SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            SCHEDULE 14A INFORMATION

                Proxy Statement Pursuant to Section 14(a) of the
                         Securities Exchange Act of 1934

Filed by the Registrant [X]
Filed by a Party other than the Registrant [ ]

Check the appropriate box:
[ ]  Preliminary Proxy Statement           [ ]  Confidential, For Use of the
[X]  Definitive Proxy Statement                 Commission Only (as permitted
[ ]  Definitive Additional Materials            by Rule 14a-6(e)(2))
[ ]  Soliciting Material Pursuant to
     Rule 14a-11(c) or Rule 14a-12


                              AMTECH SYSTEMS, INC.
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                (Name of Registrant as Specified In Its Charter)

- --------------------------------------------------------------------------------
    (Name of Person(s) Filing Proxy Statement, if Other Than the Registrant)

Payment of Filing Fee (Check the appropriate box):
[X]  No fee required.
[ ]  Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

1)   Title of each class of securities to which transaction applies:

- --------------------------------------------------------------------------------
2)   Aggregate number of securities to which transaction applies:

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3)   Per unit price or other underlying value of transaction  computed  pursuant
     to Exchange  Act Rule 0-11 (set forth the amount on which the filing fee is
     calculated and state how it was determined):

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4)   Proposed maximum aggregate value of transaction:

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5)   Total fee paid:

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[ ] Fee paid previously with preliminary materials:

[ ] Check box if any part of the fee is offset as provided  by  Exchange  Act
    Rule  0-11(a)(2)  and identify the filing for which the  offsetting fee was
    paid  previously.  Identify the previous filing by  registration  statement
    number, or the form or schedule and the date of its filing.

    1)   Amount previously paid:
                                ------------------------------------------
    2)   Form, Schedule or Registration Statement No.:
                                                      --------------------
    3)   Filing Party:
                      ----------------------------------------------------
    4)   Date Filed:
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                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281

                                   ----------

                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                          TO BE HELD ON MARCH 29, 2002

                                   ----------

Dear Shareholder:

     The 2002 Annual Meeting of Shareholders of AMTECH SYSTEMS, INC., an Arizona
corporation (the  "Company"),  will be held at the Hilton Phoenix Airport Hotel,
2435 South 47th Street,  Phoenix,  Arizona,  on March 29,  2002,  at 10:00 a.m.,
Mountain Standard Time, for the following purposes:

     1.   To elect five (5) directors to serve for one-year terms;

     2.   To approve an  amendment  to the  Company's  1998 Stock Option Plan to
          increase  the  aggregate  number  of  shares  available  for  issuance
          thereunder from 300,000 to 500,000;

     3.   To  transact  any other  business  as may  properly  come  before  the
          meeting.

     The  foregoing  items of  business  are more fully  described  in the Proxy
Statement  accompanying this notice.  The Company is presently aware of no other
business to come before the Annual Meeting.

     The Board of Directors has fixed the close of business on January 31, 2002,
as the record date (the "Record  Date") for the  determination  of  shareholders
entitled  to  notice  of and to  vote  at the  meeting  or any  postponement  or
adjournment  thereof.  Shareholders  are  reminded  that their shares of Company
common stock can be voted at the meeting only if they are present at the meeting
in person or by valid proxy. A copy of the Company's  2001 Annual Report,  which
includes our audited financial statements, was mailed with this Notice and Proxy
Statement to all shareholders of record on the Record Date.

     Management  of the  Company  cordially  invites  you to attend  the  Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing proposals and the reasons why the Board of Directors
encourages you to vote for approval of such proposals.

                                        By Order of the Board of Directors

                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary
Tempe, Arizona
February 1, 2002

IMPORTANT:  IT IS  IMPORTANT  THAT YOUR  SHAREHOLDINGS  BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.

                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281

                                 PROXY STATEMENT


     This Proxy  Statement is being furnished to shareholders of Amtech Systems,
Inc.,  an  Arizona   corporation  (the   "Company"),   in  connection  with  the
solicitation  of proxies by the Board of  Directors  for use at the 2002  Annual
Meeting of  Shareholders  of the Company to be held on March 29, 2002,  at 10:00
a.m.,  Mountain Standard Time, and any adjournment or postponement  thereof (the
"Annual  Meeting").  A copy of the Notice of the Meeting  accompanies this Proxy
Statement.  This Proxy Statement and the accompanying  form of Proxy were mailed
to  shareholders  entitled to vote at the Annual Meeting on or about February 1,
2002.

STOCKHOLDERS ENTITLED TO VOTE

     Only  shareholders  of record at the close of  business on January 31, 2002
(the "Record Date"), are entitled to notice of and to vote at the Annual Meeting
and at any and all adjournments or  postponements of the meeting.  On the Record
Date,  2,650,921  shares of common stock,  $.01 par value (the "Common  Stock"),
were  issued and  outstanding.  Except as set forth  below  with  respect to the
ability to cumulate votes for directors, each share of Common Stock entitles its
owner to one vote.  The holders of a majority of shares  entitled to vote at the
meeting must be present in person or represented by proxy in order to constitute
a quorum for all matters to come before the meeting.

HOW TO ATTEND THE MEETING

     If you are a  shareholder  of record,  which  means you hold your shares in
your name, you may attend the meeting.  If you own shares in the name of a bank,
broker  or other  holder of record  ("street  name"),  you will need to ask your
broker or bank for a copy of the proxy they  received  from us. You will need to
bring the proxy with you to the meeting.

HOW TO VOTE

     If you are a shareholder of record,  you may vote by mail or in person.  To
vote by mail, sign, date and return your proxy card in the enclosed postage-paid
envelope.  All valid proxies  received before the Annual Meeting and not revoked
will be  exercised.  If you sign and  return  your proxy  card,  but do not give
voting  instructions  and authority to vote is not  specifically  withheld,  the
shares  represented  by that proxy will be voted as  recommended by the Board of
Directors. If you have specified a choice with respect to any matter to be acted
upon, the shares will be voted in accordance with the specifications so made.

     All  stockholders may vote in person at the meeting (unless they are street
name holders  without a legal proxy).  If your shares are held in a street name,
you will receive  instructions from the holder of record that you must follow in
order for your shares to be voted.

     We are not aware of any other matters to be presented at the Annual Meeting
except those described in this Proxy  Statement.  However,  if any other matters
not described in the Proxy Statement are properly presented at the meeting,  the
Proxies will use their own judgment to determine how to vote your shares. If the
meeting is  adjourned,  your Common Stock may be voted by the proxies on the new
meeting date as well, unless you have revoked your proxy  instructions  prior to
that time.

VOTING CHOICES

     For each of the proposals you may vote one of the following ways:

     1.   For the proposal
     2.   Against the proposal
     3.   Abstain from voting

     Proxies that are signed and returned with no instructions will be voted FOR
election of all  Director  nominees and FOR the proposal to approve an amendment
to the  Company's  1998 Stock  Option Plan to increase the  aggregate  number of
shares available for issuance under the Plan from 300,000 to 500,000.

CHANGING YOUR VOTE

     You may  change  your vote at any time  before  the proxy is  exercised.  A
shareholder can revoke a proxy by:

     *    Delivering  to  our  corporate   Secretary  a  written  instrument  of
          revocation bearing a date later than the date of the proxy.

     *    Duly  executing  and  delivering  to our  corporate  Secretary a proxy
          relating to the same shares bearing a later date.

     *    Voting  by  ballot  at the  meeting,  provided  that  the  shareholder
          notifies the  Secretary of the meeting of his or her intention to vote
          in person at any time prior to the voting of the proxy.

