UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q


(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

     For the quarterly period ended: March 31, 2001

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

     For the transition period from ________________ to ________________


                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                Arizona                                          86-0411215
    (State or other jurisdiction of                           (I.R.S. Employer
     incorporation or organization)                          Identification No.)


  131 South Clark Drive, Tempe, Arizona                             85281
(Address of principal executive offices)                          (Zip Code)


                                  480-967-5146
              (Registrant's telephone number, including area code)


Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

       Shares of Common Stock outstanding as of March 31, 2001: 2,632,471

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES

                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----
PART I.  FINANCIAL INFORMATION.

  Item 1. Condensed Consolidated Financial Statements

          Consolidated Balance Sheets -
           March 31, 2001 and September 30, 2000........................       3

          Consolidated Statements of Operations -
           Three and Six Months Ended March 31, 2001 and 2000...........       4

          Consolidated Statements of Stockholders' Equity-
           Three and Six Months Ended March 31, 2001 and 2000...........       5

          Consolidated Statements of Cash Flows -
           Three and Six Months Ended March 31, 2001 and 2000...........       6

          Notes to Condensed Consolidated Financial Statements..........       7

  Item 2. Management's Discussion and Analysis of Financial
          Condition and Results of Operations
            Results of Operations.......................................      11
            Liquidity and Capital Resources.............................      14
            Recent Accounting Pronouncements............................      14

  Item 3. Quantitative and Qualitative Disclosures about Market Risk....      15
          Forward-Looking Statements....................................      15

PART II. OTHER INFORMATION.

  Item 1. Legal Proceedings ............................................      17

  Item 4. Submission of Matters to a Vote of Security Holders...........      17

  Item 6. Exhibits and Reports on Form 8-K..............................      17

SIGNATURE...............................................................      18

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                           CONSOLIDATED BALANCE SHEETS



                                                                          MARCH 31,           SEPTEMBER 30,
                                                                            2001                  2000
                                                                        ------------          ------------
                                                                         (Unaudited)
                                                                                        
                                     ASSETS
CURRENT ASSETS:
 Cash and cash equivalents                                              $  6,280,412          $  5,784,500
 Accounts receivable - net                                                 5,217,348             4,929,948
 Inventories                                                               5,110,310             4,229,546
 Deferred income taxes                                                       704,000               577,000
 Prepaid expenses                                                             68,332                79,476
                                                                        ------------          ------------
        Total current assets                                              17,380,402            15,600,470

PROPERTY, PLANT AND EQUIPMENT - net                                        1,311,594             1,093,707

GOODWILL AND OTHER ASSETS -  net                                             765,319               789,083
                                                                        ------------          ------------

        TOTAL ASSETS                                                    $ 19,457,315          $ 17,483,260
                                                                        ============          ============
                      LIABILITIES AND STOCKHOLDERS' EQUITY

CURRENT LIABILITIES:
  Accounts payable                                                      $  1,522,676          $  2,144,197
  Accrued compensation and related taxes                                     873,652               635,354
  Accrued warranty expense                                                   270,914               218,693
  Accrued installation expense                                               225,196               266,101
  Customer Deposits                                                        1,308,104               245,663
  Income taxes payable                                                       416,000               670,000
  Other accrued liabilities                                                  396,801               486,779
                                                                        ------------          ------------
          Total current liabilities                                        5,013,343             4,666,787
                                                                        ------------          ------------

LONG-TERM OBLIGATIONS                                                        232,950               236,590
                                                                        ------------          ------------
COMMITMENTS AND CONTINGENCIES

STOCKHOLDERS' EQUITY :
  Preferred stock; no specified terms;
   100,000,000 shares authorized; none issued                                     --                    --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
   2,632,471 (2,571,808 in 2000) shares issued and outstanding                26,325                25,718
  Additional paid-in capital                                              12,462,049            12,133,058
  Accumulated other comprehensive loss -
  Cumulative foreign currency translation adjustment                        (510,701)             (502,356)
  Retained earnings                                                        2,233,349               923,463
                                                                        ------------          ------------
        Total stockholders' equity                                        14,211,022            12,579,883
                                                                        ------------          ------------
        TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY                      $ 19,457,315          $ 17,483,260
                                                                        ============          ============

                 The accompanying notes are an integral part of
                       these consolidate balance sheets.

                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONSOLIDATED STATEMENTS OF OPERATIONS
             For Three and Six Months Ended March 31, 2001 and 2000



                                            THREE MONTHS ENDED MARCH 31,        SIX MONTHS ENDED MARCH 31,
                                           -----------------------------       ----------------------------
                                               2001              2000              2001             2000
                                           -----------       -----------       -----------      -----------
                                           (Unaudited)       (Unaudited)       (Unaudited)      (Unaudited)
                                                                                    
Net product sales                          $ 7,025,583       $ 4,549,100       $13,907,314      $ 8,411,612
Cost of product sales                        4,486,317         2,868,232         9,241,544        5,504,150
                                           -----------       -----------       -----------      -----------
        Gross margin                         2,539,266         1,680,868         4,665,770        2,907,462

