UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM 10-Q

(Mark One)

[X]  QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE
     ACT OF 1934

For the quarterly period ended:  March 31, 2003

                                       OR

[ ]  TRANSITION  REPORT  PURSUANT  TO  SECTION  13 OR  15(d)  OF THE  SECURITIES
     EXCHANGE ACT OF 1934

For the transition period from ________________ to ________________


                         Commission File Number: 0-11412


                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)


                     Arizona                               86-0411215
          (State or other jurisdiction of                (I.R.S. Employer
          incorporation or organization)                Identification No.)


       131 South Clark Drive, Tempe, Arizona                   85281
     (Address of principal executive offices)               (Zip Code)


        Registrant's telephone number, including area code: 480-967-5146

Indicate  by a check  mark  whether  the  registrant  (1) has filed all  reports
required to be filed by Section 13 or 15(d) of the  Securities  Exchange  Act of
1934  during  the  preceding  12 months  (or for such  shorter  period  that the
registrant was required to file such reports),  and (2) has been subject to such
filing requirements for the past 90 days. [X] Yes [ ] No

         Shares of Common Stock outstanding as of May 9, 2003: 2,695,321

                              AMTECH SYSTEMS, INC.
                                AND SUBSIDIARIES
                                TABLE OF CONTENTS
                                                                            Page
                                                                            ----
PART I.  FINANCIAL INFORMATION.

     Item 1. Condensed Consolidated Unaudited Financial Statements

             Condensed Consolidated Balance Sheets -
               March 31, 2003 and September 30, 2002.........................  3

             Condensed Consolidated Statements of Operations -
               Three and Six Months Ended March 31, 2003 and 2002............  4

             Condensed Consolidated Statements of Cash Flows -
               Six Months Ended March 31, 2003 and 2002......................  5

             Notes to Condensed Consolidated Financial Statements............  6

     Item 2. Management's Discussion and Analysis of Financial
               Condition and Results of Operations

             Caution Regarding Forward-Looking Statements.................... 14

             Documents to Review In Connection With Management's
               Analysis of Financial Condition and Results of Operations..... 14

             Results of Operations........................................... 14

             Liquidity and Capital Resources................................. 19

             Critical Accounting Policies.................................... 19

             New Accounting Pronouncements................................... 21

     Item 3. Quantitative and Qualitative Disclosures about Market Risk...... 23

     Item 4. Controls and Procedures......................................... 24

PART II. OTHER INFORMATION.

     Item 1. Legal Proceedings .............................................. 25

     Item 4. Submission of Matters to a Vote of Security Holders............. 25

     Item 6. Exhibits and Reports on Form 8-K................................ 25

SIGNATURE.................................................................... 26

SARBABES-OXLEY ACT SECTION 302(A) CERTIFICATIONS............................. 27

EXHIBIT INDEX................................................................ 29

EXHIBIT 99.1 - Certification Pursuant to 18 U.S.C. Section 1350, as
     Adopted Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002..... 30

EXHIBIT 99.2 - Certification Pursuant to 18 U.S.C. Section 1350, as
     Adopted Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002..... 31

                                        2

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                      CONDENSED CONSOLIDATED BALANCE SHEETS



                                                                         MARCH 31,    SEPTEMBER 30,
                                                                           2003           2002
                                                                       ------------   ------------
                                                                        (Unaudited)
                                                                                
                                     ASSETS
CURRENT ASSETS:
  Cash and cash equivalents                                            $  7,089,569   $  8,045,663
  Accounts receivable - net                                               3,093,087      2,695,323
  Inventories                                                             3,074,514      3,020,890
  Deferred income taxes                                                   1,076,000      1,044,000
  Prepaid expenses                                                          159,779         82,291
  Income taxes receivable                                                   551,000             --
                                                                       ------------   ------------
           Total current assets                                          15,043,949     14,888,167

PROPERTY, PLANT AND EQUIPMENT - net                                       1,541,494      1,642,084
DEFERRED INCOME TAXES                                                            --         88,000
GOODWILL AND OTHER ASSETS -  net                                            770,477        774,849
                                                                       ------------   ------------
           TOTAL ASSETS                                                $ 17,355,920   $ 17,393,100
                                                                       ============   ============

                      LIABILITIES AND STOCKHOLDERS' EQUITY
CURRENT LIABILITIES:
  Accounts payable                                                     $    784,516   $    891,640
  Accrued compensation and related taxes                                    645,867        653,045
  Accrued warranty expense                                                  260,891        262,573
  Deferred profit                                                           627,775        479,964
  Customer deposits                                                         161,680         91,417
  Income taxes payable                                                           --         37,000
  Other accrued liabilities                                                 219,298        306,601
                                                                       ------------   ------------
           Total current liabilities                                      2,700,027      2,722,240
                                                                       ------------   ------------

DEFERRED PROFIT - LONG TERM                                                      --        199,966
LONG-TERM OBLIGATIONS                                                       533,944        259,217
                                                                       ------------   ------------

COMMITMENTS AND CONTINGENCIES (Note 8)

STOCKHOLDERS' EQUITY:
  Preferred stock; no specified terms;
    100,000,000 shares authorized; none issued                                   --             --
  Common stock; $0.01 par value; 100,000,000 shares authorized;
     2,689,571 and 2,688,571 shares issued and outstanding
     as of March 31, 2003 and September 30, 2002, respectively               26,896         26,886
  Additional paid-in capital                                             12,860,831     12,859,715
  Accumulated other comprehensive income (loss) -
    Cumulative foreign currency translation adjustment                      113,839       (179,639)
  Retained earnings                                                       1,120,383      1,504,715
                                                                       ------------   ------------
          Total stockholders' equity                                     14,121,949     14,211,677
                                                                       ------------   ------------
          TOTAL LIABILITIES AND STOCKHOLDERS' EQUITY                   $ 17,355,920   $ 17,393,100
                                                                       ============   ============


   The accompanying notes are an integral part of these condensed consolidated
                             financial statements.

                                       3

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS
           For the Three and Six Months Ended March 31, 2003 and 2002
                                   (Unaudited)



                                          Three Months Ended March 31,   Six Months Ended March 31,
                                          ----------------------------   --------------------------
                                               2003           2002           2003           2002
                                           -----------    -----------    -----------    -----------
                                                                            
Net revenues                               $ 5,447,628    $ 5,577,314    $ 9,776,825    $11,034,230
Cost of sales                                4,513,791      4,217,643      7,951,086      8,355,076
                                           -----------    -----------    -----------    -----------
         Gross margin                          933,837      1,359,671      1,825,739      2,679,154

Selling, general and administrative          1,239,154      1,370,612      2,266,850      2,387,115
Research and development                       103,637         59,453        161,371        149,384
                                           -----------    -----------    -----------    -----------
         Operating income (loss)              (408,954)       (70,394)      (602,482)       142,655

Interest income - net                            1,190         20,787         15,150         55,600
                                           -----------    -----------    -----------    -----------
Income (loss) before income taxes             (407,764)       (49,607)      (587,332)       198,255

Income tax provision (benefit)                (140,000)       (11,000)      (203,000)        70,000
                                           -----------    -----------    -----------    -----------

NET INCOME (LOSS)                          $  (267,764)   $   (38,607)   $  (384,332)   $   128,255
                                           ===========    ===========    ===========    ===========

EARNINGS (LOSS) PER SHARE:

Basic earnings (loss) per share            $      (.10)   $      (.01)   $      (.14)   $       .05
Weighted average shares outstanding          2,689,571      2,681,533      2,689,285      2,681,214

Diluted earnings (loss) per share          $      (.10)   $      (.01)   $      (.14)   $       .05
Weighted average shares outstanding          2,689,571      2,681,533      2,689,285      2,789,185


   The accompanying notes are an integral part of these condensed consolidated
                             financial statements.

