UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q

(Mark One)
[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
     EXCHANGE ACT OF 1934

For the quarterly period ended: MARCH 31, 2002

                                       OR

[ ]  TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________


                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


              Arizona                                            86-0411215
   (State or other jurisdiction of                            (I.R.S. Employer
    incorporation or organization)                           Identification No.)


 131 South Clark Drive, Tempe, Arizona                              85281
(Address of principal executive offices)                         (Zip Code)


Registrant's telephone number, including area code: 480-967-5146

Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

       Shares of Common Stock outstanding as of March 31, 2002: 2,651,621

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES

                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----
PART I. FINANCIAL INFORMATION.

     Item 1. Condensed Consolidated Financial Statements

             Condensed Consolidated Balance Sheets -
              March 31, 2002 and September 30, 2001 ........................   3

             Condensed Consolidated Statements of Operations -
              Three and Six Months Ended March 31, 2002 and 2001 ...........   4

             Condensed Consolidated Statements of Cash Flows -
              Six Months Ended March 31, 2002 and 2001 .....................   5

             Notes to Condensed Consolidated Financial Statements ..........   6

     Item 2. Management's Discussion and Analysis of Financial
              Condition and Results of Operations
             Results of Operations .........................................  11
             Liquidity and Capital Resources ...............................  14

     Item 3. Quantitative and Qualitative Disclosures about Market Risk ....  15
             Forward-Looking Statements ....................................  15

PART II. OTHER INFORMATION.

     Item 1. Legal Proceedings .............................................  16

     Item 4. Submission of Matters to a Vote of Security Holders ...........  16

     Item 6. Exhibits and Reports on Form 8-K. .............................  16

SIGNATURE ..................................................................  17

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS




                                                                               MARCH 31,     SEPTEMBER 30,
                                                                                 2002            2001
                                                                             ------------    ------------
                                                                             (Unaudited)
                                                                                       
                                     ASSETS
CURRENT ASSETS:
 Cash and cash equivalents                                                   $  6,468,274    $  5,998,120
 Accounts receivable - net                                                      3,301,664       3,829,867
 Inventories                                                                    4,343,094       4,804,457
 Deferred income taxes                                                          1,525,000       1,525,000
 Prepaid expenses                                                                 121,628          85,643
                                                                             ------------    ------------
          Total current assets                                                 15,759,660      16,243,087

PROPERTY, PLANT AND EQUIPMENT - net                                             1,486,684       1,484,437

GOODWILL AND OTHER ASSETS -  net                                                  799,317         843,046
                                                                             ------------    ------------
          TOTAL ASSETS                                                       $ 18,045,661    $ 18,570,570
                                                                             ============    ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
  Accounts payable                                                           $  1,067,888    $    880,006
  Accrued compensation and related taxes                                          567,212         671,075
  Accrued warranty expense                                                        411,964         304,228
  Deferred Profit                                                               1,045,276       1,777,173
  Customer deposits                                                               251,524         367,523
  Income taxes payable                                                            115,000         135,000
  Other accrued liabilities                                                       581,298         605,547
                                                                             ------------    ------------
          Total current liabilities                                             4,040,162       4,740,552
                                                                             ------------    ------------
LONG-TERM OBLIGATIONS                                                             239,583         246,184
                                                                             ------------    ------------
COMMITMENTS AND CONTINGENCIES

STOCKHOLDERS' EQUITY:
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued and outstanding                         --              --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
     2,651,621 and 2,649,171 shares issued and outstanding
     as of March 31 and September 30, respectively                                 26,516          26,492
  Additional paid-in capital                                                   12,542,299      12,539,040
  Accumulated other comprehensive loss -
    Cumulative foreign currency translation adjustment                           (459,616)       (368,242)
  Retained earnings                                                             1,656,717       1,386,544
                                                                             ------------    ------------
          Total stockholders' equity                                           13,765,916      13,583,834
                                                                             ------------    ------------
          TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY                         $ 18,045,661    $ 18,570,570
                                                                             ============    ============


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
             FOR THREE AND SIX MONTHS ENDED MARCH 31, 2002 AND 2001




                                                                        Three Months Ended March 31,     Six Months Ended March 31,
                                                                        ----------------------------    ---------------------------
                                                                            2002            2001            2002           2001
                                                                        ------------    ------------    ------------   ------------
                                                                         (Unaudited)     (Unaudited)     (Unaudited)    (Unaudited)
                                                                                                           