Selling, general and administrative          1,297,996         1,080,420         2,493,026        2,040,101
Research and development                       140,004           196,336           246,626          249,582
                                           -----------       -----------       -----------      -----------
        Operating profit                     1,101,266           404,112         1,926,118          617,779

Interest income - net                           78,106            12,058           151,768           21,218
                                           -----------       -----------       -----------      -----------

Income before income taxes                   1,179,372           416,170         2,077,886          638,997
Income tax provision                           431,000           149,000           768,000          241,000
                                           -----------       -----------       -----------      -----------

NET INCOME                                 $   748,372       $   267,170       $ 1,309,886      $   397,997
                                           ===========       ===========       ===========      ===========
EARNINGS PER SHARE:
  Basic                                    $       .28       $       .13       $       .50      $       .19
  Weighted average shares outstanding        2,657,886         2,109,154         2,631,302        2,108,915

  Diluted                                  $       .27       $       .12       $       .47      $       .18
  Weighted average shares outstanding        2,792,835         2,274,526         2,767,070        2,257,517


                 The accompanying notes are an integral part of
                    these consolidated financial statements.

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
             FOR THREE AND SIX MONTHS ENDED MARCH 31, 2001 AND 2000
                                   (Unaudited)



                                     COMMON STOCK                       ACCUMULATED      RETAINED
                                 --------------------     ADDITIONAL      OTHER          EARNINGS        TOTAL
                                  NUMBER                   PAID-IN     COMPREHENSIVE   (ACCUMULATED   STOCKHOLDERS'
                                 OF SHARES    AMOUNT       CAPITAL     INCOME (LOSS)     DEFICIT)       EQUITY
                                 ---------    ------       -------     -------------     --------       ------
                                                                                      
BALANCE AT SEPTEMBER 30, 1999    2,108,679    $21,087   $  7,400,152     $(309,064)     $ (401,958)   $ 6,710,217
 Net income                             --         --             --            --         397,997        397,997
 Translation adjustment                 --         --             --       (98,816)             --        (98,816)
                                                                                                      -----------
 Comprehensive income                   --         --             --            --              --        299,181
                                                                                                      -----------
 Warrants and stock options
  exercised                          2,050         20          2,420            --              --          2,440
                                 ---------    -------   ------------     ---------      ----------    -----------
BALANCE AT MARCH 31, 2000        2,110,729    $21,107   $  7,402,572     $(407,880)     $   (3,961)   $ 7,011,838
                                 =========    =======   ============     =========      ==========    ===========

BALANCE AT SEPTEMBER 30, 2000    2,571,808    $25,718   $ 12,133,058     $(502,356)     $  923,463    $12,579,883
 Net income                             --         --             --            --       1,309,886      1,309,886
 Translation adjustment                 --         --             --        (8,345)             --         (8,345)
                                                                                                      -----------
 Comprehensive income                                                                                   1,301,541
                                                                                                      -----------
 Warrants and stock options
  exercised                         60,663        607        328,991            --              --        329,598
                                 ---------    -------   ------------     ---------      ----------    -----------
BALANCE AT MARCH 31, 2001        2,632,471    $26,325   $ 12,462,049     $(510,701)     $2,233,349    $14,211,022
                                 =========    =======   ============     =========      ==========    ===========

BALANCE AT DECEMBER 31, 1999     2,108,679    $21,087   $  7,400,152     $(360,518)     $ (271,131)   $ 6,789,590
 Net income                             --         --             --            --         267,170        267,170
 Translation adjustment                 --         --             --       (47,362)             --        (47,362)
                                                                                                      -----------
 Comprehensive income                   --         --             --            --              --        219,808
                                                                                                      -----------
 Warrants and stock options
  exercised                          2,050         20          2,420            --              --          2,440
                                 ---------    -------   ------------     ---------      ----------    -----------
BALANCE AT MARCH 31, 2000        2,110,729    $21,107   $  7,402,572     $(407,880)     $   (3,961)   $ 7,011,838
                                 =========    =======   ============     =========      ==========    ===========

BALANCE AT DECEMBER 31, 2000     2,621,621    $26,216   $ 12,410,574     $(392,083)     $1,484,977    $13,529,684
 Net income                             --         --             --            --         748,372        748,372
 Translation adjustment                 --         --             --      (118,618)             --       (118,618)
                                                                                                      -----------
 Comprehensive income                                                                                     629,754
                                                                                                      -----------
 Warrants and stock options
  exercised                         10,850        109         51,475            --              --         51,584
                                 ---------    -------   ------------     ---------      ----------    -----------
BALANCE AT MARCH 31, 2001        2,632,471    $26,325   $ 12,462,049     $(510,701)     $2,233,349    $14,211,022
                                 =========    =======   ============     =========      ==========    ===========


                 The accompanying notes are an integral part of
                    these consolidated financial statements.

