final and binding
            on all parties for purposes of this Agreement and shall be deemed to
            have been accepted and approved by each of them and are hereinafter
            referred to as the "TRANSFER FINANCIAL STATEMENTS". The term
            "TRANSFER DATE" as used in this Agreement shall mean April 30, 2004.

      b)    If the Transfer Financial Statements show a consolidated equity
            within the meaning of Sections 298 para. 1, 266 para. 3 lit. A. HGB
            which is less than Euro 23,354,813.99, the Aggregate Purchase Price
            shall be decreased by the difference between the consolidated equity
            as of the Transfer Date and Euro 23,354,813.99. The resulting
            Aggregate Purchase Price shall be the "ADJUSTED AGGREGATE PURCHASE
            PRICE" and the difference between the Aggregate Purchase Price and
            the Adjusted Aggregate Purchase Price shall be the "PURCHASE PRICE
            ADJUSTMENT". The Sellers shall repay to the Purchaser the Purchase
            Price Adjustment, if any, in cash via wire transfer to an account as
            will be designated in writing by the Purchaser within ten Banking
            Days after such written instruction has been received by Sellers
            Representative and the Transfer Financial Statements have become
            final and binding pursuant to lit. a) above.

      c)    If the Sellers have not received a Transfer Audit Request of the
            Purchaser within the time period pursuant to lit. a) above, this
            shall be deemed a waiver by the Purchaser of the procedure as set
            forth in this para. 3 and the Purchaser shall have no further right
            to a Purchase Price Adjustment.

      d)    Any claims by the Purchaser against the Sellers pursuant to this
            para. 3 shall be barred after six months after the Transfer
            Financial Statements have become final and binding on the parties
            hereto.

                                                                              15


      e)    For the avoidance of doubt, it is expressly agreed that there will
            be no purchase price adjustment in favor of the Sellers, even if the
            consolidated equity shown in the Transfer Financial Statements
            exceeds Euro 23,354,813.99.

(4)   10 % of the Aggregate Purchase Price, i.e. Euro 12,450,000 (in words: Euro
      twelve million four hundred fifty thousand), shall not be paid directly to
      the Sellers at the Closing, but be paid into escrow. The payment into
      escrow shall be made into an interest bearing joint bank account
      (Gemeinschaftliches Anderkonto als Und-Konto) of Rechtsanwalte Taylor
      Wessing, Hamburg, with Rechtsanwalt Bernhard Kloft and Rechtsanwalt Robert
      Wethmar as account signatories, and FGS Treuhandgesellschaft fur
      Stiftungsvermogen mbH, Bonn, with Rechtsanwalt Dr. Stephan Gockeler and
      Rechtsanwalt/Steuerberater Dr. Jens Eric Gotthardt as account signatories.
      Such amount (hereinafter also referred to as the "ESCROW AMOUNT") shall
      serve as the sole security for any and all of Purchaser's claims and
      rights under or in connection with this Agreement, in particular as
      security for any claims for breach of any independent guarantee and any
      claims for indemnification pursuant to Sections 5, 6 and/or 7 below. The
      details are set forth in the escrow agreement attached to this Agreement
      as EXHIBIT 4.4 (hereinafter also referred to as the "ESCROW AGREEMENT")
      which shall be executed immediately after the execution of this Agreement.
      Any payments to the Sellers from the escrow made in accordance with the
      Escrow Agreement shall not limit the liability of the Sellers under this
      Agreement.

(5)   Novellus hereby guarantees to the Sellers the obligations of the Purchaser
      pursuant to this Section 4 to pay to the Sellers the Aggregate Purchase
      Price and the obligations of the Purchaser and the Company, respectively,
      to make the bonus payments after Closing pursuant to Section 9 below.

                                    SECTION 5
                              INDEPENDENT GUARANTEE

The Sellers hereby guarantee to the Purchaser by means of an independent
guarantee (selbststandiges Garantieversprechen) within the meaning of Section
311 para. 1 of the German Civil Code (Burgerliches Gesetzbuch - BGB; hereinafter
also referred to as "BGB") that the following statements are correct as of the
date of the signing of this Agreement and as of the

                                                                              16


Closing Date, unless a different relevant date is expressly stated in one of the
following statements:

(1)   The statements relating to Peter Wolters AG and its Subsidiaries
      (hereinafter also collectively referred to as the "COMPANIES") set forth
      in Section 1 para. 1, 2 and 3 are correct. The Companies are fully
      authorized and fully qualified or licensed to do business in the
      jurisdictions in which they have their respective (registered) office.

(2)   EXHIBIT 5.2 a) to this Agreement contains complete and correct copies of
      all relevant statutes and other corporate documents of the Companies, as
      they are in full force and effect. EXHIBIT 5.2 b) to this Agreement
      contains complete and correct copies of all registration excerpts
      (Handelsregisterauszuge) or equivalent documentation under applicable law.
      There are no resolutions or other facts that need to be registered but
      which have not yet been registered, except for the capital reduction of
      RIWO-Drahtwerk described in Section 1 para. 3 lit. i) above; there are no
      pending applications for registration.

(3)   None of the Companies has any shares, options to acquire shares or other
      securities outstanding other than the aggregate 320,000 Peter Wolters
      Shares and those shares set forth in Section 1 para. 3 above and issued to
      the Sellers, Peter Wolters AG or a Subsidiary, respectively. There are no
      outstanding options, conversion or exchange rights to purchase or obtain
      any shares, interests or other securities in one of the Companies. There
      are no contracts, commitments or other arrangements relating to the
      issuance, sale, transfer or purchase of any shares, interests or other
      securities in one of the Companies.

(4)   All Peter Wolters Shares are held by the Sellers. Except as disclosed in
      EXHIBIT 5.4 to this Agreement all Peter Wolters Shares are validly
      existing and free and clear of all mortgages, pledges, liens, security
      interests, encumbrances, restrictions or charges of any kind or any other
      third-party rights. All contributions for the Peter Wolters Shares are
      fully made (samtliche Einlagen auf Aktien sind vollstandig geleistet). All
      Sellers are entitled to freely dispose of their Peter Wolters Shares; in
      particular, they do not require the consent of any third party or violate
      any third party rights by disposing of their Peter Wolters Shares. Any
      pledges of Peter Wolters Shares shall be released on or before the
      Closing.

                                                                              17


(5)   Peter Wolters AG and its Subsidiaries do not have any subsidiaries and
      affiliates other than those set forth in Section 1 para. 3 above.

(6)   Except as disclosed in EXHIBIT 5.6 to this Agreement neither Peter Wolters
      AG nor any of its Subsidiaries is a party to any enterprise agreement
      (Unternehmensvertrag) within the meaning of Sections 291, 292 AktG,
      including any silent partnerships (stille Gesellschaften) and neither
      Peter Wolters AG nor any of its Subsidiaries is a party to any profit or
      turnover sharing agreement. The enterprise agreements disclosed in Exhibit
      5.6 to this Agreement have been and are valid for corporate and tax
      purposes for the periods stated therein.

(7)   All Companies are entitled to use their corporate names.

