UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q

(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

     For the quarterly period ended: December 31, 2000

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

     For the transition period from __________ to __________

                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                Arizona                                          86-0411215
    (State or other jurisdiction of                           (I.R.S. Employer
     incorporation or organization)                          Identification No.)


 131 South Clark Drive, Tempe, Arizona                              85281
(Address of principal executive offices)                          (Zip Code)

        Registrant's telephone number, including area code: 480-967-5146

Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

      Shares of Common Stock outstanding as of December 31, 2000: 2,621,621

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES

                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----
PART I. FINANCIAL INFORMATION.

     Item 1.  Condensed Consolidated Financial Statements

              Consolidated Balance Sheets -
                December 31, 2000 and September 30, 2000 ...................   3

              Consolidated Statements of Operations -
                Three Months Ended December 31, 2000 and 1999 ..............   4

              Consolidated Statements of Stockholders' Equity -
                Three Months Ended December 31, 2000 and 1999 ..............   5

              Consolidated Statements of Cash Flows -
                Three Months Ended December 31, 2000 and 1999 ..............   6

              Notes to Condensed Consolidated Financial Statements .........   7

     Item 2.  Management's Discussion and Analysis of Financial
                Condition and Results of Operations
              Results of Operations ........................................  11
              Liquidity and Capital Resources ..............................  13
              Recent Accounting Pronouncements .............................  13

     Item 3.  Quantitative and Qualitative Disclosures about Market Risk ...  14
              Forward-Looking Statements ...................................  14

PART II. OTHER INFORMATION.

     Item 1   Legal Proceedings ............................................  15

     Item 4.  Submission of Matters to a Vote of Security Holders ..........  15

     Item 6.  Exhibits and Reports on Form 8-K .............................  15

SIGNATURE ..................................................................  16

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                           CONSOLIDATED BALANCE SHEETS


                                                   December 31,    September 30,
                                                       2000            2000
                                                   ------------    ------------
                                                    (Unaudited)
                                     ASSETS
CURRENT ASSETS:
  Cash and cash equivalents                        $  5,830,215    $  5,784,500
  Accounts receivable - net                           5,794,344       4,929,948
  Inventories                                         5,039,814       4,229,546
  Deferred income taxes                                 617,000         577,000
  Prepaid expenses                                       89,042          79,476
                                                   ------------    ------------
     Total current assets                            17,370,415      15,600,470

PROPERTY, PLANT AND EQUIPMENT - net                   1,298,735       1,093,707

GOODWILL AND OTHER ASSETS - net                         769,701         789,083
                                                   ------------    ------------
     TOTAL ASSETS                                  $ 19,438,851    $ 17,483,260
                                                   ============    ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY

CURRENT LIABILITIES:
  Accounts payable                                 $  2,313,305    $  2,083,792
  Short Term Debt                                       442,552          60,405
  Accrued compensation and related taxes                836,133         635,354
  Accrued warranty expense                              247,179         218,693
  Accrued installation expense                          184,039         266,101
  Deferred revenue and deposits                         703,750         245,663
  Income taxes payable                                  549,000         670,000
  Other accrued liabilities                             390,284         486,779
                                                   ------------    ------------
     Total current liabilities                        5,666,242       4,666,787
                                                   ------------    ------------

LONG-TERM OBLIGATIONS                                   242,925         236,590
                                                   ------------    ------------

COMMITMENTS AND CONTINGENCIES

STOCKHOLDERS' EQUITY:
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued               --              --
  Common stock; $0.01 par value; 100,000,000
    shares authorized; 2,621,621 (2,571,808 in
    2000) shares issued and outstanding                  26,216          25,718
  Additional paid-in capital                         12,410,574      12,133,058
  Accumulated other comprehensive loss -
    Cumulative foreign currency
    translation adjustment                             (392,083)       (502,356)
  Retained earnings                                   1,484,977         923,463
                                                   ------------    ------------
     Total stockholders' equity                      13,529,684      12,579,883
                                                   ------------    ------------
     TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY    $ 19,438,851    $ 17,483,260
                                                   ============    ============

              The accompanying notes are an integral part of these
                        consolidated balance statements.

