UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q

(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

     For the quarterly period ended: June 30, 2001

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

      For the transition period from ________________ to ________________


                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                 Arizona                                         86-0411215
     (State or other jurisdiction of                          (I.R.S. Employer
     incorporation or organization)                          Identification No.)


  131 South Clark Drive, Tempe, Arizona                             85281
(Address of principal executive offices)                         (Zip Code)


        Registrant's telephone number, including area code: 480-967-5146


Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

        Shares of Common Stock outstanding as of June 30, 2001: 2,649,171

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES

                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----

PART I. FINANCIAL INFORMATION.

     Item 1. Condensed Consolidated Financial Statements

          Consolidated Balance Sheets -
            June 30, 2001 and September 30, 2000...........................    3

          Consolidated Statements of Operations -
            Three and Nine months ended June 30, 2001 and 2000.............    4

          Consolidated Statements of Stockholders' Equity-
            Three and Nine months ended June 30, 2001 and 2000.............    5

          Consolidated Statements of Cash Flows -
            Three and Nine months ended June 30, 2001 and 2000.............    6

          Notes to Condensed Consolidated Financial Statements.............    7

     Item 2. Management's Discussion and Analysis of Financial
               Condition and Results of Operations

          Results of Operations............................................   12
          Liquidity and Capital Resources..................................   15
          Recent Accounting Pronouncements.................................   16

     Item 3. Quantitative and Qualitative Disclosures about Market Risk....   17
          Forward-Looking Statements.......................................   17


PART II. OTHER INFORMATION.

     Item 1. Legal Proceedings ............................................   18

     Item 4. Submission of Matters to a Vote of Security Holders  .........   18

     Item 6. Exhibits and Reports on Form 8-K. ............................   18


SIGNATURE..................................................................   19

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                           CONSOLIDATED BALANCE SHEETS



                                                                      June 30,      September 30,
                                                                        2001            2000
                                                                   ------------     ------------
                                                                    (Unaudited)
                                                                              
                                     ASSETS
CURRENT ASSETS:
 Cash and cash equivalents                                         $  5,490,929     $  5,784,500
 Accounts receivable - net                                            5,999,323        4,929,948
 Inventories                                                          4,929,190        4,229,546
 Deferred income taxes                                                  834,000          577,000
 Prepaid expenses                                                        43,450           79,476
                                                                   ------------     ------------
          Total current assets                                       17,296,892       15,600,470

PROPERTY, PLANT AND EQUIPMENT - net                                   1,286,259        1,093,707

GOODWILL AND OTHER ASSETS -  net                                        754,429          789,083
                                                                   ------------     ------------
          Total assets                                             $ 19,337,580     $ 17,483,260
                                                                   ============     ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY

CURRENT LIABILITIES:
  Accounts payable                                                 $  1,429,496     $  2,144,197
  Accrued compensation and related taxes                                780,214          635,354
  Accrued warranty expense                                              340,525          218,693
  Accrued installation expense                                          204,169          266,101
  Customer deposits                                                     696,702          245,663
  Income taxes payable                                                  785,000          670,000
  Other accrued liabilities                                             396,709          486,779
                                                                   ------------     ------------
          Total current liabilities                                   4,632,815        4,666,787
                                                                   ------------     ------------

LONG-TERM OBLIGATIONS                                                    94,454          236,590
                                                                   ------------     ------------

COMMITMENTS AND CONTINGENCIES

STOCKHOLDERS' EQUITY :
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued                               --               --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
    2,649,171 (2,571,808 in 2000) shares issued and outstanding          26,492           25,718
  Additional paid-in capital                                         12,543,728       12,133,058
  Accumulated other comprehensive loss -
    Cumulative foreign currency translation adjustment                 (595,212)        (502,356)
  Retained earnings                                                   2,635,303          923,463
                                                                   ------------     ------------
          Total stockholders' equity                                 14,610,311       12,579,883
                                                                   ------------     ------------
          Total liabilities and stockholders' equity               $ 19,337,580     $ 17,483,260
                                                                   ============     ============

The accompanying notes are an integral part of these condensed consolidated financial statements.


                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONSOLIDATED STATEMENTS OF OPERATIONS
             For Three and Nine Months Ended June 30, 2001 and 2000



                                        Three Months Ended June 30,      Nine Months Ended June 30,
                                        --------------------------      ----------------------------
                                           2001            2000            2001              2000
                                        ----------      ----------      -----------      -----------
                                        (Unaudited)     (Unaudited)     (Unaudited)      (Unaudited)
                                                                             
Net product sales                       $6,053,533      $4,693,430      $19,960,847      $13,105,042
Cost of product sales                    4,061,890       3,020,817       13,303,434        8,524,967
                                        ----------      ----------      -----------      -----------
         Gross margin                    1,991,643       1,672,613        6,657,413        4,580,075

Selling, general and administrative      1,333,960       1,144,149        3,826,986        3,184,250
Research and development                    55,727          84,107          302,353          333,689
                                        ----------      ----------      -----------      -----------
        Operating profit                   601,956         444,357        2,528,074        1,062,136

Interest income - net                       53,998          21,138          205,766           42,356
                                        ----------      ----------      -----------      -----------

Income before income taxes                 655,954         465,495        2,733,840        1,104,492
Income tax provision                       254,000         173,000        1,022,000          414,000
                                        ----------      ----------      -----------      -----------

NET INCOME                              $  401,954      $  292,495      $ 1,711,840      $   690,492
                                        ==========      ==========      ===========      ===========

EARNINGS PER SHARE:
  Basic                                 $      .15      $      .14      $       .65      $       .32
  Weighted average shares outstanding    2,670,822       2,163,808        2,644,475        2,131,992

  Diluted                               $      .14      $      .13      $       .61      $       .31
  Weighted average shares outstanding    2,862,667       2,269,558        2,803,068        2,237,236

The accompanying notes are an integral part of these condensed consolidated financial statements.


