EXHIBIT 23.1


                       CONSENT OF INDEPENDENT ACCOUNTANTS

       We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (No. 333-78069, 333-78071, 333-78073, 333-31224,
333-54486, 333-54488, 333-54490, 333-90498, 333-90500 and 333-90502) and Form
S-3 (No. 333-34450) of MKS Instruments, Inc. of our report dated February 3,
2003 relating to the financial statements and the financial statement schedule,
which appears in this Form 10-K.

/s/ PricewaterhouseCoopers LLP

Boston, Massachusetts
March 28, 2003