                                        3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
             CONSOLIDATED STATEMENTS OF OPERATIONS For Three Months
                        Ended December 31, 2000 and 1999


                                                        Three Months Ended
                                                     ----------      ----------
                                                        2000            1999
                                                     ----------      ----------
                                                     (Unaudited)     (Unaudited)

Net product sales                                    $6,881,731      $3,862,512
Cost of product sales                                 4,755,227       2,635,918
                                                     ----------      ----------
      Gross margin                                    2,126,504       1,226,594

Selling, general and administrative                   1,195,030         959,681
Research and development                                106,622          53,246
                                                     ----------      ----------
      Operating profit                                  824,852         213,667

Interest income - net                                    73,662           9,160
                                                     ----------      ----------

Income before income taxes                              898,514         222,827
Income tax provision                                    337,000          92,000
                                                     ----------      ----------

NET INCOME                                           $  561,514      $  130,827
                                                     ==========      ==========

EARNINGS PER SHARE:
  Basic                                              $      .22      $      .06
  Weighted average shares outstanding                 2,604,964       2,108,679

  Diluted                                            $      .20      $      .06
  Weighted average shares outstanding                 2,774,354       2,222,131

              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                        4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
                FOR THREE MONTHS ENDED DECEMBER 31, 2000 AND 1999




                                                Common Stock                          Accumulated       Retained
                                         ---------------------------    Additional       Other          Earnings         Total
                                            Number                       Paid-in      Comprehensive   (Accumulated    Stockholders'
                                          of Shares        Amount        Capital      Income (Loss)     Deficit)         Equity
                                         ------------   ------------   ------------   ------------    ------------    ------------
                                                                                                    
BALANCE AT SEPTEMBER 30, 1999               2,108,679         21,087   $  7,400,152   $   (309,064)   $   (401,958)      6,710,217

   Net income                                      --             --             --             --         130,827         130,827
   Translation adjustment                          --             --             --        (51,454)             --         (51,454)
                                                                                                                      ------------
      Comprehensive Income                         --             --             --             --              --          79,373
                                         ------------   ------------   ------------   ------------    ------------    ------------

BALANCE AT DECEMBER 31, 1999                2,108,679   $     21,087   $  7,400,152   $   (360,518)   $   (271,131)   $  6,789,590
                                         ============   ============   ============   ============    ============    ============

BALANCE AT SEPTEMBER 30, 2000               2,571,808   $     25,718   $ 12,133,058   $   (502,356)   $    923,463    $ 12,579,883

   Net income                                      --             --             --             --         561,514         561,514
   Translation adjustment                          --             --             --        110,273              --         110,273
                                                                                                                      ------------
      Comprehensive income                         --             --             --             --              --         671,787
                                                                                                                      ------------

  Warrants and stock options exercised         49,813            498        277,516             --              --         278,014
                                         ------------   ------------   ------------   ------------    ------------    ------------
BALANCE AT DECEMBER 31, 2000                2,621,621   $     26,216   $ 12,410,574   $   (392,083)   $  1,484,977    $ 13,529,684
                                         ============   ============   ============   ============    ============    ============


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                        5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                FOR THREE MONTHS ENDED DECEMBER 31, 2000 AND 1999


                                                         2000          1999
                                                      -----------   -----------
                                                      (Unaudited)   (Unaudited)
OPERATING ACTIVITIES:
  Net income                                          $   561,514   $   130,827
  Adjustments to reconcile net income to net
    cash used in operating activities:
      Depreciation and amortization                        86,295        73,057
      Provision for writeoff of inventory
        and receivables                                    38,597        28,479
      Loss on disposals of long-lived assets                   --           432
      Deferred income taxes                               (40,000)      (61,000)
    Increase in:
      Accounts receivable                                (738,216)     (582,917)
      Inventories, prepaid expenses and other assets     (729,958)      (27,289)
    Increase (decrease) in:
      Accounts payable                                    506,137       120,613
      Accrued liabilities and deposits                    431,161       240,283
      Income taxes payable                               (121,000)       72,985
                                                      -----------   -----------
    Net Cash Used In Operating Activities                  (5,470)       (4,530)
                                                      -----------   -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment             (236,638)      (20,545)
                                                      -----------   -----------
    Net Cash Used In Investing Activities                (236,638)      (20,545)
                                                      -----------   -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises       278,014            --
  Payments on mortgage loan                                (2,389)       (2,855)
                                                      -----------   -----------
    Net Cash Provided By (Used In)
      Financing Activities                                275,625        (2,855)
                                                      -----------   -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                    12,198        29,035
                                                      -----------   -----------
CASH AND CASH EQUIVALENTS:
  Net increase                                             45,715         1,105
  Beginning of year                                     5,784,500     1,124,685
                                                      -----------   -----------
END OF PERIOD CASH AND CASH EQUIVALENTS               $ 5,830,215   $ 1,125,790
                                                      ===========   ===========

SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
  Interest                                            $    10,090   $     3,530
  Income taxes paid                                       498,150            --

              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                        6

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                      THREE MONTHS ENDED DECEMBER 31, 2000


1.   BASIS OF PRESENTATION

     The accompanying  condensed  consolidated  financial statements include the
     accounts  of  Amtech  Systems,  Inc.  and  its  wholly-owned  subsidiaries,
     Tempress Systems, Inc., based in Heerde, The Netherlands, and P. R. Hoffman
     Machine  Products,  Inc.  (collectively,  the  "Company").  All significant
     intercompany   balances   and   transactions   have  been   eliminated   in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in  accordance  with  generally  accepted  accounting  principles,
     pursuant  to the rules  and  regulations  of the  Securities  and  Exchange
     Commission  (the "SEC"),  and are unaudited.  In the opinion of management,
     all adjustments (which include only normal recurring adjustments) necessary
     to present fairly the financial position,  results of operations,  and cash
     flows for the periods presented have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2000, which are incorporated  herein by
     reference.

     The consolidated  results of operations for the three months ended December
     31, 2000, are not necessarily  indicative of the results to be expected for
     the full year.

2.   REVENUE RECOGNITION

     Revenue is recognized on the accrual basis when the customer takes title to
     the  product,  generally  upon  shipment.  On  occasion,  the Company  will
     recognize revenue prior to shipment.  When this occurs, the Company ensures
     that title has passed,  the customer has  committed to take delivery of the
     goods in a  reasonable  period  of time,  there  is a  legitimate  business
     purpose  requested by the customer to not ship the product,  the product is
     complete and ready for shipment and is segregated  from existing  inventory
     and  there  are no  material  contingencies.  Upon  shipment,  the  Company
     recognizes all revenue and accrues the estimated costs of installation.

                                        7

3.   INVENTORIES

     The components of inventories are as follows:

                                              December 31,      September 30,
                                                 2000               2000
                                               ----------        ----------
     Purchased parts and
       raw materials                           $2,430,502        $1,931,524
     Work-in-process                            2,261,613         1,874,818
     Finished goods                               347,699           423,204
                                               ----------        ----------
     Totals                                    $5,039,814        $4,229,546
                                               ==========        ==========

4.   EARNINGS PER SHARE

                                                   Three Months Ended
                                                      December 31,
                                               ---------------------------
                                                  2000            1999
                                               -----------     -----------
     Net income                                $   561,514     $   130,827

     Pro forma after-tax amortization
     of contingent goodwill (2)                         --          (4,033)
                                               -----------     -----------
     Income used in
       in the calculations                     $   561,514     $   126,794
                                               ===========     ===========
     Weighted average
     Shares outstanding:
       Common shares                             2,604,964       2,108,679
       Common equivalents (1)                      169,390         113,452
                                               -----------     -----------

                                                 2,774,354       2,222,131
                                               ===========     ===========
     Earnings Per Share:
       Basic                                   $       .22     $       .06

       Diluted                                 $       .20     $       .06


                                        8

- ----------
(1)  Number of shares calculated using the treasury stock method and the average
     market price during the period.  Options and warrants on 59,300  shares and
     1,492,500  shares had an exercise  price  greater  than the average  market
     price  during  the  three   months  ended   December  31,  2000  and  1999,
     respectively, and therefore did not enter into the calculation.

(2)  Pro forma  contingent  goodwill  arises from the July 1, 1997,  purchase of
     certain of the assets and  operations  of P. R.  Hoffman  Machine  Products
     Corporation ("P. R. Hoffman"). This number also includes 31,000 shares that
     will be  issued  to the  former  owner  of P.R.  Hoffman  Machine  Products
     Corporation  as payment of the earnout for fiscal  2000.  See footnote 3 to
     the financial  statements included in the Company's report on Form 10-K for
     the year ended September 30, 2000.

