EXHIBIT 23

                                 FORM OF CONSENT

INDEPENDENT AUDITOR'S CONSENT

The Board of Directors
Amtech Systems, Inc.:

We  consent  to the  incorporation  by  reference  in the Form  10-K/A of Amtech
Systems,  Inc.  of our report  dated  November  27,  2002,  with  respect to the
consolidated balance sheet of Amtech Systems, Inc. as of September 30, 2002, and
the related  consolidated  statements of operations,  stockholders'  equity, and
cash  flows  for the  year  then  ended,  and the  related  financial  statement
schedule,  which report appears in the September 30, 2002, annual report on Form
10-K of Amtech Systems, Inc.

                                        /s/ KPMG LLP

Phoenix, Arizona
February 7, 2003