SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549


                                    Form 8-K

                                 CURRENT REPORT

                     Pursuant to Section 13 or 15(d) of the
                         Securities Exchange Act of 1934



Date of Report (Date of earliest event reported)            January 29, 1996
                                                            ----------------



                              AMTECH SYSTEMS, INC.
- --------------------------------------------------------------------------------
             (Exact name of registrant as specified in its charter)



         Arizona                        0-11412                 86-0411215
- --------------------------------------------------------------------------------
(State or other jurisdiction          (Commission              (IRS Employer
of incorporation)                    File Number)            Identification No.)



131 South Clark Drive, Tempe. Arizona                             85281
- --------------------------------------------------------------------------------
(Address of principal executive offices)                        (Zip Code)



Registrant's telephone number, including area code           (602) 967-5146
                                                             --------------



                                 Not applicable
               ----------------------------------------------------
              (Former name or former address, if changed since last
                                    report.)



Item 2.  Acquisition or Disposition of Assets.

         On December 29, 1995, Amtech Systems,  Inc. ("Amtech" or the "Company")
entered into an Agreement and Plan of  Reorganization  and Corporate  Separation
with  Eugene R.  Hartman,  a Vice  President  and  director  of  Amtech  and the
President of Echelon (the  "Agreement"),  to  split-off  the contract  personnel
business  operated by Amtech through  Echelon  Service  Company,  a wholly-owned
subsidiary of the Company  ("Echelon").  On January 29, 1996, the parties closed
the split-off  transaction (the "Split-Off")  effective as of December 31, 1995.
The Company transferred all of the stock of Echelon held by it to Mr. Hartman in
exchange  for  98,016  shares of Amtech  Common  Stock held by Mr.  Hartman  and
additional cash consideration. The total consideration for the Echelon stock was
valued at approximately  $800,000. A cash dividend in the amount of $393,368 was
distributed  by  Echelon  to  Amtech  prior to the  Spilt-Off.  Pursuant  to the
Agreement,  Mr.  Hartman  acquired  all of the  assets  and  assumed  all of the
liabilities of Echelon.

         Prior to entering  into the Echelon  Agreement  with Mr.  Hartman,  the
Company sought and negotiated offers from third parties. However, in the opinion
of the Board,  the best offer was tendered by Mr.  Hartman.  The transaction was
conducted at arms' length,  and  management  does not believe that a better deal
could have been made with unrelated third parties.

         As of January  26,  1996,  Mr.  Hartman  has  resigned as an officer of
Amtech.  Mr. Hartman will cease to be a director of the Company upon election of
a  successor  at the  Company's  annual  meeting of  shareholders  to be held on
February 29, 1996.

Item 7.   Financial Statements and Exhibits.

    (a)      Financial Statements of Business Sold.  Not applicable

    (b)      Pro Forma Financial Information.
                                                                Method of Filing
                                                                ----------------
             (1)  Pro Forma Balance Sheet as of 
                  September 30, 1995                             Filed herewith

             (2)  Pro Forma Statement of Operations
                  for the Year Ended September 30, 1995          Filed herewith

             (3)  Notes to Pro Forma Financial Statements        Filed herewith

                  
    (c)      Exhibits. 
                                                                
Exhibit No.  Description                                        Method of Filing
- ----------   -----------                                        ----------------

     1       Agreement and Plan of Reorganization and            Filed herewith.
             Corporate Separation between Amtech
             Systems, Inc. and Eugene R. Hartman


                                        2

                                    SIGNATURE

         Pursuant to the  requirements  of the Securities  Exchange Act of 1934,
the  registrant  has duly  caused  this report to be signed on its behalf by the
undersigned hereunto duly authorized.

                                        AMTECH SYSTEMS, INC.



Date:   February 9, 1996                By       /s/ Robert T. Hass
                                                -------------------------------
                                                 Robert T. Hass
                                                 Vice President-Finance (Chief
                                                 Financial & Accounting Officer)

                                        3



                        AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                                PRO FORMA BALANCE SHEET
                                   SEPTEMBER 30, 1995
                                     (In Thousands)


                                                                      PRO FORMA
                                             ACTUAL                  ADJUSTMENTS         PRO FORMA
                                          -----------               -----------        -----------
                                                                               

    CURRENT ASSETS:
      Cash and Cash Equivalents                  $834      1)              ($45)              $789
      Short-term Investments                    3,671                                        3,671
      Accounts Receivable                       2,287      1)              (394)             1,893
      Inventories                                 524                                          524
      Deferred Income Taxes                       165                                          165
      Prepaid Expenses                             45      1)                (6)                39
                                          -----------               -----------        -----------
           Total Current Assets                 7,526                      (445)             7,081
                                          -----------               -----------        -----------

    PROPERTY AND EQUIPMENT -
      At Cost                                   1,149      1)               (56)             1,093
      Less Accumulated
       Depreciation and
       Amortization                              (499)     1)               (38)             (461)
                                          -----------               -----------        -----------
                                                  650                       (18)               632
                                          -----------               -----------        -----------

    PURCHASE PRICE IN EXCESS
    OF NET ASSETS ACQUIRED                         85      1)               (85)                 0
                                          -----------               -----------        -----------

    OTHER ASSETS                                  104      1)               (17)                87
                                          -----------               -----------        -----------
                                               $8,365                     ($565)            $7,800
                                          ===========               ===========        ===========