HOW VOTES ARE COUNTED

     Inspectors of election will be appointed for the meeting. The inspectors of
election  will  determine  whether or not a quorum is present and will  tabulate
votes cast by proxy or in person at the  Annual  Meeting.  If you have  returned
valid proxy instructions or attend the meeting in person, your Common Stock will
be counted for the purpose of determining whether there is a quorum. If a broker
indicates  on the  proxy  that it does not have  discretionary  authority  as to
certain  shares  to  vote on a  particular  matter,  those  shares  will  not be
considered  as  present  and  entitled  to vote  with  respect  to that  matter.
Abstentions and broker  non-votes will be included in the  determination  of the
number of shares represented for a quorum.

COST OF THIS PROXY SOLICITATION

     We will  pay the  cost of  preparing  and  mailing  the  Notice  and  Proxy
Statement,  including  the charges and  expenses of brokerage  firms,  banks and
others who  forward  solicitation  material to  beneficial  owners of the Common
Stock.  We will  solicit  proxies  by mail.  Proxies  may also be  solicited  by
officers and  directors of the Company  personally or by telephone or facsimile,
without  additional   compensation.   Computershare  will  serve  as  our  proxy
solicitation  agent.  In  such  capacity,   Computershare  will  coordinate  the
distribution of proxy materials to beneficial owners of Common Stock and oversee
the return of proxy cards. The fee for these services is estimated to be $1,600.

ANNUAL REPORT

     The  Company's  Annual  Report to  Shareholders  for the fiscal  year ended
September  30, 2001  ("Annual  Report")  has been mailed  concurrently  with the
mailing of the Notice of Annual Meeting and Proxy Statement to all  shareholders
entitled to notice of and to vote at the Annual  Meeting.  This Annual Report is
not  incorporated  into  this  Proxy  Statement  and  is  not  considered  Proxy
soliciting material.

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                 WHAT VOTE IS REQUIRED TO APPROVE EACH PROPOSAL?

Proposal 1:    Election of Five Directors    The five  nominees for director who
                                             receive  the  most  votes  will  be
                                             elected.   Cumulative   voting   is
                                             allowed   with   respect   to   the
                                             election of directors.

Proposal 2:    Amendment to 1998 Stock       The affirmative  vote of a majority
               Option Plan                   of  the  shares  of  Common   Stock
                                             present,  in person or by proxy, at
                                             the Annual Meeting will be required
                                             to approve  the  proposal  to amend
                                             the 1998 Stock Option Plan.

                                    PROPOSALS

                    PROPOSAL NO. 1 --- ELECTION OF DIRECTORS

NUMBER OF DIRECTORS TO BE ELECTED

     Our Board of Directors  currently  consists of five members.  Each Director
elected  will hold  office for one year or until his  successor  is elected  and
qualified.  If any director  resigns or otherwise is unable to complete his term
in office,  the Board will  elect  another  director  for the  remainder  of the
resigning director's term.

VOTE REQUIRED

     The five nominees  receiving the highest number of votes cast at the Annual
Meeting  will  be  elected.  There  is  cumulative  voting  in the  election  of
directors.  This means  that each  shareholder  present  at the Annual  Meeting,
either  in person or by  proxy,  will have an  aggregate  number of votes in the
election  of  directors  equal to five (the  number  of  persons  nominated  for
election as directors) multiplied by the number of shares of Common Stock of the
Company held by such  shareholder  on the Record Date.  The resulting  aggregate
number of votes may be cast by the  shareholder  for the  election of any single
nominee, or the shareholder may distribute such votes among any number or all of
the nominees.  The five nominees  receiving the highest  number of votes will be
elected to the Board of Directors.

NOMINEES OF THE BOARD

     The Board of  Directors  is  responsible  for  supervision  of the  overall
affairs of the Company.  The Board has nominated the  following  individuals  to
served on our Board of Directors for the following year:

                  Jong S. Whang
                  Robert T. Hass
                  Donald F. Johnston
                  Alvin Katz
                  Bruce R. Thaw

     All of these  nominees  are  currently  serving on the  Board.  Each of the
nominees has agreed to be named in this Proxy Statement and to serve if elected.
See below for information regarding each of the nominees listed above.

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     Your Directors recommend a vote FOR the election of the five nominees under
Proposal  No. 1. The Board of  Directors  intends  to vote its  proxies  for the
election of its nominees,  for a term to expire at the next Annual  Meeting.  In
that regard, the Board of Directors solicits authority to cumulate such votes.

     If any nominee should become unavailable for any reason, which the Board of
Directors  does not  anticipate,  the  proxy  will be voted  for any  substitute
nominee or nominees who may be selected by the Board of Directors prior to or at
the Annual  Meeting,  or, if no substitute is selected by the Board of Directors
prior to or at the Annual Meeting, for a motion to reduce the present membership
of the Board to the number of  nominees  available  and to create an  additional
vacancy to be filled by the Board of Directors.  The information  concerning the
nominees and their share  holdings in the Company has been  furnished by them to
the Company.

INFORMATION CONCERNING DIRECTORS AND OFFICERS

     The  following  table sets forth  information  regarding  the  officers and
directors   (who  are  also  director   nominees)  of  the  Company,   including
biographical data for at least the last five years.

     NAME                      AGE         POSITION WITH THE COMPANY
     ----                      ---         -------------------------
     Jong S. Whang             55          President, Chief Executive Officer
                                           and Director Vice President-Finance,
                                           Chief Financial Officer,
     Robert T. Hass            51          Treasurer, Secretary and Director
     Donald F. Johnston        73          Director
     Alvin Katz                71          Director
     Bruce R. Thaw             48          Director

     JONG S. WHANG has been President, Chief Executive Officer and a Director of
the  Company  since  its  inception  and was one of its  founders.  Mr.  Whang's
responsibilities  as  President  include  the  sales  effort  for the  Company's
semiconductor  equipment  business and  development of new products and business
opportunities in that industry.  He has twenty-eight  years of experience in the
semiconductor   industry,   including   time  spent  in  both   processing   and
manufacturing of equipment components and systems.  From 1973 until 1979, he was
employed by Siltronics,  Inc.,  initially as a technician  working with chemical
vapor deposition (CVD) and later as manager of the quartz fabrication plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to found the Company.

     ROBERT T. HASS has been Vice  President-Finance,  Chief Financial  Officer,
Treasurer and  Secretary of the Company since June 3, 1992.  Mr. Hass has served
as a Director of the Company since February 29, 1996.  From 1991 until May 1992,
he operated a financial  consulting  practice  under the name of Hass  Financial
Consulting  Services.  From  1985 to  1991,  Mr.  Hass  served  as  Director  of
Accounting  Services and then Controller for Lifeshares  Group,  Inc., a holding
company  that  owned  and  operated  real  estate   development   and  insurance
subsidiaries,  and from 1988 to 1991 served as Controller  and Chief  Accounting
Officer of some of Lifeshares Group's subsidiaries. From 1984 to 1985, he served
as Vice  President-Finance  and Treasurer of The Victorio  Company,  a privately
owned holding company which owned and operated agriculture, chemical, commercial
real estate  brokerage,  marketing  research and commodities  futures  brokerage
businesses.  From 1977 to 1984, he was employed in various capacities  including
Vice President,  Chief Financial  Officer and Treasurer by Altamil  Corporation,
then  a  public  company,   which  manufactures   truck  equipment,   wire-bound
containers,  and precision aluminum forgings. From 1972 to 1977, he was employed
as an auditor with Ernst & Ernst,  now known as Ernst & Young. He is a Certified
Public Accountant.