5.   RECENT ACCOUNTING PRONOUNCEMENTS

     On October 1, 2000, the Company adopted  Statement of Financial  Accounting
     Standards  No. 133,  "Accounting  for  Derivative  Instruments  and Hedging
     Activities"("SFAS  133").  SFAS 133 requires  the Company to recognize  all
     derivatives  on the balance sheet at fair value.  Derivatives  that are not
     hedges must be adjusted to fair value through income.  If the derivative is
     a hedge, depending on the nature of the hedge, changes in the fair value of
     the  derivative  are either offset  against the change in the fair value of
     assets,  liabilities,  or firm  commitments  through  earnings  (fair value
     hedges) or recognized in other  comprehensive  income until the hedged item
     is recognized in earnings (cash flow hedges).  The ineffective portion of a
     derivative's  change in fair value is  immediately  recognized in earnings.
     The  adoption of SFAS 133 did not have a material  impact on the  Company's
     consolidated financial position or operating results.

     In December 1999, the SEC issued Staff Accounting Bulletin ("SAB") No. 101,
     "Revenue  Recognition,"  which sets forth the SEC Staff's views on selected
     revenue  recognition issues.  Based upon the prevailing  interpretations of
     SAB No. 101, the Company may be required to delay recognition of at least a
     portion of its sales of semiconductor production systems until installation
     has been  completed and customer  acceptance  has  occurred.  The Company's
     current policy is to recognize revenue at the time the customer takes title
     to the product,  generally at the time of shipment, because the Company has
     routinely met its installation obligations and installation costs represent
     an  insignificant  percentage  of total  costs.  The Company  believes  its
     current  accounting  policies on revenue  recognition  are consistent  with
     those  generally  used in its industry and have been  consistently  applied
     since the inception of the Company.  Therefore,  if the Company is required
     to change its revenue recognition  policies in order to comply with SAB No.
     101, a significant  cumulative  charge related to a change in an accounting
     principle  may be required.  The guidance in SAB No. 101 must be adopted no
     later than the fourth  quarter of the  Company's  fiscal year 2001,  ending
     September 30, 2001,  with a restatement of the first three quarters of that
     fiscal year. In October 2000, the SEC issued implementation guidance in the
     form of "Frequently  Asked  Questions." The Company is still in the process
     of  assessing  the impact  that SAB No.  101 will have on its  consolidated
     financial statements based on the SEC's most recently issued guidance.

                                        9

6.   BUSINESS SEGMENT INFORMATION

     The Company  classifies its products into two core business  segments:  (1)
     the semiconductor equipment segment which designs, manufactures and markets
     semiconductor  wafer  processing  equipment  used  in  the  fabrication  of
     integrated circuits, and (2) the polishing supplies segment, which designs,
     manufactures  and markets  carriers,  templates and  equipment  used in the
     lapping and polishing of wafer thin  materials,  including  silicon  wafers
     used  in the  production  of  semiconductors.  Information  concerning  the
     Company's business segments in fiscal years 2001 and 2000 is as follows:

                                                    Three Months Ended
                                                       December 31,
                                                ---------------------------
                                                   2000             1999
                                                ----------       ----------
     Revenues
       Semiconductor equipment                  $4,712,688       $2,165,474
       Polishing supplies                        2,169,043        1,697,038
                                                ----------       ----------
                                                $6,881,731       $3,862,512
                                                ==========       ==========
     Operating profit
       Semiconductor equipment                  $  532,373       $   65,176
       Polishing supplies                          292,479          148,491
                                                ----------       ----------
     Total operating profit                        824,852          213,667
       Interest income - net                        73,662            9,160
                                                ----------       ----------
     Income before income taxes                 $  898,514       $  222,827
                                                ==========       ==========

7.   LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     11  companies  named in a legal  action  being  brought by North  Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal  action,  which  appears to have been filed to preserve  the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date.  The Company  acquired the assets of P.R.  Hoffman  Machine  Products
     Corporation  in an  asset  transaction  consummated  on July 1,  1997.  The
     landfill was closed and has not been used by P.R.  Hoffman  since  sometime
     prior to completion of the Company's  acquisition.  Therefore,  the Company
     believes that the named company is the prior owner of the acquired  assets.
     Under the terms of the Asset Purchase Agreement  governing the acquisition,
     the prior owner, P.R. Hoffman Machine Products Corporation, is obligated to
     indemnify us for any breaches of its  representations and warranties in the
     Asset   Purchase   Agreement,   including   representations   relating   to
     environmental  matters. Based on information available to the Company as of
     the date of this report,  management believes the costs, if any, to resolve
     this matter will not be material to the Company's  results of operations or
     financial position.

