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                                                                  EXHIBIT 23.1

                       CONSENT OF INDEPENDENT AUDITORS




The Board of Directors
Ibis Technology Corporation:

We consent to incorporation by reference in this Registration Statement on Form
S-3 of Ibis Technology Corporation of our report dated January 19, 1996,
relating to the balance sheets of Ibis Technology Corporation as of December
31, 1995 and 1994, and the related statements of operations, stockholders'
equity (deficit), and cash flows for each of the years in the three-year period
ended December 31, 1995, and related schedule, which report appears in the
annual report on Form 10-K of Ibis Technology Corporation, and to the reference
to our firm under the heading "Experts" in the Registration Statement. 


                                        /s/ KPMG Peat Marwick LLP
                                        ------------------------------
                                            KPMG Peat Marwick LLP


Boston, Massachusetts
May 22, 1996