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IBIS TECHNOLOGY CORPORATION


                                                                   Exhibit 10.33



              DESCRIPTION OF FEES PAID TO TED R. DINTERSMITH, PH.D.
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     In 1996, the Company paid $20,000 to Ted R. Dintersmith, Ph.D. a Director
of the Company, for providing financial expertise in assisting the Company in
preparing the S-1 Registration Statement for its follow-on public offering,
various press releases and consulting on other related financial and operating 
activities.