UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q


(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the quarterly period ended:  December 31, 2002

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________

                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)

                 Arizona                                         86-0411215
     (State or other jurisdiction of                          (I.R.S. Employer
     incorporation or organization)                          Identification No.)

  131 South Clark Drive, Tempe, Arizona                             85281
(Address of principal executive offices)                         (Zip Code)

Registrant's telephone number, including area code: 480-967-5146

Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

      Shares of Common Stock outstanding as of January 31, 2002: 2,689,571

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES
                                TABLE OF CONTENTS

                                                                            Page
                                                                            ----

PART I. FINANCIAL INFORMATION.

  Item 1. Condensed Consolidated Financial Statements

           Condensed Consolidated Balance Sheets -
             December 31, 2002 and September 30, 2002.......................   3

           Condensed Consolidated Statements of Operations -
             Three Months Ended December 31, 2002 and 2001..................   4

           Condensed Consolidated Statements of Cash Flows -
             Three Months Ended December 31, 2002 and 2001..................   5

           Notes to Condensed Consolidated Financial Statements.............   6

  Item 2. Management's Discussion and Analysis of Financial
            Condition and Results of Operations

           Caution Regarding Forward-Looking Statements.....................  11

           Documents to Review In Connection with Management's
             Analysis of Financial Condition and Results of Operations......  11

           Results of Operations............................................  11

           Liquidity and Capital Resources..................................  15

           Critical Accounting Policies.....................................  16

           New Accounting Pronouncements ...................................  19

  Item 3. Quantitative and Qualitative Disclosures about Market Risk........  20

  Item 4. Controls and Procedures...........................................  20

PART II. OTHER INFORMATION.

  Item 1.  Legal Proceedings ...............................................  21

  Item 4.  Submission of Matters to a Vote of Security Holders..............  21

  Item 6.  Exhibits and Reports on Form 8-K.................................  21

SIGNATURE...................................................................  21

SARBABES-OXLEY ACT SECTION 302(A) CERTIFICATIONS............................  22

EXHIBIT INDEX ..............................................................  24

EXHIBIT 99.1 - Certification Pursuant to 18 U.S.C. Section 1350, as
               Adopted Pursuant to Section 906 of the Sarbanes -
               Oxley Act of 2002 ...........................................  25

EXHIBIT 99.2 - Certification Pursuant to 18 U.S.C. Section 1350, as
               Adopted Pursuant to Section 906 of the Sarbanes -
               Oxley Act of 2002 ...........................................  26

                                       2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS



                                                                   DECEMBER 31,    SEPTEMBER 30,
                                                                       2002            2002
                                                                   ------------    ------------
                                                                    (Unaudited)
                                                                             
                                     ASSETS
 CURRENT ASSETS:
  Cash and cash equivalents                                        $  6,081,898    $  8,045,663
  Accounts receivable - net                                           3,927,529       2,695,323
  Inventories                                                         3,602,118       3,020,890
  Deferred income taxes                                               1,084,000       1,044,000
  Prepaid expenses                                                      132,046          82,291
  Income taxes refundable                                               495,000              --
                                                                   ------------    ------------
           Total current assets                                      15,322,591      14,888,167

 PROPERTY, PLANT AND EQUIPMENT - net                                  1,613,737       1,642,084
 DEFERRED INCOME TAXES                                                   88,000          88,000
 GOODWILL AND OTHER ASSETS -  net                                       771,700         774,849
                                                                   ------------    ------------
           TOTAL ASSETS                                            $ 17,796,028    $ 17,393,100
                                                                   ============    ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY
 CURRENT LIABILITIES:
   Accounts payable                                                $    909,571    $    891,640
   Accrued compensation and related taxes                               662,303         653,045
   Accrued warranty expense                                             276,199         262,573
   Deferred profit                                                      667,770         479,964
   Customer deposits                                                    445,649          91,417
   Income taxes payable                                                      --          37,000
   Other accrued liabilities                                            247,064         306,601
                                                                   ------------    ------------
           Total current liabilities                                  3,208,556       2,722,240
                                                                   ------------    ------------

 DEFERRED PROFIT - LONG TERM                                             65,396         199,966
 LONG-TERM OBLIGATIONS                                                  268,398         259,217
                                                                   ------------    ------------

 COMMITMENTS AND CONTINGENCIES

 STOCKHOLDERS' EQUITY:
   Preferred stock; no specified terms;
     100,000,000 shares authorized; none issued                              --              --
   Common stock; $0.01 par value; 100,000,000 shares authorized;
      2,689,571 and 2,688,571 shares issued and outstanding
      as of December 31 and September 30, respectively                   26,896          26,886
   Additional paid-in capital                                        12,860,831      12,859,715
   Accumulated other comprehensive loss -
     Cumulative foreign currency translation adjustment                 (22,196)       (179,639)
   Retained earnings                                                  1,388,147       1,504,715
                                                                   ------------    ------------
           Total stockholders' equity                                14,253,678      14,211,677
                                                                   ------------    ------------
           TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY              $ 17,796,028    $ 17,393,100
                                                                   ============    ============


                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
             For the Three Months Ended December 31, 2002 and 2001
                                   (Unaudited)

                                                 Three Months Ended December 31,
                                                 -------------------------------
                                                     2002               2001
                                                 -----------        -----------
Net revenues                                     $ 4,329,197        $ 5,456,916
Cost of sales                                      3,437,295          4,137,433
                                                 -----------        -----------
         Gross margin                                891,902          1,319,483

Selling, general and administrative                1,027,696          1,016,503
Research and development                              57,734             89,931
                                                 -----------        -----------
        Operating income (loss)                     (193,528)           213,049

Interest income - net                                 13,960             34,813
                                                 -----------        -----------

Income (loss) before income taxes                   (179,568)           247,862
Income tax provision (benefit)                       (63,000)            81,000
                                                 -----------        -----------
NET INCOME (LOSS)                                $  (116,568)       $   166,862
                                                 ===========        ===========

EARNINGS (LOSS) PER SHARE:

Basic earnings (loss) per share                  $      (.04)      $        .06
Weighted average shares outstanding                2,689,006          2,680,891

Diluted earnings (loss) per share                $      (.04)      $        .06
Weighted average shares outstanding                2,689,006          2,798,330

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
              FOR THE THREE MONTHS ENDED DECEMBER 31, 2002 AND 2001
                                   (Unaudited)



                                                             2002           2001
                                                         -----------    -----------
                                                                  
OPERATING ACTIVITIES:
  Net income  (loss)                                     $  (116,568)   $   166,862
  Adjustments to reconcile net income (loss) to net
    cash provided by (used in) operating activities:
      Depreciation and amortization                          118,947        103,407
      Provision for write-off of receivables                   9,810          9,072
      Deferred income taxes                                  (40,000)         5,000
   Decrease (increase) in:
      Accounts receivable                                 (1,101,414)      (155,469)
      Inventories                                           (472,638)       813,122
      Prepaid expenses and other assets                      (49,549)       (41,307)
   Increase (decrease) in:
      Accounts payable                                       (17,950)      (148,601)
      Accrued liabilities and customer deposits              266,159        340,544
      Deferred Profit                                         32,559       (175,998)
      Income taxes payable                                  (523,970)       (54,186)
                                                         -----------    -----------
   Net Cash Provided By (Used In) Operating Activities    (1,894,614)       862,446
                                                         -----------    -----------

INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                 (46,823)      (109,023)
                                                         -----------    -----------
   Net Cash Used In Investing Activities                     (46,823)      (109,023)
                                                         -----------    -----------

FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises            1,126          2,409
   Net Cash Provided By Financing Activities                   1,126          2,409
                                                         -----------    -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                      (23,454)        12,066
                                                         -----------    -----------

CASH AND CASH EQUIVALENTS:
  Net increase (decrease)                                 (1,963,765)       767,898
  Beginning of period                                      8,045,663      5,998,120
                                                         -----------    -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                  $ 6,081,898    $ 6,766,018
                                                         ===========    ===========

SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
     Interest                                            $     7,547    $     3,409
     Income taxes paid                                       514,000        137,000


                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                      THREE MONTHS ENDED DECEMBER 31, 2002


1.   BASIS OF PRESENTATION

     The accompanying  unaudited  condensed  consolidated  financial  statements
     include  the  accounts  of  Amtech  Systems,   Inc.  and  its  wholly-owned
     subsidiaries, Tempress Systems, Inc., based in Heerde, The Netherlands, and
     P. R. Hoffman Machine Products,  Inc.  (collectively,  the "Company").  All
     significant  intercompany balances and transactions have been eliminated in
     consolidation.

     The  accompanying  condensed  consolidated  financial  statements have been
     prepared in accordance with accounting principles generally accepted in the
     United States,  pursuant to the rules and regulations of the Securities and
     Exchange  Commission  (the  "SEC"),  and are  unaudited.  In the opinion of
     management,  all  adjustments  necessary  to present  fairly the  financial
     position,  results of operations,  and cash flows for the periods presented
     have been made.

     Certain information and footnote disclosures normally included in financial
     statements  have  been  condensed  or  omitted  pursuant  to the  rules and
     regulations of the SEC. These condensed  consolidated  financial statements
     should be read in conjunction  with the consolidated  financial  statements
     and notes thereto  included in the Company's Annual Report on Form 10-K for
     the fiscal year ended September 30, 2002.

     The consolidated  results of operations for the three months ended December
     31, 2002, are not  necessarily  indicative of the results  expected for the
     full year.

2.   CRITICAL ACCOUNTING POLICIES

     See  Management's  Discussion  and Analysis for a summary and discussion of
     critical accounting policies.

3.   DEFERRED PROFIT

     During the three months ended  December  31, 2001,  the Company  recognized
     revenue of $499,707 and related gross profit of $122,640 that were included
     in the cumulative effect adjustment as of October 1, 2000.

                                       6

     The components of deferred profit are as follows:



                              December 31, 2002                      September 30, 2002
                     ------------------------------------   ------------------------------------
                      Deferred     Deferred     Deferred     Deferred     Deferred     Deferred
                      Revenue        Costs       Profit      Revenue        Costs       Profit
                     ----------   ----------   ----------   ----------   ----------   ----------
                                                                    
Systems awaiting
  installation       $  767,620   $  552,026   $   15,594   $  992,600   $   62,285   $   30,315
Systems awaiting
  final acceptance      517,572           --      517,572      449,615           --      449,615
                     ----------   ----------   ----------   ----------   ----------   ----------
    Total            $1,285,192   $  552,026   $  733,166   $1,442,215   $  762,285   $  679,930
                     ==========   ==========   ==========   ==========   ==========   ==========


4.   INVENTORIES

     The components of inventories are as follows:

                                                December 31,   September 30,
                                                    2002           2002
                                                 ----------     ----------
     Purchased parts and raw materials           $1,996,658     $1,720,728
     Work-in-process                                780,426        534,057
     Finished goods                                 825,034        766,105
                                                 ----------     ----------
                       Totals                    $3,602,118     $3,020,890
                                                 ==========     ==========

5.   COMPREHENSIVE INCOME

                                                       Three Months Ended
                                                          December 31,
                                                    -----------------------
                                                       2002         2001
                                                    ---------    ---------
     Net income (loss)                              $(116,568)   $ 166,862
     Foreign currency translation adjustment          157,443      (72,144)
                                                    ---------    ---------
          Comprehensive income                         40,875       94,718
                                                    =========    =========

                                       7

6.   EARNINGS PER SHARE

                                               Three Months Ended December 31,
                                               -------------------------------
                                                   2002                2001
                                               -----------         -----------
     Net income (loss)                         $  (116,568)        $   166,862

     Weighted average shares outstanding:
        Common shares                            2,689,006           2,680,891
        Common equivalents                              --             117,439
                                               -----------         -----------
                                                 2,689,006           2,798,330
                                               ===========         ===========

     Earnings (Loss) Per Share:
        Basic                                  $      (.04)        $       .06
        Diluted                                $      (.04)        $       .06

     As of December 31, 2002, 97,132 options had exercise prices that were lower
     than the market  value of the stock on that  date.  These  options  are not
     classified as common  equivalents in the above table since the net loss for
     the period causes them to be antidulutive.

7.   BUSINESS SEGMENT INFORMATION

     The  Company  classifies  its  products  into two core  business  segments,
     semiconductor equipment and polishing supplies. The semiconductor equipment
     segment designs,  manufactures and markets  semiconductor  wafer processing
     and handling equipment used in the fabrication of integrated circuits. Also
     aggregated in the  semiconductor  equipment  segment are the  manufacturing
     support service business and any difference  between the planned  corporate
     expenses,  which are allocated to the segments based upon their revenue and
     the  Company's  investment  in each,  and actual  corporate  expenses.  The
     polishing  supplies  segment designs,  manufactures  and markets  carriers,
     templates  and  equipment  used in the lapping and  polishing of wafer thin
     materials,   including   silicon   wafers   used  in  the   production   of
     semiconductors.  Information  concerning the Company's business segments is
     as follows:

                                              Three Months Ended December 31,
                                              -------------------------------
                                                  2002                2001
                                              -----------         -----------
     Revenues
       Semiconductor equipment                $ 3,116,803         $ 4,385,413
       Polishing supplies                       1,212,394           1,071,503
                                              -----------         -----------
                                              $ 4,329,197         $ 5,456,916
                                              ===========         ===========
     Operating profit (loss)
       Semiconductor equipment                $   (94,213)        $   316,887
       Polishing supplies                         (99,315)           (103,838)
                                              -----------         -----------
     Total operating profit (loss)               (193,528)            213,049
       Interest income - net                       13,960              34,813
                                              -----------         -----------
     Income (loss) before income taxes        $  (179,568)        $   247,862
                                              ===========         ===========

                                       8

8.   LEGAL PROCEEDINGS

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
     eleven  companies  named  in a legal  action  brought  by  North  Middleton
     Township in Carlisle, Pennsylvania, the owner of a landfill allegedly found
     to be contaminated. No detailed allegations have been filed as part of this
     legal  action,  which  appears to have been filed to preserve  the right to
     file claims for  contribution  to the  clean-up of the  landfill at a later
     date. The Company  acquired the assets of P.R.  Hoffman  Machine  Products,
     Inc. in an asset transaction  consummated on July 1, 1997. The landfill was
     closed  and has not  been  used by P.R.  Hoffman  since  sometime  prior to
     completion  of the  Company's  asset  acquisition.  Therefore,  the Company
     believes that the named company is the prior owner of the acquired  assets.
     Under the terms of the Asset Purchase Agreement  governing the acquisition,
     the prior owner, P.R. Hoffman Machine Products Corporation, is obligated to
     indemnify  the  Company  for  any  breaches  of  its   representations  and
     warranties  in the  Asset  Purchase  Agreement,  including  representations
     relating to  environmental  matters.  In  accordance  with the terms of the
     Asset  Purchase  Agreement,  the Company has  provided  notice to the prior
     owner of P.R. Hoffman Machine Products  Corporation of the Company's intent
     to seek indemnification from such owner for any liabilities  resulting from
     this legal action. Based on information  available to the Company as of the
     date of this report, management believes the costs, if any, to resolve this
     matter  will  not  be  material  to  the  Company's  business,  results  of
     operations or financial position.