(8)   The financial statements and consolidated financial statements of Peter
      Wolters AG and its Subsidiaries for the years 2002 and 2003, as attached
      as EXHIBIT 5.8 to this Agreement, have been prepared in accordance with
      applicable generally accepted accounting principles, as consistently
      applied, which in case of Peter Wolters AG and its German Subsidiaries are
      GOB. All such financial statements are correct and give a true and fair
      view of the financial status and the results of each of the Companies and
      the group as per the respective balance sheet date (in the case of Peter
      Wolters AG and its German Subsidiaries: Vermogens-, Finanz- und
      Ertragslage within the meaning of Section 264 para. 2 HGB). To the extent
      required, all such financial statements have been audited by independent
      auditing firms and have been certified by such independent auditing firms
      without any qualification. As of the relevant dates, the Companies had no
      liabilities or obligations that are required by applicable generally
      accepted accounting principles to be provided for in such financial
      statements that were not so provided for.

(9)   The inventories set forth in the consolidated financial statements of
      Peter Wolters AG for the year 2003, as adjusted for items sold or replaced
      in the ordinary course of business from the date of such consolidated
      financial statements until the date hereof or as of the Closing, as
      applicable, are properly valued in accordance with GOB and are of a
      quality and quantity currently useable and saleable in the ordinary course
      of business. The accounts receivable reflected in the consolidated
      financial statements of Peter Wolters for the year 2003, as adjusted for
      accounts receivable paid in the ordinary course of business from the date
      of such consolidated financial statements until the date

                                                                              18


      hereof or as of the Closing, as applicable, (i) have been recorded in
      accordance with revenue recognition policies in compliance with GOB and
      the historic revenue recognition policies of Peter Wolters AG and its
      Subsidiaries and, to the best of Sellers' knowledge, (ii) are valid and
      fully enforceable as to the face amount thereof and (iii) are not subject
      to any right of offset in favor of the relevant obligor. The adjustments
      for doubtful accounts receivable reflected in the consolidated financial
      statements of Peter Wolters AG for the year 2003 were established in
      compliance with GOB.

(10)  Between December 31, 2003 and the date of this Agreement, there has been
      no material adverse change in the business of Peter Wolters AG and its
      Subsidiaries, in particular in its condition, financial or otherwise,
      assets, liabilities, reserves, or operations. Between December 31, 2003
      and the Closing: (i) the Companies have been operated in the ordinary
      course of business, and (ii) the Companies have not incurred any
      liabilities other than those incurred in connection with the transactions
      contemplated herein or in the ordinary course of their business
      operations, consistent with past practices, and (iii) there have been no
      dividend payments and no dividend resolutions on the level of Peter
      Wolters AG with the exception of dividend payments in the aggregate gross
      amount of Euro 1,120,000.00 made by the Company to the Sellers prior to
      the date of this Agreement pursuant to a shareholders' resolution dated
      May 26, 2004. To the best of Sellers' knowledge, the forecast prepared by
      Peter Wolters AG and attached as EXHIBIT 5.10 to this Agreement has been
      prepared with the care of a careful and diligent business man (Sorgfalt
      eines ordentlichen und gewissenhaften Geschaftsleiters) within the meaning
      of Section 93 para. 1 sentence 1 AktG.

(11)  The Companies have not issued or entered into any guarantee, letter of
      comfort, or any other agreement of a similar nature, and the Companies are
      not liable for, and they are not securing, any third-party obligations, in
      particular any of the Sellers' obligations, other than those disclosed in
      EXHIBIT 5.11 to this Agreement.

(12)  EXHIBIT 5.12 to this Agreement contains a complete and correct list of all
      real estate (i) owned or (ii) leased or otherwise occupied by one of the
      Companies or its predecessors as of the Closing Date or within the last
      five years.

      The real estate and buildings presently used by Peter Wolters AG or any of
      the Subsidiaries, are, however, with respect to the real estate and
      buildings presently used

                                                                              19


      by the Foreign Subsidiaries only to the best of Sellers' knowledge, free
      of any material pollution of soil, groundwater or any other environmental
      pollution of material effect for the curing and cleaning up of which any
      Peter Wolters AG or its German Subsidiaries could be held liable. Each of
      the Companies has, however, with respect to the real estate and buildings
      presently used by the Foreign Subsidiaries only to the best of Sellers'
      knowledge, complied at all times and in all material respects with all
      applicable environmental laws and regulations. No environmental claims
      have been made or threatened to be made in connection with the business of
      any of the Companies which could give rise to losses, damages, expenses or
      liabilities. To the best of Sellers' knowledge all waste arising in the
      course of the business of each of the Companies has been properly treated
      and disposed of in accordance with applicable legislation and regulations.

(13)  With the exception of the customary reservation of title of suppliers as
      well as customary security rights of banks granted in the ordinary course
      of business, each of the Companies has full and unrestricted title, or is
      otherwise legally entitled to use, all assets, whether tangible or
      intangible, which are material for their business as presently conducted.
      With this reservation all assets owned by the Companies are free and clear
      of any third party rights except as set forth in EXHIBIT 5.13 to this
      Agreement. All of the fixed assets owned or used by the Companies are in
      good operating condition, however, subject to normal wear and tear.

(14)  To the best of Sellers' knowledge, none of the Companies has sold or
      provided any product or service which does not in all material respects
      comply with all applicable laws, regulations or contractual standards at
      the time of delivery or performance (as the case may be), or which at the
      time of delivery or performance (as the case may be) is or was not capable
      of being efficiently and properly used for the purposes for which it was
      produced and/or sold, or which is or was not in accordance with any
      representation, guarantee or warranty, express or implied, given in
      respect of it by the relevant Company which would expose the relevant
      Company to any criminal or other sanction under law or contract or to any
      liability. The amounts reserved for warranty obligations of Peter Wolters
      AG and its Subsidiaries in the consolidated financial statements
      referenced in para. 8 above are adequate according to GOB.

                                                                              20


(15)  Peter Wolters AG and the German Subsidiaries own or are otherwise entitled
      to use any and all Intellectual Property Rights which are material and
      required to operate their business as presently conducted and to
      manufacture, sell or otherwise provide any products or services for which
      revenue is included in the forecast attached as Exhibit 5.10 to this
      Agreement. "INTELLECTUAL PROPERTY RIGHTS" shall mean patents, patent
      applications, trade marks, service marks, applications of the foregoing to
      register, know-how and trade secrets. None of the Intellectual Property
      Rights which is material and reasonable required to operate the business
      of Peter Wolters AG or the German Subsidiaries has lapsed, has been
      abandoned or is subject to any pending opposition or cancellation
      proceeding before any registration authority in any of the jurisdictions
      listed in EXHIBIT 5.15 a) to this Agreement. To the best of Sellers'
      knowledge, no third party is infringing on any of the Intellectual
      Property Rights material and reasonable required to operate the business
      of Peter Wolters AG or the German Subsidiaries, except as disclosed in
      EXHIBIT 5.15 b) to this Agreement. None of the Intellectual Property
      Rights used by Peter Wolters AG and the German Subsidiaries and none of
      their products infringes on, and, except as disclosed in EXHIBIT 5.15 c)
      to this Agreement, no third party has asserted that any such products or
      activities infringe on, any material Intellectual Property Rights of any
      third party. No claims have been made or threatened, and there is no basis
      for any claims by employees or former employees of any of Peter Wolters AG
      and the German Subsidiaries under any statutory or contractual inventor
      compensation provision, except for potential statutory claims of (actual
      or former) employees listed in EXHIBIT 5.15 d) to this Agreement. Except
      as disclosed in item 9 of Exhibit 5.16 a) to this Agreement, no licenses
      have been granted to or by any of Peter Wolters AG and the German
      Subsidiaries with respect to its Intellectual Property Rights. Each of the
      employees listed in EXHIBIT 5.15 e) to this Agreement is bound to
      confidentiality obligations and to assign any and all inventions to the
      respective Company made in the course of his employment.