                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                  FOR SIX MONTHS ENDED MARCH 31, 2001 AND 2000



                                                                        2001                 2000
                                                                     -----------          -----------
                                                                     (Unaudited)          (Unaudited)
                                                                                    
OPERATING ACTIVITIES:
  Net income                                                         $ 1,309,886          $   397,997
  Adjustments to reconcile net income to net
   cash provided by operating activities:
    Depreciation and amortization                                        186,973              148,427
    Provision for writeoff of inventory and receivables                  203,236               46,876
    Loss on disposals of long-lived assets                                    --                  432
    Deferred income taxes                                               (127,000)             (61,000)
  Increase in:
    Accounts receivable                                                 (299,742)            (249,067)
    Inventories, prepaid expenses and other assets                    (1,060,434)            (412,669)
  Increase (decrease) in:
    Accounts payable                                                    (632,687)             382,859
    Accrued liabilities and deposits                                   1,229,003              501,359
    Income taxes payable                                                (254,000)              21,366
                                                                     -----------          -----------
          Net Cash Provided By Operating Activities                      555,235              776,580
                                                                     -----------          -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                            (363,068)             (67,778)
                                                                     -----------          -----------
          Net Cash Used In Investing Activities                         (363,068)             (67,778)
                                                                     -----------          -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises                      329,598                2,440
  Payments on mortgage loan                                               (4,929)              (5,569)
                                                                     -----------          -----------
          Net Cash Provided By (Used In) Financing Activities            324,669               (3,129)
                                                                     -----------          -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                                  (20,924)              38,673
                                                                     -----------          -----------
CASH AND CASH EQUIVALENTS:
  Net increase                                                           495,912              744,346
  Beginning of year                                                    5,784,500            1,124,685
                                                                     -----------          -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                              $ 6,280,412          $ 1,869,031
                                                                     ===========          ===========
SUPPLEMENTAL CASH FLOW INFORMATION:
  Cash paid during the period for:
    Interest                                                         $    14,908          $     6,148
    Income taxes paid                                                  1,149,000              280,000


                 The accompanying notes are an integral part of
                    these consolidated financial statements.

                                       6

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                    THREE AND SIX MONTHS ENDED MARCH 31, 2001


1. BASIS OF PRESENTATION

   The accompanying  condensed  consolidated  financial  statements  include the
   accounts of Amtech Systems, Inc. and its wholly-owned subsidiaries,  Tempress
   Systems,  Inc., based in Heerde,  The Netherlands,  and P. R. Hoffman Machine
   Products, Inc. (collectively,  the "Company").  All significant  intercompany
   balances and transactions have been eliminated in consolidation.

   The  accompanying  condensed  consolidated  financial  statements  have  been
   prepared in accordance with accounting  principles  generally accepted in the
   United  States,  pursuant to the rules and  regulations of the Securities and
   Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the  opinion  of
   management, all adjustments (which include only normal recurring adjustments)
   necessary to present  fairly the financial  position,  results of operations,
   and cash flows for the periods presented have been made.

   Certain information and footnote  disclosures  normally included in financial
   statements  have  been  condensed  or  omitted  pursuant  to  the  rules  and
   regulations of the SEC. These  condensed  consolidated  financial  statements
   should be read in conjunction with the consolidated  financial statements and
   notes thereto  included in the  Company's  Annual Report on Form 10-K for the
   fiscal year ended September 30, 2000.

   The  consolidated  results of  operations  for the six months ended March 31,
   2001,  are not  necessarily  indicative of the results to be expected for the
   full year.

2. REVENUE RECOGNITION

   Revenue is recognized  on the accrual basis when the customer  takes title to
   the product, generally upon shipment. On occasion, the Company will recognize
   revenue prior to shipment.  When this occurs,  the Company ensures that title
   has passed,  the  customer has  committed to take  delivery of the goods in a
   reasonable  period of time, there is a legitimate  business purpose requested
   by the  customer to not ship the  product,  the product is complete and ready
   for shipment  and is  segregated  from  existing  inventory  and there are no
   material contingencies. Upon shipment, the Company recognizes all revenue and
   accrues the estimated costs of installation.

                                       7

3. INVENTORIES

   The components of inventories are as follows:

                                          March 31,         September 30,
                                            2001                2000
                                         ----------          ----------
         Purchased parts and
           raw materials                 $2,395,255          $1,931,524
         Work-in-process                  2,338,935           1,874,818
         Finished goods                     376,120             423,204
                                         ----------          ----------
         Totals                          $5,110,310          $4,229,546
                                         ==========          ==========

4. EARNINGS PER SHARE



                                                     Three Months Ended           Six Months Ended
                                                          March 31,                  March 31,
                                                  -------------------------     -------------------------
                                                     2001           2000           2001           2000
                                                  ----------     ----------     ----------     ----------
                                                                                   
         Net income                               $  748,372     $  267,170     $1,309,886     $  397,997

         Weighted average Shares outstanding:
          Common shares                            2,657,886      2,109,154      2,631,302      2,108,915

          Common  equivalents (1)                    134,949        165,372        135,768        148,602
                                                  ----------     ----------     ----------     ----------

                                                   2,792,835      2,274,526      2,767,070      2,257,517
                                                  ==========     ==========     ==========     ==========
         Earnings Per Share:
           Basic                                  $      .28     $      .13     $      .50     $      .19

           Diluted                                $      .27     $      .12     $      .47     $      .18


- ----------
(1)  Number of shares calculated using the treasury stock method and the average
     market price during the period.  Options and warrants on 59,300  shares and
     84,000 shares had an exercise  price greater than the average  market price
     in fiscal 2001 and fiscal 2000,  respectively,  and therefore did not enter
     into the calculation.

