EXHIBIT 4.4

                              AMTECH SYSTEMS, INC.
                              1995 STOCK BONUS PLAN


      1. Purpose. The purpose of this 1995 Stock Bonus Plan ("Plan)" is to
advance the interest of Amtech Systems, Inc. (the "Company") by inducing persons
of  outstanding  ability  to remain as  employees  of the  Company  by  granting
additional  compensation for services which they have rendered or will hereafter
render.  This is  accomplished  by providing  for the issuance of the  Company's
common stock, $.01 par value (the "Common Stock"), to qualified employees.

         2.  Administration.  The Plan shall be administered by the Compensation
and Option  Committee of the  Company's  Board of Directors  (the  "Committee").
Except as specifically  provided,  the  interpretation  and  construction by the
Committee  of any  provision of the Plan or of any Common Stock issued under the
Plan shall be final,  conclusive and binding upon all persons. The Committee may
delegate  non-discretionary  administrative  duties  to  such  employees  of the
Company as it shall deem proper,  but only the  Committee can issue Common Stock
bonuses under the Plan.

         3. Shares  Subject to the Plan. The stock subject to issuance under the
Plan shall be shares of the  Company's  Common  Stock,  whether  authorized  but
unissued or held in the  Company's  treasury.  The  maximum  number of shares of
Common Stock which may be issued  pursuant to the Plan shall not exceed  320,000
shares,  less the number of options outstanding or exercised under the Company's
Amended and Restated 1995 Stock Option Plan.

         4. Eligibility. The class of persons which shall be eligible to receive
stock  bonuses  under the Plan  shall be  salaried  full-time  employees  of the
Company or any subsidiary corporation of the Company who either (i) are officers
of the Company or a  subsidiary  corporation  of the  Company,  or (ii)  perform
duties of a supervisory  nature for the Company or a subsidiary  corporation  of
the Company.

         5. Grant of Stock Bonuses. Bonuses may be granted under the Plan at any
time and from time to time before  termination  of the Plan.  Each Common  Stock
bonus  granted  under the Plan shall be authorized by the Committee and shall be
evidenced by a duly adopted  resolution of either the Committee or the Company's
Board of Directors.

         6. Conditions of Grant. The Company shall not be obligated to issue any
shares of Common  Stock  upon the grant of a stock  bonus  unless  the shares of
Common Stock have been  registered  with the Securities and Exchange  Commission
pursuant to the Securities  Act of 1933, as amended (the "Act"),  and applicable
State  securities laws, or are exempt from  registration  under the Act and such
laws,  and the  sale and  issuance  of such  shares  is in  compliance  with all
applicable  State or local  securities  laws. If shares are not registered under
the Act or such laws,  but are exempt from  registration,  the  employee to whom
such stock bonus has been granted shall represent to the Company that the shares
are  being  acquired  for  investment  and  not  with a view  to the  resale  or
distribution  thereof or provide such other  documentation as may be required by
the Company unless in the opinion of counsel to the Company such  representation
or

documentation  is not  necessary  to  comply  with the Act.  Stock  certificates
evidencing  shares  of  Common  Stock  issued  upon the  grant of a stock  bonus
hereunder shall bear a restrictive securities legend substantially as follows:

                  "THE  SHARES  REPRESENTED  BY THIS  CERTIFICATE  HAVE NOT BEEN
                  REGISTERED  UNDER THE SECURITIES  ACT OF 1933, AS AMENDED,  OR
                  UNDER THE SECURITIES LAWS OF ANY STATE OR OTHER  JURISDICTION.
                  THE  SECURITIES  MAY NOT BE SOLD OR  OFFERED  FOR  SALE IN THE
                  ABSENCE  OF  AN  EFFECTIVE   REGISTRATION  STATEMENT  FOR  THE
                  SECURITIES  UNDER THE SECURITIES ACT OF 1933, AS AMENDED,  AND
                  APPLICABLE SECURITIES LAWS OF ANY STATE OR OTHER JURISDICTION,
                  OR AN OPINION OF COUNSEL SATISFACTORY TO THE COMPANY THAT SUCH
                  REGISTRATION IS NOT REQUIRED."

         7.       Termination, Modification and Amendment.

                  (a) The Plan shall terminate on a date which is ten (10) years
from the date of its adoption by the Board of Directors or sooner as provided in
subparagraph  (b) of this  Section 7 (the  "Termination  Date").  No stock bonus
shall be granted after the Termination Date.

                  (b) The Board of Directors  may at any time,  on or before the
Termination   Date,   terminate  the  Plan  or  from  time  to  time  make  such
modifications or amendments to the Plan as it may deem advisable.

                  (c) No  termination,  modification  or  amendment  of the Plan
shall adversely affect any previously issued shares of Common Stock granted as a
stock bonus under the Plan.

         8. Not a Contract of Employment. Nothing contained in the Plan shall be
deemed to  confer  upon any  individual  to whom a stock  bonus  may be  granted
hereunder  any right to remain  the  employ or  service  of the  Company  or any
subsidiary corporation of the Company.

         9.  Indemnification  of Committee.  In addition to such other rights of
indemnification  as they  may  have,  the  members  of the  Committee  shall  be
indemnified by the Company to the extent  permitted under applicable law against
all  costs and  expenses  reasonably  incurred  by them in  connection  with any
action, suit or proceeding to which they or any of them may be a party by reason
of any action taken or failure to act upon or in connection with the Plan or any
rights  granted  thereunder  and against all amounts paid by them in  settlement
thereof or paid by them in satisfaction  of a judgment of any such action,  suit
or  proceeding,  except a judgment  based on a finding  of bad  faith.  Upon the
institution  of any such action,  suit or  proceeding,  the Committee  member or
members shall notify the Company in writing,  giving the Company an  opportunity
at its own cost to defend  the same  before  such  Committee  member or  members
undertake to defend the same on their own behalf.
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         10. Definitions.  For purposes of the Plan, the term "subsidiary" shall
have the same  meaning as  "subsidiary  corporation"  as such term is defined in
Section 424(f) of the Code.

         11.  Governing  Law. The Plan shall be governed  by, and all  questions
arising  hereunder shall be determined in accordance with, the laws of the State
of Arizona.

         Adopted by the Board of Directors on February 10, 1995
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