9.   USE OF ESTIMATES

     The  preparation  of financial  statements  in conformity  with  accounting
     principles  generally accepted in the United States requires  management to
     make estimates and assumptions  that affect the reported  amounts of assets
     and liabilities and disclosure of contingent  assets and liabilities at the
     date of the financial  statements and the reported  amounts of revenues and
     expenses during the year. Actual results could differ from those estimates.

10.  NEW ACCOUNTING PRONOUNCEMENTS

     Financial  Accounting  Standards  Board  Statement of Financial  Accounting
     Standards  (SFAS) No. 142 "Goodwill and Other  Intangible  Assets" requires
     the  discontinuation  of the amortization of goodwill and intangible assets
     with  indefinite  lives and at least an annual  assessment of whether there
     has been an  impairment  of such assets that needs to be  recognized  as an
     impairment charge. Effective as of October 1, 2002, Amtech adopted SFAS No.
     142. Amtech has not completed its transition analysis,  but does not expect
     to incur an impairment  charge related to the $728,000 of goodwill included
     in its assets as of December 31, 2002.

                                       9

     For  comparative  purposes,  pro forma net income assuming SFAS No. 142 had
     been adopted in fiscal 2002 is as follows:

                                                      Three Months Ended
                                                          December 31,
                                                   ------------------------
                                                      2002           2001
                                                   ---------      ---------
     Net income, as reported                       $(116,568)     $ 166,862
     Amortization expense, net tax effect                 --         11,433
                                                   ---------      ---------
     Net income, pro forma                         $(116,568)     $ 178,295
                                                   =========      =========

     SFAS No. 144,  "Accounting  for the  Impairment  or Disposal of  Long-Lived
     Assets"  supersedes  SFAS  No.  121,  "Accounting  for  the  Impairment  of
     Long-Lived  Assets  and for  Long-Lived  Assets  to be  Disposed  Of,"  and
     portions of APB Opinion No. 30, "Reporting the Results of Operations." SFAS
     No. 144  provides a single  accounting  model for  long-lived  assets to be
     disposed  of and  significantly  changes the  criteria  that must be met to
     classify an asset as "held for sale." SFAS No. 144 also  requires  expected
     future operating losses from discontinued  operations to be recorded in the
     period(s)  in  which  the  losses  are  incurred,  rather  than  as of  the
     measurement  date as presently  required.  Effective as of October 1, 2002,
     Amtech  adopted  SFAS No.  144.  The  adoption  of SFAS 144 did not have an
     effect on Amtech's financial position or operating results.

     SFAS No. 145,  "Rescission of FASB Statements No. 4, 44, and 64,  Amendment
     of  FASB  Statement  No.  13,  and  Technical   Corrections"  rescinds  the
     requirement  to report gains and losses from  extinguishment  of debt as an
     extraordinary  item.  Additionally,  this statement  amends Statement 13 to
     require sale-leaseback accounting for certain lease modifications that have
     economic effects similar to sale-leaseback transactions.  Effective October
     1, 2002,  Amtech adopted SFAS No. 145. The adoption of SFAS No. 145 did not
     have an effect on Amtech's financial statements.

     In June  2002,  the  FASB  issued  SFAS  No.  146,  "Accounting  for  Costs
     Associated with Exit or Disposal  Activities".  SFAS 146 nullifies Emerging
     Issues Task Force (EITF) Issue No. 94-3, "Liability Recognition for Certain
     Employee  Termination  Benefits  and Other Costs to Exit an  Activity.  For
     purposes of this Statement,  an exit activity includes,  but is not limited
     to a  restructuring  as  that  term  is  defined  in IAS  37,  "Provisions,
     Contingent Liabilities,  and Contingent Assets". The Statement is effective
     for  exit  or  disposal  activities  initiated  after  December  31,  2002.
     Effective  October 1, 2002,  Amtech  adopted  SFAS No. 146. The adoption of
     SFAS No. 146 did not have an effect on Amtech's financial statements.

     SFAS No. 148,  "Accounting  for  Stock-Based  Compensation - Transition and
     Disclosure"   amends   SFAS  No.  123,   "Accounting   for  Stock  -  Based
     Compensation"  and  provides   alternative  methods  of  transition  for  a
     voluntary  change to the fair value based method of accounting  for stock -
     based  employee  compensation.  SFAS No.  148 also  amends  the  disclosure
     requirements  of SFAS  No.  123 to  require  more  prominent  and  frequent
     disclosures  in  financial  statements  about the  effects of stock - based
     compensation. Amtech will adopt SFAS No. 148 as of January 1, 2003.

     In November 2002, the EITF reached a consensus on issue 00-21,  "Multiple -
     Deliverable Revenue Arrangements" (EITF 00-21). EITF 00-21 addresses how to
     account for  arrangements  that may involve the delivery or  performance of
     multiple  products,  services  and/or  rights to use assets.  The consensus
     mandates how to identify  whether goods or services or both which are to be
     delivered separately in a bundled sales arrangement should be accounted for
     separately  because they are "separate units of  accounting."  The guidance
     can affect the timing of revenue  recognition for such  arrangements,  even
     though it does not change rules governing the timing or patterns of revenue
     recognition  of  individual  items  accounted  for  separately.  The  final
     consensus  will be applicable  to  agreements  entered into in fiscal years
     beginning after June 15, 2003 with early adoption permitted.  Additionally,
     companies will be permitted to apply the consensus guidance to all existing
     arrangements as the cumulative  effect of a change in accounting  principle
     in  accordance  with APB Opinion No. 20,  "Accounting  Changes."  Amtech is
     assessing,  but at this point does not believe  the  adoption of EITF 00-21
     will have a  material  impact  on its  financial  position  or  results  of
     operations.