     DONALD F.  JOHNSTON has been a  non-employee  Director of the Company since
April 9, 1994,  and also served as a Director from March 1983 to December  1992.
From 1985 to March 1993, he served as President and Chief  Executive  Officer of
JAI,  Inc.,  a  management-consulting  firm.  From 1985 to March  1993,  when he
retired,  he acted as marketing  and  management  consultant to companies in the
electronics  industry.  From  November  1983 until  October  1985,  he served as
President  of  Process  Control,  Inc.  of Tempe,  Arizona.  He has held  senior

                                       4

management positions with Montgomery Ward & Co. and the Hotpoint Division of the
General  Electric  Company.  He has  also  served  as a  Vice-President  of B.F.
Goodrich,  Vice-President  of Marketing of the Philco Ford  Division of the Ford
Motor Company and Executive  Vice-President  of CTV. Mr. Johnston also served as
President and Chief Executive Officer of Mirco  Electronics,  Amstar Electronics
and Hera Investment Co.

     ALVIN  KATZ has been a Director  of the  Company  since May 1, 1995.  Since
1981,  he has been an adjunct  professor of business  management  at the Florida
Atlantic University in Boca Raton, Florida. From 1991 until the company was sold
in September 1992, he was Chief Executive Officer of Odessa Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976, Mr. Katz held various  managerial  position with United Parcel Service,
including  District  Manager  and  Corporate  Manager  of  Operations  Planning,
Research and Development. He is also a Director of Blimpie International, a fast
food  franchiser,  Nastech  Pharmaceutical  Company,  Inc., a company engaged in
research,  development and marketing of nasally delivered  pharmaceuticals,  and
President of BMAC, a biomedical  automation  company,  all of which are publicly
held corporations.

     BRUCE R. THAW has been a Director  of the  Company  since May 1, 1995.  Mr.
Thaw has been a practicing  attorney since 1978. Since 1995, Mr. Thaw has been a
self-employed  attorney, and from 1984 to 1995, he was a partner in the law firm
of  Abrams  &  Thaw.  Mr.  Thaw  is  also a  Director  of  Information  Resource
Engineering,  Inc., a publicly  traded  company that designs,  manufactures  and
markets   computer   network   security   systems  and  products,   and  Nastech
Pharmaceutical  Company,  Inc.  Mr. Thaw does not render  legal  services to the
Company.

                   PROPOSAL NO. 2 --- APPROVAL OF AMENDMENT TO
                   AMTECH SYSTEMS, INC. 1998 STOCK OPTION PLAN

GENERAL

     At the Annual  Meeting,  the Company will seek  shareholder  approval of an
amendment to the  Company's  Stock Option 1998 Plan (the "Plan") to increase the
number of shares authorized for issuance under the Plan from 300,000 to 500,000.
The Board of Directors  has approved the  amendment to the Plan and has directed
that the  amendment be submitted as a proposal for  shareholder  approval at the
Annual Meeting.  The Plan was originally adopted in January 1998. As of the date
of this Proxy Statement, an aggregate of 283,750 options have been granted under
the Plan.

AMENDMENT TO THE PLAN

     In December 2001, the Board of Directors  reviewed the options remaining in
the option pool for the Plan and  determined it was  appropriate to increase the
number  of shares  authorized  for  issuance  thereunder.  Therefore,  the Board
adopted  an  amendment  to the Plan that  would  increase  the  number of shares
authorized  for  issuance  under the Plan from  300,000  to  500,000.  The Board
believes that such increase is required to give the Company the ability to grant
additional options to new and existing employees. The Plan is designed to induce
persons  of  outstanding  ability  and  potential  to join and  remain  with the
Company,  by  encouraging,  motivating  and enabling  employees to acquire stock
ownership in the Company,  and by providing the participating  employees with an
additional  incentive to promote the success of the Company through the grant of
options to purchase shares of the Company's Common Stock.

SUMMARY OF THE PLAN

     The following  summary of the Plan does not purport to be complete,  and is
subject to and qualified in its entirety by reference to the text of the Plan.

     ADMINISTRATION.  The Plan is  administered by the Board of Directors of the
Company or a Committee appointed by the Board of Directors (hereinafter referred
to as the "Board").  The Board has full authority,  subject to the provisions of
the Plan,  to award  incentive  stock  options and  nonstatutory  stock  options
"Options").  Subject to the provisions of the 1998 Plan, the Board determines in
its sole discretion,  among other things,  the persons to whom from time to time
Options may be granted  ("Participants"),  the number of shares  subject to each

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Option,  exercise prices under the Options,  any  restrictions or limitations on
such Option including  vesting,  exchange,  deferral,  surrender,  cancellation,
acceleration, termination, or forfeiture provisions related to such Options. The
interpretation  and  construction  by the  Board of any  provisions  of,  or the
determination  of any  questions  arising  under,  the 1998  Plan or any rule or
regulation  established by the Board pursuant to the 1998 Plan,  shall be final,
conclusive and binding on all persons interested in the Plan.

     SHARES SUBJECT TO THE PLAN.  The Plan currently  authorizes the granting of
Options the  exercise of which would allow up to a maximum of 300,000  shares of
the Common Stock to be acquired by the Participants of said Options. In order to
prevent the dilution or enlargement of the rights of the Participants  under the
Plan, the number of shares of Common Stock authorized by the Plan and the number
of shares subject to outstanding  options are subject to adjustment in the event
of any increase or decrease in the number of shares of outstanding  Common Stock
resulting from a stock  dividend,  stock split,  combination of shares,  merger,
reorganization, consolidation, recapitalization or other change in the corporate
structure affecting the Company's capital stock. If any Option granted under the
Plan is forfeited or terminated, the shares of Common Stock that were underlying
such Option shall again be available for distribution in connection with Options
subsequently granted under the Plan.

     ELIGIBILITY.  Subject to the provisions of the Plan, Options may be granted
to full-time employees of the Company or its subsidiaries.

     EFFECTIVE  DATE AND TERM OF PLAN.  The Plan was  approved by the  Company's
shareholders on March 20, 1998, and was deemed  effective  January 31, 1998, the
date on which it was adopted by the Board of Directors. No option may be granted
after  January  30,  2008.  The Plan will  terminate  ten (10)  years  after the
effective  date of the Plan,  subject to earlier  termination  by the Board.  No
Option may be granted  under the Plan after the  termination  date,  but Options
previously granted may extend beyond such date.

     NATURE OF OPTIONS. The Plan provides for the grant of options, which may be
non-qualified  options,  incentive  stock  options,  or any  combination  of the
foregoing.  In general,  options granted under the Plan are not transferable and
expire  eleven years after the date of grant (ten years in the case of incentive
stock  options).  The per share  exercise  price of an  incentive  stock  option
granted the Plan may not be less than the fair market  value of the Common Stock
on the date of grant. Incentive stock options granted to persons who have voting
control over 10% or more of the  Company's  capital stock are granted at 110% of
the fair market value of the  underlying  shares on the date of grant and expire
fie years after the date of grant.

     EXERCISE OF OPTIONS.  The Plan  provides the Board with the  discretion  to
determine when options granted  thereunder will become  exercisable.  Generally,
such options may be exercised  after a period of time  specified by the Board at
any time prior to expiration,  so long as the optionee  remains  employed by the
Company.  No option granted under the Plan is transferable by the optionee other
than by will or the  laws of  descent  and  distribution,  and  each  option  is
exercisable during the lifetime of the optionee only by the optionee.

     AGREEMENTS.  Options granted under the Plan will be evidenced by agreements
consistent  with the Plan in such form as the Board may  prescribe.  Neither the
Plan nor agreements thereunder confer any right to continued employment upon any
Participant.

     AMENDMENTS TO THE PLAN.  The Board may at any time,  and from time to time,
amend,  modify or terminate any of the provisions of the Plan, but no amendment,
modification  or  termination  shall be made which would  impair the rights of a
Participant under any agreement  theretofore  entered into pursuant to an Option
grant, without the Participant's consent.