                                       10

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

RESULTS OF OPERATIONS

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                                       Three Months Ended
                                                          December 31,
                                                       ------------------
                                                        2000        1999
                                                       ------      ------
     Net revenue                                        100.0%      100.0%
     Cost of product sales                              (69.1)      (68.2)
                                                       ------      ------
          Gross profit                                   30.9        31.8

     Selling, general and
       administrative expenses                          (17.4)      (24.9)

     Research and development                            (1.5)       (1.4)
                                                       ------      ------
     Operating profit (loss)                             12.0%        5.5%
                                                       ======      ======

     NET REVENUE.  The Company's net revenue for the three months ended December
31, 2000 was  $6,882,000,  an increase of  $3,019,000,  or 78%,  compared to net
revenue of $3,863,000 for the first quarter of the previous  fiscal year.  Sales
in the semiconductor  equipment segment and polishing supplies segment increased
by 118% and 28%, respectively,  primarily due to shipments of systems to optical
component manufacturers,  a new market for the Company's products, and increased
sales to the semiconductor industry,  which the Company serves. The Company made
its first system shipment to an optical component manufacturer in June 2000.

     GROSS  MARGIN.  The  Company's  gross  margin  increased  by  approximately
$900,000,  or 73%, to $2,127,000  for the three months ended  December 31, 2000,
from  $1,227,000  during the comparable  period of the previous fiscal year. The
majority of that increase  resulted  from the 78% increase in revenue  discussed
above.  Gross  margin as a percentage  of sales  declined to 31% from 32% in the
prior fiscal year. In the polishing  supplies  segment,  gross margin was 29% of
revenues in both years. The gross margin of the semiconductor  equipment segment
was 32%,  two  percentage  points less than in the  comparable  period of fiscal
2000,  primarily  due to the  product  mix that had  relatively  higher  cost of
materials,  which were only partially offset by increased labor efficiencies and
the spreading of overhead cost over the higher sales volume.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses  for the first  quarter  of fiscal  2001  increased  by
$235,000, or 24%, to $1,195,000, compared to $960,000 spent in the first quarter
of fiscal 2000. The increase in these expenses was incurred  almost  exclusively
by the semiconductor  equipment  segment,  which was the fastest growing part of
the  Company's  business.  Higher  selling  and  marketing  expenses,  including
tradeshows,  increased  overhead costs  associated with the expanded  operations
coupled with a slightly higher currency loss  contributed to the growth in these
expenses.  These  expenses  were 17% of revenue  in the first  quarter of fiscal
2001,  eight  percentage  points  lower than in the same period of fiscal  2000,
primarily due to increased revenues.

                                       11

     RESEARCH AND  DEVELOPMENT.  Research  and  development  costs  increased by
$54,000,  to $107,000,  during the first  quarter of fiscal 2001, as compared to
$53,000 spent in the first quarter of fiscal 2000,  due to increased  efforts in
this area.

     OPERATING PROFIT. Operating profit for the first quarter of fiscal 2001 was
$825,000,  an increase of $611,000,  or 286%, compared to an operating profit of
$214,000 in the same period of fiscal 2000. The increase in operating  profit is
primarily  attributable to the 78% increase in consolidated  revenue.  Operating
profit for the  polishing  supplies  segment  increased by $144,000 to $292,000,
compared to $148,000 in the first quarter of fiscal 2000, as a result of the 28%
increase in sales volume.  In the  semiconductor  equipment  segment,  operating
profit  increased  by  $467,000  to  $532,000,  compared to $65,000 in the first
quarter of fiscal 2000.  The increase in the first quarter  operating  profit of
the  semiconductor  equipment  segment is due to the 118% increase in sales.  By
controlling  expenses,  operating  profits  grew to 12% of  revenue in the first
quarter of fiscal  2001,  compared to 3% of revenue in the first  quarter of the
prior fiscal year.