                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
             For Three and Nine Months Ended June 30, 2001 and 2000
                                   (Unaudited)



                                             Common Stock                        Accumulated     Retained
                                         --------------------     Additional        Other        Earnings          Total
                                           Number                  Paid-In      Comprehensive  (Accumulated    Stockholders'
                                         of Shares    Amount       Capital      Income (Loss)    Deficit)          Equity
                                         ---------    -------    ------------     ---------     -----------     ------------
                                                                                              
BALANCE AT SEPTEMBER 30, 1999            2,108,679    $21,087    $  7,400,152     $(309,064)    $  (401,958)    $  6,710,217
  Net income                                    --         --              --            --         690,492          690,492
  Translation adjustment                        --         --              --       (97,548)             --          (97,548)
                                                                                                                ------------
     Comprehensive income                       --         --              --            --              --          592,944
                                                                                                                ------------
  Warrants and stock options exercised      55,129        551           1,891            --              --            2,442
                                         ---------    -------    ------------     ---------     -----------     ------------
BALANCE AT JUNE 30, 2000                 2,163,808    $21,638    $  7,402,043     $(406,612)    $   288,534     $  7,305,603
                                         =========    =======    ============     =========     ===========     ============

BALANCE AT SEPTEMBER 30, 2000            2,571,808    $25,718    $ 12,133,058     $(502,356)    $   923,463     $ 12,579,883
  Net income                                    --         --              --            --       1,711,840        1,711,840
  Translation adjustment                        --         --              --       (92,856)             --          (92,856)
                                                                                                                ------------
     Comprehensive income                                                                                          1,618,984
                                                                                                                ------------
  Warrants and stock options exercised      77,363        774         410,670            --              --          411,444
                                         ---------    -------    ------------     ---------     -----------     ------------
BALANCE AT JUNE 30, 2001                 2,649,171    $26,492    $ 12,543,728     $(595,212)    $ 2,635,303     $ 14,610,311
                                         =========    =======    ============     =========     ===========     ============

BALANCE AT MARCH 31, 2000                2,110,729    $21,107    $  7,402,572     $(407,880)    $    (3,961)    $  7,011,838
  Net income                                    --         --              --            --         292,495          292,495
  Translation adjustment                        --         --              --         1,268              --            1,268
                                                                                                                ------------
     Comprehensive income                       --         --              --            --              --          293,763
                                                                                                                ------------
  Warrants and stock options exercised      53,079        531            (529)           --              --                2
                                         ---------    -------    ------------     ---------     -----------     ------------
BALANCE AT JUNE 31, 2000                 2,163,808    $21,638    $  7,402,043     $(406,612)    $   288,534     $  7,305,603
                                         =========    =======    ============     =========     ===========     ============

BALANCE AT MARCH 31, 2001                2,632,471    $26,325    $ 12,462,049     $(510,701)    $ 2,233,349     $ 14,211,022
  Net income                                    --         --              --            --         401,954          401,954
  Translation adjustment                        --         --              --       (84,511)             --          (84,511)
                                                                                                                ------------
     Comprehensive income                                                                                            317,443
                                                                                                                ------------
  Warrants and stock options exercised      16,700        167          81,679            --              --           81,846
                                         ---------    -------    ------------     ---------     -----------     ------------
BALANCE AT JUNE 30, 2001                 2,649,171    $26,492    $ 12,543,728     $(595,212)    $ 2,635,303     $ 14,610,311
                                         =========    =======    ============     =========     ===========     ============

The accompanying notes are an integral part of these condensed consolidated financial statements.


                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONSOLIDATED STATEMENTS OF CASH FLOWS
                  For Nine Months Ended June 30, 2001 and 2000



                                                                  2001             2000
                                                              -----------      -----------
                                                              (Unaudited)      (Unaudited)
                                                                         
OPERATING ACTIVITIES:
  Net income                                                  $ 1,711,840      $   690,492
  Adjustments to reconcile net income to net
    cash provided by (used in) operating activities:
      Depreciation and amortization                               277,474          219,432
      Provision for writeoff of inventory and receivables         492,208           20,266
      Loss on disposals of long-lived assets                           --              432
      Deferred income taxes                                      (257,000)         (87,000)
   Decrease (increase) in:
      Accounts receivable                                      (1,527,559)          28,893
      Inventories, prepaid expenses and other assets             (880,339)        (416,763)
   Increase (decrease) in:
      Accounts payable                                           (678,151)         192,931
      Accrued liabilities and deposits                            614,347          322,742
      Income taxes payable                                        115,000          235,355
                                                              -----------      -----------
   Net Cash Provided By (Used In) Operating Activities           (132,180)       1,206,780
                                                              -----------      -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                     (429,872)        (148,205)
                                                              -----------      -----------
   Net Cash Used In Investing Activities                         (429,872)        (148,205)
                                                              -----------      -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises               411,444            2,442
  Payments on mortgage loan                                      (143,540)          (8,128)
                                                              -----------      -----------
   Net Cash Provided By (Used In) Financing Activities            267,904           (5,686)
                                                              -----------      -----------
EFFECT OF EXCHANGE RATE CHANGES ON CASH                               577           49,243
                                                              -----------      -----------
CASH AND CASH EQUIVALENTS:
  Net increase (decrease)                                        (293,571)       1,102,132
  Beginning of year                                             5,784,500        1,124,685
                                                              -----------      -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                       $ 5,490,929      $ 2,226,817
                                                              ===========      ===========
SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
  Interest                                                    $    22,194      $     9,562
  Income taxes paid                                             1,164,000          263,000

The accompanying notes are an integral part of these condensed consolidated financial statements.


