Exhibit 23.2



                    CONSENT OF INDEPENDENT PUBLIC ACCOUNTANTS

We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of our report dated January 31, 2002 relating to the
financial statements and financial statement schedule of MKS Instruments, Inc.,
which appears in MKS Instruments, Inc.'s Annual Report on Form 10-K for the year
ended December 31, 2001.

/s/ PricewaterhouseCoopers LLP

Boston, Massachusetts
June 13, 2002