Net product sales                                                       $  5,416,412    $  6,802,822    $ 10,873,328   $ 10,405,472
Cost of product sales                                                      4,217,643       4,332,918       8,355,076      6,780,723
                                                                        ------------    ------------    ------------   ------------
         Gross margin                                                      1,198,769       2,469,904       2,518,252      3,624,749

Selling, general and administrative                                          995,792       1,297,996       2,012,295      2,493,026
Research and development                                                      59,453         140,004         149,384        246,626
                                                                        ------------    ------------    ------------   ------------
        Operating profit                                                     143,524       1,031,904         356,573        885,097

Interest income - net                                                         20,787          78,106          55,600        151,768
                                                                        ------------    ------------    ------------   ------------
Income before income taxes and cumulative
  effect of change in accounting principle                                   164,311       1,110,010         412,173      1,036,865
Income tax provision                                                          61,000         424,705         142,000        378,443
                                                                        ------------    ------------    ------------   ------------
Income before cumulative effect of change in
  accounting principle                                                       103,311         685,305         270,173        658,422
Cumulative effect of change in accounting
  principle, net of tax benefit of $410,000                                       --              --              --       (690,211)
                                                                        ------------    ------------    ------------   ------------
NET INCOME (LOSS)                                                       $    103,311    $    685,305    $    270,173   $    (31,789)
                                                                        ============    ============    ============   ============
EARNINGS (LOSS) PER SHARE:

Earnings (loss) per share - basic:
   Income before cumulative effect of change in accounting principle    $        .04    $        .26    $        .10   $        .25
   Cumulative effect of change in accounting principle, net of tax                --              --              --           (.26)
                                                                        ------------    ------------    ------------   ------------
Basic earnings (loss) per share                                         $        .04    $        .26    $        .10   $       (.01)
                                                                        ============    ============    ============   ============
Weighted average shares outstanding                                        2,681,533       2,657,886       2,681,214      2,631,302

Earnings (loss) per share - diluted:
   Income before cumulative effect of change in accounting principle    $        .04    $        .25    $        .10   $        .24
   Cumulative effect of change in accounting principle, net of tax                --              --              --           (.26)
                                                                        ------------    ------------    ------------   ------------
Diluted earnings (loss) per share                                       $        .04    $        .25    $        .10   $       (.01)
                                                                        ============    ============    ============   ============
Weighted average shares outstanding                                        2,779,489       2,792,835       2,789,185      2,767,070


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                FOR THE SIX MONTHS ENDED MARCH 31, 2002 AND 2001
                                   (Unaudited)




                                                                                    2002           2001
                                                                                -----------    -----------
                                                                                         
OPERATING ACTIVITIES:
  Net income  (loss)                                                            $   270,173    $   (31,789)
  Adjustments to reconcile net income (loss) to net
    cash provided by operating activities:
      Cumulative effect of change in accounting principle, net of tax                    --        690,211
      Depreciation and amortization                                                 215,338        186,973
      Provision for write-off of inventory and receivables                           57,343        203,236
      Deferred income taxes                                                              --       (127,000)
   Decrease (increase) in:
      Accounts receivable                                                           414,657       (299,742)
      Inventories, prepaid expenses and other assets                                314,115     (1,060,434)
   Increase (decrease) in:
      Accounts payable                                                              215,309       (632,687)
      Accrued liabilities and customer deposits                                    (298,506)     1,003,807
      Deferred Profit                                                              (547,811)       487,103
      Income taxes payable                                                          (16,198)       135,557
                                                                                -----------    -----------
   Net Cash Provided By Operating Activities                                        624,420        555,235
                                                                                -----------    -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                                       (201,238)      (363,068)
                                                                                -----------    -----------
   Net Cash Used In Investing Activities                                           (201,238)      (363,068)
                                                                                -----------    -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises                                   3,283        329,598
  Payments on mortgage loan                                                              --         (4,929)
                                                                                -----------    -----------
   Net Cash Provided By Financing Activities                                          3,283        324,669
                                                                                -----------    -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                                              43,689        (20,924)
                                                                                -----------    -----------
CASH AND CASH EQUIVALENTS:
  Net increase                                                                      470,154        495,912
  Beginning of period                                                             5,998,120      5,784,500
                                                                                -----------    -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                                         $ 6,468,274    $ 6,280,412
                                                                                ===========    ===========
SUPPLEMENTAL CASH FLOW INFORMATION:
Cash paid during the period for:
     Interest                                                                   $     5,278    $    14,908
     Income taxes paid                                                              158,198      1,149,000