                                       6

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                    THREE AND NINE MONTHS ENDED JUNE 30, 2001


1.   BASIS OF PRESENTATION

     The accompanying  condensed  consolidated  financial statements include the
     accounts  of  Amtech  Systems,  Inc.  and  its  wholly-owned  subsidiaries,
     Tempress Systems, Inc., based in Heerde, The Netherlands, and P. R. Hoffman
     Machine  Products,  Inc.  (collectively,  the  "Company").  All significant
     intercompany   balances   and   transactions   have  been   eliminated   in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in accordance with accounting principles generally accepted in the
     United States,  pursuant to the rules and regulations of the Securities and
     Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the opinion of
     management,   all   adjustments   (which  include  only  normal   recurring
     adjustments) necessary to present fairly the financial position, results of
     operations, and cash flows for the periods presented have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2000.

     The consolidated  results of operations for the three and nine months ended
     June 30, 2001, are not necessarily indicative of the results to be expected
     for the full year.

2.   REVENUE RECOGNITION

     Revenue is recognized on the accrual basis when the customer takes title to
     the  product,  generally  upon  shipment.  On  occasion,  the Company  will
     recognize revenue prior to shipment.  When this occurs, the Company ensures
     that title has passed,  the customer has  committed to take delivery of the
     goods in a  reasonable  period  of time,  there  is a  legitimate  business
     purpose  requested by the customer to not ship the product,  the product is
     complete and ready for shipment and is segregated  from existing  inventory
     and  there  are no  material  contingencies.  Upon  shipment,  the  Company
     recognizes all revenue and accrues the estimated costs of installation. See
     Note 5 - Recent Accounting Pronouncements.

                                       7

3.   INVENTORIES

     The components of inventories are as follows:

                                                  June 30,      September 30,
                                                    2001            2000
                                                 ----------      ----------
     Purchased parts and raw materials           $2,927,797      $1,931,524
     Work-in-process                              1,624,771       1,874,818
     Finished goods                                 376,622         423,204
                                                 ----------      ----------
     Totals                                      $4,929,190      $4,229,546
                                                 ==========      ==========

4.   EARNINGS PER SHARE



                                     Three Months Ended          Nine months ended
                                          June 30,                   June 30,
                                  ------------------------    ------------------------
                                     2001          2000          2001          2000
                                  ----------    ----------    ----------    ----------
                                                                
     Net income                   $  401,954    $  292,495    $1,711,840    $  690,492

     Weighted average
     Shares outstanding:
       Common shares               2,670,822     2,163,808     2,644,475     2,131,992

       Common equivalents (1)        191,845       105,750       158,593       105,244
                                  ----------    ----------    ----------    ----------
                                   2,862,667     2,269,558     2,803,068     2,237,236
                                  ==========    ==========    ==========    ==========
     Earnings Per Share:
       Basic                      $      .15    $      .14    $      .65    $      .32

       Diluted                    $      .14    $      .13    $      .61    $      .31


- ----------
(1)  Number of shares calculated using the treasury stock method and the average
     market price  during the period.  Options and warrants on a total of 45,700
     shares in fiscal 2001  periods and on 84,000  shares in fiscal 2000 periods
     had an exercise  price greater than the average  market price and therefore
     did not enter into the calculation.

                                       8

5.   RECENT ACCOUNTING PRONOUNCEMENTS

     In December 1999, the SEC issued Staff Accounting Bulletin ("SAB") No. 101,
     "Revenue  Recognition,"  which sets forth the SEC Staff's views on selected
     revenue  recognition issues.  Based upon the prevailing  interpretations of
     SAB No. 101, the Company will be required to delay  recognition of at least
     a  portion  of  its  sales  of  semiconductor   production   systems  until
     installation has been completed and customer  acceptance has occurred.  The
     Company's  current policy is to recognize  revenue at the time the customer
     takes title to the product,  generally at the time of shipment, because the
     Company has routinely met its  installation  obligations  and  installation
     costs  represent an  insignificant  percentage of total costs.  The Company
     believes  its  current  accounting  policies  on  revenue  recognition  are
     consistent  with  those  generally  used  in its  industry  and  have  been
     consistently  applied since the inception of the Company.  Therefore,  when
     the Company  changes its  revenue  recognition  policies in order to comply
     with  SAB  No.  101,  it will  be  treated  as a  change  in an  accounting
     principles and the  cumulative  effect of the change as of October 1, 2000,
     which may be a significant  charge,  will be excluded from operating income
     and reported as a separate component of net income. The guidance in SAB No.
     101 must be  adopted no later  than the  fourth  quarter  of the  Company's
     fiscal year 2001,  ending  September 30, 2001,  with a  restatement  of the
     first three  quarters of that fiscal year. In October 2000,  the SEC issued
     implementation  guidance in the form of "Frequently  Asked  Questions." The
     Company is in the  process of  assessing  the impact  that SAB No. 101 will
     have on its  consolidated  financial  statements  based on the  SEC's  most
     recently issued guidance.