     FEDERAL  INCOME  TAX  CONSIDERATIONS.  The  discussion  that  follows  is a
summary,  based upon current law, of some of the significant  federal income tax
considerations  relating to awards under the Plan. The following discussion does
not address state, local or foreign tax consequences.

     A Participant in the Plan will not recognize  taxable income upon the grant
or exercise of an incentive stock option except under certain circumstances when
the exercise price is paid with  already-owned  shares of Common Stock that were
acquired  through the previous  exercise of an incentive stock option.  However,
upon the exercise of an incentive  stock  option,  the excess of the fair market

                                       6

value of the shares  received on the date of exercise over the exercise price of
the  shares  will be  treated  as a tax  preference  item  for  purposes  of the
alternative  minimum tax. In order for the exercise of an incentive stock option
to qualify for the foregoing tax treatment, the Participant generally must be an
employee  of the Company  from the date the  incentive  stock  option is granted
through the date three months before the date of exercise, except in the case of
death or disability, where special rules apply. The Company will not be entitled
to any  deduction  with respect to the grant or exercise of an  incentive  stock
option.

     If shares  acquired  upon  exercise of an  incentive  stock  option are not
disposed of by the Participant within two years from the date of grant or within
one year after the transfer of such shares to the Participant  (the "ISO Holding
Period"),  then (i) no amount will be reportable as ordinary income with respect
to such shares by the  Participant or recipient and (ii) the Company will not be
allowed a deduction in connection with such incentive stock option or the Common
Stock acquired pursuant to the exercise of the incentive stock option. If a sale
of such Common Stock occurs after the ISO Holding  Period has expired,  then any
amount  recognized  in excess of the  exercise  price  will be  reportable  as a
long-term  capital gain, and any amount recognized below the exercise price will
be reportable as a long-term  capital loss. The exact amount of tax payable on a
long-term  capital  gain will depend upon the tax rates in effect at the time of
the sale. The ability of a Participant to utilize a long-term  capital loss will
depend upon the Participant's other tax attributes and the statutory limitations
on capital loss deductions not discussed  herein. To the extent that alternative
minimum taxable income was recognized on exercise of the incentive stock option,
the basis in the Common Stock acquired may be higher for determining a long-term
capital gain or loss for alternative minimum tax purposes.

     A "disqualifying disposition" will result if Common Stock acquired upon the
exercise  of an  incentive  stock  option  (except  in  the  circumstances  of a
decedent's  incentive  stock option as  described  below) is sold before the ISO
Holding  Period  has  expired.  In such  case,  at the  time of a  disqualifying
disposition  (except  in  the  case  if a  Participant  subject  to  Section  16
restrictions of the 1934 Act, as noted below),  the  Participant  will recognize
ordinary  income in the amount of the difference  between the exercise price and
the  lesser of (i) the fair  market  value on the date of  exercise  or (ii) the
amount realized on disposition.  If the amount realized on the sale is less than
the exercise price, then the Participant will recognize no ordinary income,  and
the  recognized  loss will be  reportable  as a  short-term  capital  loss.  The
Participant will report as a short-term capital gain, as applicable,  any amount
recognized  in excess of the fair market value on the date of exercise,  and the
Company will be allowed a deduction on its federal income tax return in the year
of the disqualifying  disposition equal to the ordinary income recognized by the
Participant.   To  the  extent  that  alternative  minimum  taxable  income  was
recognized  on exercise of the incentive  stock option,  the basis in the Common
Stock acquired may be higher for  determining a short-term  capital gain or loss
for alternative minimum tax purposes.

     The general rules discussed above are different if the Participant disposes
of the shares of Common Stock in a disqualifying disposition in which a loss, if
actually  sustained,  would not be  recognized by the  Participant.  Examples of
these dispositions  include gifts or sales to related parties such as members of
the  Participant's  family and corporations or entities in which the Participant
owns a majority equity interest.  In such  circumstances,  the Participant would
recognize  ordinary income equal to the difference between the exercise price of
the Common  stock and the fair market  value of the Common  Stock on the date of
exercise.  The amount of  ordinary  income  could not be limited by the price at
which the Common Stock was actually sold by the Participant.

     If the  Participant  retires or otherwise  terminates  employment  with the
Company,  other than by reason of death or permanent  and total  disability,  an
incentive stock option must be exercised within three months of such termination
in order to be eligible for the tax  treatment of the  incentive  stock  options
described  above,  provided the ISO Holding  Period  requirements  are met. If a
Participant  terminates  employment because of a permanent and total disability,
the  incentive  stock  option  will be  eligible  for  such  treatment  if it is
exercised within one year of the date of termination of employment, provided the
ISO Holding Period requirements are met. In the event of a Participant's  death,
the incentive  stock option will be eligible for such  treatment if exercised by
the Participant's legatees,  personal representatives or distributees within one
year  from  the date of  death,  provided  that the  death  occurred  while  the
Participant  was  employed,  within three months of the date of  termination  of
employment or within one year  following the date of  termination  of employment
because of permanent and total disability.

     In general,  a Participant  to whom a  nonqualified  option is granted will
recognize  no  taxable  income  at the time of the  grant.  Upon  exercise  of a
nonqualified option, the Participant will recognize ordinary income in an amount
equal to the amount by which the fair  market  value of the Common  Stock on the

                                       7

date of exercise exceeds the exercise price of the nonqualified  option, and the
Company will generally be entitled to a deduction  equal to the ordinary  income
recognized by the  Participant in the year the participant  recognizes  ordinary
income, subject to the limitations of Section 162(m) of the Code.

     For purposes of the  "alternative  minimum tax"  applicable to individuals,
the exercise of an  incentive  stock option is treated in the same manner as the
exercise of a  nonqualified  option.  Thus, a  Participant  must, in the year of
option exercise,  include the difference between the exercise price and the fair
market value of the stock on the date of exercise in alternative minimum taxable
income. The alternative minimum tax is imposed upon an individual's  alternative
minimum taxable income  currently,  but only to the extent that such tax exceeds
the taxpayer's regular income tax liability for the taxable year.

     The Company is required to withhold certain income taxes from  Participants
upon  exercises  of  nonqualified  options.  The  Company  will be entitled to a
business expense  deduction for both financial  statement and federal income tax
purposes equal to the ordinary income  recognized by the Participant in the year
the  Participant  recognizes  ordinary  income from the exercise of nonqualified
options.

     In  addition  to the  foregoing  federal tax  consequences,  the  exercise,
ultimate sale or other disposition of options by Participants will in most cases
be subject to state income taxation.

VOTE REQUIRED

     Assuming a quorum is present at the Annual Meeting, the affirmative vote of
the holders of a majority of the shares  present,  in person or by proxy, at the
Annual Meeting, is required to approve the proposed amendment to the Plan.

THE BOARD OF DIRECTORS  RECOMMENDS AND ENCOURAGES YOU TO VOTE "FOR" THE APPROVAL
OF THE AMENDMENT TO THE PLAN.

INFORMATION ABOUT BOARD AND COMMITTEE MEETINGS AND DIRECTOR COMPENSATION

     The Board of Directors held four (4) meetings  during fiscal 2001.  Overall
attendance at Board and committee  meetings was 100%,  with the exception of Mr.
Katz who attended 50% of the Audit Committee meetings held while he was a member
of such  committee.  In the interim between Annual  Meetings,  the Board has the
authority  under the  Company's  Bylaws to increase or decrease  the size of the
Board and fill vacancies.