                                       8

5. RECENT ACCOUNTING PRONOUNCEMENTS

   On October 1, 2000,  the Company  adopted  Statement of Financial  Accounting
   Standards  No.  133,  "Accounting  for  Derivative  Instruments  and  Hedging
   Activities"("SFAS  133").  SFAS 133  requires  the Company to  recognize  all
   derivatives  on the  balance  sheet at fair  value.  Derivatives  that do not
   qualify as hedges  must be  adjusted  to fair value  through  income.  If the
   derivative  qualifies  for hedge  treatment,  depending  on the nature of the
   hedge,  changes in the fair value of the derivative are either offset against
   the  change in the fair  value of assets,  liabilities,  or through  earnings
   (fair value  hedges) or recognized  in other  comprehensive  income until the
   hedged item is recognized in earnings  (cash flow  hedges).  The  ineffective
   portion of a derivative's  change in fair value is immediately  recognized in
   earnings.  The  adoption  of SFAS 133 did not have a  material  impact on the
   Company's consolidated financial position or operating results.

   In December 1999, the SEC issued Staff  Accounting  Bulletin ("SAB") No. 101,
   "Revenue  Recognition,"  which sets forth the SEC  Staff's  views on selected
   revenue recognition issues. Based upon the prevailing  interpretations of SAB
   No. 101,  the Company  may be  required  to delay  recognition  of at least a
   portion of its sales of semiconductor  production  systems until installation
   has been  completed  and customer  acceptance  has  occurred.  The  Company's
   current  policy is to recognize  revenue at the time the customer takes title
   to the product,  generally  at the time of shipment,  because the Company has
   routinely met its installation  obligations and installation  costs represent
   an insignificant  percentage of total costs. The Company believes its current
   accounting   policies  on  revenue  recognition  are  consistent  with  those
   generally used in its industry and have been  consistently  applied since the
   inception of the Company. Therefore, if the Company is required to change its
   revenue  recognition  policies  in  order  to  comply  with  SAB No.  101,  a
   significant  cumulative charge related to a change in an accounting principle
   may be  required.  The  guidance in SAB No. 101 must be adopted no later than
   the fourth quarter of the Company's  fiscal year 2001,  ending  September 30,
   2001,  with a restatement of the first three quarters of that fiscal year. In
   October  2000,  the  SEC  issued  implementation  guidance  in  the  form  of
   "Frequently  Asked Questions." The Company is in the process of assessing the
   impact that SAB No. 101 will have on its  consolidated  financial  statements
   based on the SEC's most recently issued guidance.

6. BUSINESS SEGMENT INFORMATION

   The Company classifies its products into two core business segments:  (1) the
   semiconductor  equipment  segment  which  designs,  manufactures  and markets
   semiconductor   wafer  processing   equipment  used  in  the  fabrication  of
   integrated circuits,  and (2) the polishing supplies segment,  which designs,
   manufactures  and  markets  carriers,  templates  and  equipment  used in the
   lapping and polishing of wafer thin materials,  including silicon wafers used
   in the  production of  semiconductors.  Information  concerning the Company's
   business segments in fiscal years 2001 and 2000 is as follows:

                                       9



                                                Three Months Ended              Six Months Ended
                                                    March 31,                       March 31,
                                          ---------------------------      ---------------------------
                                             2001            2000             2001            2000
                                          -----------     -----------      -----------     -----------
                                                                               
         Revenues
           Semiconductor equipment        $ 4,698,579     $ 2,540,822      $ 9,411,267     $ 4,706,296
           Polishing supplies               2,327,004       2,008,278        4,496,047       3,705,316
                                          -----------     -----------      -----------     -----------
                                          $ 7,025,583     $ 4,549,100      $13,907,314     $ 8,411,612
                                          ===========     ===========      ===========     ===========
         Operating profit
           Semiconductor equipment        $   766,538     $   119,753      $ 1,298,911     $   184,929
           Polishing supplies                 334,728         284,359          627,207         432,850
                                          -----------     -----------      -----------     -----------
         Total operating profit             1,101,266         404,112        1,926,118         617,779
           Interest income - net               78,106          12,058          151,768          21,218
                                          -----------     -----------      -----------     -----------
         Income before income taxes       $ 1,179,372     $   416,170      $ 2,077,886     $   638,997
                                          ===========     ===========      ===========     ===========
a

