UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q

(Mark One)
[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the quarterly period ended: December 31, 2001

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________


                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


              Arizona                                            86-0411215
   (State or other jurisdiction of                            (I.R.S. Employer
    incorporation or organization)                           Identification No.)


 131 South Clark Drive, Tempe, Arizona                              85281
(Address of principal executive offices)                          (Zip Code)


        Registrant's telephone number, including area code: 480-967-5146


Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

     Shares of Common Stock outstanding as of December 31, 2001: 2,650,921

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES

                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----
PART I.  FINANCIAL INFORMATION.

  Item 1. Condensed Consolidated Financial Statements

          Condensed Consolidated Balance Sheets -
              December 31, 2001 and September 30, 2001.........................3

          Condensed Consolidated Statements of Operations -
              Three Months Ended December 31, 2001 and 2000....................4

          Condensed Consolidated Statements of Stockholders' Equity -
              Three Months Ended December 31, 2001 and 2000....................5

          Condensed Consolidated Statements of Cash Flows -
               Three Months Ended December 31, 2001 and 2000...................6

          Notes to Condensed Consolidated Financial Statements.................7

  Item 2. Management's Discussion and Analysis of Financial
                  Condition and Results of Operations
          Results of Operations...............................................12
          Liquidity and Capital Resources.....................................14

  Item 3. Quantitative and Qualitative Disclosures about Market Risk..........15
          Forward-Looking Statements..........................................15

PART II. OTHER INFORMATION.

  Item 1. Legal Proceedings ..................................................16

  Item 4. Submission of Matters to a Vote of Security Holders.................17

  Item 6. Exhibits and Reports on Form 8-K. ..................................17

SIGNATURE.....................................................................17

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS



                                                                       December 31,    September 30,
                                                                           2001            2001
                                                                       ------------    ------------
                                                                        (Unaudited)
                                                                                 
                                     ASSETS
CURRENT ASSETS:
  Cash and cash equivalents                                            $  6,766,018    $  5,998,120
  Accounts receivable - net                                               3,900,927       3,829,867
  Inventories                                                             3,939,077       4,804,457
  Deferred income taxes                                                   1,520,000       1,525,000
  Prepaid expenses                                                          124,424          85,643
                                                                       ------------    ------------
           Total current assets                                          16,250,446      16,243,087

PROPERTY, PLANT AND EQUIPMENT - net                                       1,489,767       1,484,437

GOODWILL AND OTHER ASSETS -  net                                            822,239         843,046
                                                                       ------------    ------------
           Total assets                                                $ 18,562,452    $ 18,570,570
                                                                       ============    ============
                      LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
  Accounts payable                                                     $    712,958    $    880,006
  Accrued compensation and related taxes                                    743,385         671,075
  Accrued warranty expense                                                  439,540         304,228
  Deferred Profit                                                         1,404,769       1,777,173
  Customer deposits                                                         589,769         367,523
  Income taxes payable                                                       84,000         135,000
  Other accrued liabilities                                                 666,081         605,547
                                                                       ------------    ------------
           Total current liabilities                                      4,640,502       4,740,552
                                                                       ------------    ------------

LONG-TERM OBLIGATIONS                                                       240,989         246,184
                                                                       ------------    ------------
COMMITMENTS AND CONTINGENCIES

STOCKHOLDERS' EQUITY:
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued                                   --              --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
    2,650,921 and 2,649,171 shares issued and outstanding
    as of December 31 and September 30, respectively                         26,510          26,492
  Additional paid-in capital                                              12,541,431      12,539,040
  Accumulated other comprehensive loss -
    Cumulative foreign currency translation adjustment                     (440,386)       (368,242)
  Retained earnings                                                       1,553,406       1,386,544
                                                                       ------------    ------------
           Total stockholders' equity                                    13,680,961      13,583,834
                                                                       ------------    ------------
           Total liabilities and stockholders' equity                  $ 18,562,452    $ 18,570,570
                                                                       ============    ============


              The accompanying notes are an integral part of these
                  condensed consolidated financial statements.

