August 7, 1996


Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C. 20549

    Re:      Amtech Systems, Inc.
             Amended and Restated 1995 Stock Option Plan & 1995 Stock Bonus Plan

Ladies and Gentlemen:

             We have  acted as  counsel  to Amtech  Systems,  Inc.,  an  Arizona
corporation  (the "Company"),  in connection with its Registration  Statement on
Form S-8 (the  "Registration  Statement") filed under the Securities Act of 1933
relating to the  registration  of 320,000  shares of its Common Stock,  $.01 par
value (the "Shares"),  issuable  pursuant to the Company's  Amended and Restated
1995 Stock Option Plan and the 1995 Stock Bonus Plan (the "Plans").

             In that  connection,  we have  examined such  documents,  corporate
records and other  instruments as we have deemed  necessary or  appropriate  for
purposes of this opinion,  including the Articles of Incorporation,  as amended,
and the Bylaws of the Company.

             Based upon the foregoing, we are of the opinion that:

             1. The Company has been duly organized and is validly existing as a
corporation under the laws of the State of Arizona.

             2. The Shares, when issued and sold in accordance with the terms of
the Plans, will be validly issued, fully paid and nonassessable.

             We hereby  consent to the use of this  opinion as an exhibit to the
Registration Statement.

                                                Very truly yours,

                                                SQUIRE, SANDERS & DEMPSEY