     In July 2001, the Financial  Accounting  Standards  Board  ("FASB")  issued
     Statements   of  Financial   Accounting   Standards   No.  141,   "Business
     Combinations" ("SFAS No. 141"), and No. 142, "Goodwill and Other Intangible
     Assets" ("SFAS No. 142"). SFAS No. 141 eliminates poolings of interest as a
     method for accounting for business combinations.  SFAS No. 142 requires the
     discontinuance  of the amortization of goodwill and intangible  assets with
     indefinite  lives and at least an annual  assessment  of whether  there has
     been an  impairment  of such  assets  that  needs  to be  recognized  as an
     impairment charge.  SFAS Nos. 141 and 142 must be adopted by the Company no
     later than  October 1, 2002,  with early  adoption  permitted on October 1,
     2001. Since  amortization of goodwill is currently an estimated $69,000 per
     year,  the  discontinuance  of such  amortization  will not have a material
     affect on the  Company's  net  income  or  financial  condition.  While the
     Company  does not  expect  to incur an  impairment  charge  related  to its
     recorded goodwill,  currently $700,000, there can be no assurance that such
     an impairment charge will not occur at some time in the future.

     On October 1, 2000, the Company adopted  Statement of Financial  Accounting
     Standards  No. 133,  "Accounting  for  Derivative  Instruments  and Hedging
     Activities"  ("SFAS  No.  133").  SFAS No.  133  requires  the  Company  to
     recognize all  derivatives on the balance sheet at fair value.  Derivatives
     that do not  qualify  as hedges  must be  adjusted  to fair  value  through
     income. If the derivative  qualifies for hedge treatment,  depending on the
     nature of the hedge, changes in the fair value of the derivative are either
     offset  against  the change in the fair value of  assets,  liabilities,  or
     through  earnings (fair value hedges) or recognized in other  comprehensive
     income until the hedged item is recognized in earnings  (cash flow hedges).
     The  ineffective  portion  of  a  derivative's  change  in  fair  value  is
     immediately  recognized  in earnings.  The adoption of SFAS No. 133 did not
     have a material impact on the Company's  consolidated financial position or
     operating results.

                                       9

6.   BUSINESS SEGMENT INFORMATION

     The Company  classifies its products into two core business  segments:  (1)
     the semiconductor equipment segment which designs, manufactures and markets
     semiconductor  wafer  processing  equipment  used  in  the  fabrication  of
     integrated circuits, and (2) the polishing supplies segment, which designs,
     manufactures  and markets  carriers,  templates and  equipment  used in the
     lapping and polishing of wafer thin  materials,  including  silicon  wafers
     used  in the  production  of  semiconductors.  Information  concerning  the
     Company's business segments in fiscal years 2001 and 2000 is as follows:



                                      Three Months Ended            Nine months ended
                                           June 30,                      June 30,
                                   -------------------------    --------------------------
                                      2001           2000           2001           2000
                                   ----------    -----------    -----------    -----------
                                                                   
     Revenues
       Semiconductor equipment     $4,247,244    $ 2,587,020    $13,658,511    $ 7,293,316
       Polishing supplies           1,806,289      2,106,410      6,302,336      5,811,726
                                   ----------    -----------    -----------    -----------
                                   $6,053,533    $ 4,693,430    $19,960,847    $13,105,042
                                   ==========    ===========    ===========    ===========

     Operating profit
       Semiconductor equipment     $  475,362    $   216,015    $ 1,774,273    $   400,944
       Polishing supplies             126,594        228,342        753,801        661,192
                                   ----------    -----------    -----------    -----------
     Total operating profit           601,956        444,357      2,528,074      1,062,136
       Interest income - net           53,998         21,138        205,766         42,356
                                   ----------    -----------    -----------    -----------
     Income before income taxes    $  655,954    $   465,495    $ 2,733,840    $ 1,104,492
                                   ==========    ===========    ===========    ===========


7.   LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     11  companies  named in a legal  action  being  brought by North  Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal  action,  which  appears to have been filed to preserve  the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date.  The Company  acquired the assets of P.R.  Hoffman  Machine  Products
     Corporation  in an  asset  transaction  consummated  on July 1,  1997.  The
     landfill was closed and has not been used by P.R.  Hoffman  since  sometime
     prior to completion of the Company's  acquisition.  Therefore,  the Company
     believes that the named company is the prior owner of the acquired  assets.
     Under the terms of the Asset Purchase Agreement  governing the acquisition,
     the prior owner, P.R. Hoffman Machine Products Corporation, is obligated to
     indemnify  the Company for any breaches of P.R.  Hoffman's  representations
     and warranties in the Asset Purchase Agreement,  including  representations
     relating to  environmental  matters.  In  accordance  with the terms of the
     Asset  Purchase  Agreement,  the Company has  provided  notice to the prior
     owner of P.R. Hoffman Machine Products  Corporation of the Company's intent
     to seek indemnification from such owner for any liabilities  resulting from
     this legal action. Based on information  available to the Company as of the
     date of this report,  management  believes the Company's  costs, if any, to

                                       10

     resolve  this matter will not be material to the its results of  operations
     or financial position.

8.   CONCENTRATION OF CREDIT RISK

     As of June 30, 2001,  receivables  from customers in the optical  component
     industry  comprised  52% of  total  receivables,  of which  three  accounts
     comprised 38% of total receivables,  representing a concentration of credit
     risk as defined by SFAS No. 105, "Disclosure of Information about Financial
     Instruments  with  Off-Balance  Sheet Risk and Financial  Instruments  with
     Concentration  of Credit Risk." As of September 30, 2000,  receivables from
     two customers comprised 40% of accounts  receivable,  one of which was from
     the optical component industry and accounted for 12% of receivables.