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                    THREE AND SIX MONTHS ENDED MARCH 31, 2002


1.   BASIS OF PRESENTATION

     The accompanying  condensed  consolidated  financial statements include the
     accounts  of  Amtech  Systems,  Inc.  and  its  wholly-owned  subsidiaries,
     Tempress Systems, Inc., based in Heerde, The Netherlands, and P. R. Hoffman
     Machine  Products,  Inc.  (collectively,  the  "Company").  All significant
     intercompany   balances   and   transactions   have  been   eliminated   in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in accordance with accounting principles generally accepted in the
     United States,  pursuant to the rules and regulations of the Securities and
     Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the opinion of
     management,   all   adjustments   (which  include  only  normal   recurring
     adjustments) necessary to present fairly the financial position, results of
     operations, and cash flows for the periods presented have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2001.

     The  consolidated  results of operations for the six months ended March 31,
     2002, are not necessarily  indicative of the results to be expected for the
     full year.

2.   ADOPTION OF SAB 101 DURING FISCAL YEAR 2001

     The fiscal 2001 amounts  reflect the Company's  adoption of Securities  and
     Exchange Commission Staff Accounting Bulletin No. 101 ("SAB 101"), "Revenue
     Recognition  in  Financial  Statements,"  effective  October  1,  2000,  as
     discussed in the Company's Form 10-K for the year ended September 30, 2001.

3.   REVENUE RECOGNITION

     During the fourth quarter of fiscal 2001,  the Company  changed its revenue
     recognition  policy  retroactive  to  October 1,  2000,  based on  guidance
     provided  in SAB  101.  The  Company  recognizes  revenue  when  persuasive
     evidence of an arrangement exists; title transfers, generally upon shipment
     or when  services  have  been  rendered;  the  seller's  price  is fixed or
     determinable  and  collectibility  is  reasonably  assured.  Certain of the
     Company's   product   sales  are   accounted   for  as  multiple-   element

                                       6

     arrangements.  For the semiconductor  equipment segment, if the Company has
     met defined customer  specifications  with similarly situated customers and
     the  specific  equipment  and  process  involved,  the  Company  recognizes
     equipment  revenue upon shipment and transfer of title,  and the portion of
     the revenue that is contingent upon installation and acceptance,  generally
     10% - 20% of a system's  selling price, is deferred until those  activities
     are completed. Product sales that are shipped but do not meet this criteria
     are deferred and recognized upon customer acceptance.

     Equipment sold by the polishing  supplies  segment does not involve process
     guarantees or acceptance criteria,  so the related revenue is recorded upon
     shipment.  For all  segments,  sales of spare  parts  and  consumables  are
     recognized upon shipment,  as there are no post shipment  obligations other
     than standard  warranties.  Service revenues are recognized as services are
     performed.   Revenue  related  to  service  contracts  is  recognized  upon
     performance of the services requested by the customer.

     In  accordance  with guidance  provided in SAB 101, the Company  recorded a
     non-cash charge of $690,211 (after reduction for income taxes of $410,000),
     or $0.26 per basic  share on  October  1, 2000 to  reflect  the  cumulative
     effect of the accounting change.

     During  the  three  and six  months  ended  March  31,  2002,  the  Company
     recognized  revenue of $0 and  $499,707,  respectively,  and related  gross
     profit  of $0  and  $122,640,  respectively,  that  were  included  in  the
     cumulative  effect  adjustment as of October 1, 2000.  During the three and
     six months ended March 31, 2001, the Company recognized revenue of $879,906
     and  $1,542,268,  respectively,  and related  gross  profit of $269,075 and
     $482,127,  respectively,  that  were  included  in  the  cumulative  effect
     adjustment as of October 1, 2000.