7. LEGAL PROCEEDINGS.

   On or about August 31, 2000, a "P.R.  Hoffman Machine Products" was one of 11
   companies named in a legal action being brought by North  Middleton  Township
   in  Carlisle,  Pennsylvania,  the owner of a landfill  allegedly  found to be
   contaminated.  No detailed  allegations have been filed as part of this legal
   action, which appears to have been filed to preserve the right to file claims
   for contribution to the clean-up of the landfill at a later date. The Company
   acquired the assets of P.R. Hoffman Machine Products  Corporation in an asset
   transaction  consummated on July 1, 1997. The landfill was closed and has not
   been used by P.R. Hoffman since sometime prior to completion of the Company's
   acquisition.  Therefore,  the Company  believes that the named company is the
   prior owner of the  acquired  assets.  Under the terms of the Asset  Purchase
   Agreement  governing the acquisition,  the prior owner,  P.R. Hoffman Machine
   Products Corporation,  is obligated to indemnify the Company for any breaches
   of P.R.  Hoffman's  representations  and  warranties  in the  Asset  Purchase
   Agreement,  including  representations  relating to environmental matters. In
   accordance  with the terms of the Asset Purchase  Agreement,  the Company has
   provided  notice  to  the  prior  owner  of  P.R.  Hoffman  Machine  Products
   Corporation of the Company's intent to seek  indemnification  from such owner
   for any  liabilities  resulting from this legal action.  Based on information
   available to the Company as of the date of this report,  management  believes
   the costs,  if any,  to  resolve  this  matter  will not be  material  to the
   Company's results of operations or financial position.

                                       10

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND
        RESULTS OF OPERATIONS

RESULTS OF OPERATIONS

                                 Three Months Ended         Six Months Ended
                                      March 31,                 March 31,
                                --------------------      --------------------
                                 2001          2000        2001          2000
                                ------        ------      ------        ------
Net revenue                      100.0%        100.0%      100.0%        100.0%
Cost of product sales            (63.9)        (63.1)      (66.5)        (65.4)
                                ------        ------      ------        ------
     Gross margin                 36.1          36.9        33.5          34.6

Selling, general and
 administrative expenses         (18.4)        (23.7)      (17.9)        (24.3)

Research and development          (2.0)         (4.3)       (1.8)         (3.0)
                                ------        ------      ------        ------
     Operating profit             15.7%          8.9%       13.8%          7.3%
                                ======        ======      ======        ======

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

     NET REVENUE. The Company's net revenue for the three months ended March 31,
2001 was $7,026,000,  an increase of $2,477,000, or 54%, compared to net revenue
of $4,549,000 for the second quarter of fiscal 2000. Sales in the  semiconductor
equipment  segment and  polishing  supplies  segment  increased  by 85% and 16%,
respectively,  primarily  due to  shipments  of  systems  to  optical  component
manufacturers,  a new market for the Company's products,  and increased sales to
the semiconductor industry, which the Company serves. The Company's first system
shipment to an optical component manufacturer occurred in June 2000.

     Net revenue for the six months  ended  March 31, 2001 was  $13,907,000,  an
increase of  $5,495,000,  or 65%,  compared to net revenue of $8,412,000 for the
same period of fiscal 2000.  Sales in the  semiconductor  equipment  segment and
polishing supplies segment increased by 100% and 21%, respectively. Shipments of
furnace systems to optical component manufacturers,  as discussed above, account
for  approximately  70% of the increase,  with the remaining 30%  represented by
increased  sales  of  the  Company's  IBAL  Automation  products  and  polishing
supplies.

     GROSS  MARGIN.  The  Company's  gross  margin  increased  by  approximately
$858,000,  or 51%, to $2,539,000 for the three months ended March 31, 2001, from
$1,681,000  during  the  comparable  period of the  previous  fiscal  year.  The
increase in gross margin  resulted  from the 54%  increase in revenue  discussed
above.  Gross margin as a percentage  of sales was 36% in the second  quarter of
fiscal  2001,  compared to 37% in the second  quarter of fiscal  2000,  with the
slight  erosion  resulting  from the  product  mix.  In the  polishing  supplies
segment,  gross margin  declined to 30% of revenues  from 33% in the prior year.
Inventory  write-offs were $109,000 higher in the second quarter of fiscal 2001,
than  in  the  comparable  period  of  fiscal  2000,  as  a  result  of  certain
semiconductor equipment order cancellations, which contributed to the decline in
consolidated  gross  margins.  The gross margin of the  semiconductor  equipment
segment declined to 39% of sales in fiscal 2001, compared to 40% of sales in the
second quarter of fiscal 2000.

                                       11

     Gross margin increased by approximately  $1,759,000,  or 60%, to $4,666,000
for the six months ended March 31, 2001, from  $2,907,000  during the comparable
period of the previous  fiscal year. This increase  resulted  primarily from the
65%  increase in revenue  discussed  above.  As a percentage  of sales,  margins
remained relatively constant.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses  for the second  quarter of fiscal  2001  increased  by
$218,000,  or 20%, to  $1,298,000,  compared to  $1,080,000  spent in the second
quarter  of  fiscal  2000.  Approximately  $128,000  of the  increase  is due to
commissions, incentive pay and other costs associated with the increased revenue
and profitability.  Other increases in expenses totaling $90,000 resulted from a
number of factors  including  costs  related  to the  expansion  of  facilities.
Consolidated  expenses  declined to 18% of revenues  for the three  months ended
March 31, 2001, as compared to 24% for the same period in fiscal 2000,  due to a
significant increase in revenues.