(16)  The execution and consummation of this Agreement and the transactions
      contemplated hereby do not violate any undertakings or obligations of any
      of the Companies under a Material Agreement (as defined below) and does
      not require the consent of any third party as a result of any undertaking
      or obligation of any of the Companies under a Material Agreement. EXHIBIT
      5.16 a) to this Agreement contains a complete and correct list of all
      Material Agreements to which any of the Companies is a party to. None of
      the Companies is in violation of or in default with any material
      obligations under any of the

                                                                              21


      Material Agreements. None of the Material Agreements could be terminated
      or could become terminable or create additional material obligations or
      encumbrances of any of the Companies as a result of the transactions
      contemplated by this Agreement. "MATERIAL AGREEMENTS" shall be those kind
      of agreements described in EXHIBIT 5.16 b) to this Agreement. To the best
      of Sellers' knowledge, none of the Companies' customers, suppliers or
      employees will terminate or is likely to terminate or otherwise disrupt
      the relationship with any of the Companies.

(17)  All material public or private permits and licenses (including, without
      limitation, all environmental licenses) required for the conduct and
      continuance of the business of any of the Companies in the jurisdiction in
      which they have their respective (registered) office and in the manner in
      which such business has been carried out in the respective jurisdiction so
      far have been properly obtained and are in full force and effect, and, to
      the best of Sellers' knowledge, have been fully complied with in all
      material respects, subject only to the general statutory right of any
      governmental authority to revoke or restrict any such permits or licenses.
      No revocation or restriction is pending or threatened nor, to the best of
      Sellers' knowledge, are there any circumstances which indicate that any
      such revocation or restriction will in whole or in part occur after the
      date of this Agreement.

(18)  To the best of Sellers' knowledge, all business equipment, installations
      and buildings used by any of the Companies meet public safety and license
      regulations. No judgments, orders or decisions have been served or
      threatened which could result in further financial expenditures or
      limitations and restrictions of the operations of any of the Companies.

(19)  EXHIBIT 5.19 a) (i) to this Agreement contains a complete and correct list
      of all bonuses and other payments payable by the Company or any of its
      Subsidiaries to the management, employees, members of the supervisory
      board or any other advisory body and/or advisors. EXHIBIT 5.19 a) (ii)
      contains a complete and correct list of any bonuses or other payments with
      respect to the 200-year anniversary of Peter Wolters AG, which shall be
      resolved and shall become payable by the respective Companies after the
      implementation of the bonus schemes set forth therein pursuant to Section
      9 below, and any costs and expenses with respect to the celebration of the
      200-year anniversary of Peter Wolters AG. EXHIBIT 5.19 b) to this
      Agreement contains a complete and correct list of

                                                                              22


      all employees of the Companies as of the date of this Agreement, setting
      forth their respective name, age, starting date of employment, annual
      salary, any increase of any salary within the last twelve months,
      additional benefits, and pension entitlements/obligations. Except as
      disclosed in EXHIBIT 5.19 c) to this Agreement, the Companies are not
      subject to any collective bargaining agreement (Tarifvertrag), be it
      directly or by means of continuing effect (Nachwirkung), or any workers'
      council agreement (Betriebsvereinbarung). The workers' council agreement
      relative to RIWO-Drahtwerk is fully consummated and no further costs will
      be incurred in connection therewith. Except as disclosed in EXHIBIT 5.19
      d) to this Agreement there are no pension plans, old-age plans, health
      insurance plans, arrangements for redundancy payments or similar
      arrangements with employees or former employees in excess of any statutory
      rights, except for tax advantageous direct insurances (steuerbegunstigte
      Direktversicherung mit oder ohne Gehaltsumwandlung). The amounts reserved
      in the consolidated financial statements of Peter Wolters AG for the year
      2003 are in full compliance with GOB. Except as stated below or in Exhibit
      5.19 c) to this Agreement, none of the Companies is a member to an
      employer's association (Arbeitgeberverband). Peter Wolters AG has
      terminated its membership in the employer's association Nordmetall
      effective as of September 8, 2003. Since October 1, 2003 Peter Wolters AG
      is a member of the employer's association AGV Nord, Allgemeiner Verband
      der Wirtschaft Norddeutschlands e.V. Such membership does not and will not
      result in any of the Companies being subject to any collective bargaining
      agreement (Tarifvertrag).

(20)  EXHIBIT 5.20 to this Agreement contains a complete and correct list of all
      insurance arrangements entered into with respect to any of the Companies
      or their business.

(21)  EXHIBIT 5.21 to this Agreement contains a complete and correct list of all
      public grants and other public subsidies paid or agreed to be paid to, or
      applied for by, any of the Companies. Neither of the Companies has done or
      agreed to do anything which could result in a repayment of any public
      subsidies. Except as disclosed in EXHIBIT 5.21 to this Agreement, none of
      the transactions contemplated hereunder will or can result in such
      repayment obligations.

(22)  There is no labor strike or other work stoppage of employees of any of the
      Companies currently in effect, and to the best knowledge of the Seller,
      none is threatened.

                                                                              23


(23)  Except as disclosed in EXHIBIT 5.23 to this Agreement, there is no claim,
      action, suit, or proceeding pending and, to the best knowledge of Sellers,
      threatened, involving any of the Companies (including any governmental or
      arbitration proceedings).

(24)  EXHIBIT 5.24 to this Agreement contains a complete and correct list of all
      bank accounts of all of the Companies including the persons authorized to
      sign for them with respect to these bank accounts.

(25)  EXHIBIT 5.25 to this Agreement contains a complete and correct list of all
      powers of attorneys issued by any of the Companies which are currently in
      force.

(26)  All accounting records and systems and any other information technology
      systems and related software used by any of the Companies are recorded,
      stored, maintained or operated or otherwise held by the Companies and are
      not, with the exception of communications systems, wholly or partly
      dependent on any facilities or systems which are not under the exclusive
      ownership or control of any of the Companies. All Companies are licensed
      to use all software necessary to enable them to continue to use their
      computerized records for the foreseeable future in the same manner in
      which they had been used prior to the date of this Agreement.

(27)  The Corporate Reorganizations have been prepared and consummated in
      accordance with all applicable laws and do not result in any liabilities
      (including tax liabilities not provided for in the financial statements as
      of December 31, 2003) except for any tax liabilities, which are a result
      of corporate reorganizations pursuant to UmwG or other measures made or
      undertaken by the Purchaser after the Closing and which have a retroactive
      effect (steuerliche Ruckwirkung).

(28)  To the best of Sellers' knowledge, all material information relating to
      the Companies and their businesses submitted to the Purchaser by the
      Sellers or the Companies is true and correct and not misleading. To the
      best of Seller's knowledge, the Sellers and the Companies have not
      withheld any material information that a reasonable purchaser would need
      to know. The Sellers are not aware of material facts or circumstances
      which in the future could have a material adverse effect on any of the
      Companies and their respective business operations with the exception of
      general developments of the

                                                                              24


      economy, the markets, the volatility in the capital equipment sector and
      unforeseen world events.

                                    SECTION 6
                                 LEGAL REMEDIES

(1)   If one of the Sellers' guarantees in this Agreement is partially or wholly
      incorrect or is not fulfilled, the Purchaser may demand that it be put in
      the position in which it would be had the guarantee been correct or
      fulfilled. The Purchaser may, however, only assert claims for damages if
      it has previously requested on the Sellers in writing to establish the
      guaranteed status within a reasonable period - one month at least - and if
      such period has expired without the guaranteed status having been
      established, unless the Sellers have rejected to establish the guaranteed
      status or it is impossible to establish such status. If the Purchaser's
      damage is that third parties assert or make a claim against one of the
      Companies contrary to a guarantee, the Sellers may also comply with such
      claim by undertaking to indemnify the affected Company.