                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
              For the Three Months Ended December 31, 2001 and 2000
                                   (Unaudited)



                                                           Three Months Ended December 31,
                                                           -------------------------------
                                                                2001             2000
                                                             -----------     -----------
                                                                       
Net product sales                                            $ 5,456,916     $ 3,602,650
Cost of product sales                                          4,137,433       2,447,805
                                                             -----------     -----------
        Gross margin                                           1,319,483       1,154,845

Selling, general and administrative                            1,016,503       1,195,030
Research and development                                          89,931         106,622
                                                             -----------     -----------
        Operating profit (loss)                                  213,049        (146,807)

Interest income - net                                             34,813          73,662
                                                             -----------     -----------
Income (loss) before income taxes and cumulative
  effect of change in accounting principle                       247,862         (73,145)
Income tax provision (benefit)                                    81,000         (46,262)
                                                             -----------     -----------
Income (loss) before cumulative effect of change
  in accounting principle                                        166,862         (26,883)
Cumulative effect of change in accounting principle,
  net of tax benefit of $410,000                                      --        (690,211)
                                                             -----------     -----------
NET INCOME (LOSS)                                            $   166,862     $  (717,094)
                                                             ===========     ===========
EARNINGS (LOSS) PER SHARE:

Earnings (loss) per share - basic:
  Income (loss) before cumulative effect of change
    in accounting principle                                  $       .06     $      (.01)
  Cumulative effect of change in accounting principle,
    net of tax                                                        --            (.26)
                                                             -----------     -----------
Basic earnings (loss) per share                              $       .06     $      (.27)
                                                             ===========     ===========
Weighted average shares outstanding                            2,680,891       2,604,964

Earnings (loss) per share - diluted:
  Income (loss) before cumulative effect of change
    in accounting principle                                  $       .06     $      (.01)
  Cumulative effect of change in accounting principle,
    net of tax                                                        --            (.26)
                                                             -----------     -----------
Diluted earnings (loss) per share                            $       .06     $      (.27)
                                                             ===========     ===========
Weighted average shares outstanding                            2,798,330       2,604,964


              The accompanying notes are an integral part of these
                  condensed consolidated financial statements.

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
            CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY
              For the Three Months Ended December 31, 2001 and 2000
                                   (Unaudited)



                                               Common Stock                           Accumulated     Retained
                                        ---------------------------   Additional         Other        Earnings          Total
                                          Number                        Paid-In      Comprehensive  (Accumulated     Stockholders'
                                         of Shares        Amount        Capital      Income (Loss)     Deficit)         Equity
                                        ------------   ------------   ------------   ------------    ------------    ------------
                                                                                                  
BALANCE AT SEPTEMBER 30, 2000              2,571,808   $     25,718   $ 12,133,058   $   (502,356)   $    923,463    $ 12,579,883
                                                                                                                     ------------
  Net loss                                        --             --             --             --        (717,094)       (717,094)
  Translation adjustment                          --             --             --        110,273              --         110,273
                                                                                                                     ------------
     Comprehensive loss                           --             --             --             --              --        (606,821)
                                                                                                                     ------------
 Warrants and stock options exercised         49,813            498        277,516             --              --         278,014
                                        ------------   ------------   ------------   ------------    ------------    ------------
BALANCE AT DECEMBER 31, 2000               2,621,621   $     26,216   $ 12,410,574   $   (392,083)   $    206,369    $ 12,251,076
                                        ============   ============   ============   ============    ============    ============

BALANCE AT SEPTEMBER 30, 2001              2,649,171   $     26,492   $ 12,539,040   $   (368,242)   $  1,386,544    $ 13,583,834
                                                                                                                     ------------
  Net income                                      --             --             --             --         166,862         166,862
  Translation adjustment                          --             --             --        (72,144)             --         (72,144)
                                                                                                                     ------------
       Comprehensive income                                                                                                94,718
                                                                                                                     ------------
 Stock options exercised                       1,750             18          2,391             --              --           2,409
                                        ------------   ------------   ------------   ------------    ------------    ------------
BALANCE AT DECEMBER 31, 2001               2,650,921   $     26,510   $ 12,541,431   $   (440,386)   $  1,553,406    $ 13,680,961
                                        ============   ============   ============   ============    ============    ============


              The accompanying notes are an integral part of these
                  condensed consolidated financial statements.

