EXHIBIT 23.1



                       CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the incorporation by reference in the Registration
Statements on Form S-3 (Nos. 333-70122, 333-68060, 333-68062, 333-56642,
333-42620, 333-87194 and 333-82562), in the Registration Statement on Form S-4
(No. 333-75490), and in the Registration Statements on Form S-8 (Nos. 333-88160,
333-88158, 333-88154 and 333-88190) of Brooks - PRI Automation, Inc. (formerly
Brooks Automation, Inc.) of our report dated November 19, 2001 relating to the
financial statements and financial statement schedule of PRI Automation, Inc.
which appears in this Current Report on Form 8-K of Brooks - PRI Automation,
Inc.

/s/ PricewaterhouseCoopers LLP

PricewaterhouseCoopers LLP

Boston, Massachusetts
May 10, 2002