     In July 2001, one of these optical component customers filed a petition for
     protection  from creditors  under Chapter 11 of the U.S.  bankruptcy  code,
     while  owing  the  Company  approximately  $815,000.  Before  that  optical
     customer filed for  bankruptcy,  the Company had collected  $794,000 of the
     original  balance.   Based  upon  information  provided  by  the  customer,
     management  estimates  that all but  approximately  $333,000 of that amount
     should be  collectible.  As of June 30, 2001,  the  allowance  for doubtful
     accounts has been  increased by the amount  estimated to be  uncollectible.
     There can be no assurance that the provision for doubtful  accounts will be
     sufficient.

                                       11

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND
        RESULTS OF OPERATIONS

RESULTS OF OPERATIONS

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                      Three Months Ended      Nine Months Ended
                                           June 30,                June 30,
                                      ------------------      ------------------
                                       2001        2000        2001        2000
                                      -----       -----       -----       -----
     Net revenue                      100.0%      100.0%      100.0%      100.0%
     Cost of product sales            (67.1)      (64.4)      (66.6)      (65.1)
                                      -----       -----       -----       -----
       Gross margin                    32.9        35.6        33.4        34.9

     Selling, general and
       administrative expenses        (22.1)      (24.3)      (19.2)      (24.3)

     Research and development           (.9)       (1.8)       (1.5)       (2.5)
                                      -----       -----       -----       -----
       Operating profit                 9.9%        9.5%       12.7%        8.1%
                                      =====       =====       =====       =====

     NET REVENUE.  The Company's net revenue for the three months ended June 30,
2001 was $6,054,000,  an increase of $1,361,000, or 29%, compared to net revenue
of $4,693,000 for the third quarter of fiscal 2000.  Sales in the  semiconductor
equipment  segment  increased  by 64%  primarily  due to  shipments of diffusion
furnace  systems  to  optical  component  manufacturers,  a new  market  for the
Company's products.  The Company's first system shipment to an optical component
manufacturer occurred in June 2000. The Company's semiconductor segment also had
significant sales from its new automation products,  which were more than offset
by a  decrease  in sales of its higher  priced  automation  products.  The sales
increase in the  semiconductor  equipment  segment was partially offset by a 14%
decline  in  sales  of  polishing   supplies  caused  by  the  downturn  in  the
semiconductor industry.

     Net  revenue for the nine months  ended June 30, 2001 was  $19,961,000,  an
increase of $6,856,000,  or 52%,  compared to net revenue of $13,105,000 for the
same period of fiscal 2000.  Sales in the  semiconductor  equipment  segment and
polishing supplies segment increased by 87% and 8%,  respectively.  Shipments of
furnace systems to optical component manufacturers,  as discussed above, account
for most of that  increase.  Sales of new  automation  products  announced  last
fiscal year account for  $1,416,000  of that  increase,  with the balance of the
increase attributable higher sales of the polishing supplies segment.

     GROSS  MARGIN.  The  Company's  gross  margin  increased  by  approximately
$319,000,  or 19%, to $1,992,000 for the three months ended June 30, 2001,  from
$1,673,000  during  the  comparable  period of the  previous  fiscal  year.  The
increase in gross margin  resulted  from the 29%  increase in revenue  discussed
above,  which  was  partially  offset  by the  effect  of a lower  gross  margin
percentage.  Gross margin as a percentage  of sales was 33% in the third quarter
of fiscal 2001,  compared to 36% in the third  quarter of fiscal 2000,  with the
erosion resulting from competitive  pricing  pressure,  a less favorable product
mix and increased  warranty  costs.  In the polishing  supplies  segment,  gross
margin declined to 26% of revenues in the third quarter of fiscal 2001, compared

                                       12

to 30% in the prior year,  as a result of fixed costs being  spread over a lower
sales volume.  The gross margin of the semiconductor  equipment segment declined
to 36% of sales in the third quarter of fiscal 2001, compared to 40% of sales in
the third quarter of fiscal 2000, as a result of competitive  pricing  pressure,
product mix and increased warranty costs.

     Gross margin increased by approximately  $2,077,000,  or 45%, to $6,657,000
for the nine months ended June 30, 2001, from  $4,580,000  during the comparable
period of the previous  fiscal year. This increase  resulted  primarily from the
52% increase in revenue  discussed above. As a percentage of sales,  margins for
the nine  months  ended June 30, 2001  declined  slightly to 33% from 35% in the
comparable  period  of  fiscal  year  2000,  primarily  due to the same  factors
discussed above.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses  for the third  quarter  of fiscal  2001  increased  by
$190,000,  or 17%,  to  $1,334,000,  compared to  $1,144,000  spent in the third
quarter of fiscal 2000.  The  provision  for doubtful  accounts  receivable  was
increased  by $333,000  primarily  due to a customer  in the  optical  component
industry  filing for  protection  from  creditors  under  Chapter 11 of the U.S.
bankruptcy code,  while owing the Company  approximately  $815,000.  Before that
optical customer filed for bankruptcy, the Company had collected $794,000 of the
original balance.  Based upon information  provided by the customer,  management
estimates  that  all  but  approximately  $333,000  of  that  amount  should  be
collectible.  There can be no assurance that the provision for doubtful accounts
will be  sufficient.  The  increased  expenses  caused  by that  provision  were
partially  offset by lower  commissions,  as a larger  percentage  of sales were
represented  by in-house  accounts.  Also,  approximately  $66,000 of grants for
research and development  were received from various agencies in The Netherlands
and  credited  to   miscellaneous   income  and  netted   against   general  and
administrative  expenses.  Consolidated expenses declined to 22% of revenues for
the three months ended June 30, 2001,  as compared to 24% for the same period in
fiscal 2000, due to fixed costs being spread over higher revenues.