     Selling, general and administrative expenses for the six months ended March
31, 2001 increased by $453,000,  or 22%, to  $2,493,000,  compared to $2,040,000
spent  in  the  same  period  of  fiscal  2000.   Selling  expenses,   including
commissions,  account for $188,000 of the cost  increases,  while costs of added
administrative  personnel  increased  by  $64,000.  Other  administrative  costs
account for the remaining increase in these expenses.  Although selling, general
and  administrative  expenses increased  significantly,  they declined to 18% of
revenue in fiscal 2001 from 24% in fiscal 2000.

     RESEARCH  AND  DEVELOPMENT.  Research  and  development  costs  declined by
$56,000,  to $140,000,  during the second quarter of fiscal 2001, as compared to
$196,000  spent in the  second  quarter  of fiscal  2000,  due to  non-recurring
purchases of supplies for the Company's asher research project in fiscal 2000.

     For the first six months of fiscal  2001,  research and  development  costs
declined by $3,000,  to  $247,000,  as  compared  to $250,000  spent in the same
period of fiscal 2000.  Increased  expenditures in development  expenditures for
furnaces in the current  fiscal year nearly  offset the decline in Asher related
costs discussed above.

     OPERATING  PROFIT.  Operating  profit for the second quarter of fiscal 2001
was  $1,101,000,  an increase of  $697,000,  or 173%,  compared to an  operating
profit of $404,000 in the same period of fiscal 2000.  The increase in operating
profit is primarily attributable to the 54% increase in consolidated revenue and
continued  cost control.  Operating  profit for the polishing  supplies  segment
increased by $51,000,  or 18%, to  $335,000,  compared to $284,000 in the second
quarter of fiscal 2000, as a result of the 16% increase in sales volume.  In the
semiconductor  equipment  segment,  operating  profit  increased  by $647,000 to
$767,000,  compared  to  $120,000  in the  second  quarter of fiscal  2000.  The
increase in the second quarter operating profit of the  semiconductor  equipment
segment is due to the 85% increase in sales and  continued  cost  control.  On a
consolidated  basis,  operating  profits  grew to 16% of  revenue  in the second
quarter of fiscal 2001,  compared to 9% of revenue in the second  quarter of the
prior fiscal year.

     Operating profit for the six months ended March 31, 2001 was $1,926,000, an
increase of $1,308,000,  or 212%, compared to an operating profit of $618,000 in
the same period of fiscal 2000.  The  increase in operating  profit is primarily
attributable to the 65% increase in consolidated  revenue.  Operating profit for
the  polishing  supplies  segment  increased by  $194,000,  or 45%, to $627,000,
compared to $433,000 in the same period of fiscal  2000,  as a result of the 21%
increase in sales volume.  In the  semiconductor  equipment  segment,  operating

                                       12

profit increased by $1,114,000 to $1,299,000,  compared to $185,000 in the first
six months of fiscal 2000. The increase in the second quarter  operating  profit
of the  semiconductor  equipment segment is due to the 85% increase in sales and
continued cost control. On a consolidated  basis,  operating profits grew to 14%
of revenue in the first six months of fiscal 2001,  compared to 7% of revenue in
the same period of the prior fiscal year.

     NET INTEREST INCOME. During the second quarter of fiscal 2001, net interest
income increased  $66,000 to $78,000,  compared to $12,000 in the  corresponding
quarter of fiscal  2000,  due to  interest  earned on the  portion of the equity
capital  raised  in the  fourth  quarter  of  fiscal  2000 that has not yet been
deployed  and cash  generated  from  operations.  As a result  of the  foregoing
factors,  income before  income taxes for the second  quarter of fiscal 2001 was
$1,179,000,  an increase of 183%,  compared to $416,000 in the second quarter of
fiscal 2000.

     For the six months ended March 31,  2001,  net  interest  income  increased
$131,000 to $152,000,  compared to $21,000 in the corresponding period of fiscal
2000 for the reasons  discussed above.  Income before income taxes for the first
six months of fiscal  2001 was  $2,078,000,  an  increase  of 225%,  compared to
$639,000 in the first six months of fiscal 2000.

     PROVISION FOR INCOME TAXES. Income tax expense of $431,000,  recorded at an
effective  tax rate of 37%,  resulted  in net income  for the second  quarter of
fiscal 2001 of $748,000.  During the same  quarter of fiscal  2000,  the Company
recorded income tax expense of $149,000, reflecting a 36% effective tax rate and
resulting in net income of $267,000.

     Income tax expense of $768,000,  recorded at an effective  tax rate of 37%,
resulted  in net income for the first six months of fiscal  2001 of  $1,310,000.
During the same period of fiscal 2000, the Company  recorded  income tax expense
of $241,000,  reflecting a 38%  effective  tax rate,  resulting in net income of
$398,000.

     NET INCOME.  The resulting net income for the second quarter of fiscal 2001
was  $748,000,  or $.27 per diluted  share,  an increase of  $481,000,  or 180%,
compared to the net income of $267,000, or $.12 per share, in the second quarter
of fiscal 2000.