                                       10

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

CAUTION REGARDING FORWARD-LOOKING STATEMENTS

     Certain  information   contained  or  incorporated  by  reference  in  this
Quarterly  Report on Form 10 Q is  forward-looking  in  nature.  All  statements
included or incorporated  by reference in this Quarterly  Report on Form 10 Q or
made by  management of Amtech  Systems,  Inc. and its  subsidiaries  ("Amtech"),
other  than   statements  of   historical   fact,   are  hereby   identified  as
"forward-looking  statements" (as such term is defined in the Private Securities
Litigation Reform Act of 1995).  Examples of forward-looking  statements include
statements  regarding  Amtech's future  financial  results,  operating  results,
business strategies,  projected costs,  products under development,  competitive
positions and plans and objectives of management for future operations.  In some
cases,  forward-looking  statements  can be  identified by  terminology  such as
"may," "might," "will," "should," "would,"  "expects,"  "plans,"  "anticipates,"
"believes," "estimates," "predicts," "potential," "possible," "continue," or the
negative of these terms or other comparable terminology.  Any expectations based
on these  forward-looking  statements are subject to risks and uncertainties and
other important factors, including those discussed in the section entitled "Item
7: Management's  Discussion and Analysis - Trends,  Risks and  Uncertainties" in
Amtech's  Annual  Report on Form 10-K for the fiscal  year ended  September  30,
2002,  which is incorporated  herein by reference.  These and many other factors
could affect  Amtech's future  operating  results and financial  condition,  and
could cause  actual  results to differ  materially  from  expectations  based on
forward-looking  statements  made in this  document or elsewhere by Amtech or on
its behalf.  All  references  to "we," "our," "us," or "Amtech"  refer to Amtech
Systems, Inc. and its subsidiaries.

DOCUMENTS  TO REVIEW IN  CONNECTION  WITH  MANAGEMENT'S  ANALYSIS  OF  FINANCIAL
CONDITION AND RESULTS OF OPERATIONS

     This  discussion   should  be  read  in  conjunction   with  the  Condensed
Consolidated  Financial Statements and Notes presented in this Form 10-Q and the
financial  statements and notes and the section  entitled "Item 7:  Management's
Discussion  and Analysis - Trends,  Risks and  Uncertainties"  in our last filed
Annual Report on Form 10- K for a full  understanding of our financial  position
and results of operations for the three month period ended December 31, 2002.

RESULTS OF OPERATIONS

     Amtech   develops,   manufactures,   markets   and   services  a  range  of
semiconductor  wafer manufacturing and semiconductor  fabrication  equipment and
related parts,  supplies and services on a worldwide basis. The products offered
are grouped into two segments: the semiconductor equipment segment, which offers
horizontal  diffusion  furnaces,   processing/robotic  equipment  for  diffusion
furnaces and services to semiconductor manufacturers, and the polishing supplies
segment, which offers supplies,  including carriers and templates, and equipment
for lapping and polishing,  which are some of the last steps in the  manufacture
of silicon wafers.  Demand for Amtech's products can change  significantly  from
period to period as a result of numerous factors, including, but not limited to,
changes in: 1) global and regional economic conditions; 2) supply and demand for
semiconductors or, more specifically, capacity utilization and production volume

                                       11

of   manufacturers   of   semiconductors,   silicon  wafers,   solar  cells  and
microelectrical  mechanical systems (MEMS), including optical components; and 3)
the  profitability  and  capital  resources  of  potential  customers  in  these
industries.  For this and other reasons, Amtech's results of operations for past
periods may not necessarily be indicative of future operating results.

     Amtech's  orders tend to be more volatile than its revenue as any change in
demand is reflected  immediately  in the orders  booked,  which are net of order
cancellations,  while revenues tend to be recognized over multiple quarters as a
result of  procurement  and  production  lead times and the  deferral of certain
revenue under the Company's accounting policy for revenue recognition.

     During  the  third  quarter  of  fiscal  2000  Amtech's  orders  reached  a
historical  high.  Beginning  in the  first  fiscal  quarter  of  2001,  slowing
worldwide  demand for  semiconductors  resulted in a rapid decline in net demand
for manufacturing equipment.  Inventory buildups in telecommunications products,
slower than expected personal computer sales and slow global economic growth for
electronic products caused many semiconductor  manufacturers to reevaluate their
capital   spending  plans  and  reduce  the  placement  of  new  orders,   while
rescheduling  or canceling  existing  orders.  This decline in demand  continued
throughout  fiscal  2001 and the first  half of fiscal  2002,  due to  continued
weakness in the  macro-economic  climate and  consumption  of electronic  goods.
Amtech  believes its order  backlog and revenue  reached the lowest point of the
cycle during the fiscal quarter ended March 31, 2002.

     During the third and fourth  quarters  of fiscal  2002,  the  semiconductor
industry  recovered  modestly and semiconductor  wafer  manufacturers  continued
spending on equipment for producing 300mm wafers, resulting in increased orders,
shipments  and backlog,  as compared to the second  quarter of fiscal 2002.  New
orders, shipments,  revenue and backlog were volatile during this period and are
shown in the table below:

                                        Fiscal Quarter
                            -----------------------------------------    Fiscal
                            First     Second      Third       Fourth      Year
                            -----     ------      -----       ------      ----
     2003:
        New orders        $  2,322         --          --          --         --
        Shipments            4,165         --          --          --         --
        Revenue              4,329         --          --          --         --
        Ending backlog       5,711         --          --          --         --

     2002:
        New orders           2,213        519       6,132       5,626     14,490
        Shipments            4,373      3,983       4,189       4,925     17,470
        Revenue              5,457      5,577       4,447       5,052     20,533
        Ending backlog    $ 10,711    $ 5,653    $  7,338    $  7,912         --

                                       12

     2001
        New orders           4,361      7,783       2,750       3,788     14,490
        Shipments            6,882      7,025       6,053       3,742     23,702
        Revenue              3,603      6,803       8,023       4,423     22,852
        Ending backlog      18,883     19,863      14,590      13,955         --

     2000:
        New orders           4,254      4,843      14,400       6,270     29,767
        Shipments            3,863      4,549       4,693       5,922     19,027
        Revenue              3,863      4,549       4,693       5,922     19,027
        Ending backlog    $  4,150    $ 4,444    $ 14,151    $ 14,499         --

(1)  Backlogs  in 2001 and 2002  include  a  positive  adjustment  to  reinstate
     backlog for revenue that will be  recognized  in future  periods due to the
     implementation  of Staff  Accounting  Bulletin No. 101 (SAB 101),  "Revenue
     Recognition in Financial Statements." Amounts prior to fiscal 2001 have not
     been restated.  The deferred revenue  included in the cumulative  effect of
     the change in the revenue  recognition  accounting  policy as of October 1,
     2000 was $3.6  million,  which  accounts  for the  difference  between  the
     backlog as of the end of 2000 and the beginning of 2001. The backlogs as of
     September 30, 2001 and 2002 and December 31, 2002 include  deferred revenue
     of $4.5 million, $1.4 million and $1.3 million, respectively.

(2)  New orders are net of cancellations.

     During the first quarter of fiscal 2003, demand for capital equipment again
weakened  due to  ongoing  economic  weakness  and  geopolitical  uncertainties,
resulting in orders declining essentially to the same level of the first quarter
of fiscal  2002 and  causing  the backlog to decline to the same level as at the
end of the second  quarter of fiscal 2002.  Strong  interest  for the  Company's
products  has  been  evident   from   quotation   activity  and  the  number  of
specification  meetings with  customers and is expected to result in an increase
in orders and backlog  during the second quarter of fiscal 2003.  However,  as a
result of the ongoing economic weakness and geopolitical uncertainties there can
be no assurance that this will actually occur.