(2)   With regard to the guarantee pursuant to Section 5 para. 4 above, each
      Seller shall be liable only for the respective Peter Wolters Shares sold
      by him or it. Any liability of the other Sellers shall be excluded to such
      extent. With the exception of any liability of the Sellers under Section 7
      below, for which Section 7 para. 6 below shall apply, the Sellers shall be
      jointly and severally liable ("gesamtschuldnerische Haftung") only within
      the amounts set forth in para. 5 below with regard to any other guarantees
      provided for in this Agreement.

(3)   The Purchaser may only claim damages from the Sellers on the basis of
      violations of guarantees under this Agreement if the amount of such claims
      exceeds Euro 500,000.00 in the aggregate, provided, however, that, the
      foregoing threshold shall not apply for any violation of the guarantees
      contained in Section 5 para. 4 and Section 5 para. 19 sentences 1 and 2
      above. If the claims (individually or in the aggregate) exceed the minimum
      amount of Euro 500,000.00, the Purchaser may claim for the full amount of
      the loss (Freigrenze). In the event that any of the employees listed in
      Exhibit 5.15 d) to this Agreement makes a claim under statutuory inventor
      compensation provisions, the Sellers shall indemnify the Purchaser and/or
      any of the Companies against such claim provided, however, that the
      liability of the Sellers shall be limited to an amount of Euro 50,000.00
      per

                                                                              25


      employee. For the avoidance of doubt it is clarified that
      "double-recovery" is excluded. In particular the Purchaser shall have no
      claim for damages if and to the extent that

      a)    Peter Wolters AG has made adequate provisions in the consolidated
            financial statements for the year 2003 or the Transfer Financial
            Statements (in the latter case, however, only to the extent that
            such provisions had to be made in accordance with GOB and past
            practice and (i) were also made in the consolidated financial
            statements for the year 2003 or (ii) could not be made in the
            consolidated financial statements for the year 2003 and the basis
            for them has occurred in the ordinary course of business after
            December 31, 2003 and - to the extent Sellers had actual knowledge
            thereof - has been disclosed to the Purchaser prior to the execution
            of this Agreement), or

      b)    insurance coverage repays Purchaser or the respective Company for
            the loss incurred, in either case, for the guaranteed circumstances,
            or

      c)    a breach of guarantee given or undertaken by the Sellers in this
            Agreement at the same time results in a reduction of the
            consolidated equity as per the Transfer Date under the amount as
            guaranteed in Section 4 para. 3 above and has lead to a Purchase
            Price Adjustment.

(4)   Sections 442 BGB and 377 HGB shall not apply. In particular, any
      Purchaser's claim can be made even if the Purchaser was aware, or could
      have been aware, of the fact that a Sellers' guarantee was not correct.
      However, the Purchaser and Novellus acknowledge to the Sellers that
      neither of them nor their advisers have actual knowledge (free of any
      doubt) that a Sellers' guarantee under this Agreement is incorrect or
      misleading.

(5)   The aggregate liability of the Sellers in respect of claims arising from a
      violation of guarantees pursuant to Section 5 para. 1 to 7 above is
      limited to the Aggregate Purchase Price or the Adjusted Aggregate Purchase
      Price, as the case may be, however, subject to the proviso that the
      individual maximum liability of each Seller shall be limited to that
      portion of the Aggregate Purchase Price, or Adjusted Aggregate Purchase
      Price, if applicable, which corresponds with the interest of such Seller
      in Peter Wolters AG in accordance with the Sellers List. The aggregate
      liability of the Sellers in respect of claims arising from a violation of
      any other guarantee contained in Section 5 above is limited

                                                                              26


      to an amount equal to the Escrow Amount pursuant to Section 4 para. 4
      above, however, subject to the proviso that the maximum aggregate
      liability of the Sellers in respect of claims arising from a violation of
      any other guarantee contained in Section 5 above and all other guarantees
      or indemnities under this Agreement (except for guarantees pursuant to
      Section 5 para. 1 to 7 above to which sentence 1 above applies) shall in
      no event exceed an amount equal to 150 % of the Escrow Amount, i.e. Euro
      18,675,000.00 (in words: eighteen million six hundred seventy five
      thousand).

(6)   To the extent legally permissible, any claims by the Purchaser against the
      Sellers under this Section 6 in connection with Section 5 above shall be
      barred as follows:

      a)    any claims resulting from an incorrect statement under Section 5
            para. 11, 12, 13, 15, 19, 21, 23, or 27 above shall be barred after
            three years after the Closing Date;

      b)    any claims resulting from an incorrect statement under Section 5
            para. 1, 2, 3, 4, 5, 6, or 7 above shall be barred after ten years
            after the Closing Date;

      c)    all other claims of the Purchaser against the Sellers under this
            Agreement for breach of a guarantee in Section 5 above that are not
            described in lit. a) and b) above shall become barred one year after
            the Closing Date.

(7)   The aforementioned limitation periods shall be suspended (gehemmt) if the
      Purchaser informs the Sellers in writing within the limitation period that
      it will assert a claim and thereby, to the extent possible, states the
      amount of the claim (or an estimate thereof) and briefly sets out the
      reasons for the claim, provided that the Purchaser, within a further
      period of six months after the sending of such written notification,
      brings an action or takes other measures pursuant to Sections 203 and/or
      204 BGB that suspends the running of the limitation period.

(8)   Unless expressly stated otherwise, any liability under this Section 6 in
      connection with any incorrect statement under Section 5 above shall not
      require any knowledge and/or any fault on the side of any of the Sellers.

(9)   If any of the statements under Section 5 above are subject to the "best
      knowledge of Sellers", the actual knowledge of any of the Sellers or any
      of the management (Vorstand) of

                                                                              27


      Peter Wolters AG or the ignorance due to gross negligence ("Kennen
      mussen") of any of such persons shall be, within the limits of para. 5
      above, relevant. In any event, best knowledge of the management of Peter
      Wolters AG includes such knowledge which the management could have
      obtained by applying the standard of care of a careful and diligent
      business man (Sorgfalt eines ordentlichen und gewissenhaften
      Geschaftsleiters) within the meaning of Section 93 para. 1 sentence 1
      AktG.

(10)  Any claims of the Purchaser against the Sellers under this Agreement or by
      law - whatever their legal grounds may be - which go beyond the
      obligations and guarantees of the Sellers contained in this Agreement are
      excluded unless liability is mandatory by law or the Sellers acted with
      intent or gross negligence. Save for the provision set out in Section 4
      above, claims on the part of the Purchaser for a reduction of the purchase
      price or rescission as a result of avoidance due to error or withdrawal
      from the Agreement are expressly excluded. The aforementioned guarantees
      of the Sellers are the final and exclusive representations and warranties
      under this Agreement and no further representations or warranties have
      been provided by the Sellers. The Sellers shall assume no further
      guarantees beyond those in this Agreement. In particular the Sellers shall
      assume no liability for a given value or profitability of the Sellers
      Shares. No guarantee is made as to the future performance of the Companies
      or to any financial projection provided to the Purchaser, except as
      contained in the last sentence of Section 5 para. 10 above.