4.   INVENTORIES

     The components of inventories are as follows:

                                       March 31,       September 30,
                                         2002              2001
                                     ------------      ------------
         Purchased parts and
          raw materials              $  1,814,144      $  2,487,470
         Work-in-process                1,426,761         1,255,676
         Finished goods                 1,102,189         1,061,311
                                     ------------      ------------
         Totals                      $  4,343,094      $  4,804,457
                                     ============      ============

                                       7

5.   EARNINGS (LOSS) PER SHARE



                                     Three Months Ended             Six Months Ended
                                          March 31,                     March 31,
                                   -----------------------      -----------------------
                                      2002         2001            2002         2001
                                   ----------   ----------      ----------   ----------
                                                                 
Net income (loss)                  $  103,311   $  685,305      $  270,173   $  (31,789)

WEIGHTED AVERAGE
SHARES OUTSTANDING:
 Common shares                      2,681,533    2,657,886       2,681,214    2,631,302
 Common equivalents                    97,956       34,949         107,971      135,768
                                   ----------   ----------      ----------   ----------

                                    2,779,489    2,792,835       2,789,185    2,767,070
                                   ==========   ==========      ==========   ==========
EARNINGS (LOSS) PER SHARE:
 Basic                             $      .04   $      .26      $      .10   $     (.01)

 Diluted                           $      .04   $      .25      $      .10   $     (.01)


6.   RECENT ACCOUNTING PRONOUNCEMENTS

     In July 2001, the Financial  Accounting  Standards  Board  ("FASB")  issued
     Statements   of  Financial   Accounting   Standards   No.  141,   "Business
     Combinations" ("SFAS No. 141"), and No. 142, "Goodwill and Other Intangible
     Assets" ("SFAS No. 142"). SFAS No. 141 eliminates  pooling of interest as a
     method for accounting for business combinations.  SFAS No. 142 requires the
     discontinuation  of the amortization of goodwill and intangible assets with
     indefinite  lives and at least an annual  assessment  of whether  there has
     been an  impairment  of such  assets  that  needs  to be  recognized  as an
     impairment  charge.  The Company  must adopt SFAS Nos. 141 and 142 no later
     than  October 1, 2002.  Since  amortization  of  goodwill is  currently  an
     estimated $.1 million per year, the  discontinuation  of such  amortization
     will not have a material  affect on the  Company's  net income or financial
     condition. Management does not expect to incur an impairment charge related
     to its recorded goodwill, approximately $.8 million as of March 31, 2002.

7.   COMPREHENSIVE INCOME (LOSS)

     Comprehensive income for the three months ended March 31, 2002 and 2001 was
     $84,081 and $566,687, respectively. Comprehensive income (loss) for the six
     months  ended  March  31,  2002  and  2001  was  $178,799  and   ($40,134),
     respectively.

                                       8

8.   BUSINESS SEGMENT INFORMATION

     The Company  classifies its products into two core business  segments:  (1)
     the semiconductor equipment segment which designs, manufactures and markets
     semiconductor  wafer  processing  equipment  used  in  the  fabrication  of
     integrated circuits, and (2) the polishing supplies segment, which designs,
     manufactures  and markets  carriers,  templates and  equipment  used in the
     lapping and polishing of wafer thin  materials,  including  silicon  wafers
     used  in the  production  of  semiconductors.  Information  concerning  the
     Company's business segments in fiscal years 2002 and 2001 is as follows:



                                        Three Months Ended              Six Months Ended
                                             March 31,                      March 31,
                                   ----------------------------   ----------------------------
                                       2002            2001           2002            2001
                                   ------------    ------------   ------------    ------------
                                                                      
Revenues
 Semiconductor equipment           $  4,242,600    $  4,475,818   $  8,628,013    $  5,909,425
 Polishing supplies                   1,173,812       2,327,004      2,245,315       4,496,047
                                   ------------    ------------   ------------    ------------
                                   $  5,416,412    $  6,802,822   $ 10,873,328    $ 10,405,472
                                   ============    ============   ============    ============

Operating profit (loss)
 Semiconductor equipment           $    160,045    $    697,176   $    476,932    $    257,890
 Polishing supplies                     (16,521)        334,728       (120,359)        627,207
                                   ------------    ------------   ------------    ------------
Total operating profit                  143,524       1,031,904        356,573         885,097
Interest income - net                    20,787          78,106         55,600         151,768
                                   ------------    ------------   ------------    ------------
Income before income taxes
 and cumulative effect of
 change in accounting
 principle                         $    164,311    $  1,110,010   $    412,173    $  1,036,865
                                   ============    ============   ============    ============