                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
              For the Three Months Ended December 31, 2001 and 2000
                                   (Unaudited)



                                                                            2001           2000
                                                                        -----------    -----------
                                                                                 
OPERATING ACTIVITIES:
  Net income (loss)                                                     $   166,862    $  (717,094)
  Adjustments to reconcile net income (loss) to net
    cash provided by (used in) operating activities:
      Cumulative effect of change in accounting principle, net of tax            --        690,211
      Depreciation and amortization                                         103,407         86,295
      Provision for write-off of inventory and receivables                   28,747         38,597
      Deferred income taxes                                                   5,000        (40,000)
   Decrease (increase) in:
      Accounts receivable                                                  (155,469)      (738,216)
      Inventories, prepaid expenses and other assets                        752,140       (729,958)
   Increase (decrease) in:
      Accounts payable                                                     (148,601)       506,137
      Accrued liabilities and customer deposits                             340,544        431,161
      Deferred Profit                                                      (175,998)       588,397
      Income taxes payable                                                  (54,186)      (121,000)
                                                                        -----------    -----------
   Net Cash Provided By (Used In) Operating Activities                      862,446         (5,470)
                                                                        -----------    -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                               (109,023)      (236,638)
                                                                        -----------    -----------
   Net Cash Used In Investing Activities                                   (109,023)      (236,638)
                                                                        -----------    -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises                           2,409        278,014
  Payments on mortgage loan                                                      --         (2,389)
                                                                        -----------    -----------
   Net Cash Provided By Financing Activities                                  2,409        275,625
                                                                        -----------    -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                                      12,066         12,198
                                                                        -----------    -----------
CASH AND CASH EQUIVALENTS:
  Net increase                                                              767,898         45,715
  Beginning of period                                                     5,998,120      5,784,500
                                                                        -----------    -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                                 $ 6,766,018    $ 5,830,215
                                                                        ===========    ===========
SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
     Interest                                                           $     3,409    $    10,090
     Income taxes paid                                                      137,000        498,150


              The accompanying notes are an integral part of these
                  condensed consolidated financial statements.

                                       6

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                      THREE MONTHS ENDED DECEMBER 31, 2001

1.   BASIS OF PRESENTATION

     The accompanying  condensed  consolidated  financial statements include the
     accounts  of  Amtech  Systems,  Inc.  and  its  wholly-owned  subsidiaries,
     Tempress Systems, Inc., based in Heerde, The Netherlands, and P. R. Hoffman
     Machine  Products,  Inc.  (collectively,  the  "Company").  All significant
     intercompany   balances   and   transactions   have  been   eliminated   in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in accordance with accounting principles generally accepted in the
     United States,  pursuant to the rules and regulations of the Securities and
     Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the opinion of
     management,   all   adjustments   (which  include  only  normal   recurring
     adjustments) necessary to present fairly the financial position, results of
     operations, and cash flows for the periods presented have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2001.

     The consolidated  results of operations for the three months ended December
     31, 2001, are not necessarily  indicative of the results to be expected for
     the full year.

2.   ADOPTION OF SAB 101 DURING FISCAL YEAR 2001

     The fiscal 2001 amounts are adjusted to reflect the  Company's  adoption of
     Securities and Exchange  Commission Staff Accounting Bulletin No. 101 ("SAB
     101"), "Revenue Recognition in Financial  Statements," effective October 1,
     2000, as discussed in the Company's Form 10-K for the year ended  September
     30, 2001.

3.   REVENUE RECOGNITION

     During the fourth quarter of fiscal 2001,  the Company  changed its revenue
     recognition  policy  retroactive  to  October 1,  2000,  based on  guidance
     provided  in SAB  101.  The  Company  recognizes  revenue  when  persuasive
     evidence of an arrangement exists; title transfers, generally upon shipment
     or services have been rendered; the seller's price is fixed or determinable
     and collectibility is reasonably assured.  Certain of the Company's product
     sales  are  accounted  for  as  multiple-element   arrangements.   For  the
     semiconductor  equipment  segment,  if the Company has met defined customer
     specifications with similarly situated customers and the specific

                                       7

     equipment and process involved,  the Company  recognizes  equipment revenue
     upon shipment and transfer of title, and the portion of the revenue that is
     contingent  upon  installation  and  acceptance,  generally  10% - 20% of a
     system's  selling price, is deferred until those  activities are completed.
     Product sales that are shipped,  but do not meet this criteria are deferred
     and recognized upon customer acceptance.