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:
                                                       Three Months Ended
                                                          December 31,
                                                       -------------------
                                                       2002          2001
                                                       ----          ----
     Net revenue                                        100%          100%
     Cost of product sales                              (79)          (76)
                                                       ----          ----
          Gross margin                                   21            24

     Selling, general and
      administrative expenses                           (24)          (18)

     Research and development                            (1)           (2)
                                                       ----          ----
          Operating profit (loss)                        (3)%           4%
                                                       ====          ====

     REVENUES.  Amtech's  total revenue for the three months ended  December 31,
2002 was $4.3  million,  compared to $5.5  million for the same period in fiscal
2001,  representing a decrease of 22%.  Revenues for the first quarter of fiscal
2003 were $723,000,  or 14%, lower than in the fourth quarter of 2002, primarily

                                       13

as a result  of the  weakness  in the  order  flow of the  Company's  automation
products, which customers often view as discretionary expenditures,  and are the
first to be cut from their capital budgets. A 13% increase in the revenue of the
polishing  supplies  segment during the first quarter of fiscal 2003 as compared
to the same  quarter  of the prior  fiscal  year was more  than  offset by a 29%
decrease in the revenue of the semiconductor equipment segment.

     GROSS  MARGINS.  Consolidated  gross  margin  for the  three  months  ended
December 31, 2002 was $.9 million,  compared to $1.3 million for the same period
ended  December 31, 2001,  representing  a decrease of $.4 million,  or 31%. The
decline in gross margins is primarily a result of the decline in revenue and the
fact that manufacturing  overhead costs remained  relatively fixed. In the first
quarter of fiscal 2003, the gross margin of the semiconductor  equipment segment
decreased  to 22% of sales from 27% of sales in the first  quarter of 2002.  The
primary cause of this decrease is the pricing  pressure  caused by the worldwide
downturn in the semiconductor market and the under absorption of overheads.  The
gross margin of the polishing  supplies  segment  remained fairly  consistent at
approximately  13% of  revenue  in the  first  quarter  of both  2002 and  2003.
Amtech's  gross  margins  and their  percentage  of revenue  have  significantly
fluctuated in the past and will continue to fluctuate  based on several  factors
including the severity and duration of the current industry downturn, the timing
of revenue recognition under the Company's revenue  recognition policy,  product
mix and overhead absorption levels.

     SELLING, GENERAL AND ADMINISTRATIVE EXPENSES. Consolidated selling, general
and  administrative  expenses  were $1.0 million in the first  quarter of fiscal
2003, consistent with $1.0 million in the first quarter of fiscal 2002. Selling,
general and administrative  expenses as a percentage of revenue  represented 24%
and 18% for the first quarter of fiscal 2003 and 2002, respectively, as a result
of the decline in revenue.

     RESEARCH AND DEVELOPMENT  EXPENSES.  During the three months ended December
31, 2002 and 2001,  research and  development  expenses  were  consistent at $.1
million. During the past few fiscal years, the most significant project included
in  research  and  development  expenses  has  been  the  development  of a  new
technology  asher  pursuant to a joint product  development  agreement  with PSK
Tech. The results of the feasibility  work on the new technology  asher with PSK
Tech are  encouraging.  The next step will be to develop a prototype  of a 300mm
asher,  using Amtech's damage free technology,  and a similar machine for a Beta
site at one of Amtech's  customers.  Amtech and PSK Tech have agreed to time the
procurement,  assembly  and  testing  of  both  machines  in  order  to  match a
customer's  advanced  technology  schedule,  which Amtech  understands calls for
testing to begin in approximately  November 2004. The combined cost of those two
machines  is  estimated  to be  approximately  $1.5  million,  but the  relative
contributions  of Amtech and PSK Tech to that stage of the project have not been
established.  However,  Amtech's  contribution  to the  project  could cause its
research and development expenses to increase significantly starting as early as
November 2003.

     OPERATING  PROFIT (LOSS).  Operating profit for the first quarter of fiscal
2002 was $.2 million, or 4% of revenue, compared to a loss of $.2 million, or 4%
of revenue,  in the first quarter of fiscal 2003.  Operating  profit declined in
2003 due  primarily to the decline in revenues  and related  gross margin in the
semiconductor segment.  Operating income as a percent of revenue declined in the
first  quarter  of fiscal  2003  primarily  as a result of the  decline in gross
revenue and competitive  pricing pressures  discussed above. In both periods the
polishing  supplies  segment  had a loss of $.1  million,  as  revenue  remained

                                       14

slightly below the breakeven point. Additional cost reductions have been made in
the polishing supplies segment since the end of the first quarter of fiscal 2003
as a result of the  Company's  objective  to at least  breakeven  on a cash flow
basis  during  the  industry   slowdown.   If  anticipated  new  orders  in  the
semiconductor  equipment  segment  are not  received  over the  next few  weeks,
additional cost reductions will be implemented there as well.

     INTEREST  INCOME-NET.  Net interest income was less than $.1 million in the
first three months of fiscal 2003 and 2002.

     INCOME TAX  PROVISION.  During the first  quarter of fiscal  2003 and 2002,
Amtech  recorded  income tax  (benefits)  provisions  of $(.1)  million  and $.1
million,  respectively.  The  effective  rate stated as a  percentage  of income
before  income taxes was 35% and 33% in the first  quarters of fiscal years 2003
and 2002,  respectively.  Amtech's future  effective  income tax rate depends on
various factors, such as tax legislation,  the geographic composition of pre-tax
income,  non-tax  deductible  expenses and the effectiveness of its tax planning
strategies.

     NET  INCOME.  Net income  (loss) for the first  quarter of fiscal  2003 and
2002,  respectively,  was $(.1)  million and $.2 million.  Net income (loss) per
diluted share was $(.04) and $.06 in fiscal 2003 and 2002, respectively.

     BACKLOG.  At December  31,  2002,  the order  backlog was $5.7  million,  a
decrease of $2.2 million, or 28%, from the $7.9 million backlog at September 30,
2002.  As of December 31, 2002,  the backlog was again at the lowest level since
March 31,  2002.  See the table that  begins on page 12. The orders  included in
Amtech's backlog are generally credit approved  customer purchase orders usually
scheduled to ship in the next twelve months.  The backlog also includes  revenue
deferred  pursuant to Amtech's  revenue  recognition  policy.  Amtech  schedules
production  of its  systems  based on order  backlog and  customer  commitments.
However,  customers may delay delivery of products or cancel orders suddenly and
without sufficient notice,  subject to possible cancellation  penalties.  Due to
possible  customer  changes in delivery  schedules and  cancellations of orders,
Amtech's backlog at any particular date is not necessarily  indicative of actual
revenue  for any  succeeding  period.  Delays  in  delivery  schedules  and/or a
reduction  of  backlog  during  any  particular  reporting  period  could have a
material  adverse  effect on Amtech's  business  and results of  operations.  In
addition,  a backlog does not provide any  assurance  that Amtech will realize a
profit from those orders or indicate in which period revenue will be recognized.

LIQUIDITY AND CAPITAL RESOURCES

     At December  31, 2002,  the Company had $6.1  million of readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents  of $8.0 million at September 30, 2002, a decrease of  approximately
$1.9  million.  The  Company  continues  to  believe  that  there is  sufficient
available  liquidity  and capital  resources  for its  existing  operations  and
expansion plans.