                                       4

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                 CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS
                FOR THE SIX MONTHS ENDED MARCH 31, 2003 AND 2002
                                   (Unaudited)



                                                                  2003           2002
                                                              -----------    -----------
                                                                       
OPERATING ACTIVITIES:
  Net income  (loss)                                          $  (384,332)   $   128,255
  Adjustments to reconcile net income (loss) to net
    cash provided by (used in) operating activities:
      Depreciation and amortization                               266,110        215,338
      Provision for doubtful accounts                               2,822         18,058
      Deferred income taxes                                        56,000             --
   Decrease (increase) in:
      Accounts receivable                                        (218,499)       414,657
      Inventories                                                  89,193        606,925
      Prepaid expenses and other assets                           (76,687)       (38,525)
   Increase (decrease) in:
      Accounts payable                                           (154,432)       214,227
      Accrued liabilities and customer deposits                   (94,051)      (298,506)
      Deferred profit                                             (96,426)      (547,811)
      Income taxes payable (receivable)                          (595,115)       (88,198)
                                                              -----------    -----------
   Net Cash Provided By (Used In) Operating Activities         (1,205,417)       624,420
                                                              -----------    -----------
INVESTING ACTIVITIES:
  Purchases of property, plant and equipment                      (83,944)      (201,238)
                                                              -----------    -----------
   Net Cash Used In Investing Activities                          (83,944)      (201,238)
                                                              -----------    -----------
FINANCING ACTIVITIES:
  Proceeds from  warrant and stock option exercises                 1,126          3,283
  Borrowing on mortgage loan                                      244,969             --
                                                              -----------    -----------
   Net Cash Provided By Financing Activities                      246,095          3,283
                                                              -----------    -----------

EFFECT OF EXCHANGE RATE CHANGES ON CASH                            87,172         43,689
                                                              -----------    -----------
CASH AND CASH EQUIVALENTS:
  Net increase (decrease)                                        (956,094)       470,154
  Beginning of period                                           8,045,663      5,998,120
                                                              -----------    -----------
END OF PERIOD CASH AND CASH EQUIVALENTS                       $ 7,089,569    $ 6,468,274
                                                              ===========    ===========
SUPPLEMENTAL CASH FLOW INFORMATION:

Cash paid during the period for:
  Interest                                                    $    21,675    $     5,278
  Income taxes paid                                           $   329,000    $   158,198


   The accompanying notes are an integral part of these condensed consolidated
                             financial statements.

                                       5

                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
              NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS
                    THREE AND SIX MONTHS ENDED MARCH 31, 2003

1.   BASIS OF PRESENTATION

The accompanying  unaudited condensed  consolidated financial statements include
the accounts of Amtech Systems, Inc. and its wholly-owned subsidiaries, Tempress
Systems,  Inc.,  based in Heerde,  The  Netherlands,  and P. R. Hoffman  Machine
Products,  Inc.  (collectively,  the "Company").  All  significant  intercompany
balances and transactions have been eliminated in consolidation.

The accompanying  condensed consolidated financial statements have been prepared
in  accordance  with  accounting  principles  generally  accepted  in the United
States,  pursuant to the rules and  regulations  of the  Securities and Exchange
Commission  (the "SEC"),  and are unaudited.  In the opinion of management,  all
adjustments  necessary  to present  fairly the  financial  position,  results of
operations, and cash flows for the periods presented have been made.

Certain  information  and footnote  disclosures  normally  included in financial
statements have been condensed or omitted  pursuant to the rules and regulations
of the SEC. These condensed  consolidated financial statements should be read in
conjunction  with  the  consolidated  financial  statements  and  notes  thereto
included in the  Company's  Annual Report on Form 10-K for the fiscal year ended
September 30, 2002.

The consolidated  results of operations for the six months ended March 31, 2003,
are not necessarily indicative of the results expected for the full year.

2.   STOCK-BASED COMPENSATION:

The  company  has  five  stock-based  employee  compensation  plans,  which  are
summarized  in the  table  below.  Amtech  accounts  for these  plans  using the
intrinsic  value method and in accordance  with the  recognition and measurement
principles of APB Opinion No. 25, "Accounting for Stock Issues to Employees" and
related Interpretations.  No stock-based employee compensation cost is reflected
in net income,  as all options  granted under those plans had an exercise  price
equal to the market value of the  underlying  common stock on the date of grant.
The Company's stock-based employee compensation plans are as follows:

                                                 Shares
Name of Plan                                   Authorized     Plan Expiration
- ------------                                   ----------     ---------------
Director Stock Purchase Agreements (pre-1996)    10,000     90 days after board
                                                            member termination
Non-Employee Directors Stock Option Plan        100,000     December 21, 2005

Amended and Restated 1995 Stock Option and
   1995 Stock Bonus Plan (one plan)             160,000     October 5, 2005
1998 Employee Stock Option Plan                 300,000     January 30, 2008

                                       6

Qualified stock options issued under the terms of the plans have or will have an
exercise  price  equal to or greater  than the fair  market  value of the common
stock at the date of the option grant and expire no later than 10 years from the
date of grant,  with the most recent grant  expiring in 2013.  Options issued in
fiscal years 2003,  2002 and 2001 vest at the rate of 20% - 33% per year.  As of
March 31, 2003 and 2002,  the Company  had  199,258 and 235,908  stock  options,
respectively, available for grant under the plans.

The stock option  transactions  and the options  outstanding  are  summarized as
follows:

                                                Six Months Ended March 31,
                                        ----------------------------------------
                                                2003                 2002
                                        -------------------   ------------------
                                                   Weighted             Weighted
                                                   Average              Average
                                                   Exercise             Exercise
                                        Options     Price     Options     Price
                                        -------     -----     -------     -----
Outstanding at beginning of period       434,567   $  4.78     386,617  $  4.56
Granted                                   10,000      3.03      30,000     6.23
Exercised                                  1,000      1.13       2,450     1.34
                                        --------              --------
Outstanding at end of period             443,567      4.74     414,167     4.70
                                        ========              ========

Exercisable at end of period             203,701   $  3.94     138,318  $  3.04

Weighted average fair value of
   options granted during the period    $    .99              $   3.81

No adjustment  has been made for the  non-transferability  of the options or for
the risk of forfeiture at the time of issuance. Forfeitures are instead recorded
as incurred.  The fair value of each option  grant has been  estimated as of the
date of grant using the  Black-Scholes  option  pricing model with the following
weighted average assumptions:

                                              Six Months Ended March 31,
                                              --------------------------
                                                 2003            2002
                                                 ----            ----
Risk free interest rate                           4.8%        4.9% to 5.3%
Expected life                                   4 years       4 to 6 years
Dividend rate                                      0%              0%
Expected volatility                               32%             61%

                                       7

The  following  table  illustrates  the effect on net income (loss) and earnings
(loss)  per  share  if the  company  had  applied  the  fair  value  recognition
provisions of FASB Statement No. 123, "Accounting for Stock-Based  Compensation"
to stock-based employee compensation:



                                           Three Months Ended             Six Months Ended
                                                March 31,                     March 31,
                                       --------------------------    --------------------------
                                           2003           2002           2003           2002
                                       -----------    -----------    -----------    -----------
                                                                        
Net income (loss), as reported         $  (268,764)   $   (38,607)   $  (384,332)   $   128,255
Less pro forma compensation
  expense, net of tax                      (51,588)       (55,513)      (102,817)      (109,298)
                                       -----------    -----------    -----------    -----------
Pro forma net income (loss)            $  (319,352)   $   (94,120)   $  (487,149)   $    18,957
                                       ===========    ===========    ===========    ===========
Earnings (loss) per share:
    Basic - as reported                $      (.10)   $      (.01)   $      (.14)   $       .05
    Basic - pro forma                  $      (.12)   $      (.04)   $      (.18)   $       .01
    Diluted - as reported              $      (.10)   $      (.01)   $      (.14)   $       .05
    Diluted - pro forma                $      (.12)   $      (.04)   $      (.18)   $       .01


The following table summarizes  information  about stock options  outstanding at
March 31, 2003:

                        Outstanding Stock Options           Exercisable Options
                  -------------------------------------   ----------------------
                                               Weighted                 Weighted
                     Number                    Average      Number      Average
                  Outstanding     Remaining    --------   Exercisable   --------
Exercise          at March 31,   Contractual   Exercise   at March 31,  Exercise
  Price               2003          Life        Price        2003        Price
  -----               ----          ----        -----        ----        -----
$1.13 - 1.49        74,767          3.91        $ 1.13      72,767      $   1.13
 1.50 - 1.99        19,500          5.91          1.50      16,000          1.50
 2.00 - 3.24        12,300          9.28          2.83         900          2.00
 3.25 - 4.24         5,000          7.13          3.25       2,000          3.25
 4.25 - 5.49        95,000          8.36          4.42      14,500          4.41
 5.50 - 6.49        48,000          7.91          5.83      21,533          5.83
 6.50 - 6.99       189,000          8.06          6.56      76,001          6.57
                   -------                                 -------
                   443,567                                 203,701
                   =======                                 =======

3.   DEFERRED PROFIT

The components of deferred profit are as follows:



                                   March 31, 2003                      September 30, 2002
                        ------------------------------------   ------------------------------------
                         Deferred     Deferred     Deferred     Deferred     Deferred     Deferred
                          Revenue      Costs        Profit      Revenue       Costs        Profit
                        ----------   ----------   ----------   ----------   ----------   ----------
                                                                       
Systems awaiting
  Installation          $  627,775           --   $  627,775   $  992,600   $  762,285   $  230,315
Systems awaiting
  final acceptance              --           --           --      449,615           --      449,615
                        ----------   ----------   ----------   ----------   ----------   ----------
Total                   $  627,775           --   $  627,775   $1,442,215   $  762,285   $  679,930
                        ==========   ==========   ==========   ==========   ==========   ==========


                                       8

4.   INVENTORIES

The components of inventories are as follows:

                                                   March 31,    September 30,
                                                     2003           2002
                                                  ----------     ----------
     Purchased parts and raw materials            $2,075,088     $1,720,728
     Work-in-process                                 537,276        534,057
     Finished goods                                  462,150        766,105
                                                  ----------     ----------
     Totals                                       $3,074,514     $3,020,890
                                                  ==========     ==========

5.   COMPREHENSIVE INCOME (LOSS)

                                 Three Months Ended         Six Months Ended
                                      March 31,                 March 31,
                               ----------------------    ----------------------
                                 2003         2002         2003         2002
                               ---------    ---------    ---------    ---------
Net income (loss)              $(267,764)   $ (38,607)   $(384,332)   $ 128,255
Foreign currency translation
  adjustment                     136,035      (19,230)     293,478      (91,374)
                               ---------    ---------    ---------    ---------
Comprehensive income (loss)    $(131,729)   $ (57,837)   $ (90,854)   $  36,881
                               =========    =========    =========    =========

6.   EARNINGS (LOSS) PER SHARE



                                 Three Months Ended            Six Months Ended
                                      March 31,                    March 31,
                             --------------------------    --------------------------
                                2003           2002           2003           2002
                             -----------    -----------    -----------    -----------
                                                              
Net income (loss)            $  (267,764)   $   (38,607)   $  (384,332)   $   128,255

Weighted average
Shares outstanding:
  Common shares                2,689,571      2,681,533      2,689,285      2,681,214
  Common equivalents                  --             --             --        107,971
                             -----------    -----------    -----------    -----------
                               2,689,571      2,681,533      2,689,285      2,789,185
                             ===========    ===========    ===========    ===========
Earnings (Loss) Per Share:
  Basic                      $      (.10)   $      (.01)   $      (.14)   $       .05

  Diluted                    $      (.10)   $      (.01)   $      (.14)   $       .05


                                        9

     For the three and six months  ended March 31, 2003 and three and six months
     ended  March  31,  2002,  489,267;  489,267;  481,417  and  60,700  shares,
     respectively, were excluded from the earnings (loss) per share calculation.
     These options are not  classified as common  equivalents in the above table
     as they are either antidilutive due to the net loss for the period or their
     exercise price exceeds the average market price for the period.

7.   BUSINESS SEGMENT INFORMATION

The Company  classifies its products into two business  segments,  semiconductor
equipment and polishing supplies.  The semiconductor  equipment segment designs,
manufactures and markets  semiconductor  wafer processing and handling equipment
used  in  the  fabrication  of  integrated  circuits.  Also  aggregated  in  the
semiconductor  equipment segment are the manufacturing  support service business
and any difference between the planned corporate  expenses,  which are allocated
to the segments  based upon their revenue and the Company's  investment in each,
and  actual  corporate   expenses.   The  polishing  supplies  segment  designs,
manufactures and markets  carriers,  templates and equipment used in the lapping
and  polishing of wafer thin  materials,  including  silicon  wafers used in the
production of  semiconductors.  Information  concerning  the Company's  business
segments is as follows:



                                           Three Months Ended              Six Months Ended
                                                March 31,                      March 31,
                                      ----------------------------    ----------------------------
                                          2003            2002            2003            2002
                                      ------------    ------------    ------------    ------------
                                                                          
Revenues
  Semiconductor equipment             $  4,123,138    $  4,403,502    $  7,239,941    $  8,788,915
  Polishing supplies                     1,324,490       1,173,812       2,536,884       2,245,315
                                      ------------    ------------    ------------    ------------
                                      $  5,447,628    $  5,577,314    $  9,776,825    $ 11,034,230
                                      ============    ============    ============    ============
Operating income (loss)
  Semiconductor equipment             $   (439,877)   $    (53,873)   $   (534,090)   $    263,014
  Polishing supplies                        30,923         (16,521)        (68,392)       (120,359)
                                      ------------    ------------    ------------    ------------
    Total operating income (loss)         (408,954)        (70,394)       (602,482)        142,655
Interest income - net                        1,190          20,787          15,150          55,600
                                      ------------    ------------    ------------    ------------
Income (loss) before income tax       $   (407,764)   $    (49,607)   $   (587,332)   $    198,255
                                      ============    ============    ============    ============


8.   LEGAL PROCEEDINGS

On or about August 31, 2000, a "P.R. Hoffman Machine Products" was one of eleven
companies  named in a legal  action  brought  by  North  Middleton  Township  in
Carlisle,   Pennsylvania,  the  owner  of  a  landfill  allegedly  found  to  be
contaminated.  No  detailed  allegations  have been  filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired  the  assets  of  P.R.  Hoffman  Machine  Products,  Inc.  in an  asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's

                                       10

asset acquisition. Therefore, the Company believes that the named company is the
prior  owner of the  acquired  assets.  Under the  terms of the  Asset  Purchase
Agreement  governing the  acquisition,  the prior owner,  P.R.  Hoffman  Machine
Products Corporation,  is obligated to indemnify the Company for any breaches of
its representations  and warranties in the Asset Purchase  Agreement,  including
representations  relating to environmental matters. In accordance with the terms
of the Asset Purchase  Agreement,  the Company has provided  notice to the prior
owner of P.R.  Hoffman Machine  Products  Corporation of the Company's intent to
seek  indemnification  from such owner for any  liabilities  resulting from this
legal action.  Based on  information  available to the Company as of the date of
this report,  management believes the costs, if any, to resolve this matter will
not be material to the  Company's  business,  results of operations or financial
position.

9.   USE OF ESTIMATES

The preparation of financial statements in conformity with accounting principles
generally  accepted in the United States  requires  management to make estimates
and assumptions  that affect the reported  amounts of assets and liabilities and
disclosure of  contingent  assets and  liabilities  at the date of the financial
statements  and the reported  amounts of revenues and expenses  during the year.
Actual results could differ from those estimates.

10.  NEW ACCOUNTING PRONOUNCEMENTS

On October 1, 2002, the Company  adopted  Financial  Accounting  Standards Board
Statement of Financial  Accounting  Standards (SFAS) No. 142 "Goodwill and Other
Intangible  Assets."  Under this  accounting  standard,  goodwill and intangible
assets  with  indefinite  lives are no longer  subject to  amortization  but are
tested  for  impairment  at least  annually.  SFAS No.  142  also  requires  the
completion of the  transitional  impairment test of the recorded  goodwill as of
the date this accounting  standard is adopted.  The Company  completed the first
step of the  transitional  impairment  test during the  quarter  ended March 31,
2003,  noting no indication of impairment  associated with the recorded goodwill
balance of $728,000 as of October 1, 2002.

For comparative purposes,  pro forma net income (loss) assuming SFAS No. 142 had
been adopted in fiscal 2002 is as follows:



                                          Three Months Ended        Six Months Ended
                                               March 31,                March 31,
                                        ----------------------    ----------------------
                                          2003         2002         2003         2002
                                        ---------    ---------    ---------    ---------
                                                                   
Net income (loss), as reported          $(267,764)   $ (38,607)   $(384,332)   $ 128,255
Amortization expense, net of tax               --       11,433           --       22,866
                                        ---------    ---------    ---------    ---------
Net income (loss), pro forma            $(267,764)   $ (27,174)   $(384,332)   $ 151,121
                                        =========    =========    =========    =========


SFAS No. 144,  "Accounting for the Impairment or Disposal of Long-Lived  Assets"
supersedes SFAS No. 121, "Accounting for the Impairment of Long-Lived Assets and
for  Long-Lived  Assets to be Disposed  Of," and portions of APB Opinion No. 30,
"Reporting the Results of Operations." SFAS No. 144 provides a single accounting
model for  long-lived  assets to be  disposed of and  significantly  changes the
criteria  that must be met to classify an asset as "held for sale." SFAS No. 144

                                       11

also requires expected future operating losses from  discontinued  operations to
be recorded in the period(s) in which the losses are incurred, rather than as of
the  measurement  date as presently  required.  Effective as of October 1, 2002,
Amtech  adopted SFAS No. 144. The adoption of SFAS 144 did not have an effect on
Amtech's financial position or operating results.

In June 2002,  the FASB issued SFAS No. 146,  "Accounting  for Costs  Associated
with Exit or Disposal Activities". SFAS 146 nullifies Emerging Issues Task Force
(EITF) Issue No. 94-3,  "Liability  Recognition for Certain Employee Termination
Benefits and Other Costs to Exit an Activity. For purposes of this Statement, an
exit activity  includes,  but is not limited to a restructuring  as that term is
defined in IAS 37, "Provisions,  Contingent Liabilities, and Contingent Assets".
The  Statement  is effective  for exit or disposal  activities  initiated  after
December 31, 2002.  Effective  October 1, 2002, Amtech adopted SFAS No. 146. The
adoption of SFAS No. 146 did not have an effect on Amtech's  financial  position
or operating results.