9.   LEGAL PROCEEDINGS

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     eleven  companies  named in a legal action being brought by North Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal  action,  which  appears to have been filed to preserve  the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date.  The Company  acquired the assets of P.R.  Hoffman  Machine  Products
     Corporation  in an  asset  transaction  consummated  on July 1,  1997.  The
     landfill was closed and has not been used by P.R.  Hoffman  since  sometime
     prior to completion of the Company's  acquisition.  Therefore,  the Company
     believes that the named company is the prior owner of the acquired  assets.
     Under the terms of the Asset Purchase Agreement  governing the acquisition,
     the prior owner, P.R. Hoffman Machine Products Corporation, is obligated to
     indemnify  the Company for any breaches of P.R.  Hoffman's  representations
     and warranties in the Asset Purchase Agreement,  including  representations
     relating to  environmental  matters.  In  accordance  with the terms of the

                                       9

     Asset  Purchase  Agreement,  the Company has  provided  notice to the prior
     owner of P.R. Hoffman Machine Products  Corporation of the Company's intent
     to seek indemnification from such owner for any liabilities  resulting from
     this legal action. Based on information  available to the Company as of the
     date of this report, management believes the costs, if any, to resolve this
     matter will not be  material  to the  Company's  results of  operations  or
     financial position.

10.  CONCENTRATION OF CREDIT RISK AND USE OF ESTIMATES

     The  preparation  of financial  statements  in conformity  with  accounting
     principles  generally accepted in the United States requires  management to
     make estimates and assumptions  that affect the reported  amounts of assets
     and liabilities and disclosure of contingent  assets and liabilities at the
     date of the financial  statements and the reported  amounts of revenues and
     expenses during the year. Actual results could differ from those estimates.

     As of  September  30,  2001,  receivables  from  customers  in the  optical
     component  industry  comprised  51% of total  receivables,  of which  three
     accounts comprised 39% of total  receivables,  representing a concentration
     of credit risk as defined by SFAS No. 105, "Disclosure of Information about
     Financial Instruments with Off-Balance Sheet Risk and Financial Instruments
     with Concentration of Credit Risk." As of March 31, 2002,  receivables from
     customers  in  the  optical  component   industry  comprised  3%  of  total
     receivables.

                                       10

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND
        RESULTS OF OPERATIONS

RESULTS OF OPERATIONS

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                 Three Months Ended         Six Months Ended
                                      March 31,                March 31,
                                 ------------------        ------------------
                                  2002        2001          2002        2001
                                 ------      ------        ------      ------
Net revenue                        100%        100%          100%        100%
Cost of product sales              (78)        (64)          (77)        (65)
                                  ----        ----          ----        ----
 Gross margin                       22          36            23          35
Selling, general and
 administrative expenses           (18)        (19)          (19)        (24)
Research and development            (1)         (2)           (1)         (2)
                                  ----        ----          ----        ----
 Operating profit                    3%         15%            3%          9%
                                  ====        ====          ====        ====

     NET REVENUE. The Company's net revenue for the three months ended March 31,
2002 was $5.4  million,  a decrease  of $1.4  million,  or 21%,  compared to net
revenue of $6.8 million for the second  quarter of fiscal 2001.  Revenue for the
three  months  ended  March  31,  2002 and  2001  included  $0 and $.9  million,
respectively,  of revenue that was included in the cumulative  effect adjustment
as of October 1, 2000,  arising from the Company's  adoption of SAB 101.  During
the  quarter  ended  March 31,  2001,  a portion of the  systems  sales were new
products or products that  otherwise had not yet been  demonstrated  to meet the
customers'  specifications,  leading to a net deferral of $.2 million of systems
shipped  during that  quarter.  Conversely,  during the quarter  ended March 31,
2002,  the value of the systems that were  demonstrated  to meet the  customers'
specifications exceeded the value of shipments by $1.4 million.

     Net revenue for the six months ended March 31, 2002 was $10.9  million,  an
increase of $.5 million, or 5%, compared to net revenue of $10.4 million for the
same period of fiscal 2001.  Revenue for the six months ended March 31, 2002 and
2001  included $.5 million and $1.5 million,  respectively,  of revenue that was
included in the cumulative effect adjustment as of October 1, 2000, arising from
the Company's adoption of SAB 101. During the six months ended March 31, 2001, a
portion of the systems  sales were new products or products  that  otherwise had
not yet been  demonstrated to meet the customers'  specifications,  leading to a
net  deferral  of $3.5  million  of systems  shipped  during  those six  months.
Conversely, during the six months ended March 31, 2002, the value of the systems
that were demonstrated to meet the customers'  specifications exceeded the value
of shipments by $2.5 million.

