UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q


(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the quarterly period ended: June 30, 2002

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________

                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                 Arizona                                         86-0411215
     (State or other jurisdiction of                          (I.R.S. Employer
     incorporation or organization)                          Identification No.)

  131 South Clark Drive, Tempe, Arizona                             85281
(Address of principal executive offices)                         (Zip Code)


Registrant's telephone number, including area code: 480-967-5146


Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

        Shares of Common Stock outstanding as of June 30, 2002: 2,683,571

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES
                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----
PART I.  FINANCIAL INFORMATION.

         Item 1. Condensed Consolidated Financial Statements

                 Condensed Consolidated Balance Sheets -
                   June 30, 2002 and September 30, 2001 ...................    3

                 Condensed Consolidated Statements of Operations -
                   Three and Nine Months Ended June 30, 2002 and 2001 .....    4

                 Condensed Consolidated Statements of Cash Flows -
                   Nine Months Ended June 30, 2002 and 2001 ...............    5

                 Notes to Condensed Consolidated Financial Statements .....    6

         Item 2. Management's Discussion and Analysis of Financial
                   Condition and Results of Operations

                 Critical Accounting Policies .............................   10

                 Results of Operations ....................................   12

                 Liquidity and Capital Resources ..........................   15

                 Recent Accounting Pronouncements .........................   16

         Item 3. Quantitative and Qualitative Disclosures about
                   Market Risk ............................................   17

                 Forward-Looking Statements ...............................   17

PART II. OTHER INFORMATION.

         Item 1. Legal Proceedings ........................................   18

         Item 4. Submission of Matters to a Vote of Security Holders ......   18

         Item 6. Exhibits and Reports on Form 8-K .........................   18

SIGNATURE .................................................................   19

EXHIBIT 99.1 - Certification Pursuant to 18 U.S.C. Section 1350,
               as Adopted Pursuant to Section 906 of the
               Sarbanes - Oxley Act of 2002 ...............................   20

EXHIBIT 99.2 - Certification Pursuant to 18 U.S.C. Section 1350,
               as Adopted Pursuant to Section 906 of the
               Sarbanes - Oxley Act of 2002 ...............................   21

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS



                                                                    JUNE 30,      SEPTEMBER 30,
                                                                      2002            2001
                                                                  ------------    ------------
                                                                   (Unaudited)
                                                                            
                                     ASSETS
CURRENT ASSETS:
 Cash and cash equivalents                                        $  6,576,294    $  5,998,120
 Accounts receivable - net                                           3,463,214       3,829,867
 Inventories                                                         4,312,170       4,804,457
 Deferred income taxes                                               1,525,000       1,525,000
 Prepaid expenses                                                       26,013          85,643
                                                                  ------------    ------------
          Total current assets                                      15,902,691      16,243,087

PROPERTY, PLANT AND EQUIPMENT - net                                  1,546,172       1,484,437

GOODWILL AND OTHER ASSETS -  net                                       792,971         843,046
                                                                  ------------    ------------
          TOTAL ASSETS                                            $ 18,241,834    $ 18,570,570
                                                                  ============    ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
  Accounts payable                                                $    901,809    $    880,006
  Accrued compensation and related taxes                               600,496         671,075
  Accrued warranty expense                                             425,947         304,228
  Deferred profit                                                      952,157       1,777,173
  Customer deposits                                                    143,986         367,523
  Income taxes payable                                                 241,000         135,000
  Other accrued liabilities                                            191,805         605,547
                                                                  ------------    ------------
          Total current liabilities                                  3,457,200       4,740,552
                                                                  ------------    ------------

LONG-TERM OBLIGATIONS                                                  259,970         246,184
                                                                  ------------    ------------

COMMITMENTS AND CONTINGENCIES (Note 8)

STOCKHOLDERS' EQUITY:
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued and outstanding              --              --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
     2,683,571 and 2,649,171 shares issued and outstanding
     as of June 30 and September 30, respectively                       26,836          26,492
  Additional paid-in capital                                        12,853,515      12,539,040
  Accumulated other comprehensive loss -
    Cumulative foreign currency translation adjustment                (146,845)       (368,242)
  Retained earnings                                                  1,791,158       1,386,544
                                                                  ------------    ------------
          Total stockholders' equity                                14,524,664      13,583,834
                                                                  ------------    ------------
          TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY              $ 18,241,834    $ 18,570,570
                                                                  ============    ============


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
             For Three and Nine Months Ended June 30, 2002 and 2001



                                                                       Three Months Ended June 30,   Nine Months Ended June 30,
                                                                       ---------------------------   ---------------------------
                                                                           2002           2001           2002           2001
                                                                       ------------   ------------   ------------   ------------
                                                                        (Unaudited)    (Unaudited)    (Unaudited)    (Unaudited)
                                                                                                        
Net product sales                                                      $  4,446,385   $  8,022,911   $ 15,319,713   $ 18,428,383
Cost of product sales                                                     3,179,271      5,901,276     11,534,347     12,681,999
                                                                       ------------   ------------   ------------   ------------
    Gross margin                                                          1,267,114      2,121,635      3,785,366      5,746,384

Selling, general and administrative                                       1,002,094      1,333,960      3,014,389      3,826,986
Research and development                                                     84,714         55,727        234,098        302,353
                                                                       ------------   ------------   ------------   ------------
    Operating profit                                                        180,306        731,948        536,879      1,617,045