SFAS  No.  148,  "Accounting  for  Stock-Based  Compensation  -  Transition  and
Disclosure" amends SFAS No. 123, "Accounting for Stock - Based Compensation" and
provides  alternative  methods of transition for a voluntary  change to the fair
value based method of accounting for stock - based employee  compensation.  SFAS
No. 148 also amends the disclosure  requirements of SFAS No. 123 to require more
prominent and frequent  disclosures in financial statements about the effects of
stock - based  compensation.  Effective January 1, 2003, Amtech adopted SFAS No.
148. The  adoption of SFAS No. 148 did not have an effect on Amtech's  financial
position or operating results.

In November  2002,  the EITF  reached a consensus  on issue  00-21,  "Multiple -
Deliverable  Revenue  Arrangements"  (EITF 00-21).  EITF 00-21  addresses how to
account  for  arrangements  that may  involve the  delivery  or  performance  of
multiple products,  services and/or rights to use assets. The consensus mandates
how to identify  whether  goods or  services  or both which are to be  delivered
separately in a bundled  sales  arrangement  should be accounted for  separately
because they are  "separate  units of  accounting."  The guidance can affect the
timing of revenue  recognition  for such  arrangements,  even though it does not
change  rules  governing  the  timing or  patterns  of  revenue  recognition  of
individual  items  accounted  for  separately.   The  final  consensus  will  be
applicable to agreements  entered into in fiscal years  beginning after June 15,
2003 with early adoption permitted. Additionally, companies will be permitted to
apply the  consensus  guidance to all existing  arrangements  as the  cumulative
effect of a change in accounting  principle in  accordance  with APB Opinion No.
20,  "Accounting  Changes."  Amtech does not believe the  adoption of EITF 00-21
will have a material impact on its financial position or results of operations.

                                       12

In January  2003,  the FASB  issued  Interpretation  No. 46,  "Consolidation  of
Variable   Interest   Entities,   an   interpretation   of  ARB  No.  51."  This
Interpretation  addresses the consolidation by business  enterprises of variable
interest entities as defined in the Interpretation.  The Interpretation  applies
immediately to variable  interests in variable  interest entities obtained after
January 31, 2003. For public  enterprises with a variable interest in a variable
interest entity created before February 1, 2003, the  Interpretation  is applied
to the  enterprise  no later than the  beginning of the first  interim or annual
reporting  period  beginning  after June 15, 2003. The  Interpretation  requires
certain disclosures in financial  statements issued after January 31, 2003 if it
is reasonably  possible that a Company will consolidate or disclose  information
about variable  interest  entities when the  Interpretation  becomes  effective.
Amtech currently has no contractual  relationship or other business relationship
with  a  variable   interest   entity  and   therefore   the  adoption  of  this
interpretation  did not have a material effect on Amtech's financial position or
operating results.

                                       13

ITEM 2. MANAGEMENT'S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS
        OF OPERATIONS

     CAUTION REGARDING FORWARD-LOOKING STATEMENTS

     Certain  information   contained  or  incorporated  by  reference  in  this
Quarterly  Report on Form 10 Q is  forward-looking  in  nature.  All  statements
included or incorporated  by reference in this Quarterly  Report on Form 10 Q or
made by  management of Amtech  Systems,  Inc. and its  subsidiaries  ("Amtech"),
other  than   statements  of   historical   fact,   are  hereby   identified  as
"forward-looking  statements" (as such term is defined in the Private Securities
Litigation Reform Act of 1995).  Examples of forward-looking  statements include
statements  regarding  Amtech's future  financial  results,  operating  results,
business strategies,  projected costs,  products under development,  competitive
positions and plans and objectives of management for future operations.  In some
cases,  forward-looking  statements  can be  identified by  terminology  such as
"may," "might," "will," "should," "would,"  "expects,"  "plans,"  "anticipates,"
"believes," "estimates," "predicts," "potential," "possible," "continue," or the
negative of these terms or other comparable terminology.  Any expectations based
on these  forward-looking  statements are subject to risks and uncertainties and
other important factors, including those discussed in the section entitled "Item
7: Management's  Discussion and Analysis - Trends,  Risks and  Uncertainties" in
Amtech's  Annual  Report on Form 10-K for the fiscal  year ended  September  30,
2002,  which is incorporated  herein by reference.  These and many other factors
could affect  Amtech's future  operating  results and financial  condition,  and
could cause  actual  results to differ  materially  from  expectations  based on
forward-looking  statements  made in this  document or elsewhere by Amtech or on
its behalf.  All  references  to "we," "our," "us," or "Amtech"  refer to Amtech
Systems, Inc. and its subsidiaries.

DOCUMENTS  TO REVIEW IN  CONNECTION  WITH  MANAGEMENT'S  ANALYSIS  OF  FINANCIAL
CONDITION AND RESULTS OF OPERATIONS

     This  discussion   should  be  read  in  conjunction   with  the  Condensed
Consolidated  Financial Statements and Notes presented in this Form 10-Q and the
Financial  Statements and Notes and the section  entitled "Item 7:  Management's
Discussion  and Analysis - Trends,  Risks and  Uncertainties"  in our last filed
Annual Report on Form 10- K for a more complete  understanding  of our financial
position  and results of  operations  for the three and six month  period  ended
March 31, 2003.

RESULTS OF OPERATIONS

     Amtech   develops,   manufactures,   markets   and   services  a  range  of
semiconductor  wafer manufacturing and semiconductor  fabrication  equipment and
related parts,  supplies and services on a worldwide basis. The products offered
are grouped into two segments: the semiconductor  equipment segment which offers
horizontal  diffusion  furnaces,   processing/robotic  equipment  for  diffusion
furnaces and services to semiconductor manufacturers; and the polishing supplies
segment, which offers supplies,  including carriers and templates, and equipment
for lapping and polishing,  some of the last steps in the manufacture of silicon
wafers.  Demand for Amtech's  products can change  significantly  from period to
period as a result of numerous factors,  including,  but not limited to, changes
in: 1) global  and  regional  economic  conditions;  2) supply  and  demand  for

                                       14

semiconductors or, more specifically, capacity utilization and production volume
of   manufacturers   of   semiconductors,   silicon  wafers,   solar  cells  and
microelectrical  mechanical systems (MEMS), including optical components; and 3)
the  profitability  and  capital  resources  of  potential  customers  in  these
industries.  For this and other reasons, Amtech's results of operations for past
periods may not necessarily be indicative of future operating results.

     Amtech's  orders tend to be more volatile than its revenue as any change in
demand is reflected  immediately  in the orders  booked,  which are net of order
cancellations,  while revenues tend to be recognized over multiple quarters as a
result of  procurement  and  production  lead times and the  deferral of certain
revenue under the Company's accounting policy for revenue recognition.

     During  the  third  quarter  of  fiscal  2000  Amtech's  orders  reached  a
historical  high.  Beginning  in the  first  fiscal  quarter  of  2001,  slowing
worldwide  demand for  semiconductors  resulted in a rapid decline in net demand
for manufacturing equipment.  Inventory buildups in telecommunications products,
slower than expected personal computer sales and slow global economic growth for
electronic products caused many semiconductor  manufacturers to reevaluate their
capital   spending  plans  and  reduce  the  placement  of  new  orders,   while
rescheduling  or canceling  existing  orders.  This decline in demand  continued
throughout  fiscal  2001 and the first  half of fiscal  2002,  due to  continued
weakness in the  macro-economic  climate.  Amtech believes its order backlog and
revenue  reached the lowest point of the cycle during the fiscal  quarter  ended
March 31, 2002.

     During the third and fourth  quarters  of fiscal  2002,  the  semiconductor
industry  recovered  modestly and semiconductor  wafer  manufacturers  continued
spending on equipment for producing 300mm wafers, resulting in increased orders,
shipments  and  backlog as compared to the second  quarter of fiscal  2002.  New
orders, shipments,  revenue and backlog were volatile during this period and are
shown in the table below:



                                              Fiscal Quarter
                             -------------------------------------------------       Fiscal
                               First        Second       Third         Fourth         Year
                             --------      --------     --------      --------      --------
                                                                     
2003:
   New orders (2)            $  2,165      $  6,477           --            --            --
   Shipments                    4,359         4,785           --            --            --
   Revenue                      4,329         5,448           --            --            --
   Ending backlog               5,748         6,777           --            --            --

2002:
   New orders (2)               2,213           519        6,132         5,626        14,490
   Shipments                    4,373         3,983        4,189         4,925        17,470
   Revenue                      5,457         5,577        4,447         5,052        20,533
   Ending backlog            $ 10,711      $  5,653     $  7,338      $  7,912            --


                                       15


                                                                     
2001
   New orders (2)               4,361         7,783        2,750         3,788        18,682
   Shipments                    6,882         7,025        6,053         3,742        23,702
   Revenue                      3,603         6,803        8,023         4,423        22,852
   Ending backlog              18,883(1)     19,863       14,590        13,955

2000:
   New orders (2)               4,254         4,843       14,400         6,270        29,767
   Shipments                    3,863         4,549        4,693         5,922        19,027
   Revenue                      3,863         4,549        4,693         5,922        19,027
   Ending backlog            $  4,150      $  4,444     $ 14,151      $ 14,499


(1)  The deferred revenue included in the cumulative effect of the change in the
     revenue  recognition  accounting  policy  as of  October  1,  2000 was $3.6
     million,  which accounts for the  difference  between the backlog as of the
     end of 2000 and the beginning of 2001. The amounts for fiscal 2000 were not
     restated.
(2)  New orders are net of cancellations.