     Selling, general and administrative expenses for the nine months ended June
30, 2001, increased by $643,000,  or 20%, to $3,827,000,  compared to $3,184,000
spent in the same period of fiscal 2000.  The increase in the  provision for bad
debts,  discussed  above, was the most  significant  factor  contributing to the
higher level of selling, general and administrative expenses.  Although selling,
general and administrative  expenses increased  significantly,  they declined to
19% of revenue in fiscal 2001 from 24% in fiscal 2000.

     RESEARCH  AND  DEVELOPMENT.  Research  and  development  costs  declined by
$28,000,  to $56,000,  during the third  quarter of fiscal 2001,  as compared to
$84,000 spent in the third quarter of fiscal 2000, primarily due to the reversal
in the most recent  quarter of an over accrual of such expenses that occurred in
the second quarter of the current fiscal year.

     For the first nine months of fiscal 2001,  research and  development  costs
declined  by $32,000,  to  $302,000,  as compared to $334,000  spent in the same
period of fiscal 2000.  Increased  development  expenditures for furnaces in the
current fiscal year were more than offset by the decline in asher related costs.

     OPERATING PROFIT. Operating profit for the third quarter of fiscal 2001 was
$602,000,  an increase of $158,000,  or 36%,  compared to an operating profit of
$444,000 in the same period of fiscal 2000. The increase in operating  profit is
primarily attributable to the 29% increase in consolidated revenue and continued
cost control.  Operating  profit for the polishing  supplies segment declined by
$101,000,  or 44%, to  $127,000,  compared  to $228,000 in the third  quarter of
fiscal  2000,  as a result of the 14%  decline in that  segments  sales  volume,
without a similar  reduction  in fixed  costs.  In the  semiconductor  equipment

                                       13

segment, operating profit increased by $259,000, or 120%, to $475,000,  compared
to  $216,000  in the third  quarter of fiscal  2000.  The  increase in the third
quarter operating profit of the semiconductor equipment segment is primarily due
to the 64%  increase in sales and  continued  cost  control.  On a  consolidated
basis,  operating  profits  in the third  quarter of both  fiscal  2001 and 2000
represented approximately 10% of revenue.

     Operating profit for the nine months ended June 30, 2001 was $2,528,000, an
increase of $1,466,000,  or 138%,  compared to an operating profit of $1,062,000
in the same period of fiscal 2000. The increase in operating profit is primarily
attributable  to the 52% increase in  consolidated  revenue and  continued  cost
control.  Operating  profit for the  polishing  supplies  segment  increased  by
$93,000 to  $754,000,  from  $661,000 in the  comparable  period of fiscal 2000,
primarily  as a  result  of  continued  cost  controls.  For  the  semiconductor
equipment segment,  operating profit was $1,774,000,  an increase of $1,373,000,
or 342%,  compared  to $401,000  in the first nine  months of fiscal  2000.  The
increase in the operating profit of the  semiconductor  equipment segment is due
to the 87% increase in sales of that segment and continued  cost  control.  On a
consolidated  basis,  operating profits grew to 13% of revenue in the first nine
months of fiscal 2001, compared to 8% of revenue in the same period of the prior
fiscal year, as fixed costs were spread over the higher sales volume.

     NET INTEREST INCOME.  During the third quarter of fiscal 2001, net interest
income increased by $33,000 to $54,000, compared to $21,000 in the corresponding
period of fiscal  2000,  due to  interest  earned on the  portion  of the equity
capital  raised  in the  fourth  quarter  of  fiscal  2000 that has not yet been
deployed.  As a result of the foregoing factors,  income before income taxes for
the third quarter of fiscal 2001 was $656,000,  an increase of 41%,  compared to
$465,000 in the third quarter of fiscal 2000.

     For the nine months ended June 30,  2001,  net  interest  income  increased
$164,000 to $206,000,  compared to $42,000 in the corresponding period of fiscal
2000 for the reasons  discussed above.  Income before income taxes for the first
nine months of fiscal  2001 was  $2,734,000,  an  increase of 148%,  compared to
$1,104,000 in the first nine months of fiscal 2000.

     PROVISION FOR INCOME TAXES. Income tax expense of $254,000,  recorded at an
effective  tax rate of 39%,  resulted  in net  income  for the third  quarter of
fiscal 2001 of $402,000.  During the same  quarter of fiscal  2000,  the Company
recorded income tax expense of $173,000, reflecting a 37% effective tax rate and
resulting in net income of $292,000.  The higher  effective tax rate in the most
recent quarter is due to having fully utilized  certain state net operating loss
carryforwards during the first two quarters of the current fiscal year.

     Income tax expense of $1,022,000, recorded at an effective tax rate of 37%,
resulted in net income for the first nine  months of fiscal 2001 of  $1,712,000.
During the same period of fiscal 2000, the Company  recorded  income tax expense
of $414,000,  reflecting a 37%  effective  tax rate,  resulting in net income of
$690,000.

     NET INCOME.  Net income for the third  quarter of fiscal 2001 was $402,000,
or $.14 per  diluted  share,  representing  an  increase  of  $110,000,  or 38%,
compared  to net income of  $292,000,  or $.13 per diluted  share,  in the third
quarter of fiscal 2000.