Interest income - net                                                        24,135         53,998         79,735        205,766
                                                                       ------------   ------------   ------------   ------------
Income before income taxes and cumulative
  effect of change in accounting principle                                  204,441        785,946        616,614      1,822,811
Income tax provision                                                         70,000        307,181        212,000        685,624
                                                                       ------------   ------------   ------------   ------------
Income before cumulative effect of change in
  accounting principle                                                      134,441        478,765        404,614      1,137,187
Cumulative effect of change in accounting
  principle, net of tax benefit of $410,000                                      --             --             --       (690,211)
                                                                       ------------   ------------   ------------   ------------

NET INCOME                                                             $    134,441   $    478,765   $    404,614   $    446,976
                                                                       ============   ============   ============   ============
EARNINGS PER SHARE:

Earnings per share - basic:
  Income before cumulative effect of change in accounting principle    $        .05   $        .18   $        .15   $        .43
  Cumulative effect of change in accounting principle, net of tax                --             --             --           (.26)
                                                                       ------------   ------------   ------------   ------------
Basic earnings per share                                               $        .05   $        .18   $        .15   $        .17
                                                                       ============   ============   ============   ============
Weighted average shares outstanding                                       2,682,491      2,670,822      2,681,639      2,644,475

Earnings per share - diluted:
  Income before cumulative effect of change in accounting principle    $        .05   $        .17   $        .15   $        .41
  Cumulative effect of change in accounting principle, net of tax                --             --             --           (.25)
                                                                       ------------   ------------   ------------   ------------
Diluted earnings per share                                             $        .05   $        .17   $        .15   $        .16
                                                                       ============   ============   ============   ============
Weighted average diluted shares outstanding                               2,770,678      2,862,667      2,781,715      2,803,068


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                FOR THE NINE MONTHS ENDED JUNE 30, 2002 AND 2001
                                   (Unaudited)



                                                                            2002           2001
                                                                        -----------    -----------
                                                                                 
OPERATING ACTIVITIES:
  Net income                                                            $   404,614    $   446,976
  Adjustments to reconcile net income to net
    cash provided by operating activities:
      Cumulative effect of change in accounting principle, net of tax            --        690,211
      Depreciation and amortization                                         324,907        277,474
      Provision for write-off of inventory and receivables                   86,048        492,208
      Deferred income tax (benefit)                                              --       (257,000)
   Decrease (increase) in:
      Accounts receivable                                                   548,675     (1,527,559)
      Inventories, prepaid expenses and other assets                        668,039       (880,339)
   Increase (decrease) in:
      Accounts payable                                                      (24,369)      (678,151)
      Accrued liabilities and customer deposits                            (535,612)       410,178
      Deferred profit                                                      (705,158)       911,029
      Income taxes payable                                                   53,816        (17,207)
                                                                        -----------    -----------
   Net cash provided by (used in) operating activities                      820,960       (132,180)
                                                                        -----------    -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                               (257,378)      (429,872)
                                                                        -----------    -----------
   Net cash used in investing activities                                   (257,378)      (429,872)
                                                                        -----------    -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises                           4,991        411,444
  Payments on mortgage loan                                                      --       (143,540)
                                                                        -----------    -----------
   Net cash provided by financing activities                                  4,991        267,904
                                                                        -----------    -----------
EFFECT OF EXCHANGE RATE CHANGES ON CASH                                       9,601            577
                                                                        -----------    -----------
CASH AND CASH EQUIVALENTS:
  Net increase                                                              578,174       (293,571)
  Beginning of period                                                     5,998,120      5,784,500
                                                                        -----------    -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                                 $ 6,576,294    $ 5,490,929
                                                                        ===========    ===========
SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
     Interest                                                           $     6,946    $    22,194
     Income taxes                                                           146,100      1,164,000


              The accompanying notes are an integral part of these
                       consolidated financial statements.

                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                    THREE AND NINE MONTHS ENDED JUNE 30, 2002


1.   BASIS OF PRESENTATION

     The accompanying  condensed  consolidated  financial statements include the
     accounts  of  Amtech  Systems,  Inc.  and  its  wholly-owned  subsidiaries,
     Tempress Systems, Inc., based in Heerde, The Netherlands, and P. R. Hoffman
     Machine  Products,  Inc.  (collectively,  the  "Company").  All significant
     intercompany   balances   and   transactions   have  been   eliminated   in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in accordance with accounting principles generally accepted in the
     United States,  pursuant to the rules and regulations of the Securities and
     Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the opinion of
     management,  all  adjustments  necessary  to present  fairly the  financial
     position,  results of operations,  and cash flows for the periods presented
     have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2001.

     The  consolidated  results of operations for the nine months ended June 30,
     2002, are not necessarily  indicative of the results  expected for the full
     year.

2.   ADOPTION OF SAB 101 DURING FISCAL YEAR 2001

     The fiscal 2001 amounts  reflect the Company's  adoption of Securities  and
     Exchange Commission Staff Accounting Bulletin No. 101 ("SAB 101"), "Revenue
     Recognition  in  Financial  Statements,"  effective  October  1,  2000,  as
     discussed in the  Company's  Form 10-K for the fiscal year ended  September
     30, 2001.

3.   REVENUE RECOGNITION

     The Company recognizes  revenue when persuasive  evidence of an arrangement
     exists;  title  transfers;  the seller's price is fixed or determinable and
     collectibility  is reasonably  assured.  Certain of the  Company's  product
     sales  are  accounted  for  as  multiple-element   arrangements.   For  the
     semiconductor  equipment  segment,  if the Company has met defined customer
     specifications with similarly situated customers,  equipment and processes,
     the Company  recognizes  equipment  revenue  upon  shipment and transfer of

                                       6

     title, and the portion of the revenue that is contingent upon  installation
     and  acceptance,  generally  10% - 20%  of a  system's  selling  price,  is
     deferred until those  activities are completed.  Revenues for products that
     are shipped but do not meet this criteria are deferred and recognized  when
     the equipment and processes are proven,  generally upon customer acceptance
     or upon obtaining customer acceptance on at least two similar systems.