    CURRENT LIABILITIES:
      Accounts Payable                           $528      1)                (1)               527
      Accrued Liabilities                         610      1)               (91)               519
      Income Taxes Payable                        225                                          225
                                          -----------               -----------        -----------
           Total Current Liabilities            1,363                       (92)             1,271
                                          -----------               -----------        -----------

    STOCKHOLDERS' INVESTMENT:
      Common Stock                                 22      1)                (1)                21
      Additional Paid-in Capital                7,872      1)              (808)             7,064
      Foreign Currency Translation                 29                                           29
      Accumulated Deficit                        (921)     1)               336               (585)
                                          -----------               -----------        -----------
                                                7,002                      (473)             6,529
                                          -----------               -----------        -----------
                                               $8,365                     ($565)            $7,800
                                          ===========               ===========        ===========



                 SEE ACCOMPANYING NOTES TO PRO FORMA FINANCIAL STATEMENTS


                      AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                        PRO FORMA STATEMENT OF OPERATIONS
                    FOR THE YEAR ENDED SEPTEMBER 30, 1995 
               (In Thousands, except shares and per share amounts)


                                                                                PRO FORMA
                                                       ACTUAL                  ADJUSTMENTS         PRO FORMA
                                                    -----------               -----------        -----------
                                                                                            
    SEMICONDUCTOR EQUIPMENT:
      Net Product Sales                                  $6,864                                       $6,864
      Cost of Product Sales                               4,559                                        4,559
                                                    -----------               -----------        -----------
        Gross Margin                                      2,305                         0              2,305
      Selling and General                                 1,970                                        1,970
                                                    -----------               -----------        -----------
      Operating Profit                                      335                         0                335
                                                    -----------               -----------        -----------

    GENERAL CORPORATE EXPENSES                              295                                          295
    INTEREST INCOME-NET                                     221                                          221
                                                    -----------               -----------        -----------
    INCOME FROM CONTINUING
      OPERATIONS BEFORE INCOME TAXES                        261                         0                261

    INCOME TAX PROVISION                                     90                                           90
                                                    -----------               -----------        -----------
    INCOME FROM CONTINUING OPERATIONS                       171                         0                171
                                                    -----------               -----------        -----------

    DISCONTINUED TECHNICAL CONTRACT PERSONNEL:
      Net Revenues                                        4,548      2)            (4,548)                 0
      Cost of Revenues                                    4,005      2)            (4,005)                 0
                                                    -----------               -----------        -----------
        Gross Margin                                        543                      (543)                 0
      Selling and General                                   457      2)              (457)                 0
                                                    -----------               -----------        -----------
    INCOME FROM DISCONTINUED
      OPERAITONS BEFORE INCOME TAXES                         86                       (86)                 0

    INCOME TAX PROVISION                                     30                       (30)                 0
                                                    -----------               -----------        -----------
    INCOME FROM DISCONTINUED OPERATIONS                      56                       (56)                 0
                                                    -----------               -----------        -----------

    NET INCOME                                             $227                      ($56)              $171
                                                    ===========               ===========        ===========

    PRIMARY EARNINGS PER SHARE:
      INCOME FROM CONTINUING OPERATIONS                   $0.09                                        $0.09
      NET INCOME                                          $0.12                                        $0.09
      AVERAGE OUTSTANDING SHARES                      1,901,426                                    1,901,426


    PRIMARY EARNINGS PER SHARE:
      INCOME FROM CONTINUING OPERATIONS                   $0.09                                        $0.09
      NET INCOME                                          $0.12                                        $0.09
      AVERAGE OUTSTANDING SHARES                      1,901,426                                    1,901,426

 

                  SEE ACCOMPANYING NOTES TO PRO FORMA FINANCIAL STATEMENTS


                          AMTECH SYSTEMS, INC. AND SUBSIDIARIES
                         NOTES TO PRO FORMA FINANCIAL STATEMENTS
                                   SEPTEMBER 30, 1995


    Transaction Involving Disposition of Assets:

     1)   On December 31, 1995, Amtech Systems, Inc. ("Amtech" or the "Company")
          entered into an Agreement  and Plan of  Reorganization  and  Corporate
          Separation  with Eugene R. Hartman,  a Vice  President and director of
          the  Company  and the  President  of  Echelon  (the  "Agreement"),  to
          split-off  the  contract  personnel  business  operated by the Company
          through  Echelon  Service  Company,  a wholly-owned  subsidiary of the
          Company  ("Echelon").  On January 29,  1996,  the  parties  closed the
          split-off  transaction (the "Split-Off")  effective as of December 31,
          1995.  A cash  dividend in the amount of $393,368 was  distributed  by
          Echelon to Amtech  prior to the  Split-off.  At  closing,  the Company
          transferred  all of the stock of Echelon held by it to Mr.  Hartman in
          exchange for 98,016 shares of Amtech Common Stock held by Mr. Hartman.
          This pro forma entry  reflects the  disposition  of all the assets and
          liabilities  of  Echelon  Service  Company,  less  the  $393,368  cash
          dividend,  in exchange for the Amtech Common Stock.  The Split-Off has
          been  structured  to be a tax-free  reorganization  and,  as such,  no
          provision  for  income  taxes  has been  recognized  in the pro  forma
          balance sheet.


    2)   The results of operations for the year ended  September 30, 1995,  were
         prepared on a pro forma basis as though the disposition of the contract
         personnel operations operated through Echelon had occurred on September
         30, 1994.