As filed with the Securities and Exchange Commission on August 9, 1996
                                                   Registration No. 33-_________
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                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549
                              --------------------

                                    FORM S-8
                          REGISTRATION STATEMENT UNDER
                           THE SECURITIES ACT OF 1933
                              --------------------


                              AMTECH SYSTEMS, INC.
- --------------------------------------------------------------------------------
             (Exact name of Registrant as specified in its charter)

           Arizona                                             86-0411215
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 (State or other jurisdiction of                             (I.R.S. Employer
 incorporation or organization)                              Identification No.)

131 South Clark Drive, Tempe, Arizona                                 85281
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     (Address of Principal Executive Offices)                        (Zip Code)

        Amended and Restated 1995 Stock Option Plan/1995 Stock Bonus Plan
- --------------------------------------------------------------------------------
                            (Full title of the plan)

                                  Jong S. Whang
                                    President
                              Amtech Systems, Inc.
                              131 South Clark Drive
                              Tempe, Arizona 85281
- --------------------------------------------------------------------------------
                     (Name and address of agent for service)

                                 (602) 967-5146
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          (Telephone number, including area code, of agent for service)

                                  With copy to:

                          Christopher D. Johnson, Esq.
                            Squire, Sanders & Dempsey
                       40 North Central Avenue, Suite 2700
                             Phoenix, Arizona 85004
                                 (602) 528-4000

Approximate Date of Commencement of Proposed Sale: As soon as practicable  after
the Registration Statement becomes effective.


                         CALCULATION OF REGISTRATION FEE

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                                      Proposed    Proposed
    Title of                      Maximum      Maximum
   Securities       Amount        Offering    Aggregate     Amount of
      To Be         To Be          Price      Offering     Registration
   Registered     Registered    Per Share *    Price *         Fee
   ----------     ----------    -----------  ----------    ------------

Common Stock,      320,000        $4.375     $1,400,000         $483
$.01 par value



- -------------------------

*    Estimated  solely  for  the  purpose  of  calculating  the  amount  of  the
     registration fee, pursuant to Rules 457(c) and 457(h) of the Securities Act
     of 1933, on the basis of the average of the bid and asked prices for shares
     of Common Stock on August 6, 1996.

================================================================================
                                        2

                                EXPLANATORY NOTE

         The  Amended and  Restated  1995 Stock  Option  Plan (the "1995  Plan")
authorizes  the grant of up to 320,000  shares of Common Stock  (adjusted  for a
two-for-one  stock split of the Company's Common Stock effected March 29, 1996).
The 1995  Stock  Bonus Plan (the  "Bonus  Plan")  authorizes  the grant of up to
320,000  shares of the Common Stock  (adjusted for a two-for-one  stock split of
the Company's Common Stock effected March 29, 1996),  less that number of shares
of Common Stock issued or issuable  pursuant to options  granted  under the 1995
Plan.  Accordingly,  the Bonus Plan and the 1995 Plan effectively share the same
pool of reserved Common Stock. The maximum number of shares of Common Stock that
may be issued under the 1995 Plan and the Bonus Plan is 320,000 shares.


                                     PART I

              INFORMATION REQUIRED IN THE SECTION 10(A) PROSPECTUS


         The documents  containing the information  specified in Part I, Items 1
and 2, will be delivered to employees in accordance with Form S-8 and Securities
Act Rule 428.
                                        3

                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT



Item 3.       Incorporation of Certain Documents by Reference.
              ------------------------------------------------

              The following  documents are hereby incorporated by reference into
this Registration Statement: (a) the Registrant's Annual Report on Form 10-K for
the  fiscal  year ended  September  30,  1995;  (b) all  reports  filed with the
Securities  and Exchange  Commission  pursuant to Section  13(a) or 15(d) of the
Securities  Exchange Act of 1934  subsequent to September 30, 1995;  and (c) the
description  of the  Registrant's  capital stock  contained in the  Registrant's
Registration  Statement  on Form 8-A  filed  with the  Securities  and  Exchange
Commission pursuant to Section 12(g) of the Securities Exchange Act of 1934.

              All documents  subsequently  filed by the  Registrant  pursuant to
Sections 13(a), 13(c), 14 or 15(d) of the Securities Exchange Act of 1934, prior
to the filing of a post-effective amendment to this Registration Statement which
indicates that all securities  offered have been sold or which  deregisters  all
securities  then  remaining  unsold,  shall  be  deemed  to be  incorporated  by
reference in this  Registration  Statement and to be a part hereof from the date
of filing such documents.

