EXHIBIT 4.1

                              AMTECH SYSTEMS, INC.

                    NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN


         Purposes  of the Plan.  The  purposes  of this Plan are to attract  and
retain the best available  individuals to serve as  non-employee  members of the
Board of Directors  of Amtech  Systems,  Inc.  (the  "Company"),  to reward such
directors for their  contributions to the profitable growth of the Company,  and
to maximize the identity of interest  between such  directors  and  stockholders
generally.

         1. Definitions. As used herein, the following definitions shall apply:

                  (a) "Board" shall mean the Board of Directors of the Company.

                  (b)  "Company"  shall mean Amtech  Systems,  Inc.,  an Arizona
         corporation.

                  (c)  "Effective  Date"  shall  be the date  that the  Board of
         Directors of the Company adopts this Plan.

                  (d) "Eligible  Director" shall mean (i) those  individuals who
         are serving as non-employee members of the Board on the Effective Date,
         or (ii) those  individuals who are elected or appointed as non-employee
         members  of  the  Board  after  the  Effective  Date,  whether  through
         appointment by the Board or election of the Company's stockholders.

                  (e)  "Exercise  Price"  shall mean,  with respect to Shares of
         Optioned  Stock,  the Fair  Market  Value of such Shares on the date of
         grant of the Option.

                  (f) "Fair Market Value" shall mean, with respect to the date a
         given  Option is granted or  exercised,  the value of the Common  Stock
         determined  by the Board in such  manner as it may deem  equitable  for
         Plan purposes;  provided,  however, that where there is a public market
         for the Common Stock, the Fair Market Value per Share shall be the mean
         of the bid and asked  prices of the Common  Stock on the date of grant,
         as  reported  in the Wall  Street  Journal  (or,  if not  reported,  as
         otherwise  reported by the National  Association of Securities  Dealers
         Automated Quotation System) or, in the event the Common Stock is listed
         on the New York Stock Exchange or the American Stock exchange, the Fair
         Market Value per Share shall be the closing  price on such  exchange on
         the  date of grant  of the  Option,  as  reported  in the  Wall  Street
         Journal.

                  (g)  "Option"  shall mean a right to purchase  Stock,  granted
         pursuant to the Plan.

                  (h)  "Optioned  Stock"  shall  mean the  Stock  subject  to an
         Option.

                  (i)  "Optionee"  shall  mean a  non-employee  director  of the
         Company who has been granted an Option.

                  (j) "Plan" shall mean this Non-Employee Directors Stock Option
         Plan.

                  (k) "Share" shall mean a share of the Stock.

                  (l)  "Stock"  shall  mean  the  Common  Stock  of the  Company
         described in the Certificate of Incorporation of the Company.

                  (m) "Stock Option  Agreement" shall mean the written agreement
         evidencing the grant of an Option.

                  (n)  "Trading  Day" shall mean a day on which the Fair  Market
         Value of the Stock can be determined.

         2.  Common  Stock  Subject  to  the  Plan.  Subject  to  increases  and
adjustments pursuant to Section 9 of the Plan, the number of Shares reserved and
available  for  distribution  under  the  Plan  shall  be two  hundred  thousand
(200,000).  If an Option  shall  expire or become  unexercisable  for any reason
without having been exercised in full,  the  unauthorized  Shares covered by the
Option  shall,  unless the Plan shall have  terminated,  be available for future
grants of Options.

         3. Option Grants.

                  (a) Each  individual  who first  becomes an Eligible  Director
         after the Effective Date,  whether through election by the stockholders
         or appointment of the Board, shall automatically be granted at the time
         of such initial  election or appointment,  an Option to purchase 12,000
         shares of Stock.

                  (b) On the first  business day following the Company's  Annual
         Meeting of Shareholders each year (the "Annual Grant Date"),  beginning
         with March 1, 1997,  each  individual  who is at that time an  Eligible
         Director  shall  automatically  be granted an Option  under the Plan to
         purchase an additional 6,000 shares of Stock;  provided such individual
         (i) has  attended  75% of the meetings of the Board held during the 12-
         month period  immediately  preceding  the Annual Grant Date, or (ii) if
         such  individual  was  appointed  or elected as a director  during such
         12-month  period,  he or she has  attended  75% of the  meetings of the
         Board held during his of her term as a director, and (iii) has attended
         75% of the  meetings  of any  Committee  of the  Board  to  which  such
         individual has been appointed as a member during such 12-month period.

                  (c) The purchase price of Shares subject to an Option shall be
         the Fair Market Value on the date of grant.

