August 7, 1996



Securities and Exchange Commission
450 Fifth Street, N.W.
Washington, D.C. 20549

         Re:      Amtech Systems, Inc.
                  Non-Employee Directors Stock Option Plan

Ladies and Gentlemen:

         We  have  acted  as  counsel  to  Amtech  Systems,   Inc.,  an  Arizona
corporation  (the "Company"),  in connection with its Registration  Statement on
Form S-8 (the  "Registration  Statement") filed under the Securities Act of 1933
relating to the  registration  of 200,000  shares of its Common Stock,  $.01 par
value (the "Shares"), issuable pursuant to the Company's Non-Employee  Directors
Stock Option Plan (the "Plan").

         In that connection, we have examined such documents,  corporate records
and other instruments as we have deemed necessary or appropriate for purposes of
this  opinion,  including  the Articles of  Incorporation,  as amended,  and the
Bylaws of the Company.

         Based upon the foregoing, we are of the opinion that:

         1. The Company  has been duly  organized  and is validly  existing as a
corporation under the laws of the State of Arizona.

         2. The Shares, when issued and sold in accordance with the terms of the
Plan, will be validly issued, fully paid and nonassessable.

         We hereby  consent  to the use of this  opinion  as an  exhibit  to the
Registration Statement.

                                                     Very truly yours,

                                                     SQUIRE, SANDERS & DEMPSEY