Item 4.       Description of Securities.  Not applicable.
              --------------------------                  

Item 5.       Interests of Named Experts and Counsel.  Not applicable.
              ---------------------------------------                 

Item 6.       Indemnification of Directors and Officers.
              ------------------------------------------

              The right of the  shareholders  to sue any director for misconduct
in  conducting  the  affairs  of the  Company  is  limited  by Article 14 of the
Company's  Articles of  Incorporation  and Arizona  statutory law to actions for
damages resulting from a breach of a director's fiduciary duty of loyalty,  acts
or omissions  not in good faith or involving  intentional  misconduct or knowing
violations of the law, the unlawful payment of dividends or stock repurchases or
transactions in which a director receives an improper personal benefit. Ordinary
negligence is not a ground for such a suit.

              The  Company  also has the  right,  pursuant  to Article 11 of the
Company's Articles of Incorporation, to indemnify any present or former director
or officer of the Company for all expenses  incurred by them in connection  with
any legal action brought or threatened  against such person for or on account of
any action or omission alleged to have been committed while acting in the course
and scope of the  person's  duties,  if the person  acted in good faith and in a
manner which the person reasonably  believed to be in or not opposed to the best
interests  of  the  Company,  and  with  respect  to  criminal  actions,  had no
reasonable  cause to believe the person's  conduct was  unlawful,  provided that
such  indemnification  is made pursuant to then  existing  provisions of Arizona
statutory law at the time of any such indemnification. The statute does
                                        4

not limit the liability of directors or officers for monetary  damages under the
Federal securities laws.

              Insofar  as  indemnification  for  liabilities  arising  under the
Securities  Act of 1933 may be  permitted  to  directors,  officers  or  persons
controlling  the Company  pursuant to the foregoing  provision,  the Company has
been informed that in the opinion of the Securities and Exchange Commission such
indemnification  is  against  public  policy  as  expressed  in such  Act and is
therefore unenforceable.

Item 7.       Exemption from Registration Claimed.  Not applicable.
              ------------------------------------                 

Item 8.       Exhibits.
              ---------

              Exhibit Index located at Page 8.

Item 9.       Undertakings.
              -------------

              (a)     The undersigned Registrant hereby undertakes:

                      (1) To file,  during any  period in which  offers or sales
are being made, a post-effective amendment to this registration statement:

                               (i) To include any prospectus required by Section
                      10(a)(3) of the Securities Act of 1933;

                               (ii) To  reflect in the  prospectus  any facts or
                      events   arising   after   the   effective   date  of  the
                      registration  statement (or the most recent post-effective
                      amendment   thereof)   which,   individually   or  in  the
                      aggregate,   represent   a   fundamental   change  in  the
                      information set forth in the registration statement;

                               (iii) To include any  material  information  with
                      respect  to  the  plan  of  distribution   not  previously
                      disclosed  in the  registration  statement or any material
                      change to such information in the registration statement;

provided, however, that paragraphs (i) and (ii) do not apply if the registration
statement is on Form S-3 or Form S-8 and the information required to be included
in a  post-effective  amendment  by those  paragraphs  is  contained in periodic
reports filed by the  Registrant  pursuant to Section 13 or Section 15(d) of the
Securities  Exchange  Act of 1934  that are  incorporated  by  reference  in the
registration statement.

                      (2) That,  for the purpose of  determining  any  liability
under the Securities Act of 1933,  each such  post-effective  amendment shall be
deemed to be a new  registration  statement  relating to the securities  offered
therein,  and the offering of such securities at that time shall be deemed to be
the initial bona fide offering thereof.

                      (3)  To   remove   from   registration   by   means  of  a
post-effective  amendment any of the securities  being  registered  which remain
unsold at the termination of the offering.
                                        5

              (b)  The  undersigned   Registrant  hereby  undertakes  that,  for
purposes of determining  any liability  under the  Securities Act of 1933,  each
filing of the  Registrant's  annual report  pursuant to Section 13(a) or Section
15(d) of the Securities Exchange Act of 1934 (and, where applicable, each filing
of an employee  benefit  plan's annual  report  pursuant to Section 15(d) of the
Securities  Exchange  Act of 1934)  that is  incorporated  by  reference  in the
registration  statement  shall  be  deemed  to be a new  registration  statement
relating to the securities offered therein,  and the offering of such securities
at that time shall be deemed to be the initial bona fide offering thereof.