                  (d) Each Option  granted  pursuant to this Plan shall vest and
         become exercisable  according to the following schedule,  provided that
         the Optionee remains an Eligible Director at such vesting date:
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Vesting Date                                Percentage of Shares Vesting
- ------------                                ----------------------------

First Anniversary of Grant                             33-1/3%

Second Anniversary of Grant                            66-2/3%

Third Anniversary of Grant                              100%


         4.  Stockholder  Approval.  This  Plan  was  adopted  by the  Board  of
Directors of the Company on December 21, 1995 (the  "Effective  Date").  Options
may be granted under the Plan on and after the Effective Date. The Plan shall be
submitted  for  stockholder  approval at the next  annual or special  meeting of
stockholders.  However, the failure to obtain such approval shall not affect the
effectiveness  of the Plan. No Option may be granted after the expiration of ten
(10) years from the effective date of the Plan; provided, however, that the Plan
and all outstanding Options shall remain in effect until such Options shall have
been exercised, shall have expired or shall otherwise be terminated.

         5. Term; Exercise; Rights as a Stockholder.

                  (a) The term of each  Option  shall be ten (10) years from the
         date of grant thereof. To the extent vested the Option may be exercised
         in whole or in part at any time and during the term of the  Option.  No
         fractional  Shares will be issued  upon  exercise of the Option and, if
         the exercise results in a fractional  interest,  an amount will be paid
         in cash  equal to the value of such  fractional  interest  based on the
         Fair Market Value of the Shares on the date of exercise.

                  (b) An Option shall be deemed to be exercised  upon receipt by
         the Company from the Optionee of written notice of such exercise.  Such
         notice shall be  accompanied  by full payment for the Shares subject to
         such exercise.

         6. Payment. The Exercise Price shall be paid:

                  (a) In United  States  dollars in cash or by check  payable to
         the order of the Company; or

                  (b)  Subject to the  approval  of the Board,  by  delivery  of
         Shares with an aggregate Fair Market Value equal to the Exercise Price;
         or

                  (c) By any combination of (a) and (b) above.

                  The Board shall  determine  acceptable  methods for  tendering
Stock as payment upon exercise of an Option and may impose such  limitations and
prohibitions on the use of Stock to exercise an Option as it deems appropriate.

         7.  Transferability  of Options.  The Option may not be sold,  pledged,
assigned, hypothecated,  transferred, or disposed of in any manner other than by
will or by the laws of descent and  distribution  to the limited extent provided
herein or pursuant to a "qualified  domestic  relations order" as defined by the
Internal Revenue Code or the Employee Retirement Income Security Act
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or the rules thereunder. Except as permitted herein, an Option may be exercised,
during the lifetime of the Optionee,  only by the Optionee or by his guardian or
legal representative.

                  In the event of the Optionee's  death, his or her Option shall
be exercisable,  prior to the expiration of the Option, by the person or persons
to whom his or her  accrued  and  vested  rights  pass by will or by the laws of
descent and distribution.

         8. Adjustments Upon Changes in Capitalization or Merger. Subject to any
required action by the stockholders of the Company, the number of Shares covered
by each outstanding  Option, and the number of Shares which have been authorized
for issuance  under the Plan but as to which no Options have yet been granted or
which have been  returned  to the Plan upon  cancellation  or  expiration  of an
Option, as well as the price per Share covered by each such outstanding  Option,
shall be proportionately  adjusted for any increase or decrease in the number of
issued Shares resulting from a stock split, reverse stock split,  consolidation,
subdivision,  stock dividend,  combination or reclassification of the Shares, or
any other increase or decrease in the number of issued Shares  effected  without
receipt of consideration by the Company;  provided,  however, that conversion of
any  convertible  securities  of the  Company  shall  not be deemed to have been
"effected  without receipt of  consideration."  Such adjustment shall be made by
the Board,  whose  determination  in that  respect  shall be final,  binding and
conclusive.  Except as expressly  provided herein, no issuance by the Company of
shares of stock of any class, or securities  convertible into shares of stock of
any class, shall affect, and no adjustment by reason thereof shall be made, with
respect to the number or price of Shares subject to an Option.

                  In the event of the proposed dissolution or liquidation of the
Company,  all Options will terminate  immediately  prior to the  consummation of
such proposed action,  unless otherwise provided by the Board. The Board may, in
the exercise of its sole discretion in such  instances,  declare that any Option
shall  terminate  as of a date fixed by the Board and give each holder the right
to exercise  the Option as to all or any part  thereof,  including  Shares as to
which the Option would not otherwise be exercisable.  In the event of a proposed
sale of all or substantially all of the assets of the Company,  or the merger of
the Company with or into another corporation,  the Option shall be assumed or an
equivalent Option shall be substituted by such successor corporation or a parent
or subsidiary of such successor corporation, unless the Board determines, in the
exercise of its sole discretion and in lieu of such assumption or  substitution,
that the  holder  shall have the right to  exercise  the Option as to all of the
Shares,  including  Shares  as to  which  the  Option  would  not  otherwise  be
exercisable.  If the Board makes an Option  exercisable in lieu of assumption or
substitution in the event of a merger or sale of assets,  the Board shall notify
the holder that the Option  shall be fully  exercisable  for a period of 30 days
from the date of such notice (but not later than the  expiration  of the term of
the Option), and the Option will terminate upon the expiration of such period.