     The Audit Committee,  the Compensation and Option Committee and the Finance
Committee  are  the  standing  committees  of  the  Board  of  Directors.  These
committees are comprised as follows:

                                    COMPENSATION
          AUDIT                      AND OPTION                   FINANCE
          -----                      ----------                   -------
         A. Katz                   D.F. Johnston                  A. Katz
        B. R. Thaw                    A. Katz                   B. R. Thaw
      D.F. Johnston

     The Audit Committee held five (5) meetings during the 2001 fiscal year. The
Audit Committee is responsible for maintaining  communication between the Board,
the  Company's  independent  auditors and members of financial  management  with
respect to the  Company's  financial  affairs in  general,  including  financial
statements and audits,  the adequacy and effectiveness of the Company's internal
accounting  controls  and  systems  and the  retention  and  termination  of the
independent auditors.

     The Audit  Committee is composed of outside  directors who are not officers
or employees of the Company or its subsidiaries. In the opinion of the Board and
as  "independent" is defined under the standards of the New York Stock Exchange,
these directors are independent of management and free of any relationship  that

                                       8

would  interfere with their exercise of independent  judgment as members of this
committee.

     The  Compensation  and Option  Committee held three (3) meetings during the
2001 fiscal year. The Compensation  and Option  Committee makes  recommendations
concerning officer compensation, employee benefit programs and retirement plans.

     The Finance  Committee  held two (2) meetings  during the 2001 fiscal year.
The Finance  Committee is responsible for  communication  between the Board, the
Company's  lender or  prospective  lender(s)  and other  financial  sources  and
members of financial management.

     All current  committee members are expected to be nominated for re-election
at a Board meeting to be held following the Annual Meeting of Shareholders.

DIRECTORS' COMPENSATION

     Directors who are full-time  employees of the Company receive no additional
compensation  for serving as  directors.  Directors who are not employees of the
Company  receive an annual retainer of $6,000 and fees of $700 per Board meeting
attended  and $250 per  committee  meeting  attended.  In  addition,  under  the
Company's  Non-Employee  Directors  Stock  Option Plan,  each  outside  director
receives an annual grant of options to purchase  5,000  shares of Common  Stock.
The  exercise  price of the options is the fair market  value of Common Stock on
the  date  of  grant  and  each  option  has a term  of ten  years  and  becomes
exercisable in three equal  installments  commencing on the first anniversary of
the  date  of  grant  and  continuing  for  the  two  successive   anniversaries
thereafter.  In the event of disability  (as defined in the plan) or death of an
outside director,  all options remain  exercisable for a period of twelve months
following the date such person  ceased to be a director,  but only to the extent
such option was exercisable on the date the director ceased to be a director. In
addition,  Mr.  Katz and Mr. Thaw earned  $16,500 and $1,000,  respectively,  in
consulting  fees  related  to  projects  performed  on  behalf  of  the  Finance
Committee.

COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

     The Compensation  and Option Committee is composed of Messrs.  Johnston and
Katz, neither of whom is an officer or employee of the Company.

                             EXECUTIVE COMPENSATION

     The following table sets forth  information  regarding annual and long-term
compensation for services  rendered to the Company during the fiscal years ended
September 30, 2001, 2000 and 1999 by the Company's  Chief Executive  Officer and
the other most highly compensated  executive officer of the Company who received
annual compensation  exceeding $100,000 during such periods  (collectively,  the
"Named Executive Officers").

                           SUMMARY COMPENSATION TABLE



                                                                  LONG-TERM
                                     ANNUAL COMPENSATION (1)     COMPENSATION
                                    -------------------------    ------------
    NAME AND              FISCAL                 OTHER ANNUAL     RESTRICTED        ALL OTHER
PRINCIPAL POSITION         YEAR     SALARY (2)     BONUS (3)     COMPENSATION     STOCK AWARDS     COMPENSATION (4)
- ------------------         ----     ----------     ---------     ------------     ------------     ----------------
                                                                                   
Jong S. Whang              2001     $168,044       $ 69,397           --               --             $ 16,656
President and Chief        2000      175,817        122,622           --               --             $  1,242
Executive Officer          1999      139,200         12,292           --               --                   --

Robert T. Hass             2001      111,059       $  1,468                            --             $  2,911
Vice President-            2000       99,750          9,500           --               --                  615
Finance                    1999       85,500             --           --               --                   --


                                       9

- ----------
(1)  Neither executive officer named in the Summary  Compensation Table received
     personal benefit  prerequisite in excess of the lesser of $50,000 or 10% of
     their aggregate salary and bonus.

(2)  For  fiscal  1999,  Mr.  Whang  voluntarily  reduced  his  salary by 20% to
     $130,200.  Effective  October 4, 1999, Mr. Whang's base salary was restored
     to that  specified in his February  1997  employment  agreement.  Effective
     March 15, 2001, Mr. Whang entered into a new five year employment agreement
     with the  Company  and  received  an  increase in his annual base salary to
     $188,402.  For fiscal 2000, this column  includes an accrued  retrospective
     salary  increase of $14,250.  As of April 1, 2001,  Mr.  Whang  voluntarily
     reduced  his salary by 20% to $150,722  per year and Mr.  Hass  voluntarily
     reduced his salary by 15% to $102,000 per year.

(3)  See  "Employment  Agreements"  below for a description  of how Mr.  Whang's
     incentive  compensation is determined.  The amount reflected in this column
     in fiscal 2000 for Mr. Whang includes a discretionary  bonus of $32,550, in
     addition to the $89,716 in incentive compensation earned by Mr. Whang under
     his February 1997 employment agreement.

(4)  Amounts  for  Mr.   Whang  and  Mr.  Hass   consist  of  Company   matching
     contributions  in the Amtech Systems,  Inc. 401(k) Plan. The amount for Mr.
     Whang includes a payment made in lieu of vacation.

OPTION GRANTS

     The following  table  contains  information  regarding  stock option grants
during the 2001 fiscal year to the Named Executive Officers.

                       OPTIONS GRANTS IN LAST FISCAL YEAR



                                               INDIVIDUAL GRANTS
                       ---------------------------------------------------------------
                       SECURITIES     % OF TOTAL                 STOCK                      POTENTIAL REALIZABLE VALUE
                       UNDERLYING      OPTIONS                  PRICE ON                  AT ASSUMED ANNUAL RATES OF STOCK
                        OPTIONS       GRANTED TO     EXERCISE    DATE OF                        PRICE APPRECIATION
                        GRANTED       EMPLOYEES        PRICE      GRANT     EXPIRATION          FOR OPTION TERM (4)
    NAME                  (#)       IN FISCAL 2001   ($/SHARE)  ($/SHARE)      DATE        0%         5%            10%
    ----                -------     --------------   ---------  ---------      ----      -----     --------     ----------
                                                                                         
Jong S. Whang           150,000(1)       61.5%        $6.53(3)    $6.53       3/14/11     -0-      $616,002     $1,561,071
Robert T. Hass           25,000(2)       10.3%        $5.88(3)    $5.88       3/15/11     -0-      $ 92,448     $  234,286


- ----------
(1)  All options  were granted to Mr. Whang on March 15, 2001 under the Company'
     s 1998 Stock Option Plan.  The options were granted  concurrently  with the
     execution of a new  employment  agreement with Mr. Whang in March 2001. The
     options granted become  exercisable as follows:  20% on March 15, 2002, and
     an additional 20% on each on-year anniversary thereafter. To the extent not
     already exercisable,  the options become immediately  exercisable upon: (i)
     the dissolution or liquidation of the Company or a  reorganization,  merger
     or consolidation in which all or  substantially  all prior  shareholders do
     not continue to own more than 60% of the outstanding shares of common stock
     and voting  securities;  (ii) the sale of all or  substantially  all of the
     assets of the Company;  or (iii) the  occurrence  of a change in control of
     the Company.