     Equipment sold by the polishing  supplies  segment does not include process
     guarantees or acceptance criteria,  so the related revenue is recorded upon
     shipment.  For all  segments,  sales of spare  parts  and  consumables  are
     recognized upon shipment,  as there are no post shipment  obligations other
     than standard warranties.  Service revenues are recognized upon performance
     of the  services  requested  by the  customer.  Revenue  related to service
     contracts  is  recognized  as the  services  requested  by the customer are
     performed.

     In  accordance  with guidance  provided in SAB 101, the Company  recorded a
     non-cash  charge of $690,211  (after  reduction  for income tax benefits of
     $410,000), or $0.26 basic earnings per share, on October 1, 2000 to reflect
     the cumulative effect of the accounting change.

     During  the  three  and nine  months  ended  June  30,  2002,  the  Company
     recognized  revenue of $-- and  $499,707,  respectively,  and related gross
     profit  of $--  and  $122,640,  respectively,  that  were  included  in the
     cumulative  effect  adjustment as of October 1, 2000.  During the three and
     nine  months  ended  June 30,  2001,  the  Company  recognized  revenue  of
     $1,114,478  and  $2,656,746,  respectively,  and  related  gross  profit of
     $314,439 and $796,566,  respectively,  that were included in the cumulative
     effect adjustment as of October 1, 2000.

4.   INVENTORIES

     The components of inventories are as follows:

                                               June 30,         September 30,
                                                 2002               2001
                                              ----------         ----------
     Purchased parts and
       raw materials                          $2,521,030         $2,487,470
     Work-in-process                             759,087          1,255,676
     Finished goods                            1,032,053          1,061,311
                                              ----------         ----------
     Totals                                   $4,312,170         $4,804,457
                                              ==========         ==========

                                       7

5.   EARNINGS PER SHARE



                                                Three Months Ended             Nine Months Ended
                                                      June 30,                     June 30,
                                             -------------------------     -------------------------
                                                2002           2001           2002           2001
                                             ----------     ----------     ----------     ----------
                                                                              
     Net income                              $  134,441     $  478,765     $  404,614     $  446,976

     Weighted average shares outstanding
      Common shares                           2,682,491      2,670,822      2,681,639      2,644,475
      Common equivalents                         88,187        191,845        100,076        158,593
                                             ----------     ----------     ----------     ----------
                                              2,770,678      2,862,667      2,781,715      2,803,068
                                             ==========     ==========     ==========     ==========
     Earnings Per Share:
       Basic                                 $      .05     $      .18     $      .15     $      .17
       Diluted                               $      .05     $      .17     $      .15     $      .16


6.   COMPREHENSIVE INCOME

     Comprehensive  income for each of the three  month  periods  ended June 30,
     2002 and 2001 was $.4  million.  Comprehensive  income for the nine  months
     ended June 30, 2002 and 2001 was $.6 million and $.3 million, respectively.

7.   BUSINESS SEGMENT INFORMATION

     The Company  classifies its products into two core business  segments:  (1)
     the semiconductor equipment segment which designs, manufactures and markets
     semiconductor  wafer  processing  equipment  used  in  the  fabrication  of
     integrated circuits, and (2) the polishing supplies segment, which designs,
     manufactures  and markets  carriers,  templates and  equipment  used in the
     lapping and polishing of wafer thin  materials,  including  silicon  wafers
     used  in the  production  of  semiconductors.  Information  concerning  the
     Company's business segments in fiscal years 2002 and 2001 is as follows:



                                          Three Months Ended                Nine Months Ended
                                               June 30,                          June 30,
                                    -----------------------------     ------------------------------
                                        2002             2001             2002              2001
                                    ------------     ------------     ------------      ------------
                                                                            
     Revenues
       Semiconductor equipment      $  2,922,386     $  6,216,622     $ 11,550,399      $ 12,126,047
       Polishing supplies              1,523,999        1,806,289        3,769,314         6,302,336
                                    ------------     ------------     ------------      ------------
                                    $  4,446,385     $  8,022,911     $ 15,319,713      $ 18,428,383
                                    ============     ============     ============      ============
     Operating profit (loss)
       Semiconductor equipment      $    156,586     $    605,354     $    633,518      $    863,244
       Polishing supplies                 23,720          126,594          (96,639)          753,801
                                    ------------     ------------     ------------      ------------
     Total operating profit              180,306          731,948          536,879         1,617,045
     Interest income - net                24,135           53,998           79,735           205,766
                                    ------------     ------------     ------------      ------------
     Income before income taxes
       and cumulative effect of
       change in accounting
       principle                    $    204,441     $    785,946     $    616,614      $  1,822,811
                                    ============     ============     ============      ============


                                       8

8.   LEGAL PROCEEDINGS

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     eleven  companies  named  in a legal  action  brought  by  North  Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal  action,  which  appears to have been filed to preserve  the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date.  The Company  acquired the assets of P.R.  Hoffman  Machine  Products
     Corporation  in an  asset  transaction  consummated  on July 1,  1997.  The
     landfill was closed and has not been used by P.R.  Hoffman  since  sometime
     prior to completion  of the Company's  asset  acquisition.  Therefore,  the
     Company  believes that the named company is the prior owner of the acquired
     assets.  Under the  terms of the Asset  Purchase  Agreement  governing  the
     acquisition, the prior owner, P.R. Hoffman Machine Products Corporation, is
     obligated  to  indemnify  the  Company for any  breaches of P.R.  Hoffman's
     representations and warranties in the Asset Purchase  Agreement,  including
     representations  relating to environmental  matters. In accordance with the
     terms of the Asset Purchase  Agreement,  the Company has provided notice to
     the  prior  owner  of P.R.  Hoffman  Machine  Products  Corporation  of the
     Company's  intent  to  seek   indemnification   from  such  owner  for  any
     liabilities   resulting  from  this  legal  action.  Based  on  information
     available to the Company as of the date of this report, management believes
     the costs,  if any,  to resolve  this  matter  will not be  material to the
     Company's business, results of operations or financial position.

