EXHIBIT 99.2

                    AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES


                            CERTIFICATION PURSUANT TO
                             18 U.S.C. SECTION 1350,
                             AS ADOPTED PURSUANT TO
                  SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002


In connection with the Quarterly Report of Amtech Systems,  Inc. (the "Company")
on Form  10-Q  for the  period  ended  December  31,  2002,  as  filed  with the
Securities and Exchange Commission on the date hereof (the "Report"),  I, Robert
T. Hass,  Vice-President-Finance  and Chief  Financial  Officer of the  Company,
certify,  pursuant to 18 U.S.C.  ss. 1350, as adopted pursuant to ss. 906 of the
Sarbanes-Oxley Act of 2002, that:

     (1) The Report fully  complies  with the  requirements  of Section 13(a) or
15(d) of the Securities Exchange Act of 1934; and

     (2)  The  information  contained  in the  Report  fairly  presents,  in all
material  respects,  the  financial  condition  and result of  operations of the
Company.

By /s/ Robert T. Hass
   --------------------------------
   Robert T. Hass
   Vice President--Finance and
   Chief Financial Officer
   February 14, 2003