     Interest in the Company's products during the second quarter of fiscal 2003
resulted in $6.5 million in new orders. While interest in the company's products
remains,  as evidenced by the quotation activity and the number of specification
meetings with customers, future order levels are expected to remain volatile and
on average are not likely to exceed the $6.5  million  per  quarter  level until
there  is  clear  evidence  of  improvement  in  the  general  economy  and  the
semiconductor industry. However, as a result of the ongoing economic weakness in
the global semiconductor market and geopolitical uncertainties,  there can be no
assurance  that the Company will be able to maintain order bookings at the level
experienced in the second quarter of fiscal 2003.

     The following table sets forth certain  operational data as a percentage of
net revenue for the periods indicated:

                                        Three Months Ended     Six Months Ended
                                             March 31,             March 31,
                                          ---------------       ---------------
                                          2003       2002       2003       2002
                                          ----       ----       ----       ----
Net revenue                                100%       100%       100%       100%
Cost of product sales                       83         76         81         76
     Gross margin                           17         24         19         24

Selling, general and
 administrative expenses                    23         25         23         22
Research and development                     2          1          2          1
                                          ----       ----       ----       ----
     Operating income (loss)                (8)%       (1)%       (6)%        1%
                                          ====       ====       ====       ====

Based upon the current order backlog and estimates of future bookings, we expect
revenue for the second half of fiscal 2003 to approximate  the first half of the
year. However, based upon customer delivery schedules, we anticipate 40% of that
revenue  will be realized  in the third  quarter and 60% will be realized in the
fourth quarter of fiscal 2003.

                                       16

     REVENUES.  Amtech's  total revenue for the three and six months ended March
31,  2003 was $5.4 and $9.8  million,  respectively,  compared to $5.6 and $11.0
million,  respectively,  for the same periods in fiscal 2002. This represented a
decrease from fiscal 2002 to 2003 of 4% and 11%, respectively.  Revenues for the
second  quarter of fiscal 2003 were $1.1  million,  or 26%,  higher than for the
first  quarter  of fiscal  2003.  Revenues  in the  polishing  supplies  segment
increased  by 13% in the second  quarter of fiscal  2003  compared to the second
quarter of fiscal 2002 and also in the first six months of fiscal 2003  compared
to the first six months of fiscal 2002.  However,  these increases in revenue of
the  polishing  segment were offset by a 6% and 18%  respective  decrease in the
semiconductor  segment when  comparing the second  quarter of fiscal 2003 to the
second  quarter of fiscal  2002 and the first  half of fiscal  2003 to the first
half of fiscal 2002. The higher revenue during the first half of fiscal 2002 was
due to the $14.0  million order backlog at the beginning of that fiscal year. We
continue  to believe  that for the  foreseeable  future the order  backlog  will
remain above the $5.7 million level of March 31, 2002.

     Based upon the current order backlog and estimates of future  bookings,  we
expect revenue for the second half of the current fiscal year to approximate the
first half of the year.  However,  based upon customer  delivery  schedules,  we
anticipate  significantly lower revenues in the third quarter, with a rebound in
the fourth quarter.

     GROSS MARGINS. Consolidated gross margin for the three and six months ended
March 31,  2003 was $.9 and $1.8  million,  compared  to $1.3  million  and $2.7
million  for the same  periods in fiscal  2002,  representing  decreases  of $.4
million  and $.9  million,  or 31% and 33%,  respectively.  The decline in gross
margins is primarily  due to  increased  pricing  pressure in the  semiconductor
segment. In the first quarter and six months of fiscal 2003, the gross margin of
the  semiconductor  equipment segment decreased to 15% and 19% of sales from 25%
and 26% of sales in the first quarter and six months of 2002, respectively.  The
gross margin of the polishing  supplies segment remained fairly  consistent when
comparing  fiscal 2002 to 2003, at  approximately  24% and 19% of revenue in the
first  quarter  and six  months of fiscal  2003  compared  to 22% and 18% in the
comparable  periods of fiscal 2002.  Amtech's gross margins and their percentage
of  revenue  have  significantly  fluctuated  in the past and will  continue  to
fluctuate  based on several  factors  including the severity and duration of the
current industry downturn, product mix and overhead absorption levels. Mix has a
particularly significant affect on gross margin when the equipment revenue of an
order is recognized in one period and the remainder of the revenue attributed to
installation,  generally  10-20% of the order,  is recognized in a later period,
because the latter has an effective gross margin of 100%.

     SELLING, GENERAL AND ADMINISTRATIVE EXPENSES. Consolidated selling, general
and  administrative  expenses for the quarter  ended March 31, 2003 declined $.2
million, to $1.2 million compared to $1.4 million in the quarter ended March 31,
2002.  This reduction was consistent  with the $.1 million  decrease in selling,
general  and  administrative  expenses  for the six months  ended March 31, 2002
which were $2.3  million  compared to $2.4 million in the six months ended March
31,  2002.  The  decrease  was due to  continuing  efforts  at cost  reductions.
Selling,  general  and  administrative  expenses  as  a  percentage  of  revenue
represented  23% for both the three and six months ended March 31, 2003 compared
to 24% and 22%, respectively, for the comparable periods in fiscal 2002.

     RESEARCH AND  DEVELOPMENT  EXPENSES.  During the three and six months ended
March  31,  2003  and  2002,  research  and  development  expenses  were  fairly
consistent,  at  approximately  $.1 million  each  quarter.  During the past few

                                       17

fiscal years, the most significant  project included in research and development
expenses has been the development of a new technology  asher pursuant to a joint
product development agreement with PSK Tech. The results of the feasibility work
on the new  technology  asher  with PSK Tech  have  been  encouraging.  However,
continued  improvements  in existing  technologies  have delayed our  customers'
potential  requirements  for this product and thus further  development  is also
being delayed.

     OPERATING  INCOME (LOSS).  Operating income or (loss) for the three and six
months of fiscal 2003 was a loss of $.4 million, or (8)% of revenue,  and a loss
of $.6 million,  or (6)% of revenue,  compared to a loss of $70,000,  or (1)% of
revenue,  and a profit of $.2 million, or 1% of revenue, for the same periods of
fiscal  2002.  Operating  profit  declined in 2003 due  primarily to the decline
gross margin in the semiconductor segment.

     INCOME TAX  PROVISION.  During the first  quarter  and six months of fiscal
2003,  Amtech  recorded an income tax  benefit of $.1  million and $.2  million,
respectively.  The  effective  rate stated as a percentage of loss before income
taxes was 34% and 35%, respectively for these periods.  During the first quarter
and six months of fiscal  2002,  Amtech  recorded  an income tax benefit of less
than $.1 million and a provision  of less than $.1  million,  respectively.  The
effective  rate stated as a percentage of income or loss before income taxes was
22% and 35%,  respectively  for these  periods in fiscal 2002.  Amtech's  future
effective income tax rate depends on various  factors,  such as tax legislation,
the geographic  composition of pre-tax income,  non-tax deductible  expenses and
the effectiveness of its tax planning strategies.

     NET INCOME.  The net loss for the first three and six months of fiscal 2003
was $.3 million and $.4 million,  respectively.  The net loss per diluted  share
was ($.10) and ($.14),  respectively,  for these periods.  Net income (loss) for
the  first  three  and six  months  of  fiscal  2002 was a loss of less than $.1
million and income of $.1 million,  respectively.  Net income (loss) per diluted
share was ($.01) and $.05, respectively, for the periods.

     BACKLOG. At March 31, 2003, the order backlog was $6.8 million, an increase
of $1.1 million, or 19%, from the $5.7 million backlog at December 31, 2002. The
orders  included in Amtech's  backlog are  generally  credit  approved  customer
purchase orders usually scheduled to ship in the next twelve months. The backlog
also includes deferred revenue. Amtech schedules production of its systems based
on order backlog and customer commitments. However, customers may delay delivery
of products or cancel orders suddenly and without sufficient notice,  subject to
possible  cancellation  penalties.  Due to possible customer changes in delivery
schedules and  cancellations of orders,  Amtech's backlog at any particular date
is not  necessarily  indicative  of actual  revenue for any  succeeding  period.
Delays in delivery schedules and/or a reduction of backlog during any particular
reporting period could have a material  adverse effect on Amtech's  business and
results of  operations.  In addition,  a backlog does not provide any  assurance
that Amtech will  realize a profit from those orders or indicate in which period
revenue will be recognized.