9.   CONCENTRATION OF CREDIT RISK AND USE OF ESTIMATES

     The  preparation  of financial  statements  in conformity  with  accounting
     principles  generally accepted in the United States requires  management to
     make estimates and assumptions  that affect the reported  amounts of assets
     and liabilities and disclosure of contingent  assets and liabilities at the
     date of the financial  statements and the reported  amounts of revenues and
     expenses during the year. Actual results could differ from those estimates.

     As of  September  30,  2001,  receivables  from  customers  in the  optical
     component  industry  comprised 51% of the Company's total  receivables,  of
     which three  accounts  comprised 39% of total  receivables,  representing a
     concentration  of credit  risk as defined by SFAS No. 105,  "Disclosure  of
     Information  about Financial  Instruments with  Off-Balance  Sheet Risk and
     Financial  Instruments  with  Concentration of Credit Risk." As of June 30,
     2002,   receivables  from  customers  in  the  optical  component  industry
     comprised 7% of total receivables.

                                       9

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

CRITICAL ACCOUNTING POLICIES

     "Management's Discussion and Analysis of Financial Condition and Results of
Operations"  discusses  our  consolidated  financial  statements  that have been
prepared in accordance  with  accounting  principles  generally  accepted in the
United States of America. The preparation of these financial statements requires
us to make estimates and  assumptions  that affect the reported amount of assets
and  liabilities  at the date of the  financial  statements,  the  disclosure of
contingent  assets and  liabilities at the date of the financial  statements and
the reported amounts of revenues and expenses during the reporting period.

     On an on-going  basis,  we evaluate our estimates and judgments,  including
those related to revenue  recognition,  valuation  allowances  for inventory and
accounts  receivable,  warranty and impairment of long-lived assets. We base our
estimates and judgments on  historical  experience  and on various other factors
that are believed to be reasonable under the circumstances.  The result of these
estimates and judgments form the basis for making conclusions about the carrying
value of  assets  and  liabilities  that are not  readily  apparent  from  other
sources.  Actual  results  may  differ  from  these  estimates  under  different
assumptions or conditions.

     The SEC suggests that all registrants list their most "critical  accounting
policies" in Management's  Discussion and Analysis. A critical accounting policy
is one which is both  important  to the  portrayal  of the  Company's  financial
condition and results and requires  management's  most difficult,  subjective or
complex  judgments,  often as a result of the need to make  estimates  about the
effect  of  matters  that are  inherently  uncertain.  Management  believes  the
following critical accounting policies affect its more significant judgments and
estimates in the preparation of its consolidated financial statements.

     REVENUE RECOGNITION

     The Company recognizes  revenue when persuasive  evidence of an arrangement
exists;  title  transfers;  the  seller's  price is fixed  or  determinable  and
collectibility is reasonably assured. Certain of the Company's product sales are
accounted for as multiple- element arrangements. For the semiconductor equipment
segment,  if the Company has met defined customer  specifications with similarly
situated customers,  equipment and processes,  the Company recognizes  equipment
revenue upon  shipment and  transfer of title,  and the holdback  portion of the
revenue that is contingent upon installation and acceptance, generally 10% - 20%
of a system's  selling price, is deferred until those  activities are completed.
Revenues  for  products  that are  shipped  but do not meet  this  criteria  are
deferred and recognized  when the equipment and processes are proven,  generally
upon customer  acceptance or upon obtaining customer  acceptance on at least two
similar  systems.  Collection of the holdback  portion of a system sale is often
based  on  system  acceptance  or final  installation.  We  have,  on  occasion,
experienced longer than expected delays in receiving cash from certain customers
pending system acceptance or final  installation.  If some of our customers were
to refuse to pay the remaining holdback,  or otherwise delay final acceptance or
installation, the deferred revenue would not be recognized,  adversely affecting
future operating results.

                                       10

     Equipment sold by the polishing  supplies  segment does not include process
guarantees  or  acceptance  criteria,  so the related  revenue is recorded  upon
shipment. For all segments,  sales of spare parts and consumables are recognized
upon  shipment,  as there are no post shipment  obligations  other than standard
warranties.  Service  revenues are recognized  upon  performance of the services
requested by the customer. Revenue related to service contracts is recognized as
the services requested by the customer are performed.

     INVENTORY VALUATION

     We value our inventory at the lower of cost or the current estimated market
value. We regularly review inventory  quantities on hand and record a write-down
for excess and obsolete  inventory.  The  provision  is  primarily  based on our
estimated forecast of product demand and production  requirements.  However, our
industry is  characterized  by customers in highly  cyclical  industries,  rapid
technological  changes,  frequent  new product  developments  and rapid  product
obsolescence. During 2001 and 2002, there has been a significant decrease in the
worldwide demand for semiconductor  capital  equipment.  Demand for our products
has fluctuated  significantly and may do so in the future, which could result in
an  increase  in the  cost of  inventory  or an  increase  in  excess  inventory
quantities on hand. The Company's  ratio of  inventories to operating  levels is
above,  and is  expected  to  remain  above,  the  historic  norms  due to order
cancellations and the deferral of orders by customers. There can be no assurance
that future developments will not necessitate further write-downs.