     Equipment sold by the polishing  supplies  segment does not involve process
     guarantees or acceptance criteria,  so the related revenue is recorded upon
     shipment.  For all  segments,  sales of spare  parts  and  consumables  are
     recognized upon shipment,  as there are no post shipment  obligations other
     than standard  warranties.  Service revenues are recognized as services are
     performed.   Revenue  related  to  service  contracts  is  recognized  upon
     performance of the services requested by the customer.

     In  accordance  with guidance  provided in SAB 101, the Company  recorded a
     non-cash charge of $690,211 (after reduction for income taxes of $410,000),
     or $0.26 per basic  share on  October  1, 2000 to  reflect  the  cumulative
     effect of the accounting change.

     During the three months ended  December  31, 2000,  the Company  recognized
     revenue of $662,362 and related gross profit of $213,052 that were included
     in the cumulative effect adjustment as of October 1, 2000. During the three
     months ended December 31, 2001, the Company  recognized revenue of $499,707
     and related  gross profit of $88,000 that were  included in the  cumulative
     effect adjustment as of October 1, 2000.

4.   INVENTORIES

     The components of inventories are as follows:

                                            December 31,        September 30,
                                                2001                2000
                                             ----------          ----------
     Purchased parts and raw materials       $2,385,997          $2,487,470
     Work-in-process                          1,207,072           1,255,676
     Finished goods                             346,008           1,061,311
                                             ----------          ----------
          Total inventory                    $3,939,077          $4,804,457
                                             ==========          ==========

                                       8

5.   EARNINGS PER SHARE

                                             Three Months Ended December 31,
                                             -------------------------------
                                                   2001          2000
                                                ----------   -----------
     Net income (loss)                          $  166,862   $  (717,094)

     Weighted average shares outstanding:
     Common shares                               2,680,891     2,604,964
     Common equivalents                            117,439            --
                                                ----------   -----------
                                                 2,798,330     2,604,964
                                                ==========   ===========

     Earnings Per Share:
       Basic                                    $      .06   $      (.27)

       Diluted                                  $      .06   $      (.27)

6.   RECENT ACCOUNTING PRONOUNCEMENTS

     In July 2001, the Financial  Accounting  Standards  Board  ("FASB")  issued
     Statements   of  Financial   Accounting   Standards   No.  141,   "Business
     Combinations" ("SFAS No. 141"), and No. 142, "Goodwill and Other Intangible
     Assets" ("SFAS No. 142"). SFAS No. 141 eliminates poolings of interest as a
     method for accounting for business combinations.  SFAS No. 142 requires the
     discontinuance  of the amortization of goodwill and intangible  assets with
     indefinite  lives and at least an annual  assessment  of whether  there has
     been an  impairment  of such  assets  that  needs  to be  recognized  as an
     impairment charge.  SFAS Nos. 141 and 142 must be adopted by the Company no
     later than October 1, 2002. Since  amortization of goodwill is currently an
     estimated $.1 million per year,  the  discontinuance  of such  amortization
     will not have a material  affect on the  Company's  net income or financial
     condition. Management does not expect to incur an impairment charge related
     to its  recorded  goodwill,  approximately  $.8 million as of December  31,
     2001.

                                       9

7.   BUSINESS SEGMENT INFORMATION

     The Company  classifies its products into two core business  segments:  (1)
     the semiconductor equipment segment which designs, manufactures and markets
     semiconductor  wafer  processing  equipment  used  in  the  fabrication  of
     integrated circuits, and (2) the polishing supplies segment, which designs,
     manufactures  and markets  carriers,  templates and  equipment  used in the
     lapping and polishing of wafer thin  materials,  including  silicon  wafers
     used  in the  production  of  semiconductors.  Information  concerning  the
     Company's business segments in fiscal years 2002 and 2001 is as follows:



                                                               Three Months Ended December 31,
                                                               -------------------------------
                                                                    2001           2000
                                                                 -----------    -----------
                                                                          
