[LETTERHEAD OF SQUIRE, SANDERS & DEMPSEY L.L.P.]

October 2, 2000

Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C.  20549

Ladies and Gentlemen:

     As legal  counsel  for Amtech  Systems,  Inc.,  a Nevada  corporation  (the
"Company"),  we are rendering this opinion in connection  with the  registration
under the  Securities  Act of 1933, as amended,  of 572,300 shares of the common
stock,  $.01 par value, of Amtech,  129,300 of which may be issued upon exercise
of warrants issued July 1, 1997, and September 8, 2000.

     We have  examined  all  instruments,  documents  and records that we deemed
relevant and necessary for the basis of our opinion  hereinafter  expressed.  In
such  examination,  we have assumed the  genuineness  of all  signatures and the
authenticity of all documents submitted to us as originals and the conformity to
the originals of all documents submitted to us as copies.

     Based on such examination, we are of the opinion that the 572,300 shares of
common stock, 129,300 of which may be issued upon exercise of the warrants,  are
duly  authorized  shares of Amtech's  common  stock,  and,  when issued  against
receipt of the consideration  therefore in accordance with the provisions of the
respective  Warrant to Purchase  Common Stock,  seven of which are dated July 1,
1997,  and  fourteen  of which were  issued  pursuant  to the Stock and  Warrant
Purchase Agreement dated as of September 8, 2000, will be validly issued,  fully
paid and  nonassessable.  We hereby  consent to the filing of this opinion as an
exhibit to the Registration  Statement referred to above and the use of our name
wherever it appears in said Registration Statement.

Respectfully submitted,

/s/ Squire, Sanders & Dempsey L.L.P.

SQUIRE, SANDERS & DEMPSEY L.L.P.