                                       18

LIQUIDITY AND CAPITAL RESOURCES

     At March 31,  2003,  the  Company  had $7.1  million of  readily  available
liquidity  in the  form of cash  and  cash  equivalents,  compared  to cash  and
equivalents  of $8.0 million at September 30, 2002, a decrease of  approximately
$.9 million. The Company continues to believe that there is sufficient available
liquidity and capital resources for its existing operations and expansion plans.

     CASH FLOW. The $.9 million net decrease in cash during the six months ended
March 31, 2003  approximates the $1.2 million cash flow used in operations.  The
$1.2  million  cash  flow used in  operations  primarily  resulted  from the $.4
million net loss, a $.6 million  increase in  refundable  income taxes and a $.2
million  increase in accounts  receivable.  Investing  activities  consisted  of
capital  expenditures  of less  than $.1  million  in the  aggregate.  Financing
activities  consisted of $.2 million in  additional  borrowings  on the existing
mortgage loan.

     At March 31, 2003, Amtech's principal source of liquidity consisted of $7.1
million  of cash and cash  equivalents.  Since  the only  lien on the  Company's
assets is a $.5 million  mortgage  loan,  management  believes that  significant
amounts of additional  liquidity are available from various  financing  sources.
Amtech believes that it has sufficient  liquidity for current operations and for
at least certain elements of its growth  strategy.  One element of that strategy
is the  development of new products such as the proposed new  technology  asher,
the  costs  and  timing  of which  have  yet to be  determined.  Another  is the
acquisition  of  product  lines or  businesses  that  complement  the  company's
existing business.  Amtech's currently available cash and short-term investments
are expected to be  sufficient  for existing  operations,  planned  research and
development and possibly an acquisition, depending on size. However, significant
unplanned  development  of new  products,  or larger  acquisitions  may  require
additional  capital  resources that are expected to be obtained from one or more
sources of financing,  such as a private placement,  a public offering,  working
capital  loans  or term  loans  from  banks  or  other  financial  institutions,
equipment leasing,  mortgage  financing and internally  generated cash flow from
operations.  There can be no assurance of the  availability  or  sufficiency  of
these or any other source of funding for those purposes.

CRITICAL ACCOUNTING POLICIES

     "Management's Discussion and Analysis of Financial Condition and Results of
Operations"  discusses  our  consolidated  financial  statements  that have been
prepared in accordance  with  accounting  principles  generally  accepted in the
United States of America. The preparation of these financial statements requires
us to make estimates and  assumptions  that affect the reported amount of assets
and  liabilities  at the date of the  financial  statements,  the  disclosure of
contingent  assets and  liabilities at the date of the financial  statements and
the reported amounts of revenues and expenses during the reporting period.

     On an on-going  basis,  we evaluate our estimates and judgments,  including
those related to revenue  recognition,  valuation  allowances  for inventory and
accounts  receivable,  warranty and impairment of long-lived assets. We base our
estimates and judgments on  historical  experience  and on various other factors
that are believed to be reasonable under the circumstances.  The result of these
estimates and judgments form the basis for making conclusions about the carrying
value of  assets  and  liabilities  that are not  readily  apparent  from  other
sources.  Actual  results  may  differ  from  these  estimates  under  different
assumptions or conditions.

                                       19

     The SEC suggests that all registrants list their most "critical  accounting
policies" in Management's  Discussion and Analysis. A critical accounting policy
is one which is both  important  to the  portrayal  of the  Company's  financial
condition and results and requires  management's  most difficult,  subjective or
complex  judgments,  often as a result of the need to make  estimates  about the
effect  of  matters  that are  inherently  uncertain.  Management  believes  the
critical  accounting  policies  discussed  below  affect  its  more  significant
judgments  and  estimates  in  the  preparation  of its  consolidated  financial
statements.

     REVENUE RECOGNITION

     The Company recognizes  revenue when persuasive  evidence of an arrangement
exists;  title  transfers;  the  seller's  price is fixed  or  determinable  and
collectibility is reasonably assured. Certain of the Company's product sales are
accounted for as multiple element arrangements.  For the semiconductor equipment
segment,  if the Company has met defined customer  specifications with similarly
situated customers,  equipment and processes,  the Company recognizes  equipment
revenue upon  shipment and  transfer of title,  and the holdback  portion of the
revenue that is contingent upon installation and acceptance, generally 10% - 20%
of a system's  selling price, is deferred until those  activities are completed.
Revenues and related  costs for  products  that are shipped but do not meet this
criteria  are deferred and  recognized  when the  equipment  and  processes  are
proven, generally upon customer acceptance or upon obtaining customer acceptance
on at least two similar systems.  Collection of the holdback portion of a system
sale is often based on system  acceptance  or final  installation.  We have,  on
occasion, experienced longer than expected delays in receiving cash from certain
customers  pending  system  acceptance  or  final  installation.  If some of our
customers were to refuse to pay the remaining holdback, or otherwise delay final
acceptance  or  installation,  the  deferred  revenue  would not be  recognized,
adversely affecting future operating results.

     Equipment sold by the polishing  supplies  segment does not include process
guarantees  or  acceptance  criteria,  so the related  revenue is recorded  upon
shipment. For all segments,  sales of spare parts and consumables are recognized
upon  shipment,  as there are no post shipment  obligations  other than standard
warranties.  Service  revenues are recognized  upon  performance of the services
requested by the customer. Revenue related to service contracts is recognized as
the services requested by the customer are performed.

     INVENTORY VALUATION

     We value our inventory at the lower of cost or the current estimated market
value. We regularly review inventory  quantities on hand and record a write-down
for excess and obsolete  inventory.  The  provision  is  primarily  based on our
estimated forecast of product demand and production  requirements.  However, our
industry is  characterized  by customers in highly  cyclical  industries,  rapid
technological  changes,  frequent  new product  developments  and rapid  product
obsolescence.  During 2003, 2002 and 2001, there has been a significant decrease
in the worldwide  demand for  semiconductor  capital  equipment.  Demand for our
products has fluctuated  significantly  and may do so in the future.  This could
result  in an  increase  in the  cost of  inventory  or an  increase  in  excess
inventory  quantities on hand. In general, the Company's ratio of inventories to
operating  levels is above,  and is expected to remain above, the historic norms
due to order cancellations and the deferral of orders by customers. There can be
no assurance that future developments will not necessitate further  write-downs.

                                       20

     VALUATION ALLOWANCE FOR ACCOUNTS RECEIVABLE

     We maintain allowances for doubtful accounts for estimated losses resulting
from the inability of our customers to make required payments.  These allowances
are based on historical  experience,  credit  evaluations and specific  customer
collection  issues we have identified.  Since our accounts  receivable are often
concentrated  in a relatively few number of customers,  a significant  change in
the liquidity or financial  position of any one of these  customers could have a
material adverse impact on the collectibility of our accounts receivable and our
future operating results.

     WARRANTY

     The Company  provides a limited  warranty,  generally twelve to twenty-four
months,  to all purchasers of its new products and systems.  A provision for the
estimated  cost of  warranty  is  recorded  upon  shipment  of all  systems.  On
occasion,  we have been  required  and may be  required in the future to provide
additional  warranty coverage to ensure that the systems are ultimately accepted
or to maintain  customer  goodwill.  While our warranty costs have  historically
been within our  expectations  and management  believes that the amounts accrued
for warranty  expenditures are sufficient for all systems sold through March 31,
2003,  there can be no assurance  that we will  continue to experience a similar
level of  predictability  in regard to  warranty  costs we have in the past.  In
addition,  technological  changes or previously unknown defects in raw materials
or components  may result in more extensive and frequent  warranty  service than
anticipated, which could have a material adverse impact on our operating results
for the periods in which such additional costs materialize.

     IMPAIRMENT OF LONG-LIVED ASSETS

     We evaluate  whether events and  circumstances  have occurred that indicate
the estimated useful lives of long-lived assets or intangible assets may warrant
revision or that the  remaining  balance may not be  recoverable.  When  factors
indicate  that an asset should be evaluated for possible  impairment,  we use an
estimate of the related  discounted  net cash flows  generated by the asset over
the  remaining  estimated  life of the asset in  measuring  whether the asset is
recoverable.  We make judgments and estimates used in establishing  the carrying
value of long-lived or intangible assets. Those judgments and estimates could be
modified  if  adverse  changes  were to  occur  in the  future  resulting  in an
inability to recover the carrying value of these assets. We have not experienced
any  impairment to long-lived  assets during fiscal 2002 or the first six months
of fiscal 2003.  Future adverse changes could be caused by, among other factors,
a continued downturn in the semiconductor industry, a general economic slowdown,
reduced  demand for our products in the market place,  poor  operating  results,
inability to protect intellectual  property or changing technologies and product
obsolescence.