     CASH FLOW.  The $1.9  million net  decrease in cash during the three months
ended  December  31,  2002  approximates  the $2.0  million  cash  flow  used in
operations.  The $1.9 million cash flow used in  operations  primarily  resulted
from the $.1 million net loss,  increases in accounts receivable and inventories
of $1.1 million and $.4  million,  respectively,  and a $.5 million  decrease in

                                       15

income taxes payable, which were only partially offset by an increase in accrued
liabilities and customer deposits of $.3 million. Investing activities consisted
of capital expenditures of less than $.1 million in the aggregate. There were no
significant financing activities during the period.

     At December 31, 2002,  Amtech's principal source of liquidity  consisted of
$6.1 million of cash and cash equivalents.  Since the only lien on the Company's
assets is a $.2 million  mortgage  loan,  management  believes that  significant
amounts of additional  liquidity is available  from various  financing  sources.
Amtech believes that it has sufficient  liquidity for current operations and for
at least certain elements of its growth  strategy.  One element of that strategy
is the  development of new products such as the proposed new  technology  asher,
the costs of which  have yet to be  determined.  Another is the  acquisition  of
product lines or businesses  that  complement the company's  existing  business.
Amtech's currently available cash and short-term  investments are expected to be
sufficient  for  existing  operations,  planned  research  and  development  and
possibly an  acquisition,  depending  on size.  However,  significant  unplanned
development  of new  products,  or larger  acquisitions  may require  additional
capital  resources  that are expected to be obtained from one or more sources of
financing, such as a private placement, a public offering, working capital loans
or term loans from banks or other  financial  institutions,  equipment  leasing,
mortgage financing and internally generated cash flow from operations. There can
be no assurance of the  availability or sufficiency of these or any other source
of funding for those purposes.

CRITICAL ACCOUNTING POLICIES

     "Management's Discussion and Analysis of Financial Condition and Results of
Operations"  discusses  our  consolidated  financial  statements  that have been
prepared in accordance  with  accounting  principles  generally  accepted in the
United States of America. The preparation of these financial statements requires
us to make estimates and  assumptions  that affect the reported amount of assets
and  liabilities  at the date of the  financial  statements,  the  disclosure of
contingent  assets and  liabilities at the date of the financial  statements and
the reported amounts of revenues and expenses during the reporting period.

     On an on-going  basis,  we evaluate our estimates and judgments,  including
those related to revenue  recognition,  valuation  allowances  for inventory and
accounts  receivable,  warranty and impairment of long-lived assets. We base our
estimates and judgments on  historical  experience  and on various other factors
that are believed to be reasonable under the circumstances.  The result of these
estimates and judgments form the basis for making conclusions about the carrying
value of  assets  and  liabilities  that are not  readily  apparent  from  other
sources.  Actual  results  may  differ  from  these  estimates  under  different
assumptions or conditions.

     The SEC suggests that all registrants list their most "critical  accounting
policies" in Management's  Discussion and Analysis. A critical accounting policy
is one which is both  important  to the  portrayal  of the  Company's  financial
condition and results and requires  management's  most difficult,  subjective or
complex  judgments,  often as a result of the need to make  estimates  about the
effect  of  matters  that are  inherently  uncertain.  Management  believes  the
critical  accounting  policies  discussed  below  affect  its  more  significant
judgments  and  estimates  in  the  preparation  of its  consolidated  financial
statements.

                                       16

     REVENUE RECOGNITION

     The Company recognizes  revenue when persuasive  evidence of an arrangement
exists;  title  transfers;  the  seller's  price is fixed  or  determinable  and
collectibility is reasonably assured. Certain of the Company's product sales are
accounted for as multiple- element arrangements. For the semiconductor equipment
segment,  if the Company has met defined customer  specifications with similarly
situated customers,  equipment and processes,  the Company recognizes  equipment
revenue upon  shipment and  transfer of title,  and the holdback  portion of the
revenue that is contingent upon installation and acceptance, generally 10% - 20%
of a system's  selling price, is deferred until those  activities are completed.
Revenues and related  costs for  products  that are shipped but do not meet this
criteria  are deferred and  recognized  when the  equipment  and  processes  are
proven, generally upon customer acceptance or upon obtaining customer acceptance
on at least two similar systems.  Collection of the holdback portion of a system
sale is often based on system  acceptance  or final  installation.  We have,  on
occasion, experienced longer than expected delays in receiving cash from certain
customers  pending  system  acceptance  or  final  installation.  If some of our
customers were to refuse to pay the remaining holdback, or otherwise delay final
acceptance  or  installation,  the  deferred  revenue  would not be  recognized,
adversely affecting future operating results.

     Equipment sold by the polishing  supplies  segment does not include process
guarantees  or  acceptance  criteria,  so the related  revenue is recorded  upon
shipment. For all segments,  sales of spare parts and consumables are recognized
upon  shipment,  as there are no post shipment  obligations  other than standard
warranties.  Service  revenues are recognized  upon  performance of the services
requested by the customer. Revenue related to service contracts is recognized as
the services requested by the customer are performed.

     INVENTORY VALUATION

     We value our inventory at the lower of cost or the current estimated market
value. We regularly review inventory  quantities on hand and record a write-down
for excess and obsolete  inventory.  The  provision  is  primarily  based on our
estimated forecast of product demand and production  requirements.  However, our
industry is  characterized  by customers in highly  cyclical  industries,  rapid
technological  changes,  frequent  new product  developments  and rapid  product
obsolescence. During 2002 and 2001, there has been a significant decrease in the
worldwide demand for semiconductor  capital  equipment.  Demand for our products
has fluctuated  significantly and may do so in the future, which could result in

                                       17

an  increase  in the  cost of  inventory  or an  increase  in  excess  inventory
quantities on hand. The Company's  ratio of  inventories to operating  levels is
above,  and is  expected  to  remain  above,  the  historic  norms  due to order
cancellations and the deferral of orders by customers. There can be no assurance
that future developments will not necessitate further write-downs.

     VALUATION ALLOWANCE FOR ACCOUNTS RECEIVABLE

     We maintain allowances for doubtful accounts for estimated losses resulting
from the inability of our customers to make required payments.  These allowances
are based on historical  experience,  credit  evaluations and specific  customer
collection  issues we have identified.  Since our accounts  receivable are often
concentrated  in a relatively few number of customers,  a significant  change in
the liquidity or financial  position of any one of these  customers could have a
material adverse impact on the collectibility of our accounts receivable and our
future operating results.

     WARRANTY

     The Company  provides a limited  warranty,  generally twelve to twenty-four
months,  to all purchasers of its new products and systems.  A provision for the
estimated  cost of  warranty  is  recorded  upon  shipment  of all  systems.  On
occasion,  we have been  required  and may be  required in the future to provide
additional  warranty coverage to ensure that the systems are ultimately accepted
or to maintain  customer  goodwill.  While our warranty costs have  historically
been within our  expectations  and management  believes that the amounts accrued
for warranty  expenditures  are sufficient for all systems sold through December
31,  2002,  there can be no  assurance  that we will  continue to  experience  a
similar level of predictability in regard to warranty costs we have in the past.
In  addition,  technological  changes  or  previously  unknown  defects  in  raw
materials or  components  may result in more  extensive  and  frequent  warranty
service  than  anticipated,  which could have a material  adverse  impact on our
operating results for the periods in which such additional costs materialize.