     VALUATION ALLOWANCE FOR ACCOUNTS RECEIVABLE

     We maintain allowances for doubtful accounts for estimated losses resulting
from the inability of our customers to make required payments.  These allowances
are based on historical  experience,  credit  evaluations and specific  customer
collection  issues we have identified.  Since our accounts  receivable are often
concentrated  in a relatively few number of customers,  a significant  change in
the liquidity or financial  position of any one of these  customers could have a
material adverse impact on the collectibility of our accounts receivable and our
future operating results.

     WARRANTY

     The Company  provides a limited  warranty,  generally twelve to twenty-four
months,  to all purchasers of its new products and systems.  A provision for the
estimated  cost of  warranty  is  recorded  upon  shipment  of all  systems.  On
occasion,  we have been  required  and may be  required in the future to provide
additional  warranty coverage to ensure that the systems are ultimately accepted
or to maintain  customer  goodwill.  While our warranty costs have  historically
been within our  expectations  and management  believes that the amounts accrued
for warranty  expenditures  are sufficient for all systems sold through June 30,
2002, we cannot  guarantee that we will continue to experience the same warranty
costs we have in the past.  In  addition,  technological  changes or  previously
unknown  defects in raw materials or components may result in more extensive and
frequent warranty service than anticipated,  which could have a material adverse
impact on our operating  results for the periods in which such additional  costs
materialize.

                                       11

     IMPAIRMENT OF LONG-LIVED ASSETS

     We evaluate  whether events and  circumstances  have occurred that indicate
the estimated useful lives of long-lived assets or intangible assets may warrant
revision or that the  remaining  balance may not be  recoverable.  When  factors
indicate  that an asset should be evaluated for possible  impairment,  we use an
estimate of the related  undiscounted net cash flows generated by the asset over
the  remaining  estimated  life of the asset in  measuring  whether the asset is
recoverable.  We make judgments and estimates used in establishing  the carrying
value of long-lived or intangible assets. Those judgments and estimates could be
modified  if  adverse  changes  were to  occur  in the  future  resulting  in an
inability to recover the carrying value of these assets. We have not experienced
any impairments to long-lived assets during fiscal 2001 or the first nine months
of fiscal 2002.  Future adverse changes could be caused by, among other factors,
a continued downturn in the semiconductor industry, a general economic slowdown,
reduced  demand for our products in the market place,  poor  operating  results,
inability to protect intellectual  property or changing technologies and product
obsolescence.

RESULTS OF OPERATIONS

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                  Three Months Ended     Nine Months Ended
                                       June 30,              June 30,
                                  ------------------     -----------------
                                    2002       2001       2002       2001
                                    ----       ----       ----       ----
     Net revenue                     100%       100%       100%       100%
     Cost of product sales           (72)       (74)       (75)       (69)
                                    ----       ----       ----       ----
       Gross margin                   28         26         25         31
     Selling, general and
       administrative expenses       (23)       (17)       (20)       (21)
     Research and development         (2)        (1)        (2)        (2)
                                    ----       ----       ----       ----
       Operating profit                4%         9%         4%         9%
                                    ====       ====       ====       ====

     NET REVENUE.  The Company's net revenue for the three months ended June 30,
2002 was $4.4  million,  a decrease  of $3.6  million,  or 45%,  compared to net
revenue of $8.0 million for the third  quarter of fiscal  2001.  Revenue for the
three  months  ended  June  30,  2002 and 2001  included  $-- and $1.1  million,
respectively,  of revenue that was included in the cumulative  effect adjustment
as of  October  1,  2000,  arising  from  the  Company's  adoption  of SAB  101.
Approximately  52% of the  decline  in  revenue  was due to the  lower  level of
shipments,  while  nearly  48% was due to the  significantly  higher  amount  of
previously  deferred  revenue  recognized  in the third  quarter of fiscal 2001.
During the third  quarter of fiscal 2002,  both  segments of the Company  showed
significant declines in shipments and revenue recognized,  compared to the third
quarter of fiscal 2001, due to the severe industry slowdown. The revenue for the
third  quarter  of fiscal  2002 was also 18% lower  than the  second  quarter of
fiscal 2002, due to declines in the semiconductor segment.  However, the revenue
for the polishing  equipment and supplies  segment,  which tends to be a leading
indicator  for the Company,  were 30% higher in the third quarter of fiscal 2002
compared to the second quarter of fiscal 2002.

                                       12

     Net revenue for the nine months  ended June 30, 2002 was $15.3  million,  a
decrease of $3.1 million,  or 17%,  compared to net revenue of $18.4 million for
the same period of fiscal 2001.  Revenue for the nine months ended June 30, 2002
and 2001  included $.5 million and $2.7 million,  respectively,  of revenue that
was included in the cumulative effect adjustment as of October 1, 2000,  arising
from the  Company's  adoption of SAB 101. The year to date decline in revenue is
due  to a 37%  decline  in  shipments  caused  by  the  severe  decline  in  the
semiconductor industry served by the Company's products.  During the nine months
ended  June 30,  2001,  a portion of the  systems  sales  were new  products  or
products that  otherwise had not yet been  demonstrated  to meet the  customers'
specifications,  leading to a net  deferral  of $1.5  million of revenue  during
those nine months.  During the nine months ended June 30, 2002, the value of the
systems  shipped but deferred in prior  periods that were  recognized as revenue
exceeded the deferral of shipments to future periods, increasing revenue by $2.8
million.