     Revenues
       Semiconductor equipment                                   $ 4,385,413    $ 1,433,607
       Polishing supplies                                          1,071,503      2,169,043
                                                                 -----------    -----------
                                                                 $ 5,456,916    $ 3,602,650
                                                                 ===========    ===========
     Operating profit (loss)
       Semiconductor equipment                                   $   316,887    $  (439,286)
       Polishing supplies                                           (103,838)       292,479
                                                                 -----------    -----------
     Total operating profit (loss)                                   213,049       (146,807)
       Interest income - net                                          34,813         73,662
                                                                 -----------    -----------
     Income (loss) before income taxes and cumulative
        effect of change in accounting principle                 $   247,862    $   (73,145)
                                                                 ===========    ===========


8.   LEGAL PROCEEDINGS

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     11  companies  named in a legal  action  being  brought by North  Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal action, which the Company believes was filed to preserve the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date.  The Company  acquired the assets of P.R.  Hoffman  Machine  Products
     Corporation  in an  asset  transaction  consummated  on July 1,  1997.  The
     landfill was closed and has not been used by P.R.  Hoffman  since  sometime
     prior to completion of the Company's  acquisition.  Therefore,  the Company
     believes that the named company is the prior owner of the acquired  assets.
     Under the terms of the Asset Purchase Agreement  governing the acquisition,
     the prior owner, P.R. Hoffman Machine Products Corporation, is obligated to
     indemnify  the Company for any breaches of P.R.  Hoffman's  representations
     and warranties in the Asset Purchase Agreement,  including  representations
     relating to  environmental  matters.  In  accordance  with the terms of the
     Asset  Purchase  Agreement,  the Company has  provided  notice to the prior
     owner of P.R. Hoffman Machine Products  Corporation of the Company's intent
     to seek indemnification from such owner for any liabilities  resulting from
     this legal action. Based on information  available to the Company as of the

                                       10

     date of this report,  management  believes the Company's  costs, if any, to
     resolve  this matter will not be material to the its results of  operations
     or financial position.

9.   CONCENTRATION OF CREDIT RISK AND USE OF ESTIMATES

     The  preperation  of financial  statements  in conformity  with  accounting
     principles  generally accepted in the United States requires  management to
     make estimates and assumptions  that affect the reported  amounts of assets
     and liabilities and disclosure of contingent  assets and liabilities at the
     date of the financial  statements and the reported  amounts of revenues and
     expenses during the year. Actual results could differ from those estimates.

     As of  December  31,  2001,  receivables  from  customers  in  the  optical
     component  industry  comprised  26% of total  receivables,  of which  three
     accounts comprised 25% of total  receivables,  representing a concentration
     of credit risk as defined by SFAS No. 105, "Disclosure of Information about
     Financial Instruments with Off-Balance Sheet Risk and Financial Instruments
     with  Concentration of Credit Risk." As of September 30, 2001,  receivables
     from  customers in the optical  component  industry  comprised 51% of total
     receivables, of which three accounts comprised 39% of total receivables.

     In July 2001, an optical component customer filed a petition for protection
     from creditors under Chapter 11 of the U.S.  Bankruptcy  Code,  while owing
     the Company approximately  $815,000, an example of possible problems caused
     by  concentrations  of credit risk. The amount of the sale was  $1,609,000.
     The customer had made payments of $794,000 before filing, leaving an unpaid
     balance of approximately  $815,000.  Through increased reserves the Company
     has written down this  receivable to an estimated net  realizable  value of
     $225,000.

                                       11

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

RESULTS OF OPERATIONS

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                                 Three Months Ended December 31,
                                                 -------------------------------
                                                      2001          2000
                                                      -----         -----
     Net revenue                                      100.0%        100.0%
     Cost of product sales                            (75.8)        (67.9)
                                                      -----         -----
          Gross margin                                 24.2          32.1

     Selling, general and
      administrative expenses                         (18.6)        (33.2)

     Research and development                          (1.6)         (3.0)
                                                      -----         -----
          Operating profit (loss)                       4.0%         (4.1)%
                                                      =====         =====

