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                                                                    EXHIBIT 3.4

                              ARTICLES OF AMENDMENT
                                     OF THE
                            ARTICLES OF INCORPORATION
                                       OF
                               PLASMA-THERM, INC.

                  Plasma-Therm, Inc., a corporation organized and existing under
the laws of the State of Florida (the "Corporation"), in order to amend its
Articles of Incorporation in accordance with the requirements of Chapter 607,
Florida Statutes, does hereby certify as follows:

                  1. The Amendment to the existing Articles of Incorporation, as
amended previously, being effected hereby is the addition of the following new
paragraph to Article IX dealing generally with shareholder meetings:

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                  Any action required or permitted to be taken at any annual or
special meeting of shareholders of this corporation may be taken only upon the
vote of such shareholders at an annual or special meeting duly called, and may
not be taken by written consent of such shareholders without a meeing.

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                  2. This Amendment to the Articles of Incorporation was
approved by a majority vote of the stockholders, on the 30th day of April, 1996,
and such vote of the stockholders was sufficient for approval of this Amendment.

                  3. These Articles of Amendment of the Articles of
Incorporation shall be effective immediately upon filing by the Secretary of the
State of Florida, all required taxes and fees having been paid.

                  IN WITNESS WHEREOF, Plasma-Therm, Inc. has caused these
Articles of Amendment of the Articles of Incorporation to be executed by its
President and Secretary this 3rd day of May, 1996.

ATTEST:                                PLASMA-THERM, INC.

         (CORPORATE SEAL)

/s/ Diana M. DeFerrari                 /s/ Ronald S. Deferrari
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Diana M. DeFerrari, Secretary          Ronald S. Deferrari, President