              (c) Insofar as indemnification  for liabilities  arising under the
Securities Act of 1933 may be permitted to directors,  officers and  controlling
persons of the Registrant  pursuant to the foregoing  provisions,  or otherwise,
the  Registrant  has been  advised  that in the  opinion of the  Securities  and
Exchange  Commission such  indemnification is against public policy as expressed
in the Act and is,  therefore,  unenforceable.  In the  event  that a claim  for
indemnification  against  such  liabilities  (other  than  the  payment  by  the
Registrant of expenses  incurred or paid by a director,  officer or  controlling
person of the  Registrant  in the  successful  defense  of any  action,  suit or
proceeding)  is  asserted by such  director,  officer or  controlling  person in
connection with the securities being registered,  the Registrant will, unless in
the opinion of its counsel the matter has been settled by controlling precedent,
submit to a court of  appropriate  jurisdiction  the  question  of whether  such
indemnification  by it is against public policy as expressed in the Act and will
be governed by the final adjudication of such issue.
                                        6

                                   SIGNATURES

              Pursuant to the  requirements  of the  Securities Act of 1933, the
Registrant certifies that it has reasonable grounds to believe that it meets all
of the requirements for filing on Form S-8 and has duly caused this Registration
Statement  to be  signed  on its  behalf  by  the  undersigned,  thereunto  duly
authorized,   in  the   City  of   Tempe,   and  the   State  of   Arizona,   on
August 7, 1996.

                              AMTECH SYSTEMS, INC.
                              an Arizona corporation



                              By /s/ Jong S. Whang
                                 -----------------------------------------------
                                     Jong  S. Whang, President

                            SPECIAL POWER OF ATTORNEY

         KNOW ALL MEN BY THESE PRESENTS,  that the undersigned,  constitutes and
appoints Jong S. Whang and Robert T. Hass, and each of them, his true and lawful
attorney-in-fact  and agent with full power of substitution and  resubstitution,
for him and in his name, place and stead, in any and all capacities, to sign any
and all  amendments  (including  post-effective  amendments)  to this  Form  S-8
Registration Statement,  and to file the same with all exhibits thereto, and all
documents in connection therewith,  with the Securities and Exchange Commission,
granting such  attorneys-in-fact  and agents,  and each of them,  full power and
authority to do and perform each and every act and thing requisite and necessary
to be done in and about the  premises,  as fully and to all intents and purposes
as he might or could do in person, hereby ratifying and confirming all that such
attorneys-in-fact  and agents,  or each of them,  may lawfully do or cause to be
done by virtue hereof.

         Pursuant  to the  requirements  of the  Securities  Act of  1933,  this
Registration  Statement  has been signed below by the  following  persons in the
capacities and on the date indicated.


Signature                          Title                          Date
- ---------                          -----                          ----

/s/ Jong S. Whang       Chairman of the Board,                   August 7, 1996
- -----------------       President (Chief Executive Officer)
Jong S. Whang        


/s/ Robert T. Hass      Vice President-Finance                   August 7, 1996
- ------------------      (Chief Financial & Accounting  
Robert T. Hass          Officer) and Director          
                     

/s/ Donald F. Johnston  Director                                 August 7, 1996
- ----------------------  
Donald F. Johnston


/s/ Alvin Katz          Director                                 August 7, 1996
- -------------- 
Alvin Katz


/s/ Bruce R. Thaw       Director                                 August 7, 1996
- -----------------       
Bruce R. Thaw
                                        7

                                  EXHIBIT INDEX


    Exhibit                                                                                       Page or
    Number                                 Description                                        Method of Filing
    ------                                 -----------                                        ----------------
                                                                                       
      4.1          Amended and Restated 1995 Stock Option Plan,                                      *
                   as amended

      4.2          Form of Incentive Stock Option Agreement                                          *

      4.3          Form of Non-Statutory Stock Option Agreement                                      *

      4.4          1995 Stock Bonus Plan                                                             *

       5           Form of opinion rendered by Squire, Sanders &                                     *
                   Dempsey, counsel for the Registrant (including
                   consent)

      23.1         Consent of Arthur Andersen LLP                                                    *

      23.2         Consent of Counsel                                                          See Exhibit 5

       24          Powers of Attorney                                                        See Signature Page

- ------------------

*  Filed herewith.
                                        8