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                                                                EXHIBIT 23.1



                       CONSENT OF INDEPENDENT AUDITORS


The Board of Directors
Ibis Technology Corporation:

We consent to incorporation by reference in this Registration Statement on 
Form S-3 of Ibis Technology Corporation of our report dated January 19, 1996,
relating to the balance sheets of Ibis Technology Corporation as of 
December 31, 1995 and 1994, and the related statements of operations, 
stockholders' equity (deficit), and cash flows for each of the years in the
three-year period ended December 31, 1995, and related schedule, which report
appears in the annual report of Form 10-K of Ibis Technology Corporation, and
to the reference to our firm under the heading "Experts" in the Registration
Statement.

                                                /s/ KPMG Peat Marwick LLP
                                                


Boston, Massachusetts
July 29, 1996