                                       14

     Net income for the nine months ended June 30, 2001 was $1,712,000,  or $.61
per diluted share,  representing an increase of $1,022,000, or 148%, compared to
net income of $690,000, or $.31 per diluted share, for the same period of fiscal
2000.

     BACKLOG. At June 30, 2001, the order backlog was $9,433,000,  a decrease of
$3,303,000,  or 26%, from the $12,736,000  backlog at March 31, 2001. New orders
net of cancellations  were only 45% of shipments during the third fiscal quarter
and  resulted  in the  significant  decline in  orders.  The new orders for both
business  segments  were  significantly  lower  during the third  quarter of the
current fiscal year than any quarter since the quarter ended March 31, 1999, the
end of the previous industry slowdown.  The Company can not reasonably  estimate
the duration of the industry  slowdown or the extent to which it will  adversely
affect its future  results of  operations.  Despite the  significant  decline in
orders and the backlog,  the backlog remains  significantly  higher than anytime
prior to the June  2000  quarter  and is more than  100%  higher  than it was as
recently as March 31, 2000.  Also,  several large system orders  received  since
June 30, 2001 have been encouraging.

     Due to the  possibility of customer  changes in delivery  schedules,  order
cancellations,  potential  delays in  product  shipments,  delays  in  obtaining
inventory  parts  from  suppliers,   failure  to  satisfy  customer   acceptance
requirements and changes in product mix, our backlog as of any point in time may
not be  representative of actual sales and profitability in any future period. A
reduction in backlog during any particular  period could have a material adverse
affect on our business prospects, financial condition and results of operations.

LIQUIDITY AND CAPITAL RESOURCES

     At June 30, 2001, the Company had $5,491,000 of readily available liquidity
in the form of cash and cash  equivalents,  compared to cash and  equivalents of
$5,785,000  at September  30, 2000, a decrease of  approximately  $294,000.  The
Company's  current cash position is primarily a result of the  $4,616,000 of net
cash proceeds received from a private placement of the Company's Common Stock in
September  2000. An additional $2 million line of credit secured in October 2000
further  enhances the Company's  liquidity  position.  The Company  continues to
believe  that there is  sufficient  liquidity  for existing  operations  and its
expansion plans.

     CASH FLOW.  The  $294,000 net decrease in cash during the nine months ended
June  30,  2001,  approximates  the cash  flow  used by the  operations  and the
payments on the mortgage  loan. The $132,000 cash flow used in the operations is
comprised of $1,712,000 of net income, depreciation and amortization ($277,000),
non-cash write-offs of inventories and receivables ($492,000), and approximately
a $451,000 increase in customer  deposits.  These items were partially offset by
increased investments in inventories ($880,000) and receivables ($1,528,000) and
reductions  in  accounts  payable  ($678,000).  Proceeds  from the  exercise  of
outstanding warrants and options provided approximately $411,000 in cash, almost
the  same  amount  invested  in  purchases  of  property,  plant  and  equipment
($430,000),  which  primarily  were for the  expansion of plant  capacity in the
semiconductor equipment segment.

     This large increase in inventories  occurred primarily in the first quarter
of  fiscal  2001,  as a result  of volume  purchase  commitments  made to offset
growing lead times for system  components and parts that were being  experienced
in the fourth  quarter of fiscal  2000 and  customer  cancellations  and delayed
delivery  schedules in the first and third  quarter of the current  fiscal year.
While  inventory  may remain at higher than  historical  levels for several more
quarters,  the Company  believes that it will not increase  further and does not
expect any significant losses to occur in the disposing of excess inventory.

     Accounts  receivable  have also  increased  significantly  during  the nine
months since the being of the fiscal year.  While  management  believes that the
increased  provision for bad debt is sufficient,  there can be no assurance that
the  remaining  net  receivables  will  be  fully  collectible.  See  Note  8  -
Concentration Of Credit Risk.

                                       15

     At June 30, 2001,  working  capital was  $12,664,000,  up  $1,730,000  from
$10,934,000  at September  30,  2000.  The  Company's  current  ratio  increased
slightly to 3.7:1 at the end of the third quarter of fiscal 2001,  from 3.3:1 at
the  beginning of the 2001 fiscal year.  The Company  believes  that its current
ratio  continues  to indicate a strong  financial  condition.  At the end of the
third quarter of fiscal 2001, cash and cash  equivalents  comprised 28% of total
assets and stockholders' equity accounted for 76% of total  capitalization.  The
Company believes that it continues to possess the financial  strength  necessary
to achieve continued growth.

RECENT ACCOUNTING PRONOUNCEMENTS

     In December 1999, the SEC issued Staff Accounting Bulletin ("SAB") No. 101,
"Revenue  Recognition,"  which  sets  forth the SEC  Staff's  views on  selected
revenue recognition issues. Based upon the prevailing interpretations of SAB No.
101, the Company will be required to delay  recognition of at least a portion of
its  sales of  semiconductor  production  systems  until  installation  has been
completed and customer acceptance has occurred.  The Company's current policy is
to  recognize  revenue  at the time the  customer  takes  title to the  product,
generally at the time of  shipment,  because the Company has  routinely  met its
installation  obligations  and  installation  costs  represent an  insignificant
percentage of total costs. The Company believes its current accounting  policies
on revenue  recognition are consistent with those generally used in its industry
and  have  been  consistently  applied  since  the  inception  of  the  Company.
Therefore, when the Company changes its revenue recognition policies in order to
comply  with  SAB No.  101,  it will be  treated  as a change  in an  accounting
principles and the cumulative  effect of the change as of October 1, 2000, which
may be a significant charge, will be excluded from operating income and reported
as a separate  component  of net  income.  The  guidance  in SAB No. 101 must be
adopted no later than the fourth  quarter  of the  Company's  fiscal  year 2001,
ending  September 30, 2001,  with a restatement  of the first three  quarters of
that fiscal year. In October 2000, the SEC issued implementation guidance in the
form of "Frequently Asked Questions." The Company is in the process of assessing
the impact that SAB No. 101 will have on its consolidated  financial  statements
based on the SEC's most recently issued guidance.