     IMPAIRMENT OF LONG-LIVED ASSETS

     We evaluate  whether events and  circumstances  have occurred that indicate
the estimated useful lives of long-lived assets or intangible assets may warrant
revision or that the  remaining  balance may not be  recoverable.  When  factors
indicate  that an asset should be evaluated for possible  impairment,  we use an
estimate of the related  undiscounted net cash flows generated by the asset over
the  remaining  estimated  life of the asset in  measuring  whether the asset is
recoverable.  We make judgments and estimates used in establishing  the carrying
value of long-lived or intangible assets. Those judgments and estimates could be
modified  if  adverse  changes  were to  occur  in the  future  resulting  in an
inability to recover the carrying value of these assets. We have not experienced
any  impairments  to  long-lived  assets  during  fiscal 2002 or the first three
months of fiscal 2003.  Future  adverse  changes could be caused by, among other
factors, a continued downturn in the semiconductor  industry, a general economic
slowdown,  reduced  demand for our products in the market place,  poor operating
results, inability to protect intellectual property or changing technologies and
product obsolescence.

                                       18

NEW ACCOUNTING PRONOUNCEMENTS

     Financial  Accounting  Standards  Board  Statement of Financial  Accounting
Standards  (SFAS) No. 142 "Goodwill and Other  Intangible  Assets"  requires the
discontinuation  of the  amortization  of goodwill  and  intangible  assets with
indefinite lives and at least an annual  assessment of whether there has been an
impairment of such assets that needs to be  recognized as an impairment  charge.
Effective as of October 1, 2002,  Amtech  adopted  SFAS No. 142.  Amtech has not
completed its  transition  analysis,  but does not expect to incur an impairment
charge related to the $728,000 of goodwill included in its assets as of December
31, 2002.

     SFAS No. 144,  "Accounting  for the  Impairment  or Disposal of  Long-Lived
Assets"  supersedes  SFAS No. 121,  "Accounting for the Impairment of Long-Lived
Assets and for Long-Lived Assets to be Disposed Of," and portions of APB Opinion
No. 30,  "Reporting the Results of  Operations."  SFAS No. 144 provides a single
accounting  model for  long-lived  assets to be  disposed  of and  significantly
changes the  criteria  that must be met to classify an asset as "held for sale."
SFAS No. 144 also requires  expected future operating  losses from  discontinued
operations  to be recorded in the  period(s)  in which the losses are  incurred,
rather than as of the measurement  date as presently  required.  Effective as of
October 1, 2002,  Amtech  adopted SFAS No. 144. The adoption of SFAS 144 did not
have an effect on Amtech's financial position or operating results.

     SFAS No. 145,  "Rescission of FASB Statements No. 4, 44, and 64,  Amendment
of FASB Statement No. 13, and Technical Corrections" rescinds the requirement to
report gains and losses from  extinguishment  of debt as an extraordinary  item.
Additionally,  this  statement  amends  Statement  13 to require  sale-leaseback
accounting for certain lease modifications that have economic effects similar to
sale-leaseback transactions.  Effective October 1, 2002, Amtech adopted SFAS No.
145. The  adoption of SFAS No. 145 did not have an effect on Amtech's  financial
statements.

     In June  2002,  the  FASB  issued  SFAS  No.  146,  "Accounting  for  Costs
Associated with Exit or Disposal Activities". SFAS 146 nullifies Emerging Issues
Task Force (EITF) Issue No. 94-3,  "Liability  Recognition for Certain  Employee
Termination  Benefits and Other Costs to Exit an Activity.  For purposes of this
Statement,  an exit activity includes,  but is not limited to a restructuring as
that  term  is  defined  in IAS 37,  "Provisions,  Contingent  Liabilities,  and
Contingent  Assets".  The Statement is effective for exit or disposal activities
initiated  after December 31, 2002.  Effective  October 1, 2002,  Amtech adopted
SFAS No.  146.  The  adoption of SFAS No. 146 did not have an effect on Amtech's
financial statements.

     SFAS No. 148,  "Accounting  for  Stock-Based  Compensation - Transition and
Disclosure" amends SFAS No. 123, "Accounting for Stock - Based Compensation" and
provides  alternative  methods of transition for a voluntary  change to the fair
value based method of accounting for stock - based employee  compensation.  SFAS
No. 148 also amends the disclosure  requirements of SFAS No. 123 to require more
prominent and frequent  disclosures in financial statements about the effects of
stock - based compensation.  Amtech will adopt SFAS No. 148 effective January 1,
2003.

     In November 2002, the EITF reached a consensus on issue 00-21,  "Multiple -
Deliverable  Revenue  Arrangements"  (EITF 00-21).  EITF 00-21  addresses how to
account  for  arrangements  that may  involve the  delivery  or  performance  of
multiple products,  services and/or rights to use assets. The consensus mandates
how to identify  whether  goods or  services  or both which are to be  delivered

                                       19

separately in a bundled  sales  arrangement  should be accounted for  separately
because they are  "separate  units of  accounting."  The guidance can affect the
timing of revenue  recognition  for such  arrangements,  even though it does not
change  rules  governing  the  timing  or  patters  of  revenue  recognition  of
individual  items  accounted  for  separately.   The  final  consensus  will  be
applicable to agreements  entered into in fiscal years  beginning after June 15,
2003 with early adoption permitted. Additionally, companies will be permitted to
apply the  consensus  guidance to all existing  arrangements  as the  cumulative
effect of a change in accounting  principle in  accordance  with APB Opinion No.
20,  "Accounting  Changes."  Amtech is  assessing,  but at this  point  does not
believe the adoption of EITF 00-21 will have a material  impact on its financial
position or results of operations.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     For financial market risks related to changes in interest rates and foreign
currency exchange rates, refer to Part II, Item 7A, Quantitative and Qualitative
Disclosures  About Market Risk, in the Company's  Annual Report on Form 10-K for
the fiscal year ended September 30, 2002. The Company did not participate in any
derivative (hedging or speculative) activities in fiscal 2002 or 2003. There are
no material changes in reported market risk from September 30, 2002.

ITEM 4. CONTROLS AND PROCEDURES

     Based on their evaluation as of a date within 90 days of the filing date of
this  report,  Amtech's  principal  executive  officer and  principal  financial
officer have  concluded  that  Amtech's  disclosure  controls and  procedures as
defined in Rules  13a-14(c) and 15d-14(c)  under the Securities  Exchange Act of
1934 (the Exchange Act) are effective to ensure that information  required to be
disclosed by Amtech in reports  that it files or submits  under the Exchange Act
is  recorded,  processed,  summarized  and  reported  within  the  time  periods
specified in Securities and Exchange Commission rules and forms.

     There were no significant changes in Amtech's internal controls or in other
factors that could significantly affect these controls subsequent to the date of
their  evaluation  and up to the  filing  date of  this  report.  There  were no
significant  deficiencies  or material  weaknesses,  and therefore there were no
corrective actions taken.

     It should be noted that any system of controls,  however well  designed and
operated,  can provide only  reasonable,  and not absolute,  assurance  that the
objectives of the system are met. In addition,  the design of any control system
is based in part upon certain assumptions about the likelihood of future events.
Because of these and other inherent limitations of control systems, there can be
no assurance  that any design will  succeed in achieving  its stated goals under
all potential future conditions, regardless of how remote.