     Net income for the six months ended March 31, 2001 was $1,310,000,  or $.47
per diluted share, an increase of $912,000,  or 229%, compared to the net income
of $398,000, or $.18 per share, for the same period of fiscal 2000.

     BACKLOG. At March 31, 2001, the order backlog was $12,736,000,  an increase
of $758,000,  or 6%, from the  $11,978,000  backlog at December  31,  2000.  New
orders net of  cancellations  in the  second  quarter  of fiscal  2001  exceeded
shipments  during the  period.  Despite  significant  declines in the backlog of
orders for automation  products and polishing  supplies and equipment during the
second quarter of fiscal 2001,  this was more than offset by the increase in the
backlog of orders for diffusion furnaces. The March 31, 2001 backlog declined by
$1,763,000,  or 12%, from the $14,499,000  backlog at September 30, 2000.  While
new orders  nearly  equaled  shipments  for the first  quarter  of fiscal  2001,
cancellations  of four system orders  accounted for the reduction in the backlog
since  September 30, 2000. The backlog as of March 31, 2001,  was  approximately
$8,292,000 higher than at March 31, 2000, an increase of 187%.

     Due to the  possibility of customer  changes in delivery  schedules,  order
cancellations,  potential  delays in  product  shipments,  delays  in  obtaining
inventory  parts  from  suppliers,   failure  to  satisfy  customer   acceptance
requirements and changes in product mix, our backlog as of any point in time may
not be  representative of actual sales and profitability in any future period. A
reduction in backlog during any particular  period could have a material adverse
affect on our business prospects, financial condition and results of operations.

                                       13

LIQUIDITY AND CAPITAL RESOURCES

     At March  31,  2001,  the  Company  had  $6,280,000  of  readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents  of $5,785,000  at September 30, 2000, an increase of  approximately
$495,000.  The  Company's  current  cash  position is  primarily a result of the
$4,616,000 of net cash proceeds from a private placement of the Company's Common
Stock in  September  2000 and the  positive  cash flow during  fiscal  2001.  An
additional  $2 million line of credit  secured in October 2000 further  enhances
the Company's liquidity position. The Company continues to believe that there is
sufficient liquidity for existing operations and its expansion plans.

     CASH FLOW.  The  $495,000  net increase in cash during the six months ended
March 31,  2001,  approximates  the cash flow  provided by the  operations.  The
$555,000  cash flow  provided by  operations  is comprised of  $1,310,000 of net
income,  depreciation  and  amortization  ($187,000),   non-cash  write-offs  of
inventories and receivables ($203,000),  and approximately a $1 million increase
in customer deposits. These items were partially offset by increased investments
in  inventories  ($1,060,000)  and  receivables  ($300,000)  and  reductions  in
accounts payable and income taxes payable. Proceeds from exercise of outstanding
warrants and options provided  approximately  $330,000 in cash, nearly enough to
finance capital  expenditures  totaling  $363,000,  which primarily were for the
expansion of plant capacity in the semiconductor equipment segment.

     This large increase in inventories  occurred primarily in the first quarter
of  fiscal  2001,  as a result  of volume  purchase  commitments  made to offset
growing  lead  times  that were  being  experienced  in the  fourth  quarter  of
fiscal 2000 and customer  cancellations  and delayed  delivery  schedules in the
first and second quarter of the current fiscal year.  While inventory may remain
at higher than historical levels for several quarters, the Company believes that
it will not increase further and does not expect any significant losses to occur
in the disposing of excess inventory.

     At March 31, 2001,  working  capital was  $12,367,000,  up $1,433,000  from
$10,934,000  at September  30,  2000.  The  Company's  current  ratio  increased
slightly to 3.5:1 at the end of the second  quarter of fiscal 2001 from 3.3:1 at
the  beginning of the 2001 fiscal year.  The Company  believes  that its current
ratio  continues  to indicate a strong  financial  condition.  At the end of the
second quarter of fiscal 2001, cash and cash equivalents  comprised 32% of total
assets and stockholders' equity accounted for 73% of total  capitalization.  The
Company believes that it continues to possess the financial  strength  necessary
to achieve continued growth.

RECENT ACCOUNTING PRONOUNCEMENTS

     On October 1, 2000, the Company adopted  Statement of Financial  Accounting
Standards  No.  133,   "Accounting   for  Derivative   Instruments  and  Hedging
Activities"("SFAS  133").  SFAS  133  requires  the  Company  to  recognize  all
derivatives on the balance sheet at fair value.  Derivatives that do not qualify
as hedges must be  adjusted  to fair value  through  income.  If the  derivative
qualifies for hedge treatment,  depending on the nature of the hedge, changes in
the fair value of the  derivative  are either  offset  against the change in the
fair value of assets,  liabilities,  or through  earnings (fair value hedges) or
recognized in other comprehensive  income until the hedged item is recognized in
earnings (cash flow hedges). The ineffective portion of a derivative's change in
fair value is immediately  recognized in earnings.  The adoption of SFAS 133 did
not have a material impact on the Company's  consolidated  financial position or
operating results.