     NET INTEREST INCOME.  During the first quarter of fiscal 2001, net interest
income  increased  $65,000 to $74,000,  compared to $9,000 in the  corresponding
quarter of fiscal  2000,  due to  interest  earned on the  portion of the equity
capital  raised  in the  fourth  quarter  of  fiscal  2000 that has not yet been
deployed.  As a result of the foregoing factors,  income before income taxes for
the first quarter of fiscal 2001 was $899,000,  an increase of 303%, compared to
$223,000 in the first quarter of fiscal 2000.

     PROVISION FOR INCOME TAXES. Income tax expense of $337,000,  recorded at an
effective  tax rate of 38%,  resulted  in net  income  for the first  quarter of
fiscal 2001 of $562,000.  During the first  quarter of fiscal 2000,  the Company
recorded  income tax expense of $92,000,  reflecting a 41%  effective  tax rate,
resulting in net income of $131,000.  The decrease in the  effective tax rate in
fiscal 2001 is primarily due to an increase in the  proportion of taxable income
arising in jurisdictions with lower tax rates.

     NET INCOME.  The  resulting net income for the first three months of fiscal
2001 was $562,000,  or $.20 per diluted share, an increase of $431,000, or 329%,
compared to the net income of $131,000,  or $.06 per share, in the first quarter
of the previous fiscal year.

     BACKLOG.  At  December  31,  2000,  the order  backlog was  $11,978,000,  a
decrease of $2,521,000,  or 17%, from the  $14,499,000  backlog at September 30,
2000. While new orders nearly equaled  shipments for the first quarter of fiscal
2001,  cancellations  of four system  orders  accounted for the reduction in the
backlog. One of those cancellations was reported in the Company's report on Form
10-K,  filed in December  2000.  The other three system  cancellations  occurred
recently,  as a result of a customer's  tentative  agreement to higher prices on
eight  systems in return for being  allowed to cancel three  orders.  While this
agreement  has not been  finalized,  those  orders  have been  removed  from the
backlog.  The effect of the expected price increase has not been recorded in the
accompanying  financial  statements.  The backlog as of December 31,  2000,  was
approximately $7,828,000 higher than at December 31, 1999, an increase of 189%.

     Due  to  the  possibility  of  customer  changes  in  delivery   schedules,
cancellation  of  orders,  potential  delays  in  product  shipments,  delays in
obtaining inventory parts from suppliers, failure to satisfy customer acceptance
requirements and changes in product mix, our backlog as of any point in time may
not be  representative of actual sales and profitability in any future period. A
reduction in backlog during any particular  period could have a material adverse
affect on our business prospects, financial condition and results of operations.

                                       12

LIQUIDITY AND CAPITAL RESOURCES

     At December  31,  2000,  the Company had  $5,830,000  of readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents  of $5,785,000  at September 30, 2000, an increase of  approximately
$45,000.  The  Company's  current  cash  position  is  primarily a result of the
$4,616,000 of net cash proceeds from a private placement of the Company's Common
Stock in September  2000.  An  additional  $2 million line of credit  secured in
October 2000 further  enhances the  Company's  liquidity  position.  The Company
continues to believe that there is sufficient  liquidity for existing operations
and its expansion plans.

     At December 31, 2000,  working  capital was  $11,704,000,  up $770,000 from
$10,934,000  at  September  30,  2000,  primarily  due to the $562,000 in income
earned in the quarter then ended.  While the Company's current ratio declined to
3.1:1 at the end of the first quarter of fiscal 2001 from 3.3:1 at the beginning
of the 2001 fiscal year, the Company  believes that its current ratio  continues
to indicate a strong  financial  condition.  At the end of the first  quarter of
fiscal  2001,  cash and cash  equivalents  comprised  30% of  total  assets  and
stockholders'  equity  accounted  for 70% of total  capitalization.  The Company
believes  that it  continues  to possess the  financial  strength  necessary  to
achieve continued growth.

RECENT ACCOUNTING PRONOUNCEMENTS

     On October 1, 2000, the Company adopted  Statement of Financial  Accounting
Standards  No.  133,   "Accounting   for  Derivative   Instruments  and  Hedging
Activities"("SFAS  133").  SFAS  133  requires  the  Company  to  recognize  all
derivatives on the balance sheet at fair value.  Derivatives that are not hedges
must be adjusted to fair value  through  income.  If the  derivative is a hedge,
depending  on the  nature  of  the  hedge,  changes  in the  fair  value  of the
derivative  are either  offset  against  the change in the fair value of assets,
liabilities,  or firm  commitments  through  earnings  (fair  value  hedges)  or
recognized in other comprehensive  income until the hedged item is recognized in
earnings (cash flow hedges). The ineffective portion of a derivative's change in
fair value is immediately  recognized in earnings.  The adoption of SFAS 133 did
not have a material impact on the Company's  consolidated  financial position or
operating results.

