1 EXHIBIT 23.1 EBNER STOLZ & PARTNER Consent of Independent Auditors We consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 33-95268, 333-07313, 333-07315, 333-22717, 333-66457, 333-66429 and 333-66455) of Brooks Automation, Inc. of our report dated December 13, 1999, with respect to the financial statements prepared in conformity with German GAAP of the Infab Group appearing in Amendment No. 1 to the Current Report on Form 8-K/A of Brooks Automation, Inc. dated December 14, 1999. Stuttgart, December 14, 1999 Dr. Ebner, Dr. Stolz and Partner GmbH Auditors Tax Consultants Dr. Wolfgang Russ Auditor Eberhard Poschke Auditor