     In July 2001, the Financial  Accounting  Standards  Board  ("FASB")  issued
Statements of Financial  Accounting  Standards No. 141, "Business  Combinations"
("SFAS No. 141"), and No. 142,  "Goodwill and Other  Intangibles  Assets" ("SFAS
No.  142").  SFAS No.  141  eliminates  poolings  of  interest  as a method  for
accounting for business  combinations.  SFAS No. 142 requires the discontinuance
of the amortization of goodwill and intangible  assets with indefinite lives and
at least an annual  assessment  of whether  there has been an impairment of such
assets that needs to be recognized as an  impairment  charge.  SFAS Nos. 141 and
142 must be adopted by the  Company  no later than  October 1, 2002,  with early
adoption  permitted  on October 1,  2001.  Since  amortization  of  goodwill  is
currently an estimated $69,000 per year, the discontinuance of such amortization
will not have a  material  affect  on the  Company's  net  income  or  financial
condition.  While the  Company  does not  expect to incur an  impairment  charge
related to its recorded goodwill,  currently $700,000, there can be no assurance
that such an impairment charge will not occur at some time in the future.

     On October 1, 2000, the Company adopted  Statement of Financial  Accounting
Standards  No.  133,   "Accounting   for  Derivative   Instruments  and  Hedging
Activities" ("SFAS No. 133"). SFAS No. 133 requires the Company to recognize all
derivatives on the balance sheet at fair value.  Derivatives that do not qualify
as hedges must be  adjusted  to fair value  through  income.  If the  derivative
qualifies for hedge treatment,  depending on the nature of the hedge, changes in

                                       16

the fair value of the  derivative  are either  offset  against the change in the
fair value of assets,  liabilities,  or through  earnings (fair value hedges) or
recognized in other comprehensive  income until the hedged item is recognized in
earnings (cash flow hedges). The ineffective portion of a derivative's change in
fair value is immediately  recognized in earnings.  The adoption of SFAS No. 133
did not have a material impact on the Company's  consolidated financial position
or operating results.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended  September  30,  2000.  There are no  material  changes in
reported market risk from September 30, 2000.

FORWARD-LOOKING STATEMENTS

     The  statements  contained  in  this  report  on  Form  10-Q  that  are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no
material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k)  the  Company  will  be  able  to  adapt  to  the  current  slowdown  in the
semiconductor and optical component markets it serves and that the slowdown will
not last longer than in other recent industry  cycles,  (l) the condition in the
Asian markets will continue to improve, (m) the Company will be able to continue
to control  costs,  (n) demand for the Company's  products will not be adversely
and  significantly  influenced  by trends within the  semiconductor  industries,
including  consolidation  of  semiconductor   manufacturing  operations  through
mergers  and the  subcontracting  out of the  production  of  semiconductors  to
foundries,  (o) the  effects of adopting  SAB No. 101 will  largely be offset by
increased sales and (p) collection of receivables will not become more difficult
than anticipated and write-offs with respect to uncollectible  accounts will not
materially increase. Assumptions related to the foregoing involve judgments with
respect  to,  among  other  things,  future  economic,  competitive  and  market
conditions,  all of which are beyond the control of the  Company.  Although  the
Company believes that the assumptions underlying the forward-looking  statements

                                       17

are reasonable,  any of the assumptions  could prove inaccurate and,  therefore,
there can be no  assurance  that the  results  contemplated  in  forward-looking
statements  will be realized.  In addition,  the business and  operations of the
Company  are  subject to  substantial  risks,  which  increase  the  uncertainty
inherent  in  such  forward-looking  statements.  In  light  of the  significant
uncertainties inherent in the forward-looking  information included herein, such
information  should not be regarded as a representation  by the Company,  or any
other person, that the objectives or plans for the Company will be achieved.

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies named in a legal action being brought by North  Middleton  Township
in  Carlisle,  Pennsylvania,  the  owner  of a  landfill  allegedly  found to be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired the assets of P.R.  Hoffman  Machine  Products  Corporation in an asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any breaches of P.R.
Hoffman's  representations  and  warranties  in the  Asset  Purchase  Agreement,
including  representations relating to environmental matters. In accordance with
the terms of the Asset Purchase  Agreement,  the Company has provided  notice to
the prior owner of P.R.  Hoffman Machine  Products  Corporation of the Company's
intent to seek  indemnification  from such owner for any  liabilities  resulting
from this legal action. Based on information  available to the Company as of the
date of this  report,  management  believes  the costs,  if any, to resolve this
matter will not be material to the Company's  results of operations or financial
position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

     None.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

     (a)  Exhibits

          None.

     (b)  Reports on Form 8-K

          None.

                                       18

                                   SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

AMTECH SYSTEMS, INC.


By /s/ Robert T. Hass                             Dated: August 14, 2001
   ------------------------------------------            -----------------------
   Robert T. Hass, Vice-President-Finance and
   (Chief Financial and Accounting Officer)

                                       19