     In December 1999, the SEC issued Staff Accounting Bulletin ("SAB") No. 101,
"Revenue  Recognition,"  which  sets  forth the SEC  Staff's  views on  selected
revenue recognition issues. Based upon the prevailing interpretations of SAB No.
101, the Company may be required to delay  recognition  of at least a portion of
its  sales of  semiconductor  production  systems  until  installation  has been
completed and customer acceptance has occurred.  The Company's current policy is
to  recognize  revenue  at the time the  customer  takes  title to the  product,
generally at the time of  shipment,  because the Company has  routinely  met its
installation  obligations  and  installation  costs  represent an  insignificant
percentage of total costs. The Company believes its current accounting  policies
on revenue  recognition are consistent with those generally used in its industry
and  have  been  consistently  applied  since  the  inception  of  the  Company.
Therefore, if the Company is required to change its revenue recognition policies
in order to comply with SAB No. 101, a significant  cumulative charge related to
a change in an accounting principle may be required. The guidance in SAB No. 101
must be adopted no later than the fourth  quarter of the  Company's  fiscal year
2001,  ending September 30, 2001, with a restatement of the first three quarters
of that fiscal year. In October 2000, the SEC issued implementation  guidance in
the form of "Frequently Asked Questions." The Company is still in the process of
assessing  the impact that SAB No. 101 will have on its  consolidated  financial
statements  based  on  the  SEC's  most  recently  issued   guidance.

                                       13

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended  September  30,  2000.  There are no  material  changes in
reported market risk from September 30, 2000.

FORWARD-LOOKING STATEMENTS

     The  statements  contained  in  this  report  on  Form  10-Q  that  are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no
material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k) the  semiconductor  equipment  industry  will not enter a period of slowdown
during  fiscal 2001,  (l) the  condition in the Asian  markets will  continue to
improve,  (m) the Company will be able to continue to control costs,  (n) demand
for the Company's products will not be adversely and significantly influenced by
trends  within  the  semiconductor   industries,   including   consolidation  of
semiconductor  manufacturing  operations  through mergers and the subcontracting
out of the  production of  semiconductors  to foundries,  and (o) the effects of
adopting  SAB No. 101 will  largely be offset by  increased  sales.  Assumptions
related to the foregoing  involve judgments with respect to, among other things,
future economic,  competitive and market conditions, all of which are beyond the
control of the  Company.  Although  the Company  believes  that the  assumptions
underlying the forward-looking statements are reasonable, any of the assumptions
could  prove  inaccurate  and,  therefore,  there can be no  assurance  that the
results  contemplated  in  forward-looking   statements  will  be  realized.  In
addition,  the business and operations of the Company are subject to substantial
risks,  which  increase  the  uncertainty   inherent  in  such   forward-looking
statements.   In  light  of  the  significant   uncertainties  inherent  in  the
forward-looking  information  included herein,  such  information  should not be
regarded as a  representation  by the  Company,  or any other  person,  that the
objectives or plans for the Company will be achieved.

                                       14

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies named in a legal action being brought by North  Middleton  Township
in  Carlisle,  Pennsylvania,  the  owner  of a  landfill  allegedly  found to be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired the assets of P.R.  Hoffman  Machine  Products  Corporation in an asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,   is   obligated   to   indemnify   us  for  any  breaches  of  its
representations  and  warranties  in the  Asset  Purchase  Agreement,  including
representations   relating  to  environmental   matters.  Based  on  information
available to the Company as of the date of this report,  management believes the
costs,  if any, to resolve  this  matter  will not be material to the  Company's
results of operations or financial position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

     None.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

     (a)  Exhibits

          None.

     (b)  Reports on Form 8-K

          None.

                                       15

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.


AMTECH SYSTEMS, INC.


By /s/ Robert T. Hass                                   Dated: February 14, 2001
   ------------------------------------------                  -----------------
   Robert T. Hass, Vice-President-Finance and
   (Chief Financial and Accounting Officer)

                                       16