         9. Amendment and  Termination of the Plan. The Board may amend the Plan
from time to time in such respects as the Board may deem  advisable or terminate
the Plan; provided, however, that amendments to the Plan relating to the amount,
price or  timing of  Option  grants  shall not be made more than once in any six
month  period,  other than  amendments  necessary  to comply with changes in the
Internal  Revenue  Code of 1986,  as amended,  the  Employee  Retirement  Income
Security Act, as amended, or the rules thereunder.  Any amendment or termination
of the Plan shall not affect  Options  already  granted and such  Options  shall
remain  in full  force  and  effect  as if this  Plan  had not been  amended  or
terminated.
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                  Notwithstanding  the foregoing,  revisions or amendments  that
accomplish any of the following  shall require  approval of the  stockholders of
the Company, to the extent required by law, rule or regulation:

                  (a) Materially  increase the benefits accruing to participants
         under the Plan;

                  (b)  Materially  increase  the  number of Shares  which may be
         issued under the Plan;

                  (c)  Materially   modify  the  Plan  as  to  eligibility   for
         participation in the Plan; or

                  (d)  Otherwise  cause  the  Plan to lose its  exemption  under
         Section 16(b) of the Securities  Exchange Act of 1934, as amended,  and
         the rules and regulations promulgated thereunder.

         10.  Conditions  Upon  Issuance of Shares.  Shares  shall not be issued
pursuant to the exercise of an Option unless the exercise of such Option and the
issuance  and  delivery of such Shares  pursuant  thereto  shall comply with all
relevant provisions of law, including,  without limitation the Securities Act of
1933, as amended, the Securities Exchange Act of 1934, as amended, the rules and
regulations promulgated  thereunder,  and the requirements of any stock exchange
or market  system  upon which the  Shares  may be  listed,  and shall be further
subject  to the  approval  of  counsel  for the  Company  with  respect  to such
compliance.

                  As a condition to the  exercise of an Option,  the Company may
require the Optionee to represent  and warrant at the time of any such  exercise
that the Shares are being  purchased only for investment and without any present
intention  to sell or  distribute  such Shares if, in the opinion of counsel for
the Company, such a representation is required or advisable.

                  Inability of the Company to obtain authority from a regulatory
body having jurisdiction,  which authority is deemed by the Company's counsel to
be  necessary  or  advisable  to the  lawful  issuance  and  sale of any  Shares
hereunder,  shall relieve the Company of any liability in respect of the failure
to issue or sell such Shares as to which such requisite authority shall not have
been obtained.

         11. Termination of Option.

                  (a)  Termination as a Director.  If an Optionee ceases to be a
         director, unless such cessation occurs due to death or disability, then
         the Option  shall  terminate on the date thirty days after the date the
         Optionee ceases to be a director.

                  (b) Disability.  Unless otherwise provided in the Stock Option
         Agreement,  in the event an  Optionee  is unable  to  continue  to be a
         member of the Board as a result of his permanent  and total  disability
         (as defined in Section  22(e)(3) of the Internal  Revenue Code of 1986,
         as amended),  he may exercise the Option at any time within twelve (12)
         months  following the date he ceased to be a director,  but only to the
         extent he was  entitled  to  exercise  it on the date he ceased to be a
         director. To
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         the extent that he was not  entitled to exercise the Option on the date
         he ceased to be a  director,  or if he does not  exercise  such  Option
         (which he was entitled to exercise)  within the time specified  herein,
         the Option shall terminate.

                  (c)  Death.  Unless  otherwise  provided  in the Stock  Option
         Agreement,  if an  Optionee  dies  during the term of the  Option,  the
         Option may be exercised at any time within twelve (12) months following
         the date of death, but only to the extent that an Optionee was entitled
         to  exercise  the  Option  on the date of  death.  To the  extent  that
         decedent  was not entitled to exercise the Option on the date of death,
         or if the  Optionee's  estate,  or  person  who  acquired  the right to
         exercise the Option by bequest or  inheritance,  does not exercise such
         Option  (which he was entitled to exercise)  within the time  specified
         herein, the Option shall terminate.

         12.  Option  Agreement.  Options  shall be  evidenced  by Stock  Option
Agreements in such form as the Board shall approve.

         13. Miscellaneous Provisions.

                  (a) Plan  Expense.  Any  expenses of  administering  this Plan
         shall be borne by the Company.

                  (b)   Construction   of  Plan.  The  validity,   construction,
         interpretation,  administration and effect of the Plan and of its rules
         and  regulations,  and rights relating to the Plan, shall be determined
         by the Board in accordance with the laws of the State of Arizona.

                  (c) Taxes.  The  Company  shall be entitled  if  necessary  or
         desirable to pay or withhold the amount of any tax  attributable to the
         delivery  of Common  Shares  under the Plan  after  giving  the  person
         entitled to receive such Shares  notice as far in advance as practical,
         and the  Company may defer  making  delivery of such Shares if any such
         tax may be pending unless and until indemnified to its satisfaction.

                  (d)  Gender.  For  purposes  of this  Plan,  words used in the
         masculine gender shall include the female and neuter,  and the singular
         shall include the plural and vice versa, as appropriate.
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