NEW ACCOUNTING PRONOUNCEMENTS

     On October 1, 2002,  the Company  adopted  Financial  Accounting  Standards
Board Statement of Financial  Accounting  Standards (SFAS) No. 142 "Goodwill and
Other  Intangible  Assets."  Under  this  accounting   standard,   goodwill  and
intangible  assets with  indefinite  lives are no longer subject to amortization
but are tested for impairment at least annually.  SFAS No. 142 also requires the

                                       21

completion of the  transitional  impairment test of the recorded  goodwill as of
the date this accounting  standard is adopted.  The Company  completed the first
step of the  transitional  impairment  test during the year ended  September 30,
2003,  noting no indication of impairment  associated with the recorded goodwill
balance of $728,000 as of October 1, 2002.

     For comparative purposes, pro forma net income (loss) assuming SFAS No. 142
had been adopted in fiscal 2002 is as follows:



                                          Three Months Ended         Six Months Ended
                                               March 31,                 March 31,
                                        ----------------------    ----------------------
                                           2003         2002         2003         2002
                                        ---------    ---------    ---------    ---------
                                                                   
Net income (loss), as reported          $(267,764)   $ (38,607)   $(384,332)   $ 128,255
Amortization expense, net of tax               --       11,433           --       22,866
                                        ---------    ---------    ---------    ---------
Net income (loss), pro forma            $(267,764)   $ (27,174)   $(384,332)   $ 151,121
                                        =========    =========    =========    =========


     SFAS No. 144,  "Accounting  for the  Impairment  or Disposal of  Long-Lived
Assets"  supersedes  SFAS No. 121,  "Accounting for the Impairment of Long-Lived
Assets and for Long-Lived Assets to be Disposed Of," and portions of APB Opinion
No. 30,  "Reporting the Results of  Operations."  SFAS No. 144 provides a single
accounting  model for  long-lived  assets to be  disposed  of and  significantly
changes the  criteria  that must be met to classify an asset as "held for sale."
SFAS No. 144 also requires  expected future operating  losses from  discontinued
operations  to be recorded in the  period(s)  in which the losses are  incurred,
rather than as of the measurement  date as presently  required.  Effective as of
October 1, 2002,  Amtech  adopted SFAS No. 144. The adoption of SFAS 144 did not
have an effect on Amtech's financial position or operating results.

     In June  2002,  the  FASB  issued  SFAS  No.  146,  "Accounting  for  Costs
Associated with Exit or Disposal Activities". SFAS 146 nullifies Emerging Issues
Task Force (EITF) Issue No. 94-3,  "Liability  Recognition for Certain  Employee
Termination  Benefits and Other Costs to Exit an Activity.  For purposes of this
Statement,  an exit activity includes,  but is not limited to a restructuring as
that  term  is  defined  in IAS 37,  "Provisions,  Contingent  Liabilities,  and
Contingent  Assets".  The Statement is effective for exit or disposal activities
initiated  after December 31, 2002.  Effective  October 1, 2002,  Amtech adopted
SFAS No.  146.  The  adoption of SFAS No. 146 did not have an effect on Amtech's
financial position or operating results.

     SFAS No. 148,  "Accounting  for  Stock-Based  Compensation - Transition and
Disclosure" amends SFAS No. 123, "Accounting for Stock - Based Compensation" and
provides  alternative  methods of transition for a voluntary  change to the fair
value based method of accounting for stock - based employee  compensation.  SFAS
No. 148 also amends the disclosure  requirements of SFAS No. 123 to require more
prominent and frequent  disclosures in financial statements about the effects of
stock - based  compensation.  Effective January 1, 2003, Amtech adopted SFAS No.
148. The  adoption of SFAS No. 148 did not have an effect on Amtech's  financial
position or operating results.

                                       22

     In November 2002, the EITF reached a consensus on issue 00-21,  "Multiple -
Deliverable  Revenue  Arrangements"  (EITF 00-21).  EITF 00-21  addresses how to
account  for  arrangements  that may  involve the  delivery  or  performance  of
multiple products,  services and/or rights to use assets. The consensus mandates
how to identify  whether  goods or  services  or both which are to be  delivered
separately in a bundled  sales  arrangement  should be accounted for  separately
because they are  "separate  units of  accounting."  The guidance can affect the
timing of revenue  recognition  for such  arrangements,  even though it does not
change  rules  governing  the  timing or  patterns  of  revenue  recognition  of
individual  items  accounted  for  separately.   The  final  consensus  will  be
applicable to agreements  entered into in fiscal years  beginning after June 15,
2003 with early adoption permitted. Additionally, companies will be permitted to
apply the  consensus  guidance to all existing  arrangements  as the  cumulative
effect of a change in accounting  principle in  accordance  with APB Opinion No.
20,  "Accounting  Changes."  Amtech does not believe the  adoption of EITF 00-21
will have a material impact on its financial position or results of operations.

     In January 2003, the FASB issued  Interpretation No. 46,  "Consolidation of
Variable   Interest   Entities,   an   interpretation   of  ARB  No.  51."  This
Interpretation  addresses the consolidation by business  enterprises of variable
interest entities as defined in the Interpretation.  The Interpretation  applies
immediately to variable  interests in variable  interest entities obtained after
January 31, 2003. For public  enterprises with a variable interest in a variable
interest entity created before February 1, 2003, the  Interpretation  is applied
to the  enterprise  no later than the  beginning of the first  interim or annual
reporting  period  beginning  after June 15, 2003. The  Interpretation  requires
certain disclosures in financial  statements issued after January 31, 2003 if it
is reasonably  possible that a Company will consolidate or disclose  information
about variable  interest  entities when the  Interpretation  becomes  effective.
Amtech currently has no contractual  relationship or other business relationship
with  a  variable   interest   entity  and   therefore   the  adoption  of  this
interpretation  did not have a material effect on Amtech's financial position or
operating results.

ITEM 3. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

     Amtech is exposed to financial market risks,  including  changes in foreign
currency  exchange rates and interest rates. Its operations in the United States
are conducted in United States dollars. Amtech's operation in The Netherlands, a

                                       23

component of the semiconductor equipment segment, conducts business primarily in
the Euro and the United  States  dollar.  The  functional  currency  of Amtech's
Netherlands operation is Euro.

     Amtech  estimates that more than 95% of its transactions are denominated in
one of its two  functional  currencies  or currencies  that have fixed  exchange
rates with one of its functional  currencies.  As of March 31, 2003,  Amtech did
not hold any stand alone or separate derivative  instruments.  Amtech incurred a
net foreign currency transaction gain of $.3 million for the first six months of
fiscal  2003  compared  to a loss of $.1  million  for the same period in fiscal
2002. Amtech's  investment in and advances to its Netherlands'  operation totals
$3.1  million  as of March  31,  2003.  A 10%  change  in the  value of the Euro
relative to the United States dollar would cause a $.3 million foreign  currency
translation adjustment, a type of other comprehensive income (loss), which would
be a direct adjustment to stockholders' equity.

     When the value of the Euro  declines  relative  to the value of the  United
States dollar, operations in The Netherlands can be more competitive against the
United States based equipment suppliers and the cost of purchases denominated in
United  States  dollars  become  more  expensive.  When  the  value  of the Euro
increases  relative to the value of the United States dollar,  operations in The
Netherlands must raise prices to those customers that normally make purchases in
United States dollars,  in order to maintain the same profit margins.  When this
occurs, this operation attempts to have transactions denominated in the Euro and
to increase its purchases  denominated in United States  dollars.  Because it is
difficult to predict the volume of dollar denominated  transactions arising from
The  Netherlands  operations,  Amtech  does not hedge  against  the  effects  of
exchange rate changes on future  transactions.  The Euro is at a relatively high
value  relative to the United States dollar at March 31, 2003,  giving  Amtech's
operation  based  in The  Netherlands  a  competitive  disadvantage  over  other
suppliers based in the United States.

ITEM 4. CONTROLS AND PROCEDURES

     Based on their evaluation as of a date within 90 days of the filing date of
this  report,  Amtech's  principal  executive  officer and  principal  financial
officer have  concluded  that  Amtech's  disclosure  controls and  procedures as
defined in Rules  13a-14(c) and 15d-14(c)  under the Securities  Exchange Act of
1934 (the Exchange Act) are effective to ensure that information  required to be
disclosed by Amtech in reports  that it files or submits  under the Exchange Act
is  recorded,  processed,  summarized  and  reported  within  the  time  periods
specified in Securities and Exchange Commission rules and forms.

     There were no significant changes in Amtech's internal controls or in other
factors that could significantly affect these controls subsequent to the date of
their  evaluation  and up to the  filing  date of  this  report.  There  were no
significant  deficiencies  or material  weaknesses,  and therefore there were no
corrective actions taken.