                                       20

                           PART II. OTHER INFORMATION

Item 1. LEGAL PROCEEDINGS.

     On or about August 31, 2000, a "P.R.  Hoffman Machine  Products" was one of
11 companies  named in a legal  action  brought by North  Middleton  Township in
Carlisle,   Pennsylvania,  the  owner  of  a  landfill  allegedly  found  to  be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired  the  assets  of  P.R.  Hoffman  Machine  Products,  Inc.  in an  asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any  breaches of its
representations  and  warranties  in the  Asset  Purchase  Agreement,  including
representations  relating to environmental matters. In accordance with the terms
of the Asset Purchase  Agreement,  the Company has provided  notice to the prior
owner of P.R.  Hoffman Machine  Products  Corporation of the Company's intent to
seek  indemnification  from such owner for any  liabilities  resulting from this
legal action.  Based on  information  available to the Company as of the date of
this report,  management believes the costs, if any, to resolve this matter will
not be material to the  Company's  business,  results of operations or financial
position.

Item 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

     None.

Item 6. EXHIBITS AND REPORTS ON FORM 8-K.

(a)  Exhibits

          Exhibit 99.1 - Certification Pursuant to 18 U.S.C. Section 1350, as
                         Adopted Pursuant to Section 906 of the Sarbanes -
                         Oxley Act of 2002

          Exhibit 99.2 - Certification Pursuant to 18 U.S.C. Section 1350, as
                         Adopted Pursuant to Section 906 of the Sarbanes - Oxley
                         Act of 2002

(b)  Reports on Form 8-K

          No Current Reports on Form 8-K were filed by the Company during the
          quarterly period ended December 31, 2002.

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.

     AMTECH SYSTEMS, INC.
     By /s/ Robert T. Hass                              Dated: February 14, 2003
        ------------------------------------------             -----------------
        Robert T. Hass, Vice-President-Finance and
        (Chief Financial and Accounting Officer)

                                       21

                SARBANES-OXLEY ACT SECTION 302(a) CERTIFICATIONS

     I, Jong S. Whang, certify that:

     1. I have reviewed this  quarterly  report on Form 10-Q of Amtech  Systems,
Inc.;

     2. Based on my knowledge, this quarterly report does not contain any untrue
statement of a material fact or omit to state a material fact  necessary to make
the statements made, in light of the  circumstances  under which such statements
were made, not  misleading  with respect to the period covered by this quarterly
report;

     3. Based on my knowledge,  the financial  statements,  and other  financial
information  included in this quarterly  report,  fairly present in all material
respects the financial  condition,  results of operations  and cash flows of the
registrant as of, and for, the periods presented in this quarterly report;

     4. The  registrant's  other  certifying  officer and I are  responsible for
establishing and maintaining  disclosure  controls and procedures (as defined in
Exchange Act Rules 13a-14 and 15d-14) for the registrant and have:

     a) designed such disclosure controls and procedures to ensure that material
information relating to the registrant, including its consolidated subsidiaries,
is made known to us by others  within those  entities,  particularly  during the
period in which this quarterly report is being prepared;

     b) evaluated the effectiveness of the registrant's  disclosure controls and
procedures  as of a date  within  90  days  prior  to the  filing  date  of this
quarterly report (the "Evaluation Date"); and

     c)  presented  in  this  quarterly   report  our   conclusions   about  the
effectiveness of the disclosure  controls and procedures based on our evaluation
as of the Evaluation Date;

     5. The registrant's other certifying officer and I have disclosed, based on
our most recent evaluation, to the registrant's auditors and the audit committee
of  registrant's  board of  directors  (or  persons  performing  the  equivalent
functions):

     a) all  significant  deficiencies  in the design or  operation  of internal
controls  which  could  adversely  affect  the  registrant's  ability to record,
process,  summarize  and  report  financial  data  and have  identified  for the
registrant's auditors any material weaknesses in internal controls; and

     b) any fraud,  whether or not material,  that involves  management or other
employees who have a significant role in the registrant's internal controls; and

     6. The registrant's  other certifying  officer and I have indicated in this
quarterly report whether there were significant  changes in internal controls or
in other factors that could significantly affect internal controls subsequent to
the date of our most recent  evaluation,  including any corrective  actions with
regard to significant deficiencies and material weaknesses.

Date: February 14, 2003

                                             By: /s/ Jong S. Whang
                                                 -------------------------------
                                                 Jong S. Whang, President

                                       22

     I, Robert T. Hass, certify that:

     1. I have reviewed this  quarterly  report on Form 10-Q of Amtech  Systems,
Inc.;

     2. Based on my knowledge, this quarterly report does not contain any untrue
statement of a material fact or omit to state a material fact  necessary to make
the statements made, in light of the  circumstances  under which such statements
were made, not  misleading  with respect to the period covered by this quarterly
report;

     3. Based on my knowledge,  the financial  statements,  and other  financial
information  included in this quarterly  report,  fairly present in all material
respects the financial  condition,  results of operations  and cash flows of the
registrant as of, and for, the periods presented in this quarterly report;

     4. The  registrant's  other  certifying  officer and I are  responsible for
establishing and maintaining  disclosure  controls and procedures (as defined in
Exchange Act Rules 13a-14 and 15d-14) for the registrant and have:

     a) designed such disclosure controls and procedures to ensure that material
information relating to the registrant, including its consolidated subsidiaries,
is made known to us by others  within those  entities,  particularly  during the
period in which this quarterly report is being prepared;

     b) evaluated the effectiveness of the registrant's  disclosure controls and
procedures  as of a date  within  90  days  prior  to the  filing  date  of this
quarterly report (the "Evaluation Date"); and

     c)  presented  in  this  quarterly   report  our   conclusions   about  the
effectiveness of the disclosure  controls and procedures based on our evaluation
as of the Evaluation Date;

     5. The registrant's other certifying officer and I have disclosed, based on
our most recent evaluation, to the registrant's auditors and the audit committee
of  registrant's  board of  directors  (or  persons  performing  the  equivalent
functions):

     a) all  significant  deficiencies  in the design or  operation  of internal
controls  which  could  adversely  affect  the  registrant's  ability to record,
process,  summarize  and  report  financial  data  and have  identified  for the
registrant's auditors any material weaknesses in internal controls; and

     b) any fraud,  whether or not material,  that involves  management or other
employees who have a significant role in the registrant's internal controls; and

     6. The registrant's  other certifying  officer and I have indicated in this
quarterly report whether there were significant  changes in internal controls or
in other factors that could significantly affect internal controls subsequent to
the date of our most recent  evaluation,  including any corrective  actions with
regard to significant deficiencies and material weaknesses.

Date: February 14, 2003

                                        By: /s/ Robert T. Hass
                                            ------------------------------------
                                            Robert T. Hass, Vice President -
                                            Finance and Chief Financial Officer

                                       23

                                  EXHIBIT INDEX


EXHIBIT                                                              PAGE OR
NUMBER                            DESCRIPTION                   METHOD OF FILING
- ------                            -----------                   ----------------

 99.1   Certification of Principal Executive Officer pursuant
        to Section 906 of the Sarbanes-Oxley Act of 2002                *

 99.2   Certification of Principal Financial Officer pursuant to
        Section 906 of the Sarbanes-Oxley Act of 2002                   *

* Filed herewith.

                                       24