                                       14

     In December 1999, the SEC issued Staff Accounting Bulletin ("SAB") No. 101,
"Revenue  Recognition,"  which  sets  forth the SEC  Staff's  views on  selected
revenue recognition issues. Based upon the prevailing interpretations of SAB No.
101, the Company may be required to delay  recognition  of at least a portion of
its  sales of  semiconductor  production  systems  until  installation  has been
completed and customer acceptance has occurred.  The Company's current policy is
to  recognize  revenue  at the time the  customer  takes  title to the  product,
generally at the time of  shipment,  because the Company has  routinely  met its
installation  obligations  and  installation  costs  represent an  insignificant
percentage of total costs. The Company believes its current accounting  policies
on revenue  recognition are consistent with those generally used in its industry
and  have  been  consistently  applied  since  the  inception  of  the  Company.
Therefore, if the Company is required to change its revenue recognition policies
in order to comply with SAB No. 101, a significant  cumulative charge related to
a change in an accounting principle may be required. The guidance in SAB No. 101
must be adopted no later than the fourth  quarter of the  Company's  fiscal year
2001,  ending September 30, 2001, with a restatement of the first three quarters
of that fiscal year. In October 2000, the SEC issued implementation  guidance in
the form of  "Frequently  Asked  Questions."  The  Company is in the  process of
assessing  the impact that SAB No. 101 will have on its  consolidated  financial
statements based on the SEC's most recently issued guidance.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended  September  30,  2000.  There are no  material  changes in
reported market risk from September 30, 2000.

FORWARD-LOOKING STATEMENTS

     The  statements  contained  in  this  report  on  Form  10-Q  that  are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no
material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k) the  semiconductor  equipment  industry  will not enter a period of slowdown

                                       15

during  fiscal 2001,  (l) the  condition in the Asian  markets will  continue to
improve,  (m) the Company will be able to continue to control costs,  (n) demand
for the Company's products will not be adversely and significantly influenced by
trends  within  the  semiconductor   industries,   including   consolidation  of
semiconductor  manufacturing  operations  through mergers and the subcontracting
out of the  production of  semiconductors  to foundries,  and (o) the effects of
adopting  SAB No. 101 will  largely be offset by  increased  sales.  Assumptions
related to the foregoing  involve judgments with respect to, among other things,
future economic,  competitive and market conditions, all of which are beyond the
control of the  Company.  Although  the Company  believes  that the  assumptions
underlying the forward-looking statements are reasonable, any of the assumptions
could  prove  inaccurate  and,  therefore,  there can be no  assurance  that the
results  contemplated  in  forward-looking   statements  will  be  realized.  In
addition,  the business and operations of the Company are subject to substantial
risks,  which  increase  the  uncertainty   inherent  in  such   forward-looking
statements.   In  light  of  the  significant   uncertainties  inherent  in  the
forward-looking  information  included herein,  such  information  should not be
regarded as a  representation  by the  Company,  or any other  person,  that the
objectives or plans for the Company will be achieved.

                                       16

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies named in a legal action being brought by North  Middleton  Township
in  Carlisle,  Pennsylvania,  the  owner  of a  landfill  allegedly  found to be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired the assets of P.R.  Hoffman  Machine  Products  Corporation in an asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any breaches of P.R.
Hoffman's  representations  and  warranties  in the  Asset  Purchase  Agreement,
including  representations relating to environmental matters. In accordance with
the terms of the Asset Purchase  Agreement,  the Company has provided  notice to
the prior owner of P.R.  Hoffman Machine  Products  Corporation of the Company's
intent to seek  indemnification  from such owner for any  liabilities  resulting
from this legal action. Based on information  available to the Company as of the
date of this  report,  management  believes  the costs,  if any, to resolve this
matter will not be material to the Company's  results of operations or financial
position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

     On March 15, 2001, the Company held its annual meeting of  shareholders  at
which 2,180,175,  or 83% of the 2,628,871 shares outstanding were represented by
proxy  or in  person.  The  following  persons  where  elected  to the  board of
directors with shares voted as follows:

          Election of Directors               For               Withheld
          ---------------------            ---------            --------
          Jong S. Whang                    2,174,237              5,938
          Robert T. Hass                   2,174,365              5,810
          Donald F. Johnston               2,174,333              5,842
          Alvin Katz                       2,174,208              6,967
          Bruce R. Thaw                    2,174,365              5,810

     At the annual meeting the shareholders  approved an amendment to the Amtech
Systems,  Inc. 1998 Stock Option Plan to increase the number of shares available
for issuance  thereunder by 250,000 from 50,000 to 300,000.  Of the shares voted
on the proposal, 402,202 voted for, 169,972 voted against and 7,614 abstained.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

     (a) Exhibits

          10.1      Employment Agreement between Amtech System, Inc. and Jong S.
                    Whang, its President and Chief Executive Officer.

     (b) Reports on Form 8-K

         None.

                                       17

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

     AMTECH SYSTEMS, INC.


     By /s/ Robert T. Hass                                   Dated: May 15, 2001
        ------------------------------------------
        Robert T. Hass, Vice-President-Finance and
        (Chief Financial and Accounting Officer)

                                       18