     With the change in revenue recognition pursuant to the guidance provided in
SAB 101, at least some  portion of system sales in the  semiconductor  equipment
segment is deferred generally until it has been installed,  demonstrated to meet
the customer's  specifications and accepted by the customer. Some of the factors
that can affect the length of time from shipment to full revenue recognition are
customer  delays in site  preparation,  availability  of our technicians and the
time it takes for the  customer  to obtain  local  permits.  Because the selling
price of systems  generally range between  $150,000 for automation  products and
$1.2  million on a fully  loaded  automated  diffusion  furnace,  these  factors

                                       11

significantly affect the timing of revenue recognition from customer to customer
and system to system, which will increase the volatility in revenue.

     GROSS MARGIN.  The Company's gross margin decreased by  approximately  $1.3
million, or 52%, to $1.2 million for the three months ended March 31, 2002, from
$2.5  million  during the  comparable  period of the previous  fiscal year.  The
decrease in gross  margin  resulted  from the 21%  decline in revenue  discussed
above and a  significant  change in  product  mix.  Gross  margin was 22% in the
second  quarter of fiscal 2002,  compared to 36% in the second quarter of fiscal
2001.  This decrease  resulted from the spreading of fixed and semi-fixed  costs
over the lower sales volume,  competitive  pricing  pressure and a change in the
mix of products on which revenue was recognized.  Also contributing to the lower
margins in absolute  terms and  relative to revenue,  the average  gross  profit
percentage  on the  deferred  revenue  recognized  during the period is only 23%
compared to the 57% average gross profit  percentage on current period shipments
deferred into future periods.

     Gross  margin  decreased by  approximately  $1.1  million,  or 31%, to $2.5
million  for the six months  ended  March 31,  2002,  from $3.6  million for the
comparable period of the previous fiscal year. This decrease resulted  primarily
from  competitive  pricing  pressure and the change in product mix. Gross margin
decreased  to 23% of revenue for the first six months of fiscal 2002 from 35% in
the first six months of fiscal 2001  primarily due to the spreading of fixed and
semi-fixed costs over the lower sales volume.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses for the second  quarter of fiscal 2002 decreased by $.3
million,  or 23%,  to $1.0  million,  compared  to $1.3  million  for the second
quarter of fiscal  2001.  The  decrease in selling,  general and  administrative
expenses  is  due  primarily  to  cost  reduction  programs  and  a  decline  in
commissions due to decreased sales.

     Selling, general and administrative expenses for the six months ended March
31, 2002  decreased by $.5 million,  or 20%, to $2.0  million,  compared to $2.5
million  for the six months  ended  March 31,  2001.  The  decrease  in selling,
general and administrative  expenses is due primarily to cost reduction programs
and a decline in commissions due to decreased sales.

     RESEARCH AND DEVELOPMENT.  Research and development  costs were essentially
the same, $.1 million, for the three months ended March 31, 2002 and 2001.

     For the first six months of fiscal  2002,  research and  development  costs
declined by $.1 million,  to $.1 million, as compared to $.2 million in the same
period of fiscal 2001. The decrease is due to lower product development activity
during the second quarter of fiscal 2002.

     OPERATING  PROFIT.  Operating  profit for the second quarter of fiscal 2002
was $.1  million,  a decrease of $.9 million,  or 90%,  compared to an operating
profit of $1.0  million  in the same  period of fiscal  2001.  The  decrease  in
operating  profit is primarily  attributable to the 21% decrease in consolidated
revenue, product mix and competitive pricing. On a consolidated basis, operating
profit declined to 3% of revenue in the second quarter of fiscal 2002,  compared
to 15% of revenue in the second quarter of the prior fiscal year,  primarily due
to the  spreading  of fixed costs over lower  revenue and the change in deferred
profits described under gross margin above.

                                       12

     Operating profit for the six months ended March 31, 2002 was $.4 million, a
decrease of $.5 million,  or 56%, compared to an operating profit of $.9 million
in the same period of fiscal 2001. The decrease in operating profit is primarily
attributable to the decline in revenue and competitive  pricing  pressure within
the polishing  supplies  segment.  On a consolidated  basis,  operating  profits
declined to 3% of revenue in the first six months of fiscal 2002, compared to 9%
of revenue in the same period of the prior fiscal year.

     NET INTEREST INCOME. For the three and six months ended March 31, 2002, net
interest income decreased compared to the corresponding  quarter of fiscal 2001,
due to a decline in interest rates.

