Exhibit 10.2 Confidential Materials omitted and filed separately with the Securities and Exchange Commission. Asterisks denote omissions. PERSONAL AND CONFIDENTIAL ------------------------- 2004 MKS MANAGEMENT INCENTIVE PROGRAM [FORM OF] PRO FORMA PRE-TAX EARNINGS PER SHARE (EPS) TABLE (JANUARY 1 - DECEMBER 31) YOUR TARGET BONUS UNDER THE 2004 MKS MANAGEMENT INCENTIVE PLAN IS ___%(1) OF YOUR BASE EARNINGS. THE PAYOUT OF YOUR BONUS WILL BE ACHIEVED ACCORDING TO THE SCHEDULE SHOWN IN THE CHART BELOW. FOR EXAMPLE, YOU WILL RECEIVE 50% OF YOUR TARGET BONUS IF OUR PRO FORMA PRE-TAX EPS REACHES $**, AND 100% OF YOUR TARGET BONUS IF OUR PRO FORMA PRE-TAX EPS REACHES $**. AT A PRO FORMA PRE-TAX EPS OF $** OR MORE, YOU WOULD RECEIVE 200% OF YOUR TARGET BONUS, WHICH WOULD RESULT IN THE PAYMENT OF A BONUS EQUAL TO ___%(2) OF YOUR 2004 BASE MKS EARNINGS. ------------------------- --------------------- Pro forma % of Target Pre-Tax EPS Bonus Earned ------------------------- --------------------- ------------------------- --------------------- < =$** 0.0% ------------------------- --------------------- $** 5.0% ------------------------- --------------------- $** 10.0% ------------------------- --------------------- $** 25.0% ------------------------- --------------------- $** 35.0% ------------------------- --------------------- $** 50.0% ------------------------- --------------------- $** 60.0% ------------------------- --------------------- $** 75.0% ------------------------- --------------------- $** 85.0% ------------------------- --------------------- $** 100.0% ------------------------- --------------------- $** 125.0% ------------------------- --------------------- $** 150.0% ------------------------- --------------------- $** 175.0% ------------------------- --------------------- >=$** 200% ------------------------- --------------------- THIS INFORMATION IS EXTREMELY CONFIDENTIAL AND SHOULD BE [MKS TREATED AS SUCH. YOU SHOULD NOT DIVULGE THIS INFORMATION LOGO] INSIDE OR OUTSIDE OF MKS INSTRUMENTS, INC. - ----------------- (1) TARGET BONUS FOR JOHN BERTUCCI IS 75% OF BASE EARNINGS; FOR LEO BERLINGHIERI IT IS 60% OF BASE EARNINGS; FOR JERRY COLLELLA AND JOHN SMITH IT IS 50% OF BASE EARNINGS; FOR ROBERT KLIMM, RONALD WEIGNER, WILLIAM STEWART IT IS 40% OF BASE EARNINGS. (2) THIS NUMBER IS DOUBLE THE NUMBER SET FORTH IN THE PARAGRAPH ABOVE WITH RESPECT TO EACH OF THE EXECUTIVE OFFICERS.