     NET REVENUE.  The Company's net revenue for the three months ended December
31, 2001 was $5.4 million,  an increase of $1.8 million, or 52%, compared to net
revenue of $3.6 million for the first  quarter of fiscal  2001.  Revenue for the
three  months  ended  December  31, 2001 and 2000  included  $.5 million and $.7
million,  respectively,  of revenue that was included in the  cumulative  effect
adjustment  as of October 1, 2000,  arising from the  Company's  adoption of SAB
101.  During the quarter  ended  December  2000,  a  significant  portion of the
systems  sales were new products or otherwise had not yet been  demonstrated  to
meet the customers' specifications,  leading to the net deferral of $3.3 million
of systems  shipped  during that quarter.  Conversely,  during the quarter ended
December  31,  2001,  the value of systems  that were  demonstrated  to meet the
customers' specifications exceeded the value of shipments by $1.1 million.

     With the change in revenue recognition pursuant to the guidance provided in
Securities and Exchange  Commission  ("SEC") Staff  Accounting  Bulletin No. 101
("SAB  101")  at least  some  portion  of  systems  sales  in the  semiconductor
equipment   segment  is  deferred   generally   until  it  has  been  installed,
demonstrated to meet the customer's specifications and accepted by the customer.
Some of the  factors  that can affect the length of time from  shipment  to full
revenue recognition are customer delays in site preparation, availability of our
technicians,  and the time it takes for the  customer to obtain  local  permits.
Because  the  selling  price of  systems  can range from a low of  $150,000  for
automation  products to a high of $1.2  million on a fully  automated  diffusion
furnace,  these factors  significantly  affect the timing of revenue recognition
from  customer  to  customer  and system to  system,  which  will  increase  the
volatility in revenue.

                                       12

     Shipments in the first quarter of fiscal 2002 were $4.4  million,  compared
to $3.7  million in the fourth  quarter of fiscal  2001 and $6.8  million in the
first quarter of fiscal 2001, reflecting the continuation of the severe downturn
in the semiconductor industry.

     GROSS MARGIN.  The Company's gross margin  increased by  approximately  $.1
million,  or 14%, to $1.3 million for the three months ended  December 31, 2001,
from $1.2 million during the comparable  period of the previous fiscal year. The
increase in gross margin  resulted  from the 52%  increase in revenue  discussed
above,  which  was  partially  offset  by the  effect  of a lower  gross  margin
percentage.  Gross margin as a percentage  of sales was 24% in the first quarter
of fiscal 2002,  compared to 32% in the first  quarter of fiscal 2001,  with the
erosion resulting from competitive  pricing  pressure,  a less favorable product
mix and increased warranty costs.

     In the semiconductor  segment,  gross margin declined to 27% of revenues in
the first quarter of fiscal 2002,  compared to 36% in the prior year,  also as a
result of  competitive  pricing  pressure,  product mix and  increased  warranty
costs. The gross margin of the polishing supply segment declined to 13% of sales
in the first  quarter  of  fiscal  2002,  compared  to 29% of sales in the first
quarter of fiscal  2001,  as a result of fixed costs  being  spread over a lower
sales volume.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses for the first  quarter of fiscal 2002  decreased by $.2
million,  or 15%, to $1.0  million,  compared to $1.2 million spent in the first
quarter of fiscal  2001.  The  decrease in selling,  general and  administrative
expenses  is  due  primarily  to  cost  reduction  programs  and  a  decline  in
commissions due to decreased sales through sales representatives.

     RESEARCH AND DEVELOPMENT.  Research and development  costs were essentially
the same, $.1 million, for the three months ended December 31, 2001 and 2000.

     OPERATING PROFIT. Operating profit for the first quarter of fiscal 2002 was
$.2 million,  an increase of $.3 million, or 245%, compared to an operating loss
of $.1  million in the same period of fiscal  2001.  The  increase in  operating
profit is primarily attributable to the 52% increase in consolidated revenue and
continued cost control.

