EXHIBIT 99.1

                    AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES


                            CERTIFICATION PURSUANT TO
                             18 U.S.C. SECTION 1350,
                             AS ADOPTED PURSUANT TO
                  SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002


In connection with the Quarterly Report of Amtech Systems,  Inc. (the "Company")
on Form  10-Q  for the  period  ended  December  31,  2002,  as  filed  with the
Securities and Exchange Commission on the date hereof (the "Report"), I, Jong S.
Whang, President and Chief Executive Officer of the Company,  certify,  pursuant
to 18 U.S.C. ss. 1350, as adopted pursuant to ss. 906 of the  Sarbanes-Oxley Act
of 2002, that:

     (1) The Report fully  complies  with the  requirements  of Section 13(a) or
15(d) of the Securities Exchange Act of 1934; and

     (2)  The  information  contained  in the  Report  fairly  presents,  in all
material  respects,  the  financial  condition  and result of  operations of the
Company.

By /s/ Jong S. Whang
   --------------------------
   Jong S. Whang
   President and
   Chief Executive Officer
   February 14, 2003