     Pursuant to the guidance provided in SAB 101, at least some portion of each
system sale in the  semiconductor  equipment  segment is  deferred.  Some of the
factors  that can  affect  the  length of time  from  shipment  to full  revenue
recognition are customer delays in site  preparation,  the time it takes for the
customer to obtain local permits and  availability of our  technicians.  Because
the  selling  price of  systems  generally  range  between  $150,000  for mid to
high-end  automation  products and $1.2 million for a fully automated  diffusion
furnace,  these factors  significantly  affect the timing of revenue recognition
from customer to customer and system to system,  which  increases the volatility
in revenue.

     GROSS MARGIN.  The Company's gross margin  decreased by  approximately  $.8
million,  or 38%, to $1.3 million for the three months ended June 30, 2002, from
$2.1  million  during the  comparable  period of the previous  fiscal year.  The
decrease in gross  margin  resulted  from the 45%  decline in revenue  discussed
above and a change in product mix.  Gross margin was 28% in the third quarter of
fiscal  2002,  compared  to 26% in the third  quarter of fiscal  2001,  with the
improvement  primarily  related  to the timing of  recognition  of the 10-20% of
system revenue that is contingent upon installation and acceptance.

     Gross  margin  decreased by  approximately  $1.9  million,  or 33%, to $3.8
million  for the nine  months  ended June 30,  2002,  from $5.7  million for the
comparable period of the previous fiscal year.  Approximately 50% of the decline
in gross  margin  relates to the 17%  decline in revenue,  with the  competitive
pricing  pressures  and product mix  comprising  the rest of the decline.  Gross
margin decreased to 25% of revenue for the first nine months of fiscal 2002 from
31% in the first nine  months of fiscal 2001 due to the  spreading  of fixed and
semi-fixed costs over the lower sales volume,  competitive  pricing pressure and
product mix.

     SELLING,  GENERAL  AND  ADMINISTRATIVE   EXPENSES.   Selling,  general  and
administrative  expenses for the third  quarter of fiscal 2002  decreased by $.3
million, or 23%, to $1.0 million, compared to $1.3 million for the third quarter
of fiscal 2001. The decrease in selling,  general and administrative expenses is
due  primarily to the higher than usual bad debt expense in the third quarter of
fiscal 2001 related to sales into the optical component market.

                                       13

     Selling, general and administrative expenses for the nine months ended June
30, 2002  decreased by $.8 million,  or 21%, to $3.0  million,  compared to $3.8
million  for the nine  months  ended June 30,  2001.  The  decrease  in selling,
general and administrative expenses is due primarily to a decline in commissions
related to the decrease in revenue and a higher  percentage of direct sales that
bear lower  commissions  and to the higher than usual bad debt expense in fiscal
2001.  Cost  reduction  programs also  contributed to the lower expense level in
fiscal 2002.

     RESEARCH AND DEVELOPMENT.  Research and development  costs were essentially
the same, $.1 million for the three months ended June 30, 2002 and 2001. For the
first nine months of fiscal 2002, research and development costs declined by $.1
million, to $.2 million, as compared to $.3 million in the same period of fiscal
2001, due to lower product development activity during fiscal 2002.

     OPERATING PROFIT. Operating profit for the third quarter of fiscal 2002 was
$.2 million, a decrease of $.5 million,  or 71%, compared to an operating profit
of $.7 million in the same  quarter of fiscal  2001.  The  decrease in operating
profit is primarily  attributable to the 45% decrease in  consolidated  revenue.
Operating  profit declined to 4% of revenue in the third quarter of fiscal 2002,
compared  to 9% of  revenue  in the  third  quarter  of the prior  fiscal  year,
primarily  due to the  spreading of fixed  selling,  general and  administrative
costs over lower revenue.

     Operating profit for the nine months ended June 30, 2002 was $.5 million, a
decrease  of $1.1  million,  or 69%,  compared  to an  operating  profit of $1.6
million in the same period of fiscal 2001.  The decrease in operating  profit is
primarily  attributable  to the decline in revenue and the related gross margin,
which was only  partially  offset by lower selling,  general and  administrative
expenses.  Operating  profits declined to 4% of revenue in the first nine months
of fiscal 2002, compared to 9% of revenue in the same period of the prior fiscal
year, primarily due to the spreading of fixed and semi-fixed manufacturing costs
over lower revenue.

     NET INTEREST INCOME. For the three and nine months ended June 30, 2002, net
interest income decreased  compared to the corresponding  quarter of fiscal 2001
due to a decline in interest rates.

     As a result of the  foregoing  factors,  income before income taxes and the
cumulative  effect of change in  accounting  principle  for the third quarter of
fiscal 2002 was $.2 million, a decrease of $.6 million,  or 75%, compared to $.8
million in the third quarter of fiscal 2001.

     Income  before  income  taxes  and  the  cumulative  effect  of  change  in
accounting  principle for the nine months ended June 30, 2002 was $.6 million, a
decrease of $1.2 million,  or 67%,  compared to $1.8 million for the nine months
ended June 30, 2001.