(11)  According to the mutual understanding and joint intent of the Purchaser
      and the Sellers the guarantees of the Sellers under this Agreement shall
      not be regarded as a guarantee of a certain condition or quality
      ("Beschaffenheitsgarantie") within the meaning of Section 444 BGB but are
      exclusively granted and limited upon an agreement between the parties
      according to Section 311 para. 1 BGB.

                                                                              28


                                    SECTION 7
                                      TAXES

(1)   In addition to the guarantees contained in Section 5 above, the Sellers
      hereby guarantee to the Purchaser by means of an independent guarantee
      (selbststandiges Garantieversprechen) within the meaning of Section 311
      para. 1 BGB that the following statements are correct:

      a)    All returns relating to taxes including any employee withholding
            taxes (einzubehaltene Lohnsteuer), social security contributions,
            duties, public charges and levies of all kinds (hereinafter referred
            to as "TAXES AND OTHER CHARGES") relating to periods ending on or
            before the Closing Date which are required to have been filed by or
            with respect to any of the Companies have been duly and timely filed
            on or prior to the due date and all Taxes and Other Charges shown to
            be due on such returns for which any of the Companies is liable have
            been timely paid.

      b)    To the best of Sellers' knowledge, EXHIBIT 7.1 b) to this Agreement
            contains a correct description of Peter Wolters AG's corporation tax
            credit (Korperschaftsteuerguthaben) and the tax losses (steuerliche
            Verlustvortrage) of Peter Wolters AG and Peter Wolters KG as of
            December 31, 2003, respectively.

      c)    Except as disclosed in EXHIBIT 7.1 c) (i) to this Agreement, there
            is no action, suit or investigation, claim or assessment pending or,
            to the best knowledge of the Sellers, threatened with respect to
            Taxes and Other Charges relating to any of the Companies. EXHIBIT
            7.1 c) (ii) to this Agreement contains a complete and correct list
            of the last tax audits performed with respect to Peter Wolters AG
            and its German Subsidiaries. Except as disclosed in EXHIBIT 7.1 c)
            (iii) to this Agreement, none of Peter Wolters AG and its German
            Subsidiaries has received any written ruling (verbindliche Auskunft)
            regarding Taxes and Other Charges or entered into any written and
            legally binding agreement or is currently under negotiations to
            enter into any such agreement with any authority which would affect
            its situation with respect to Taxes and Other Charges. Section 6
            para. 1 above applies mutatis mutandis.

                                                                              29


(2)   Notwithstanding Sections 5 and 6 and para. 1 above, and in addition
      thereto, the Sellers shall indemnify (freistellen) the Purchaser and/or
      any of the Companies from any and all outstanding Taxes and Other Charges
      (including delinquency payments, interests, surcharges on delay and
      administrative fines and similar additions as well as any taxes, costs and
      expenses associated therewith) relating to any periods ending on or before
      December 31, 2003 for which any of the Companies is made liable, if, to
      the extent and at the time any of the Companies is obliged to pay such
      Taxes and Other Charges, irrespective whether such Taxes and Other Charges
      are known or unknown as of the Closing. The same shall apply with respect
      to constructive dividend distributions (verdeckte Gewinnausschuttungen)
      occuring in or resulting from the period between December 31, 2003 and the
      Closing Date. The Sellers, however, grant neither a guarantee nor an
      indemnity to the Purchaser and/or the Companies with regard to the tax
      treatment of the post Closing bonus payments and payment of other amounts
      pursuant to Section 9 below.

      Accruals made for Taxes and Other Charges in the financial statements for
      the year 2003 referenced in Section 5 para. 8 above as well as any tax
      relief or other advantage in the same or the subsequent fiscal years
      realized as a consequence of such Taxes and Other Charges to be
      indemnified against shall be credited against such liabilities by the net
      present value of such tax relief or advantage, provided however that the
      net present value shall be computed at a discount rate of 5 % p.a. The
      same shall apply to any refunds or reduction of taxes with respect to
      assessment periods up to the Closing which are not included in the
      financial statements for the year 2003 referenced in Section 5 para. 8
      above.

(3)   Any claims under para. 1 and/or 2 above shall become barred after the
      expiration of six months after the relevant assessment for the relevant
      Taxes and Other Charges and the relevant period or such other assessment
      or order or decision has become final and non-appealable. Section 6 para.
      7 above applies mutatis mutandis to these claims.

(4)   For the avoidance of doubt, it is expressly agreed that Section 6 para. 3
      sentences 1 and 2 and para. 5 above do not apply, whereas Section 6 para.
      3 sentences 3 and 4 and para. 4, para. 8, 9, 10 and 11 above do apply
      mutatis mutandis to any claims under para. 1 and/or 2 above.

                                                                              30


(5)   The aggregate liability of the Sellers in respect of any claims pursuant
      to this Section 7 is limited to an amount equal to the Escrow Amount
      pursuant to Section 4 para. 4 above, however, subject to the proviso that,
      with the exception of the maximum liability of the Sellers in respect of
      claims arising from a violation of any guarantees contained in Section 5
      para. 1 to 7 above, for which Section 6 para. 5 sentence 1 above shall
      apply, the maximum aggregate liability of the Sellers in respect of claims
      arising from a violation of this Section 7 and all other guarantees and
      indemnities under this Agreement shall in no event exceed an amount equal
      to 150 % of the Escrow Amount, i.e. Euro 18,675,000.00 (in words: eighteen
      million six hundred seventy-five thousand).

(6)   With regard to the guarantees pursuant to para. 1 above and the indemnity
      obligations pursuant to para. 2 above the Sellers shall be jointly and
      severally liable ("gesamtschuldnerische Haftung") only within the amounts
      as set forth in para. 5 above.

(7)   The parties will cooperate and use their respective best efforts to ensure
      that, as soon as possible after the date of this Agreement, separate tax
      audits of Peter Wolters AG and its German Subsidiaries shall take place
      covering the period up to December 31, 2003. The Purchaser shall inform
      the Sellers in writing immediately about any tax audits, any
      correspondence or other contacts with the tax authorities relating to the
      period until and including the Closing Date. Any tax audits,
      correspondence or other contacts with the tax authorities shall be
      prepared and conducted by Peter Wolters AG and each of its German
      Subsidiaries, as the case may be, giving full access to the Sellers and/or
      their advisors (including, but not limited to legal and tax advisors) to
      participate in such tax audits and to challenge (following consultation
      with the Purchaser as to the form and content of such challenge and taking
      into account the Purchaser's reasonable interests) any findings and/or
      assessments of the tax authorities, which relate to the time up to
      December 31, 2004 and which could result in any Sellers' liability. The
      Purchaser shall also procure that, to the extent legally permissible, the
      tax returns of the Companies for the fiscal year 2004 are made consistent
      with prior tax returns. All items of the tax balance sheet shall be agreed
      upon between the Purchaser and the Sellers to the extent they might affect
      Sellers' position under this Agreement.

      Until any of the Companies has received an assessment notice or after it
      has received an assessment notice pursuant to which, would it become
      non-appealable (bestandskraftig), the Purchaser would have a claim against
      the Sellers under this Agreement,

                                                                              31


      a)    any agreements and understandings with the tax authorities shall be
            agreed upon between the Purchaser and the Sellers. Should the
            Purchaser and the Sellers not be able to reach such agreement within
            a reasonable time period, the respective Company and/or the
            Purchaser shall take such action (Einspruch und/oder Klage), which
            is reasonably requested by the Sellers to challenge the tax
            assessments. The Purchaser shall provide and shall procure that the
            respective Company provides such information as is reasonably
            requested by the Sellers for this purpose;

      b)    the Purchaser shall procure that the respective Company shall take
            such action as the Sellers may reasonably request by notice in
            writing to the Purchaser to avoid, dispute, defend, resist, appeal
            or compromise any Tax or Other Charges claim (hereinafter referred
            to as "TAX DISPUTE") and in case the Sellers give such notice

            (i)   the Purchaser shall procure that the Tax Dispute is not
                  settled or otherwise compromised without the Sellers' prior
                  written consent, and

            (ii)  the Purchaser shall provide and procure that the respective
                  Company provides such information as is reasonably requested
                  by the Sellers for this purpose.