     As a result of the  foregoing  factors,  income before income taxes and the
cumulative  effect of change in accounting  principle for the second  quarter of
fiscal 2002 was $.2 million, a decrease of $.9 million, or 82%, compared to $1.1
million in the second quarter of fiscal 2001.

     Income  before  income  taxes  and  the  cumulative  effect  of  change  in
accounting  principle for the six months ended March 31, 2002 was $.4 million, a
decrease of $.6  million,  or 60%,  compared to $1.0  million for the six months
ended March 31, 2001.

     PROVISION FOR INCOME TAXES. Income tax expense of $.1 million,  recorded at
an effective tax rate of 37%,  resulted in net income for the second  quarter of
fiscal 2002 of $.1 million.  During the same quarter of fiscal 2001, the Company
recorded income tax expense of $.4 million,  reflecting a 36% effective tax rate
and  resulting  in income  before  cumulative  effect of a change in  accounting
principle of $.7 million.

     Income tax expense of $.1  million,  recorded at an  effective  tax rate of
34%,  resulted in income for the first six months of fiscal 2002 of $.3 million.
During the same period of fiscal 2001, the Company  recorded  income tax expense
of $.4 million,  reflecting  a 36%  effective  tax rate and  resulting in income
before cumulative effect of a change in accounting principle of $.7 million.

     NET  INCOME.  Net  income for the  second  quarter  of fiscal  2002 was $.1
million,  or $.04 per diluted share, a decrease of $.6 million, or 86%, compared
to net income of $.7 million,  or $.25 per diluted share,  in the second quarter
of fiscal  2001.  The  decrease  in net  income is due  primarily  to  decreased
revenues and gross  margins  caused by a general  slowdown in the  semiconductor
industry, competitive pricing pressure and a change in the product mix.

     Net income for the six months ended March 31, 2002 was $.3 million, or $.10
per diluted share, an increase of $.3 million, or 100%, compared to a slight net
loss for the same period of fiscal 2001.  The difference is primarily due to the
after-tax cumulative effect of a change in accounting principle (SAB 101) of $.7
million recorded in the first quarter of fiscal 2001.

     BACKLOG.  At March 31, 2002, the order backlog was $3.9 million, a decrease
of $3.4 million,  or 47%, from the $7.3 million backlog at December 31, 2001. In
addition to the backlog and pursuant to SAB 101,  the Company has deferred  $1.8
million of revenue,  which net of deferred costs  represents  deferred profit of
$1.0 million as of March 31, 2002. As a result,  the Company had a total of $5.7
million of projected  future revenue under contract as of that date.  During the

                                       13

second  and  first  quarter  of  fiscal  2002,   consolidated  new  orders  were
significantly  lower than any quarter  during the  previous  industry  slowdown.
However, as of April 30, 2002, the backlog had increased by 43% to $5.5 million,
which  suggests that the industry may be  experiencing a gradual  recovery.  The
Company cannot  reasonably  estimate the future of the industry  slowdown or the
extent  to which it will  adversely  affect  the  Company's  future  results  of
operations.

     Due to the  possibility of customer  changes in delivery  schedules,  order
cancellations,  potential  delays in  product  shipments,  delays  in  obtaining
inventory  parts  from  suppliers,   failure  to  satisfy  customer   acceptance
requirements and changes in product mix, our backlog as of any point in time may
not be  representative of actual sales and profitability in any future period. A
reduction in backlog during any  particular  fiscal period could have a material
adverse  affect on our business  prospects,  financial  condition and results of
operations.

LIQUIDITY AND CAPITAL RESOURCES

     At March 31,  2002,  the  Company  had $6.5  million of  readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents of $6.0 million at September 30, 2001, an increase of  approximately
$.5 million. The Company continues to believe that there is sufficient available
liquidity for existing operations and its expansion plans.

     CASH FLOW. The $.5 million net increase in cash during the six months ended
March 31,  2002  approximates  the cash flow  provided  by  operations.  The $.6
million cash flow provided by  operations is comprised  primarily of $.3 million
of net income  adjusted for  depreciation  and  amortization  ($.2  million),  a
decrease in accounts  receivable  and  inventories,  prepaid  expenses and other
assets ($.4 million and $.3 million,  respectively)  and an increase in accounts
payable ($.2 million.)  These items were partially  offset by a decrease in both
accrued  liabilities  and customer  deposits and in deferred profit ($.3 million
and $.5 million, respectively.) Investing activities consisted of $.2 million in
purchases of property, plant and equipment.