     Operating  profit  for  the  polishing  supplies  segment  declined  by $.4
million, or 134%, to a loss of $.1 million,  compared to a profit of $.3 million
in the first quarter of fiscal 2001, as a result of the $1.1 million  decline in
that segment's sales. In the semiconductor  equipment segment,  operating profit
increased by $.8  million,  or 170%,  to $.3 million,  compared to a loss of $.4
million in the first  quarter of fiscal 2001.  The increase in the first quarter
operating profit of the semiconductor  equipment segment is primarily due to the
$3.0  million  increase in net  revenues.  On a  consolidated  basis,  operating
profits in the first  quarter of fiscal  2002  represented  approximately  4% of
revenue,  while  the  operating  loss  in  the  first  quarter  of  fiscal  2001
represented a loss of approximately 4% of revenue.

     NET INTEREST INCOME.  During the first quarter of fiscal 2002, net interest
income decreased by approximately $39,000 to $35,000, compared to $74,000 in the
corresponding period of fiscal 2001, due to a decline in interest rates.

                                       13

     As a result of the  foregoing  factors,  income before income taxes and the
cumulative  effect of change in  accounting  principle  for the first quarter of
fiscal 2002 was $.2  million,  an  increase  of 338%,  compared to a loss before
taxes of $.1 million in the first quarter of fiscal 2001.

     PROVISION FOR INCOME TAXES.  Income tax expense of $81,000,  recorded at an
effective  tax rate of 33%,  resulted  in net  income  for the first  quarter of
fiscal 2002 of approximately  $167,000.  During the same quarter of fiscal 2001,
the Company recorded income tax benefit of approximately  $46,000,  reflecting a
38% effective tax rate and resulting in a net loss before  cumulative  effect of
change in accounting principle of approximately $27,000. The lower effective tax
rate in the most  recent  quarter  is due to a  decrease  in the  proportion  of
taxable income arising in jurisdictions with higher tax rates.

     NET  INCOME.  Net  income  for the first  quarter  of  fiscal  2002 was $.2
million,  or $.06 per diluted share,  representing an increase of $.9 million or
124%,  compared to a net loss as restated after the cumulative  effect of change
in accounting  principle of $.7 million, or $.27 per diluted share, in the first
quarter of fiscal 2001. The difference is primarily due to the cumulative effect
of a change in  accounting  principle  (SAB 101) of $.7 million  recorded in the
first  quarter of fiscal  2001 and higher  sales in the first  quarter of fiscal
2002.

     BACKLOG.  At December  31,  2001,  the order  backlog was $7.3  million,  a
decrease of $2.2 million, or 23%, from the $9.5 million backlog at September 30,
2001. In addition, pursuant to SAB 101, the Company has deferred $3.4 million of
revenue,  which net of related deferred cost represents deferred profits of $1.4
million.  During the first quarter of the current fiscal year the new orders for
both business segments were approximately $2.2 million, significantly lower than
any quarter  since the quarter  ended March 31,  1999,  the end of the  previous
industry  slowdown.  The Company cannot reasonably  estimate the duration of the
industry  slowdown or the extent to which it will adversely affect the Company's
future results of operations.

     Due to the  possibility of customer  changes in delivery  schedules,  order
cancellations,  potential  delays in  product  shipments,  delays  in  obtaining
inventory  parts  from  suppliers,   failure  to  satisfy  customer   acceptance
requirements and changes in product mix, our backlog as of any point in time may
not be  representative of actual sales and profitability in any future period. A
reduction in backlog during any particular  period could have a material adverse
affect on our business prospects, financial condition and results of operations.

LIQUIDITY AND CAPITAL RESOURCES

     At December  31, 2001,  the Company had $6.8  million of readily  available
liquidity  in the form of cash and cash  equivalents,  compared to cash and cash
equivalents  of $6.0 at September  30, 2001,  an increase of  approximately  $.8
million. The Company continues to believe that there is sufficient liquidity for
existing operations and its expansion plans.

     CASH FLOW.  The $.8  million net  increase in cash during the three  months
ended December 31, 2001  approximates  the cash flow provided by the operations,
which was $.9 million.  The cash flow from operations is comprised  primarily of
$.2 million of net income and  increases in cash from a $.8 million  decrease in
inventories  and a $.3 million  increase  in accrued  liabilities  and  customer

                                       14

deposits, which were offset by an increase in accounts receivable of $.2 million
and  decreases in accounts  payable and deferred  profit of $.1 and $.2 million,
respectively.  Investing  activities  consisted  of $.1 million in  purchases of
property, plant and equipment.