            The costs of any such legal proceedings and actions shall be borne
            and advanced by the Sellers provided that such tax assessment gave
            cause for such a request by the Sellers.

      c)    Any breach of the obligations of the Purchaser set forth in this
            para. 7 shall exclude any claims of the Purchaser against the
            Sellers pursuant to this Section 7 with respect to the issue in
            relation to which the breach was committed to the extent the breach
            has adversely affected Sellers' position under this Agreement.

(8)   If tax assessments, in particular as a consequence of tax audits, lead to
      a change in tax valuations in the balance sheet of any of the Companies
      for assessment periods up to December 31, 2003, this shall have no
      influence on the Aggregate Purchase Price pursuant to Section 4 above.

                                                                              32


                                    SECTION 8
                  CONDUCT OF BUSINESS PENDING THE CLOSING DATE

The Sellers hereby agree to procure that, pending the Closing Date and except as
otherwise agreed by the Purchaser in writing, the following will take place:

(1)   The Companies will carry on their business diligently and substantially in
      the same manner as presently conducted. They shall not institute any new
      methods of management, accounting or operation or engage in any
      transaction or activity, enter into any agreement or make any commitment
      except in the ordinary course of business and consistent with past
      practice.

(2)   The Companies will conduct their business in a way that the statements
      contained in Section 5 above are correct as of the Closing Date, save for
      any changes or deviations which are the result of the continuing business
      operations in the ordinary course of business.

(3)   Neither will the Sellers cast their vote to pass a dividend resolution of
      Peter Wolters AG nor will Peter Wolters AG pay any dividends to its
      shareholders other than dividends set forth in Section 5 para. 10 above.

(4)   KPMG as advisors will continue to assist Peter Wolters AG to reconcile its
      results for future US reporting purposes as consolidated statements under
      US generally accepted accounting principles (US-GAAP) for the calendar
      year 2003, for each of the calendar quarters of the year 2003 and for the
      first calendar quarter of 2004.

                                    SECTION 9
            POST-CLOSING BONUS PAYMENTS, DIVIDENDS AND OTHER AMOUNTS

(1)   Following the Closing, Novellus and the Purchaser shall procure that the
      Companies timely and fully pay those bonuses, payments and other expenses
      set forth in Exhibit 5.19 a) (i) to this Agreement (relating to bonus
      payments to be made by the Company or Peter Wolters KG, as the case may
      be, to the management) and Exhibit 5.19 a) (ii) to this Agreement
      (relating to the bonus schemes for employees of the Companies with respect
      to the 200-year anniversary of Peter Wolters AG) in amounts set forth
      therein. Novellus and the Purchaser shall procure that the Companies adopt
      the resolutions and

                                                                              33


      take all measures which are necessary to make the bonus payments to the
      management as set forth in Exhibit 5.19 a) (i) to this Agreement and to
      implement the bonus schemes to employees of the Companies as set forth in
      Exhibit 5.19 a) (ii) to this Agreement. The parties agree that - with the
      exception of the bonus payments to the management set forth in Exhibit
      5.19 a) (i) to this Agreement, for which a corresponding reserve
      (Ruckstellung) in the same amount shall be made - with respect to the
      bonuses, payments and other expenses as set forth in Exhibit 5.19 a) (ii)
      to this Agreement neither a corresponding reserve shall be made nor any
      liability shall be shown in the Transfer Financial Statements.

(2)   For the avoidance of doubt, it is expressly agreed that the dividend
      payments in the aggregate amount of Euro 1,120,000.00 made by the Company
      to the Sellers prior to the date of this Agreement pursuant to a
      shareholders resolution dated May 26, 2004 shall be taken into account as
      liability in the Transfer Financial Statements.

                                   SECTION 10
                                     CLOSING

(1)   On June 28, 2004, or on such other date as may be mutually agreed upon in
      writing by the Sellers and the Purchaser (herein also referred to as the
      "CLOSING DATE"), the consummation of the transactions contemplated hereby
      (herein also referred to as the "CLOSING") shall occur at the offices of
      Taylor Wessing located at Neuer Wall 44, 20354 Hamburg, Federal Republic
      of Germany, or at such other place as may be mutually agreed upon in
      writing by the Sellers and the Purchaser.

(2)   At the Closing, the following acts shall take place concurrently:

      a)    Execution of a transfer agreement on the Sellers Shares as per
            Exhibit 3.1 to this Agreement and delivery of the global share
            certificates for all Peter Wolter Shares from the Sellers to the
            Purchaser;

      b)    Payment by the Purchaser of the Aggregate Purchase Price in cash to
            the Sellers pursuant to Section 4 above and subject to lit. c)
            below;

                                                                              34


      c)    Payment by the Purchaser of the Escrow Amount to the escrow agents
            specified in the Escrow Agreement.

      d)    Hand-over by the Sellers of letters of Messrs. H.J. Bovensiepen, D.
            Knipping, O. Meuser, B. Kloft and L. Rehfeldt containing their
            resignation from office as members of the supervisory board of Peter
            Wolters AG to the Purchaser;

      e)    Delivery of a written statement of release by the creditor regarding
            the share pledges as listed in Exhibit 5.4 to this Agreement to the
            Purchaser.

      f)    Delivery of a written statement of release by Deutsche Bank AG
            regarding securities granted by Peter Wolters AG in favor of Seller
            1 and delivery of evidence that the accounting by Peter Wolters AG
            for Seller 1 shall be terminated as per December 31, 2004 and that
            Mr. H.J. Bovensiepen's right to a company car has terminated at the
            Closing at the latest without any further obligations of any of the
            Companies.

(3)   At the end of the Closing session the parties shall mutually confirm to
      each other in writing if and when the acts to be carried out during the
      Closing have been performed.

(4)   Immediately after the Closing, the Purchaser shall hold an extraordinary
      shareholder meeting of Peter Wolters AG in which the election of the new
      members of the supervisory board of Peter Wolters AG (to be nominated by
      the Purchaser) shall be resolved.

(5)   For purposes of this Agreement, the Sellers represent and guarantee to the
      Purchaser and Novellus that Peter Wolters AG and its Subsidiaries did not
      have consolidated sales in Germany within the meaning of Section 35 para.
      1 no. 2 of the German Act against Competition Restraints (Gesetz gegen
      Wettbewerbsbeschrankungen - GWB; hereinafter also referred to as "GWB") in
      the year 2003 in excess of Euro 25,000,000.00. For purposes of this
      Agreement, the Purchaser and Novellus represent and guarantee to the
      Sellers that Novellus and its subsidiaries did not have consolidated sales
      in Germany within the meaning of Section 35 para.1 no. 2 GWB in the year
      2003 in excess of Euro 25,000,000.00. On this basis, the parties agree
      that the transactions contemplated hereby do not require notification of
      the German Federal Cartel Office (Bundeskartellamt) and

                                                                              35


      that their consummation at the Closing does not violate Section 41 para. 1
      sentence 1 GWB. For purposes of this Agreement, the Sellers furthermore
      represent and guarantee to the Purchaser and Novellus that Peter Wolters
      AG and its subsidiaries did not have consolidated sales in or into the
      United States of America in the year 2003 in excess of US-$ 50,000,000.00
      and do not have assets in the United States of America in excess of US-$
      50,000,000.00. On this basis, the parties agree that the transactions
      contemplated hereby do not require any filings under the Hard-Scott-Rodino
      Act of the United States of America and that their consummation at the
      Closing does not violate any applicable US federal or state antitrust
      laws.