(2)  All options were granted to Mr. Hass on March 16, 2001 under the applicable
     Stock Option Plan. The options granted become  exercisable as follows:  20%
     on  March  16,  2001 and an  additional  20% on each  one-year  anniversary
     thereafter.

(3)  The exercise price was set at 100% of closing price of the Company's Common
     Stock on grant day (March 15,  2001 for  options  granted to Mr.  Whang and
     March 16, 2001 for options  granted to Mr. Hass), as reported on the NASDAQ
     National Market.

(4)  Reflects  the value of the stock  option on the date of grant  assuming (i)
     for the 0% column,  no  appreciation  in the Company's stock price from the
     date of grant over the term of the option,  (ii) for the 5% column,  a five
     percent annual rate of  appreciation  in the Company's stock price over the
     term of the option, and (iii) for the 10% column, a ten percent annual rate
     of  appreciation  in the Company's stock price over the term of the option,
     in each case without any discounting to present value. The actual gains, if

                                       10

     any, on stock option exercises are dependent upon the future performance of
     the Company's  Common  Stock.  Accordingly,  the amounts  reflected in this
     table may not necessarily be indicative of the actual results obtained.

OPTION EXERCISES

     There were no exercises of stock  options  during fiscal 2001 by any of the
Named Executive Officers.

EMPLOYMENT AND SEVERANCE AGREEMENTS

     On March 15,  2001,  the Company  entered  into a five (5) year  employment
agreement with its President, Jong S. Whang, which agreement replaced an earlier
agreement  entered into in February 1997. Under the terms of the agreement,  Mr.
Whang is  entitled  to an  annual  base  salary  of  $188,402,  and base  salary
increases of at least 5% to be  determined  by the Board of Directors at the end
of each year of the  agreement.  Mr.  Whang is also  entitled to receive  annual
incentive cash compensation of up to 50% of his base salary, based on the follow
criteria:  (i) a bonus equal to 2% of the annual  earnings of the Company before
taxes and  extraordinary  items,  and (ii) a bonus  equal to 2% of the amount by
which the  revenues of the Company for the  applicable  fiscal year exceeds such
revenues for the previous  fiscal  year.  In addition,  Mr. Whang was granted an
option to purchase  150,000  shares of Common Stock  pursuant to the  agreement.
These  options  were  granted on March 15,  2001 and vest at the rate of 20% per
full  year of  service  over a  five-year  period.  To the  extent  not  already
exercisable,   the  options  become   immediately   exercisable  upon:  (i)  the
dissolution  or  liquidation  of the  Company  or a  reorganization,  merger  or
consolidation  in which  all or  substantially  all  prior  shareholders  do not
continue to own more than 60% of the then outstanding shares of Common Stock and
voting  securities,  (ii) the sale of all or substantially  all of the assets of
the Company,  or (iii) the  occurrence  of a change in control of the Company as
discussed in the  agreement.  The agreement  also contains  confidentiality  and
non-compete provisions. Mr. Whang is also entitled to participate in any benefit
plans generally available to employees of the Company.  Finally,  the Company is
required to purchase a $250,000 life insurance  policy on the life of Mr. Whang,
with his spouse as the beneficiary of such policy. To date, Mr. Whang has waived
the Company's compliance with the latter requirement.

SEVERANCE AND CHANGE OF CONTROL PROVISIONS

     If Mr.  Whang is  terminated  other than for "cause" or he  terminates  his
employment  for "good  reason"  (as such  terms are  defined  in his  employment
agreement),  he is  entitled  to  receive as  severance  pay  salary,  incentive
compensation  and  vacation  accrued  through the date of  termination  plus the
following: (i) an amount equal to two years of Mr. Whang's base salary in effect
on the  termination  date;  (ii) a pro-rated  portion of the amount of incentive
compensation  Mr. Whang would earn for the fiscal year in which the  termination
occurs if the  results of  operations  of the  Company  for the period  from the
beginning of such fiscal year to the  termination  date were  annualized;  (iii)
full vesting of all stock options  issued under the  employment  agreement;  and
(iv) vesting of a pro-rated  portion of the number of stock  options which would
have vested for the fiscal year in which the termination occurs.

     Mr.  Whang's  employment  agreement  also provides for benefits  should his
employment with the Company be terminated  following a change in control. If Mr.
Whang's  employment with the Company is terminated within one year following the
occurrence  of a change of control,  either by the Company for any reason  other
than for cause or by Mr. Whang for good reason,  we would be required to pay him
a lump sum  payment  equal to three years of his annual base salary in effect on
the termination date and the maximum amount of incentive  compensation  which he
could  earn for the  fiscal  year in  which  the  termination  date  occurs.  In
addition, all stock options held by him but not vested would vest immediately.

                        REPORT OF COMPENSATION COMMITTEE

     The  Compensation  and Option Committee of the Company's Board of Directors
(the "Committee), which is composed entirely of independent,  outside directors,
establishes  the general  compensation  policies  of the  Company  and  specific
compensation  for each executive  officer of the Company,  and  administers  the
Company's  stock  option  program.   The  Committee's  intent  is  to  make  the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective

                                       11

incentives to motivate and reward Company executives for achieving the financial
and strategic goals of the Company essential to the Company's  long-term success
and growth in shareholder value. The Company's  executive  compensation  package
consists of three main components: base salary, incentive cash bonuses and stock
options.

BASE COMPENSATION

     The Committee's  approach is to offer executives salaries  competitive with
those of other executives in the industry in which the Company operates. To that
end, the  Committee  evaluates the  competitiveness  of its base salary based on
information drawn from a variety of sources, including published and proprietary
survey  data  and  the  Company's  own   experience   recruiting  and  retaining
executives,   although  complete  information  is  not  easily  obtainable.  The
Company's  base salary  levels are intended to be  consistent  with  competitive
practice  and  level  of  responsibility,   with  salary  increases   reflecting
competitive  trends,  the overall  financial  performance of the Company and the
performance of the individual executive.

BONUSES

     In  addition  to  base  salary,   executives  are  eligible  to  receive  a
discretionary annual bonus. At the beginning of each year, the Committee and the
Chief  Executive  Officer (the "CEO")  review each  individual  executive's  job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the  Company.  In  addition,  for all  executives,  the  Committee  reviews  the
Company's  actual  financial   performance   against  its  internally   budgeted
performance in determining year-end bonuses, if any. However, the Committee does
not set  objective  performance  targets for  executives  other than the CEO and
sales and marketing personnel.

STOCK OPTION AND RESTRICTED STOCK GRANTS

     The  Company,  from  time to time,  grants  stock  options  and  shares  of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  Grants of stock options and
restricted stock are designed to align the executive's interest with that of the
shareholders  of the Company.  In awarding  option  grants,  the Committee  will
consider,  among other things, the amount of stock and options presently held by
the executive,  the  executive's  past  performance and  contributions,  and the
executive's anticipated future contributions and responsibilities.

2001 CEO COMPENSATION

     The CEO's annual base salary  increased in March of fiscal 2001 to $188,402
from  $179,400  in fiscal  2000,  pursuant  to the  terms of the March 15,  2001
employment  agreement  entered  into by the  Company  and  the  CEO.  The  CEO's
increased base salary is based upon the compensation of executives in comparable
positions in the  semiconductor  industry,  adjusted for the size of the Company
(total assets and revenues).

     In connection  with the execution of Mr. Whang's new employment  agreement,
the Board of  Directors  approved an  incentive  compensation  plan for the CEO,
which provides for an annual cash bonus equal to 2% of the annual earning of the
Company before taxes and extraordinary items; plus 2% of the amount by which the
revenues of the Company in an  applicable  fiscal year exceed such  revenues for
the previous  fiscal  year.  The total of such cash bonuses is limited to 50% of
Mr. Whang's base salary for the  applicable  fiscal year. The CEO earned a bonus
of $69,397 in 2001  pursuant  to such  incentive  compensation  plan.  The CEO's
employment  agreement with the Company  incorporates the incentive  compensation
plan described above. See "Employment and Severance Agreements," above.