     The large decrease in inventories  occurred because a large system that was
finished in the fourth  quarter of fiscal 2001  shipped in the first  quarter of
fiscal 2002.  However,  inventory is at and may remain at higher than historical
levels for several more quarters.  The Company  believes that inventory will not
increase  further  and does not  expect any  significant  losses to occur in the
disposing of excess inventory.

     At December 31, 2001,  working  capital was $11.6  million,  up $.1 million
from $11.5 million at September 30, 2001. The Company's  current ratio increased
slightly to 3.5:1 at the end of the first quarter of fiscal 2002,  from 3.4:1 at
September 30, 2001.  The Company  believes  that its current ratio  continues to
evidence the Company's a strong financial condition.  At December 31, 2001, cash
and cash  equivalents  comprised  36% of total assets and  stockholders'  equity
accounted  for  74% of  total  capitalization.  The  Company  believes  that  it
continues  to possess the  financial  strength  necessary  to achieve  continued
growth.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended  September  30,  2001.  There are no  material  changes in
reported market risks from September 30, 2001.

FORWARD-LOOKING STATEMENTS

     The statements contained in this quarterly report on Form 10-Q that are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no

                                       15

material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k) the semiconductor  equipment industry will not experience a further slowdown
during  fiscal 2002,  (l) the  condition in the Asian  markets will  continue to
improve,  (m) the Company will be able to continue to control costs,  (n) demand
for the Company's products will not be adversely and significantly influenced by
trends  within  the  semiconductor   industries,   including   consolidation  of
semiconductor  manufacturing  operations  through mergers and the subcontracting
out of the  production of  semiconductors  to foundries,  and (o) the effects of
adopting  SAB No. 101 will  largely be offset by  increased  sales.  Assumptions
related to the foregoing  involve judgments with respect to, among other things,
future economic,  competitive and market conditions, all of which are beyond the
control of the  Company.  Although  the Company  believes  that the  assumptions
underlying the forward-looking statements are reasonable, any of the assumptions
could  prove  inaccurate  and,  therefore,  there can be no  assurance  that the
results  contemplated  in  forward-looking   statements  will  be  realized.  In
addition,  the business and operations of the Company are subject to substantial
risks,  which  increase  the  uncertainty   inherent  in  such   forward-looking
statements.   In  light  of  the  significant   uncertainties  inherent  in  the
forward-looking  information  included herein,  such  information  should not be
regarded as a  representation  by the  Company,  or any other  person,  that the
objectives or plans for the Company will be achieved.

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies named in a legal action being brought by North  Middleton  Township
in  Carlisle,  Pennsylvania,  the  owner  of a  landfill  allegedly  found to be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which the  Company  believes  was filed to  preserve  the right to file
claims for  contribution  to the clean-up of the  landfill at a later date.  The
Company acquired the assets of P.R.  Hoffman Machine Products  Corporation in an
asset  transaction  consummated on July 1, 1997. The landfill was closed and has
not  been  used by P.R.  Hoffman  since  sometime  prior  to  completion  of the
Company's acquisition. Therefore, the Company believes that the named company is
the prior owner of the acquired  assets.  Under the terms of the Asset  Purchase
Agreement  governing the  acquisition,  the prior owner,  P.R.  Hoffman  Machine
Products Corporation,  is obligated to indemnify the Company for any breaches of
P.R. Hoffman's  representations  and warranties in the Asset Purchase Agreement,
including  representations relating to environmental matters. In accordance with
the terms of the Asset Purchase  Agreement,  the Company has provided  notice to
the prior owner of P.R.  Hoffman Machine  Products  Corporation of the Company's
intent to seek  indemnification  from such owner for any  liabilities  resulting
from this legal action. Based on information  available to the Company as of the
date of this  report,  management  believes  the costs,  if any, to resolve this
matter will not be material to the Company's  results of operations or financial
position.

                                       16

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

     None.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8K.

     (a) Exhibits

          None.

     (b) Reports on Form 8-K

          None.

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

     AMTECH SYSTEMS, INC.


    By /s/ Robert T. Hass                               Dated: February 13, 2002
       ------------------------------------------              -----------------
       Robert T. Hass, Vice-President-Finance and
         (Chief Financial and Accounting Officer)

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