                                   SECTION 11
          NON-COMPETITION AND OTHER COVENANTS OF SELLERS AND PURCHASER

(1)   For a period of two years following the Closing Date, neither of the
      Sellers shall compete with any of the Companies in their present business
      and their present regional markets, neither directly nor indirectly nor by
      acting as a consultant or holding an interest, directly or indirectly, in
      any company which competes with any of the Companies. In case of violation
      of this non-compete obligation, any Seller which is in breach of such
      obligation shall pay, upon request, a contractual penalty (Vertragsstrafe)
      in the amount of Euro 200,000.00 to the Purchaser for each and every
      violation. Any violation for a period of more than four weeks shall be
      deemed for purposes of this provision to be a separate violation. The
      right to claim damages, to file a petition for a preliminary injunction
      and any other rights of the Purchaser shall remain unaffected. Any purely
      financial investment of the Sellers in publicly listed companies which
      does not exceed a participation of 2 % of the registered (issued) share
      capital of such company shall be exempt from this non-competition
      covenant.

(2)   Except as required by law or by any governmental or other regulatory or
      supervisory body or authority of competent jurisdiction to whose rules the
      party making the announcement or disclosure is subject, whether or not
      having the force of law, no announcement or circular or disclosure in
      connection with the existence or subject matter of this Agreement shall be
      made or issued by or on behalf of any of the Sellers or the Purchaser
      without the prior written approval of the Purchaser and the Sellers
      Representative, such approval not to be unreasonably withheld or delayed.

                                                                              36


(3)   Novellus and the Purchaser intend to, but are in no way bound to, make an
      election under Section 338 of the Internal Revenue Code of the United
      States of America with respect to the purchase of the Peter Wolters Shares
      as well as for its non-U.S. subsidiaries.

                                   SECTION 12
         SELLERS REPRESENTATIVE, PURCHASER'S AND NOVELLUS' PROCESS AGENT

(1)   The Sellers hereby irrevocably appoint Seller 1 as their representative
      (herein also referred to as "SELLERS REPRESENTATIVE") for all matters in
      connection with this Agreement.

(2)   The Sellers Representative is hereby irrevocably authorized by any and all
      Sellers to act as their representative for all matters under or in
      connection with this Agreement (including the Escrow Agreement). As such
      representative, Sellers Representative is entitled to make and receive any
      and all binding statements and commitments and to enter into any and all
      agreements which it deems to be reasonable. In case of a legal dispute in
      connection with this Agreement (including the Escrow Agreement) the
      Sellers Representative shall act as process agent (rechtsgeschaftlich
      bestellter Vertreter) of the Sellers within the meaning of Sections 171,
      174 of the German Code of Civil Procedure (Zivilprozessordnung - ZPO;
      hereinafter also referred to as "ZPO"). Any conflicting acts or statements
      by any of the Sellers shall be of no effect in the relationship to the
      Purchaser.

(3)   The Purchaser and Novellus each hereby irrevocably appoint their German
      counsel in this transaction, the Partnerschaft Flick Gocke Schaumburg,
      Johanna-Kinkel-Strasse 2 - 4, 53175 Bonn, to act as their respective
      process agent (rechtsgeschaftlich bestellter Vertreter) within the meaning
      of Sections 171, 174 ZPO in case of a legal dispute in connection with
      this Agreement (including the Escrow Agreement).

                                                                              37


                                   SECTION 13
                                     NOTICES

(1)   Unless agreed to otherwise in this Agreement, any notices under or in
      connection with this Agreement, in order to be valid, shall be in writing
      in the English language and addressed to:

      a)    If to Purchaser and/or Novellus:

            Johanna 34 Vermogensverwaltungs GmbH
            (to be renamed NHL Acquisition Sub GmbH)

            if before Closing:

            Johanna-Kinkel-Stra(beta)e 2-4
            53175 Bonn
            Federal Republic of Germany
            Fax: ++49-228-9594-100

            if after Closing:

            Busumer Stra(beta)e 96
            24768 Rendsburg
            Federal Republic of Germany
            Fax: ++49-4331-458-205

            and

            Chief Financial Officer
            Novellus Systems, Inc.
            4000 North First Street
            San Jose, CA 95134
            USA
            Fax: ++1-408-943 3448

            with a copy (for information purposes only) to:

            Michael C. Phillips
            Morrison & Foerster LLP
            755 Page Mill Road
            Palo Alto, CA 94304-1018
            USA
            Fax: ++1-650-494-0792

                                                                              38


            and

            Dr. Stephan Gockeler
            FLICK GOCKE SCHAUMBURG
            Johanna-Kinkel-Stra(beta)e 2-4
            53175 Bonn
            Federal Republic of Germany
            Fax: ++49-228-9594-100

      b)    If to Sellers:

            Sellers Representative
            Peter Wolters Stiftung,

            if before Closing:

            Busumer Stra(beta)e 96
            24768 Rendsburg
            Federal Republic of Germany
            Fax: ++49-4331-458-205

            if after Closing:

            Kanalufer 222
            24768 Rendsburg
            Federal Republic of Germany
            Fax: ++49-4331-22468

            with a copy (for information purposes only) to:

            Bernhard Kloft
            Taylor Wessing
            Neuer Wall 44
            20354 Hamburg
            Federal Republic of Germany
            Fax: ++49-40-36803-280

            and

            Udo Hieber
            Hieber Vermogensverwaltungsgesellschaft mbH
            Eiderstra(beta)e 93
            24768 Rendsburg
            Federal Republic of Germany
            Fax: ++49-4331-458-205

                                                                              39


(2)   The Purchaser and the Sellers may designate other addressees by sending a
      notice in accordance with this Agreement to the other parties'
      representative, provided, however, that the Sellers can only designate one
      representative for all Sellers and, provided further, for the avoidance of
      doubt, that the Sellers and the Purchaser may not exchange their Sellers
      Representative, respectively, their process agent as specified in Section
      12 para. 1, 2 and 3 without prior written consent of the Purchaser or the
      Sellers Representative, as the case may be, which consent shall not be
      unreasonably withheld.

(3)   If this Agreement requires a notice or agreement in writing, the sending
      or exchange of documents by telefacsimile copy shall suffice. Any other
      means of transmission, in particular any electronic mail, do not suffice.

                                   SECTION 14
                            MISCELLANEOUS PROVISIONS

(1)   This Agreement (including the attached Exhibits) constitutes the entire
      Agreement and supersedes all other prior agreements and undertakings both
      written and oral among the parties with respect to the subject matter
      hereof. Any changes and amendments to this Agreement (including this
      sentence 2 of this para. 1) shall be in writing in order to be legally
      effective. Notwithstanding the foregoing, the provisions of the
      Non-Disclosure Agreement between the parties hereto dated January 13, 2004
      shall apply as if set forth herein in full length.