                                        RESPECTFULLY SUBMITTED,

                                        Donald F. Johnston
                                        Alvin Katz

                                       12

                             AUDIT COMMITTEE REPORT

     In accordance with its written charter adopted by the Board of Directors on
June 1, 2000, a copy of which was attached as an exhibit to the  Company's  2001
Annual Meeting Proxy Statement, the Audit Committee is responsible for reviewing
and discussing the audited financial statements with management, discussing with
the Company's auditors information relating to the auditors' judgments about the
quality of the Company's  accounting  principles,  recommending  to the Board of
Directors that the Company  include the audited  financials in its Annual Report
on Form  10-K  and  overseeing  compliance  with  the  Securities  and  Exchange
Commission requirements for disclosure of auditors' services and activities.

REVIEW OF AUDITED FINANCIAL STATEMENTS

     The Audit Committee has reviewed the Company's audited financial statements
for the fiscal year ended  September  30, 2001,  as prepared by Arthur  Andersen
LLP, the  Company's  independent  auditors,  and has discussed  these  financial
statements with management.  In addition, the Audit Committee has discussed with
Arthur  Andersen  the matters  required to be discussed by Statement of Auditing
Standard 61 regarding the  codification  of  statements  on auditing  standards.
Furthermore,  the Audit  Committee has received the written  disclosures and the
letter  from  Arthur  Andersen  required  by the  Independence  Standards  Board
Standard No. 1 and has discussed with Arthur Andersen its independence.

RECOMMENDATION

     Based  upon the  foregoing  review  and  discussion,  the  Audit  Committee
recommended to the Board of Directors that the audited financial  statements for
the fiscal  year ended  September  30, 2001 be filed with the  Company's  annual
report on Form 10-K.

                                        RESPECTFULLY SUBMITTED,


                                        Alvin Katz
                                        Bruce R. Thaw
                                        Donald F. Johnston


DISCLOSURE OF AUDIT AND NON-AUDIT FEES

AUDIT FEES

     The aggregate fees billed by Arthur Andersen LLP for professional  services
rendered for the audit of the  Company's  annual  financial  statements  for the
fiscal  year  ended  September  30,  2001 and for the  review  of the  financial
statements  included  in the  Company's  Quarterly  Reports on Form 10-Q for the
fiscal year were $182,000.

FINANCIAL INFORMATION SYSTEMS DESIGN AND IMPLEMENTATION FEES

     During  fiscal  2001,  the  Company did not engage its  independent  public
accountants to perform financial information systems design and implementation.

ALL OTHER FEES OF INDEPENDENT PUBLIC ACCOUNTANTS

     During  fiscal 2001,  all other fees of the  Company's  independent  public
accountants amounted to $11,385, which primarily consisted of accounting and tax
consultation services.

     The  Audit  Committee  of the Board of  Directors  considered  whether  the
provision of non-audit  services is consistent  with  maintaining  the auditor's
independence.

                                       13

         SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

     The  following  table  sets  forth  certain   information   concerning  the
beneficial  ownership of the  Company's  Common Stock as of January 21, 2002, by
(i) each director of the Company,  (ii) each  executive  officer of the Company,
including the Named  Executive  Officers,  and (iii) all executive  officers and
directors of the Company as a group.  To the Company's  knowledge,  there are no
persons known to the Company who  beneficially  own five percent (5%) or more of
the Company's  outstanding  Common Stock.  This  information  was  determined in
accordance  with  Rule  13d-3  under the  Securities  Exchange  Act of 1934,  as
amended,  and is based upon the  information  furnished  by the  persons  listed
below.  Except as otherwise  indicated,  each shareholder  listed possesses sole
voting and  investment  power with  respect  to the  shares  indicated  as being
beneficially owned.

                                           NUMBER OF SHARES         PERCENT OF
NAME AND ADDRESS (1)(2)                  BENEFICIALLY HELD (3)     OWNERSHIP (3)
- -----------------------                  ---------------------     -------------
  Jong S. Whang                                156,722(4)              5.8%
  Robert T. Hass                                 9,375(5)               *
  Donald F. Johnston                             7,292(6)               *
  Alvin Katz                                    81,667(7)              3.1%
  Bruce R. Thaw                                 17,667(7)               *
  Directors and Executive Officers of
    the Company as a group (5 persons)         272,723(8)             10.3%
  Robert Sussman                               202,500(9)              7.6%

- ----------
*    Less than 1%.

(1)  The  address for each  person  listed in this table is c/o Amtech  Systems,
     Inc., 131 South Clark Drive, Tempe, Arizona 85281.

(2)  Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is the
     Vice President-Finance, Chief Financial Officer, Treasurer, Secretary and a
     director. Messrs. Johnston, Katz and Thaw are presently directors.

(3)  The share amounts and percentages  shown include the shares of Common Stock
     actually  owned as of January 21, 2002, and the shares of Common Stock with
     respect to which the person had the right to acquire  beneficial  ownership
     within 60 days of such date pursuant to options or warrants.  All shares of
     Common Stock that the identified  person had the right to acquire within 60
     days of January 21,  2002,  upon the  exercise  of options or warrants  are
     deemed to be  outstanding  when  computing the percentage of the securities
     owned by such person,  but are not deemed to be outstanding  when computing
     the percentage of the securities owned by any other person. The amounts and
     percentages are based upon 2,650,921 shares of Common Stock  outstanding as
     of January 21, 2002.

(4)  Includes (i) 9,488 shares held  jointly  with Mr.  Whang's  spouse and (ii)
     72,267 shares issuable upon the exercise of presently  exercisable options;
     41,517 shares issuable at an exercise price of $1.126 per share; 750 shares
     issuable at an exercise price of $1.50 per share; and the balance of 30,000
     shares issuable at $6.53 per share.

(5)  Includes  9,250 shares  issuable  upon  exercise of  presently  exercisable
     options;  4,250 shares  issuable at an exercise  price of $1.126 per share;
     and the balance of 5,000 shares  issuable at an exercise price of $5.88 per
     share.

(6)  Includes  6,667 shares  issuable  upon  exercise of  presently  exercisable
     options;  3,000 shares  issuable at an exercise  price of $1.126 per share;
     2,000  shares  issuable at an exercise  price of $6.813 per share;  and the
     balance of 1,667 shares issuable at an exercise price of $5.88 per share.

                                       14

(7)  Includes  17,667 shares  issuable  upon  exercise of presently  exercisable
     options;  11,000 shares  issuable at an exercise price of $1.126 per share;
     3,000 shares issuable at an exercise price of $1.50 per share; 2,000 shares
     issuable at an exercise price of $6.813 per share; and the balance of 1,667
     shares issuable at an exercise price of $5.88 per share.

(8)  Includes  123,518  shares  issuable upon exercise of presently  exercisable
     options;  70,767 shares  issuable at an exercise price of $1.126 per share;
     6,750 shares issuable at an exercise price of $1.50 per share; 6,000 shares
     issuable at an exercise price of $6.813 per share;  30,000 shares  issuable
     at an exercise  price of $6.53 per share;  and the balance of 10,001 shares
     issuable at an exercise price of $5.88 per share.

(9)  Includes 2,500 shares jointly owned with Mr. Sussman's spouse.