     It should be noted that any system of controls,  however well  designed and
operated,  can provide only  reasonable,  and not absolute,  assurance  that the
objectives of the system are met. In addition,  the design of any control system
is based in part upon certain assumptions about the likelihood of future events.
Because of these and other inherent limitations of control systems, there can be
no assurance  that any design will  succeed in achieving  its stated goals under
all potential future conditions, regardless of how remote.

                                       24

                           PART II. OTHER INFORMATION

ITEM 1. LEGAL PROCEEDINGS.

                  On or about August 31, 2000, a "P.R. Hoffman Machine Products"
was one of 11  companies  named in a legal  action  brought  by North  Middleton
Township in Carlisle,  Pennsylvania,  the owner of a landfill allegedly found to
be contaminated.  No detailed  allegations have been filed as part of this legal
action,  which  appears to have been filed to preserve  the right to file claims
for  contribution  to the clean-up of the landfill at a later date.  The Company
acquired  the  assets  of  P.R.  Hoffman  Machine  Products,  Inc.  in an  asset
transaction  consummated  on July 1, 1997.  The  landfill was closed and has not
been used by P.R.  Hoffman since  sometime  prior to completion of the Company's
acquisition. Therefore, the Company believes that the named company is the prior
owner of the acquired  assets.  Under the terms of the Asset Purchase  Agreement
governing  the  acquisition,  the prior owner,  P.R.  Hoffman  Machine  Products
Corporation,  is  obligated  to  indemnify  the Company for any  breaches of its
representations  and  warranties  in the  Asset  Purchase  Agreement,  including
representations  relating to environmental matters. In accordance with the terms
of the Asset Purchase  Agreement,  the Company has provided  notice to the prior
owner of P.R.  Hoffman Machine  Products  Corporation of the Company's intent to
seek  indemnification  from such owner for any  liabilities  resulting from this
legal action.  Based on  information  available to the Company as of the date of
this report,  management believes the costs, if any, to resolve this matter will
not be material to the  Company's  business,  results of operations or financial
position.

ITEM 4. SUBMISSION OF MATTERS TO A VOTE OF SECURITY HOLDERS

     On February 28, 2003, the Company held its annual  meeting of  shareholders
at  which  2,473,560,   or  92%,  of  the  2,689,571  shares   outstanding  were
represented,  either by proxy or those persons in attendance at the meeting. The
following  persons were  elected to the board of directors  with shares voted as
follows:

     Election of Directors                For            Withheld
     ---------------------             ---------         --------
     Jong S. Whang                     2,458,901          14,899
     Robert T. Hass                    2,458,835          14,873
     Alvin Katz                        2,456,123          17,267
     Bruce R. Thaw                     2,458,544          14,798

ITEM 6. EXHIBITS AND REPORTS ON FORM 8-K.

(a)  Exhibits

     Exhibit 99.1 - Certification Pursuant to 18 U.S.C. Section 1350, as Adopted
       Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002

     Exhibit 99.2 - Certification Pursuant to 18 U.S.C. Section 1350, as Adopted
       Pursuant to Section 906 of the Sarbanes - Oxley Act of 2002

(b)  Reports on Form 8-K

     No  Current  Reports  on Form 8-K  were  filed by the  Company  during  the
quarterly period ended March 31, 2003.

                                       25

                                    SIGNATURE

     Pursuant to the  requirements  of the Securities  Exchange Act of 1934, the
registrant  has duly  caused  this  report  to be  signed  on its  behalf by the
undersigned thereunto duly authorized.


AMTECH SYSTEMS, INC.

By /s/ Robert T. Hass                                     Dated: May 15, 2003
   ------------------------------------------                    ------------
   Robert T. Hass, Vice-President-Finance and
   (Chief Financial and Accounting Officer)

                                       26

                SARBANES-OXLEY ACT SECTION 302(a) CERTIFICATIONS

     I, Jong S. Whang, certify that:

     1. I have reviewed this  quarterly  report on Form 10-Q of Amtech  Systems,
Inc.;

     2. Based on my knowledge, this quarterly report does not contain any untrue
statement of a material fact or omit to state a material fact  necessary to make
the statements made, in light of the  circumstances  under which such statements
were made, not  misleading  with respect to the period covered by this quarterly
report;

     3. Based on my knowledge,  the financial  statements,  and other  financial
information  included in this quarterly  report,  fairly present in all material
respects the financial  condition,  results of operations  and cash flows of the
registrant as of, and for, the periods presented in this quarterly report;

     4. The  registrant's  other  certifying  officer and I are  responsible for
establishing and maintaining  disclosure  controls and procedures (as defined in
Exchange Act Rules 13a-14 and 15d-14) for the registrant and have:

     a) designed such disclosure controls and procedures to ensure that material
information relating to the registrant, including its consolidated subsidiaries,
is made known to us by others  within those  entities,  particularly  during the
period in which this quarterly report is being prepared;

     b) evaluated the effectiveness of the registrant's  disclosure controls and
procedures  as of a date  within  90  days  prior  to the  filing  date  of this
quarterly report (the "Evaluation Date"); and

     c)  presented  in  this  quarterly   report  our   conclusions   about  the
effectiveness of the disclosure  controls and procedures based on our evaluation
as of the Evaluation Date;

     5. The registrant's other certifying officer and I have disclosed, based on
our most recent evaluation, to the registrant's auditors and the audit committee
of  registrant's  board of  directors  (or  persons  performing  the  equivalent
functions):

     a) all  significant  deficiencies  in the design or  operation  of internal
controls  which  could  adversely  affect  the  registrant's  ability to record,
process,  summarize  and  report  financial  data  and have  identified  for the
registrant's auditors any material weaknesses in internal controls; and

     b) any fraud,  whether or not material,  that involves  management or other
employees who have a significant role in the registrant's internal controls; and

     6. The registrant's  other certifying  officer and I have indicated in this
quarterly report whether there were significant  changes in internal controls or
in other factors that could significantly affect internal controls subsequent to
the date of our most recent  evaluation,  including any corrective  actions with
regard to significant deficiencies and material weaknesses.

Date: May 15, 2003                      By: /s/ Jong S. Whang
                                            ------------------------------------
                                            Jong S. Whang, President

                                       27

     I, Robert T. Hass, certify that:

     1. I have reviewed this  quarterly  report on Form 10-Q of Amtech  Systems,
Inc.;

     2. Based on my knowledge, this quarterly report does not contain any untrue
statement of a material fact or omit to state a material fact  necessary to make
the statements made, in light of the  circumstances  under which such statements
were made, not  misleading  with respect to the period covered by this quarterly
report;

     3. Based on my knowledge,  the financial  statements,  and other  financial
information  included in this quarterly  report,  fairly present in all material
respects the financial  condition,  results of operations  and cash flows of the
registrant as of, and for, the periods presented in this quarterly report;

     4. The  registrant's  other  certifying  officer and I are  responsible for
establishing and maintaining  disclosure  controls and procedures (as defined in
Exchange Act Rules 13a-14 and 15d-14) for the registrant and have:

     a) designed such disclosure controls and procedures to ensure that material
information relating to the registrant, including its consolidated subsidiaries,
is made known to us by others  within those  entities,  particularly  during the
period in which this quarterly report is being prepared;

     b) evaluated the effectiveness of the registrant's  disclosure controls and
procedures  as of a date  within  90  days  prior  to the  filing  date  of this
quarterly report (the "Evaluation Date"); and

     c)  presented  in  this  quarterly   report  our   conclusions   about  the
effectiveness of the disclosure  controls and procedures based on our evaluation
as of the Evaluation Date;

     5. The registrant's other certifying officer and I have disclosed, based on
our most recent evaluation, to the registrant's auditors and the audit committee
of  registrant's  board of  directors  (or  persons  performing  the  equivalent
functions):

     a) all  significant  deficiencies  in the design or  operation  of internal
controls  which  could  adversely  affect  the  registrant's  ability to record,
process,  summarize  and  report  financial  data  and have  identified  for the
registrant's auditors any material weaknesses in internal controls; and

     b) any fraud,  whether or not material,  that involves  management or other
employees who have a significant role in the registrant's internal controls; and

     6. The registrant's  other certifying  officer and I have indicated in this
quarterly report whether there were significant  changes in internal controls or
in other factors that could significantly affect internal controls subsequent to
the date of our most recent  evaluation,  including any corrective  actions with
regard to significant deficiencies and material weaknesses.

Date: May 15, 2003                      By: /s/ Robert T. Hass
                                            ------------------------------------
                                            Robert T. Hass, Vice President -
                                            Finance and Chief Financial Officer

                                       28

                                  EXHIBIT INDEX
                                                                        PAGE OR
EXHIBIT                                                                METHOD OF
NUMBER                 DESCRIPTION                                      FILING
- ------                 -----------                                      ------
99.1      Certification of Principal Executive Officer pursuant to
          Section 906 of the Sarbanes-Oxley Act of 2002                    *


99.2      Certification of Principal Financial Officer pursuant to
          Section 906 of the Sarbanes-Oxley Act of 2002                    *

*    Filed herewith.

                                       29