(2)   Each party shall bear its own costs and expenses including, without
      limitation, its attorneys' fees. None of the costs allocable to the
      Sellers shall be borne by any of the Companies. The Sellers shall bear any
      and all cost resulting from their or any of the Company's engagement of
      any finder, investment bank or similar agent relative to the purchase of
      any or all of the Sellers Shares or to the business of any or all of the
      Companies. If any such cost or fees have been borne by any of the
      Companies, the Sellers shall promptly reimburse the respective Companies.
      Any amounts that have not been reimbursed on or prior to the Closing shall
      entitle the Purchaser to withhold such amounts out of the respective
      Sellers Share in the Aggregate Purchase Price. Any transfer taxes shall be
      borne by the Purchaser.

                                                                              40


(3)   Unless expressly stated otherwise in this Agreement, the Sellers shall not
      be jointly and severally liable (Gesamtschuldner) for any and all
      obligations of the Sellers under or in connection with this Agreement.

(4)   This Agreement shall be governed by the substantive laws of the Federal
      Republic of Germany.

(5)   To the extent legally permissible, the exclusive place of jurisdiction
      (ausschlie(beta)licher Gerichtsstand) for any and all claims arising out
      of or in connection with this Agreement shall be Hamburg, Federal Republic
      of Germany.

(6)   If any provision of this Agreement shall be or become invalid or
      unenforceable, the validity and enforceability of the remaining provisions
      of this Agreement shall remain unaffected. The invalid or unenforceable
      provision shall be deemed to be replaced by a valid and enforceable
      provision which, to the extent legally permissible, comes as close as
      possible to what the parties intended or would have intended if they had
      been aware of the invalidity or unenforceability. The same shall apply in
      the event that this Agreement contains a gap.

(7)   This Agreement has been executed in an official English language version
      and an official German language version, each in 7 counterparts, all of
      which shall be one and the same instrument, and each of such counterparts
      shall have full force and effect. In case of a dispute on the accuracy of
      the translation the English language version shall prevail.

Rendsburg, June 2, 2004

/s/ David L. Celli
Johanna 34 Vermogensverwaltungs GmbH,
represented by David L. Celli

                                                                              41


/s/ Richard S. Hill
Novellus Systems Inc.,
represented by Richard S. Hill

/s/ Hans-Joachim Bovensiepen
Peter Wolters Stiftung,
represented by Hans-Joachim Bovensiepen

/s/ Swantje Rehfeldt
Eider Vermogensverwaltungsgesellschaft mbH,
represented by Swantje Rehfeldt, born Bovensiepen

/s/ Hans-Joachim Bovensiepen
Bovensiepen Vermogensverwaltungsgesellschaft mbH,
represented by Hans-Joachim Bovensiepen,
pursuant to certified power of attorney dated May 26, 2004,
copy of which is attached to this Agreement

/s/ Hans-Joachim Bovensiepen
ROMERHOF Vermogensverwaltungsgesellschaft mbH,
represented by Hans-Joachim Bovensiepen,
pursuant to power of attorney dated May 26, 2004,
copy of which is attached to this Agreement

/s/ Udo Hieber
Hieber Vermogensverwaltungsgesellschaft mbH,
represented by Udo Hieber

                                                                              42


LIST OF EXHIBITS

EXHIBIT 1.1:           GLOBAL SHARE CERTIFICATES

EXHIBIT 1.2:           SELLERS LIST

EXHIBIT 3.1:           TRANSFER AGREEMENT

EXHIBIT 4.2:           ACCOUNT OF TAYLOR WESSING AS TRUSTEE FOR SELLERS

EXHIBIT 4.4:           ESCROW AGREEMENT

EXHIBIT 5.2 a):        STATUTES AND OTHER CORPORATE DOCUMENTS

EXHIBIT 5.2 b):        EXCERPTS FROM THE REGISTERS OR EQUIVALENT DOCUMENTATION

EXHIBIT 5.4            SHARE PLEDGES

EXHIBIT 5.6:           ENTERPRISE AGREEMENTS

EXHIBIT 5.8:           FINANCIAL STATEMENTS AND CONSOLIDATED FINANCIAL
                       STATEMENTS 2002 AND 2003

EXHIBIT 5.10:          FORECAST

EXHIBIT 5.11:          LIST OF ALL GUARANTEES ETC.

EXHIBIT 5.12:          LIST OF REAL ESTATE OWNED OR USED BY THE COMPANIES

EXHIBIT 5.13:          LIST OF THIRD-PARTY RIGHTS IN ANY ASSETS OF THE COMPANIES

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EXHIBIT 5.15 a):       LIST OF JURISDICTIONS FOR PURPOSES OF INTELLECTUAL
                       PROPERTY RIGHTS

EXHIBIT 5.15 b):       INFRINGEMENT OF INTELLECTUAL PROPERTY RIGHTS BY THIRD
                       PARTIES

EXHIBIT 5.15 c):       INFRINGEMENT OF INTELLECTUAL PROPERTY RIGHTS ASSERTED BY
                       THIRD PARTIES

EXHIBIT 5.15 d):       BASIS FOR CLAIMS BY EMPLOYEES OR FORMER EMPLOYEES
                       REGARDING INVENTOR COMPENSATION

EXHIBIT 5.15 e):       LIST OF EMPLOYEES FOR PURPOSES OF INTELLECTUAL PROPERTY
                       RIGHTS

EXHIBIT 5.16 a):       MATERIAL AGREEMENTS

EXHIBIT 5.16 b):       DEFINITIONS OF MATERIAL AGREEMENTS

EXHIBIT 5.19 a) (i):   BONUSES TO THE MANAGEMENT.

EXHIBIT 5.19 a) (ii):  BONUSES AND OTHER PAYMENTS WITH RESPECT TO THE 200-YEAR
                       ANNIVERSARY

EXHIBIT 5.19 b):       LIST OF ALL EMPLOYEES AND RELEVANT DATA

EXHIBIT 5.19 c):       COLLECTIVE BARGAINING AGREEMENTS/WORKERS' COUNCIL
                       AGREEMENTS/MEMBERSHIPS IN EMPLOYER'S ASSOCIATIONS

EXHIBIT 5.19 d):       PENSION PLANS ETC.

EXHIBIT 5.20:          LIST OF ALL INSURANCES

EXHIBIT 5.21:          LIST OF ALL PUBLIC GRANTS AND OTHER SUBSIDIES

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EXHIBIT 5.23:          LIST OF ALL PROCEEDINGS

EXHIBIT 5.24:          LIST OF ALL BANK ACCOUNTS WITH SIGNATORIES

EXHIBIT 5.25:          LIST OF ALL POWERS OF ATTORNEY

EXHIBIT 7.1 b):        LIST OF PETER WOLTERS AG'S AND PETER WOLTERS KG'S TAX
                       CREDITS AND TAX LOSSES

EXHIBIT 7.1 c (i)):    LIST OF PROCEEDINGS REGARDING TAXES AND OTHER CHARGES

EXHIBIT 7.1 c (ii):    LIST OF TAX AUDITS

EXHIBIT 7.1 c) (iii):  LIST OF RULINGS, AGREEMENTS AND NEGOTIATIONS REGARDING
                       TAXES AND OTHER CHARGES

                                      *****

NOVELLUS SYSTEMS, INC. AGREES TO FURNISH SUPPLEMENTALLY A COPY OF THE ABOVE
EXHIBITS, WHICH HAVE BEEN OMITTED PURSUANT TO ITEM 601(b)(2) OF REGULATION S-K
UNDER THE SECURITIES EXCHANGE ACT OF 1934, TO THE SECURITIES AND EXCHANGE
COMMISSION (THE "COMMISSION") UPON REQUEST OF THE COMMISSION.

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