     PROVISION FOR INCOME TAXES. Income tax expense of $.1 million,  recorded at
an effective  tax rate of 34%,  resulted in net income for the third  quarter of
fiscal 2002 of $.1 million.  During the same quarter of fiscal 2001, the Company
recorded income tax expense of $.3 million,  reflecting a 39% effective tax rate
and  resulting  in income  before  cumulative  effect of a change in  accounting
principle of $.5 million. The decline in the effective tax rate is primarily due

                                       14

to the fact that most of the fiscal 2002  earnings have been and are expected to
be derived from The Netherlands  operation,  which has a comparable  federal tax
rate,  but has no state income taxes.  In fiscal 2001, a significant  portion of
the net earnings was derived from operations in  Pennsylvania  and Arizona where
state income taxes apply.

     Income tax expense of $.2  million,  recorded at an  effective  tax rate of
34%, resulted in income for the first nine months of fiscal 2002 of $.4 million.
During the same period of fiscal 2001, the Company  recorded  income tax expense
of $.7 million,  reflecting  a 38%  effective  tax rate and  resulting in income
before  cumulative  effect of a change in accounting  principle of $1.1 million.
See the  previous  paragraph  for a discussion  of the change in  effective  tax
rates.

     NET  INCOME.  Net  income  for the third  quarter  of  fiscal  2002 was $.1
million,  or $.05 per diluted share, a decrease of $.4 million, or 80%, compared
to net income of $.5 million, or $.17 per diluted share, in the third quarter of
fiscal 2001.  The decrease in net income is due primarily to decreased  revenues
caused by a severe slowdown in the semiconductor equipment industry, competitive
pricing pressure and a change in the product mix.

     Net income for the nine months ended June 30, 2002 was $.4 million, or $.15
per diluted share,  essentially  unchanged from $.4 million, or $.16 per diluted
share,  for the same period of fiscal  2001.  Revenues  and gross  margins  were
higher in fiscal 2001, but were partially offset by the charge for the after-tax
cumulative  effect of a change in accounting  principle (SAB 101) of $.7 million
recorded in the first quarter of fiscal 2001.

     BACKLOG.  At June 30, 2002, the order backlog was $5.8 million, an increase
of $1.9  million,  or 49%,  from the $3.9 million  backlog at March 31, 2002. In
addition  to the  backlog  and  pursuant to SAB 101, as of June 30 and March 31,
2002, the Company had deferred $1.6 million and $1.8 million,  respectively,  of
revenue, which net of deferred costs represented deferred profit of $1.0 million
for each of the respective periods. As a result, the Company had a total of $7.4
million of projected  future  revenue under contract as of June 30, 2002. Due to
the possibility of customer changes in delivery schedules,  order cancellations,
potential delays in product shipments,  delays in obtaining inventory parts from
suppliers,  failure to satisfy customer  acceptance  requirements and changes in
product  mix, the backlog as of any point in time may not be  representative  of
actual  sales and  profitability  in any future  period.  A reduction in backlog
during any particular  fiscal period could have a material adverse affect on our
business prospects, financial condition and results of operations.

LIQUIDITY AND CAPITAL RESOURCES

     At June 30,  2002,  the  Company  had $6.6  million  of  readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents of $6.0 million at September 30, 2001, an increase of  approximately
$.6 million. The Company continues to believe that there is sufficient available
liquidity for existing operations and its expansion plans.

                                       15

     CASH FLOW.  The $.6  million  net  increase  in cash during the nine months
ended  June  30,  2002  approximates  the $.8  million  cash  flow  provided  by
operations  offset by $.3 million in capital  investments.  The $.8 million cash
flow  provided by  operations  was derived  from $.4 million of net income,  the
addition of $.3 million of depreciation  and  amortization  which do not require
the  use of  cash,  and  declines  in  accounts  receivable  ($.5  million)  and
inventories,  prepaid expenses and other assets ($.7 million).  These items were
partially offset by a decrease in both accrued liabilities and customer deposits
and in deferred  profit ($.5 million and $.7 million,  respectively).  Investing
activities  consisted  of $.3  million  in  purchases  of  property,  plant  and
equipment.

     At June 30, 2002,  working  capital was $12.4  million,  an increase of $.9
million  from $11.5  million  of working  capital at  September  30,  2001.  The
Company's  current  ratio  increased  slightly  to 4.6:1 at the end of the third
quarter of fiscal 2002 from 3.4:1 at the beginning of the 2002 fiscal year.  The
Company  believes  that its  current  ratio  continues  to  evidence  its strong
financial  condition.  At the end of the third quarter of fiscal 2002,  cash and
cash  equivalents  comprised  36%  of  total  assets  and  stockholders'  equity
accounted  for  80% of  total  capitalization.  The  Company  believes  that  it
continues  to possess the  financial  strength  necessary  to achieve  continued
growth.

RECENT ACCOUNTING PRONOUNCEMENTS

     In July 2001, the Financial  Accounting  Standards  Board  ("FASB")  issued
Statements of Financial  Accounting  Standards No. 141, "Business  Combinations"
("SFAS No. 141"), and No. 142, "Goodwill and Other Intangible Assets" ("SFAS No.
142").  SFAS No. 141  eliminates  pooling of interest as a method for accounting
for business  combinations.  SFAS No. 142 requires  the  discontinuation  of the
amortization  of goodwill and  intangible  assets with  indefinite  lives and at
least an annual  assessment  of  whether  there has been an  impairment  of such
assets that needs to be  recognized as an  impairment  charge.  The Company must
adopt SFAS Nos. 141 and 142 no later than October 1, 2002. Since amortization of
goodwill is currently an estimated $.1 million per year, the  discontinuation of
such amortization will not have a material affect on the Company's net income or
financial  condition.  Management does not expect to incur an impairment  charge
related to its recorded goodwill, approximately $.7 million as of June 30, 2002.