COMPLIANCE WITH SECTION 16(A) OF THE SECURITIES EXCHANGE ACT OF 1934

     Section 16(a) of the Securities Exchange Act of 1934, as amended,  requires
the Company's directors and executive officers,  as well as persons beneficially
owning more than 10% of the Company's  outstanding Common Stock, to file certain
reports of ownership  with the Securities  and Exchange  Commission  (the "SEC")
within  specified time periods.  Such officers,  directors and  shareholders are
also  required by SEC rules to furnish  the  Company  with copies of all Section
16(a) forms they file.

     Based  solely  on its  review of such  forms  received  by it,  or  written
representations  from  certain  reporting  persons,  the Company  believes  that
between  October  1,  1999 and  September  30,  2000 all  Section  16(a)  filing
requirements  applicable to its officers,  directors and 10%  shareholders  were
complied  with,  except that  reports  were not timely filed with respect to the
automatic  option grant to directors  arising under the  Company's  Non-employee
Directors  Stock  Option Plan and the  options  grants  reflected  in this Proxy
Statement.

COMPARISON OF STOCK PERFORMANCE

     The  following  graph  assumes that $100 was invested on October 1, 1996 in
each of the following:  the Company's  Common Stock,  the NASDAQ Composite Index
and the NASDAQ Industrial Index.

                                         VALUE OVER TIME,
                                      ASSUMING $100 INVESTED
                    --------------------------------------------------------
                     Amtech                 NASDAQ                  NASDAQ
                      Stock                Composite              Industrial
                    --------               ---------              ----------
9/30/96             $ 100.00               $ 100.00                $ 100.00
9/30/97             $  56.58               $ 137.39                $ 130.86
9/30/98             $  15.79               $ 138.06                $  98.17
9/30/99             $  21.05               $ 223.83                $ 153.14
9/30/00             $ 157.89               $ 299.36                $ 194.94
9/30/01             $  52.11               $ 122.16                $ 103.77

CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

     The  Company  did not have any  transactions  during  fiscal  2001 with any
director,  director  nominee,  executive  officer,  security holder known to the
Company to own of record or  beneficially  more than 5% of the Company's  Common
Stock, or any member of the immediate family of any of the foregoing persons, in
which the amount involved exceeded $60,000.

                                       15

                                  OTHER MATTERS

ANNUAL REPORT

     The Annual  Report of the Company for the fiscal year ended  September  30,
2001, is enclosed herewith.

VOTING BY PROXY

     In order to ensure  that your  shares  will be  represented  at the  Annual
Meeting,  please sign and return the enclosed Proxy in the envelope provided for
that purpose,  whether or not you expect to attend. Any shareholder may, without
affecting any vote previously taken,  revoke a written proxy by giving notice of
revocation  to the  Company in writing or by  executing  and  delivering  to the
Company a later dated proxy.

INDEPENDENT AUDITORS

     The Board of Directors has selected Arthur Andersen LLP ("Andersen") as the
Company's  independent  public  accountants for the fiscal year ending September
30, 2002. Andersen has audited the Company's financial  statements since 1983. A
representative  of Andersen is expected to be present at the Annual Meeting with
the  opportunity to make a statement if he or she so desires and to be available
to respond to appropriate questions.

SHAREHOLDER PROPOSALS FOR ACTION AT THE COMPANY'S NEXT ANNUAL MEETING

     Any shareholder  who wishes to present any proposal for shareholder  action
at the next Annual Meeting of  Shareholders to be held in 2003, must be received
by the Company's  Secretary,  at the Company's offices, not later than September
30, 2002, in order to be included in the Company's  proxy  statement and form of
proxy for that  meeting.  Such  proposals  should be addressed to the  Corporate
Secretary, Amtech Systems, Inc., 131 South Clark Drive, Tempe, Arizona 85281. If
a shareholder  proposal is introduced at the 2003 Annual Meeting of Shareholders
without any discussion of the proposal in the Company's proxy statement, and the
shareholder  does not notify the  Company on or before  December  13,  2002,  as
required by SEC Rule 14(a)-4(c)(1),  of the intent to raise such proposal at the
Annual  Meeting of  Shareholders,  then proxies  received by the Company for the
2002 Annual  Meeting will be voted by the persons named in such proxies in their
discretion with respect to such proposal.  Notice of such proposal is to be sent
to the above address.

                                        By Order of the Board of Directors

                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary
Tempe, Arizona
February 1, 2002

                                       16

                              AMTECH SYSTEMS, INC.

           THIS PROXY IS SOLICITED ON BEHALF OF THE BOARD OF DIRECTORS
         OF AMTECH SYSTEMS, INC. FOR THE ANNUAL MEETING OF SHAREHOLDERS

     The undersigned shareholder of Amtech Systems, Inc., an Arizona corporation
(the "Company"),  hereby acknowledges receipt of the Notice of Annual Meeting of
Shareholders dated February 1, 2002, and hereby appoints Jong S. Whang or Robert
T. Hass and each of them,  proxies  and  attorneys-in-fact,  with full  power of
substitution,  on behalf and in the name of the  undersigned,  to represent  the
undersigned at the Annual Meeting of Shareholders of AMTECH SYSTEMS,  INC. to be
held at the Hilton  Phoenix  Airport  Hotel,  2435 South 47th  Street,  Phoenix,
Arizona on March 29, 2002, at 10:00 a.m.,  Mountain  Standard  time,  and at any
adjournment(s)  or  postponement(s)  thereof,  and to vote all  shares of Common
Stock  that  the  undersigned  would  be  entitled  to vote if  then  and  there
personally present, on the matters set forth below.

1.   ELECTION OF DIRECTORS  FOR  all nominees  listed below (except as marked to
     the contrary below):  Jong S. Whang Robert T. Hass Donald F. Johnston Alvin
     Katz Bruce R. Thaw

     [ ] WITHHOLD AUTHORITY to vote for all nominees listed above

     INSTRUCTIONS:  To withhold  authority to vote for any  individual  nominee,
     write that nominee's name in the space provided below:

                                   ----------

     The  undersigned  agrees that the proxy  holder is  authorized  to cumulate
     votes in the  election  of  directors  and to vote for less than all of the
     nominees.

2.   TO APPROVE AN AMENDMENT TO THE COMPANY'S 1998 STOCK OPTION PLAN TO INCREASE
     THE NUMBER OF SHARES  AVAILABLE  FOR  ISSUANCE  THEREUNDER  FROM 300,000 TO
     500,000.

         [ ] FOR                 [ ] AGAINST                  [ ] ABSTAIN

THIS PROXY WHEN PROPERLY EXECUTED WILL BE VOTED IN THE MANNER DIRECTED HEREIN BY
THE UNDERSIGNED  SHAREHOLDER.  IF NO DIRECTION IS MADE, THIS PROXY WILL BE VOTED
FOR THE ELECTION OF THE NOMINEES  NAMED ABOVE,  FOR THE PROPOSAL TO INCREASE THE
NUMBER OF SHARES  AVAILABLE FOR ISSUANCE  UNDER THE COMPANY'S  1998 STOCK OPTION
PLAN AND AS SAID PROXIES  DEEM  ADVISABLE ON SUCH MATTERS AS MAY COME BEFORE THE
MEETING.

Dated: ___________________, 2002
                                            Please  sign  exactly  as your  name
                                            appears  on the front of  this proxy
                                            card. When shares are held in common
                                            or  in joint  tenancy,  both  should
                                            sign.  When signing  as attorney, as
                                            executor, administrator,  trustee or
                                            guardian, please  give full title as
                                            such. If a corporation, sign in full
                                            corporate name by President or other
                                            authorized     officer.     If     a
                                            partnership,    please    sign    in
                                            partnership  name  by an  authorized
                                            person.

SIGNATURES:
           __________________________________

           __________________________________

           __________________________________


              Please return in the enclosed, postage-paid envelope.