     At March 31, 2002,  working  capital was $11.7 million,  an increase of $.2
million  from $11.5  million  of working  capital at  September  30,  2001.  The
Company's  current  ratio  increased  slightly to 3.9:1 at the end of the second
quarter of fiscal 2002 from 3.4:1 at the beginning of the 2002 fiscal year.  The
Company  believes  that its  current  ratio  continues  to  evidence  its strong
financial  condition.  At the end of the second quarter of fiscal 2002, cash and
cash  equivalents  comprised 36% of total assets.  The Company  believes that it
continues  to possess the  financial  strength  necessary  to achieve  continued
growth.

                                       14

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended  September  30,  2001.  There are no  material  changes in
reported market risk from September 30, 2001.

FORWARD-LOOKING STATEMENTS

     The  statements  contained  in  this  report  on  Form  10-Q  that  are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no
material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k) the semiconductor equipment industry will recover from the current slowdown,
(l) the condition in the Asian markets will continue to improve, (m) the Company
will be able to continue to control costs, (n) demand for the Company's products
will  not be  adversely  and  significantly  influenced  by  trends  within  the
semiconductor industries, including consolidation of semiconductor manufacturing
operations  through  mergers and the  subcontracting  out of the  production  of
semiconductors  to  foundries,  and (o) the effects of adopting SAB No. 101 will
largely be offset by  increased  sales.  Assumptions  related  to the  foregoing
involve  judgments  with  respect  to,  among  other  things,  future  economic,
competitive  and market  conditions,  all of which are beyond the control of the
Company.  Although the Company  believes  that the  assumptions  underlying  its
forward-looking  statements are reasonable,  any of the assumptions  could prove
inaccurate  and,  therefore,   there  can  be  no  assurance  that  the  results
contemplated in forward-looking  statements will be realized.  In addition,  the
business and operations of the Company are subject to substantial  risks,  which
increase the uncertainty inherent in such forward-looking  statements.  In light
of the significant  uncertainties  inherent in the  forward-looking  information
included herein,  such information should not be regarded as a representation by
the Company,  or any other person,  that the objectives or plans for the Company
will be achieved.

                                       15

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies named in a legal action being brought by North  Middleton  Township
in  Carlisle,  Pennsylvania,  the  owner  of a  landfill  allegedly  found to be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired the assets of P.R.  Hoffman  Machine  Products  Corporation in an asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any breaches of P.R.
Hoffman's  representations  and  warranties  in the  Asset  Purchase  Agreement,
including  representations relating to environmental matters. In accordance with
the terms of the Asset Purchase  Agreement,  the Company has provided  notice to
the prior owner of P.R.  Hoffman Machine  Products  Corporation of the Company's
intent to seek  indemnification  from such owner for any  liabilities  resulting
from this legal action. Based on information  available to the Company as of the
date of this  report,  management  believes  the costs,  if any, to resolve this
matter will not be material to the Company's  results of operations or financial
position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS.

     On March 29, 2002, the Company held its annual meeting of  shareholders  at
which 2,309,443, or 87%, of the 2,650,921 shares outstanding were represented at
the meeting,  either by proxy or those persons in attendance at the meeting. The
following  persons were  elected to the board of directors  with shares voted as
follows:

     ELECTION OF DIRECTORS                     FOR           WITHHELD
     ---------------------                  ---------        --------
     Jong S. Whang                          2,272,172         37,271
     Robert T. Hass                         2,272,191         37,271
     Donald F. Johnston                     2,272,172         27,271
     Alvin Katz                             2,243,922         65,521
     Bruce R. Thaw                          2,272,172         37,271

     At the annual meeting,  the shareholders  also approved an amendment to the
Amtech  Systems,  Inc.  1998 Stock  Option Plan to increase the number of shares
available for issuance  thereunder by 200,000,  from 300,000 to 500,000.  Of the
shares voted on this  proposal,  524,507,  or 72%, voted for,  202,402,  or 28%,
voted against and 16,177 abstained.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

     (a)  Exhibits

          None.

     (b)  Reports on Form 8-K

          The Company  did not file any Current  Reports on Forms 8-K during the
fiscal quarter ended March 30, 2002.

                                       16

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

     AMTECH SYSTEMS, INC.


     By /s/ Robert T. Hass                                Dated:
        ------------------------------------------               ---------------
        Robert T. Hass, Vice-President-Finance and
        (Chief Financial and Accounting Officer)

                                       17