     In  August  2001,  the  FASB  issued  SFAS  No.  144,  "Accounting  for the
Impairment or Disposal of  Long-Lived  Assets"  ("SFAS No.  144").  SFAS No. 144
amends existing  guidance on asset  impairment and provides a single  accounting
model for  long-lived  assets to be disposed  of. SFAS No. 144 also  changes the
criteria for  classifying an asset as  held-for-sale;  and broadens the scope of
businesses  to be  disposed  of  that  qualify  for  reporting  as  discontinued
operations and changes the timing of recognizing losses on such operations.  The
Statement is effective for fiscal years  beginning  after December 15, 2001. The
adoption  of SFAS No.  144 is not  expected  to have a  material  effect  on the
Company's financial statements.

                                       16

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended September 30, 2001. The Company did not participate in any
derivative (hedging or speculative) activities in fiscal 2001 or 2002. There are
no material changes in reported market risk from September 30, 2001.

FORWARD-LOOKING STATEMENTS

     The statements contained in this Quarterly Report on Form 10-Q that are not
historical fact are  forward-looking  statements (as such term is defined in the
Private  Securities  Litigation  Reform Act of 1995).  These  statements  can be
identified  by the  use of  forward  looking  terminology  such  as  "believes,"
"expects,"  "may,"  "will,"  "should,"  "anticipates,"  or  "possible,"  or  the
negative thereof or other written variations thereof or comparable  terminology.
The   forward-looking   statements   contained   herein  are  based  on  current
expectations  that involve a number of risks and  uncertainties.  Among  others,
these  forward-looking  statements are based on assumptions that (a) the Company
will not lose a  significant  customer or  customers,  (b) the Company  will not
experience  significant  reductions in demand or rescheduling or cancellation of
customer purchase orders, (c) the Company's products will remain accepted within
their respective markets and will not be significantly further replaced by newer
technology  equipment,  (d) competitive  conditions within the Company's markets
will not  materially  deteriorate,  (e) the  Company's  efforts to  improve  its
products and maintain  its  competitiveness  in the markets in which it competes
will  continue  to  progress  and  that  the  savings   associated   with  these
expenditures  and/or the increased product demand resulting  therefrom justifies
such development costs, (f) the Company will be able to retain, and when needed,
add  key  technical   and   management   personnel,   (g)  business  or  product
acquisitions,  if any,  will be  successfully  integrated  and  the  results  of
operations  therefrom  will support the  acquisition  price,  (h) the  Company's
forecasts  will  accurately  anticipate  market  demand,  (i)  there  will be no
material adverse changes in the Company's existing  operations,  (j) the Company
will be able to obtain sufficient equity or debt funding to increase its capital
resources by the amount needed for new business or product acquisitions, if any,
(k) the semiconductor equipment industry will recover from the current slowdown,
(l) the condition in the Asian markets will continue to improve, (m) the Company
will be able to continue to control costs, (n) demand for the Company's products
will  not be  adversely  and  significantly  influenced  by  trends  within  the
semiconductor industries, including consolidation of semiconductor manufacturing
operations  through  mergers and the  subcontracting  out of the  production  of
semiconductors  to  foundries,  and (o) the effects of adopting SAB No. 101 will
largely be offset by  increased  sales.  Assumptions  related  to the  foregoing
involve  judgments  with  respect  to,  among  other  things,  future  economic,
competitive  and market  conditions,  all of which are beyond the control of the
Company.  Although the Company  believes  that the  assumptions  underlying  its
forward-looking  statements are reasonable,  any of the assumptions  could prove
inaccurate  and,  therefore,   there  can  be  no  assurance  that  the  results
contemplated in forward-looking  statements will be realized.  In addition,  the
business and operations of the Company are subject to substantial  risks,  which
increase the uncertainty inherent in such forward-looking  statements.  In light
of the significant  uncertainties  inherent in the  forward-looking  information

                                       17

included herein,  such information should not be regarded as a representation by
the Company,  or any other person,  that the objectives or plans for the Company
will be achieved.

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies  named in a legal  action  brought by North  Middleton  Township in
Carlisle,   Pennsylvania,  the  owner  of  a  landfill  allegedly  found  to  be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired the assets of P.R.  Hoffman  Machine  Products  Corporation in an asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any breaches of P.R.
Hoffman's  representations  and  warranties  in the  Asset  Purchase  Agreement,
including  representations relating to environmental matters. In accordance with
the terms of the Asset Purchase  Agreement,  the Company has provided  notice to
the prior owner of P.R.  Hoffman Machine  Products  Corporation of the Company's
intent to seek  indemnification  from such owner for any  liabilities  resulting
from this legal action. Based on information  available to the Company as of the
date of this  report,  management  believes  the costs,  if any, to resolve this
matter will not be material to the Company's business,  results of operations or
financial position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

     None.

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

     (a)  Exhibits

          Exhibit 99.1 -  Certification  Pursuant to 18 U.S.C.  Section 1350, as
Adopted Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002

          Exhibit 99.2 -  Certification  Pursuant to 18 U.S.C.  Section 1350, as
Adopted Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002

     (b)  Reports on Form 8-K

          No Current  Reports on Form 8-K were filed by the  Company  during the
quarterly period ended June 30, 2002.

                                       18

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

     AMTECH SYSTEMS, INC.

     By /s/ Robert T. Hass                                 Dated: August 8, 2002
        ----------------------------                              --------------
        Robert T. Hass, Vice-President-Finance and
        (Chief Financial and Accounting Officer)